Rapid production process of vacuum glass
阅读说明：本技术 一种真空玻璃的快速生产工艺 (Rapid production process of vacuum glass ) 是由 刘勇江 于 2021-08-31 设计创作，主要内容包括：本发明公开了真空玻璃生产领域内的一种真空玻璃的快速生产工艺,包括以下步骤：A、金属化处理,在普通玻璃原片、LOW-E玻璃原片的边缘表面加工连续不间断的菱形网状金属化层；B、玻璃钢化；C、支撑物布置；D、柔性软钎料的制备与布置,将金属软钎料加工为固体带状,在金属软钎料的表面涂覆纳米吸光材料；E、合片；F、激光封接,在三级真空腔内的对完成合片的真空玻璃进行激光封接,用激光透过玻璃和金属化层的网状结构对柔性软钎料进行加热,使柔性软钎料熔化与金属化层反应生成金属间化合物完成封接；G、排出。本发明可克服现有技术中真空玻璃生产封接层残余热应力高,影响机械强度的问题。(The invention discloses a rapid production process of vacuum glass in the field of vacuum glass production, which comprises the following steps: A. metallization treatment, namely processing continuous and uninterrupted diamond mesh metallization layers on the edge surfaces of the common glass sheet and the LOW-E glass sheet; B. tempering glass; C. a support arrangement; D. preparing and arranging a flexible soft solder, processing the metal soft solder into a solid strip shape, and coating a nano light absorption material on the surface of the metal soft solder; E. laminating; F. laser sealing, namely performing laser sealing on the vacuum glass subjected to sheet combination in a three-stage vacuum cavity, and heating the flexible soft solder through the net structures of the glass and the metallization layer by using laser to melt the flexible soft solder and react with the metallization layer to generate an intermetallic compound to complete sealing; G. and (4) discharging. The invention can overcome the problems of high residual thermal stress and influence on mechanical strength in the production of the sealing layer of the vacuum glass in the prior art.)
1. A rapid production process of vacuum glass is characterized in that: the method comprises the following steps:
A. metallization, namely processing continuous and uninterrupted metallization layers on the edge surfaces of the common glass sheet and the LOW-E glass sheet, wherein the metallization layers are of a net structure;
B. tempering the glass, namely tempering the metallized glass;
C. a support arrangement in which supports are arranged in an array on the lower glass;
D. preparing and arranging a flexible soft solder, processing the metal soft solder into a solid strip shape, and coating a nano light absorption material on the surface of the metal soft solder;
E. laminating, namely laminating the upper glass and the lower glass in a three-stage vacuum cavity, and placing the flexible soft solder between the metalized layers of the upper glass and the lower glass;
F. laser sealing, namely performing laser sealing on the vacuum glass subjected to sheet combination in a three-stage vacuum cavity, and heating the flexible soft solder through the net structures of the glass and the metallization layer by using laser to melt the flexible soft solder and react with the metallization layer to generate an intermetallic compound to complete sealing;
G. and discharging, namely discharging the vacuum glass from the three-stage vacuum cavity.
2. The rapid production process of vacuum glass according to claim 1, characterized in that: and B, printing a layer of electronic paste with the thickness of 7-40 microns on the edge surfaces of the upper glass and the lower glass in the step A through screen printing, wherein the electronic paste is conductive silver paste, conductive copper paste or conductive nickel paste, and drying the printed electronic paste through a drying furnace to remove an organic solvent in the electronic paste to form a metalized layer.
3. The rapid production process of vacuum glass according to claim 1, characterized in that: and in the step A, a layer of 50nm-1 μm metal copper, silver-copper alloy or nickel is plated on the edge surfaces of the upper glass and the lower glass in a vacuum coating mode, and a metal mask plate is used for forming a net-shaped metallization layer during coating.
4. The rapid production process of vacuum glass according to claim 1, characterized in that: the tempering temperature in the step B is 650-800 ℃.
