阅读说明：本技术 用于监视泵送装置的运转状态的方法 (Method for monitoring the operating state of a pumping device ) 是由 S·布兰多林 于 2018-05-15 设计创作，主要内容包括：本发明涉及一种用于监视与处理室(2)相连的泵送装置(5)的运转状态以确定该泵送装置(5)的故障运转状态的方法,该泵送装置(5)包括至少一个粗真空泵(7),该粗真空泵包括：用于驱动该粗真空泵(7)的马达(M1),以及变速驱动器(12),它构造成控制马达(M1)的转速并且构造成一方面接收与设定点频率(C)对应的第一输入参数和与马达电流(i)对应的第二输入参数且另一方面向马达(M1)供应与控制频率(F)对应的输出参数,其特征在于,当在稳态运转(H)中第一输入参数与输出参数之差等于或超过第一输入参数的10％持续大于3秒的预定时间(T)时确定为故障运转状态。本发明还涉及一种泵送装置和一种设备。(The invention relates to a method for monitoring the operating state of a pumping device (5) connected to a process chamber (2) in order to determine a faulty operating state of the pumping device (5), the pumping device (5) comprising at least one rough vacuum pump (7) comprising: -a motor (M1) for driving the rough vacuum pump (7), and-a variable speed drive (12) configured to control the rotational speed of the motor (M1) and configured to receive, on the one hand, a first input parameter corresponding to the set-point frequency (C) and a second input parameter corresponding to the motor current (i) and, on the other hand, to supply to the motor (M1) an output parameter corresponding to the control frequency (F), characterized in that a faulty operating state is determined when, in steady state operation (H), the difference between the first input parameter and the output parameter equals or exceeds 10% of the first input parameter for a predetermined time (T) longer than 3 seconds. The invention also relates to a pumping device and an apparatus.)

1. A method for monitoring the operating status of a pumping arrangement (5) connected to a process chamber (2) in order to determine a faulty operating status of the pumping arrangement (5), the pumping arrangement (5) comprising at least one rough vacuum pump (7) comprising:

-a motor (M1) for driving the rough vacuum pump (7), and

-a variable speed drive (12) configured to control the rotational speed of the motor (M1) and configured to receive, on the one hand, a first input parameter corresponding to a set point frequency (C) and a second input parameter corresponding to a motor current (i) and, on the other hand, to transmit an output parameter corresponding to a control frequency (F) to the motor (M1),

characterized in that a faulty operating state is determined when in steady-state operation (H) the difference between the first input parameter and the output parameter equals or exceeds 10% of the first input parameter for a predetermined time (T) greater than 3 seconds.

2. Method of monitoring the operating condition of a pumping device (5) according to the preceding claim, wherein a faulty operating condition is determined when in steady-state operation (H) the difference between said first input parameter and said output parameter equals or exceeds 4% of said first input parameter for said predetermined time (T).

3. Method of monitoring the operating condition of a pumping device (5) according to any one of the preceding claims, wherein said predetermined time (T) is greater than 10 seconds.

4. Method of monitoring the operating condition of a pumping device (5) according to any one of the preceding claims, wherein said predetermined time (T) is less than 30 seconds.

5. Method of monitoring the operating state of a pumping device (5) according to any one of the preceding claims, characterized in that, upon starting the rough vacuum pump (7), the variable speed drive (12) is controlled so as to gradually increase the control frequency (F) until the set point frequency (C) is reached.

6. Method of monitoring the operating condition of a pumping device (5) according to any one of the preceding claims, characterized in that in steady-state operation (H) the set-point frequency (C) is constant at least for a time greater than or equal to the predetermined time (T).

7. Method of monitoring the operating state of a pumping device (5) according to any of the preceding claims, wherein the variable speed drive (12) prevents the increase of the control frequency (F) when the control frequency (F) increases and the motor current (i) exceeds an acceleration current threshold (S1).

8. Method of monitoring the operating state of a pumping device (5) according to any of the preceding claims, wherein the variable speed drive (12) decreases the control frequency (F) when the variable speed drive (12) is in steady state operation (H) and the motor current (i) exceeds an operating current threshold (S2).

