阅读说明：本技术 电加热式催化剂装置 (Electrically heated catalyst device ) 是由 森连太郎 小林竹雄 于 2019-05-28 设计创作，主要内容包括：一种电加热式催化剂装置,即使在使电流反复地在梳状电极流通的情况下,也能够经由梳状电极对催化剂均一地进行加热。电加热式催化剂装置1具备：担载金属催化剂的载体10；具备多个配线部52、52、...的一对梳状电极5；介于梳状电极5与载体10之间的基底层4；以及将各配线部52固定于基底层4的固定层6。在从相对于沿着电加热式催化剂装置1的长度方向D1的载体10的中心轴CL正交的方向观察载体10的外周面10b时,固定层6为矩形状,固定层6的相对的一对第1边61a、61b在各配线部52的两侧与配线部52延伸的方向D3平行,将一对第1边61a、61b的两端连接的一对第2边62a、62b与配线部52延伸的方向D3正交。(An electrically heated catalyst device capable of uniformly heating a catalyst via a comb electrode even when a current is repeatedly passed through the comb electrode. The electrically heated catalyst device 1 includes: a carrier 10 supporting a metal catalyst; a pair of comb-like electrodes 5 provided with a plurality of wiring portions 52, 52; a base layer 4 interposed between the comb electrode 5 and the carrier 10; and a fixing layer 6 for fixing each wiring section 52 to the base layer 4. When the outer peripheral surface 10b of the carrier 10 is viewed from a direction perpendicular to the central axis CL of the carrier 10 along the longitudinal direction D1 of the electrically heated catalyst device 1, the fixed layer 6 has a rectangular shape, the pair of 1 st sides 61a, 61b of the fixed layer 6 facing each other are parallel to the direction D3 in which the wiring portions 52 extend on both sides of each wiring portion 52, and the pair of 2 nd sides 62a, 62b connecting both ends of the pair of 1 st sides 61a, 61b are perpendicular to the direction D3 in which the wiring portions 52 extend.)

1. An electrically heated catalyst device is provided with:

A carrier supporting a metal catalyst;

A pair of comb-shaped electrodes including a base portion extending in a longitudinal direction of the carrier and a plurality of wiring portions extending from the base portion in a circumferential direction of the carrier;

A base layer formed on an outer peripheral surface of the carrier and interposed between the comb-shaped electrode and the carrier; and

A fixing layer that is joined to the base layer so as to cover a part of each of the wiring sections, thereby fixing each of the wiring sections to the base layer,

The electrically heated catalyst apparatus is characterized in that,

the fixing layer has a rectangular shape when the outer peripheral surface of the carrier is viewed from a direction orthogonal to the central axis of the carrier along the longitudinal direction,

A pair of opposing 1 st sides of the rectangular fixing layer are parallel to the direction in which the wiring portions extend on both sides of each of the wiring portions, and a pair of 2 nd sides connecting both ends of the pair of 1 st sides are orthogonal to the direction in which the wiring portions extend.

2. The electrically heated catalyst apparatus according to claim 1, characterized in that,

The corner of the fixing layer formed by the end of the 1 st edge and the end of the 2 nd edge is rounded.

3. The electrically heated catalyst apparatus according to claim 1 or 2,

A gap is formed between the base layer and a portion of the wiring section covered with the fixing layer.

Technical Field

The present invention relates to an electrically heated catalyst device including at least a carrier on which a catalyst is supported and an electrode attached to the carrier.

Background

Conventionally, an electrically heated catalyst device that is heated by energization to purify exhaust gas has been known. For example, an electrically heated catalyst device includes a carrier on which a metal catalyst is supported and a comb electrode fixed to the carrier for energizing the carrier. Here, the comb-shaped electrode causes an electric current from an external power source such as a battery to flow through the carrier, and the carrier is heated by passing an electric current through the comb-shaped electrode, thereby activating the metal catalyst carried on the carrier. According to the electrically heated catalyst device, the carrier is forcibly heated by energization, and the exhaust gas can be efficiently purified.

