阅读说明：本技术 一种等离子体射流装置 (Plasma jet device ) 是由 邵飞帆 段倩倩 于 2019-10-24 设计创作，主要内容包括：本发明涉及一种等离子体射流装置,包括外壳,其中,外壳内安装有波导管和内导管,波导管的一端与微波电源连接,内导管与波导管之间设有腔体,腔体上开设有可关闭和开启的进气口,外壳上开设有与内导管导通的喷口,喷口处设置有可伸缩移动的金属片,金属片与温度传感器相接触,温度传感器与控制器连接,控制器还分别与电源和报警器连接。与现有技术相比,本发明利用等离子体射流大小与电源输出功率大小呈正相关的关系,通过设置可伸缩移动的金属片、温度传感器和控制器,能够计算得到等离子体射流通量,并以此自动调节电源的输出功率大小,从而实现自主调节等离子体射流大小的目的,且能保证输出等离子体射流的稳定性。(The invention relates to a plasma jet device, which comprises a shell, wherein a waveguide tube and an inner guide tube are arranged in the shell, one end of the waveguide tube is connected with a microwave power supply, a cavity is arranged between the inner guide tube and the waveguide tube, an air inlet which can be closed and opened is arranged on the cavity, a nozzle communicated with the inner guide tube is arranged on the shell, a metal sheet which can stretch and move is arranged at the nozzle, the metal sheet is contacted with a temperature sensor, the temperature sensor is connected with a controller, and the controller is also connected with the power supply and an alarm respectively. Compared with the prior art, the invention utilizes the positive correlation between the plasma jet size and the power output power size, can calculate the plasma jet flux by arranging the metal sheet which can stretch and move, the temperature sensor and the controller, and automatically adjusts the output power size of the power, thereby realizing the purpose of automatically adjusting the plasma jet size and ensuring the stability of the output plasma jet.)

1. The utility model provides a plasma fluidic device, includes shell (1), install waveguide pipe (2) and inner conduit (6) in shell (1), offer spout (4) that switch on with inner conduit (6) on shell (1), inner conduit (6) are located the below of waveguide pipe (2), its characterized in that, be equipped with the cavity between inner conduit (6) and waveguide pipe (2), the cavity is seted up and is closed and open air inlet (3), the one end and the microwave power supply (12) of waveguide pipe (2) are connected, spout (4) department is provided with scalable removal sheetmetal (7), when sheetmetal (7) is in initial position, inner conduit (6) and sheetmetal (7) complete coupling, sheetmetal (7) contact with temperature sensor (8), temperature sensor (8) still are connected with the input of controller (10), the output end of the controller (10) is connected to a microwave power supply (12).

2. A plasma jet device as claimed in claim 1, characterized in that the metal sheet (7) is provided with an operating rod (9), one end of the operating rod (9) is provided with a handle, the other end of the operating rod passes through the housing (1) and is mounted on the metal sheet (7), and the metal sheet (7) is pushed and pulled to move telescopically.

3. A plasma jet device as claimed in claim 1, characterized in that sealing blocks (5) are mounted on both sides of the bottom of the chamber, and the inner conduit (6) is mounted between the two sealing blocks (5).

4. A plasma jet device as claimed in claim 1, characterized in that an alarm (11) for prompting plasma jet flux information is further connected to the output of the controller (10).

5. A plasma-jet device as claimed in claim 1, characterized in that said controller (10) is a programmable chip.

6. A plasma jet device as claimed in claim 1, characterized in that the gas inlet (3) opens at the side of the chamber.

7. A plasma jet device as claimed in claim 1, characterized in that the nozzle opening (4) opens at the bottom of the housing (1).

8. A plasma jet device as claimed in claim 1, characterized in that said temperature sensor (8) is a single-line digital temperature sensor, in particular a DS18B20 temperature sensor.

9. A plasma-jet device as claimed in claim 1, characterized in that the envelope (1) is a quartz envelope.

Technical Field

The invention relates to the field of plasma generation, in particular to a plasma jet device.

Background

Plasma is the state in which gas molecules are partially or completely ionized after acquiring energy, and finally reach a plasma state. The gas in the plasma state is quasi-electroneutral, i.e. has equal amount of charges with different signs under the condition of macroscopic space-time scale. The plasma generated by the atmospheric pressure plasma jet technology has low temperature and high active matter concentration, so the method has wide application in the aspects of material modification, sterilization, environmental protection and the like.

The current plasma jet device mostly adopts a manual mode to adjust the size of jet flow, and the jet flow size can not be automatically adjusted according to requirements, so that the output jet flow is unstable, and the plasma jet device is not beneficial to the effective application of plasma.

