High-precision flexible micro-positioning platform based on flexible rod
阅读说明:本技术 基于柔性杆的高精度柔性微定位平台 (High-precision flexible micro-positioning platform based on flexible rod ) 是由 曹毅 孟刚 王保兴 居勇健 费鸿博 李巍 于 2019-10-18 设计创作,主要内容包括:本发明提供了一种基于柔性杆的高精度柔性微定位平台,其能解决现有分布柔度式定位平台各支链结构差异较大,不同支链运动性能不够稳定,理论分析较复杂,以及当仅有X或Y方向有运动输入时,还是会产生一定的耦合位移,影响平台运动精度的问题。其包括基座、动平台、四个第一柔性支链和一个第二柔性支链;第一柔性支链由四个双四杆型柔性模块组成,其中三个双四杆型柔性模块并联,再与剩余一个双四杆型柔性模块串联;第二柔性支链由五个双四杆型柔性模块组成,其中四个双四杆型柔性模块并联,再与剩余一个双四杆型柔性模块串联;基座上还分别固定安装有X向电磁驱动器、Y向电磁驱动器和Z向电磁驱动器。(The invention provides a high-precision flexible micro-positioning platform based on a flexible rod, which can solve the problems that the structure difference of each branched chain of the existing distributed flexibility type positioning platform is large, the motion performance of different branched chains is not stable enough, the theoretical analysis is complex, and when motion is input only in the X or Y direction, certain coupling displacement is generated to influence the motion precision of the platform. The flexible branch chain comprises a base, a movable platform, four first flexible branch chains and a second flexible branch chain; the first flexible branched chain consists of four double four-bar flexible modules, wherein three double four-bar flexible modules are connected in parallel and then connected in series with the rest double four-bar flexible module; the second flexible branched chain consists of five double four-bar flexible modules, wherein four double four-bar flexible modules are connected in parallel and then connected in series with the rest double four-bar flexible module; an X-direction electromagnetic driver, a Y-direction electromagnetic driver and a Z-direction electromagnetic driver are respectively and fixedly arranged on the base.)
1. A high-precision flexible micro-positioning platform based on a flexible rod comprises a base, a movable platform, four first flexible branched chains and a second flexible branched chain; the four first flexible branched chains are symmetrically distributed on the periphery of the movable platform in pairs; the method is characterized in that:
the first flexible branched chain consists of four double four-bar flexible modules, wherein the tail ends of the three double four-bar flexible modules are commonly connected with a first connecting module, the head ends of the three double four-bar flexible modules are respectively connected with the base through a second connecting module, two of the three double four-bar flexible modules are horizontally arranged on two sides of the first connecting module, and one of the three double four-bar flexible modules is vertically arranged below the first connecting module; the other double four-bar flexible modules are horizontally arranged and are vertical to the three double four-bar flexible modules, the tail end of each double four-bar flexible module is connected with the movable platform, and the head end of each double four-bar flexible module is connected with the first connecting module;
the second flexible branched chain is positioned below the movable platform and positioned on the inner sides of the four first flexible branched chains, the second flexible branched chain consists of five double four-rod type flexible modules, the four double four-rod type flexible modules and the four double four-rod type flexible modules in the first flexible branched chain, which are connected with the movable platform, are vertically and oppositely aligned and parallel, the tail ends of the double four-rod type flexible modules are commonly connected with a third connecting module, and the head ends of the double four-rod type flexible modules are respectively connected with the base through a fourth connecting module; the other double four-bar flexible modules are vertically arranged, the tail end of each double four-bar flexible module is connected with the movable platform, and the head end of each double four-bar flexible module is connected with the third connecting module;
the base is further fixedly provided with an X-direction electromagnetic driver, a Y-direction electromagnetic driver and a Z-direction electromagnetic driver respectively, the driving ends of the X-direction electromagnetic driver and the Y-direction electromagnetic driver are connected with the adjacent two first connecting modules respectively, and the driving end of the Z-direction electromagnetic driver is connected with the third connecting module.