5. The rapid production process of vacuum glass according to claim 1, characterized in that: in the step C, the supports are stainless steel cylinders with the diameter of 0.4-1mm and the height of 0.2-0.5mm, and the distance between every two supports is 40-80 mm.
6. The rapid production process of vacuum glass according to claim 5, characterized in that: and C, forming a blind hole with the diameter of 2-3mm and the depth of 1.5mm in the upper right corner of the lower glass, and placing a getter in the blind hole, wherein the getter is in a shape of a wafer with the diameter of 2mm and the thickness of less than 1.5 mm.
7. The rapid production process of vacuum glass according to claim 1, characterized in that: and D, processing the metal soft solder into a solid strip with the thickness of 0.3-0.6mm and the width of 0.6-1.5mm, cleaning the surface of the metal soft solder by using vacuum plasma to remove impurities, controlling the contact angle of the surface of the metal soft solder to be less than 15 degrees, and coating the surface of the metal soft solder with a nano light absorption material.
8. The rapid production process of vacuum glass according to claim 7, characterized in that: and D, dispersing nano silver, nano gold or nano graphene in ethanol, acetone or diethyl ether at the concentration of 0.1-2% to serve as a nano light absorption material, coating the nano light absorption material on the surface of the metal soft solder, and then, removing the organic solvent by infrared baking.
9. The rapid production process of vacuum glass according to claim 1, characterized in that: the three-stage vacuum cavity in the step E comprises a front stage vacuum cavity, a process vacuum cavity and a rear stage vacuum cavity which are sequentially communicated, the ultimate vacuum degrees of the front stage vacuum cavity and the rear stage vacuum cavity are 1-100Pa, and the ultimate vacuum degree of the process vacuum cavity is 9 x 10-4Pa。
10. The rapid production process of vacuum glass according to claim 9, characterized in that: and F, arranging a laser head in the process vacuum cavity, wherein the running path of the laser head is one perimeter of the glass, the wavelength of a laser light source is 980-1200 nm, and the output power of the laser is 3-20W.
Technical Field
The invention relates to the field of vacuum glass production, in particular to a rapid production process of vacuum glass.
Background
The vacuum glass is a new generation of energy-saving and environment-friendly glass, and has obvious product performance advantages compared with commonly used glass products such as common single-layer toughened glass, double-layer hollow glass and the like. The composite material has the advantages of sound insulation performance, heat preservation performance and anti-condensation function, has high-efficiency energy-saving effect and environment pollution reduction effect in wide fields of buildings, refrigeration and heating electric appliances, traffic and the like, and has very large potential and application market.
The vacuum glass is essentially formed by packaging two pieces of common toughened glass through an airtight sealing material, wherein the airtight sealing mostly adopts low-temperature glass powder or flexible metal soft solder, a vacuum layer with the thickness of 0.3-0.4 mm is formed between the two pieces of glass through vacuum, metal supports are arranged between the two pieces of glass in an array manner to offset atmospheric pressure, and an air suction opening is reserved on one piece of glass so as to conveniently suck air from the vacuum layer to form vacuum. In the prior art, the low-temperature glass powder sealing technology for vacuum glass is less adopted due to the problems of overhigh temperature and reduced mechanical property of the vacuum glass, and the flexible metal soft solder sealing technology has the defects that the components of a sealing layer are complex because metal materials and glass are different from homogeneous materials and extra materials are required to be added into the sealing layer, so that the thermal expansion coefficients of all layers of the sealing material are not matched, great residual thermal stress can be generated in the sealing treatment process, and the mechanical strength of the vacuum glass can be influenced. In the vacuumizing process, an air pumping opening with the thickness ranging from a few millimeters to 1-2 millimeters is reserved in the prior art, or the vacuum degree of a vacuum layer of the vacuum glass is realized by vacuumizing through a glass tube or slowly exhausting the vacuum glass in a vacuum environment, and finally the air pumping opening is sealed off. The process is an important reason for the low production speed of the traditional vacuum glass, the extraction opening is too small, the conductance is very large during the extraction, the extraction speed is very small, the production period of the single piece of vacuum glass is very long, even the extraction time of one hour is calculated, and the process is not suitable for large-scale production. Meanwhile, after the vacuum degree of the vacuum layer is reduced to a certain value, the free path of gas molecules is large, the gas molecules are difficult to diffuse out from a small air suction opening, the vacuum degree far away from the air suction opening is greatly different from the vacuum degree near the air suction opening, and the vacuum degree of the vacuum layer cannot be reached, so that the product performance of the vacuum glass is greatly influenced. The reserved air extraction opening is obtained by mechanically drilling the common float glass before tempering, and microcracks inevitably occur at the edge of the air extraction opening, so that the air leakage risk is great in the later period.