As such an electrically heated catalyst device, for example, patent document 1 discloses an electrically heated catalyst device in which a comb-shaped electrode including a plurality of wiring portions extending from a base portion in a circumferential direction of a carrier is fixed to the carrier via a fixing layer. Here, the fixing layer has a circular shape when the outer peripheral surface of the carrier is viewed from a direction perpendicular to the central axis of the carrier along the longitudinal direction.

Disclosure of Invention

Problems to be solved by the invention

However, when a current is repeatedly passed through the comb-shaped electrodes of the electrically heated catalyst device, cracks may be locally generated in the fixed layer due to the repeated thermal stress. Therefore, in a portion where a crack is generated, the carrier may not be electrically connected from the wiring portion through the fixing layer, and the carrier may not be uniformly heated.

the present invention has been made in view of the above problems, and provides an electrically heated catalyst device capable of uniformly heating a catalyst via a comb electrode even when a current is repeatedly passed through the comb electrode.

Means for solving the problems

The inventors have made intensive studies and found that: when the wiring portion of the comb-shaped electrode is offset from the center of the circular fixing layer and fixed to be large, the contact lengths of the fixing layers in contact with the edges on both sides of the wiring portion are different, and excessive stress is generated in the fixing layer on the side having the longer contact length. The crack was generated in the pinned layer due to the excessive stress.

In view of the above problem, an electrically heated catalyst device according to the present invention includes: a carrier supporting a metal catalyst; a pair of comb-shaped electrodes including a base portion extending in a longitudinal direction of the carrier and a plurality of wiring portions extending from the base portion in a circumferential direction of the carrier; a base layer formed on an outer peripheral surface of the carrier and interposed between the comb-shaped electrode and the carrier; and a fixing layer bonded to the base layer so as to cover a part of each of the wiring portions, thereby fixing each of the wiring portions to the base layer, wherein the fixing layer has a rectangular shape when an outer peripheral surface of the carrier is viewed from a direction orthogonal to a central axis of the carrier along the longitudinal direction, a pair of opposing first sides of the rectangular fixing layer are parallel to a direction in which the wiring portions extend on both sides of each of the wiring portions, and a pair of second sides connecting both ends of the pair of first sides are orthogonal to the direction in which the wiring portions extend.

According to the present invention, since the edges on both sides of the wiring portion are arranged so as to face the 1 st sides of the anchor layer and the 2 nd sides are orthogonal to the direction in which the wiring portion extends, the lengths of the edges of the wiring portion in contact with the anchor layer can be made the same. Further, even if the wiring portion of the comb-shaped electrode is offset from the center of the rectangular fixed layer and fixed to be large, such a relationship can be secured.

this makes it possible to substantially equalize the stress in the portions of the fixing layer in contact with the edges on both sides of the wiring portion, and to suppress the occurrence of excessive stress caused by positional displacement of the wiring portion. Thus, even when a current is repeatedly passed between the pair of comb electrodes, the carrier can be uniformly heated via the comb electrodes, and the occurrence of cracks in the fixing layer can be suppressed.

As a further preferable mode, a corner of the fixing layer formed by the end of the 1 st side and the end of the 2 nd side is rounded. According to this embodiment, although cracks are likely to occur in the corners of the fixed layer due to thermal shock when the current is repeatedly passed through the comb-shaped electrodes, the corners are rounded, and therefore, the occurrence of cracks in the corners can be suppressed.

In a more preferable embodiment, a gap is formed between the portion of the wiring section covered with the fixing layer and the base layer. According to this aspect, when a gap is formed between the base layer and the portion of the wiring section covered with the fixing layer, since a current flows from the wiring section to the base layer via the fixing layer, an excessive current easily flows also in the portion of the fixing layer in contact with both side edges of the wiring section, and this portion excessively generates heat, and stress is easily concentrated in this portion.

