阅读说明：本技术 一种小量程三维传感器及其测试方法 (Small-range three-dimensional sensor and testing method thereof ) 是由 相立峰 李晨 黄肖飞 于 2019-10-30 设计创作，主要内容包括：本发明公开了一种小量程三维传感器,包括弹性体、上盖板、下盖板和电路板,电路板设置在弹性体里面,上盖板和下盖板分别固定在弹性体的上下两侧；弹性体包括受力台、轮箍和四组对称设置的应变梁组,轮箍套设在受力台的外部,四组应变梁组均布设置在受力台和轮箍之间,每组应变梁组的一端与受力台的外表面连接,另一端与轮箍的内表面连接上。本小量程三维传感器弹性体结构简单,易于加工,测量精度高等等的优点。本发明还公开了一种小量程三维传感器的测试方法。本测试方法,采用了多个桥路测量一个方向的测量方法,将各个桥路的测量值在软件里面相加得到这个桥路的力值(或者电压值),这种测量方法科学有效地解决了小量程甚至微小量程传感器的设计方法。(The invention discloses a small-range three-dimensional sensor which comprises an elastic body, an upper cover plate, a lower cover plate and a circuit board, wherein the circuit board is arranged in the elastic body, and the upper cover plate and the lower cover plate are respectively fixed on the upper side and the lower side of the elastic body; the elastic body comprises a stress platform, a tire and four groups of strain beam sets which are symmetrically arranged, the tire is sleeved outside the stress platform, the four groups of strain beam sets are uniformly distributed between the stress platform and the tire, one end of each strain beam set is connected with the outer surface of the stress platform, and the other end of each strain beam set is connected with the inner surface of the tire. The small-range three-dimensional sensor elastic body has the advantages of simple structure, easiness in processing, high measurement precision and the like. The invention also discloses a test method of the small-range three-dimensional sensor. The test method adopts a measuring method of measuring one direction by a plurality of bridges, and the measured values of the bridges are added in software to obtain the force value (or voltage value) of the bridge.)

1. A small-range three-dimensional sensor is characterized in that: the elastic body (1), the upper cover plate (2), the lower cover plate (3) and the circuit board (5) are included, the circuit board (5) is arranged in the elastic body (1), and the upper cover plate (2) and the lower cover plate (3) are respectively fixed on the upper side and the lower side of the elastic body (1); the elastic body (1) comprises a stress platform (6), a tire (8) and four groups of strain beam sets (7) which are symmetrically arranged, the tire (8) is sleeved outside the stress platform (6), the four groups of strain beam sets (7) are uniformly distributed between the stress platform (6) and the tire (8), one end of each group of strain beam set (7) is connected with the outer surface of the stress platform (6), the other end of each group of strain beam set is connected with the inner surface of the tire (8), each group of strain beam set (7) comprises three strain beams, and each group of strain beam set (7) is T-shaped on the whole; pasting a strain gauge on the strain beam; the strain gauges in the four strain beam sets (7) are connected to form six groups of Wheatstone bridges which are connected in parallel, a group of power lines and six groups of signal lines of the small-range three-dimensional sensor are welded to the circuit board (5), 16 core wires are welded on the circuit board (5), the 16 core wires are led out of the elastic body (1) from the wire outlet (4), the 16 core wires led out of the elastic body (1) are welded with an aviation plug, and the aviation plug is connected to the data acquisition box in an inserting mode.

2. The small-scale three-dimensional sensor according to claim 1, characterized in that four ear seats (9) for fixing the circuit board (5) are uniformly distributed on the inner surface of the rim (8).

