阅读说明：本技术 朗缪尔探针、朗缪尔探针检测系统及检测方法 (Langmuir probe, Langmuir probe detection system and Langmuir probe detection method ) 是由 翁惠焱 韩木天 刘立辉 蔡国飙 贺碧蛟 于 2019-09-11 设计创作，主要内容包括：本发明提供了一种朗缪尔探针、朗缪尔探针检测系统及检测方法,涉及电推力器真空羽流参数检测设备技术领域；包括探针、限位外壳、滑动内壳和转轴；探针的第一端穿出滑动内壳的第一端,第二端与转轴连接；限位外壳固定不动,所述滑动内壳的第一端穿出限位外壳的第一端,限位外壳限制所述滑动内壳绕轴向转动；滑动内壳的内侧壁与转轴的外侧壁螺纹连接；转轴沿轴向固定,转轴转动带动滑动内壳沿轴向相对于所述限位外壳滑动；本发明能够无需移动探针即可实现探针长度的改变,确保了探针位置的准确性,保证空间精度,并且不会给流场带来干扰,提高测量的准确性。(The invention provides a Langmuir probe, a Langmuir probe detection system and a Langmuir probe detection method, and relates to the technical field of electric thruster vacuum plume parameter detection equipment; comprises a probe, a limit outer shell, a sliding inner shell and a rotating shaft; the first end of the probe penetrates out of the first end of the sliding inner shell, and the second end of the probe is connected with the rotating shaft; the limiting outer shell is fixed, the first end of the sliding inner shell penetrates out of the first end of the limiting outer shell, and the limiting outer shell limits the sliding inner shell to rotate around the axial direction; the inner side wall of the sliding inner shell is in threaded connection with the outer side wall of the rotating shaft; the rotating shaft is fixed along the axial direction, and the rotating shaft rotates to drive the sliding inner shell to slide relative to the limiting outer shell along the axial direction; the invention can realize the change of the length of the probe without moving the probe, ensure the accuracy of the position of the probe, ensure the space accuracy, not bring interference to a flow field and improve the accuracy of measurement.)

1. A Langmuir probe is characterized by comprising a probe, a limiting outer shell, a sliding inner shell and a rotating shaft;

the first end of the probe penetrates out of the first end of the sliding inner shell, and the second end of the probe is connected with the rotating shaft;

The limiting outer shell is fixed, the first end of the sliding inner shell penetrates out of the first end of the limiting outer shell, and the limiting outer shell limits the sliding inner shell to rotate around the axial direction;

The inner side wall of the sliding inner shell is in threaded connection with the outer side wall of the rotating shaft;

the rotating shaft is fixed along the axial direction, and the rotating shaft rotates to drive the sliding inner shell to slide relative to the limiting outer shell along the axial direction.

2. The Langmuir probe as claimed in claim 1, wherein the outer side wall of the sliding inner shell is provided with a limiting protrusion, and the inner wall of the limiting outer shell is provided with a limiting groove adapted to the limiting protrusion along the axial direction.

3. The Langmuir probe of claim 1, further comprising a return spring, wherein a first end of the return spring is coupled to the inner slide housing and a second end of the return spring is coupled to the shaft.

4. The Langmuir probe of claim 1, further comprising a motor, an output of which is connected to the shaft.

5. The Langmuir probe of claim 1, wherein the stop tab of the sliding inner housing is located at the second end of the sliding inner housing.

6. The Langmuir probe of claim 1, wherein the restraining outer housing and the sliding inner housing are both ceramic.

7. The Langmuir probe of claim 1, wherein the probe is of tungsten or molybdenum material and the shaft is a conductive bolt.

8. a langmuir probe detection system comprising the langmuir probe of any one of claims 1 to 7, and an electrical thruster, a scanning power supply, a data acquisition module, and a data processing module; the Langmuir probe is located in a vacuum plume formed by the electric thruster, the Langmuir probe is respectively connected with the scanning power supply and the data acquisition module, and the data acquisition module is connected with the data processing module.

9. the langmuir probe detection system of claim 8, further comprising a brush connected between the shaft and the scanning power supply.

10. A detection method based on the langmuir probe detection system as claimed in any of claims 8 to 9, comprising the steps of:

The electric thruster ignites and sprays plasma to form a plume;

The scanning power supply provides scanning voltage for the Langmuir probe, the probe receives electrons or ions in the plume, and the electrons or ions enter a sheath layer of the probe and are collected to form current flowing through the probe; the data acquisition module is used for respectively acquiring current flowing through the probe and voltage at two ends of the probe and sending the current and the voltage to the data processing module;

Rotating the rotating shaft, changing the length of the probe penetrating out of the sliding inner shell, and repeating the steps to measure the current and the voltage of the probe penetrating out of the sliding inner shell under different lengths;

The data processing module obtains volt-ampere characteristic curves of the probe penetrating out of the sliding inner shell under different lengths according to the acquired current and voltage;

And calculating a plume parameter according to the voltage-current characteristic curve.

