阅读说明：本技术 光束扩散器系统及方法 (Light beam diffuser system and method ) 是由 阿德里安努斯·约翰内斯·帕特鲁斯·玛利亚·维梅尔 米哈伊尔·尤利耶维奇·洛克特夫 德克·安德烈· 于 2018-05-15 设计创作，主要内容包括：一种用以光学扩散光束(L1,L2)的扩散器系统(100)及方法。提供至少两个透射扩散器窗口(11,21)。扩散器窗口(11,21)经设置成依序扩散透射穿过彼等的光束(L1,L2)。扩散器系统(100)经配置为以角速度(ω1,ω2)连续转动扩散器窗口(11,21),用以均匀化透射光束(L1,L2)的扩散图样。扩散器窗口(11,21)经配置为绕着不同的旋转轴线(C1,C2)旋转。不同旋转轴线(C1,C2)互相平行且以径向中心距离(d12)彼此偏离。第一扩散器窗口(11,21)的转动分区与第二转动扩散器窗口(11,21)的转动分区部分重叠。部分重叠的转动分区限定用以均匀化且扩散透射光束(L1,L2)的光束窗口(W12)。(A diffuser system (100) and method for optically diffusing a light beam (L1, L2). At least two transmissive diffuser windows (11,21) are provided. The diffuser windows (11,21) are arranged to sequentially diffuse the light beams (L1, L2) transmitted therethrough. The diffuser system (100) is configured to continuously rotate the diffuser window (11,21) at an angular velocity (ω 1, ω 2) for homogenizing the diffusion pattern of the transmitted light beam (L1, L2). The diffuser windows (11,21) are configured to rotate about different axes of rotation (C1, C2). The different axes of rotation (C1, C2) are parallel to each other and offset from each other by a radial center distance (d 12). The rotational partition of the first diffuser window (11,21) partially overlaps with the rotational partition of the second rotational diffuser window (11, 21). The partially overlapping rotating segments define a beam window (W12) for homogenizing and diffusing the transmitted beam (L1, L2).)

1. A diffuser system (100) for optically diffusing a light beam (L1, L2), the diffuser system (100) comprising at least two transmissive diffuser windows (11,21), wherein the diffuser windows (11,21) are arranged to sequentially diffuse the light beam (L1, L2) transmitted through the diffuser windows (11,21), wherein the diffuser system (100) is configured to continuously rotate the diffuser windows (11,21) with an angular velocity (ω 1, ω 2) for homogenizing a diffusion pattern of the transmitted light beam (L1, L2), wherein the diffuser windows (11,21) are configured to rotate around different rotational axes (C1, C2), wherein the different rotational axes (C1, C2) are parallel to each other and offset from each other with a radial center distance (d12), wherein rotational subareas of the first diffuser window (11) partially overlap rotational subareas of the second rotational diffuser window (12), wherein the rotating sectors that partially overlap define a beam window (W12) to homogenize and diffuse the transmitted light beam (L1, L2), wherein the diffuser window (11,21) is held by a respective rotatable ring (12,22), wherein the rotatable ring (12,22) is configured to rotate within a respective bearing structure (13,23), wherein the radial center distance (D12) is less than a radius (R1, R2) or half a diameter (D1, D2) of the diffuser window (11, 21).

2. A diffuser system (100) according to claim 1, wherein the bearing structures (13,23) of both of the diffuser windows (11,21) are fixed in a common frame (31).

3. The diffuser system (100) of claim 2, wherein the common frame (31) is suspended to have a resonant or natural frequency (Fn), wherein the natural frequency (Fn) is lower than a rotational frequency of the diffuser window (11, 21).

4. The diffuser system (100) of any one of the preceding claims, wherein the light beam window (W12) is larger than a radius (R1, R2) or half the diameter (D1, D2) of the diffuser window (11, 21).

5. The diffuser system (100) according to any one of the preceding claims, comprising a rotating member configured to rotate the diffuser windows (11,21) with the same angular velocity (ω 1 ═ ω 2).