3. The small-scale three-dimensional sensor according to claim 1, wherein each strain beam group (7) is T-shaped, each strain beam group (7) is composed of three strain beams, and twelve strain beams are provided and respectively defined as a first strain beam (7-1), a second strain beam (7-2), a third strain beam (7-3), a fourth strain beam (7-4), a fifth strain beam (7-5), a sixth strain beam (7-6), a seventh strain beam (7-7), an eighth strain beam (7-8), a ninth strain beam (7-9), a tenth strain beam (7-10), an eleventh strain beam (7-11) and a twelfth strain beam (7-12), and the first strain beam (7-1), the fourth strain beam (7-4) and the ninth strain beam (7-9) form a strain beam group (7), the fifth strain beam (7-5), the eighth strain beam (7-8) and the twelfth strain beam (7-12) form a second strain beam group (7), the second strain beam (7-2), the third strain beam (7-3) and the tenth strain beam (7-10) form a third strain beam group (7), and the sixth strain beam (7-6), the seventh strain beam (7-7) and the eleventh strain beam (7-11) form a fourth strain beam group (7);

one end of the ninth strain beam (7-9), one end of the tenth strain beam (7-10), one end of the eleventh strain beam (7-11) and one end of the twelfth strain beam (7-12) are connected with the inner surface of the stress platform (6), the other end of the ninth strain beam (7-9) is fixed with a junction of the first strain beam (7-1) and the fourth strain beam (7-4), the other end of the tenth strain beam (7-10) is fixed with a junction of the second strain beam (7-2) and the third strain beam (7-3), the other end of the eleventh strain beam (7-11) is fixed with a junction of the sixth strain beam (7-6) and the seventh strain beam (7-7), and the other end of the twelfth strain beam (7-12) is fixed with a junction of the fifth strain beam (7-5) and the eighth strain beam (7-8);

r1 strain gauges, R4 strain gauges, R5 strain gauges, R8 strain gauges, R3 strain gauges, R2 strain gauges, R6 strain gauges and R7 strain gauges are respectively adhered to one side of a first strain beam (7-1), a fourth strain beam (7-4), a fifth strain beam (7-5), an eighth strain beam (7-8), a third strain beam (7-3), a second strain beam (7-2), a sixth strain beam (7-6) and a seventh strain beam (7-7);

strain gauges are pasted on the nine-gauge strain beam (7-9), the ten-gauge strain beam (7-10), the eleven-gauge strain beam (7-11) and the twelve-gauge strain beam (7-12) in a positive and negative mode, wire grids of the strain gauges are unconnected double-grid strain gauges in the 45-degree direction, an R14 strain gauge and an R13 strain gauge are pasted on one surface of the nine-gauge strain beam (7-9), and an R9 strain gauge and an R10 strain gauge are pasted on the other surface of the nine-gauge strain beam (7-9); an R11 strain gauge and an R12 strain gauge are pasted on one surface of a No. ten strain beam (7-10), and an R15 strain gauge and an R16 strain gauge are pasted on the other surface of the No. ten strain beam (7-10); an R19 strain gauge and an R20 strain gauge are pasted on one surface of the No. eleven strain beam (7-11), and an R21 strain gauge and an R22 strain gauge are pasted on the other surface of the No. eleven strain beam (7-11); an R23 strain gauge and an R24 strain gauge are pasted on one surface of the twelve-gauge strain beam (7-12), and an R18 strain gauge and an R17 strain gauge are pasted on the other surface of the twelve-gauge strain beam (7-12);

the bridge circuit 1 is composed of an R1 strain gauge, an R2 strain gauge, an R3 strain gauge and an R4 strain gauge, the bridge circuit 1 outputs U01 voltage, the bridge circuit 2 is composed of an R5 strain gauge, an R6 strain gauge, an R7 strain gauge and an R8 strain gauge, the bridge circuit 2 outputs U02 voltage, an R9 strain gauge, an R10 strain gauge, an R11 strain gauge and an R12 strain gauge, the bridge circuit 3 outputs U03 voltage, an R13 strain gauge, an R14 strain gauge, an R15 strain gauge and an R16 strain gauge form a bridge circuit 4, the bridge circuit 4 outputs U04 voltage, an R17 strain gauge, an R18 strain gauge, an R19 strain gauge and an R20 strain gauge form a bridge circuit 5, the bridge circuit 5 outputs U05 voltage, an R21 strain gauge, an R22 strain gauge, an R23 strain gauge and an R24 strain gauge 6 strain gauge, and the bridge circuit 6 outputs U06 voltage.

