阅读说明：本技术 喷嘴装置及其制造方法 (Nozzle device and method for manufacturing the same ) 是由 D.赛尔 J.米德布杰 于 2018-05-25 设计创作，主要内容包括：本发明涉及一种用于使液体雾化的喷嘴装置(1-1),其中该喷嘴装置(1-1)包括：基底(3)；包括多个筛侧孔口(5a)的筛侧膜(5),该筛侧膜(5)设置在基底(3)的筛侧(3c)上；包括多个喷雾侧孔口(7a)的喷雾侧膜(7),该喷雾侧膜(7)设置在基底(3)的喷雾侧(3d)上,其中所述基底(3)具有延伸至筛侧膜(5)的第一腔体部(4a)以及从第一腔体部(4a)延伸至喷雾侧膜(7)的第二腔体部(4b),从而沿着流体连通轴(9)在筛侧孔口(5a)与喷雾侧孔口(7a)之间实现流体连通,第一腔体部(4a)的横截面积(11)大于第二腔体部(4b)的横截面积(13),所述横截面是关于流体连通轴(9)而言的。(The invention relates to a nozzle device (1-1) for atomizing a liquid, wherein the nozzle device (1-1) comprises: a substrate (3); a screen-side membrane (5) comprising a plurality of screen-side apertures (5a), the screen-side membrane (5) being disposed on a screen side (3c) of the substrate (3); a spray side membrane (7) comprising a plurality of spray side apertures (7a), the spray side membrane (7) being arranged on a spray side (3d) of the substrate (3), wherein the substrate (3) has a first cavity portion (4a) extending to the sieve side membrane (5) and a second cavity portion (4b) extending from the first cavity portion (4a) to the spray side membrane (7) such that fluid communication is achieved between the sieve side apertures (5a) and the spray side apertures (7a) along a fluid communication axis (9), the first cavity portion (4a) having a cross-sectional area (11) being larger than a cross-sectional area (13) of the second cavity portion (4b), said cross-sectional area being with respect to the fluid communication axis (9).)

1. A nozzle arrangement (1-1; 1-2; 1-3) for atomizing a liquid, wherein the nozzle arrangement (1-1; 1-2; 1-3) comprises:

a substrate (3) having a plurality of openings,

a sieve side membrane (5) comprising a plurality of sieve side apertures (5a), the sieve side membrane (5) being arranged on the sieve side (3c) of the base (3),

a spray side film (7) comprising a plurality of spray side orifices (7a), the spray side film (7) being disposed on the spray side (3d) of the substrate (3),

wherein the substrate (3) has a first cavity portion (4a) extending to the sieve side membrane (5) and a second cavity portion (4b) extending from the first cavity portion (4a) to the spray side membrane (7) to enable fluid communication between the sieve side aperture (5a) and the spray side aperture (7a) along a fluid communication axis (9), the first cavity portion (4a) having a cross-sectional area (11) that is larger than a cross-sectional area (13) of the second cavity portion (4b), the cross-sectional area being with respect to the fluid communication axis.

2. A nozzle device (1-1; 1-2; 1-3) according to claim 1, wherein any cross-sectional area of the first chamber portion (4a) is larger than any cross-sectional area of the second chamber portion (4 b).

3. A nozzle arrangement (1-1; 1-2; 1-3) according to claim 1 or 2, wherein the cross-sectional area of each spray side orifice (7a) is greater than or equal to the cross-sectional area of any one of the sieve side orifices (5 a).

4. Nozzle arrangement (1-1; 1-2; 1-3) according to any one of the preceding claims, wherein the number of sieve side orifices (5a) is larger than the number of spray side orifices (7 a).

5. Nozzle arrangement (1-1; 1-2; 1-3) according to any one of the preceding claims, wherein the sieve-side orifice (5a) occupies a larger area on the sieve-side membrane (5) than the spray-side orifice (7a) occupies on the spray-side membrane (7).

6. Nozzle device (1-1; 1-2; 1-3) according to any one of the preceding claims, wherein the substrate (3) comprises a first wafer (3a) provided with a first cavity portion (4a) and a second wafer (3b) provided with a second cavity portion (4b), the first wafer (3a) and the second wafer (3b) being bonded to each other to form the substrate (3).