6. The diffuser system (100) according to any one of the preceding claims, comprising a rotation means configured to rotate the diffuser windows (11,21) in the same angular direction.

7. The diffuser system (100) of any one of the preceding claims, wherein a surface of the diffuser window (11,21) is configured to move with a relative surface velocity (V12) that is constant in the light beam window (W12).

8. The diffuser system (100) according to any one of the preceding claims, wherein the diffuser windows (11,21) have the same diameter (D1 ═ D2) or radius (R1 ═ R2).

9. The diffuser system (100) of any one of the preceding claims, wherein the light beam window (W12) has a diameter (D1, D2) that is smaller than a diameter (D1, D2) of the respective diffuser window (11, 21).

10. The diffuser system (100) according to any one of the preceding claims, wherein the diffuser window (11,21) is rotated in a plane.

11. The diffuser system (100) according to any one of the preceding claims, wherein the diffuser windows (11,21) are arranged such that the surfaces of the diffuser windows (11,21) are parallel to each other by an axial distance (Z12), wherein the axial distance (Z12) is less than 50 mm.

12. The diffuser system (100) according to any one of the preceding claims, wherein the diffuser window (11,21) comprises a surface structure for diffusing the transmitted light beam (L1, L2).

13. A lithography system (1000) comprising a diffuser system (100) according to any one of the preceding claims.

14. The lithography system (1000) of claim 13, wherein a surface of the diffuser window (11,21) is configured to move with a relative surface velocity (V12) that is constant in the beam window (W12), the relative surface velocity (V12) being equal to the angular velocity (ω 1, ω 2) multiplied by the radial center distance (d12), wherein the diffuser window (11,21) has a correlation length (Lc) that defines a minimum distance to move the surface of the diffuser window (11,21) relative to a traversing beam (L1, L2) for homogenizing coherent or correlated speckle (L1s) in the traversing beam (L1, L2), wherein the lithography system (1000) comprises a light source (101) configured to produce the light beam, wherein the light source (101) is configured to provide a predetermined interval (T), wherein the relative surface velocity (V12) is at least equal to the correlation length (Lc) divided by the light pulse interval (T).

15. A method for diffusing a light beam (L1, L2), the method comprising: providing at least two transmissive diffuser windows (11,21), wherein the diffuser windows (11,21) are arranged to sequentially diffuse a transmitted light beam (L1, L2), wherein the diffuser windows (11,21) are continuously rotated at an angular velocity (ω 1, ω 2) for homogenizing a diffusion pattern of the transmitted light beam (L1, L2), wherein the diffuser windows (11,21) are rotated around different rotational axes (C1, C2), wherein the different rotational axes (C1, C2) are parallel to each other and offset from each other by a radial center distance (d12), wherein rotational partitions of the first diffuser window (11) partially overlap rotational partitions of the second diffuser window (12), wherein the partially overlapping rotational partitions define a light beam window (W12) for homogenizing and diffusing the transmitted light beam (L1, L2), wherein the diffuser windows (11,21) is held by a respective rotatable ring (12,22), wherein the rotatable rings (12,22) rotate within a respective bearing structure (13,23), wherein the radial centre distance (D12) is less than the radius (R1, R2) or half the diameter (D1, D2) of the diffuser window (11, 21).

Technical field and background

The present disclosure relates to optical diffuser systems and methods for diffusing a light beam.

Optical diffusers can be used to diffuse light beams, for example for homogenizing light in optical systems used in, for example, lithography. For example, U.S. Pat. No. 7,148,952 describes a lithographic apparatus that includes an illumination system to provide a projection beam of radiation. The illumination system includes at least one movable optical component such that the projection beam of radiation can be shifted about a central location. According to the prior art, this ensures non-uniformity of the intensity distribution of the erasable projection beam, which may then provide improved exposure uniformity of the surface to be illuminated by the system, such as a wafer or other substrate. The optical components may include motor-movable mirrors, prisms, filters, lenses, turning mirrors, diffusers, diffractive optical arrays, optical integrators, and the like.