4. The method for testing the small-scale three-dimensional sensor according to the claims 1 to 3, characterized by comprising the following steps:

step 1) carrying out finite element analysis in Ansys based on design parameters of the small-range three-dimensional sensor, wherein when the small-range three-dimensional sensor is loaded in a full-range mode in each direction, the output voltage value in each direction is as follows:

1.1, when Fx full-scale forward loading is carried out:

wherein the subscripts define:U _Fx when the full-scale positive loading of the Fx is carried out, the bridge circuit 1 outputs voltage;U _Fy-Fx is full of FxWhen the stroke is loaded in the positive direction, the bridge circuit 2 outputs voltage;U _Fz-Fx measuring the bridge circuit output voltage in the Fz direction when the full-scale forward loading of the Fx is carried out; k is the sensitivity coefficient of the light-emitting diode,Uifor bridge-circuit excitation of the voltage,. epsilon₁Strain, ε, measured for wire grids in the R1 strain gage footprint₂Strain, ε, measured for wire grids in the R2 strain gage footprint₃Strain, ε, measured for wire grids in the R3 strain gage footprint₄Strain, ε, measured for wire grids in the R4 strain gage footprint₅Strain, ε, measured for wire grids in the R5 strain gage footprint₆Strain, ε, measured for wire grids in the R6 strain gage footprint₇Strain, ε, measured for wire grids in the R7 strain gage footprint₈The amount of strain measured for the wire grid in the area covered by the R8 strain gauge;

1.2, during Fy full-scale forward loading:

subscript definition:U _Fy when Fy is loaded in the full-scale forward direction, the bridge circuit 2 outputs voltage;U _Fx-Fy when Fy is loaded in the full-scale forward direction, the bridge circuit 1 outputs voltage;U _Fz-Fy measuring the bridge circuit output voltage in the Fz direction when Fy full-scale forward loading is carried out;

1.3, during Fz full-scale forward loading:

subscript definition:U _Fz measuring the bridge circuit output voltage in the Fz direction when the Fz full-scale forward loading is carried out;U _Fx-Fz when Fz full-scale forward loading is carried out, the bridge circuit 1 outputs voltage;U _Fy-Fy when Fz full-scale forward loading is carried out, the bridge circuit 2 outputs voltage;

step 2), coupling calculation between dimensions:

2.1, when Fx full-scale forward loading is carried out:

the Fy coupling is:

the Fz coupling is:；

2.2, during Fy full-scale forward loading:

the Fx coupling is:

the Fz coupling is:；

2.3, during Fz full-scale forward loading:

the Fx coupling is:

the Fy coupling is:。

5. the test method according to claim 4, characterized in that the normal Fz is applied to the force bearing platform (6) in the elastomer (1) of the small-range three-dimensional sensor, and the lateral surfaces of the nine-gauge strain beams (7-9), the ten-gauge strain beams (7-10), the eleven-gauge strain beams (7-11) and the twelve-gauge strain beams (7-12) are subjected to shear deformation to form 4 bridges for measuring Fz, and form a bridge 3, a bridge 4, a bridge 5 and a bridge 6;

bridge 3, bridge 4, bridge 5 and bridge 6 are added to obtain the value of normal Fz, namely:

wherein epsilon₉Strain, ε, measured for wire grids in the R9 strain gage footprint₁₀Strain, ε, measured for wire grids in the R10 strain gage footprint₁₁Strain, ε, measured for wire grids in the R11 strain gage footprint₁₂Strain, ε, measured for wire grids in the R12 strain gage footprint₁₃The strain measured by the wire grid in the covered area of the R13 strain gauge is epsilon 14, the strain measured by the wire grid in the covered area of the R14 strain gauge is epsilon₁₅Strain, ε, measured for wire grids in the R15 strain gage footprint₁₆The amount of strain measured for the wire grid in the area covered by the R16 strain gauge; epsilon₁₇Strain, ε, measured for wire grids in the R17 strain gage footprint₁₈Strain, ε, measured for wire grids in the R18 strain gage footprint₁₉Strain, ε, measured for wire grids in the R19 strain gage footprint₂₀Strain, ε, measured for wire grids in the R20 strain gage footprint₂₁Strain, ε, measured for wire grids in the R21 strain gage footprint₂₂Strain, ε, measured for wire grids in the R22 strain gage footprint₂₃Strain, ε, measured for wire grids in the R23 strain gage footprint₂₄The amount of strain measured for the wire grid in the area covered by the R24 strain gage.

