阅读说明：本技术 一种用于提升硅微陀螺仪标度因数温度稳定性的系统和方法 (System and method for improving temperature stability of silicon micro gyroscope scale factor ) 是由 李宏生 贾佳 丁徐锴 丁柏会 刘学文 李文凯 于 2019-10-17 设计创作，主要内容包括：本发明公开了一种用于提升硅微陀螺仪标度因数温度稳定性的系统和方法,该系统包括驱动闭环回路、检测闭环回路和标度因数温度补偿模块；驱动闭环回路产生硅微陀螺仪的驱动模态谐振频率ω<Sub>x</Sub>和ω<Sub>x</Sub>的正弦信号sinω<Sub>x</Sub>t,并将ω<Sub>x</Sub>和sinω<Sub>x</Sub>t分别输出至标度因数温度补偿模块和检测闭环回路；检测闭环回路基于sinω<Sub>x</Sub>t产生未经标度因数温度补偿的角速度信号,并输入至标度因数温度补偿模块；标度因数温度补偿模块基于ω<Sub>x</Sub>对未经标度因数温度补偿的角速度信号进行标度因数温度补偿,并产生经补偿的角速度输出信号；经补偿的角速度输出信号与ω<Sub>x</Sub>无关。本发明基于陀螺仪力反馈闭环检测模式实现标度因数温度补偿,能够提升陀螺仪标度因数的温度稳定性。(The invention discloses a system and a method for improving the temperature stability of a scale factor of a silicon micro gyroscope, wherein the system comprises a driving closed loop, a detection closed loop and a scale factor temperature compensation module; driving closed loop circuit to generate driving mode resonant frequency omega of silicon micro gyroscope x And ω x Sine signal sin ω of x t, and will be ω x And sin ω x t is respectively output to the scale factor temperature compensation module and the detection closed loop; detection of closed loop based on sin omega x t generating an angular velocity signal without scale factor temperature compensation and inputting the angular velocity signal to the scale factor temperature compensation module; scale factor temperature compensation module based on omega x Scale factor temperature compensation is performed on the angular velocity signal which is not subjected to scale factor temperature compensation, and a compensated angular velocity output signal is generated; compensated angular velocity output signal and omega x Is irrelevant. The invention is based on a gyroscopeThe instrument force feedback closed loop detection mode realizes the scale factor temperature compensation and can improve the temperature stability of the gyroscope scale factor.)

1. A system for improving the temperature stability of a silicon micro-gyroscope scale factor, characterized by: comprises a driving closed loop (100), a detecting closed loop (200) and a scale factor temperature compensation module (300);

the driving closed loop (100) is used for realizing closed-loop driving of a gyroscope; the drive closed loop (100) tracks the drive mode resonance frequency omega of the silicon micro-gyroscope_xAnd produce omega_xSine signal sin ω of_xt, and will be ω_xAnd sin ω_xt is respectively output to the scale factor temperature compensation module (300) and the detection closed loop (200);

the detection closed loop (200) comprises a detection mode driving electrode (201), a detection mode detection electrode (202), a Coriolis signal demodulation module (207), a detection mode closed loop controller (208) and a multiplier; the detection mode detection electrode (202) generates a vibration signal based on the angular velocity omega of the sensitive axis of the gyroscope; the Coriolis signal demodulation module (207) demodulates the vibration signal of the detection mode detection electrode (202) to obtain a Coriolis signal; the detection mode closed-loop controller (208) generates an angular velocity signal which is not subjected to scale factor temperature compensation based on the Coriolis signal and inputs the angular velocity signal to the scale factor temperature compensation module (300); the multiplier is used for multiplying the sine signal sin omega coming from the driving closed loop (100)_xt is multiplied by the angular velocity signal without scale factor temperature compensation to generate a force feedback signal; the detection mode driving electrode (201) generates vibration based on the force feedback signal so as to balance the vibration of the detection mode detection electrode (202) caused by the Goldfish effect and realize gyroscope closed-loop detection;

the scale factor temperature compensation module (300) is based on ω_xScale factor temperature compensation is performed on the angular velocity signal which is not subjected to scale factor temperature compensation, and a compensated angular velocity output signal is generated; wherein the compensated angular velocity output signal is in combination with omega_xIs irrelevant.