US 2007/0274075 a1 describes a laser illuminator comprising at least one optical diffusing means capable of modifying an optical diffusing condition, and at least one optical suppressing means for suppressing divergence of light, wherein the optical diffusing means and the optical suppressing means are disposed along an optical path of a laser beam emitted from a laser light source, and the laser beam is converted into a beam of light which is diffused without divergence by passing through the optical diffusing means and the optical suppressing means for illuminating or exciting an object.

To adequately erase the non-uniformity, the optical assembly should be moved at a minimum speed. However, rotating components such as transmissive diffusers may have lower velocities at the center of rotation than at the edges. Thus, the effective available surface of the diffuser may be low and provide inconsistent blurring (blurring) for different parts of the light beam. Further improvements are needed in known diffuser systems and methods to alleviate these and other problems.

Disclosure of Invention

In one aspect, the present disclosure provides a diffuser system or method for optically diffusing a light beam. At least two transmissive diffuser windows are provided. The diffuser windows are arranged to sequentially diffuse light beams transmitted through them. The diffuser system is configured to continuously rotate the diffuser windows at an angular velocity to homogenize the diffusion pattern of the transmitted beam. Advantageously, the diffuser windows are configured to rotate about different axes of rotation. The different axes of rotation are parallel to each other and offset from each other by a radial center distance. Thus, the rotational partition of the first diffuser window partially overlaps the rotational partition of the second rotational diffuser window. Whereby the partially overlapping rotating segments define a beam window for homogenizing and diffusing the transmitted beam.

As explained in more detail below with reference to the drawings, sequential transmission of light beams through a pair of partially overlapping rotating diffuser windows provides more consistent relative motion of the diffuser surfaces. For example, at a region farther from the center of the first diffuser and closer to the center of the second diffuser, the surface of the first diffuser may move relatively faster while the second diffuser moves relatively slower. The same applies to the case where the minor modification is otherwise made closer to the center of the first diffuser and farther from the center of the second diffuser. The relatively fast or slow moving surface of the first diffuser may thus each at least partially compensate for the relatively slow or fast moving surface of the second diffuser. Thus, a more consistent blurring in the overlapping regions of the diffuser windows may be obtained. Further, for example, an area near the center of a diffuser may be covered by a moving surface of another diffuser. Thus, the effective usable area can be improved and/or material can be saved.

Drawings

The above and other features, aspects, and advantages of the present disclosure will become better understood with regard to the following description, appended claims, and accompanying drawings where:

FIGS. 1A and 1B schematically illustrate principles of an embodiment of a diffuser system;

FIGS. 2A and 2B schematically compare a diffuser system with a rotating window with a diffuser system with two rotating windows;

FIG. 3 schematically illustrates a side cross-sectional view of an embodiment of a diffuser system;

FIG. 4 schematically illustrates a front view of the embodiment;

FIG. 5 is a side view schematically illustrating an embodiment of a lithography system including a diffuser system.

Detailed Description

The terminology used to describe particular embodiments is not intended to be limiting of the invention. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. The term "and/or" includes any and all combinations of one or more of the associated listed items. It will be understood that the terms "comprises" and/or "comprising" specify the presence of stated features but do not preclude the presence or addition of one or more other features. It will be further understood that when a particular step in a method is referred to as being after another step, it can directly follow the other step, or one or more intervening steps may be performed before the particular step is performed, unless specifically stated. Similarly, it will be appreciated that when a connection between structures or components is described, such connection may be made directly or through intervening structures or components, unless specifically stated otherwise.

The present invention now will be described more fully hereinafter with reference to the accompanying drawings, in which embodiments of the invention are shown. In the drawings, the absolute and relative sizes of systems, components, layers and regions may be exaggerated for clarity. Embodiments may be described with reference to schematic and/or cross-sectional illustrations of embodiments of the invention and intermediate structures that may be idealized. In the description and drawings, like elements are represented by like reference numerals. Relative terms and their derivatives should be considered to refer to the orientation as described subsequently or as illustrated in the drawings. These relative terms are for convenience of description and do not require that the system be constructed or operated in a particular orientation unless otherwise stated.