9. Method of monitoring the operating condition of a pumping device (5) according to any one of the preceding claims, characterized in that a warning or alarm is triggered when the difference between said first input parameter and said output parameter equals or exceeds 90% of said first input parameter for a predetermined time (T) greater than one minute.

10. Pumping installation (5) comprising at least one rough vacuum pump (7) comprising:

-a motor (M1) for driving the rough vacuum pump (7), and

-a variable speed drive (12) configured to control the rotational speed of the motor (M1) and configured to receive, on the one hand, a first input parameter corresponding to a set point frequency (C) and a second input parameter corresponding to a motor current (i) and, on the other hand, to transmit an output parameter corresponding to a control frequency (F) to the motor (M1),

characterized in that the pumping device (5) comprises a monitoring unit (13) configured to monitor the operating condition of the pumping device (5) according to the method of monitoring the operating condition of the pumping device (5) according to any one of the preceding claims.

11. Pumping device (5) according to the preceding claim, characterized in that it comprises a roots blower (11) mounted in series with the rough vacuum pump (7) on the upstream side thereof.

12. An apparatus (1) comprising a treatment chamber (2) connected by a conduit (3) to the suction inlet of a pumping device (5) according to claim 10 or 11.

Technical Field

The present invention relates to a method for monitoring the operating state of a pumping arrangement connected to a process chamber in order to determine a faulty operating state of the pumping arrangement. The invention also relates to a pumping device and an apparatus for carrying out said method.

Background

The vacuum pump comprises two rotors driven by a motor to rotate inside a pump body (stator). During rotation, gas drawn from the process chamber is trapped in the free space between the rotor and the stator and then discharged to the outlet.

Vacuum pumps are used in particular in processes for producing semiconductors, flat screens or photovoltaic substrates, which require pressures below atmospheric pressure. However, the gases used in these processes may be converted into solid by-products which may deposit in layers on the moving and static parts of the pump and cause clogging, which in turn causes clogging of the pump due to locking of the mechanism caused by excessive friction between the rotor and the stator.

Clogging of the pump can cause irreversible damage to the product (e.g., semiconductor wafers in a batch) being fabricated in the associated process chamber. These unplanned production interruptions can induce significant costs.

Currently, maintenance of vacuum pumps is based on corrective and preventative measures, and it is best to be able to predict preventative maintenance before a vacuum pump fails and stops.

For this purpose, preventive maintenance operations are performed for a period of time defined according to the application in which the vacuum pump is used. However, this time period does not match the actual conditions of use of the pump, which may vary with changes in production load and which may directly affect the wear or clogging rate of the pump, resulting in unnecessary or late operation.

Methods of predicting vacuum pump failure have been developed in an attempt to predict the onset of pump blockage and anticipate replacement thereof.

For example, document EP0828332 proposes to monitor the performance of a vacuum pump in use to predict its future operating characteristics by measuring the rotational torque or current of the motor. However, this method is complicated to implement. In fact, it is not possible to measure the rotation torque of the motor directly, because the volume of the torque sensor is too large. Furthermore, the measured motor current varies according to various conditions regardless of possible failure of the vacuum pump. Therefore, there is a need to cross-reference this information with other measurements made on vacuum lines or pumps in order to be able to better interpret the information and not cause untimely preventive maintenance.

A failure prediction method is also known which is capable of determining when a dry vacuum pump fails. The service time of the vacuum pump before the failure occurs is estimated by statistically processing the characteristic data of the pump (current, temperature, vibration, etc.) and combining the characteristics of the manufacturing process (gas flow, pressure, substrate temperature, etc.). However, this method is not independent. The life of the pump cannot be predicted without regard to the operating conditions of the process. The analysis system depends on the information provided by the production equipment, and therefore a communication line must be installed between the equipment and the vacuum pump. Moreover, the modification of the process conditions then requires modification of the model used by the analysis system, which is not a simple procedure during the use of the vacuum pump.

