阅读说明：本技术 一种高精度配气方法及装置 (High-precision gas distribution method and device ) 是由 刘沂玲 李士良 张建伟 黄鹏 王振 于 2018-07-20 设计创作，主要内容包括：本发明提供一种高精度配气方法及装置,该方法采用多个具有相同额定流程的单一流程的流量控制器实现；该方法包括：接收预设配气浓度值并据此确定用于输入样气的流量控制器的个数m以及用于输入底气的流量控制器的个数n；将m个流量控制器与样气通道连通,n个流量控制器与底气通道连通。该装置包括：多个具有相同额定流程的单一流程的流量控制器；进气控制阀,与流量控制器的进口端相连；处理器,与进气控制阀相连,用于将m个流量控制器与样气管道相连通,将n个流量控制器与底气管道相连通。本发明能避免高精度流量计的修正系数带入最终的配气浓度计算中,实现高精度配气。(The invention provides a high-precision gas distribution method and a device, wherein the method is realized by adopting a plurality of single-flow controllers with the same rated flow; the method comprises the following steps: receiving a preset gas distribution concentration value and determining the number m of flow controllers for inputting sample gas and the number n of flow controllers for inputting bottom gas according to the preset gas distribution concentration value; and communicating the m flow controllers with the sample gas channel, and communicating the n flow controllers with the bottom gas channel. The device includes: a plurality of single-process flow controllers having the same nominal process flow; the air inlet control valve is connected with the inlet end of the flow controller; and the processor is connected with the air inlet control valve and is used for communicating the m flow controllers with the sample gas pipeline and communicating the n flow controllers with the bottom gas pipeline. The invention can avoid the correction coefficient of the high-precision flowmeter from being brought into the final gas distribution concentration calculation, and realize high-precision gas distribution.)

1. A high-precision gas distribution method is characterized in that the method is realized by adopting a plurality of single-flow controllers, and the plurality of single-flow controllers have the same rated flow; the high-precision gas distribution method comprises the following steps:

receiving a preset gas distribution concentration value;

determining the number m of flow controllers for inputting sample gas and the number n of flow controllers for inputting bottom gas according to the preset gas distribution concentration value;

and communicating the m flow controllers with the sample gas channel, and communicating the n flow controllers with the bottom gas channel.

2. The high-precision gas distribution method according to claim 1, wherein after the m flow controllers are communicated with the sample gas channel and the n flow controllers are communicated with the bottom gas channel, the method comprises the following steps:

recording a flow controller communicated with the sample gas channel as a first flow controller, and recording a flow controller communicated with the bottom gas channel as a second flow controller; and calculating an actual gas distribution concentration value according to the actual flow values of the first flow controller and the second flow controller.

3. A high-precision gas distribution method according to claim 2, wherein the actual gas distribution concentration value C_p＝F₁*C₀/(F₁+F₂) (ii) a Wherein, C₀Is the concentration value of the sample gas; f₁The sum of the actual flow values of all the first flow controllers; f₂Is the sum of the actual flow values of all the second flow controllers.

4. A high-precision air distribution method according to claim 2, wherein the actual flow values of the first flow controller and the second flow controller are measured by the same high-precision flow meter.

5. The utility model provides a high accuracy gas distribution device, includes appearance gas channel, end gas channel, exit channel, its characterized in that, high accuracy gas distribution device includes:

a plurality of single-pass flow controllers having an inlet end and an outlet end, the plurality of single-pass flow controllers having the same nominal flow;

the air inlet control valve is connected with the inlet end of the flow controller and is used for controlling whether the flow controller is communicated with one of the sample gas channel and the bottom gas channel;

and the processor is connected with the air inlet control valve and is used for communicating the m flow controllers with the sample gas pipeline and communicating the n flow controllers with the bottom gas pipeline.

6. The high-precision air distribution device according to claim 5, wherein the high-precision air distribution device comprises an air outlet control valve and a high-precision flow meter connected with the air outlet control valve, and the air outlet control valve is connected with an outlet end of the flow controller and the outlet pipeline and is used for controlling whether the flow controller is communicated with one of the high-precision flow meter and the outlet channel.