Disclosure of Invention
The invention aims to provide a rapid production process of vacuum glass, which aims to solve the problems that the residual thermal stress of a sealing layer produced by the vacuum glass is high and the mechanical strength is influenced in the prior art.
In order to achieve the purpose, the basic technical scheme of the invention is as follows: a rapid production process of vacuum glass comprises the following steps:
A. metallization, namely processing continuous and uninterrupted metallization layers on the edge surfaces of the common glass sheet and the LOW-E glass sheet, wherein the metallization layers are of a net structure;
B. tempering the glass, namely tempering the metallized glass;
C. a support arrangement in which supports are arranged in an array on the lower glass;
D. preparing and arranging a flexible soft solder, processing the metal soft solder into a solid strip shape, and coating a nano light absorption material on the surface of the metal soft solder;
E. laminating, namely laminating the upper glass and the lower glass in a three-stage vacuum cavity, and placing the flexible soft solder between the metalized layers of the upper glass and the lower glass;
F. laser sealing, namely performing laser sealing on the vacuum glass subjected to sheet combination in a three-stage vacuum cavity, and heating the flexible soft solder through the net structures of the glass and the metallization layer by using laser to melt the flexible soft solder and react with the metallization layer to generate an intermetallic compound to complete sealing;
G. and discharging, namely discharging the vacuum glass from the three-stage vacuum cavity.
The invention analyzes the problem of thermal stress generated by the existing metal sealing process on the basis of the existing metal sealing process, and the thermal stress is generated in the heating and cooling processes mainly because the thermal expansion coefficients of a metallization layer, glass and a flexible metal soft solder are not matched, so that the mechanical property of the vacuum glass is influenced. The heating modes of the existing metal sealing process are modes of electromagnetic induction, laser, integral heating and the like, the modes carry out integral heating on a sealing layer region in the heating process, the generated thermal stress is large, and the electromagnetic induction is taken as an example for analysis: the glass surface metallization layer is a plated metal film (Cu, Ag, etc.) or a sintered electronic paste (conductive silver paste, conductive copper paste, conductive nickel paste, etc.), so the glass surface metallization layer is heated by electromagnetic inductionIn the process, the metallization layer is heated, and the inductive current formula I of the metal material is 4.44BSfW10-12(iv)/Z, wherein B is the maximum magnetic induction in T; s is the cross-sectional area of the material under the action of a magnetic field, and the unit is cm2(ii) a f is the frequency of the alternating current in Hertz; w is the number of turns of the coil; z is the impedance of the material; ag impedance of 1.65 x 10-8Ω m, Sn impedance of 11.4 x 10-8Ω m, the impedance of the flexible metal solder is about 7 times that of the metallization layer, and the intensity of the induced current is in inverse proportion to the impedance, so that the induced current of the metallization layer is larger than that of the flexible metal solder, and the temperature of the metallization layer is higher than that of the metal solder during electromagnetic induction heating, and the metallization layer expands greatly. In the heating process, the metal soft solder is melted, the metalized layer is thermally expanded, the glass belongs to a non-metallic material, the electromagnetic induction has no thermal effect, and the glass can only obtain less heat from the metalized layer in a heat transfer mode and also slightly expand; in the cooling process, the material shrinks, the flexible metal soft solder has better ductility, the stress can be released, the internal stress which is mutually dragged exists between the metallization layer and the glass, the glass with overlarge internal stress is directly cracked, the internal stress is smaller than the strength of the glass, and the internal stress remains in the vacuum glass, so that the mechanical strength of the toughened glass is reduced.