2. The flexible rod-based high-precision flexible micro positioning platform of claim 1, wherein: the double four-bar flexible module comprises eight flexible bars which are parallel to each other, and the lower ends of the eight flexible bars are fixedly connected to four inflection points and four midpoint positions of a first rigid connecting piece in a square frame structure respectively; the upper ends of the four flexible rods positioned at the inflection point are respectively connected with a second rigid connecting piece, and the second rigid connecting piece forms the tail end of the double-four-rod type flexible module; the upper ends of the four flexible rods positioned at the midpoint position are connected to a third rigid connecting piece together, and the third rigid connecting piece forms the head end of the double-four-rod type flexible module.
3. The flexible rod-based high-precision flexible micro positioning platform as claimed in claim 2, wherein: in the double four-bar flexible module, the four flexible bars, the first rigid connecting piece and the second rigid connecting piece at the inflection point position are integrally manufactured, and the four flexible bars, the first rigid connecting piece and the third rigid connecting piece at the midpoint position are integrally manufactured.
4. A flexible rod-based high precision flexible micro positioning platform according to claim 2 or 3, wherein: the rigid connecting pieces II are square structures, the rigid connecting pieces III are cross plate structures, the rigid connecting pieces II and the rigid connecting pieces III are arranged in a shape of a Chinese character 'mi', gaps are reserved between the rigid connecting pieces II and the rigid connecting pieces III, and the upper ends of the four flexible rods at the midpoint positions are fixedly connected to the four end bottom surfaces of the rigid connecting pieces III respectively.
5. The flexible rod-based high precision flexible micropositioning platform of claim 4, wherein: the first connecting module consists of a square block and a cross-shaped rod vertically and fixedly connected to the direction block, and the second connecting module has the same structure as the cross-shaped rod; the tail ends of three double four-bar flexible modules of the first flexible branched chain are fixedly connected to three side surfaces of the square block through screws respectively, the cross center of the head end of the first flexible branched chain is fixedly connected with one end of the second connecting module through screws respectively, and the other end of the second connecting module extends out of the first rigid connecting piece and is fixedly connected to the base through a switching module; the tail end of the remaining double four-bar flexible module in the first flexible branched chain is fixedly connected to the side face of the movable platform through a screw, and the cross center of the head end is fixedly connected with the end part of the cross bar extending into the double four-bar flexible module through a screw.
6. The flexible rod-based high precision flexible micropositioning platform of claim 5, wherein: the structure of the connecting module III is the same as that of the connecting module I, and the structure of the connecting module IV is the same as that of the connecting module II; the tail ends of four double four-bar type flexible modules of the second flexible branched chain are fixedly connected to four side surfaces of a square block of the third connecting module through screws respectively, the cross center of the head end of the second flexible branched chain is fixedly connected with one end of the fourth connecting module through screws respectively, and the other end of the fourth connecting module extends out of the first rigid connecting piece and is fixedly connected to the base through the switching module; the tail end of the other double four-bar flexible module of the second flexible branched chain is fixedly connected to the bottom surface of the movable platform through a screw, and the cross center of the head end is fixedly connected with the end of a cross bar of the connecting module III, which extends into the double four-bar flexible module, through a screw.
7. The flexible rod-based high precision flexible micropositioning platform of claim 6, wherein: the base comprises a bottom frame and four pillars, wherein the bottom frame is arranged horizontally, the four pillars are arranged longitudinally, the bottom frame is a rectangular frame, and the lower ends of the four pillars are fixedly connected to four corners of the bottom frame respectively.
8. The flexible rod-based high precision flexible micropositioning platform of claim 7, wherein: the pillars are integrally formed with the bottom frame.