Technical Field

The invention relates to the technical field of electric thruster vacuum plume parameter detection equipment, in particular to a Langmuir probe, a Langmuir probe detection system and a Langmuir probe detection method.

Background

The electric thrusters such as the ion thruster and the Hall thruster are widely applied to attitude and orbit control of the spacecraft due to the advantages of high specific impulse, long service life, small system quality and the like. Accurate acquisition of vacuum plume parameters of the electric thruster is crucial for evaluating the performance of the electric thruster and a spacecraft, and a Langmuir probe is generally used for detecting the electron temperature and the electron number density of an isoelectric propulsion vacuum plume flow field.

at present, when the langmuir probe is used for detecting the electron temperature and the electron number density, the length of the langmuir probe extending out of the insulating shell (namely the length of the probe exposed to the plasma environment) needs to be changed sometimes, and in principle, when the length of the langmuir probe extending out is changed, the accuracy of the position of the probe needs to be ensured at the same time so as to avoid interference on a flow field and influence on the measurement precision. However, when the extension length of the conventional telescopic langmuir probe is changed by the telescopic probe, the position of the probe is moved at the same time, which causes great interference to a flow field and affects measurement accuracy.

Disclosure of Invention

The invention provides a Langmuir probe, a Langmuir probe detection system and a Langmuir probe detection method, which can change the length of the probe without changing the position of the probe, ensure the accuracy of the position of the probe, ensure the space precision, avoid interference on a flow field and improve the accuracy of measurement.

embodiments of the invention may be implemented as follows:

in a first aspect, an embodiment of the present invention provides a langmuir probe, including a probe, a limiting outer shell, a sliding inner shell, and a rotating shaft;

The first end of the probe penetrates out of the first end of the sliding inner shell, and the second end of the probe is connected with the rotating shaft;

The limiting outer shell is fixed, the first end of the sliding inner shell penetrates out of the first end of the limiting outer shell, and the limiting outer shell limits the sliding inner shell to rotate around the axial direction;

The inner side wall of the sliding inner shell is in threaded connection with the outer side wall of the rotating shaft;

The rotating shaft is fixed along the axial direction, and the rotating shaft rotates to drive the sliding inner shell to slide relative to the limiting outer shell along the axial direction.

In an optional embodiment, the outer side wall of the sliding inner shell is provided with a limiting protrusion, and the inner wall of the limiting outer shell is provided with a limiting groove matched with the limiting protrusion along the axial direction.

In an optional embodiment, the sliding device further comprises a return spring, wherein a first end of the return spring is connected with the sliding inner shell, and a second end of the return spring is connected with the rotating shaft.

in an optional embodiment, the device further comprises a motor, and an output end of the motor is connected with the rotating shaft.

In an alternative embodiment, the stop protrusion of the inner sliding shell is located at the second end of the inner sliding shell.

in an alternative embodiment, the limiting outer shell and the sliding inner shell are both made of ceramic materials.

in an alternative embodiment, the probe is made of tungsten or molybdenum, and the rotating shaft is a conductive bolt.

In a second aspect, embodiments of the present invention provide a langmuir probe detection system, comprising the langmuir probe according to any one of the preceding embodiments, an electric thruster, a scanning power supply, a data acquisition module, and a data processing module; the Langmuir probe is located in a vacuum plume formed by the electric thruster, the Langmuir probe is respectively connected with the scanning power supply and the data acquisition module, and the data acquisition module is connected with the data processing module.

In an alternative embodiment, the scanning device further comprises a brush, and the brush is connected between the rotating shaft and the scanning power supply.

In a third aspect, the present embodiments provide a detection method based on the langmuir probe detection system described in any one of the previous embodiments, comprising the steps of:

the electric thruster ignites and sprays plasma to form a plume;

The scanning power supply provides scanning voltage for the Langmuir probe, the probe receives electrons or ions in the plume, and the electrons or ions enter a sheath layer of the probe and are collected to form current flowing through the probe; the data acquisition module is used for respectively acquiring current flowing through the probe and voltage at two ends of the probe and sending the current and the voltage to the data processing module;

Rotating the rotating shaft, changing the length of the probe penetrating out of the sliding inner shell, and repeating the steps to measure the current and the voltage of the probe penetrating out of the sliding inner shell under different lengths;

The data processing module obtains volt-ampere characteristic curves of the probe penetrating out of the sliding inner shell under different lengths according to the acquired current and voltage;

And calculating a plume parameter according to the voltage-current characteristic curve.

the probe is connected with the rotating shaft, the rotating shaft is fixed along the axial direction, the limiting outer shell is fixed and limits the sliding inner shell to rotate around the axial direction, the sliding inner shell is in threaded fit with the rotating shaft, and when the rotating shaft rotates, the sliding inner shell slides along the axial direction; the rotating shaft is fixed along the axial direction, so that the probe connected with the rotating shaft is fixed along the axial direction, and the sliding inner shell slides along the axial direction under the premise of fixing the probe; the invention can change the length of the probe without moving the probe, thereby ensuring the accuracy of the position of the probe, ensuring the space precision and not causing interference to a flow field.

drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.

