阅读说明：本技术 一种利用干涉原理完成激光波长测量的装置与方法 (Device and method for measuring laser wavelength by using interference principle ) 是由 张白 杨来龙 高洋 周春艳 刘杰 于 2019-12-03 设计创作，主要内容包括：本发明涉及一种利用干涉原理完成激光波长测量的装置,包括待测激光源、分光镜、反光镜、第一平面反射镜、第二平面反射镜、透镜、光电探测器、处理器,待测激光源向分光镜发射待测激光束,分光镜将待测激光束反射/透射至反光镜,以及将待测激光束透射/反射至第二平面反射镜,反光镜将接收到的待测激光束反射至第一平面反射镜；第一平面反射镜将接收到的待测激光束反射至透镜,第二平面反射镜将接收到的待测激光束反射至透镜；透镜将接收到的两束待测激光束透射至光电探测器,与光电探测器电连接的处理器检测光电探测器上产生的干涉现象,并计算待测激光束的波长。(The invention relates to a device for measuring laser wavelength by utilizing an interference principle, which comprises a laser source to be measured, a spectroscope, a reflector, a first plane reflector, a second plane reflector, a lens, a photoelectric detector and a processor, wherein the laser source to be measured emits a laser beam to be measured to the spectroscope, the spectroscope reflects/transmits the laser beam to be measured to the reflector and transmits/reflects the laser beam to be measured to the second plane reflector, and the reflector reflects the received laser beam to be measured to the first plane reflector; the first plane reflector reflects the received laser beam to be measured to the lens, and the second plane reflector reflects the received laser beam to be measured to the lens; the lens transmits the two received laser beams to be detected to the photoelectric detector, and the processor electrically connected with the photoelectric detector detects an interference phenomenon generated on the photoelectric detector and calculates the wavelength of the laser beams to be detected.)

1. A device for measuring laser wavelength by using interference principle is characterized in that: the method comprises the following steps:

the laser source to be detected is used for emitting laser beams to be detected;

the spectroscope is used for receiving the laser beam to be detected, reflecting/transmitting the laser beam to be detected to the reflector and transmitting/reflecting the laser beam to the second plane reflector;

the reflecting mirror is used for receiving the laser beam to be detected reflected/transmitted by the spectroscope and reflecting the received laser beam to be detected to the first plane reflecting mirror;

the first plane reflector is used for receiving the laser beam to be detected reflected by the reflector and reflecting the received laser beam to be detected to the lens;

the second plane reflector is relatively fixedly connected with the first plane reflector and is used for receiving the laser beam to be detected transmitted/reflected by the spectroscope and reflecting the received laser beam to be detected to the lens;

the lens is used for receiving the laser beam to be detected reflected by the first plane reflector and the second plane reflector and transmitting the received laser beam to be detected to the photoelectric detector;

the photoelectric detector is used for receiving the laser beam to be detected transmitted by the lens;

and the processor is electrically connected with the photoelectric detector and used for detecting the interference phenomenon generated on the photoelectric detector and calculating the wavelength of the laser beam to be detected.

2. The device for laser wavelength measurement by using interference principle according to claim 1, wherein: the first plane reflector or the second plane reflector is connected with a precision displacement device and used for driving the first plane reflector and the second plane reflector to move in the horizontal direction or the vertical direction of the first plane reflector and the second plane reflector.

3. The device for laser wavelength measurement by using interference principle according to claim 2 is characterized in that: the precise displacement device is a piezoelectric ceramic motor without a guide rail.

4. The device for laser wavelength measurement by using interference principle according to claim 1, wherein: the lens is a convex lens.

5. The device for laser wavelength measurement by using interference principle according to claim 4, wherein: the photoelectric detector is arranged at the focus of the convex lens.

6. An arrangement for performing laser wavelength measurements using the principle of interference according to any of claims 1-5, characterized in that: the device for measuring the laser wavelength by utilizing the interference principle is arranged in the shell, and the laser source to be measured, the spectroscope, the reflector, the lens, the photoelectric detector and the precise displacement device are fixedly arranged relative to the shell respectively.