Fig. 1A and 1B schematically illustrate the principles of an embodiment of a beam diffuser system 100.

In an embodiment, the system has at least two transmissive diffuser windows 11, 21. The diffuser windows 11,21 are arranged to diffuse the transmitted light beams L1, L2 in sequence. In other words, the light beam is transmitted through the first diffuser window 11 before being transmitted through the second diffuser window 12. In an embodiment, the diffuser windows 11,21 are configured to rotate continuously at angular velocities ω 1, ω 2 to homogenize the diffusion pattern of the transmitted light beams L1, L2. As described herein, the diffuser windows 11,21 are configured to rotate about different axes of rotation C1, C2. The different axes of rotation C1, C2 are preferably parallel to each other and offset from each other by a radial center distance d 12. In this way, the rotational section of the first diffuser window 11 partially overlaps the rotational section of the second rotational diffuser window 12. The partially overlapping rotating sectors define a beam window W12 for homogenizing and/or diffusing the transmitted beams L1, L2.

In a preferred embodiment, the diffuser windows 11,21 are configured to rotate at the same or almost the same angular velocity, i.e. ω 1 ═ ω 2 or e.g. 0.9 ═ ω 1< ω 2<1.1 ×. ω 1. This provides a compensated velocity profile of surface velocities V1 and V2, as shown in FIG. 1A. In some embodiments, small differential angular velocities may be required to prevent the diffusers from reaching exactly the same relative position after one revolution. For example, the difference is such that after one revolution the diffuser surface and the further diffuser surface are offset from each other by at least a relevant distance Lc, for example more than 10 micrometers. This prevents undesirable repetitive patterns from occurring during illumination. While the angular velocities ω 1, ω 2 are thus preferably the same or very close, this may not always be necessary in order to achieve at least some compensation as described herein. For example, even if the velocities are different, the lower velocity of the diffuser (e.g., in the center) may be at least partially compensated by another diffuser.

In a preferred embodiment, the diffuser windows 11,21 are configured to rotate in the same angular direction. In other words, both clockwise or both counterclockwise (e.g., from a front view of the icon diffuser system). By rotating in the same direction, the vector length of the relative surface velocity V12 calculated with V12 ═ V1-V2|, where the surfaces move in opposite directions in the overlap region, can be constant. Although the angular direction is thus preferably the same, this may not always be necessary in order to achieve at least some compensation. For example, even if the surfaces rotate in opposite directions (ω 1 — ω 2), the surfaces still move relative to the transmitted beam, which may provide at least some homogenizing effect, such as canceling out partially coherent spots.

In preferred embodiments, the surfaces of the diffuser windows thus move with a relative surface velocity V12 that is constant in the beam window W12. For example, the diffuser windows 11,21 each include or are coupled to an actuating or rotating member (not shown here). The rotation means may, in use, cause the diffuser windows 11,21 to rotate, preferably at the same angular velocity and/or in the same direction. In other or further embodiments of the present invention,

in several preferred embodiments, the diffuser windows 11,21 have the same diameter D1 ═ D2 or radius R1 ═ R2. This may provide the most efficient use of the diffuser material. For typical applications, such as lithography, it is preferred that the diffuser windows 11,21 each have a diameter D1, D2 of 10 to 200 mm, more preferably 50 to 100 mm, for example about 60 or 80 mm. The larger the diffuser window, the smaller the beam intensity per surface area. Larger diffuser windows may also provide higher radial or surface velocities V1, V2 for a given angular velocity ω 1, ω 2. On the other hand, a smaller diffuser window may be needed that is inexpensive in material and saves system space.

As shown in FIG. 1B, the diameter of the beam window W12 may be directly proportional to the diameter D1, D2 of the diffuser windows 11,21 and inversely proportional to the radial center distance D12. For example, W12 ═ D-D12 can be shown, where D ═ D1 ═ D2.