7. Nozzle arrangement (1-1; 1-2; 1-3) according to any one of the preceding claims, wherein the substrate (3) is made of a semiconductor material.

8. Nozzle arrangement (1-1; 1-2; 1-3) according to any of the preceding claims, wherein the sieve-side membrane (5) and the spray-side membrane (7) comprise one of a non-oxide ceramic, an oxide, silicon or a metal.

9. A nozzle device (1-1; 1-3) according to any one of the preceding claims, wherein the substrate (3) comprises a plurality of second cavity portions (4b) extending from the first cavity portion (4a) to the spray side membrane (7) for fluid communication between the sieve side aperture (5a) and the spray side aperture (7a) along respective fluid communication axes (9), the cross-sectional area of a first cavity portion (4a) being larger than the cross-sectional area of any second cavity portion (4 b).

10. Nozzle device (1-1; 1-3) according to claim 9, wherein the total cross-sectional area of the second chamber portion (4b) with respect to the fluid communication axis (9) is smaller than the area of the sieve side membrane (5) provided with sieve side apertures (5 a).

11. A medicament delivery device (15) comprising a nozzle arrangement (1-1; 1-2; 1-3) according to any one of claims 1-10.

12. The medicament delivery device (15) according to claim 11, wherein the medicament delivery device (15) is an inhaler or an eye dropper.

13. A method of manufacturing a nozzle arrangement (1-1; 1-2; 1-3) for atomizing a liquid, wherein the method comprises:

a) a first wafer (3a) is provided,

c) a screen-side film layer is provided on a first side of the first wafer (3a),

d) providing sieve-side apertures (5a) in the sieve-side membrane layer, thereby obtaining a sieve-side membrane (5),

e) a first cavity part (4a) extending to the screen side membrane (5) is provided in the first wafer (3a),

f) a second wafer (3b) is provided,

h) a spray-side film layer is provided on the first side of the second wafer (3b),

i) providing a spray-side orifice (7a) in the spray-side film layer, thereby obtaining a spray-side film (7),

j) a second cavity part (4b) extending to the spray side film (7) is provided in the second wafer (3b), and

k) bonding the second side of the first wafer (3a) with the second side of the second wafer (3b) thereby forming a substrate (3), wherein the screen-side membrane (5) forms the nozzle arrangement (1-1; 1-2; 1-3) and the spray side film (7) forms the screen side of the nozzle arrangement (1-1; 1-2; 1-3) on the side of the spray,

whereby the second chamber portion (4b) extends from the first chamber portion (4a) to the spray side membrane (7) to provide fluid communication between the sieve side aperture (5a) and the spray side aperture (7a) along a fluid communication axis (9), the first chamber portion (4a) having a cross-sectional area (11) that is larger than a cross-sectional area (13) of the second chamber portion (4b) with respect to the fluid communication axis (9).

14. The method of claim 13, wherein steps d), e), i) and j) involve etching.

15. The method according to claim 13 or 14, wherein step j) involves providing a plurality of second cavity portions (4b) in the second wafer (3b), each second cavity portion (4b) extending to the spray side membrane (7).

Technical Field

The present disclosure relates generally to nozzle arrangements. The present disclosure relates in particular to a nozzle device for atomizing a liquid and a method of manufacturing such a nozzle device.

Background

The nozzle arrangement may be configured to atomize the liquid, i.e. to produce an aerosol of the liquid. Such a nozzle device may comprise a substrate having a filter side provided with a filter for filtering out any undesired large particles contained in the liquid to be atomized. The substrate may also have a spray side provided with a spray film having a plurality of orifices. The spray membrane and the filter are configured to be in fluid communication. During atomization, the liquid first passes through a filter, where a slight pressure drop occurs. The filtered liquid then passes through the apertures of the membrane, thereby atomizing the liquid.

One such nozzle arrangement is disclosed in US2005/0178862A 1. The nozzle arrangement has a filter plate provided with at least one filter orifice and a micro-machined enhanced nozzle plate which can generate small droplets in air or form a liquid with a narrow droplet size distribution and turn the small bubbles into liquid.

For certain applications (e.g. for spraying a medicament with a high viscosity) the pressure drop over the nozzle arrangement may have to be large, typically a number of bars, e.g. 30-50 bar. The nozzle arrangement disclosed in US2005/0178862 may not be robust enough for such applications and the nozzle plate may thus be damaged.