9. The flexible rod-based high precision flexible micropositioning platform of claim 7, wherein: the eight switching modules are fixedly connected to the tops of the four supporting columns and the middle points of the four edges of the bottom frame through screws respectively; the two second connecting modules are fixedly connected to the switching modules at the tops of the pillars respectively, and the second connecting module and the fourth connecting module are fixedly connected to the switching modules at the middle points of the four edges of the bottom frame respectively.
10. The flexible rod-based high precision flexible micropositioning platform of claim 9, wherein: the switching module positioned at the top of the support column is integrally manufactured with the two second connecting modules thereon, and the switching module positioned at the midpoint position of the four sides of the bottom frame is integrally manufactured with the second connecting module and the fourth connecting module thereon.
Technical Field
The invention relates to the field of flexible mechanisms, in particular to a high-precision flexible micro-positioning platform based on a flexible rod.
Background
With the rapid development of micro-nano technology and the wide application thereof in related fields, the micro-nano technology has great influence on the fields of manufacture, information, materials, biotechnology and the like. In the application fields of micro-operation, such as precision butt joint of micro-electronics and photoelectron components, bonding alignment assembly of biochips, micro-operation of microsurgery and the like, the requirements on an operation object are increasingly accurate, the operation object is driven by a micro-positioning platform, and in order to meet the requirements of the micro-nano technology, a flexible mechanism is generally adopted as a transmission mechanism of the micro-positioning platform.
Different from the traditional rigid mechanism which realizes the movement and the function through the connection of a kinematic pair and a connecting rod, the flexible mechanism is a novel mechanism which utilizes the elastic deformation of materials to transfer the movement. The kinematic pair in the mechanism is an integrated flexible structure, so that the factors influencing the service life precision and the working performance of the mechanism, such as assembly errors, frictional wear, gaps and the like, do not exist. With the gradual improvement of the design theory of the flexible mechanism, the flexible micro-positioning platform technology is greatly developed, but the dynamic characteristics, the motion precision and the large stroke are still required to be further improved, and meanwhile, the flexible micro-positioning platform has urgent requirements on a multi-degree-of-freedom motion platform with the motion decoupling characteristic.
Most of the existing flexible micro-positioning platforms are centralized flexible positioning platforms based on notch-type flexible hinges, for example, the invention patent with the patent number of ZL2016107010874 discloses a high-precision and large-stroke three-degree-of-freedom parallel micro-positioning platform, which has the advantages of small motion stroke, poor decoupling characteristic, easy occurrence of stress concentration at a notch, large coupling error and parasitic rotation angle of the platform and influence on the positioning precision of the platform.
The invention discloses a high-precision large-stroke large-effective table space translation precision positioning platform which is different from a traditional centralized flexibility type positioning platform based on a notch type flexible hinge, and is disclosed by the invention patent with the application number of 2019103979134. However, the platform still has the following problems: 1) the first flexible branched chain is based on a flexible thin plate, and the second flexible branched chain is based on a flexible rod, so that the structural difference of each branched chain is large, the motion performance of different branched chains is not stable enough, the structural parameters are more, and the theoretical analysis is more complex; 2) because the first branch chain is based on the flexible thin plate, the rigidity difference of the flexible thin plate in X, Y, Z three directions is large, the platform can realize complete decoupling only when motion input is simultaneously carried out in XZ, YZ or XYZ directions, and certain coupling displacement can be generated when motion input is carried out in X or Y directions only, so that the motion precision of the platform is influenced.
Disclosure of Invention
The invention provides a high-precision flexible micro-positioning platform based on a flexible rod, aiming at the technical problems that the structure difference of each branched chain of the existing distributed flexibility type positioning platform is large, the motion performance of different branched chains is not stable enough, the theoretical analysis is complex, and certain coupling displacement can be generated when only motion is input in the X or Y direction, so that the motion precision of the platform is influenced.