2. The system for improving silicon micro-gyroscope scale factor temperature stability of claim 1, wherein the compensated angular velocity output signal is obtained by passing the un-scaled factorDividing the temperature compensated angular velocity signal by ω_xAnd then multiplied by a fixed coefficient which is used for adjusting the magnitude of the value of the temperature compensated scale factor.

3. The system for improving silicon micro-gyroscope scale factor temperature stability of claim 1, wherein the expression of the compensated angular velocity output signal S is:

S＝SF_c×Ω

wherein omega is the input angular velocity of the sensitive axis of the gyroscope, SF_cFor the temperature-compensated scale factor, m_cIs the effective Coriolis mass of the gyroscope, A_xDetecting amplitude, K, for a gyroscope drive mode_cTemperature compensating fixed coefficients for gyroscope scale factors, K_fbAnd detecting the modal closed loop gain for the gyroscope.

4. The system for improving silicon micro-gyroscope scale factor temperature stability of claim 1, wherein the gyroscope detection closed loop (200) further includes a detection mode amplification circuit (203), a detection mode C/V conversion circuit (204), a detection mode D/a conversion circuit (205), a detection mode a/D conversion circuit (206); the vibration signals output by the detection mode detection electrode (202) are processed by the detection mode C/V conversion circuit (204) and the detection mode A/D conversion circuit (206) in sequence and then input to the Coriolis signal demodulation module (207) for demodulation; the force feedback signal is processed by the detection mode D/A conversion circuit (205) and the detection mode amplification circuit (203) in sequence and then input to the detection mode drive electrode (201).

5. The system for improving silicon micro-gyroscope scale factor temperature stability of claim 1, wherein the gyroscope drive closed loop (100) includes a drive mode detection electrode (101), a drive mode drive electrode (102), a phase demodulation module (107), an amplitude demodulation module (108), a phase locked loop (109) and automatic gain controller (110), a direct digital frequency synthesizer (111) and a second multiplier;

the drive mode drive electrode (102) generates vibrations based on a drive signal; the driving mode detection electrode (101) detects the vibration of the driving mode driving electrode (102) to generate a vibration signal; the phase demodulation module (107) and the amplitude demodulation module (108) demodulate based on the vibration signal of the drive mode detection electrode (101) respectively to obtain a phase related signal and an amplitude related signal respectively; the phase locked loop (109) tracks the drive mode resonance frequency ω of a gyroscope based on the phase-dependent signal_xAnd will be omega_xRespectively output to a direct digital frequency synthesizer (111) and the scale factor temperature compensation module (300); the automatic gain controller (110) generates an amplitude of a drive signal based on the amplitude-dependent signal; the direct digital frequency synthesizer (111) outputs ω_xThe sine signal sin ω_xt, and input to said detection closed loop (200); the second multiplier combines the amplitude of the driving signal with the sine signal sin ω_xAnd t is multiplied to obtain the driving signal, so that closed-loop driving of the gyroscope is realized.

6. The system for improving silicon micro-gyroscope scale factor temperature stability of claim 5, wherein the gyroscope drive closed loop (100) further includes: a drive mode C/V conversion circuit (103), a drive mode amplification circuit (104), a drive mode A/D conversion circuit (105), and a drive mode D/A conversion circuit (106); vibration signals output by the drive mode detection electrode (101) are processed by the drive mode C/V conversion circuit (103) and the drive mode A/D conversion circuit (105) in sequence and then are respectively sent to the phase demodulation module (107) and the amplitude demodulation module (108); the driving signals are processed by a driving mode D/A conversion circuit (106) and a driving mode amplification circuit (104) in sequence and then are sent to the driving mode driving electrode (102).

