阅读说明：本技术 一种检测hf气体含量的在线检测仪及检测方法 (online detector for detecting HF gas content and detection method ) 是由 黄鑫 于 2019-11-29 设计创作，主要内容包括：本发明涉及的一种检测HF气体含量的在线检测仪及检测方法,包括以下步骤：利用工艺管道内UF<Sub>6</Sub>气体的压力差带动待测工艺UF<Sub>6</Sub>气体流动经过测量室,激光发射端发射激光光束,激光光束经准直后通过透光孔进入测量室；激光光束在测量室内经单次或多次反射后,由平面反射镜将激光光束反射并从相同透光孔射出,并通过接收端探测器进行光电转换；将接收端探测器转换后的电信号经过同轴电缆传输回分析仪表,分析仪表对转换后的电信号进行AD转换、数字信号处理及浓度计算,并实时显示及输出HF气体浓度信号。本发明可靠性高,结构简单,方便拆装,其测量范围宽、精度高、响应快,不受背景气体和粉尘干扰,更可自动修正温度和压力的影响,实用性高。(The invention relates to an online detector for detecting HF gas content and a detection method, which comprises the following steps of utilizing UF in a process pipeline 6 The pressure difference of the gas drives the process UF to be measured 6 The gas flows through the measuring chamber, the laser emitting end emits laser beams, and the laser beams enter the measuring chamber through the light holes after being collimated; after the laser beam is reflected once or for many times in the measuring chamber, the laser beam is reflected by the plane reflector and emitted out from the same light-transmitting hole, and is subjected to photoelectric conversion through a receiving end detector; and transmitting the electric signal converted by the receiving end detector back to the analysis instrument through the coaxial cable, and carrying out AD conversion, digital signal processing and concentration calculation on the converted electric signal by the analysis instrument, and displaying and outputting an HF gas concentration signal in real time. The invention has the advantages of high reliability, simple structure, convenient assembly and disassembly, wide measurement range, high precision, quick response, no interference of background gas and dust, automatic correction of the influence of temperature and pressure and high practicability.)

The on-line detector for detecting HF gas content in kinds of gas is characterized by comprising a protective cover, a measuring device, a ball valve device, a pressure sensor and a mounting base plate;

the protective cover is arranged on the mounting bottom plate, and the measuring device is arranged in the protective cover and is arranged on the mounting bottom plate;

the measuring device includes: the device comprises a measuring chamber, a laser transmitting end, a receiving end detector and a plane reflector;

the measuring chamber is arranged on the mounting bottom plate, the laser emitting end and the receiving end detector are both fixedly arranged on the mounting bottom plate and arranged at the end of the measuring chamber, and the plane mirror is arranged on the mounting bottom plate and arranged at the other end of the measuring chamber;

the pressure sensor is connected with the measuring chamber and arranged on the top surface of the protective cover, and the ball valve assembly is connected with the measuring chamber and arranged on the top surface of the protective cover.

2. The on-line detector for detecting HF gas content according to claim 1, wherein the hood has a hollow square box structure with two ball valve through holes at its top end and sensor through holes at its top end;

further comprising: an air inlet ball valve interface, an air outlet ball valve interface and a sensor interface;

the air inlet ball valve interface, the air outlet ball valve interface and the sensor interface are all arranged on the outer wall of the measuring chamber;

the ball valve assembly includes: an inlet ball valve and an outlet ball valve;

the air inlet ball valve is installed on the air inlet ball valve interface and arranged in the ball valve through hole, the air outlet ball valve is installed on the air outlet ball valve interface and arranged in the ball valve through hole, and the pressure sensor is installed on the sensor interface and arranged in the sensor through hole.

3. The on-line detector for detecting HF gas content of claim 2, wherein the inlet ball valve interface, the outlet ball valve interface and the sensor interface are all fixedly connected to the shield.

4. The on-line detector for detecting HF gas content according to claim 1, wherein the laser emitter is set between the receiver probe and the measuring chamber.

5. The on-line detector for detecting HF gas content according to claim 1, wherein the measuring chamber has gas chamber flanges at both ends.

6. The on-line detector for detecting HF gas content of claim 2, wherein the inlet ball valve interface has an inlet flange and the outlet ball valve interface has an outlet flange;

and a pressure sensor flange is arranged at the connecting part of the sensor interface.

7. The on-line detector for detecting HF gas content according to claim 1, wherein the measuring chamber has a temperature sensor mounting hole on its outer wall;

the bottom of the mounting bottom plate is provided with two shock pads which are respectively arranged at two ends of the mounting bottom plate.