7. The high-precision gas distribution device according to claim 5 or 6, wherein the high-precision gas distribution device comprises a one-way valve arranged at an outlet end of the flow controller.

8. The high-precision gas distribution device according to claim 5, wherein the processor is configured to mark the flow controller communicating with the sample gas channel as a first flow controller, and mark the flow controller communicating with the bottom gas channel as a second flow controller; and calculating an actual gas distribution concentration value according to the actual flow values of the first flow controller and the second flow controller.

9. The high-precision gas distribution device according to claim 8, further comprising a display connected to the processor, wherein the display is configured to display the actual gas distribution concentration value.

10. The high-precision air distribution device according to claim 5, wherein the high-precision air distribution device comprises a memory for storing an actual flow value recorded after the flow of each flow controller is measured by the same high-precision flow meter.

Technical Field

The invention relates to the technical field of gas distribution, in particular to a high-precision gas distribution method and device.

Background

The gas distribution is to accurately distribute (dilute) standard gas with a certain concentration according to a preset proportion, and can be used for standard gas proportioning, dilution, instrument linear test and the like.

Disclosure of Invention

Features and advantages of the invention will be set forth in part in the description which follows, or may be obvious from the description, or may be learned by practice of the invention.

In order to solve the problems in the prior art, the invention provides a high-precision gas distribution method which is realized by adopting a plurality of single-flow controllers, wherein the plurality of single-flow controllers have the same rated flow; the gas distribution method comprises the following steps:

receiving a preset gas distribution concentration value;

determining the number m of flow controllers for inputting sample gas and the number n of flow controllers for inputting bottom gas according to the preset gas distribution concentration value;

and communicating the m flow controllers with the sample gas channel, and communicating the n flow controllers with the bottom gas channel.

Optionally, after the m flow controllers are communicated with the sample gas channel and the n flow controllers are communicated with the bottom gas channel, the method includes:

recording a flow controller communicated with the sample gas channel as a first flow controller, and recording a flow controller communicated with the bottom gas channel as a second flow controller; and calculating an actual gas distribution concentration value according to the actual flow values of the first flow controller and the second flow controller.

Optionally, the actual air distribution concentration value C_p＝F₁*C₀/(F₁+F₂) (ii) a Wherein, C₀Is the concentration value of the sample gas; f₁The sum of the actual flow values of all the first flow controllers; f₂Is the sum of the actual flow values of all the second flow controllers.

Optionally, the actual flow values of the first flow controller and the second flow controller are measured by the same high-precision flow meter.

The embodiment of the invention also provides a high-precision gas distribution device, which comprises a sample gas channel, a bottom gas channel and an outlet channel, and is characterized in that the high-precision gas distribution device comprises:

a plurality of single-pass flow controllers having an inlet end and an outlet end, the plurality of single-pass flow controllers having the same nominal flow;

the air inlet control valve is connected with the inlet end of the flow controller and is used for controlling whether the flow controller is communicated with one of the sample gas channel and the bottom gas channel;

and the processor is connected with the air inlet control valve and is used for communicating the m flow controllers with the sample gas pipeline and communicating the n flow controllers with the bottom gas pipeline.

Optionally, the high-precision gas distribution device includes a gas outlet control valve and a high-precision flow meter connected to the gas outlet control valve, and the gas outlet control valve is connected to the outlet end of the flow controller and the outlet pipe, and is configured to control whether the flow controller is communicated with one of the high-precision flow meter and the outlet channel.

Optionally, the high-precision air distribution device comprises a one-way valve arranged at an outlet end of the flow controller.

Optionally, the processor is further configured to mark a flow controller in communication with the sample gas channel as a first flow controller, and a flow controller in communication with the bottom gas channel as a second flow controller; and calculating an actual gas distribution concentration value according to the actual flow values of the first flow controller and the second flow controller.

Optionally, the system further comprises a display connected to the processor, wherein the display is configured to display the actual gas distribution concentration value.

Optionally, the high-precision gas distribution device includes a memory for storing an actual flow value recorded after the flow of each of the flow controllers is measured by the same high-precision flow meter.

The invention provides a high-precision gas distribution method and a high-precision gas distribution device, which calibrate each single-flow controller through a high-precision flowmeter, and simultaneously avoid the fact that a correction coefficient of the high-precision flowmeter is brought into final gas distribution concentration calculation, so that high-precision zero-error gas distribution is realized.