Aiming at the problem of thermal stress, the invention provides a reticular metallized layer and a surface modified flexible metal soft solder, and a femtosecond (or picosecond) near infrared laser process is matched for use, a laser beam penetrates through glass and the reticular metallized layer to reach the surface of the flexible metal soft solder, only the flexible metal soft solder is heated, a nano light absorption material is attached to the surface of the modified flexible metal soft solder, the nano light absorption material strongly absorbs and gathers the laser, so that the base material metal soft solder generates a larger heat effect to melt a melting point and react with the reticular metallized layer to generate an intermetallic compound, such as Ag3Sn、Cu5Sn6Etc.; and finishing the airtight sealing of the upper glass sheet and the lower glass sheet. It is noted that when the femtosecond laser beam or the picosecond laser beam reaches the transparent glass, the glass and the gold are transparentThe laser is partially absorbed by the metallized layer, but the thermal effect is small because the laser power is small; only after strong absorption and aggregation of the nanomaterials is a sufficient temperature (around 200 ℃) to melt the metal solder. In the sealing process, because the temperatures of the upper glass plate, the lower glass plate and the metallization layer are not too high (not more than 60 ℃), the thermal expansion of the glass plates and the metallization layer is greatly reduced; the metal solder has good ductility and can not generate large stress, so the problem of residual stress in the vacuum glass-metal sealing process is solved. Thereby avoiding the generation of thermal stress between the metallization layer and the glass substrate and further improving the mechanical strength of the vacuum glass produced by the metal sealing process.
Further, in the step A, printing a layer of electronic paste with the thickness of 7-40 μm on the edge surfaces of the upper glass and the lower glass through screen printing, wherein the electronic paste is conductive silver paste, conductive copper paste or conductive nickel paste, and drying the printed electronic paste through a drying furnace to remove an organic solvent in the electronic paste to form a metalized layer. The electronic paste is preferably formed on the surface of the glass and is printed on the glass plate in a screen printing mode, and the screen plate for printing can be made into a pattern with a net structure in advance for printing, so that the forming operation of the metalized layer is more convenient and quicker.
Further, a layer of 50nm-1 μm of metal copper, silver-copper alloy or nickel is plated on the edge surfaces of the upper glass and the lower glass in the step A in a vacuum coating mode, and a metal mask plate is used for forming a net-shaped metalized layer on the plated film during coating. Preferably, the metallization layer thus formed is more tightly and reliably bonded to the glass.
Further, the tempering temperature in the step B is 650-800 ℃. Preferably, the mechanical property of the glass can be improved, and the metalized layer formed by the electronic paste can be synchronously sintered in the toughening process to form a compact metal film layer structure, so that the stable and reliable sealing structure can be formed by the subsequent welding with metal soft solder.
Furthermore, in the step C, the supporters are stainless steel cylinders with the diameter of 0.4-1mm and the height of 0.2-0.5mm, and the distance between every two supporters is 40-80 mm. Preferably, the upper glass and the lower glass can be stably and reliably supported, the glass is prevented from being broken due to overlarge air pressure difference, the size of the support is small, and the light transmittance of the vacuum glass can be ensured.
And further, in the step C, a blind hole with the diameter of 2-3mm and the depth of 1.5mm is formed in the upper right corner of the lower glass, a getter is placed in the blind hole, and the getter is in a shape of a wafer with the diameter of 2mm and the thickness of less than 1.5 mm. The vacuum glass is preferably not provided with the air suction holes on the surface, the surface structure of the vacuum glass is guaranteed to be complete, air leakage caused by microcracks is avoided, the inner wall of the vacuum cavity is relatively flat, residual gas in the vacuum cavity can be effectively and reliably absorbed by the getter, the vacuum degree is guaranteed, the vacuum degree of the vacuum cavity can be effectively guaranteed to be uniform and reach the standard after the getter is laminated by matching with the sheet laminating technology in a vacuum environment, sufficient getter can be placed in the blind holes, the appearance of the vacuum glass cannot be influenced, and the mechanical strength of the vacuum glass cannot be influenced.