However, even in such a case, since the contact lengths of the fixing layers in contact with the respective edges of the wiring portion are the same length, such stress concentration is reduced. Accordingly, the stress of the portions of the fixing layer in contact with the edges on both sides of the wiring portion is substantially equalized, and the occurrence of excessive stress due to the positional displacement of the wiring portion with respect to the fixing layer can be suppressed, and the occurrence of cracks in the fixing layer due to repeated energization can be suppressed.

ADVANTAGEOUS EFFECTS OF INVENTION

According to the present invention, even when a current is repeatedly passed through the comb electrodes, the catalyst can be uniformly heated by the comb electrodes.

Drawings

Fig. 1A is a schematic perspective view of an electrically heated catalyst device according to an embodiment of the present invention.

Fig. 1B is a side view of the electrically heated catalyst device shown in fig. 1A.

Fig. 2 is a schematic enlarged plan view of a main portion of the electrically heated catalyst device shown in fig. 1A.

Fig. 3 is a sectional view in the direction of the arrows along the line a-a shown in fig. 2.

Fig. 4A is a schematic conceptual view showing a state of formation of the base layer in the method for manufacturing the electrically heated catalyst device shown in fig. 1A.

Fig. 4B is a schematic conceptual view showing an arrangement state of electrodes in the method of manufacturing the electrically heated catalyst device shown in fig. 1A.

Fig. 4C is a schematic conceptual view showing a state before molding of the fixed layer in the method for manufacturing the electrically heated catalyst device shown in fig. 1A.

Fig. 4D is a schematic conceptual view showing a state after forming the anchor layer in the method for manufacturing the electrically heated catalyst device shown in fig. 1A.

Fig. 4E is a schematic conceptual view showing a state after forming into comb-shaped electrodes in the method of manufacturing the electrically heated catalyst device shown in fig. 1A.

Fig. 5A is a schematic plan view for explaining a positional relationship between the wiring portions of the comb-shaped electrodes and the fixed layer in the electrically heated catalyst device of the present embodiment.

Fig. 5B is a schematic plan view for explaining a positional relationship between the wiring portions of the comb-shaped electrodes and the fixed layer in the electrically heated catalyst device of the comparative example.

Fig. 6A is a perspective view showing an example of an analysis model of the electrically heated catalyst device of example 1.

Fig. 6B is a perspective view showing an example of an analysis model of the electrically heated catalyst device of comparative example 1.

Fig. 7 is a graph showing a relationship between the amount of displacement of the wiring from the fixed layer and the ratio of the maximum stress of the fixed layer in example 1 and comparative example 1.

Fig. 8A is a cross-sectional photograph of the vicinity of the anchor layer in example 2.

Fig. 8B is a cross-sectional photograph of the vicinity of the anchor layer of comparative example 2.

Description of the reference numerals

1: electrically heated catalyst device, 4: base layer, 5: comb electrode, 51: base, 52: wiring section, 6: fixing layer, 61a, 61 b: 1 st side, 62a, 62 b: side 2, 63: corner portion, 10: vector, 10 b: peripheral surface

Detailed Description

Hereinafter, an electrically heated catalyst device according to an embodiment of the present invention will be described with reference to fig. 1A to 3, and a method for manufacturing the electrically heated catalyst device shown in fig. 1A will be described in brief with reference to fig. 4A to 4E.

1. electrically heated catalyst device 1

The electrically heated catalyst device 1 is a device that is installed in an exhaust path of an automobile or the like, for example, and purifies exhaust gas discharged from an engine. As shown in fig. 1A, the electrically heated catalyst device 1 includes a support 10, a base layer 4, a comb electrode 5, and a fixed layer 6.

As shown in fig. 1A, the carrier 10 is a porous member formed of ceramic having a cylindrical outer diameter, and has a honeycomb structure 10a inside thereof, and the exhaust gas can pass through the inside of the carrier 10 by a plurality of pores extending along the center axis CL of the carrier 10.

The ceramic constituting the carrier 10 is not particularly limited as long as it is a ceramic having conductivity, and examples thereof include a composite material composed of SiC (silicon carbide) particles and Si (silicon) particles. A metal catalyst such as platinum, palladium, or rhodium is supported on the wall surfaces of the honeycomb structure 10a forming the carrier 10.

