Flat plate type plasma generating device based on mixed type plasma structure
阅读说明：本技术 基于混合型等离子体结构的平板式等离子体发生装置 (Flat plate type plasma generating device based on mixed type plasma structure ) 是由 李兵 姜涛 尚中昱 李昂 于 2019-08-19 设计创作，主要内容包括：基于混合型等离子体结构的平板式等离子体发生装置,包括左右两侧分别带有供气口和排气口的放电容器,在放电容器内部自上而下一次设置交流脉冲电源、与其相连接的等离子体放电总成以及下方的可更换式工作平台。首先通过可拆卸式下保护壳的拆卸区域送入被放置物件并固定在物件夹具中,通过交流脉冲电源为放电提供放电电压,通过供气口和排气口向放电容器中通入工作气体并根据处理要求控制容器内部的气压。本发明同时适用于大气压和低气压环境,应用范围广泛。(A flat-plate plasma generating device based on a mixed plasma structure comprises a discharge vessel with an air supply port and an air exhaust port on the left side and the right side respectively, an alternating current pulse power supply, a plasma discharge assembly connected with the alternating current pulse power supply and a replaceable working platform below the alternating current pulse power supply are arranged in the discharge vessel from top to bottom once. Firstly, an object to be placed is fed in through a disassembling area of a detachable lower protective shell and is fixed in an object clamp, discharge voltage is provided for discharge through an alternating current pulse power supply, working gas is introduced into a discharge container through a gas supply port and a gas exhaust port, and the gas pressure in the container is controlled according to processing requirements. The invention is suitable for the atmospheric pressure and low pressure environment at the same time, and has wide application range.)
1. The flat-plate plasma generating device based on the mixed plasma structure is characterized by comprising a discharge vessel (1) with a gas supply port (10) and a gas exhaust port (11) at the left side and the right side respectively, wherein an alternating current pulse power supply (3), a plasma discharge assembly (4) connected with the discharge vessel (1) and a replaceable working platform (2) below the plasma discharge assembly are sequentially arranged in the discharge vessel (1) from top to bottom.
2. The flat plate type plasma generating device based on hybrid type plasma structure according to claim 1, wherein the frequency of the ac pulse power source (3) is 10-350kHz and the voltage amplitude is 0.5-2 kV.
3. The flat plate type plasma generating device based on hybrid type plasma structure according to claim 1, wherein the working gas passing through the discharge vessel (1) via the gas supply port (10) and the gas exhaust port (11) is air when the plasma generating device is operated in a standard atmospheric pressure environment; when the plasma generator operates in a low-pressure environment, an inert gas such as helium or argon is used as the working gas passing through the discharge vessel (1) through the gas supply port (10) and the gas exhaust port (11).
4. The flat-plate plasma generating device based on the hybrid plasma structure according to claim 1, wherein the upper part of the plasma discharging assembly (4) is an upper protective shell (12) made of polytetrafluoroethylene material, the bottom surface of the upper protective shell (12) is composed of an upper dielectric layer (6), a copper main discharging plate (5) and a lower dielectric layer (7) in a three-layer structure, the upper dielectric layer (6) and the lower dielectric layer (7) are both filled with insulating materials such as ceramic or quartz, and the top end of the right side of the main discharging plate (5) is connected with the alternating current pulse power supply (3).
5. The flat plate type plasma generating device based on the hybrid plasma structure according to claim 1, wherein the replaceable working platform (2) is composed of a clamp base (15), an object clamp (16), a rotating track (14) and a stepping motor (8), the clamp base (15) is provided with a group of three object clamps (16) arranged in parallel, the object (13) to be placed is fixed by the object clamps (16), the clamp base (15) is arranged below the object clamps (16), the clamp base (15) is arranged on the rotating track (14), the clamp base (15) is driven by the stepping motor (8) to rotate anticlockwise along the rotating track (14), and a detachable lower protective shell (17) is arranged below the replaceable working platform (2).
6. The flat plate type plasma generating device based on hybrid type plasma structure according to claim 4, wherein the rotation orbit (14) is a circular rotation orbit, and the rotation motion range is 180 degrees.
7. The flat type plasma generating device based on hybrid plasma structure according to claim 4, wherein the size of the detachable lower protective shell (17) area can be adjusted and customized according to the shape and size of the object (13) to be placed and the radius of the circular orbit in the working platform (2).
8. The flat type plasma generating device based on hybrid plasma structure according to claim 4, wherein the holder base (15) is made of aluminum, the object holder (16) and the rotating rail (14) are made of PTFE, and the detachable lower protective case (17) is made of PTFE.