7. A method for improving the temperature stability of a silicon micro-gyroscope scale factor, comprising the steps of:

(S1) setting a driving closed loop (100) to realize gyroscope closed loop driving, wherein the driving closed loop (100) tracks the driving mode resonance frequency omega of the silicon micro gyroscope_xAnd produce a sum ω_xSine signal sin ω of_xt, will be ω_xAnd sin ω_xt is respectively output to a scale factor temperature compensation module (300) and the detection closed loop (200);

(S2) setting the detection closed loop (200) to implement the gyroscope closed loop detection; the detection closed loop (200) comprises a detection mode driving electrode (201), a detection mode detection electrode (202), a Coriolis signal demodulation module (207), a detection mode closed loop controller (208) and a multiplier; the detection mode detection electrode (202) generates a vibration signal based on the angular velocity omega of the sensitive axis of the gyroscope; the Coriolis signal demodulation module (207) demodulates the vibration signal of the detection mode detection electrode (202) to obtain a Coriolis signal; the detection mode closed-loop controller (208) generates an angular velocity signal which is not subjected to scale factor temperature compensation based on the Coriolis signal and inputs the angular velocity signal to the scale factor temperature compensation module (300); the multiplier is used for multiplying the sine signal sin omega coming from the driving closed loop (100)_xt is multiplied by the angular velocity signal without scale factor temperature compensation to generate a force feedback signal; the detection mode driving electrode (201) generates vibration based on the force feedback signal so as to balance the vibration of the detection mode detection electrode (202) caused by the Goldfish effect and realize gyroscope closed-loop detection;

(S3) setting a scale factor temperature compensation module (300), the scale factor temperature compensation module (300) based on the non-scale factor temperature compensated angular velocity information and ω_xGenerating and outputting a compensated angular velocity output signal by the scale factor temperature compensation module (300); wherein the compensated angular velocity output signal is in combination with omega_xIs irrelevant.

8. Silicon micro-gyroscope for lifting, according to claim 7The system for spirometer scale factor temperature stability, wherein the step (S3) further comprises: the scale factor temperature compensation module (300) divides the non-scale factor temperature compensated angular velocity signal by ω_xAnd then multiplied by the fixed coefficient for adjusting the magnitude of the temperature compensated scale factor value to produce the compensated angular velocity output signal.

Technical Field

The invention relates to the field of silicon micro-gyroscopes, in particular to a system and a method for improving the temperature stability of a scale factor of a silicon micro-gyroscope.

Background

The silicon micro gyroscope is one of important applications of the MEMS technology in the field of inertial navigation as a sensor for sensing the input angular velocity by utilizing the Goldson effect, has the advantages of small volume, light weight, low cost, batch production, easy integration and the like, and is widely applied to the military and civil fields.

The silicon micro gyroscope has two working modes, namely a driving mode and a detection mode, wherein the driving mode tracks the resonance frequency of the driving mode in real time and maintains constant amplitude in the driving direction; and detecting modal vibration caused by the input angular speed of the sensitive shaft in real time by the detection mode so as to obtain the magnitude of the input angular speed. In addition, the detection mode is divided into an open-loop detection mode and a closed-loop detection mode, and the open-loop detection mode directly represents the input angular speed by using an electric signal caused by the vibration of the detection mode; closed-loop detection utilizes a closed-loop controller to generate signals on the basis of open-loop detection of angular velocity, and the vibration of a detection mode is balanced through a force feedback structure, so that the output of the closed-loop controller represents the magnitude of input angular velocity.

The temperature-sensitive characteristic of the silicon material causes the output signal of the silicon micro gyroscope to change violently with the temperature, thereby deteriorating the temperature stability of the scale factor of the silicon micro gyroscope. Scale factor temperature compensation is required to improve temperature stability. The existing scale factor temperature compensation method mainly comprises methods such as algorithm compensation, virtual Goldfish force compensation, micro-mechanical platform compensation and the like, wherein the algorithm compensation effect seriously depends on the accuracy of a compensation model and the output repeatability of a gyroscope; the additional modal vibration introduced by the virtual Coriolis force will interfere with the detection accuracy of the gyroscope signal and limit the working bandwidth; micro-mechanical platform compensation requires additional design and fabrication of the movable micro-platform, thereby increasing fabrication difficulty and cost.

Disclosure of Invention

The purpose of the invention is as follows: to overcome the above-described deficiencies of the prior art, the present invention provides a system and method for improving the temperature stability of the scale factor of a silicon micro-gyroscope.