A base layer 4 for fixing comb-like electrodes 5, which will be described later, to the carrier 10 is formed on the outer peripheral surface 10b of the carrier 10. The base layer 4 is interposed between the comb electrodes 5 and the carrier 10, and fixes the pair of comb electrodes 5 via a fixing layer 6 described later.

in the present embodiment, the base layer 4 is a base layer for fixing each comb electrode 5, and two base layers are formed at positions on the opposite side of the outer peripheral surface 10b of the carrier 10 (positions where the carrier 10 is rotated by 180 ° around the center axis CL) with the center axis CL therebetween. The carrier is provided with a 1 st base layer 4a formed on the outer peripheral surface 10b of the carrier 10 and a 2 nd base layer 4b formed on the 1 st base layer 4 a. The 1 st base layer 4a is formed of a ceramic material having electrical conductivity, and in the present embodiment, is a layer of a composite material composed of SiC (silicon carbide) particles and Si (silicon) particles.

here, it is further preferable that the carrier 10 contains SiC particles in a larger proportion than the SiC particles constituting the 1 st base layer 4 a. This can increase the resistance value of the carrier 10 to be higher than the resistance value of the 1 st base layer 4a, and can improve the heat generation property of the carrier 10.

Assuming such a relationship, when the total amount of SiC (silicon carbide) particles and Si (silicon) particles constituting the carrier 10 is 100%, SiC (silicon carbide) is preferably 65% by volume to 75% by volume. On the other hand, when the total amount of SiC (silicon carbide) particles and Si (silicon) particles constituting the 1 st base layer 4a is 100%, SiC (silicon carbide) is preferably 55 to 65 vol%.

Specifically, the metal matrix may be an NiCr alloy or an MCrAlY alloy (M is at least one of Fe, Co, and Ni), the oxidized mineral is a substance mainly composed of an oxide such as SiO ₂ or Al ₂ O ₃, and is preferably formed of bentonite, mica, or a mixture thereof, for example, in this embodiment, the 2 nd underlayer 4b is a layer formed by spraying a mixed powder obtained by mixing NiCr alloy particles as the metal matrix and bentonite particles as the oxidized mineral particles onto the surface of the 1 st underlayer 4 a.

In this embodiment, the resistance value of the 2 nd base layer 4b, the resistance value of the 1 st base layer 4a, and the resistance value of the carrier 10 become higher in this order. Therefore, among them, the resistance value of the carrier 10 is the highest, so the carrier 10 is easily heated at the time of energization. Further, by setting the resistance value of the 2 nd base layer 4b to be lower than the resistance value of the 1 st base layer 4a, the current from the comb electrode 5 can easily flow in the 2 nd base layer 4b along the circumferential direction D2 of the carrier 10. The 1 st base layer 4A is a layer adjusted to have an intermediate resistance value so that a current flowing in the circumferential direction D2 (see fig. 4A and the like) of the carrier 10 flows through the carrier 10 due to the 2 nd base layer 4 b.

In the present embodiment, as shown in fig. 1B, the electrically heated catalyst device 1 includes a pair of comb-like electrodes 5 and 5 formed of a metal having conductivity such as an Fe — Cr alloy (e.g., stainless steel). The pair of comb electrodes 5 and 5 are disposed at positions opposite to the outer peripheral surface 10b of the carrier 10 with the center axis CL therebetween (positions where the carrier 10 is rotated by 180 ° around the center axis CL). Each comb-shaped electrode 5 includes a base 51 extending along the longitudinal direction D1 of the carrier 10, and a plurality of wiring portions 52, 52 extending from the base 51 along the circumferential direction D2 of the carrier 10. The longitudinal direction D1 is a direction along the center line CL of the cylindrical carrier 10. In the present embodiment, as shown in fig. 1A and 1B, the base portion 51 is bent on the connection terminal side of the base portion 51. Although not explicitly shown in fig. 1A and 1B, the boundary portion between the base 51 and each of the wires 52 is slightly curved in a direction in which the base 51 is separated from the outer peripheral surface 10B of the carrier 10. Thereby, the base 51 is not in contact with the outer peripheral surface 10b of the carrier 10.