And step D, processing the metal soft solder into a solid strip with the thickness of 0.3-0.6mm and the width of 0.6-1.5mm, removing impurities on the surface of the metal soft solder by using vacuum plasma cleaning, controlling the contact angle of the surface of the metal soft solder to be less than 5 degrees, and coating the surface of the metal soft solder with a nano light absorption material. Preferably, the size is more suitable for the sealing treatment of the vacuum glass, the surface of the body can be ensured to be clean by cleaning, the surface contact angle is reduced, the nano light absorption material can be ensured to be uniformly attached to the surface of the body, the surface treatment effect of the body is ensured, and the light absorption performance of the nano light absorption material on the metal soft solder is improved.
Further, in the step D, dispersing nano silver, nano gold or nano graphene in ethanol, acetone or ether at the concentration of 0.1% -2% to serve as a nano light absorption material, coating the nano light absorption material on the surface of the metal soft solder, and then, removing the organic solvent by infrared baking. The nano light absorption material preferably has strong light absorption property, can better absorb laser, and the concentration can ensure better laser amplification effect, so that the overlarge laser energy can be absorbed and amplified, and the subsequent sealing is adversely affected.
Furthermore, the three vacuum cavities in the step E are sequentially communicatedThe front vacuum cavity, the process vacuum cavity and the rear vacuum cavity are respectively 1-100Pa in ultimate vacuum degree, and 9 x 10 in ultimate vacuum degree-4Pa. The method is characterized in that the rapid production of the vacuum glass is realized by optimizing a vacuum sealing process, providing a new vacuum obtaining mode, designing three continuous vacuum cavities and other key technologies, if a continuous production line is used, the production rhythm of a single piece of vacuum glass can be controlled to be about 4-10 min, and the production speed is greatly improved compared with that of the prior art; the product quality, yield and the like of the vacuum glass can be improved.
And further, arranging a laser head in the process vacuum cavity in the step F, wherein the running path of the laser head is one perimeter of the glass, the wavelength of a laser light source is 980-1200 nm, and the output power of the laser is 3-20W. Preferably, the heat effect generated by the laser on the glass is small, and the metal solder bronze drum nano light-absorbing material can obtain enough heat to melt, so that the stress of the vacuum glass sealing part can be controlled more favorably, and the mechanical strength of the vacuum glass is ensured.
Key innovation technical point of the invention
1. The present invention contemplates a laser-transparent metallization structure, such as the above-described mesh metallization structure or other light-transparent metallization structure.
2. The invention uses nano light absorption materials (nano silver, nano gold, nano graphene and the like) to carry out surface modification treatment on the basis of the original flexible metal soft solder, thereby enhancing the light absorption of the flexible metal.
3. The invention uses femtosecond or picosecond near infrared laser with higher instantaneous power and small average power to match with the mesh structure metallization layer and the nanometer light absorption material, thereby solving the problem of residual thermal stress generated in the vacuum metal soldering process.
4. The invention uses the electrostatic bonding technology to complete the involution of the upper glass and the lower glass in the high vacuum environment, and carries out laser sealing, thus realizing the obtainment of uniform vacuum layer and higher vacuum degree of the vacuum glass. Compared with the process of reserving an extraction opening, the vacuum obtaining time of the vacuum layer is improved by several orders of magnitude, and the production time of the vacuum glass is greatly accelerated; compared with a one-step method, the vacuum degree of the vacuum layer is greatly improved.
5. The invention uses a continuous three-cavity structure, and the front and rear low-vacuum cavities are used as the buffer of the middle high-vacuum process cavity, thereby reducing the production beat of the vacuum glass and further accelerating the production speed.