Technical Field
The invention relates to the technical field of plasmas, in particular to a flat-plate type plasma generating device based on a hybrid type plasma structure.
Background
Plasma, as a fourth state of matter, has properties of ionized gas, excited active particles, radiated ultraviolet rays, etc. widely applied to the field of disinfection and sterilization and clinical medicine, and has been a research hotspot in the field of application in recent years.
In practical applications, plasma generating devices operating in low temperature (typically less than 40 degrees celsius) and atmospheric or low pressure environments are often used, and the operating principles of this type of equipment are mainly classified into the following categories:
the first is a direct plasma generation source, which directly uses the target region as an auxiliary electrode to trigger discharge to generate plasma, and the method mainly adopts a floating electrode-based dielectric barrier discharge technology to generate relatively uniform plasma and high-concentration active substances. Meanwhile, compared with other two types of devices, the direct plasma generating source has the advantage of highly controllable triggering position of the plasma due to the structural characteristics, but has the limitations that the triggering distance needs to be a fixed distance and the like. Such a dielectric barrier discharge structure based on floating electrodes has been studied in many ways in the field of direct plasma generators as a new technology appearing in recent years, and is widely used.
The second is an indirect plasma generating source, which generates plasma between two electrodes inside a generating device, and then transfers the plasma to a target region by means of carrier gas or diffusion. The composition of the plasma-generated active species in the carrier gas can be varied by controlling the gas, as well as controlling the position of the plasma jet. The indirect plasma generating equipment can be realized by adopting structures such as a plasma syringe, a plasma nozzle, a large-size plasma torch and the like, has the advantage of flexible application size, but on the other hand, due to the problems of indirect generation mechanism of the plasma and the like, the equipment has the defects of weaker controllability, lower concentration of active substances generated by the plasma and the like.
The third is a hybrid type plasma generating source, which is a hybrid structure combining direct and indirect type plasma generating sources, and the method mainly uses a surface microdischarge technology to trigger microdischarge phenomena in a grounded multi-electrode array and generate plasma, and has the advantages that the area of the electrode array is large, the coverage capacity to a target area is strong, but the wire grid resistance value in the electrode array is small, the penetrating capacity of a filiform microdischarge beam generated in the target area is weak, and the wire micro discharge beam is difficult to completely penetrate through the target area.
Disclosure of Invention
In order to solve the above technical problems, an object of the present invention is to provide a flat plate type plasma generating device based on a hybrid type plasma structure, which is suitable for both atmospheric pressure and low pressure environments, has a wide application range, and improves the flexibility and processing efficiency of the hybrid type plasma generating device in processing objects of different dimensions and materials on the premise of not generating electric arcs and ensuring safety.
In order to achieve the purpose, the invention adopts the technical scheme that:
a flat-plate plasma generating device based on a mixed plasma structure comprises a discharge vessel 1 with an
The frequency of the alternating current
When the plasma generating device works in a standard atmospheric pressure environment, the working gas passing through the discharge vessel 1 through the
The upper part of the plasma discharge assembly 4 is an upper
The
The rotating
The size of the detachable lower
The
The invention has the beneficial effects that:
the device has the advantages that a discharge vessel 1 is used for providing a closed space, an alternating current
Drawings
FIG. 1 is a schematic view of a plate-type plasma generator with a hybrid plasma structure.
Fig. 2 is a schematic view of the internal structure of a rotating track in the plasma generating apparatus.
FIG. 3 is an axial view of the plasma discharge assembly 4 and the
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
As shown in FIG. 1, the flat plate type plasma generating device with a hybrid plasma structure comprises a discharge vessel 1 with a
The frequency of the alternating current
The upper part of the plasma discharge assembly 4 is an upper
As shown in fig. 2, the
As shown in fig. 2, which is a schematic view of the internal structure of the rotating track in the plasma generating device, the placed
Fig. 3 is an axial view of the plasma discharge assembly 4 and the
The device can completely joint the surface of a conductor with a complex surface shape and special size or perform high joint degree treatment on the surface of an insulator under the similar condition, and designs a replaceable working platform suitable for objects with different sizes aiming at the limitation of the electrode on the treatment target distance in direct plasma by combining the advantages of a mixed type plasma structure on the treatment coverage rate, the device is suitable for the atmospheric pressure and the low-pressure environment at the same time, has wide application range, and improves the flexibility and the treatment efficiency of the mixed type plasma generating device on treating objects with different sizes and materials on the premise of not generating electric arcs and ensuring the safety.
The working principle of the invention is as follows:
firstly, a placed
The device has the advantages that a discharge vessel 1 is used for providing a closed space, an alternating current
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