The features and content of these solutions will be better understood by those skilled in the art from reading the present description.

Drawings

The advantages and realisation of the invention will be more apparent from the following detailed description, given by way of example, with reference to the accompanying drawings, which are given for the purpose of illustration only, and which are not to be construed in any way as limiting the invention, and in which:

fig. 1 is a schematic flow chart of a high-precision gas distribution method according to an embodiment of the present invention.

Fig. 2 is a schematic structural diagram of a high-precision air distribution device according to an embodiment of the present invention.

Fig. 3 is a schematic structural diagram of a high-precision air distribution device according to another embodiment of the present invention.

Fig. 4 is a schematic structural diagram of a high-precision air distribution device according to another embodiment of the present invention.

Fig. 5 is a schematic structural diagram of a high-precision air distribution device according to another embodiment of the present invention.

Detailed Description

As shown in fig. 1, the present invention provides a high-precision gas distribution method, which is implemented by using a plurality of single-flow controllers, where the plurality of single-flow controllers have the same rated flow; the single-flow controller in the present invention means that the flow controller has only one flow, such as capillary type, orifice type, etc. The single flow may be considered the full flow of the flow controller.

The high-precision gas distribution method comprises the following steps:

101. receiving a preset gas distribution concentration value;

102. determining the number m of flow controllers for inputting sample gas and the number n of flow controllers for inputting bottom gas according to the preset gas distribution concentration value; wherein m and n are natural numbers;

when determining the number m and n, the concentration of the sample gas introduced into the sample gas pipeline is generally combined. For example, the number m, n may be determined according to a ratio of the sample gas concentration value to a preset gas concentration value.

103. And communicating the m flow controllers with the sample gas channel, and communicating the n flow controllers with the bottom gas channel.

Because the flow of each flow controller is the same, the invention achieves the final gas distribution concentration value by determining the number of the flow controllers communicated with the sample gas channel and the bottom gas channel. For example, if the sample gas concentration is 100% and the preset gas distribution concentration value is 50%, the number of the flow controllers communicating with the sample gas channel and the number of the flow controllers communicating with the bottom gas channel should be the same, for example, 2, that is, m is 2, n is 2, and may be 1, 3 or more.

In one embodiment of the present invention, after step 103, comprises:

recording a flow controller communicated with the sample gas channel as a first flow controller, and recording a flow controller communicated with the bottom gas channel as a second flow controller; and calculating an actual gas distribution concentration value according to the actual flow values of the first flow controller and the second flow controller. In specific implementation, the actual air distribution concentration value can be output and displayed, and generally, the actual air distribution concentration value is close to the preset air distribution concentration value.

More specifically, the flow rate of the flow control can be calibrated by the same high-precision flow meter for the actual flow rate value measured by each flow controller. If the correction coefficient of the high-precision flowmeter is recorded as k, the sum of the actual flow values of all the first flow controllers measured by the high-precision flowmeter is F₁The sum of the actual flow values of all the second flow controllers measured by the high-precision flowmeter is F₂(ii) a The final actual gas distribution concentration value C_p＝kF₁*C₀/(kF₁+kF₂)＝F₁*C₀/(F₁+F₂). It can be seen that the high-precision flowmeter correction coefficient does not affect the final actual gas distribution concentration value.

Because a plurality of single-flow controllers are adopted and have the same rated flow, the linear measurement error of the high-precision flow meter can be avoided, wherein the linear measurement error means that the flow controllers have different correction coefficients when measuring different flows. Since the flow rate controller of the single flow rate employed in the present invention has the same nominal flow rate, the correction coefficient k corresponding thereto is also the same.

In addition to any of the above embodiments, in step 103, the m flow controllers communicating with the sample gas channel and the n flow controllers communicating with the bottom gas channel may be freely selected, for example, randomly designated by a computer, or designated by an experimenter, which is not limited by the present invention.