Drawings
FIG. 1 is a schematic view of example 3 of the present invention;
FIG. 2 is a cross-sectional view of a hermetically sealed frame in example 3 of the present invention;
fig. 3 is a top view of a metallization layer in example 3 of the present invention.
Detailed Description
The following is further detailed by way of specific embodiments:
reference numerals in the drawings of the specification include: the glass sealing structure comprises an upper glass cover plate 1, a lower glass substrate 2, a hermetically sealed frame 3, a metallization layer 31, metal soft solder 32, blind holes 4 and metal columns 5.
Embodiment 1, a rapid manufacturing process of vacuum glass, comprising the steps of:
1. metallization, namely cutting, edging and cleaning a common glass sheet and a LOW-E glass sheet, printing a layer of electronic paste with the thickness of 7 microns on the edge surfaces of upper and lower glass sheets by screen printing, wherein the electronic paste is conductive silver paste, conductive copper paste or conductive nickel paste, the embodiment is preferably conductive silver paste, drying the printed glass sheets by a drying furnace to remove an organic solvent in the electronic paste to form a metallization layer, and the printed metallization layer is of an uninterrupted rhombic net structure;
2. tempering glass, namely, after metallization treatment is carried out on upper glass and lower glass, putting the upper glass and the lower glass into a glass tempering furnace for physical tempering, wherein the tempering temperature is 650-800 ℃, and in the process of tempering the glass, a metallization layer formed by the electronic paste synchronously finishes sintering to form a metal film layer with a compact structure;
3. the support and the getter are arranged, the support is arranged on the lower glass in an array mode, the support is 304 stainless steel cylinders with the diameter of 0.4-1mm and the height of 0.2-0.5mm, and the distance between every two supports is 40-80 mm; a blind hole with the diameter of 2-3mm and the depth of 1.5mm is formed in the upper right corner of the lower glass, a getter is placed in the blind hole, and the getter is in a shape of a wafer with the diameter of 2mm and the thickness of less than 1.5 mm;
4. preparing and arranging flexible soft solder, processing a tin-silver alloy into a solid ribbon-shaped metal soft solder with the thickness of 0.3-0.6mm and the width of 0.6-1.5mm, cleaning and removing impurities on the surface of the metal soft solder by using vacuum plasma, controlling the surface contact angle of the metal soft solder to be less than 15 degrees, coating a nano light absorption material on the surface of the metal soft solder, wherein the nano light absorption material is a nano silver organic solution with the concentration of 0.1-2 percent, removing an organic solvent by infrared baking to obtain the modified metal soft solder with strong light absorption effect, and arranging the modified metal soft solder on a metallization layer of lower glass;
5. laminating the upper glass and the lower glass in the three-stage vacuum cavity, wherein the ultimate vacuum degrees of the front stage vacuum cavity and the rear stage vacuum cavity of the three-stage vacuum cavity are both 1-100Pa, and the ultimate vacuum degree of the process vacuum cavity positioned in the middle is 9 x 10- 4Pa；
6. Laser sealing, arranging a laser head in a process vacuum cavity of the three-stage vacuum cavity, scanning a sealing frame by using the laser head after the film combination is finished, wherein the running path of the laser head is one perimeter of the glass, the wavelength of a laser light source is 980nm-1200nm, and the output power of the laser is 3-20W;
7. and discharging, namely discharging the vacuum glass from the three-stage vacuum cavity after sealing is finished.
Example 2, this example differs from example 1 only in that the printed electronic paste has a thickness of 10 μm.
Example 3, this example differs from example 1 only in that the printed electronic paste has a thickness of 15 μm.
Example 4, this example differs from example 1 only in that the printed electronic paste has a thickness of 20 μm.
Example 5, this example differs from example 1 only in that the printed electronic paste has a thickness of 30 μm.
Example 6, this example differs from example 1 only in that the printed electronic paste has a thickness of 40 μm.
