阅读说明：本技术 一种可实现运动解耦的两自由度柔顺精密定位平台 (Two-degree-of-freedom compliant precision positioning platform capable of realizing motion decoupling ) 是由 甘金强 张俊仓 于 2019-10-24 设计创作，主要内容包括：本发明公开了一种可实现运动解耦的两自由度柔顺精密定位平台,包括：定平台；第一微动平台,其通过第一柔顺机构与所述定平台连接,所述第一柔顺机构使所述第一微动平台沿横向微动；第二微动平台,其通过第二柔顺机构与所述第一微动平台连接,所述第二柔顺机构使所述第二微动平台沿纵向微动。本发明具有对两自由度的柔顺精密定位平台实现运动解耦的有益效果。(The invention discloses a two-degree-of-freedom compliant precision positioning platform capable of realizing motion decoupling, which comprises: fixing a platform; the first micro-motion platform is connected with the fixed platform through a first compliant mechanism, and the first compliant mechanism enables the first micro-motion platform to perform micro motion along the transverse direction; and the second micro-motion platform is connected with the first micro-motion platform through a second compliant mechanism, and the second compliant mechanism enables the second micro-motion platform to perform micro-motion along the longitudinal direction. The invention has the beneficial effect of realizing motion decoupling of the compliant precision positioning platform with two degrees of freedom.)

1. A two-degree-of-freedom compliant precision positioning platform capable of realizing motion decoupling is characterized by comprising:

a fixed platform (1);

the first micro-motion platform (2) is connected with the fixed platform (1) through a first compliant mechanism (3), and the first compliant mechanism (3) enables the first micro-motion platform (2) to perform micro motion along the transverse direction;

and the second micro-motion platform (4) is connected with the first micro-motion platform (2) through a second compliant mechanism (5), and the second compliant mechanism (5) enables the second micro-motion platform (4) to perform micro motion along the longitudinal direction.

2. The two-degree-of-freedom compliant precision positioning platform capable of achieving motion decoupling as claimed in claim 1 wherein the fixed platform (1) is circular.

3. The two-degree-of-freedom compliant precision positioning platform capable of achieving motion decoupling as claimed in claim 2, wherein the first micro motion platform (2) is circular, and the outer diameter of the first micro motion platform (2) is smaller than the inner diameter of the fixed platform (1).

4. The two-degree-of-freedom compliant precision positioning platform capable of achieving motion decoupling as claimed in claim 3 wherein the second micro motion platform (4) is circular and the diameter of the second micro motion platform (4) is smaller than the inner diameter of the first micro motion platform (2).

5. The two-degree-of-freedom compliant precision positioning platform capable of realizing motion decoupling as claimed in claim 4 wherein the fixed platform (1), the first micro-motion platform (2) and the second micro-motion platform (4) are in nested structure.

6. The two-degree-of-freedom compliant precision positioning platform capable of achieving motion decoupling as claimed in claim 1 wherein the first compliant mechanism (3) comprises a pair of first compliant assemblies symmetrically arranged along the longitudinal direction, the first compliant assemblies connecting the fixed platform (1) and the first micro-motion platform (2).

7. The two-degree-of-freedom compliant precision positioning platform capable of achieving motion decoupling as claimed in claim 6, wherein the first compliant assembly comprises a first piezoceramic actuator (301), a first compliant four-bar mechanism (302), and a first compliant parallel guide mechanism (303), the first piezoceramic actuator (301) is fixed on the fixed platform (1), the first piezoceramic actuator (301) extends and retracts in the transverse direction to drive the first compliant four-bar mechanism (302) to deform in the transverse direction, and the first compliant parallel guide mechanism (303) deforms in the longitudinal direction to compensate for the longitudinal shortening caused by the transverse deformation of the first compliant four-bar mechanism (302).