8, detection method for detecting HF gas content, which is characterized by comprising the following steps:

s1 utilizing UF in process lines₆The pressure difference of the gas drives the process UF to be measured₆Gas flows into the measurement chamber through the inlet ball valve and out of the measurement chamber through the outlet ball valve, resulting in UF in the process piping₆Flowing gas through the measurement chamber;

s2, emitting a laser beam by a laser emitting end, wherein the laser beam enters the measuring chamber through a light hole after being collimated;

s3, after the laser beam is reflected once or for many times in the measuring chamber, the laser beam is reflected by a plane mirror and is emitted from the same light-transmitting hole, and photoelectric conversion is carried out through a receiving end detector;

and S4, transmitting the electric signal converted by the receiving end detector back to an analysis instrument through a coaxial cable, and the analysis instrument performs AD conversion, digital signal processing and concentration calculation on the converted electric signal, and displays and outputs an HF gas concentration signal in real time.

9. The detection method for detecting HF gas content according to claim 8, wherein the analyzer includes a tunable semiconductor laser, a beam splitter, a reference cell, an embedded industrial computer and a power supply module;

the reference cell is used for locking the characteristic wavelength of HF gas molecules, and locking the position of an absorption peak of the HF gas in real time, so that the wavelength drift of the detector can be avoided;

the embedded industrial computer is used for controlling the tunable semiconductor laser to drive waveform output, signal acquisition and signal processing;

the power supply module provides stable current and voltage.

10. The detection methods for detecting HF gas content according to claim 8, wherein the measuring chamber is designed to resist corrosion, the cavity is made of 316L stainless steel, the optical window is made of GaF glass or sapphire glass, and the sealing material is made of nitrile rubber or perfluoro rubber;

the measurement chamber further comprises: a temperature sensor and a pressure sensor for temperature pressure compensation and HF gas absolute content calculation.

Technical Field

The invention relates to the technical field of detection devices, in particular to online detectors for detecting HF gas content and detection methods.

Background

At present, the centrifugal uranium concentration is the main mode of the current uranium concentration, the natural uranium is concentrated into low-concentration uranium for nuclear power plant fuel, and the technological medium of the centrifugal uranium concentration is UF₆Gas, UF₆The gas can produce HF gas, UF, when it meets water vapor₆The increase of the content of HF gas in the process gas can reduce the uranium concentration efficiency and increase the corrosion loss of a centrifuge and a process pipeline, and the increase of the content of the HF gas also indicates that the process pipeline has problems in sealing and needs leak detection and leak stoppage treatment. UF from uranium centrifugal concentration plants in the prior art₆The HF gas content in the process gas is measured by a bridge balance resistor, a reference resistor is arranged in a uranium-depleted chamber ( considers the HF gas content of the chamber to be zero), accurate HF gas content cannot be given, only the HF gas content is qualitatively measured, and UF is concentrated due to uranium centrifugation₆The process gas contains no oxygen, so that an HF gas content detector based on an electrochemical sensor, UF, cannot be adopted₆The detector for HF gas content in process gas meets the requirements of uranium centrifugal concentration process and UF₆The nature of the gas.

The existing solution has the following disadvantages:

1. the accurate HF gas content cannot be measured, and only the HF gas content is qualitatively measured;

2. the traditional detector can not meet the characteristics of the uranium centrifugal concentration process and UF₆The nature of the gas.

Disclosure of Invention

The invention aims to solve the technical problems that the traditional detector can not meet the characteristics of a uranium centrifugal concentration process and UF₆The characteristics of the gas and the accurate HF gas content can not be measured.

The invention solves the technical problem by adopting the technical scheme that online detectors for detecting HF gas content and detection methods are constructed, the detection device and the laser transmitting and receiving device are arranged in the protective cover, and the gas valve and the sensor are arranged outside the protective cover, so that the reliability is high, the structure is simple, the disassembly and assembly are convenient, the operation is simple, and the working efficiency is high.

The online detectors for detecting the content of HF gases comprise a protective cover, a measuring device, a ball valve device, a pressure sensor and a mounting bottom plate;

the protective cover is arranged on the mounting bottom plate, and the measuring device is arranged in the protective cover and is arranged on the mounting bottom plate;

the measuring device comprises: the device comprises a measuring chamber, a laser transmitting end, a receiving end detector and a plane reflector;

the measuring chamber is arranged on the mounting base plate, the laser emitting end and the receiving end detector are both fixedly arranged on the mounting base plate and are arranged at the end of the measuring chamber, and the plane mirror is arranged on the mounting base plate and is arranged at the other end of the measuring chamber;

the pressure sensor is connected with the measuring chamber and is arranged on the top surface of the protective cover, and the ball valve assembly is connected with the measuring chamber and is arranged on the top surface of the protective cover.