Disclosure of Invention

The invention aims to overcome the defects of the prior art and provide a plasma jet device which can automatically adjust the jet size and output stable jet.

The purpose of the invention can be realized by the following technical scheme: the utility model provides a plasma fluidic device, includes the shell, install waveguide pipe and inner conduit in the shell, set up the spout that switches on with the inner conduit on the shell, the inner conduit is located the below of waveguide pipe, just be equipped with the cavity between inner conduit and the waveguide pipe, the air inlet that can close and open is seted up to the cavity, the one end and the microwave power supply of waveguide pipe are connected, spout department is provided with the sheetmetal of scalable removal, when the sheetmetal is at initial position, inner conduit and sheetmetal complete coupling, the sheetmetal contacts with temperature sensor, temperature sensor still is connected with the input of controller, the output of controller is connected to the microwave power supply.

Furthermore, an operating rod is installed on the metal sheet, a handle is arranged at one end of the operating rod, the other end of the operating rod penetrates through the shell and then is installed on the metal sheet, and the metal sheet can stretch and move by pushing and pulling the operating rod.

Furthermore, sealing blocks are installed on two sides of the bottom of the cavity, and the inner guide pipe is installed between the two sealing blocks.

Furthermore, the output end of the controller is also connected with an alarm for prompting the flux information of the plasma jet.

Further, the controller is a programmable chip.

Further, the spout is opened at the bottom of the shell.

Further, the air inlet is formed in the side face of the cavity.

Further, the temperature sensor is a single-line digital temperature sensor, specifically a DS18B20 temperature sensor.

Further, the housing is a quartz housing.

The working principle of the invention is as follows: the metal sheet extends out by pushing the operating rod, when plasma passes through the metal sheet, partial particles bombard the metal sheet to generate a certain temperature, the temperature of the metal sheet is detected by using the temperature sensor, the detected temperature is converted into a digital signal from an analog signal and is transmitted to the controller, the number of the particles bombarded on the metal sheet is deduced reversely by the controller according to the detected temperature, the flux of the plasma jet can be calculated because the particles bombarded on the metal sheet and the whole plasma jet are in a linear relation, and finally the output power of the microwave power supply is correspondingly adjusted according to the flux of the plasma jet, so that the size and the stability of the output plasma jet are controlled.

Compared with the prior art, the invention has the following advantages:

the invention relates to a microwave power supply, which is characterized in that a metal sheet capable of stretching and moving, a temperature sensor and a controller are arranged, the flux of plasma jet is reversely estimated according to the detected temperature of the metal sheet, so that the output power of the microwave power supply is automatically adjusted, and the purpose of automatically adjusting and outputting stable plasma jet is realized.

The invention adopts a single-wire digital temperature sensor, can accurately and quickly detect the temperature of the metal sheet, adopts a programmable chip to calculate the plasma jet flow and control the output power of a power supply, and can reliably adjust the size of the plasma jet flow and effectively prompt the current plasma jet flow information by matching with an alarm.

Drawings

FIG. 1 is a schematic cross-sectional view of the present invention;

FIG. 2 is a schematic view of the working principle of the present invention;

FIG. 3 is a schematic flow chart of the working principle of the present invention;

the notation in the figure is:

1. the device comprises a shell, 2, a waveguide tube, 3, an air inlet, 4, a nozzle, 5, a sealing block, 6, an inner guide tube, 7, a metal sheet, 8, a temperature sensor, 9, an operating rod, 10, a controller, 11, an alarm, 12 and a microwave power supply.

Detailed Description

The invention is described in detail below with reference to the figures and specific embodiments.

As shown in fig. 1, a plasma jet device comprises a housing 1, a waveguide tube 2 and an inner conduit 6 are installed in the housing 1, a nozzle 4 communicated with the inner conduit 6 is arranged on the housing 1, the inner conduit 6 is positioned below the waveguide tube 2, a cavity is arranged between the inner conduit 6 and the waveguide tube 2, the cavity is provided with an air inlet 3 which can be closed and opened, sealing blocks 5 are installed on two sides of the bottom of the cavity, and the inner conduit 6 is installed between the two sealing blocks 5;

one end of waveguide 2 is connected with microwave power supply 12, spout 4 department is provided with metal sheet 7 of scalable removal, and when metal sheet 7 was in initial position, inner conduit 6 and metal sheet 7 complete coupling installed action bars 9 on the metal sheet 7, and the one end of action bars 9 is provided with the handle, and its other end passes and installs on metal sheet 7 behind shell 1, through push-and-pull action bars 9, can realize the flexible removal of metal sheet 7, and metal sheet 7 is last to be pasted temperature sensor 8.