Example 7, this example differs from example 1 only in that the glass tempering temperature is 680 ℃. Example 8, this example differs from example 1 only in that the glass tempering temperature is 720 ℃.
Example 9, this example differs from example 1 only in that the glass tempering temperature is 800 ℃.
Example 10, in this example, the metallization process is to plate a layer of 50nm metal materials, such as copper, silver-copper alloy, nickel, etc., which can be used for soldering with solder, on the edge surfaces of the upper and lower glasses through vacuum plating, and in this example, the metal materials are preferably copper; the plated metal copper is of an uninterrupted rhombus net structure.
Example 11, this example is different from example 10 only in that the thickness of the metal material plated on the edge surfaces of the upper and lower glasses is 150 nm.
Example 12, this example only differs from example 10 in that the thickness of the metal material plated on the edge surfaces of the upper and lower glasses was 500 nm.
Example 13, this example only differs from example 10 in that the thickness of the metal material plated on the edge surfaces of the upper and lower glasses was 1 μm.
Example 14, as shown in figure 1: the embodiment provides vacuum glass produced by the process of embodiment 1, which comprises a lower glass substrate 2 and an upper glass cover plate 1, wherein a circular airtight frame 3 is arranged between the edges of the lower glass substrate 2 and the upper glass cover plate 1, as shown in fig. 2, the airtight frame 3 comprises a metallization layer 31 connected to the lower glass substrate 2 and the upper glass cover plate 1, the metallization layer 31 is sintered conductive silver paste, the metallization layer 31 is an uninterrupted mesh structure, and as shown in fig. 3, the mesh structure of the metallization layer 31 is a diamond mesh pattern. A metal solder 32 is disposed between the two metalized layers 31, and a nano light absorbing material is coated on the surface of the metal solder 32, wherein the nano light absorbing material is nano silver dispersed in an organic solvent. The vacuum cavity enclosed by the airtight frame 3 is internally provided with supports which are metal columns 5 uniformly distributed between the lower glass substrate 2 and the upper glass cover plate 1 in a rectangular array, the metal columns 5 are preferably 304 stainless steel columns, the diameter of the metal columns 5 is 0.5-1mm, the height of the metal columns 5 is 0.2-0.5mm, and the metal columns 5 are fixedly bonded through UV (ultraviolet) glue. The surface of the lower glass substrate 2, which is positioned in the vacuum cavity, is provided with a blind hole 4, the diameter of the blind hole 4 is 2-3mm, the depth of the blind hole 4 is 1.5mm, and a getter is embedded in the blind hole 4.
In example 15, the mesh structure of the metallization layer in this embodiment is a circular mesh pattern, a triangular mesh pattern, a square mesh pattern, or a regular polygonal mesh pattern.
The invention analyzes the problem of thermal stress generated by the existing metal sealing process on the basis of the existing metal sealing process, and the thermal stress is generated in the heating and cooling processes mainly because the thermal expansion coefficients of a metallization layer, glass and a flexible metal soft solder are not matched, so that the mechanical property of the vacuum glass is influenced. The heating modes of the existing metal sealing process are modes of electromagnetic induction, laser, integral heating and the like, the modes carry out integral heating on a sealing layer region in the heating process, the generated thermal stress is large, and the electromagnetic induction is taken as an example for analysis: since the metallization layer on the glass surface is a plated metal film (Cu, Ag, etc.) or a sintered electronic paste (conductive silver paste, conductive copper paste, conductive nickel paste, etc.), the metallization layer is heated during the electromagnetic induction heating process, and the induced current formula I of the metal material is 4.44BSfW10-12(iv)/Z, wherein B is the maximum magnetic induction in T; s is the cross-sectional area of the material under the action of a magnetic field, and the unit is cm2(ii) a f is the frequency of the alternating current in Hertz; w is the number of turns of the coil; z is the impedance of the material; ag impedance of 1.65 x 10-8Ω m, Sn impedance of 11.4 x 10-8Ω m, the impedance of the flexible metal solder is about 7 times that of the metallization layer, and the intensity of the induced current is in inverse proportion to the impedance, so that the induced current of the metallization layer is larger than that of the flexible metal solder, and the temperature of the metallization layer is higher than that of the metal solder during electromagnetic induction heating, and the metallization layer expands greatly. During heating, the metal soft solder is melted, the metalized layer is thermally expanded, the glass belongs to a non-metallic material, the electromagnetic induction has no heat effect, and the glass is obtained from the metalized layer only by means of heat transferWith less heat, minor expansion also occurs; in the cooling process, the material shrinks, the flexible metal soft solder has better ductility, the stress can be released, the internal stress which is mutually dragged exists between the metallization layer and the glass, the glass with overlarge internal stress is directly cracked, the internal stress is smaller than the strength of the glass, and the internal stress remains in the vacuum glass, so that the mechanical strength of the toughened glass is reduced.
