阅读说明：本技术 光学滤光器系统 (Optical filter system ) 是由 H·泰希曼 A·杜兰迪 P·塞茨 笠原隆 柴山胜己 于 2018-06-12 设计创作，主要内容包括：本发明的目的在于提供可靠性高的光学滤光器系统。本发明的光学滤光器系统具备法布里-珀罗干涉滤光器(1)、及控制法布里-珀罗干涉滤光器的控制器(51)。法布里-珀罗干涉滤光器(1)具备第1镜部(31)、第2镜部(32)、设置于第1镜部(31)的第1驱动电极(12)及第1监视电极(13)、以及设置于第2镜部(32)的第2驱动电极(14)及第2监视电极(15)。控制器(51)具备控制部(55),该控制部基于在将交流电流施加至第1监视电极(13)与第2监视电极(15)之间时产生于第1监视电极(13)与第2监视电极(15)之间的交流电压算出第1镜部(31)与第2镜部(32)之间的静电电容。(The object of the present invention is to provide an optical filter system with high reliability. The optical filter system of the present invention includes a Fabry-Perot interference filter (1) and a controller (51) for controlling the Fabry-Perot interference filter. A Fabry-Perot interference filter (1) is provided with a1 st mirror part (31), a 2 nd mirror part (32), a1 st drive electrode (12) and a1 st monitor electrode (13) provided in the 1 st mirror part (31), and a 2 nd drive electrode (14) and a 2 nd monitor electrode (15) provided in the 2 nd mirror part (32). The controller (51) is provided with a control unit (55) which calculates the electrostatic capacitance between the 1 st mirror unit (31) and the 2 nd mirror unit (32) on the basis of an alternating voltage generated between the 1 st monitoring electrode (13) and the 2 nd monitoring electrode (15) when an alternating current is applied between the 1 st monitoring electrode (13) and the 2 nd monitoring electrode (15).)

An optical filter system of the type , comprising:

a fabry-perot interference filter; and

a controller that controls the Fabry-Perot interference filter,

the Fabry-Perot interference filter is provided with:

a1 st mirror part;

a 2 nd mirror portion which is disposed so as to face the 1 st mirror portion via a gap, and a distance between the 1 st mirror portion and the light transmitting region is adjusted by an electrostatic force;

a1 st drive electrode provided on the 1 st mirror portion so as to surround the light transmission region when viewed from a direction in which the 1 st mirror portion and the 2 nd mirror portion face each other;

a 2 nd driving electrode provided on the 2 nd mirror portion so as to face the 1 st driving electrode;

a1 st monitor electrode provided on the 1 st mirror portion so that at least portions thereof overlap the light transmission region when viewed from the direction, and electrically insulated from the 1 st drive electrode, and

a 2 nd monitor electrode provided in the 2 nd mirror portion so as to face the 1 st monitor electrode and electrically insulated from the 2 nd drive electrode,

the controller is provided with:

a1 st current source generating the electrostatic force by applying a driving current between the 1 st driving electrode and the 2 nd driving electrode;

a 2 nd current source for applying an alternating current having a frequency higher than the resonance frequencies of the 1 st mirror portion and the 2 nd mirror portion between the 1 st monitor electrode and the 2 nd monitor electrode;

a detection unit that detects an alternating voltage generated between the 1 st monitor electrode and the 2 nd monitor electrode during application of the alternating current; and

and a control unit that controls the 1 st current source based on the amount of charge accumulated between the 1 st mirror unit and the 2 nd mirror unit, and calculates the capacitance between the 1 st mirror unit and the 2 nd mirror unit based on a detection result of the detection unit.

2. The optical filter system of claim 1,

the 1 st driving electrode is exposed to the gap.

3. The optical filter system of claim 1 or 2, wherein,

the 2 nd driving electrode is disposed on a surface of the 2 nd mirror portion opposite to the gap.

4. The optical filter system of claim 1 or 2, wherein,

the 2 nd driving electrode is exposed to the gap.

5. The optical filter system of any of claims 1-4 wherein,

the 1 st monitor electrode is exposed to the gap.

6. The optical filter system of any of claims 1 to 5, wherein,

the 2 nd monitor electrode is exposed to the gap.

7. The optical filter system of any of claims 1 to 5, wherein,

the 2 nd monitor electrode is disposed on a surface of the 2 nd mirror portion opposite to the gap.

8. The optical filter system of any of claims 1 to 5, wherein,

the 2 nd drive electrode and the 2 nd monitor electrode are spaced apart from each other in the direction.