Fig. 2 is a schematic diagram showing the connection of the working principle of the present invention, wherein the temperature sensor 8 is connected to the input end of the controller 10 to transmit the detected temperature data of the metal sheet 7 to the controller 10, the output end of the controller 10 is connected to the microwave power supply 12 and the alarm 11, the flux of the plasma jet is obtained by the controller 10 through reverse calculation according to the temperature data of the metal sheet 7, and thus a control command is output to the microwave power supply 12 and the alarm 11 to automatically adjust the output power of the microwave power supply 12 and automatically send out an alarm prompt of the flux information of the plasma jet.

As shown in fig. 3, after the controller 10 calculates the flux of the plasma jet, it first determines whether the flux value is within a preset normal range, if so, does not output a control signal to the power supply, i.e., does not adjust the output power of the power supply, and if not, continues to determine whether the flux value is smaller than a preset low value;

if the flux value is larger than the preset high value, outputting a control signal to the power supply to increase the output power of the power supply, and if the flux value is not larger than the preset high value, continuously judging whether the flux value is larger than the preset high value;

if the judgment result is yes, a control signal is output to the power supply so as to reduce the output power of the power supply.

In the embodiment, the shell is a quartz shell, the power supply is a microwave power supply with controllable output power, the controller adopts a programmable chip, the temperature sensor is a single-wire digital temperature sensor, specifically a DS18B20 temperature sensor, a single-bus interface mode is adopted, when the controller is connected, the two-way communication between the controller and the DS18B20 can be realized only through one data wire, and the single bus has the advantages of good economy and strong anti-interference capability and is suitable for on-site temperature measurement in severe environment; in addition, the measurement range of the DS18B20 is-55 ℃ to +125 ℃, the precision is +/-0.5 ℃ and the resolution is 0.0625 ℃ in the range of-10 ℃ to +85 ℃, which shows that the measurement temperature range is wide and the measurement precision is high; the DS18B20 does not need any peripheral element in use, and a plurality of DS18B20 can be connected in parallel on one line, so that multipoint temperature measurement can be realized; the DS18B20 can obtain power supply from the data line through the internal parasitic circuit, therefore, when the time sequence on the data line meets certain requirements, the external power supply can be omitted, so that the system structure is simpler and the reliability is higher; DS18B2 contains an EEPROM inside, which can hold resolution and alarm temperature settings after system power down.

The invention utilizes the positive correlation between the size of the jet flow generated by the plasma jet device and the power of the power supply of the device, namely, the larger the power of the power supply is, the larger the jet flow is, and the smaller the power of the power supply is. Thereby changing the size of the plasma jet by changing the size of the power supply power. The actual working process of the invention is as follows: the gas inlet 3 is opened to lead gas into the cavity from the gas inlet 3, the microwave power supply transmits microwaves into the cavity through the waveguide tube 2, then the gas inlet 3 is closed, the cavity forms a closed resonant cavity under the action of the sealing block 5, the microwaves form a stably distributed electromagnetic field in the resonant cavity, the electric field is locally enhanced to cause ionization, plasma is formed, and the plasma is jetted from the inner guide tube 6. In order to adjust the flux of the plasma jet, the operating rod 9 is pushed towards the inside of the housing 1, so that the metal sheet 7 is extended, and part of the particles in the jet bombard the metal sheet 7, thereby generating heat. The temperature sensor 8 is closely attached to the metal sheet 7, and since the range of temperature change of the metal sheet is relatively small, an accurate and high-sensitivity temperature sensor is adopted. The temperature sensor 8 transmits the obtained temperature information to the controller 10, the controller 10 judges the flux of the plasma jet at the moment according to the relation between the obtained temperature information and time, and accordingly the output power of the microwave power supply is adjusted through a preset program, so that the purpose of controlling the flux of the plasma jet is achieved, and if the current flux of the plasma jet exceeds a preset limit value, a control signal is output to an alarm to give an alarm prompt that the flux of the plasma jet exceeds the limit. After adjustment, if the plasma jet flux reaches the required flux, a control signal is output to an alarm according to a preset program so as to send out an alarm prompt that the plasma jet flux meets the requirement. At this time, the operating rod 9 is pulled back to return the metal sheet 7 to the initial position, and the state of complete coupling with the inner guide tube 6 is restored, so that any influence on the plasma jet in the next step is avoided.