A vacuum line failure prediction method is also known from document EP 1754888. In the method, the evolution over time of a first functional parameter related to a motor of the pump and a second functional parameter related to a system for evacuating gas from the pump is measured. The measured functional parameters are then correlated by statistical processing to predict the age of the vacuum pump before a blockage occurs. Thus, the vacuum line is able to self-diagnose without being associated with an external signal. The method is particularly suitable for tracking the progress of the phenomenon that the contamination of the solid product in the vacuum line causes the pump to be blocked.

Although some prediction methods have been developed to address these issues, a less costly, more easily implemented failure prediction method is sought, particularly by avoiding the duplication of input parameters to process or implementing new sensors.

The problem is therefore to determine the malfunction of a vacuum pump by means of a reliable and simple to implement method for protecting the process chamber before the pump malfunctions, without any indication that the process is being carried out in the process chamber and without knowledge of the conditions under which the vacuum pump is used.

Disclosure of Invention

To this end, the invention relates to a method for monitoring the operating state of a pumping arrangement connected to a process chamber in order to determine a faulty operating state of the pumping arrangement, the pumping arrangement comprising at least one rough vacuum pump, the rough vacuum pump comprising:

-a motor for driving the rough vacuum pump, and

a variable speed drive (variable speed transmission) which controls the rotational speed of the motor and is configured to receive, on the one hand, a first input parameter corresponding to the setpoint frequency and a second input parameter corresponding to the motor current and, on the other hand, to transmit an output parameter corresponding to the control frequency to the motor,

characterized in that the faulty operation state is determined when the difference between the first input parameter and the output parameter in the steady operation is equal to or exceeds 10% of the first input parameter for a predetermined time of 3 seconds or more.

In the case of gradual clogging of a rough vacuum pump for diagnostic purposes, the load of the vacuum pump fluctuates. In fact, the frequency is alternately reduced and increased without falling below the warning or alarm threshold of the pumping device. Then, the variable speed drive can well account for any frequency reduction of the order of seconds or minutes in duration caused by current surges. The monitoring method makes it possible to detect these conditions in order to predict the sudden stop of the pumping means within seconds or even minutes, thus allowing time to isolate the pumping means from the process chamber located on the upstream side and to cut off the admission of gas into the process chamber.

According to one or more features of the monitoring method that can be applied separately or in combination:

-determining a faulty operating state when the difference between the first input parameter and the output parameter in steady state operation equals or exceeds 4% of the first input parameter for said predetermined time;

-said predetermined time is greater than 10 seconds,

-the predetermined time is less than 30 seconds,

-controlling (commanding) the variable speed drive to gradually increase (increase) the control frequency upon starting the rough vacuum pump until the set point frequency is reached,

in steady state operation, the setpoint frequency is constant at least for a time greater than or equal to said predetermined time,

-the variable speed drive prevents the increase of the control frequency when the control frequency increases and the motor current exceeds the acceleration current threshold,

-the variable speed drive reducing the control frequency when the variable speed drive is in steady state operation and the motor current exceeds the operating current threshold,

-triggering a warning or alarm when the difference between the first input parameter and the output parameter equals or exceeds 90% of the first input parameter for a predetermined time of more than one minute.

The invention also relates to a pumping device comprising at least one rough vacuum pump, said rough vacuum pump comprising:

-a motor for driving the rough vacuum pump, and

a variable speed drive configured to control the rotational speed of the motor and configured to receive, on the one hand, a first input parameter corresponding to the set point frequency and a second input parameter corresponding to the motor current and, on the other hand, to transmit an output parameter corresponding to the control frequency to the motor,

characterized in that the pumping device comprises a monitoring unit configured for monitoring the operating state of the pumping device according to the monitoring method as described above.

The pumping device may comprise a roots blower mounted in series with and on the upstream side of the rough vacuum pump.

The invention also relates to an apparatus comprising a treatment chamber connected by a conduit to the suction inlet of a pumping device as described above.