As shown in fig. 2 and 3, the fixing layer 6 is joined to the base layer 4 so as to cover a part of each wiring portion 52 on both sides of each wiring portion 52, thereby fixing each wiring portion 52 to the base layer 4. That is, in the present embodiment, the wiring portion 52 is fixed to the base layer 4 (the 2 nd base layer 4b) via the fixing layer 6. As shown in fig. 1, the plurality of fixing layers 6, 6 fixing the comb-like electrodes 5 are arranged in a staggered manner along the circumferential direction D2. The anchor layers 6,. may be arranged linearly. The anchor layer 6 is formed of the material exemplified in the 2 nd base layer 4b, but may be formed of the same material as the 2 nd base layer 4b in the present embodiment.

Here, the ratio of the oxidized mineral (particle) such as bentonite and the metal (matrix) such as an NiCr alloy contained in the 2 nd underlayer 4b and the anchor layer 6 is preferably 55 to 70 vol% based on the total amount of the oxidized mineral (particle). Here, the content ratio of the metal (matrix) in the anchor layer 6 is preferably smaller than that in the 2 nd base layer 4 b. This makes it possible to make the thermal expansion coefficient of the fixed layer 6 close to the thermal expansion coefficient of the wiring 52, and to reduce the thermal stress acting on the fixed layer 6 by thermal contraction of the wiring 52.

as shown in fig. 2, when the outer peripheral surface 10b of the carrier 10 is viewed from a direction perpendicular to the center axis CL of the carrier 10 along the longitudinal direction D1, the fixed layer 6 has a rectangular shape. In the present embodiment, the fixed layer 6 has a square shape, but may have a rectangular shape.

Specifically, of the four sides constituting the fixed layer 6, the pair of opposing 1 st sides 61a, 61b of the rectangular fixed layer 6 are parallel to the direction D3 in which the wiring portion 52 extends on both sides of each wiring portion 52. The pair of 2 nd sides 62a and 62b connecting both ends of the pair of 1 st sides 61a and 61b are orthogonal to the direction D3 in which the wiring portion 52 extends. Further, in the present embodiment, the wiring section 52 extends along the circumferential direction D2 of the carrier 10, and therefore, the direction D3 in which the wiring section 52 extends coincides with the circumferential direction D2.

The corner 63 of the anchor layer 6 formed by the end of each 1 st side 61a (61b) and the end of each 2 nd side 62a (62b) may be orthogonal to each other, but in the present embodiment, the corner 63 is rounded.

Further, when the wiring section 52 is fixed to the base layer via the fixing layer 6, the portion of the wiring section 52 covered with the fixing layer 6 may be in contact with the base layer 4, but in the present embodiment, a gap s is formed between the portion of the wiring section 52 covered with the fixing layer 6 and the base layer 4.

2. Method for manufacturing electrically heated catalyst device 1

A method for manufacturing the electrically heated catalyst device 1 shown in fig. 1 will be described below with reference to fig. 4A to 4E.

First, as shown in fig. 4A, the base layer 4 is formed on the outer peripheral surface 10b of the carrier 10 made of ceramic. In the step of forming the base layer 4, the pair of base layers 4, 4 are formed. Specifically, first, the carrier 10 carrying the metal catalyst described above is prepared, and the first base layers 4a and 4a are molded by applying a paste material (japanese: ペ ー ス ト material) in which SiC (silicon carbide) particles and Si (silicon) particles are dispersed in a dispersion medium to the outer peripheral surface 10b of the carrier 10 and sintering the paste material. Here, the paste material may be applied by screen printing (screen printing). Thereafter, the metal catalyst is supported.

Next, a metal mask (not shown) having an opening corresponding to the shape of the 2 nd base layers 4b and 4b is disposed on the 1 st base layers 4a and 4 a. Next, a powder obtained by mixing NiCr alloy particles and bentonite particles is sprayed toward the openings by spraying such as gas flame spraying or plasma spraying, and the NiCr alloy is melted to form the 2 nd base layers 4b and 4 b.