7. The device for laser wavelength measurement by using interference principle according to claim 1, wherein: the first plane reflector comprises a first reflecting surface, and the laser beam to be measured reflected to the first plane reflector by the reflector is incident to the first reflecting surface; the second plane reflector comprises a second reflecting surface, and the laser beam to be measured transmitted/reflected to the second plane reflector by the spectroscope is emitted into the second reflecting surface.

8. A method for measuring laser wavelength by using interference principle is characterized in that: the method comprises the following steps:

step S1: starting a laser source to be detected, and fixedly arranging the laser source to be detected, a spectroscope, a reflector, a lens, a photoelectric detector and a precision displacement device in a shell respectively, so that the photoelectric detector can receive a laser beam to be detected;

step S2: controlling a precise displacement device to drive a first plane reflector and a second plane reflector to move in the horizontal direction or the vertical direction of the first plane reflector and the second plane reflector, so that a laser beam to be detected received by a photoelectric detector can generate a destructive interference or constructive interference phenomenon; and the processor records the displacement X1 of the first plane mirror and the second plane mirror;

step S3: continuously controlling the precision displacement device to drive the first plane reflector and the second plane reflector to move in the horizontal direction or the vertical direction of the first plane reflector and the second plane reflector until a next or Nth phase interference elimination or constructive interference phenomenon is generated on the photoelectric detector, wherein N is a positive integer; and the processor records the total displacement X2 of the first plane mirror and the second plane mirror which are moved twice;

step S4: and the processor calculates the wavelength of the laser beam to be measured according to the two displacements of the first plane reflector and the second plane reflector in the horizontal direction or the vertical direction.

9. A method for performing laser wavelength measurement using the principle of interference according to claim 8, wherein: the step S1 specifically includes the following steps:

step S1-1: starting a laser source to be detected, and arranging the laser source to be detected, a spectroscope, a reflector, a first plane reflector, a second plane reflector and a precision displacement device in a shell, so that the first plane reflector can receive a laser beam to be detected reflected by the reflector, and the second plane reflector can receive the laser beam to be detected transmitted/reflected by the spectroscope;

step S1-2: adjusting the angles of the spectroscope and the reflector to enable the laser beam to be measured reflected by the first plane reflector to be parallel to the laser beam to be measured reflected by the second plane reflector;

step S1-3: the lens is arranged in the shell, so that the laser beam to be measured reflected to the lens by the first plane reflector and the second plane reflector can vertically enter the lens;

step S1-4: and arranging the photoelectric detector at the focus of the lens, so that the photoelectric detector can receive the laser beam to be detected transmitted by the lens.

Technical Field

The invention relates to the technical field of laser wavelength measurement, in particular to a device and a method for completing laser wavelength measurement by using an interference principle.

Background

The accurate measurement of the laser wavelength is very important for the field of optical precision measurement, and taking a laser interferometer as an example, the measurement precision of the laser wavelength is directly related to the precision of the laser wavelength, so how to improve the measurement precision of the laser wavelength and reduce the complexity and the cost of a laser wavelength measurement device becomes important research content in the related field.

Disclosure of Invention

The present invention aims at overcoming the demerits of available technology and providing one laser wavelength measuring device and method based on interference principle.

In order to achieve the above object, the embodiments of the present invention provide the following technical solutions:

an apparatus for performing laser wavelength measurements using the principle of interference, comprising:

the laser source to be detected is used for emitting laser beams to be detected;

the spectroscope is used for receiving the laser beam to be detected, reflecting/transmitting the laser beam to be detected to the reflector and transmitting/reflecting the laser beam to the second plane reflector;

the reflecting mirror is used for receiving the laser beam to be detected reflected/transmitted by the spectroscope and reflecting the received laser beam to be detected to the first plane reflecting mirror;

the first plane reflector is used for receiving the laser beam to be detected reflected by the reflector and reflecting the received laser beam to be detected to the lens;

the second plane reflector is relatively fixedly connected with the first plane reflector and is used for receiving the laser beam to be detected transmitted/reflected by the spectroscope and reflecting the received laser beam to be detected to the lens;

the lens is used for receiving the laser beam to be detected reflected by the first plane reflector and the second plane reflector and transmitting the received laser beam to be detected to the photoelectric detector;

the photoelectric detector is used for receiving the laser beam to be detected transmitted by the lens;

and the processor is electrically connected with the photoelectric detector and used for detecting the interference phenomenon generated on the photoelectric detector and calculating the wavelength of the laser beam to be detected.