At lower values of the radial center distance d12, the beam window W12 may be larger, but the relative surface velocity V12 of the diffuser windows 11,21 is lower. When the radial center distance D12 is less than half the radius R1, R2 or the diameter D1, D2 of the diffuser window 11,21, the relative surface velocity V12 between the surfaces may be less than the maximum velocity V1, V2 at the edge of the diffuser window 11,21, but since the relative surface velocity V12 may not be actually changed in the beam window W12, this constant relative surface velocity V12 may still be greater than, for example, the surface velocity of each diffuser window 11,21 at the center point C1, C2 where there is typically no surface motion. It will be appreciated that by providing a radial centre distance D12 which is less than the radius R1, R2 or half the diameter D1, D2 of the diffuser window 11,21, the light beam window W12 may be relatively large, for example greater than the radius R1, R2 or half the diameter D1, D2 of the respective diffuser window 11, 21. For example, for a relatively expensive diffuser material, a relatively large beam window W12 may be required to save cost.

At higher values of the radial center distance d12, the relative surface velocity V12 of the diffuser windows 11,21 may be higher, but with a smaller beam window W12. When the radial center distance D12 is greater than the radius R1, R2 or half the diameter D1, D2 of the diffuser window 11,21, the relative surface velocity V12 between the surfaces may actually be greater than the maximum velocity V1, V2 at the edge of the diffuser window 11, 21. Thus, in principle, the respective angular velocities ω 1, ω 2 of the diffuser windows 11,21 may be suppressed while still achieving the desired diffusion. This may be desirable, for example, to reduce vibration of relatively inexpensive diffuser materials.

Typically, the largest circle fitted to the beam window W12 has a smaller diameter than the respective diameters D1, D2 of the diffuser windows 11,21, e.g., between 10 and 90 percent, preferably between 20 and 80 percent, and more preferably between 30 and 70 percent. For example, the beam window W12 may be between 10 and 100 mm, more preferably between 40 and 60 mm, for example, a typical (expanded) beam size may have a diameter of 55 mm. Larger beam sizes have lower intensity per unit surface area but require bulkier optical components.

Fig. 2A and 2B schematically illustrate how the use of two smaller windows (fig. 2B) may actually save expensive diffuser material compared to the use of one larger window (fig. 2A). Referring to FIG. 2A, it should be noted that in a single rotation diffuserThe upper beam window W should not overlap the central axis of rotation C because the surface velocity V ω R may be too low at the small radial distance R in order to provide the desired blurring of the diffuse pattern. Referring to FIG. 2B, it should be appreciated that the beam window W12 may actually overlap the central rotational axes C1, C2, even while providing a more consistent relative surface velocity V12. In some embodiments, a surface (π R) of less than one large window is utilized ²) Of two smaller diffuser windows (pi · R) ₁ ²+π·R ₂ ²) And the material cost can be saved. Alternatively or in addition, at the same or lower angular velocities, the relative surface velocities may be more uniform or even relatively higher, in particular as the radial center distance between the rotational axes C1, C2 increases.

Fig. 3 schematically illustrates a side cross-sectional view of an embodiment of the diffuser system 100.

In a preferred embodiment, the diffuser windows 11,21 are rotated in a plane, i.e. without wobbling. In other words, the diffuser windows 11,21 are preferably arranged with their optical surfaces transverse to the incoming light beams L1, L2. Typically, the diffuser windows 11,21 have diffuser angles and/or combined scattering angles θ s that define the angular scattering of the respective diffuser windows 11,21, as specified. Preferably, the combined scattering angle θ s is less than a 5 degree in-plane angle, preferably less than 2 degrees, less than 1 degree, or even less than half a degree, for example between 0.1 and 0.25 degrees. For example, to waste less light, a smaller angle is better.

In a preferred embodiment, the diffuser windows 11,21 are arranged such that their surfaces are parallel to each other by an axial distance Z12. For example, the axial distance Z12 is less than 100 mm, preferably less than 50 mm, less than 20 mm, or even less than 10 mm, such as 1 to 5 mm surface-to-surface distance. For example, to reduce the combined scattering effect, closer is better.