Drawings

Other advantages and features will become apparent from reading the following description of a particular but non-limiting embodiment of the invention, and from the accompanying drawings, in which:

figure 1 shows a schematic view of an apparatus comprising a process chamber connected to a pumping device,

figure 2 shows a schematic view of the pumping device in figure 1,

figure 3 shows a schematic view of the elements of the rough vacuum pump of the pumping arrangement in figure 2,

figure 4 shows a schematic view of the elements of the pumping device in figure 2,

FIG. 5 shows an example of a graph of motor current as a function of time corresponding to the evolution over time of the control frequency of the variable speed drive of the pumping device during the start-up phase and during steady state operation, an

Fig. 6 is a graph showing an example of the evolution of the control frequency of the variable speed drive with the occurrence of a pump device failure in steady state operation.

In these figures, like elements have like reference numerals.

Detailed Description

The following embodiments are examples. Although the description refers to one or more embodiments, this does not necessarily mean that the same embodiment is referred to in each discussion, or that the features are applicable to only one embodiment. Individual features of different embodiments may be equivalently combined or interchanged to provide other embodiments.

A rough vacuum pump is defined as a positive-displacement rough vacuum pump which sucks in, displaces and then discharges the gas to be pumped at atmospheric pressure by means of two rotors. The rotor is carried by two shafts which are driven in rotation by the motor of the rough vacuum pump.

A roots blower is defined as a positive displacement vacuum pump which draws in, displaces and then expels the gas to be pumped by means of a roots-type rotor. The vacuum pump is mounted upstream of and in series with the roughing vacuum pump. The rotors are carried by two shafts that are driven in rotation by the motor of the ROOTS blower.

"upstream" means that one element is placed before another element with respect to the flow direction of the gas. Conversely, "downstream" means that one element is placed behind another element with respect to the direction of flow of the gas to be pumped, the upstream element being at a lower pressure than the downstream element.

The apparatus 1 shown in fig. 1 comprises a process chamber 2, which process chamber 2 is connected by a conduit 3 to a suction inlet 4 of a pumping device 5, which pumping device 5 is used for pumping gas from the chamber 2 in a flow direction indicated by an arrow. The chamber 2 may be a chamber in which any process occurs, such as deposition, etching, ion implantation or thermal treatment processes for fabricating microelectronic devices on silicon wafers or processes for fabricating flat screens or photovoltaic substrates.

The pumping means 5 comprise at least one rough vacuum pump 7, the rough vacuum pump 7 comprising a pump body inside which two rotors 10 can be driven in rotation by a drive motor M1 (fig. 2 and 3) of the rough vacuum pump 7.

The rough vacuum pump 7 is a multistage pump, that is to say it comprises a plurality of at least three, for example five, pumping stages T1, T2, T3, T4, T5 which are mounted in series between the suction inlet and the discharge outlet of the rough vacuum pump 7 and in which the gas to be pumped can flow.

Each pumping stage T1-T5 includes a respective inlet and a respective outlet. Successive pumping stages T1-T5 are connected in series with each other by respective inter-stage piping that connects the outlet of the preceding pumping stage to the inlet of the following pumping stage. The inlet of the first pumping stage T1 communicates with the suction inlet of the rough vacuum pump 7 and the outlet of the last pumping stage T5 communicates with the exhaust 6 of the vacuum pump 2.

As can be better seen in fig. 3, each pumping stage T1-T5 comprises at least two rotors 10 driven in rotation in a stator 8 of the pump body. The rotor 10 extends in pumping stages T1-T5. The shaft of the rotor 10 is driven by a motor M1 of the rough vacuum pump 7 on the side of the discharge stage T5 (fig. 2).

The rotor 10 includes lobes having the same profile. The rotors shown are of the "roots" type ("8" or bean-shaped cross-section). Of course, the invention is equally applicable to other types of dry multi-stage rough vacuum pumps, such as the "claw" type or the screw type or based on other principles similar to those of positive displacement vacuum pumps.

The rotors 10 are angularly offset and driven to rotate synchronously in opposite directions in the central housing 9 of each stage T1-T5. During rotation, the gas sucked from the inlet is trapped in the volume created by the rotor 10 and the stator 8, and then driven to the next stage by the rotor 10 (the flow direction of the gas is shown by the arrow G in fig. 2 and 3).