The technical scheme is as follows: a high-precision flexible micro-positioning platform based on a flexible rod comprises a base, a movable platform, four first flexible branched chains and a second flexible branched chain; the four first flexible branched chains are symmetrically distributed on the periphery of the movable platform in pairs; the method is characterized in that:
the first flexible branched chain consists of four double four-bar flexible modules, wherein the tail ends of the three double four-bar flexible modules are commonly connected with a first connecting module, the head ends of the three double four-bar flexible modules are respectively connected with the base through a second connecting module, two of the three double four-bar flexible modules are horizontally arranged on two sides of the first connecting module, and one of the three double four-bar flexible modules is vertically arranged below the first connecting module; the other double four-bar flexible modules are horizontally arranged and are vertical to the three double four-bar flexible modules, the tail end of each double four-bar flexible module is connected with the movable platform, and the head end of each double four-bar flexible module is connected with the first connecting module;
the second flexible branched chain is positioned below the movable platform and positioned on the inner sides of the four first flexible branched chains, the second flexible branched chain consists of five double four-rod type flexible modules, the four double four-rod type flexible modules and the four double four-rod type flexible modules in the first flexible branched chain, which are connected with the movable platform, are vertically and oppositely aligned and parallel, the tail ends of the double four-rod type flexible modules are commonly connected with a third connecting module, and the head ends of the double four-rod type flexible modules are respectively connected with the base through a fourth connecting module; the other double four-bar flexible modules are vertically arranged, the tail end of each double four-bar flexible module is connected with the movable platform, and the head end of each double four-bar flexible module is connected with the third connecting module;
the base is further fixedly provided with an X-direction electromagnetic driver, a Y-direction electromagnetic driver and a Z-direction electromagnetic driver respectively, the driving ends of the X-direction electromagnetic driver and the Y-direction electromagnetic driver are connected with the adjacent two first connecting modules respectively, and the driving end of the Z-direction electromagnetic driver is connected with the third connecting module.
It is further characterized in that:
the double four-bar flexible module comprises eight flexible bars which are parallel to each other, and the lower ends of the eight flexible bars are fixedly connected to four inflection points and four midpoint positions of a first rigid connecting piece in a square frame structure respectively; the upper ends of the four flexible rods positioned at the inflection point are respectively connected with a second rigid connecting piece, and the second rigid connecting piece forms the tail end of the double-four-rod type flexible module; the upper ends of the four flexible rods positioned at the midpoint position are connected to a third rigid connecting piece together, and the third rigid connecting piece forms the head end of the double-four-rod type flexible module.
In the double four-bar flexible module, the four flexible bars, the first rigid connecting piece and the second rigid connecting piece at the inflection point position are integrally manufactured, and the four flexible bars, the first rigid connecting piece and the third rigid connecting piece at the midpoint position are integrally manufactured.
The rigid connecting pieces II are square structures, the rigid connecting pieces III are cross plate structures, the rigid connecting pieces II and the rigid connecting pieces III are arranged in a shape of a Chinese character 'mi', gaps are reserved between the rigid connecting pieces II and the rigid connecting pieces III, and the upper ends of the four flexible rods at the midpoint positions are fixedly connected to the four end bottom surfaces of the rigid connecting pieces III respectively.
The first connecting module consists of a square block and a cross-shaped rod vertically and fixedly connected to the direction block, and the second connecting module has the same structure as the cross-shaped rod; the tail ends of three double four-bar flexible modules of the first flexible branched chain are fixedly connected to three side surfaces of the square block through screws respectively, the cross center of the head end of the first flexible branched chain is fixedly connected with one end of the second connecting module through screws respectively, and the other end of the second connecting module extends out of the first rigid connecting piece and is fixedly connected to the base through a switching module; the tail end of the remaining double four-bar flexible module in the first flexible branched chain is fixedly connected to the side face of the movable platform through a screw, and the cross center of the head end is fixedly connected with the end part of the cross bar extending into the double four-bar flexible module through a screw.