Typically, the diffuser windows 11,21 have a so-called correlation length Lc, which defines a minimum distance for moving the surface of the diffuser windows 11,21 relative to the traversing light beams L1, L2 for homogenizing the coherent or correlated spot L1S among the traversing light beams L1, L2. Preferably, the correlation length is less than 100 microns, less than 50 microns, or even less than 10 microns, for example 1 to 5 microns. For example, where less surface movement is required to mitigate or eliminate the speckle pattern, a smaller correlation length is better.

In some embodiments, the diffuser window 11,21 comprises a surface structure to diffuse the transmitted light beam L1, L2, for example, when scattering occurs in an optical surface having surface roughness or corrugations. In yet other embodiments, the surface structure determines the correlation length Lc. For example, the surface structure is a tailored surface structure to provide a consistent and predictable correlation length Lc. In other or further embodiments, the diffuser window 11,21 comprises a diffusively transmissive material, for example, wherein light is scattered as it traverses the material. In yet other embodiments, the transmissive material determines the correlation length Lc. Combinations of these and other scattering effects are also possible.

In the illustrated embodiment, the diffuser windows 11,21 (at the peripheral edges) are held by respective rotatable rings (12,22)12, 22. Rotatable rings (12,22)12, 22 each rotate within a bearing structure 13, 23. It will be appreciated that this allows full utilization of the diffuser window surface, for example in comparison to retaining the diffuser with a central axis, and may have particular advantages when the radial centre distance D12 is less than the radius R1, R2 or half the diameter D1, D2 of the diffuser window 11, 21. In a preferred embodiment, the rotatable rings (12,22)12, 22 and/or the bearing structures 13,23 are provided with air bearings for smooth and/or low friction rotation. In a preferred embodiment, the rotatable rings (12,22)12, 22 and/or the bearing structures 13,23 are provided with magnetic variators to drive the rotation of the diffuser windows 11, 21. For example, the bearing structure 13,23 includes electromagnets provided by electrical signals via signal lines 14, 24 to drive each magnet in the rotatable ring (12,22)12, 22.

In the illustrated embodiment, both bearing structures 13,23 are fixed in a common frame 31. As illustrated, the radial offset of the bearing structures 13,23 may be in accordance with the radial center distance d12 between the diffuser windows 11, 21. Further, the axial offset of the bearing structures 13,23 may be dependent on the axial distance Z12 between the diffuser windows 11, 21. In a preferred embodiment, the common frame 31 is suspended by resilient members 32a, 32b, such as springs. For example, the common frame 31 of the diffuser windows 11,21 is suspended to the outer frame 33. The outer frame 33 may be directly or indirectly connected to the rest of the optical system.

The front view of fig. 4 schematically illustrates an embodiment of the diffuser system 100 according to fig. 3.

In the illustrated embodiment, the common frame 31 is suspended to have a resonant or natural frequency Fn. In a preferred embodiment, the natural frequency Fn is lower than the rotation frequency of the diffuser window 11, 21. When the rotation frequency (f ═ ω/2 pi) of the diffuser windows is higher than the natural frequency determined by the suspension, the vibration caused by the rotation may be less efficiently coupled to the outer frame 33. Preferably, the natural frequency Fn is at least less than one tenth, more preferably at least less than one twentieth, or more of the rotational frequency of the diffuser window 11, 21. For example, the mass of the elements of the common frame 31 and the spring constant of the resilient members 32 a-32 d may be configured to determine a desired relatively low natural frequency Fn.

FIG. 5 is a side view schematically illustrating an embodiment of a lithography system 1000 including the diffuser system 100 as described herein.