The technical scheme is as follows: the system for improving the temperature stability of the scale factor of the silicon micro gyroscope comprises a driving closed loop, a detecting closed loop and a scale factor temperature compensation module; the driving closed loop is used for realizing closed-loop driving of the gyroscope; the drive closed loop tracks the drive mode resonant frequency omega of the silicon micro gyroscope_xAnd produce omega_xSine signal sin ω of_xt, and will be ω_xAnd sin ω_xt is respectively output to the scale factor temperature compensation module and the detection closed loop; the detection closed loop circuit comprises a detection mode driving electrode, a detection mode detection electrode, a Coriolis signal demodulation module, a detection mode closed loop controller and a multiplier; the detection mode detection electrode generates a vibration signal based on the angular speed omega of the sensitive shaft of the gyroscope; the Coriolis signal demodulation module demodulates the vibration signal of the detection mode detection electrode to obtain a Coriolis signal; the detection mode closed-loop controller generates an angular velocity signal which is not subjected to scale factor temperature compensation based on the Coriolis signal and inputs the angular velocity signal to the scale factor temperature compensation module; the multiplier converts the sine signal sin omega coming from the driving closed loop_xt is multiplied by the angular velocity signal without scale factor temperature compensation to generate a force feedback signal; the detection mode driving electrode generates vibration based on the force feedback signal so as to balance the vibration of the detection mode detection electrode caused by the Goldfish effect and realize closed-loop detection of the gyroscope; the scale factor temperature compensation module is based on omega_xScale factor temperature compensation is performed on the angular velocity signal which is not subjected to scale factor temperature compensation, and a compensated angular velocity output signal is generated; wherein the compensated angular velocity output signal is in combination with omega_xIs irrelevant.

Further, the compensated angular velocity output signal is generated by dividing the non-scale factor temperature compensated angular velocity signal by ω_xThen multiplying by a fixed coefficientThe magnitude of the value of the scaling factor after adjusting the temperature compensation.

Further, the expression of the compensated angular velocity output signal S is:

S＝SF_c×Ω

wherein omega is the input angular velocity of the sensitive axis of the gyroscope, SF_cFor the temperature-compensated scale factor, m_cIs the effective Coriolis mass of the gyroscope, A_xDetecting amplitude, K, for a gyroscope drive mode_cTemperature compensating fixed coefficients for gyroscope scale factors, K_fbAnd detecting the modal closed loop gain for the gyroscope.

Furthermore, the gyroscope detection closed loop also comprises a detection mode amplifying circuit, a detection mode C/V conversion circuit, a detection mode D/A conversion circuit and a detection mode A/D conversion circuit; the detection signals output by the detection mode detection electrode are processed by the detection mode C/V conversion circuit and the detection mode A/D conversion circuit in sequence and then input to the Coriolis signal demodulation module for demodulation; the force feedback signal is processed by the detection mode D/A conversion circuit and the detection mode amplifying circuit in sequence and then is input to the detection mode driving electrode.

Furthermore, the gyroscope driving closed loop comprises a driving mode detection electrode, a driving mode driving electrode, a phase demodulation module, an amplitude demodulation module, a phase-locked loop and automatic gain controller, a direct digital frequency synthesizer and a second multiplier; the drive mode drive electrode generates vibration based on a drive signal; the drive mode detection electrode detects the vibration of the drive mode detection electrode to generate a detection signal; the phase demodulation module and the amplitude demodulation module are used for demodulating respectively based on the detection signals of the drive mode detection electrode to respectively obtain phase related signals and amplitude related signals; the phase locked loop tracks the drive mode resonant frequency ω of the gyroscope based on the phase-related signal_xAnd will be omega_xRespectively outputting the signals to a direct digital frequency synthesizer and the scale factor temperature compensation module; the automatic gain controller generating an amplitude of a drive signal based on the amplitude-dependent signal; the direct digital frequency synthesizer output ω_xThe sine signal sin ω_xt, and inputting the t to the detection closed loop; the second multiplier combines the amplitude of the driving signal with the sine signal sin ω_xAnd t is multiplied to obtain the driving signal, so that closed-loop driving of the gyroscope is realized.

Further, the gyroscope drive closed loop circuit further comprises: a drive mode C/V conversion circuit, a drive mode amplifying circuit, a drive mode A/D conversion circuit and a drive mode D/A conversion circuit; detection signals output by the drive mode detection electrode are processed by the drive mode C/V conversion circuit and the drive mode A/D conversion circuit in sequence and then are respectively sent to the phase demodulation module and the amplitude demodulation module; the driving signal is processed by a driving mode D/A conversion circuit and a driving mode amplifying circuit in sequence and then is sent to the driving mode driving electrode.