The rough vacuum pump 7 is referred to as "dry" because in operation the rotor 10 rotates within the stator 8 without making mechanical contact with the stator 8, which allows for the complete absence of oil in the pumping stages T1-T5.

The discharge pressure of the rough vacuum pump 7 was atmospheric pressure.

As shown in fig. 2, the pumping device 5 may include a roots blower 11 connected in series with the rough vacuum pump 7 and installed on the upstream side of the rough vacuum pump 7.

Like the rough vacuum pump 7, the roots blower 11 is a positive displacement vacuum pump which draws in, displaces and then discharges the gas to be pumped by means of a roots-type rotor.

The ROOTS blower 11 includes at least one pumping stage B1 wherein two rotors are rotationally driven by the motor M2 of the ROOTS blower 11. The rotational frequency of the motor M2 is set, for example, between 30Hz and 100Hz, for example, 55 Hz.

The main differences between the roots blower 11 and the roughing vacuum pump 7 are the larger dimensions, the larger clearance tolerances and the fact that the roots blower 11 is not discharged at atmospheric pressure but has to be installed in series on the upstream side of the roughing vacuum pump 7.

The roughing vacuum pump 7 further includes a variable speed drive 12, the variable speed drive 12 being configured to control the rotational speed of a motor M1 of the roughing vacuum pump 7. The motor M1 is for example an asynchronous motor, for example with a motor power of about 5 kW.

The variable speed drive 12 is configured on the one hand to receive a first input parameter corresponding to the set point frequency C and a second input parameter corresponding to the motor current i, and on the other hand to transmit an output parameter corresponding to the control frequency F to the motor M1 (fig. 4).

The setpoint frequency C may be a parameter set by a user, for example, by modifying an analog input signal of the variable speed drive 12 or by means of a manual adjustment knob of the variable speed drive 12. The setpoint frequency C is for example between 30Hz and 60Hz (including 30Hz and 60Hz), for example 60 Hz.

The motor current i is the current consumed by the motor M1. If the load on motor M1 increases, motor current i increases, and if the load on motor M1 decreases, motor current i decreases.

According to one embodiment, the variable speed drive 12 controls the control frequency F in an open loop, for example by Pulse Width Modulation (PWM).

The inverter of the variable speed drive 12 uses a pulse stream that determines both voltage and frequency to control the motor M1.

Open loop control does not use sensors to measure the rotational speed or angular position of the shaft. This sensorless configuration is economical and relatively simple to implement.

On starting the rough vacuum pump 7 (start phase D, fig. 5), the variable speed drive 12 is controlled so as to gradually increase the control frequency F, for example according to an increasing linear relationship or according to a continuously increasing linear relationship that can be programmed, over an increasing time until the setpoint frequency C is reached.

Then, once the set point frequency C has been reached, the variable speed drive 12 controls the control frequency F to be constant and equal to the set point frequency C (steady state operation H).

The acceleration current threshold S1 may be used to protect the variable speed drive 12 from current surges (overcurrent) as the control frequency F increases. For example, if the rise time is too short in the start-up phase D, a current surge may occur.

If the motor current i exceeds the acceleration current threshold S1, the variable speed drive 12 prevents the control frequency F from increasing until the motor current i decreases and again falls below the acceleration current threshold S1 (see, e.g., the cranking overload phase E1 in FIG. 5).

The acceleration current threshold S1 may be adjustable.

The operating current threshold S2 is set to protect the variable speed drive 12 from current surges during steady state operation H, where the variable speed drive 12 sets the control frequency F to the set point frequency C.

If the motor current i exceeds the run current threshold S2, the variable speed drive 12 decreases the control frequency F until the motor current i decreases and again falls below the run current threshold S2 (see, e.g., the in-run overload phase E2 in FIG. 5). Such an overload situation may occur, for example, when the vacuum in the processing chamber 2 is established at atmospheric pressure.

If the value of the motor current i is less than a few percent below the operating current threshold S2, the variable speed drive 12 again increases the control frequency F until the set point frequency C is reached.

The decrease and increase of the control frequency F may be linear under the control of the variable speed drive 12 in the steady state operation H. The operating current threshold S2 may be adjustable. For example, it is less than the acceleration current threshold S1.