In the online detectors for detecting the content of HF gas, the protective cover is of a hollow square box structure, two ball valve through holes are formed in the top end of the protective cover, and sensor through holes are further formed in the top end of the protective cover;

further comprising: an air inlet ball valve interface, an air outlet ball valve interface and a sensor interface;

the air inlet ball valve interface, the air outlet ball valve interface and the sensor interface are all arranged on the outer wall of the measuring chamber;

the ball valve assembly includes: an inlet ball valve and an outlet ball valve;

the ball valve that admits air installs on the ball valve interface of admitting air to set up in the ball valve through-hole, the ball valve of giving vent to anger installs on the ball valve interface of giving vent to anger, and sets up in the ball valve through-hole, and pressure sensor installs on the sensor interface, and sets up in the sensor through-hole.

In the online detectors for detecting HF gas content, an air inlet ball valve interface, an air outlet ball valve interface and a sensor interface are all fixedly connected with a protective cover.

In the on-line detectors for detecting HF gas content, the laser emitting end is arranged between the receiving end detector and the measuring chamber at intervals.

In the on-line detectors for detecting HF gas content, the two ends of the measuring chamber are provided with gas chamber flanges.

In the online detectors for detecting HF gas content, the connecting part of the inlet ball valve interface is provided with an inlet flange, and the connecting part of the outlet ball valve interface is provided with an outlet flange;

the connecting part of the sensor interface is provided with a pressure sensor flange.

In the online detectors for detecting the content of HF gas, the outer side wall of a measuring chamber is provided with a temperature sensor mounting hole;

the bottom of the mounting bottom plate is provided with two shock pads which are respectively arranged at two ends of the mounting bottom plate.

In the detection methods for detecting the content of HF gas, the method comprises the following steps:

s1 utilizing UF in process lines₆The pressure difference of the gas drives the process UF to be measured₆Gas flows into the measurement chamber through the inlet ball valve and out of the measurement chamber through the outlet ball valve, resulting in UF in the process piping₆Flowing gas through the measurement chamber;

s2, the laser emitting end emits laser beams which enter the measuring chamber through the light-transmitting hole after being collimated;

s3 laser beam is reflected by the plane mirror and emitted from the same light hole after being reflected once or many times in the measuring room, and is subjected to photoelectric conversion by the receiving end detector;

and S4, transmitting the electric signal converted by the receiving end detector back to the analysis instrument through the coaxial cable, carrying out AD conversion, digital signal processing and concentration calculation on the converted electric signal by the analysis instrument, and displaying and outputting an HF gas concentration signal in real time.

In the detection methods for detecting HF gas content, the analyzer comprises a tunable semiconductor laser, a beam splitter, a reference cell, an embedded industrial computer and a power module;

the reference cell is used for locking the characteristic wavelength of HF gas molecules, and locking the position of an absorption peak of the HF gas in real time, so that the wavelength drift of the detector can be avoided;

the embedded industrial computer is used for controlling the tunable semiconductor laser to drive waveform output, signal acquisition and signal processing;

the power module provides stable current and voltage.

In the detection methods for detecting HF gas content, a measuring chamber is designed to be corrosion-resistant, the cavity is made of 316L stainless steel, an optical window is made of GaF glass or sapphire glass, and a sealing material is made of butadiene acrylonitrile rubber or perfluororubber;

the measuring chamber further comprises: temperature and pressure sensors for temperature and pressure compensation and HF gas absolute content calculation.

The invention according to the scheme has the advantages that the online detectors for detecting the content of HF gas and the detection method thereof are provided, the detection device and the laser transmitting and receiving device are arranged in the protective cover, and the gas valve and the sensor are arranged outside the protective cover, so that the reliability is high, the structure is simple, the disassembly and assembly are convenient, and the UF in the uranium centrifugal concentration process can be quantitatively detected on line₆The content of HF gas in the gas has wide measurement range, high precision, fast response, no interference of background gas and dust, automatic correction of the influence of temperature and pressure, perfect function and high practicability.