6. The test method according to claim 4, wherein Fx is loaded on a force bearing platform (6) in the elastic body (1) of the small-range three-dimensional sensor, the first strain beam (7-1), the second strain beam (7-2), the third strain beam (7-3) and the fourth strain beam (7-4) are subjected to bending strain, the R1 strain gauge and the R4 strain gauge are subjected to tensile strain, and the R2 strain gauge and the R3 strain gauge are subjected to compressive strain to form the bridge circuit 1, and then:

。

7. the test method according to claim 4, characterized in that, when Fy is loaded on a stress platform (6) in an elastic body (1) of the small-range three-dimensional sensor, bending strain occurs on a strain beam (7-5), a strain beam (7-6), a strain beam (7-7) and a strain beam (7-8), a strain sheet R5 and a strain sheet R8 are subjected to tensile strain, and a strain sheet R6 and a strain sheet R7 are subjected to compressive strain to form the bridge circuit 2, then:

。

Technical Field

The invention belongs to the field of sensor measurement, and relates to a small-range three-dimensional sensor and a test method thereof, which are based on a resistance strain type principle and are mainly used for a gecko-like robot motion mechanics test system.

Background

With the rapid development of scientific technology, sensors have been advanced into various fields of industrial production, which typically come from the robot industry, the polishing industry, various friction and wear testers, and the like, and as for the sensor principle, there are common resistive strain type, photoelectric type, capacitive type, electromagnetic type, and the like, and there are one-dimensional sensors, two-dimensional sensors, three-dimensional sensors, six-dimensional sensors, and the like. In the case of three-dimensional sensors, the measurement accuracy is low, which is particularly indicated by the fact that the coupling between dimensions is large, generally reaching 10%, even reaching 30%, and especially in the case of small-range three-dimensional sensors, such large coupling causes a large measurement error, and is difficult to use in industrial production. For the gecko-like motion mechanics testing system, the required range is small, and in addition, eccentric loading is required in the testing process, so that the three-dimensional sensor with large coupling cannot be used.

Disclosure of Invention

Based on the analysis, the invention provides a novel small-range three-dimensional sensor and a measuring method, the three-dimensional sensor has the advantages of simple structure of an elastic body, easiness in processing, small and close to zero inter-dimensional coupling in theory and high measuring precision. If the coupling between dimensions is large due to errors such as machining errors, mounting errors, assembly errors, and the like, the coupling between dimensions can be reduced by a process of trimming corners so that the coupling between dimensions is close to zero.

The small-range three-dimensional sensor comprises an elastic body, an upper cover plate, a lower cover plate and a circuit board, wherein the circuit board is arranged in the elastic body, and the upper cover plate and the lower cover plate are respectively fixed on the upper side and the lower side of the elastic body; the elastic body comprises a stress platform, a wheel hoop and four groups of strain beam sets which are symmetrically arranged, the wheel hoop is sleeved outside the stress platform, the four groups of strain beam sets are uniformly distributed between the stress platform and the wheel hoop, one end of each group of strain beam sets is connected with the outer surface of the stress platform, the other end of each group of strain beam sets is connected with the inner surface of the wheel hoop, each group of strain beam sets comprises three strain beams, and each group of strain beam sets is T-shaped as a whole; pasting a strain gauge on the strain beam; the strain gauges in the four strain beam groups are connected to form six groups of Wheatstone bridges which are connected in parallel, a group of power lines and six groups of signal lines of the small-range three-dimensional sensor are welded to a circuit board, 16 core wires are welded to the circuit board, the 16 core wires lead out the elastic body from a wire outlet, the 16 core wires leading out the elastic body are welded with an aviation plug, and the aviation plug is connected to the data acquisition box in an inserting mode.