Optionally, in another embodiment of the present invention, in step S102, the number of the first flow controllers and the second flow controllers to be selected, or the ratio of the number of the first flow controllers to the number of the second flow controllers may be determined according to the ratio of the preset gas distribution concentration value to the raw sample gas concentration; and selecting a specific first flow controller and a specific second flow controller according to the actual flow value of each flow controller. The first flow controller is a flow controller communicated with the sample gas channel; the second flow controller is a flow controller communicating with the bottom gas passage.

For example, if the concentration of the sample gas is 100%, the preset gas distribution concentration value is 50%, at this time, the ratio of the number of the first flow controllers to the number of the second flow controllers is 1: 1; if there are four flow controllers, the corresponding actual flow values are 99.8ml/min, 100.2ml/min, 100.1ml/min and 99.9ml/min respectively; when step 103 is executed, 2 first flow controllers and 2 second flow controllers may be selected, the first flow controllers having actual flow values of 99.8ml/min and 100.2ml/min, and the second flow controllers having actual flow values of 100.1ml/min and 99.9ml/min, where the calculated actual air distribution concentration value is more consistent with the preset air distribution concentration value.

As shown in fig. 2, the present invention also provides a high-precision gas distribution apparatus including a sample gas passage 11, a bottom gas passage 12, an outlet passage 13, a plurality of single-flow controllers 20, an air intake control valve 30, and a processor 40. Wherein:

the flow controller 20 has an inlet end 21 and an outlet end 22; the flow controllers are single-process controllers, and the flow controllers of the plurality of single processes have the same rated process. The single-flow controller means that the flow controller has only one flow, such as a capillary type, a small hole type, and the like. The single flow may be considered the full flow of the flow controller. In a specific embodiment, the number N of flow controllers is 2 to 20, preferably 2 to 15, for example 3, 5 or 10.

The air inlet control valve 30 is connected to the inlet end of the flow controller for controlling whether the flow controller is communicated with one of the sample gas passage and the bottom gas passage; that is, the flow controller can be controlled to communicate with the sample gas passage or with the bottom gas passage, or with neither the sample gas passage nor the bottom gas passage by the intake control valve 30. In specific implementation, the air inlet control valve 30 may be a multi-way proportional on-off control valve; in addition, a plurality of three-way distributing valves can be provided.

The processor 40 is connected to the gas inlet control valve 30 for communicating the m flow controllers with the sample gas pipe 11 and the n flow controllers with the bottom gas pipe 12.

In an embodiment of the present invention, the processor 40 is configured to receive a preset air distribution concentration value, and determine the number m, n according to the preset air distribution concentration value. When determining the number m and n, the concentration of the sample gas introduced into the sample gas pipeline is generally combined. For example, the number m, n may be determined according to a ratio of the sample gas concentration value to a preset gas concentration value. In another embodiment of the present invention, an experimenter may determine m and n according to preset gas distribution concentration values and sample gas concentration values, and input the values into the processor. The m flow controllers communicated with the sample gas channel and the n flow controllers communicated with the bottom gas channel can be freely selected, for example, randomly assigned by a computer or assigned by an experimenter, which is not limited by the invention.

In addition, a memory (not shown) may be included for storing the actual flow rate values recorded after the flow rate of each flow controller is measured by the same high-precision flow meter. The memory is connected with the processor and used for providing data support for calculating the actual gas distribution concentration value.

In addition to the embodiment shown in fig. 2, the present invention also provides a high-precision gas distribution apparatus, which includes a sample gas passage 11, a bottom gas passage 12, an outlet passage 13, a plurality of flow controllers 20, a gas inlet control valve 30, and a processor 40. As shown in fig. 3, the present invention further includes an air outlet control valve 60 and a high-precision flow meter 50 connected to the air outlet control valve 60, and in the present embodiment, the air distribution apparatus can simultaneously measure the actual flow rate value of the flow controller 20.

The air outlet control valve 60 is connected to the outlet end of the flow controller 20 and the outlet pipe 13, and more specifically, the inlet end of the air outlet control valve 60 is connected to the outlet end of the flow controller 20, and the outlet end of the air outlet control valve 60 is connected to the outlet pipe 13, for controlling whether or not the flow controller is in communication with one of the high-precision flow meter and the outlet passage. That is, the outlet end of the flow controller can be controlled to communicate with the high-precision flow meter, or with the outlet passage, or with neither the high-precision flow meter nor the outlet passage by the air outlet control valve 60. The outlet control valve 60 may be a three-way calibration valve or a multi-way three-way combination valve. The outlet control valve 60 may be connected to the processor 40, and the processor 40 controls the open/close state thereof.