The method for improving the temperature stability of the scale factor of the silicon micro gyroscope comprises the following steps:

(S1) setting a driving closed loop circuit to realize gyroscope closed loop driving, wherein the driving closed loop circuit tracks the driving mode resonant frequency omega of the silicon micro gyroscope_xAnd produce omega_xSine signal sin ω of_xt, will be ω_xAnd sin ω_xt is respectively output to a scale factor temperature compensation module and the detection closed loop;

(S2) setting a detection closed loop to realize gyroscope closed loop detection; the detection closed loop circuit comprises a detection mode driving electrode, a detection mode detection electrode, a Coriolis signal demodulation module, a detection mode closed loop controller and a multiplier; the detection mode detection electrode generates a vibration signal based on the angular speed omega of the sensitive shaft of the gyroscope; the Coriolis signal demodulation module demodulates the vibration signal of the detection mode detection electrode to obtain a Coriolis signal; the detection mode closed-loop controller generates an angular velocity signal without scale factor temperature compensation based on the Coriolis signal, anInputting the data to a scale factor temperature compensation module; the multiplier converts the sine signal sin omega coming from the driving closed loop_xt is multiplied by the angular velocity signal without scale factor temperature compensation to generate a force feedback signal; the detection mode driving electrode generates vibration based on the force feedback signal so as to balance the vibration of the detection mode detection electrode caused by the Goldfish effect and realize closed-loop detection of the gyroscope;

(S3) setting a scale factor temperature compensation module based on the non-scale factor temperature compensated angular velocity information and ω_xGenerating and outputting a compensated angular velocity output signal by the scale factor temperature compensation module; wherein the compensated angular velocity output signal is in combination with omega_xIs irrelevant.

The step (S3) further includes: setting the scale factor temperature compensation module to divide the non-scale factor temperature compensated angular velocity signal by ω_xAnd then multiplied by the fixed coefficient for adjusting the magnitude of the temperature compensated scale factor value to produce the compensated angular velocity output signal.

Has the advantages that: compared with the prior art, the method has the following advantages:

1. the gyroscope scale factor temperature compensation device has a scale factor temperature compensation mode, can theoretically eliminate the temperature drift of the scale factor and improve the temperature stability of the gyroscope scale factor;

2. the gyroscope is used for detecting modal resonance frequency to compensate the temperature drift of the scale factor, model calibration and algorithm compensation are not relied on, and the compensation effect is independent of the repeatability of the output signal of the gyroscope;

3. external excitation signals do not need to be input, the precision and the stability of the gyroscope detection signals are improved, and the working bandwidth of the gyroscope is not limited by the external excitation signals;

4. and a micro-platform rotating mechanism is not needed, so that the processing difficulty and the manufacturing cost of the system microstructure are reduced.

Drawings

FIG. 1 is a block diagram of a system according to an embodiment of the present invention;

FIG. 2(a) is a block diagram of a gyroscope closed loop detection control without an equivalent transformation according to an embodiment of the present invention;

FIG. 2(b) is a block diagram of the gyroscope closed loop detection control after the equivalent transformation according to an embodiment of the present invention;

FIG. 2(c) is a block diagram of equivalent unit negative feedback closed loop detection control of a gyroscope after equivalent transformation according to an embodiment of the present invention;

FIG. 2(d) is a control block diagram of the silicon micro gyroscope after closed loop detection scale factor temperature compensation according to an embodiment of the present invention.

Detailed Description

The technical scheme of the invention is further described with reference to the accompanying drawings.

Referring to fig. 1, the system for improving the temperature stability of the scale factor of a silicon micro gyroscope of the present invention comprises: a gyroscope driving closed loop circuit 100, a gyroscope detection closed loop circuit 200 and a gyroscope scale factor temperature compensation module 300.