Disclosure of Invention

In view of the above, it is a general object of the present disclosure to provide a nozzle arrangement that solves or at least mitigates the problems of the prior art.

Thus, according to a first aspect of the present disclosure, there is provided a nozzle device for atomizing a liquid, wherein the nozzle device comprises: a substrate; a screen-side membrane comprising a plurality of screen-side apertures, the screen-side membrane disposed on the screen side of the substrate; a spray side membrane comprising a plurality of spray side apertures, the spray side membrane disposed on a spray side of a substrate, wherein the substrate has a first cavity portion extending to the screen side membrane and a second cavity portion extending from the first cavity portion to the spray side membrane, such that fluid communication is achieved between the screen side apertures and the spray side apertures along a fluid communication axis, the first cavity portion having a cross-sectional area that is greater than a cross-sectional area of the second cavity portion, the cross-sectional area being with respect to the fluid communication axis.

Thus, the second cavity portion and the first cavity portion define a channel through the base, the channel decreasing in cross-sectional area as the channel transitions from the first cavity portion to the second cavity portion.

Since the cross-sectional area of the second chamber portion is smaller than the cross-sectional area of the first chamber portion, the area of the spray-side membrane subjected to the pressure can be significantly smaller than the corresponding area of the sieve-side membrane. Thus providing a more robust nozzle arrangement.

According to one embodiment, any cross-sectional area of the first cavity portion is greater than any cross-sectional area of the second cavity portion. Thus, any cross-sectional area of the first chamber portion along the length of the first chamber portion about the axis of fluid communication is greater than any cross-sectional area of the second chamber portion along the length of the second chamber portion about the axis of fluid communication.

The cross-section of the first cavity may be constant along the fluid communication axis. The cross-section of the second cavity may be constant along the fluid communication axis.

According to one example, the second chamber portion may be in fluid communication with only a single spray side port.

According to another example, the second chamber portion may be configured such that each spray side aperture is disposed adjacent to two oppositely disposed inner walls of the second chamber portion. This means that only a single spray side aperture is provided between an edge of the wall of the second chamber portion and an opposite edge of the wall of the second chamber portion. However, a plurality of spray-side orifices arranged in a row in parallel with the second chamber portion along the longitudinal extension of the spray-side film surface may also be provided.

The spray side orifice configuration as described in the above examples reduces the risk of aerosol droplets colliding to form larger droplets. In certain applications (e.g. in medical applications) it is desirable to maintain fine aerosol droplets.

According to one embodiment, the cross-sectional area of each spray side orifice is greater than or equal to the cross-sectional area of any sieve side orifice. This can reduce the risk of large molecules present in the liquid blocking the spray side orifice. In some applications, such molecules are theoretically able to pass through the sieve side openings, for example where the molecules are oriented in a direction having a smaller cross-section when reaching the sieve side membrane.

According to one embodiment, the number of sieve side apertures is greater than the number of spray side apertures. In this way, a lower pressure drop over the screen side membrane can be achieved. Since the effective area of the spray side membrane is much smaller than the effective area of the sieve side membrane, a higher mechanical strength is obtained, thereby compensating for a higher pressure drop over the spray side membrane. The effective area here refers to the area of the respective membrane provided with the spray-side and sieve-side apertures.

According to one embodiment, the axial length of the first cavity portion along the fluid communication axis is equal to the axial length of the second cavity portion. Thus, the thickness of the wall provided by the second cavity portion towards the spray side membrane may have the same length dimension as the first cavity portion.

According to one embodiment, the area of the sieve side apertures on the sieve side membrane is larger than the area of the spray side apertures on the spray side membrane.

According to one embodiment, the substrate comprises a first wafer provided with a first cavity portion and a second wafer provided with a second cavity portion, the first and second wafers being bonded to each other to form the substrate.

According to one embodiment, the substrate is made of a semiconductor material. The semiconductor material may be, for example, silicon.

According to one embodiment, the screen-side membrane and the spray-side membrane comprise one of a non-oxide ceramic, an oxide, silicon, or a metal. One example of a suitable non-oxide ceramic is silicon nitride.