The invention relates to a novel small-range three-dimensional sensor, which is based on a resistance strain type principle, wherein an elastic body is used as a core component, and performance indexes of the elastic body directly influence various performance indexes of the sensor, particularly the design of a strain beam and the selection of materials.

The technical scheme of the invention is further defined as follows:

four lug seats for fixing the circuit board are uniformly distributed on the inner surface of the wheel rim.

Each strain beam group is in a T shape, each strain beam group consists of three strain beams, twelve strain beams are arranged, and the strain beams are respectively defined as a first strain beam, a second strain beam, a third strain beam, a fourth strain beam, a fifth strain beam, a sixth strain beam, a seventh strain beam, an eighth strain beam, a ninth strain beam, a tenth strain beam, an eleventh strain beam and a twelfth strain beam;

one end of each of a ninth strain beam, a tenth strain beam, an eleventh strain beam and a twelfth strain beam is connected with the inner surface of the stress platform, the other end of the ninth strain beam is fixed with a junction of the first strain beam and the fourth strain beam, the other end of the tenth strain beam is fixed with a junction of the second strain beam and the third strain beam, the other end of the eleventh strain beam is fixed with a junction of the sixth strain beam and the seventh strain beam, and the other end of the twelfth strain beam is fixed with a junction of the fifth strain beam and the eighth strain beam;

r1 strain gauges, R4 strain gauges, R5 strain gauges, R8 strain gauges, R3 strain gauges, R2 strain gauges, R6 strain gauges and R7 strain gauges are respectively adhered to one side of a first strain beam, a fourth strain beam, a fifth strain beam, an eighth strain beam, a third strain beam, a second strain beam, a sixth strain beam and a seventh strain beam;

the front and back sides of the ninth strain beam, the tenth strain beam, the eleventh strain beam and the twelfth strain beam are respectively pasted with a strain gauge, the wire grids of the strain gauges are unconnected double-grid strain gauges in the 45-degree direction, one surface of the ninth strain beam is pasted with an R14 strain gauge and an R13 strain gauge, and the other surface of the ninth strain beam is pasted with an R9 strain gauge and an R10 strain gauge; adhering an R11 strain gauge and an R12 strain gauge to one surface of a ten-gauge strain beam, and adhering an R15 strain gauge and an R16 strain gauge to the other surface of the ten-gauge strain beam; an R19 strain gauge and an R20 strain gauge are pasted on one surface of an eleventh strain beam, and an R21 strain gauge and an R22 strain gauge are pasted on the other surface of the eleventh strain beam; an R23 strain gauge and an R24 strain gauge are pasted on one surface of a No. twelve strain beam, and an R18 strain gauge and an R17 strain gauge are pasted on the other surface of the No. twelve strain beam;

the bridge circuit 1 is composed of an R1 strain gauge, an R2 strain gauge, an R3 strain gauge and an R4 strain gauge, the bridge circuit 1 outputs U01 voltage, the bridge circuit 2 is composed of an R5 strain gauge, an R6 strain gauge, an R7 strain gauge and an R8 strain gauge, the bridge circuit 2 outputs U02 voltage, an R9 strain gauge, an R10 strain gauge, an R11 strain gauge and an R12 strain gauge, the bridge circuit 3 outputs U03 voltage, an R13 strain gauge, an R14 strain gauge, an R15 strain gauge and an R16 strain gauge form a bridge circuit 4, the bridge circuit 4 outputs U04 voltage, an R17 strain gauge, an R18 strain gauge, an R19 strain gauge and an R20 strain gauge form a bridge circuit 5, the bridge circuit 5 outputs U05 voltage, an R21 strain gauge, an R22 strain gauge, an R23 strain gauge and an R24 strain gauge 6 strain gauge, and the bridge circuit 6 outputs U06 voltage.