The gyroscope driving closed loop circuit 100 includes a driving mode detection electrode 101, a driving mode driving electrode 102, a driving mode C/V conversion circuit 103, a driving mode amplification circuit 104, a driving mode a/D conversion circuit 105, a driving mode D/a conversion circuit 106, a phase demodulation module 107, an amplitude demodulation module 108, a phase-locked loop 109, an automatic gain controller 110, a direct digital frequency synthesizer 111, and a first multiplier. The drive mode drive electrode 102 is for generating vibrations in response to a drive signal. The driving mode detection electrode 101 detects the vibration of the driving mode driving electrode 102 to generate a vibration signal, and the vibration signal is processed by the driving mode C/V conversion circuit 103 and the driving mode a/D conversion circuit 105 and then input to the phase demodulation module 107 and the amplitude demodulation module 108, respectively. The phase demodulation module 107 demodulates the signal and outputs a phase-related signal to the phase-locked loop 109, and the amplitude demodulation module 108 demodulates the signal and outputs an amplitude-related signal to the agc 110. The phase locked loop 109 tracks the drive mode resonance frequency ω of the gyroscope based on the phase related signal_xAnd will be omega_xRespectively output to the direct digital frequency synthesizer 111 and the scaleThe factor temperature compensation module 300. The automatic gain controller 110 generates the amplitude of the drive signal based on the amplitude-dependent signal. Direct digital frequency synthesizer 111 outputs ω_xSine signal sin ω of_xt, and input to the detection closed loop 200. The first multiplier multiplies the amplitude of the driving signal by the sine signal sin omega_xAnd multiplying t to obtain a driving signal. The driving signal is processed by the driving mode D/a conversion circuit 106 and the driving mode amplifying circuit 104 in sequence and then input to the driving mode driving electrode 102, so that the amplitude of the driving mode detection electrode is kept constant, and the driving mode resonant frequency ω is tracked in real time_xAnd the closed-loop driving of the gyroscope is realized.

The motion equation of the driving mode of the silicon micro gyroscope is as follows:

wherein x is a driving mode vibration displacement which can be detected by the driving mode detection electrode 101; m is_cAn effective coriolis mass for the gyroscope; c. C_xIs a damping coefficient of a gyroscope driving mode, k_xIs a gyroscope drive mode stiffness coefficient, A_FIs the gyroscope driving force amplitude; m is_cRelating to structural parameters of the gyroscope, c_x、k_xThe value of (A) is related to the structural parameter of the driving mode, A_FGenerated by the agc 110.

The steady state solution for equation (1) is:

wherein A is_xThe amplitude of the gyroscope drive mode vibration.

The gyroscope detection closed loop circuit 200 comprises a detection mode driving electrode 201, a detection mode detection electrode 202, a detection mode amplifying circuit 203, a detection mode C/V conversion circuit 204, a detection mode D/A conversion circuit 205, a detection mode A/D conversion circuit 206, a Coriolis signal demodulation module 207, a detection mode closed loop controller 208 and a second multiplier. Detection mode detection electrode202 detects the sensitive axis angular velocity Ω, and the output detection signal is processed by the detection mode C/V conversion circuit 204 and the detection mode a/D conversion circuit 206 in sequence and then input to the coriolis signal demodulation module 207 for demodulation to obtain the coriolis signal. The detection mode closed-loop controller 208 generates an angular velocity signal without scale factor temperature compensation based on the coriolis signal and outputs the angular velocity signal to the scale factor temperature compensation module 300. The second multiplier combines the angular velocity signal without temperature compensation of the scale factor with sin omega_xAnd (5) multiplying t and outputting a force feedback signal. The force feedback signal is processed by the detection mode D/a conversion circuit 205 and the detection mode amplification circuit 203 in sequence and then input to the detection mode driving electrode 201, so that the detection mode driving electrode 201 vibrates, and the vibration of the detection mode driving electrode 201 is used to counteract the vibration of the driving mode detection electrode 202 caused by the input angular velocity Ω, thereby realizing the closed-loop detection of the gyroscope.

The motion equation of the closed loop detection mode corresponding to the silicon micro gyroscope detection closed loop 200 is as follows:

where y is the gyroscope detection mode vibration displacement, which can be detected by the detection mode detection electrode 202. c. C_yDetecting modal damping coefficient, k, for a gyroscope_yDetecting the modal stiffness coefficient, c, for the gyroscope_y、k_yThe value of (a) is related to the gyroscope detection modal structure parameter; f_fA second multiplier in the gyroscope detection closed loop 200 generates and outputs a modal force feedback signal for gyroscope detection; and omega is the input angular speed of the sensitive axis of the gyroscope.