The laser source to be detected emits a laser beam to be detected to the spectroscope, the spectroscope divides the laser beam to be detected into two laser beams, the spectroscope reflects/transmits the laser beam to be detected to the reflector, the spectroscope transmits/reflects the laser beam to be detected to the second plane reflector, and the reflector reflects the received laser beam to be detected to the first plane reflector. The first plane reflector reflects the received laser beam to be measured to the lens, and the second plane reflector reflects the received laser beam to be measured to the lens. The lens transmits the two received laser beams to be detected to the photoelectric detector, and the processor electrically connected with the photoelectric detector detects an interference phenomenon generated on the photoelectric detector.

Furthermore, in order to better implement the present invention, the first plane mirror or the second plane mirror is connected with a precision displacement device for driving the first plane mirror and the second plane mirror to move in the horizontal direction or the vertical direction of the first plane mirror and the second plane mirror.

Furthermore, in order to better realize the invention, the precise displacement device is a piezoelectric ceramic motor without a guide rail, so that the influence of the machining error of the guide rail on the wavelength measurement is avoided, and the precision of the wavelength measurement result is improved.

Further, in order to better implement the present invention, the lens is a convex lens.

Furthermore, in order to better implement the present invention, the photodetector is disposed at a focal point of the convex lens.

The lens adopts convex lens, and according to convex lens's transmission principle, the light of kicking into convex lens perpendicularly all can pass through convex lens's focus to when photoelectric detector set up in convex lens's focus department, can produce the interference phenomenon through the laser beam that awaits measuring who jets into.

Furthermore, in order to better realize the invention, the laser measuring device further comprises a shell, the device for measuring the laser wavelength by utilizing the interference principle is arranged in the shell, and the laser source to be measured, the spectroscope, the reflector, the lens, the photoelectric detector and the precision displacement device are respectively and fixedly arranged relative to the shell.

Furthermore, in order to better implement the present invention, the first plane mirror includes a first reflecting surface, and the laser beam to be measured reflected by the reflecting mirror to the first plane mirror is incident on the first reflecting surface; the second plane reflector comprises a second reflecting surface, and the laser beam to be measured transmitted/reflected to the second plane reflector by the spectroscope is emitted into the second reflecting surface.

The first reflecting surface of the first plane reflecting mirror is parallel to the horizontal plane, the second reflecting surface of the second plane reflecting mirror forms an included angle with the horizontal plane, and the included angle between the first reflecting surface and the second reflecting surface is an obtuse angle.

As another possible implementation manner, the first reflecting surface of the first planar reflector is perpendicular to the horizontal plane, the second reflecting surface of the second planar reflector forms an included angle with the horizontal plane, and the included angle between the first reflecting surface and the second reflecting surface is an obtuse angle.

A method for measuring laser wavelength by using interference principle includes the following steps:

step S1: starting a laser source to be detected, and fixedly arranging the laser source to be detected, a spectroscope, a reflector, a lens, a photoelectric detector and a precision displacement device in a shell respectively, so that the photoelectric detector can receive a laser beam to be detected;

step S2: controlling a precise displacement device to drive a first plane reflector and a second plane reflector to move in the horizontal direction or the vertical direction of the first plane reflector and the second plane reflector, so that a laser beam to be detected received by a photoelectric detector can generate a destructive interference or constructive interference phenomenon; and the processor records the displacement X1 of the first plane mirror and the second plane mirror;

step S3: continuously controlling the precision displacement device to drive the first plane reflector and the second plane reflector to move in the horizontal direction or the vertical direction of the first plane reflector and the second plane reflector until a next or Nth phase interference elimination or constructive interference phenomenon is generated on the photoelectric detector, wherein N is a positive integer; and the processor records the total displacement X2 of the first plane mirror and the second plane mirror which are moved twice;

step S4: and the processor calculates the wavelength of the laser beam to be measured according to the two displacements of the first plane reflector and the second plane reflector in the horizontal direction or the vertical direction.