8. The two-degree-of-freedom compliant precision positioning platform capable of achieving motion decoupling as claimed in claim 1 wherein the second compliant mechanism (5) comprises a pair of second compliant assemblies symmetrically arranged along the transverse direction, the second compliant assemblies connecting the first micro motion platform (2) and the second micro motion platform (4).

9. The two-degree-of-freedom compliant precision positioning platform capable of achieving motion decoupling as claimed in claim 8, wherein the second compliant assembly comprises a second piezoceramic actuator (501), a second compliant four-bar mechanism (502) and a second compliant parallel guide mechanism (503), the second piezoceramic actuator (501) is fixed on the first micro-motion platform (2), the second piezoceramic actuator (501) extends and retracts longitudinally to drive the second compliant four-bar mechanism (502) to deform longitudinally, and the second compliant parallel guide mechanism (503) deforms transversely to compensate for transverse shortening caused by longitudinal deformation of the second compliant four-bar mechanism (502).

Technical Field

The invention relates to the field of precision mechanical equipment. More specifically, the invention relates to a two-degree-of-freedom compliant precision positioning platform capable of realizing motion decoupling.

Background

The compliant mechanism is a novel mechanism which realizes the transmission of energy, force and movement by means of the deformation of an elastic component, and is different from the traditional mechanical structure in that the traditional mechanical structure is required to avoid adverse effects caused by the deformation of the component to the utmost extent during movement, the compliant mechanism fully utilizes the elastic deformation, and high-precision movement is realized by researching and controlling the deformation characteristic and modeling. The appearance and development of the compliant mechanism break through the development barrier of mechanical science, provide a new research direction for mechanism design, and are hot spots for future mechanical subject research.

The flexible mechanism is integrally formed, a kinematic pair in the traditional mechanical structure is abandoned, processing and installation can be simplified, the problems of friction and abrasion among components are solved, maintenance and maintenance of the mechanism are reduced, the service life of the mechanism can be prolonged, and the motion precision and the service performance of the mechanism are improved. The advantages of the compliant mechanism cause extensive attention and research of scholars at home and abroad, and research results of the compliant mechanism are applied in various industries and fields, particularly, with the rapid development of nanotechnology and the wide-range application of piezoelectric ceramics, the nanoscale precision positioning technology based on the compliant mechanism and the piezoelectric ceramics becomes a research hotspot in the mechanical field by virtue of high precision, stability and quick response of the technology.

In recent years, domestic and foreign scholars carry out a series of design and research on a precision positioning platform based on a compliant mechanism, from a plane compliant positioning platform to a space compliant positioning platform from one degree of freedom to multiple degrees of freedom, however, the compliant mechanism is easy to generate parasitic motion, the motion coupling brought by the parasitic motion brings interference to modeling control and motion precision of the compliant positioning platform, and the design of the existing compliant positioning platform aiming at realizing motion decoupling often has the problem of incomplete decoupling.

Disclosure of Invention

An object of the present invention is to solve at least the above problems and to provide at least the advantages described later.

The invention also aims to provide a two-degree-of-freedom compliant precision positioning platform capable of realizing motion decoupling, and the two-degree-of-freedom compliant precision positioning capable of realizing motion decoupling.

To achieve these objects and other advantages in accordance with the purpose of the invention, there is provided a two-degree-of-freedom compliant precision positioning stage capable of motion decoupling, comprising:

fixing a platform;

the first micro-motion platform is connected with the fixed platform through a first compliant mechanism, and the first compliant mechanism enables the first micro-motion platform to perform micro motion along the transverse direction;

and the second micro-motion platform is connected with the first micro-motion platform through a second compliant mechanism, and the second compliant mechanism enables the second micro-motion platform to perform micro-motion along the longitudinal direction.

Preferably, the fixed platform is circular.

Preferably, the first micro-motion platform is circular, and the outer diameter of the first micro-motion platform is smaller than the inner diameter of the fixed platform.

Preferably, the second micro-motion platform is circular, and the diameter of the second micro-motion platform is smaller than the inner diameter of the first micro-motion platform.