The purpose of closed loop detection by the gyroscope detection closed loop circuit 200 is to cancel the detection mode detection electrode vibration displacement y through the detection mode drive electrode. According to formula (3), F_fCan be expressed as:

FIGS. 2(a) to 2(d) showClosed loop detection control block diagram of silicon micro-gyroscope, F_cDetection of modal Coriolis signals for a gyroscope, G_y(s) is the transfer function of the gyroscope detection mode, K_ycDetecting modal displacement-capacitance conversion gain, K, for a gyroscope_cvDetecting modal C/V conversion gain, F, for gyroscopes_LPF(s) is a transfer function, F, corresponding to the low pass filter in the Coriolis signal demodulation module 207_FB(s) is a transfer function corresponding to the gyroscope detection mode closed-loop controller 208, K_fbClosed loop gain, G, for gyroscope detection mode_equal(s) is the equivalent transfer function of the gyroscope detection mode, K_cThe fixed coefficients are temperature compensated for the gyroscope scale factor.

FIG. 2(a) is a control block diagram of a closed loop detection of a gyroscope detection closed loop circuit 200 without equivalent transformation, wherein the gyroscope detection mode includes a Coriolis signal F_cWith force feedback signal F_fAfter difference is made, the difference is input to a gyroscope to detect a modal transfer function G_y(s) a change in displacement of the detection mode detection electrode 202 is generated resulting in a change in capacitance. The capacitance change is converted into a voltage value by the detection mode C/V conversion circuit 204, the voltage value is processed by the detection mode A/D conversion circuit 206, and is filtered after multiplication modulation in the Coriolis signal demodulation module 207, a Coriolis signal is output and input to the detection mode closed-loop controller 208 to generate a force feedback control quantity, and the force feedback control quantity is multiplied by the sine signal sin omega_xAnd after t, a force feedback signal is generated and is input to the detection mode driving electrode 201 after being subjected to D/A conversion and amplification so as to counteract the vibration of the detection mode detection electrode 202, thereby realizing the closed-loop detection of the gyroscope. Thus, the angular velocity output of the silicon micro-gyroscope closed loop detection may be characterized by the output of the detection mode closed loop controller 208.

FIG. 2(b) is obtained after the equivalent transformation of FIG. 2(a), specifically, the mode Coriolis signal F is detected_cAnd detecting the modal force feedback signal F_fSin omega in a link_xAnd the multiplication term of t is obtained after equivalently converting the multiplication term into a subtracter. Meanwhile, the link in the dashed box of fig. 2(b) can be characterized as the equivalent transfer function of the gyroscope detection mode through euler transformation.

FIG. 2(c) is a schematic view showing a schematic view of FIG. 2(b) and the likeObtained after effect conversion, specifically, gain K of a detection mode closed loop in a negative feedback link_fbAnd equivalently converting to a forward path link.

From fig. 2(c), an equivalent unit negative feedback model of closed loop detection of the gyroscope can be obtained, and the gain of the equivalent unit negative feedback model is:

equation (5) is the scale factor that the silicon micro-gyroscope detection closed-loop circuit 200 performs closed-loop detection and outputs to the scale factor temperature compensation module 300. The larger term affected by temperature change in equation (5) is the resonance frequency ω of the driving mode_xAnd the gyroscope closed loop driving circuit tracks the resonant frequency of the driving mode in real time. Therefore, the output signal of the gyro detection mode closed-loop controller 208 (i.e., the angular velocity signal SF × Ω without scale factor temperature compensation) is input to the scale factor temperature compensation module 300 in the FPGA program. In the scale factor temperature compensation module 300, the angular velocity signal SF x omega without scale factor temperature compensation is divided by omega_xThen multiplied by a fixed coefficient K_cObtaining angular velocity signal SF after temperature compensation of gyroscope_c×Ω。SF_cFor the scale factor after the temperature compensation of the gyroscope, based on equation (5) there are:

FIG. 2(d) is the control block diagram after the closed loop detection scale factor temperature compensation of the silicon micro gyroscope, the gyroscope scale factor temperature compensation fixed coefficient K_cThe effect of (a) is to control the value of the scaling factor after temperature compensation to an appropriate level. Temperature compensated scale factor SF according to equation (6)_cResonant frequency omega with driving mode_xRegardless, this reflects the ability of the system and method of the present invention to effectively improve the temperature stability of the silicon micro-gyroscope scale factor.