The structure of the connecting module III is the same as that of the connecting module I, and the structure of the connecting module IV is the same as that of the connecting module II; the tail ends of four double four-bar type flexible modules of the second flexible branched chain are fixedly connected to four side surfaces of a square block of the third connecting module through screws respectively, the cross center of the head end of the second flexible branched chain is fixedly connected with one end of the fourth connecting module through screws respectively, and the other end of the fourth connecting module extends out of the first rigid connecting piece and is fixedly connected to the base through the switching module; the tail end of the other double four-bar flexible module of the second flexible branched chain is fixedly connected to the bottom surface of the movable platform through a screw, and the cross center of the head end is fixedly connected with the end of a cross bar of the connecting module III, which extends into the double four-bar flexible module, through a screw.
The base comprises a bottom frame and four pillars, wherein the bottom frame is arranged horizontally, the four pillars are arranged longitudinally, the bottom frame is a rectangular frame, and the lower ends of the four pillars are fixedly connected to four corners of the bottom frame respectively.
The pillars are integrally formed with the bottom frame.
The eight switching modules are fixedly connected to the tops of the four supporting columns and the middle points of the four edges of the bottom frame through screws respectively; the two second connecting modules are fixedly connected to the switching modules at the tops of the pillars respectively, and the second connecting module and the fourth connecting module are fixedly connected to the switching modules at the middle points of the four edges of the bottom frame respectively.
The switching module positioned at the top of the support column is integrally manufactured with the two second connecting modules thereon, and the switching module positioned at the midpoint position of the four sides of the bottom frame is integrally manufactured with the second connecting module and the fourth connecting module thereon.
The invention has the beneficial effects that:
according to the flexible micro-positioning platform, the first flexible branched chain and the second flexible branched chain are both composed of the double four-rod type flexible modules, and all the branched chains form a distribution flexibility type structure based on the flexible rods, so that the structural difference of each branched chain is greatly reduced, the motion stability of the platform is remarkably improved, the structural parameters are reduced, and parametric design is favorably realized; meanwhile, the rigidity difference of the flexible rod in X, Y, Z three directions is small, so that the coupling displacement cannot be generated when displacement input is simultaneously performed in multiple directions, and the coupling displacement cannot be generated when movement input is performed only in X, Y or Z direction, so that the movement precision of the platform can be improved, and the application range of the platform is expanded; in addition, the four first flexible branched chains and the four second flexible branched chains are arranged in parallel, so that the flexible micro-positioning platform has higher bearing capacity and response speed, and the compactness of the platform structure is effectively improved.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic diagram of the overall structure of a double four-bar type flexible module;
FIG. 3 is a schematic diagram of the overall structure of a first flexible branch;
FIG. 4 is a schematic diagram of an exploded structure of a second flexible branch;
fig. 5 is a schematic view of the overall structure of the base.
Reference numerals: 1-a base; 2-moving the platform; 3-a first flexible branch; 4-a second flexible branch; 5-double four-bar flexible module; 6, connecting the module I; 7-connecting a second module; 8-connecting a module III; 9-connecting a module IV; 10-a scaffold; an 11-X direction electromagnetic driver; a 12-Y directional electromagnetic drive; a 13-Z direction electromagnetic driver; 14-a switching module; 15-a bottom frame; 16-a pillar; 51-a flexible rod; 52-rigid link one; 53-rigid link two; 54-rigid link three; 61-square blocks; 62-cross-shaped rod.
Detailed Description
Referring to fig. 1 to 5, the flexible rod-based high-precision flexible micro positioning platform of the present invention comprises a
the first flexible
the second flexible
an X-direction
Referring to fig. 2, the double four-bar
Referring to fig. 1 to 3, the first connecting module 6 is composed of a
Referring to fig. 1, 2 and 4, a third connecting
Referring to fig. 5, the
Referring to fig. 1 to 4, eight
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