Preferably, the fixed platform, the first micro-motion platform and the second micro-motion platform are in a nested structure.

Preferably, the first compliant mechanism comprises a pair of first compliant assemblies symmetrically arranged along the longitudinal direction, and the first compliant assemblies are connected with the fixed platform and the first micro-motion platform.

Preferably, the first compliant assembly comprises a first piezoelectric ceramic driver, a first compliant four-bar mechanism and a first compliant parallel guide mechanism, the first piezoelectric ceramic driver is fixed on the fixed platform, the first piezoelectric ceramic driver extends and retracts in the transverse direction to drive the first compliant four-bar mechanism to deform in the transverse direction, and the first compliant parallel guide mechanism deforms in the longitudinal direction to compensate for longitudinal shortening caused by the transverse deformation of the first compliant four-bar mechanism.

Preferably, the second compliant mechanism comprises a pair of second compliant assemblies symmetrically arranged along the transverse direction, and the second compliant assemblies are connected with the first micro-motion platform and the second micro-motion platform.

Preferably, the second compliant assembly comprises a second piezoelectric ceramic driver, a second compliant four-bar mechanism and a second compliant parallel guide mechanism, the second piezoelectric ceramic driver is fixed on the first micro-motion platform, the second piezoelectric ceramic driver extends and retracts longitudinally to drive the second compliant four-bar mechanism to deform longitudinally, and the second compliant parallel guide mechanism deforms transversely to compensate for transverse shortening caused by longitudinal deformation of the second compliant four-bar mechanism.

The invention at least comprises the following beneficial effects:

the platform is designed by adopting a first compliant mechanism and a second compliant mechanism, so that the decoupling of planar two-degree-of-freedom motion can be realized;

the platform design changes traditional platform appearance, adopts circular platform appearance, makes the experimental condition adaptability of platform stronger, and more pleasing to the eye.

Additional advantages, objects, and features of the invention will be set forth in part in the description which follows and in part will become apparent to those having ordinary skill in the art upon examination of the following or may be learned from practice of the invention.

Drawings

FIG. 1 is a structural diagram of a two-degree-of-freedom compliant precision positioning platform capable of achieving motion decoupling according to one embodiment of the present invention;

FIG. 2 is a structural diagram of the compliant four-bar mechanism according to one embodiment of the present invention before and after deformation;

fig. 3 is a structural diagram of the compliant parallel guide mechanism according to one embodiment of the present invention before and after deformation.

Detailed Description

The present invention is further described in detail below with reference to the attached drawings so that those skilled in the art can implement the invention by referring to the description text.

In the description of the present invention, the terms "lateral", "longitudinal", "up", "down", "symmetrical", "inside", "outside", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.

As shown in fig. 1 to 3, the present invention provides a two-degree-of-freedom compliant precision positioning platform capable of implementing motion decoupling, comprising:

a fixed platform 1 which provides a fixed position for the first micro-motion platform 2;

the first micro-motion platform 2 is connected with the fixed platform 1 through a first compliant mechanism 3, the first compliant mechanism 3 enables the first micro-motion platform 2 to perform micro motion along the transverse direction, and the first micro-motion platform 2 provides a platform which moves transversely for the second micro-motion platform 4 and provides a fixed position for the second micro-motion platform 4;

and the second micro platform 4 is connected with the first micro platform 2 through a second compliant mechanism 5, and the second compliant mechanism 5 enables the second micro platform 4 to slightly move along the longitudinal direction, so that the decoupling of planar two-degree-of-freedom motion is realized.

In the technical scheme, the first compliant mechanism 3 is transversely micro-moved by inputting transverse displacement so as to drive the first micro-moving platform 2 to transversely micro-move, the second compliant mechanism 5 is longitudinally micro-moved by inputting longitudinal displacement so as to drive the second micro-moving platform 4 to longitudinally micro-move, so that the longitudinal position of the first micro-moving platform 2 is adjusted, the transverse position and the longitudinal position of the second micro-moving platform 4 are adjusted, and the purpose of plane two-degree-of-freedom decoupling is achieved.