Next, as shown in fig. 4B, the electrode 5A including the base portion 51 and the plurality of wiring portions 52 extending from the base portion 51 is disposed on the surface of the base layer 4 (2 nd base layer 4B) such that the base portion 51 extends along the longitudinal direction D1 of the carrier 10 and each wiring portion 52 extends along the circumferential direction D2 of the carrier 10. Specifically, the sheet-like electrode 5A is bent so as to follow the surface of the base layer 4.

In the present embodiment, the electrode 5A is a member having the shape of each wiring portion 52 including one comb-shaped electrode 5 of the pair of comb-shaped electrodes 5, and has a structure in which the wiring portion 52 is further extended and the wiring portion 52 is connected by the connecting portion 53. In the present embodiment, the base portion 51 and the connection portion 53 of the sheet-like electrode 5A are pulled in a direction away from each other, and the sheet-like electrode 5A is made to follow the surface of the foundation layer 4. The remaining portions extending from the respective wiring portions 52 and the connecting portions 53 are cut out after the molding of the fixing layer 6 described later.

Next, as shown in fig. 4C, the masking material 8 is disposed on the outer peripheral surface 10b of the carrier 10 on which the electrode 5A is disposed. Rectangular openings 81 corresponding to the shapes of the fixing layers 6 and the arrangement states thereof are formed in the masking material 8, and the masking material 8 is arranged on the outer peripheral surface 10b so that the wiring portions 52 of the electrodes 5A are exposed through the openings 81.

Next, from the state shown in fig. 4C, in the same manner as the second underlayer 4b, powder obtained by mixing NiCr alloy particles and bentonite particles is sprayed toward the openings 81 by spraying such as gas flame spraying or plasma spraying, and the NiCr alloy is melted to form the anchor layer 6. Thus, as shown in fig. 4D, in a state where the masking material 8 is removed, the fixing layer 6 is formed so as to cover a part of each wiring portion 52 and to be joined to the base layer 4, whereby each wiring portion 52 is fixed to the base layer 4 via the fixing layer 6.

More specifically, when the outer peripheral surface 10b of the carrier 10 is viewed from a direction perpendicular to the central axis CL of the carrier 10 along the longitudinal direction D1, the fixed layer 6 has a rectangular shape (see fig. 2 and the like). As described above, the fixing layer 6 is formed such that the pair of opposing first sides 61a and 61b of the rectangular fixing layer 6 are parallel to the direction in which the wiring portions 52 extend on both sides of each wiring portion 52. The fixing layer 6 is formed such that the pair of 2 nd sides 62a and 62b connecting both ends of the pair of 1 st sides 61a and 61b are orthogonal to the direction D3 in which the wiring portion 52 extends.

The anchor layer 6 is formed such that the corner 63 of the anchor layer 6 where the end portions of the 1 st sides 61a and 61b intersect the end portions of the 2 nd sides 62a and 62b is rounded in accordance with the shape of the opening 81 of the masking material 8 (see fig. 2 and the like). When the electrode 5A is disposed on the base layer 4, if a gap is locally formed between the base layer 4 and the electrode 5A, a gap s (see fig. 3) is formed between the portion of the wiring portion 52 covered with the fixing layer 6 and the base layer 4. The gap s is formed as follows. The 2 nd base layer 4b is a layer formed by spray coating, and protrusions corresponding to the shape of the bentonite particles are formed on the surface of the 2 nd base layer 4 b. Since the wiring portion 52 is locally in contact with the projection, a gap is formed between the electrodes 5A and the 2 nd base layer 4b in a state where the electrodes are disposed.

In the present embodiment, the fixing layer 6 is formed so that the length L2 of the 2 nd side 62a (62b) is 3 times or more the width W of the wiring portion 52. By setting the length 62a (62b) of the 2 nd side to be 3 times or more the width of the wiring portion 52, even if a positional deviation occurs, the fixing layers 6 can be more reliably fixed to the base layer 4 on both sides of the wiring portion 52.