The invention provides a test method of a small-range three-dimensional sensor, which comprises the following steps:

step 1) carrying out finite element analysis in Ansys based on design parameters of the small-range three-dimensional sensor, wherein when the small-range three-dimensional sensor is loaded in a full-range mode in each direction, the output voltage value in each direction is as follows:

1.1, when Fx full-scale forward loading is carried out:

wherein the subscripts define:U _Fx when the full-scale positive loading of the Fx is carried out, the bridge circuit 1 (namely the bridge circuit for measuring the Fx direction) outputs voltage;U _Fy-Fx when the full-scale positive loading of Fx is carried out, the bridge circuit 2 (namely the bridge circuit for measuring Fy direction) outputs voltage;U _Fz-Fx when the full-scale positive loading of the Fx is carried out, measuring the output voltage of a bridge circuit (namely the sum of the output voltages of the bridge circuit 3, the bridge circuit 4, the bridge circuit 5 and the bridge circuit 6) in the Fz direction; k is the sensitivity coefficient of the light-emitting diode,Uifor bridge-circuit excitation of the voltage,. epsilon₁Strain, ε, measured for wire grids in the R1 strain gage footprint₂Strain, ε, measured for wire grids in the R2 strain gage footprint₃Strain, ε, measured for wire grids in the R3 strain gage footprint₄Strain, ε, measured for wire grids in the R4 strain gage footprint₅Strain, ε, measured for wire grids in the R5 strain gage footprint₆Strain, ε, measured for wire grids in the R6 strain gage footprint₇Strain, ε, measured for wire grids in the R7 strain gage footprint₈The amount of strain measured for the wire grid in the area covered by the R8 strain gauge; u shape_u03For the output voltage of the bridge circuit 3, U_u04For the output voltage of the bridge circuit 4, U_u05For the output voltage of the bridge circuit 5, U_u06Is the output voltage of the bridge circuit 6;

1.2, during Fy full-scale forward loading:

subscript definition:U _Fy when the full-scale Fy is loaded in the positive direction, the bridge circuit 2 (namely the bridge circuit for measuring the Fy direction) outputs voltage;U _Fx-Fy when Fy full scale is loaded in the positive direction, the bridge circuit 1 (namely the bridge circuit for measuring the Fx direction) outputs voltage;U _Fz-Fy when the full-scale positive loading is carried out for Fy, measuring the output voltage of the bridge circuit (namely the sum of the output voltages of the bridge circuit 3, the bridge circuit 4, the bridge circuit 5 and the bridge circuit 6) in the Fz direction;

1.3, during Fz full-scale forward loading:

subscript definition:U _Fz when the full-scale Fz is loaded in the positive direction, measuring the output voltage of the bridge circuit (namely the sum of the output voltages of the bridge circuit 3, the bridge circuit 4, the bridge circuit 5 and the bridge circuit 6) in the Fz direction;U _Fx-Fz when the full-scale Fz is loaded in the positive direction, the bridge circuit 1 (namely the bridge circuit for measuring the direction of the Fx) outputs voltage;U _Fy-Fy when the full-scale Fz is loaded in the positive direction, the bridge circuit 2 (namely the bridge circuit for measuring the Fy direction) outputs voltage;

step 2), coupling calculation between dimensions:

2.1, when Fx full-scale forward loading is carried out:

the Fy coupling is:

the Fz coupling is:

2.2, during Fy full-scale forward loading:

the Fx coupling is:

the Fz coupling is:

2.3, during Fz full-scale forward loading:

the Fx coupling is:

the Fy coupling is:。

according to the testing method, in order to enable the coupling between dimensions to be close to zero, different methods are adopted for measuring in three directions, the bending strain measuring method is adopted in the lateral direction (Fx and Fy), the shearing strain measuring method is adopted in the normal direction (Fz), the objective that the coupling between dimensions is close to zero can be achieved through Ansys finite element calculation, and even when the eccentric loading is carried out, the coupling between dimensions is close to zero.