According to one embodiment, the substrate comprises a plurality of second cavity portions extending from the first cavity portion to the spray side membrane, thereby enabling fluid communication between the sieve side aperture and the spray side aperture along respective fluid communication axes, the cross-sectional area of the first cavity portion being larger than the cross-sectional area of any of the second cavity portions.

Thus, each second cavity portion may be in fluid connection with a respective set of a plurality of spray side apertures of the spray side membrane.

By providing a substrate with a plurality of second cavity portions, more spray side holes can be provided in the spray side membrane, so that a higher throughput can be achieved while maintaining the higher mechanical strength of the spray side membrane achieved by the smaller cross-sectional area of the second cavity portions.

According to one embodiment, any cross-sectional area of any first cavity portion is greater than any cross-sectional area of the second cavity portion with respect to the fluid communication axis.

According to one example, the substrate may be provided with a plurality of second cavity portions and a plurality of first cavity portions. Each first cavity portion may be in fluid communication with only one second cavity portion. Thus, in this example, each first cavity portion is connected to a respective one of the second cavity portions. In this case, the number of fluid communication passages passing through the substrate from the sieve-side orifice of the sieve-side membrane to the spray-side orifice of the spray-side membrane may be equal to the number of the first cavity portions, and the number of the first cavity portions may be equal to the number of the second cavity portions.

According to one embodiment, the total cross-sectional area of the second chamber portion with respect to the fluid communication axis is smaller than the area of the sieve side membrane provided with the sieve side aperture.

The sieve side membrane need not have the same mechanical strength as the spray side membrane because the force acting on the sieve side membrane is small relative to the force acting on the spray side membrane.

According to a second aspect of the present disclosure, there is provided a medicament delivery device comprising a nozzle device as described in the first aspect.

The nozzle device is a delivery member of the medicament delivery device. The medicament delivery device is configured such that the medicament passes through the nozzle arrangement during administration to thereby aerosolize the medicament, generating an aerosol.

According to one embodiment, the medicament delivery device is an inhaler or an eye dropper.

According to a third aspect of the present disclosure, there is provided a method of manufacturing a nozzle arrangement for atomising a liquid, wherein the method comprises: a) providing a first wafer, c) providing a sieve side film layer on a first side of the first wafer, d) providing sieve side apertures in the sieve side film layer, thereby obtaining a sieve side film, e) providing first cavity portions in the first wafer extending to the sieve side film, f) providing a second wafer, h) providing a spray side film layer on a first side of the second wafer, i) providing spray side apertures in the spray side film layer, thereby obtaining a spray side film, j) providing second cavity portions in the second wafer extending to the spray side film, and k) bonding the second side of the first wafer with the second side of the second wafer, thereby forming a substrate, wherein the sieve side film forms the sieve side of the nozzle arrangement and the spray side film forms the spray side of the nozzle arrangement, whereby the second cavity portions extend from the first cavity portions to the spray side film, thereby achieving fluid communication between the sieve side apertures and the spray side apertures along a fluid communication axis, the first chamber portion has a cross-sectional area, with respect to the axis of fluid communication, that is greater than a cross-sectional area of the second chamber portion.

The steps of the method do not necessarily have to be performed in the order described above. For example, steps f) to j) may be performed before steps a) to e).

According to one embodiment, steps d), e), i) and j) involve etching.

According to one embodiment, step j) involves providing a plurality of second cavity portions in the second wafer, each second cavity portion extending to the spray side membrane.

In general, all terms used in the claims are to be interpreted according to their ordinary meaning in the technical field, unless explicitly defined otherwise herein. All references to "a/an/the element, device, component, means" or the like are to be interpreted openly as referring to at least one instance of the element, device, component, means, or the like, unless explicitly stated otherwise.