Based on above-mentioned technical scheme, furtherly, decide platform 1 and be the ring shape, for imbedding first fine motion platform 2 and second fine motion platform 4 provide the structure basis, the ring shape design does not have the edges and corners, and wearing and tearing are little.

Based on the technical scheme, the first micro-motion platform 2 is in a ring shape, the outer diameter of the first micro-motion platform 2 is smaller than the inner diameter of the fixed platform 1, the fixed platform 1 is conveniently embedded, and a structural foundation is provided for the embedded second micro-motion platform 4.

Based on the above technical scheme, further, second fine motion platform 4 is circular, second fine motion platform 4's diameter is less than the internal diameter of first fine motion platform 2, conveniently imbeds first fine motion platform 2.

Based on the technical scheme, furthermore, the fixed platform 1, the first micro-motion platform 2 and the second micro-motion platform 4 are of a nested structure, so that friction between components is reduced, and the fixed platform 1, the first micro-motion platform 2 and the second micro-motion platform 4 are located on the same plane.

Based on the above technical scheme, further, the first compliant mechanism 3 includes a pair of first compliant assemblies symmetrically arranged along the longitudinal direction, the first compliant assemblies are connected to the fixed platform 1 and the first micro-motion platform 2, and the transverse micro-motion of the first micro-motion platform 2 is completed by the movement of the pair of first compliant assemblies.

Based on the above technical solution, further, the first compliant assembly includes a first piezoceramic driver 301, a first compliant four-bar mechanism 302, and a first compliant parallel guide mechanism 303, the first piezoceramic drivers 301 are fixed on the fixed platform 1, the first piezoceramic drivers 301 stretch and contract along the transverse direction, the extending directions of the pair of first piezoceramic drivers 301 are the same, when the first piezoceramic drivers 301 perform a transverse extension action, the extension of the pair of first piezoceramic drivers 301 causes the first micro-motion platform 2 to perform transverse movement deformation, at this time, the first compliant four-bar mechanism 302 performs longitudinal shortening, the first compliant parallel guide mechanism 303 performs longitudinal deformation, so as to compensate the longitudinal shortening generated by the transverse movement of the first compliant four-bar mechanism 302, so that the longitudinal position of the first micro-motion platform 2 is not changed.

Based on the above technical solution, further, the second compliant mechanism 5 includes a pair of second compliant assemblies symmetrically arranged along the transverse direction, the second compliant assemblies connect the first micro-motion platform 2 and the second micro-motion platform 4, and the longitudinal movement of the second micro-motion platform 4 is completed by the second compliant assemblies.

Based on the above technical solution, further, the second compliant assembly includes a second piezoceramic driver 501, a second compliant four-bar mechanism 502, and a second compliant parallel guide mechanism 503, the second piezoelectric ceramic drivers 501 are fixed on the first micro-motion platform 2, the second piezoelectric ceramic drivers 501 extend and contract along the longitudinal direction, the extending directions of the pair of second piezoelectric ceramic drivers 501 are the same, when the second piezoceramic drivers 501 longitudinally extend, the extension of the pair of second piezoceramic drivers 501 causes the second micro-motion platform 4 to longitudinally move and deform, at this time, the second compliant four-bar mechanism 502 transversely shortens, the second compliant parallel guide mechanism 503 transversely deforms, so as to compensate the transverse shortening caused by the longitudinal movement of the second compliant four-bar mechanism 502, so that the transverse position of the second micro-motion platform 4 is not changed.

While embodiments of the invention have been described above, it is not limited to the applications set forth in the description and the embodiments, which are fully applicable in various fields of endeavor to which the invention pertains, and further modifications may readily be made by those skilled in the art, it being understood that the invention is not limited to the details shown and described herein without departing from the general concept defined by the appended claims and their equivalents.