If the difference between the first input parameter corresponding to the set point frequency C and the output parameter corresponding to the control frequency F equals or exceeds 90% of the first input parameter for a long time exceeding one minute, a warning or alarm is triggered. This may indicate, for example, a locking of the rough vacuum pump 7 in the starting phase D, resulting, for example, in an unsuccessful start of the rough vacuum pump 7.

The pumping device 5 further comprises a monitoring unit 13, which monitoring unit 13 is configured to monitor the operational state of the pumping device 5 according to a monitoring method described below.

The monitoring unit 13 comprises one or more computers or microcontrollers with a memory and a program adapted to monitor the operating state of the pumping means 5. The monitoring unit 13 may be a monitoring unit of the variable speed drive 12 or a remote unit connected to the variable speed drive 12.

The monitoring unit 13 monitors the control frequency F sent by the variable speed drive 12 to the motor M1 at least during steady state operation H, that is to say when the variable speed drive 12 is not in the start phase D or the stop phase. In steady state operation, the setpoint frequency C is constant for at least a period of time greater than or equal to a predetermined time T, for example three seconds.

If the difference between the first input parameter corresponding to the setpoint frequency C and the output parameter corresponding to the control frequency F (the first input parameter being greater than the output parameter) is equal to or exceeds 10% of the first input parameter for a predetermined time T greater than 3 seconds, for example greater than 10 seconds, it is determined that the operating state necessitates a maintenance intervention on the rough vacuum pump 7 in steady-state operation H. In other words, if C-F ≧ 0.1C, i.e., if F ≦ 0.9C, intervention to the operating state is required (FIG. 5).

For example, if the control frequency F sent by the variable speed drive 12 to the motor M1 is less than or equal to 54Hz within the predetermined time T, it is determined that the rough vacuum pump 7 is about to fail.

According to a more stringent criterion, it is determined that the operating state requires maintenance intervention on the rough vacuum pump 7 if the difference between the first input parameter and the output parameter in the steady-state operation H within the predetermined time T equals or exceeds 4% of the first input parameter. In other words, if C-F is 0.04C, i.e., if F is 0.96C, i.e., earlier than F0.9C, then an intervention in the operating state is required.

For example, if the control frequency F sent by the variable speed drive 12 to the motor M1 is less than 57.6Hz within the predetermined time T, it is determined that the rough vacuum pump 7 is about to fail.

The predetermined time T may be measured by a timer relay or directly by the monitoring unit 13. The predetermined time T may be less than 30 seconds.

Thus, and as can be seen from the example of fig. 6, a drop in the control frequency F beyond 2.4Hz for more than 13 seconds can cause the rough vacuum pump 7 to fail within seconds after the end of the predetermined time T.

This detection of the pumping means 5, i.e. the imminent failure, makes it possible to predict the sudden stop of the pumping means 5 within a few seconds, between 1 second and 2 minutes, here 10 to 20 seconds, which leaves time to isolate the pumping means 5 from the upstream process chamber 2 and possibly the turbo molecular vacuum pump and to cut off the supply of gas.

When the rough vacuum pump 7 for the purpose of diagnosis is gradually clogged, the load of the rough vacuum pump 7 fluctuates. In fact, the control frequency F is alternately lowered and raised without falling below the warning or alarm threshold. The variable speed drive 12 can then compensate for the frequency reduction caused by the current surge for a few seconds or minutes. The monitoring method thus enables this situation to be detected in order to enable the user to take measures and protect the process chamber 2 before excessive clogging.

The monitoring unit 13 may, for example, switch the logic output in case of a determination of an imminent failure, or switch a relay connected in series with a warning and alarm relay of the rough vacuum pump 7. These relays can be used to shut off an isolation valve arranged between the process chamber 2 and the pumping device 5 and/or to shut off the arrival of gas into the process chamber 2.

The monitoring method thus enables a simple and robust identification of an abnormal behaviour of the pumping device 5 in the case of no indication that a treatment process is taking place in the treatment chamber 2 on the one hand and not affected by disturbances to or alterations of the treatment process on the other hand.