Drawings

Specific embodiments of the inventive concept will now be described by way of example with reference to the accompanying drawings, in which:

FIG. 1 is a perspective view of one illustrative example of a nozzle arrangement;

FIG. 2a is a cross-sectional view taken along line A-A of the nozzle arrangement of FIG. 1;

FIGS. 2B and 2C are cross-sectional views taken along lines B-B and C-C, respectively;

FIG. 3 is a perspective view of another illustrative example of a nozzle arrangement;

FIG. 4 shows a cross-section through the nozzle arrangement of FIG. 3 along line D-D;

FIG. 5 is a perspective view of yet another illustrative example of a nozzle arrangement;

figure 6a shows a cross-section through the nozzle arrangement of figure 5 along the line E-E;

figure 6b shows a section through the nozzle arrangement along the line E-E in a perspective view from the sieve side of the nozzle arrangement;

FIG. 7 is a flow chart of a method of manufacturing a nozzle arrangement; and

fig. 8 is a schematic illustration of a longitudinal section of a medicament delivery device comprising a nozzle arrangement.

Detailed Description

The inventive concepts of the present invention will now be described more fully hereinafter with reference to the accompanying drawings, in which exemplary embodiments are shown. The inventive concepts of the present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are merely exemplary, provided only to fully and fully understand the present disclosure and to fully convey the scope of the inventive concept to those skilled in the art. In the description, like reference numerals refer to like elements.

Fig. 1 shows a first example of a nozzle arrangement configured to atomize a liquid. The nozzle arrangement 1-1 comprises a substrate 3. The substrate 3 comprises a first wafer 3a and a second wafer 3b, which are bonded together to form the substrate 3. The substrate 3 has a sieve side 3c or filter side, and a spray side 3d arranged opposite the sieve side 3 c.

Turning now to fig. 2a, an exemplary nozzle arrangement 1-1 will be described in more detail below. The nozzle arrangement 1-1 further comprises a sieve side membrane 5 arranged on the sieve side 3c of the substrate 3. The nozzle device 1-1 further comprises a spray side film 7 disposed on the spray side 3d of the substrate 3.

The screen-side membrane 5 is provided with a plurality of screen-side apertures 5 a. The spray side membrane 7 is provided with a plurality of spray side orifices 7 a. Each screen-side orifice 5a has a cross section in respect of its axial extension which is smaller than or equal to the cross section of any spray-side orifice 7a in respect of the axial extension of the spray-side orifice 7 a.

The base 3 has a first cavity portion 4a extending to the screen-side membrane 5. The first cavity portion 4a extends to the screen-side port 5 a. The substrate 3 has a second cavity portion 4b extending from the first cavity portion 4a to the spray-side film 7. The second cavity portion 4b has an opening 4c that opens into the first cavity portion 4 a. The second chamber portion 4b extends from the first chamber portion 4a to the spray-side orifice 7 a. Thus, the sieve-side membrane 5 (in particular the sieve-side orifice 5a) is in fluid communication with the spray-side membrane 7 (in particular with the spray-side orifice 7a) via the first and second cavity portions 4a, 4 b. The fluid communication is provided along a fluid communication axis 9 extending from the sieve side membrane 5 to the spray side membrane 7.

According to the example shown in fig. 2a, the first cavity portion 4a is along the axial length l of the fluid communication shaft 9₁Equal to the axial length l of the second chamber portion 4b₂. Therefore, the thicknesses of the first wafer 3a and the second wafer 3b are equal. According to a variant, the thickness of the first wafer 3a and of the second wafer 3b may be different.

In use, the liquid to be atomised first passes through the sieve side apertures 5a of the sieve side membrane 5, entering the first chamber portion 4 a. Where a smaller pressure drop occurs. The liquid passes through the first chamber portion 4a into the second chamber portion 4b and finally through the spray side orifice 7a of the spray side membrane 7. A jet is thus generated which breaks up into small droplets due to Rayleigh (Rayleigh) instability, forming an aerosol.

Figure 2B shows a cross-section of the nozzle arrangement 1-1 along the line B-B. This section is a section about the fluid communication axis 9 and thus corresponds to a cut parallel to the extension of the main surfaces of the sieve side film 5a and the spray side film 7 a. Thus, the first cavity portion 4a is visible in this cross section. The cross-sectional area 11 of the exemplary first cavity portion 4a is defined by dimension d₁And d₂The product of (a) and (b).

Figure 2C shows a cross section of the nozzle arrangement 1-1 along the line C-C. The cross section is parallel to the cross section along line B-B. Here, the second cavity portion 4b is in the cross sectionIs visible in. The cross-sectional area 13 of the exemplary second cavity portion 4b is substantially defined by dimension d₃And d₄The product of (a) and (b).