Drawings

The invention will be further described with reference to the drawings and examples, in which:

FIG. 1 is a perspective view of on-line detectors for detecting HF gas content according to the present invention;

FIG. 2 is a front view of on-line detectors for detecting HF gas content according to the present invention;

FIG. 3 is a perspective view of on-line detector measuring devices for detecting HF gas content according to the present invention;

FIG. 4 is a front view of on-line detector measuring devices for detecting HF gas content according to the present invention;

FIG. 5 is a schematic diagram of the principle of the detection method for detecting HF gas content according to the present invention;

FIG. 6 is a functional block diagram of detection methods for HF gas content according to the present invention.

In the figure, 1, a shield; 2. mounting a bottom plate; 3. an intake ball valve; 4. an air outlet ball valve; 5. a pressure sensor; 6. a shock pad; 7. a receiving end detector; 8. a laser emitting end; 9. a plane mirror; 10. an inlet ball valve interface; 11. an air outlet ball valve interface; 12. a sensor interface; 13. a measurement chamber.

Detailed Description

For purposes of making the objects, aspects and advantages of the present invention more apparent, the present invention will be described in detail below with reference to the accompanying drawings and examples.

As shown in FIGS. 1-4, kinds of online detectors for detecting HF gas content comprise a protective cover 1, a measuring device, a ball valve device, a pressure sensor 5 and a mounting base plate 2;

the protective cover 1 is arranged on the installation bottom plate 2, and the measuring device is arranged in the protective cover 1 and is arranged on the installation bottom plate 2;

the measuring device comprises: a measuring chamber 13, a laser transmitting end 8, a receiving end detector 7 and a plane reflector;

the measuring chamber 13 is arranged on the mounting base plate 2, the laser emitting end 8 and the receiving end detector 7 are both fixedly arranged on the mounting base plate 2 and arranged at the end of the measuring chamber 13, and the plane mirror 9 is arranged on the mounting base plate 2 and arranged at the other end of the measuring chamber 13;

the pressure sensor 5 is connected with the measuring chamber 13 and arranged on the top surface of the protective cover 1, and the ball valve assembly is connected with the measuring chamber 13 and arranged on the top surface of the protective cover 1.

, the protective cover 1 is of a hollow square box structure, two ball valve through holes are formed in the top end of the protective cover 1, and sensor through holes are formed in the top end of the protective cover 1;

as shown in fig. 3, the method further includes: an air inlet ball valve interface 10, an air outlet ball valve interface 11 and a sensor interface 12;

the air inlet ball valve interface 10, the air outlet ball valve interface 11 and the sensor interface 12 are all arranged on the outer wall of the measuring chamber 13;

the ball valve assembly includes: an inlet ball valve 3 and an outlet ball valve 4;

the air inlet ball valve 3 is installed on the air inlet ball valve interface 10 and arranged in the ball valve through hole, the air outlet ball valve 4 is installed on the air outlet ball valve interface 11 and arranged in the ball valve through hole, and the pressure sensor 5 is installed on the sensor interface 12 and arranged in the sensor through hole.

, the inlet ball valve interface 10, the outlet ball valve interface 11 and the sensor interface 12 are all fixedly connected with the protective cover 1.

, the laser emitting end 8 is arranged at intervals between the receiving end detector 7 and the measuring chamber 13.

, air chamber flanges are provided on both ends of the measuring chamber 13.

The connecting part of the air inlet ball valve interface 10 is provided with an air inlet flange, and the connecting part of the air outlet ball valve interface 11 is provided with an air outlet flange;

the connection part of the sensor interface 12 is provided with a pressure sensor 5 flange.

, a temperature sensor mounting hole is arranged on the outer side wall of the measuring chamber 13;

the bottom of the mounting bottom plate 2 is provided with two shock pads 6 which are respectively arranged at two ends of the mounting bottom plate 2.

As shown in fig. 6, detection methods for detecting the content of HF gas include the following steps:

s1 utilizing UF in process lines₆The pressure difference of the gas drives the process UF to be measured₆Gas flows into the measurement chamber 13 through the inlet ball valve 3 and out of the measurement chamber 13 through the outlet ball valve 4, so that UF in the process pipe flows₆The gas flows through the measurement chamber 13;

s2, the laser emitting end 8 emits laser beams which enter the measuring chamber 13 through the light transmission hole after being collimated;

s3 laser beam is reflected once or many times in the measuring chamber 13, reflected by the plane mirror 9 and emitted from the same light hole, and is subjected to photoelectric conversion by the receiving end detector 7;

and S4, transmitting the electric signal converted by the receiving end detector 7 back to the analysis instrument through the coaxial cable, and the analysis instrument performs AD conversion, digital signal processing and concentration calculation on the converted electric signal, and displays and outputs an HF gas concentration signal in real time.