Generally, the lithography system 1000 includes or is coupled to a light source 101 configured to generate a light beam. For example, the beam comprises actinic radiation for performing photolithography. In some implementations, the lithography system 1000 includes or is coupled to a beam expander 102 to amplify the beam. In the illustrated embodiment, the beam expander 102 includes a pair of lenses. Preferably, the diffuser system 100 with less light intensity is positioned in the expanded beam of the optical path after the beam expander 102. In some embodiments, lithography system 1000 includes lens array 103, for example, to redistribute a gaussian beam profile to a flat top profile. Optionally, the lens array 103 may include an apodization (apodization) mask as desired to further shape the beam profile. Preferably, the diffuser system 100 is placed in the light path before the lens array 103, e.g., in a Gaussian beam profile, to avoid less edge effects. In the illustrated embodiment, the lithography system 1000 includes a Fourier lens 104 to project a uniform beam onto the mask pattern M. As schematically indicated by the block, the lithography system 1000 generally comprises a projection system 105 configured to project a mask pattern onto a wafer or substrate S, e.g. held by a substrate table 106.

Typically, the light source 101 is configured to provide a predetermined light pulse interval T, i.e. the time between pulses, which is the inverse of the pulse frequency. As described herein, the relative surface velocity (V12, shown in fig. 1A and 1B) is preferably at least equal to the correlation length (Lc, shown in fig. 3) divided by the light pulse interval T. Also, a higher speed factor may be used. The speed factor may, for example, determine whether to sample different positions of the diffuser window for exposure of subsequent light pulses such that their speckle patterns are uncorrelated. Higher speeds may be preferred, but may be limited to practical applications. For example, to sample different portions of the diffuser surface having a correlation length Lc of 10 microns within a 5 microsecond (200kHz) light pulse interval T, the relative surface velocity V12 is preferably at least equal to 10 microns/5 microseconds of 2 meters/second. This is achieved by a pair of diffusers rotating at a radial center distance d12 of 20 mm and at an angular velocity ω of 100 radians/sec (955 rpm) and (V12 ω d12 100 mm 20 m/sec).

According to some aspects, the present disclosure also relates to corresponding methods for diffusing a light beam. In some embodiments, the method comprises: providing at least two transmissive diffuser windows, for example, wherein the diffuser windows are arranged to sequentially diffuse a transmitted beam, wherein the diffuser windows are continuously rotated at an angular velocity for homogenizing a diffusion pattern of the transmitted beam, wherein the diffuser windows are rotated around different rotation axes, wherein the different rotation axes are parallel to each other and offset from each other by a radial center distance, wherein a rotational sector of the first diffuser window partially overlaps a rotational sector of the second rotational diffuser window, wherein the partially overlapping rotational sectors define a beam window for homogenizing and diffusing the transmitted beam. In preferred embodiments, the diffuser windows have a correlation length Lc, and the light source provides a light pulse interval T, wherein the angular velocity ω times the radial center distance d12 is at least equal to the correlation length Lc divided by the light pulse interval T (or times the light pulse frequency).

Several features that are, for clarity and brevity, described herein as being part of the same or separate embodiments, it is to be understood, however, that the scope of the present invention may include embodiments having combinations of some or all of the described features. For example, although embodiments for transmissive diffusers are illustrated, alternative means for achieving similar functions and results will be appreciated by those skilled in the art having the benefit of this disclosure. For example, the optical components may be combined or divided into one or more alternative components. The various components of the embodiments discussed and illustrated provide certain advantages, such as improved beam uniformity. It will of course be appreciated that in the search and matching of designs and advantages, any of the above-described embodiments or processes may be combined with one or more other embodiments or processes to provide even further improvements. It should be appreciated that the present disclosure provides unique advantages of a lithography system, and is generally applicable to any application of beam homogenization.

In interpreting the appended claims, it should be understood that the word "comprising" does not exclude the presence of other elements or acts than those listed in a given claim; the word "(a)" or "(an)" preceding a component does not exclude the presence of a plurality of components; any reference signs in the claims do not limit their scope; several "means" may be represented by the same or different item(s) or implementation structure or menu; any of the disclosed devices or portions thereof may be combined together or separated into other portions unless specifically stated otherwise. This may indicate a synergistic advantage achieved by a combination of their respective features when a claim is referred to another claim. The mere fact that certain measures are recited in mutually different dependent claims does not indicate that a combination of these measures cannot be used to advantage. Embodiments of the invention may thus include all operative combinations of claims, wherein each claim may in principle refer to any preceding claim unless the context clearly excludes it.