Further, in order to better implement the present invention, the step S1 specifically includes the following steps:

step S1-1: starting a laser source to be detected, and arranging the laser source to be detected, a spectroscope, a reflector, a first plane reflector, a second plane reflector and a precision displacement device in a shell, so that the first plane reflector can receive a laser beam to be detected reflected by the reflector, and the second plane reflector can receive the laser beam to be detected transmitted/reflected by the spectroscope;

step S1-2: adjusting the angles of the spectroscope and the reflector to enable the laser beam to be measured reflected by the first plane reflector to be parallel to the laser beam to be measured reflected by the second plane reflector;

step S1-3: the lens is arranged in the shell, so that the laser beam to be measured reflected to the lens by the first plane reflector and the second plane reflector can vertically enter the lens;

step S1-4: and arranging the photoelectric detector at the focus of the lens, so that the photoelectric detector can receive the laser beam to be detected transmitted by the lens.

Compared with the prior art, the invention has the beneficial effects that:

the optical device used by the measuring device is simple, and a laser beam with standard wavelength is not required to be added for measurement, so that the complexity of the measuring device is greatly reduced, and the measuring precision of the device on the wavelength of the laser beam to be measured is improved;

the precision displacement device is a piezoelectric ceramic motor without a guide rail, so that the influence of the machining error of the guide rail on the wavelength measurement is avoided, and the precision of the wavelength measurement result is improved;

the invention can measure the variation of the optical path difference of the laser beam to be measured when the measuring device moves in the horizontal direction, and can compensate the variation of the optical path difference caused by the displacement in the vertical direction when the measuring device moves in the vertical direction or generates the displacement in the vertical direction due to the influence of gravity, thereby further improving the measurement precision and accuracy of the wavelength of the laser beam to be measured, and the device participating in the measurement can complete the measurement of the wavelength of the laser beam to be measured without adding any optical device;

the invention introduces the first plane reflector in the interference light path, when the measuring device has vibration perpendicular to the displacement direction or errors caused by other factors in the movement process, because the second plane reflector and the first plane reflector simultaneously move perpendicular to the displacement direction, the variation of the optical path difference of the interference light path realizes compensation, and the measuring precision of laser wavelength is improved; when the included angle between the second plane mirror and the first plane mirror is closer to 180 degrees, i.e. closer to parallel, the influence of the error perpendicular to the displacement direction on the laser wavelength measurement accuracy is smaller.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.

FIG. 1 is a schematic structural diagram of a measuring device according to the present invention;

FIG. 2 is a schematic view of another embodiment of the measuring device of the present invention;

FIG. 3 is a schematic diagram of the measuring apparatus of the present invention after the movable mirror is moved in its horizontal direction;

FIG. 4 is an angular view of a second plane mirror according to the present invention;

FIG. 5 is a schematic diagram illustrating a method for calculating the variation of the optical path difference after the movable mirror moves in the horizontal direction;

FIG. 6 is a schematic view of the movable mirror of the measuring apparatus according to the present invention after moving in its vertical direction;

FIG. 7 is a schematic diagram illustrating a method for calculating a variation of an optical path difference after a movable mirror moves in a vertical direction;

fig. 8 is a schematic view of the structure of the movable mirror moving in its vertical direction in the measuring apparatus of the present invention.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without making any creative effort, shall fall within the protection scope of the present invention.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures. Also, in the description of the present invention, the terms "first", "second", and the like are used for distinguishing between descriptions and not necessarily for describing a relative importance or implying any actual relationship or order between such entities or operations.