The remaining portions (the portion extending from the wiring portion 52, the connecting portion 53, and the like) are cut off from the electrode 5A, and as shown in fig. 4E, the wiring portions 52 of one comb-shaped electrode 5 are fixed to the base layer 4 via the fixing layer 6. Next, the carrier 10 is rotated by 180 ° about the center axis CL, and a series of steps described with reference to fig. 4B to 4E are performed to fix the other comb-like electrode 5. Thereby, the electrically heated catalyst device 1 shown in fig. 1A and 1B can be obtained. Finally, the boundary portions between the base portion 51 and the respective wires 52 are bent so as to form a gap between the base portion 51 and the outer peripheral surface 10b of the carrier 10, and the base portion 51 is further bent on the connection terminal side of the base portion 51.

In the stage of manufacturing the electrically heated catalyst device 1, when the electrode 5A is disposed as shown in fig. 4B or when the masking material 8 is disposed as shown in fig. 4C, the relative positions of the wiring portion 52 and the opening 81 of the masking material 8 may be shifted.

Thus, in the obtained electrically heated catalyst device 1, the position of the wiring portion 52 may be shifted from the center C of the fixed layer 6 as compared with the normal position shown in the center of fig. 5A and 5B. Here, as shown in fig. 5B, for example, in the case where the position of the wiring portion 52 is shifted from the center C of the fixed layer 9 in the fixed layer 9 having a circular shape as a comparative shape, the contact lengths La and Lb of the fixed layer 9 with which the edges 52a and 52B on both sides of the wiring portion 52 are in contact are different. For example, in the right drawing of fig. 5B, the contact length La > the contact length Lb, and in the left drawing, the contact length La < the contact length Lb.

In this way, when the contact lengths La and Lb of the fixed layers are different from each other, it is understood from the analysis results described below that: excessive stress is generated in the fixing layer on the side where the contact length is long. When the current is repeatedly supplied between the pair of comb electrodes 5 and 5, a crack may be generated in the fixed layer at the portion (for example, see portion 9a of fig. 6B) due to the excessive stress.

However, as shown in fig. 5A, in the present embodiment, the edges 52a and 52b on both sides of the wiring portion 52 are disposed so as to face the 1 st sides 61a and 61b of the fixed layer 6, and the 2 nd sides 62a and 62b are orthogonal to the direction D3 in which the wiring portion 52 extends. Therefore, even if the wiring portion 52 of the comb-shaped electrode 5 is fixed to be offset from the center C of the rectangular fixed layer 6 to a large extent as shown in the right or left drawing of fig. 5A, the lengths of the edges 52a and 52b of the wiring portion 52 in contact with the fixed layer 6 can be made the same.

Thus, in the present embodiment, the stress in the portions of the fixing layer 6 that are in contact with the edges 52a and 52b on both sides of the wiring portion 52 is substantially uniform, and the occurrence of excessive stress due to the positional displacement of the wiring portion 52 can be suppressed. As a result, even when a current is repeatedly passed between the pair of comb electrodes 5 and 5, it is possible to suppress the occurrence of cracks in the fixing layer 6 that can uniformly heat the carrier 10 via the comb electrodes 5.

Further, although cracks are likely to occur in the corner portions 63 of the fixed layer 6 due to thermal shock when current is repeatedly passed through the comb electrodes 5, the corner portions 63 are rounded, and therefore, the occurrence of cracks in the corner portions 63 can be suppressed.

as shown in fig. 3, when a gap s is formed between the base layer 4 and the portion of the wiring section 52 covered with the anchor layer 6, a current flows from the wiring section 52 to the base layer 4 through the anchor layer 6. Therefore, too large current also easily flows to the portions of the fixing layer 6 in contact with the both side edges of the wiring portion 52, and the portions are likely to generate heat and stress is concentrated. However, even in such a case, in the present embodiment, since the contact lengths of the fixed layers 6 with the respective edges 52a, 52b of the wiring portion 52 are the same length, such stress concentration is reduced.