The first chamber portion 4a has a cross-sectional area 11 greater than a cross-sectional area 13 of the second chamber portion 4 b. The cross-sectional area 11 of the first chamber portion 4a is constant along the fluid communication shaft 9. The cross-sectional area 13 of the second chamber portion 4b is constant along the fluid communication axis 9.

Fig. 3 shows a second example of a nozzle arrangement configured to atomize a liquid. The nozzle device 1-2 is similar to the first example. However, the second example includes a plurality of second cavity portions and a plurality of first cavity portions. Each such second cavity portion extends from the respective first cavity portion to the spray side membrane 7. Each pair of interconnected second and first cavity portions provides fluid communication between the spray side apertures 7a of the spray side membrane 7 and the sieve side apertures 5a of the sieve side membrane 5.

Fig. 4 shows a fluid communication configuration between the spray side membrane 7 and the sieve side membrane 5. The base 3 includes a plurality of first cavity portions 4a and a plurality of second cavity portions 4 b. The number of first cavity portions 4a is equal to the number of second cavity portions 4 b. Each pair of first and second cavity portions 4a, 4b defines a respective channel enabling fluid communication between the sieve side apertures 5a of the sieve side membrane 5 and the spray side apertures 7a of the spray side membrane 7. Each such channel has a respective fluid communication axis 9 extending from the sieve side 3c to the spray side 3d of the substrate 3.

Each first chamber portion 4a has a larger cross-sectional area with respect to the fluid communication shaft 9 than a cross-sectional area of the corresponding second chamber portion 4 b.

Fig. 5 shows a third example of a nozzle arrangement. The nozzle arrangement 1-3 is similar to the second example. The nozzle arrangement 1-3 comprises a plurality of second cavity portions and a plurality of first cavity portions. A plurality of second cavity portions extend from the single first cavity portion to the spray side membrane 7. The plurality of second cavity portions interconnected with the first cavity portions enable fluid communication between the spray side apertures 7a of the spray side membrane 7 and the sieve side apertures 5a of the sieve side membrane 5.

Figure 6a shows a cross-section along line E-E. It can be seen that a plurality of second cavity portions 4b extend from the spray-side membrane 7 to one first cavity portion 4a-1, and a plurality of second cavity portions 4b extend from the spray-side membrane 7 to the other first cavity portion 4 a-2. The two first cavity portions are liquid-isolated from each other. They are not in fluid communication. Each first cavity portion 4a extends to the screen-side membrane 5. In this way, fluid communication from the sieve side 3c to the spray side 3d is achieved. In particular, fluid communication is achieved between the sieve side orifices 5a of the sieve side membrane 5 and the spray side orifices 7a of the spray side membrane 7.

Fig. 6b shows the configuration of the sieve side apertures 5a arranged in a pie-like manner, which corresponds to the configuration of the spray side apertures 7a shown in fig. 6 a.

In general, the layout or configuration of the screen side apertures can be substantially any form suitable for a particular application. The arrangement or configuration of the spray side orifices can be essentially any form suitable for the particular configuration. However, it is advantageous to provide a second chamber portion extending parallel to the respective fluid communication axis along the entire fluid extension thereof. This also applies generally to the first cavity portion.

One example of manufacturing the nozzle arrangements 1-1, 1-2, 1-3 will now be described with reference to fig. 7. It should be noted that the nozzle arrangements 1-1, 1-2, 1-3 may be manufactured in a number of different processes.

In step a), a first wafer 3a is provided. The first wafer 3a may be made of a semiconductor material. One example of a suitable semiconductor material is silicon. The first wafer 3a may be subjected to double-side polishing.

In step b), a protective layer and/or an adhesive layer is provided on the first side and the second side of the first wafer 3a opposite the first side, respectively.

The protective layer may be, for example, silicon oxide. The protective layer may be deposited on the first wafer 3a, for example, by thermal oxide deposition.

In step c), a screen-side film layer is provided on the protective layer provided on the first side of the first wafer 3 a. The screen-side film layer can be deposited on the protective layer, for example, by plasma enhanced chemical vapor deposition. The screen-side film layer may be, for example, silicon nitride.