The method of the invention adopts the further technical scheme that:

loading a normal Fz to a stress platform in an elastic body of the small-range three-dimensional sensor, and enabling the side surfaces of a ninth strain beam, a tenth strain beam, an eleventh strain beam and a twelfth strain beam to generate shear deformation to form 4 bridges for measuring the Fz and form a bridge 3, a bridge 4, a bridge 5 and a bridge 6;

bridge 3, bridge 4, bridge 5 and bridge 6 are added to obtain the value of normal Fz, namely:

。

because the three-dimensional sensor has small measuring range, when a shear strain measuring normal (Fz) is adopted, if a bridge is designed for measuring, the strain is difficult to achieve the required resolution and precision, if the required strain is not to be achieved, the thickness of the strain beam is less than 1mm, because the elastomer material is aluminum, the strain beam less than 1mm is necessarily deformed in the machining process, generally, the thickness of the strain beam is at least 1mm, therefore, four bridge measuring normal (Fz) values are designed, and finally, the four bridge measuring results are added in software to obtain the normal (Fz) force value (or the voltage value). Therefore, the method for measuring a specific direction through a plurality of bridges scientifically and effectively solves the development of the small-range multi-dimensional force sensor.

The method is characterized in that Fx is loaded on a stress platform in an elastic body of the small-range three-dimensional sensor, a first strain beam, a second strain beam, a third strain beam and a fourth strain beam are subjected to bending strain, a R1 strain gauge and a R4 strain gauge are subjected to tensile strain, and a R2 strain gauge and a R3 strain gauge are subjected to compressive strain to form a bridge circuit 1, and then:

。

loading Fy on a stress platform in an elastic body of the small-range three-dimensional sensor, wherein the five-strain beam, the six-strain beam, the seven-strain beam and the eight-strain beam generate bending strain, the R5 strain gauge and the R8 strain gauge are subjected to tensile strain, and the R6 strain gauge and the R7 strain gauge are subjected to compressive strain to form a bridge circuit 2, and then:

。

ansys proposed in the test method is a known technique and is large-scale general Finite Element Analysis (FEA) software developed by Ansys corporation, usa.

The invention has the beneficial effects that:

1. the small-range three-dimensional sensor elastic body has the advantages of simple structure, easiness in processing, high measurement precision and the like.

2. The test method adopts a measuring method of measuring one direction by a plurality of bridges, and adds the measured values of each bridge in software to obtain the force value (or voltage value) of the bridge, so that the measuring method scientifically and effectively solves the design method of small-range and even micro-range sensors.

Drawings

Fig. 1 is a schematic view of the overall structure of the small-scale three-dimensional sensor of the invention.

Fig. 2 is a cross-sectional view of fig. 1.

Fig. 3 is a schematic structural diagram of an elastic body in the small-range three-dimensional sensor.

Fig. 4 is a schematic diagram of the distribution of strain beams on an elastomer.

Fig. 5 is a schematic diagram showing distribution of the strain gauges attached to the strain beams of the elastic body (in the figure, a schematic diagram of attaching the strain gauges to the strain beams 9, 10, 11, and 12 is shown).

Fig. 6 is a sectional view taken along line a-a of fig. 5.

Fig. 7 is a sectional view taken along line H-H in fig. 5.

Fig. 8 is a cross-sectional view taken along line D-D of fig. 5.

Fig. 9 is a cross-sectional view E-E of fig. 5.

Fig. 10 is a sectional view taken along line G-G in fig. 5.

Fig. 11 is a sectional view taken along line B-B in fig. 5.

Fig. 12 is a sectional view F-F in fig. 5.

Fig. 13 is a cross-sectional view taken along line C-C of fig. 5.

FIG. 14 is a schematic view of a R1-R8 strain gage.

FIG. 15 is a schematic view of a R9-R24 strain gage.

Fig. 16 is a bridge schematic diagram of a small-scale three-dimensional sensor.

Fig. 17 is a schematic view of the elastomer three-dimensional model loaded with Fx, Fy.

FIG. 18 is a schematic view of an elastomer three-dimensional model loaded with Fx, Fz.

Fig. 19 is a front view of an example of an elastic body of a small-scale three-dimensional sensor.

Fig. 20 is a bridging schematic diagram illustrating a small-scale three-dimensional sensor.

Detailed Description

The technical solution of the present invention is described in detail below, but the scope of the present invention is not limited to the embodiments.

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail with reference to fig. 1-20 and the embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.