, the analyzer comprises a tunable semiconductor laser, a beam splitter, a reference cell, an embedded industrial computer and a power supply module;

the reference cell is used for locking the characteristic wavelength of HF gas molecules, and locking the position of an absorption peak of the HF gas in real time, so that the wavelength drift of the detector can be avoided;

the embedded industrial computer is used for controlling the tunable semiconductor laser to drive waveform output, signal acquisition and signal processing;

the power module provides stable current and voltage.

, the measuring chamber 13 is made of corrosion-resistant design, the cavity is made of 316L stainless steel, the optical window is made of GaF glass or sapphire glass, and the sealing material is made of butadiene acrylonitrile rubber or perfluororubber;

the measurement chamber 13 further includes: a temperature sensor and pressure sensor 5, the temperature sensor and pressure sensor 5 being used for temperature pressure compensation and HF gas absolute content calculation.

, the inlet ball valve 3 and the outlet ball valve 4 of the measuring device are connected to the measuring chamber 13 through a copper tube with the diameter of 10mm, and UF in the process pipeline is utilized₆The pressure difference of the gas drives the process UF to be measured₆The gas flows through the measuring chamber 13, the laser beam enters the measuring chamber 13 through the light hole after being collimated, the beam is emitted from the same light hole after being reflected once or for multiple times in the measuring chamber 13 and is subjected to photoelectric conversion through the receiving end detector 7, the converted signal is transmitted back to the analysis instrument through the coaxial cable, and the analysis instrument performs AD conversion, digital signal processing and concentration calculation on the converted electric signal and displays and outputs an HF gas concentration signal in real time.

Further , as shown in FIG. 5, the calculation formula is as follows:

the calculation formula is as follows: i (v) ═ I₀(v)exp[-σ(v)CL]

Wherein, I (v): intensity of transmitted light of light beam passing through gas to be measured, I₀(v) The method comprises the following steps Incident light intensity, σ (v): absorption cross section of measured gas molecule, C: concentration of the measured HF gas, L: an optical path;

the σ (V) absorption cross section is the product of the absorption line intensity of HF molecules S (V), which is influenced by the gas temperature, and the absorption line shape of HF molecules phi (V), which is influenced by the pressure broadening. Therefore, in actual detection, the HF gas content detector needs to input temperature and pressure values for compensation. If the temperature and pressure of the process gas change greatly, temperature and pressure compensation needs to be carried out in real time by connecting the temperature and pressure sensor 5.

, the tunable semiconductor laser is butterfly packaged semiconductor laser, the light emitted by the laser is transmitted to the laser collimation unit in the measurement chamber 13 through the optical fiber, the laser passes through the measured gas flowing through the measurement chamber 13, the receiving sensor circuit detects the laser beam absorbed by the measured gas, the optical signal is converted into electrical signal and transmitted to the signal processing unit of the analyzer, i.e. the embedded industrial computer, and the embedded industrial computer obtains the concentration of the measured gas after spectral calculation.

the measurement of HF gas is carried out by TDLAS technique, tunable semiconductor laser is used as light source to emit laser beam with specific wavelength (absorption wavelength 1312.5nm) and passes through the gas to be measured, optical signal is converted into electric signal by receiving end detector 7, and the attenuation of laser intensity caused by the absorption of the gas to be measured is analyzed to realize high sensitivity, rapid and accurate measurement of HF gas concentration₆Interference of gas.

Steps, UF₆The gas is uranium hexafluoride gas.

The invention provides online detectors for detecting HF gas content and detection method, wherein the detection device and laser emitting and receiving device are arranged in the protective cover, and the gas valve and sensor are arranged outside the protective cover, which has high reliability, simple structure, convenient disassembly and assembly, and can quantitatively detect UF in uranium centrifugal concentration process on line₆The content of HF gas in the gas has wide measuring range, high precision and fast response, is not interfered by background gas and dust, and can be used for measuring the content of HF gas in the gasThe influence of temperature and pressure is dynamically corrected, the function is complete, and the practicability is high.

Although the present invention has been described with reference to the above embodiments, the scope of the present invention is not limited thereto, and modifications, substitutions and the like of the above members are intended to fall within the scope of the claims of the present invention without departing from the spirit of the present invention.