Further, as shown in fig. 4, the high-precision flow meter 60 may be directly connected to the outlet pipe via a check valve 71, and in this case, the outlet control valve 60 may be a two-way calibration valve or a multi-way two-way combination valve.

As shown in fig. 5, in the present embodiment, the high-precision air distribution device includes a check valve 72 provided at the outlet end of the flow rate controller, and the check valve 72 may be provided at the outlet end of each flow rate controller, more specifically, at the upper end of the air outlet control valve. When the actual flow value is measured, after one of the flow controllers is communicated with the high-precision flow meter, the outlet ends of the other flow controllers can be closed through the one-way valve; when distributing gas, the flow controller whose inlet end is not communicated with sample gas channel or bottom gas channel can be closed by one-way valve. When the air outlet control valve 60 is already provided, the check valve 72 may not be additionally provided if the outlet end of the flow controller can be controlled to be closed by the air outlet control valve 60. In this embodiment, the high-precision flowmeter 60 is directly connected to the outlet pipe 13 via the check valve 71. Although not shown, the check valves 71, 72 may be connected to the processor and controlled by the processor 40 to open or close.

On the basis of the high-precision gas distribution apparatus provided in any of the above embodiments, the processor 40 may be configured to mark the flow controller communicating with the sample gas channel as a first flow controller, and mark the flow controller communicating with the bottom gas channel as a second flow controller; and calculating an actual gas distribution concentration value according to the actual flow values of the first flow controller and the second flow controller. In specific implementation, the actual air distribution concentration value can be output and displayed, and generally, the actual air distribution concentration value is close to the preset air distribution concentration value.

More specifically, the flow rate of the flow control can be calibrated by the same high-precision flow meter for the actual flow rate value measured by each flow controller. If the correction coefficient of the high-precision flowmeter is recorded as k, the sum of the actual flow values of all the first flow controllers measured by the high-precision flowmeter is F₁The sum of the actual flow values of all the second flow controllers measured by the high-precision flowmeter is F₂(ii) a The final actual gas distribution concentration value C_p＝kF₁*C₀/(kF₁+kF₂)＝F₁*C₀/(F₁+F₂). It can be seen that the high-precision flowmeter correction coefficient does not affect the final actual gas distribution concentration value.

Because a plurality of single-flow controllers are adopted and have the same rated flow, the linear measurement error of the high-precision flow meter can be avoided, wherein the linear measurement error means that the flow controllers have different correction coefficients when measuring different flows. Since the flow rate controller of the single flow rate employed in the present invention has the same nominal flow rate, the correction coefficient k corresponding thereto is also the same.

On the basis of the high-precision gas distribution device provided by any of the above embodiments, in an embodiment of the present invention, a display (not shown in the figure) may be further included, which may be used to display the actual gas distribution concentration calculated by the processor; the method can also be used for displaying the selected first flow controller and the selected second flow controller. If the processor also calculates the deviation between the actual gas distribution concentration and the preset gas distribution concentration, the deviation can be displayed through the display.

The high-precision gas distribution method and the gas distribution device provided by the embodiment of the invention are simple to operate, a plurality of single-flow controllers are adopted, the plurality of single-flow controllers have the same rated flow, and the flow controllers of all single flows are calibrated through the high-precision flow meter; therefore, the correction coefficient k of the high-precision flowmeter is prevented from being brought into the final calculation of the gas distribution concentration, and the linear error of the high-precision flowmeter during the measurement of different flows can be prevented from being brought into the calculation of the gas distribution concentration due to the adoption of the flow controllers in the same rated flow, so that the error is further reduced. The invention provides more accurate gas distribution concentration for users through calculating the actual gas distribution concentration.

While the preferred embodiments of the present invention have been illustrated in the accompanying drawings, those skilled in the art will appreciate that various modifications can be made to the present invention without departing from the scope and spirit of the invention. For instance, features illustrated or described as part of one embodiment, can be used with another embodiment to yield a still further embodiment. The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the scope of the present invention, which is defined in the appended claims.