Aiming at the problem of the thermal stress, the invention provides a reticular metalized layer and a surface modified flexible metal soft solder, which are matched with a process of using femtosecond (or picosecond) near-infrared laser to heat the flexible metal soft solder only, so that the thermal stress between the metalized layer and a glass substrate is avoided, and the mechanical strength of the vacuum glass produced by the metal sealing process is improved.
In the traditional vacuum glass production process, an extraction opening with small diameter is reserved on the surface or the side surface of glass in a drilling mode, then sealing is completed in the atmosphere, a vacuum pump is used for extracting gas in a vacuum layer or the vacuum layer is discharged in a vacuum environment through pressure difference, and the like to obtain vacuum, the method has the advantages that the flow conductance of gas molecules is very large due to the fact that the caliber of the extraction opening is too small, the extraction speed is very small, the corresponding extraction time is very long, and even when the glass reaches the medium vacuum range (1-10)- 3Pa), the gas molecules are difficult to expel or extract. The vacuum obtaining mode of the one-step process used in the prior art is to butt the upper glass and the lower glass in the atmospheric environment, then enter a vacuum cavity and carry out sealing; because the upper glass sheet and the lower glass sheet are attached to the middle metal soft solder, gas molecules in the vacuum layer are more difficult to discharge, although the internal and external pressure difference exists between the vacuum layer and the vacuum cavity, no position where the gas molecules can be discharged exists, and even if partial gaps exist, the high vacuum degree cannot be realized.
The invention uses the vacuum electrostatic adsorption technology to adsorb the upper glass by static electricity, and the vacuum degree of the vacuum cavity reaches 10-4Bonding two pieces of glass under Pa to form a vacuum layer of vacuum glass of 10 deg.C-4Pa vacuum degree and stable processThe method has high fixed speed and is suitable for large-scale production. The electrostatic chuck is the modular concatenation, and single 300 x 300 mm's electrostatic chuck can bear 300 ~ 600N down power, can satisfy the weight of the toughened glass of the same size completely, after the glass size grow, can adopt the mode of polylith electrostatic chuck concatenation to be used for adsorbing the glass of bigger weight.
On the basis of the technology of producing vacuum glass by the existing metal sealing process, the vacuum sealing process is optimized, a new vacuum obtaining mode is provided, three continuous vacuum cavities are designed and other key technologies are adopted, so that the rapid production of the vacuum glass is realized, if a continuous production line is used, the production rhythm of a single piece of vacuum glass can be controlled to be about 4-10 min, and the production speed is greatly improved compared with that of the prior art; the product quality, yield and the like of the vacuum glass can be improved. The invention is suitable for mass production lines of vacuum glass in large batch.
The foregoing is merely an example of the present invention and common general knowledge in the art of specific structures and/or features of the invention has not been set forth herein in any way. It should be noted that, for those skilled in the art, without departing from the structure of the present invention, several changes and modifications can be made, which should also be regarded as the protection scope of the present invention, and these will not affect the effect of the implementation of the present invention and the practicability of the patent. The scope of the claims of the present application shall be determined by the contents of the claims, and the description of the embodiments and the like in the specification shall be used to explain the contents of the claims.