In step d), sieve side apertures 5a are provided in the sieve side membrane layer, thereby obtaining a sieve side membrane 5. The sieve side apertures 5a may be obtained, for example, using photolithography, i.e. providing a suitably patterned photoresist and etching the pattern of the sieve side apertures 5a into the sieve side film layer by means of reactive ion etching or the like. Step d) may also involve removing the photoresist after patterning the screen-side film layer.

In step e), a first cavity section 4a is provided in the first wafer 3a through the protective layer on the first side of the first wafer 3a to the sieve-side membrane 5. In the case of a plurality of first cavity portions 4a, each first cavity portion 4a is provided in this step.

Step e) may involve providing a photoresist on the second side of the first wafer 3a with patterns/vias to provide the first cavity portion. One or more first cavity portions 4a may be created by removing a portion of the first wafer 3a using an etching technique (e.g., deep reactive ion etching) or the like. Subsequently, the photoresist is removed from the second side of the first wafer 3 a. During step e), the portions of the protective layer or adhesive layer exposed by the pattern in the photoresist are also removed from the second side. This layer can be removed, for example, using reactive ion etching.

Finally, the protective layer may be removed from below the screen-side film 5 using, for example, hydrogen fluoride etching. The remaining protective or adhesive layer remaining after step e) is also removed from the second side. This layer can be removed, for example, using reactive ion etching.

In step f), a second wafer 3b is provided. The second wafer 3b may be made of a semiconductor material. One example of a suitable semiconductor material is silicon. The second wafer 3b may be subjected to double-side polishing.

In step g), a protective layer and/or an adhesive layer is provided on the first side and the second side of the second wafer 3b opposite to the first side, respectively.

The protective layer may be, for example, silicon oxide. The protective layer may be deposited onto the second wafer 3b, for example, by thermal oxide deposition.

In step h), a spray-side film layer is provided on the protective layer provided on the first side of the second wafer 3 b. The spray-side film layer can be deposited on the protective layer, for example, by plasma enhanced chemical vapor deposition. The spray-side film layer may be, for example, silicon nitride.

In step i), a spray-side orifice 7a is provided in the spray-side film layer, thereby obtaining a spray-side film 7. The spray side orifice 7a can be obtained, for example, using photolithography, i.e., providing an appropriate patterned photoresist, and etching the pattern of the spray side orifice 7a into the spray side film layer by means of, for example, reactive ion etching or the like. Step i) may also involve removing the photoresist after patterning the sprayed-on side film layer.

In step j), a second cavity section 4b is provided in the second wafer 3b through the protective layer on the first side of the second wafer 3b to the spray-side film 7. In the case of a plurality of second cavity portions 4b, each second cavity portion 4b is provided in this step.

Step j) may involve providing a photoresist on the second side of the patterned second wafer 3b to provide the second cavity portion. One or more second cavity portions 4b may be created by removing a portion of the second wafer 3b using an etching technique (e.g., deep reactive ion etching) or the like. Subsequently, the photoresist is removed from the second side of the second wafer 3 b. During step e), the portions of the protective layer or adhesive layer exposed by the pattern in the photoresist are also removed from the second side. This layer can be removed, for example, using reactive ion etching.

Finally, the protective layer can be removed from below the spray-side film 7 using, for example, hydrogen fluoride etching. The remaining protective layer or adhesive layer remaining after step j) is also removed from the second side. This layer can be removed, for example, using reactive ion etching.

In step k), the second side of the first wafer 3a is bonded to the second side of the second wafer 3b, thereby forming the substrate 3. The screen-side film 5 forms the screen side of the nozzle arrangement 1-1, 1-2, 1-3, while the spray-side film 7 forms the spray side.

The nozzle arrangements 1-1, 1-2, 1-3 may for example be used in medical applications. For example, the nozzle device 1-1, 1-2, 1-3 may be provided in a medicament delivery device such as an inhaler or an eye dropper. Fig. 8 shows an example of a medicament delivery device 15 in a longitudinal sectional view, which medicament delivery device 15 comprises a nozzle device 1-1, 1-2, 1-3 attached to a nozzle device holder.

The inventive concept has been described above primarily with reference to a few examples. However, it is understood by the person skilled in the art that other embodiments than the ones disclosed above are possible within the scope of the inventive concept defined by the appended claims.