Figure 1 is a schematic structural view of a langmuir probe provided in accordance with an embodiment of the present invention;

Figure 2 is a schematic cross-sectional view of a langmuir probe provided in accordance with an embodiment of the present invention;

figure 3 is a schematic diagram of a langmuir probe according to an embodiment of the present invention in an extended state;

Figure 4 is a schematic perspective view of the langmuir probe provided by the present invention in an extended state;

figure 5 is a schematic perspective view of a langmuir probe according to an embodiment of the present invention in a probe retracted state;

figure 6 is a schematic diagram of a langmuir probe detection system provided by an embodiment of the present invention;

Figure 7 is a flow chart of a langmuir probe detection method according to an embodiment of the present invention.

Icon: 1-a probe; 2-sliding the inner shell; 3-a return spring; 4-a limit housing; 5-a rotating shaft; 6-electric brush; 7-a limiting groove; 8-a fixation hole; 9-boss; 10-an electric thruster; 11-a scanning power supply; 12-a data acquisition module; 13-data processing module.

Detailed Description

in order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.

In the description of the present invention, it should be noted that if the terms "upper", "lower", "inside", "outside", etc. indicate an orientation or a positional relationship based on that shown in the drawings or that the product of the present invention is used as it is, this is only for convenience of description and simplification of the description, and it does not indicate or imply that the device or the element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present invention.

furthermore, the appearances of the terms "first," "second," and the like, if any, are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.

it should be noted that the features of the embodiments of the present invention may be combined with each other without conflict.

Currently, existing langmuir probes have the following problems:

First, the design lacks deformability, and most of them are fixed structures. When the performance of the electric thruster changes or the measuring position is changed, the measuring precision deviation of the probe is very large, even the probe cannot be measured completely, and the probe with a fixed structure can be used normally only by opening the vacuum chamber to replace the probe, which is very inconvenient;

Secondly, when the Langmuir probe changes the extension length, the position needs to be ensured to be unchanged, so that the space precision is ensured during measurement, and the influence on the measurement precision and the flow field interference are reduced. However, in the conventional retractable probe, the probe body is retracted, the probe needs to be moved and the length of the probe needs to be changed (the length of the probe in this embodiment refers to the length of the probe exposed to the plasma environment), and the position of the probe is changed, which affects the measurement accuracy.

Thirdly, the existing Langmuir probe usually connects the probe head with the connecting parts such as a nut, a bolt and a motion motor directly, and electrical contact exists; the nut and the bolt are mainly metal conductive bolts for ensuring the strength, so that the resistance of the probe is large, and the bolt and the nut form resistance voltage division, so that the voltage measurement of the probe is not accurate, and the measurement precision is influenced;

Fourthly, the existing probe uses a glass or ceramic thermal shrinkage mode to clamp a probe head, when the extending length of the probe needs to be changed, the probe needs to be completely re-processed and assembled, the consistency of the probe is not guaranteed, and the measurement stability is further influenced;

Fifthly, the existing telescopic probe is usually connected with the probe by using a soft metal wire, so that the probe can be ensured to be firmly connected under the premise of normal extension, but the metal wire has a limited service life under the high-temperature working environment and is easy to desolder or break along with the increase of the extension times of the probe.

Based on this, embodiments of the present invention provide a langmuir probe, a langmuir probe detection system, and a langmuir probe detection method, which can change the length of the probe without moving the probe, ensure the accuracy of the position of the probe, ensure spatial accuracy, and improve the accuracy of measurement without interfering with a flow field.

Referring to fig. 1 and 2, the present embodiment provides a langmuir probe, which includes a probe 1, a limiting outer housing 4, a sliding inner housing 2, and a rotating shaft 5;

The first end of the probe 1 penetrates out of the first end of the sliding inner shell 2, and the second end of the probe is connected with the rotating shaft 5;

The limiting outer shell 4 is fixed, the first end of the sliding inner shell 2 penetrates out of the first end of the limiting outer shell 4, and the limiting outer shell 4 limits the sliding inner shell 2 to rotate around the axial direction;

The inner side wall of the sliding inner shell 2 is in threaded connection with the outer side wall of the rotating shaft 5;

The rotating shaft 5 is fixed along the axial direction, and the rotating shaft 5 rotates to drive the sliding inner shell 2 to slide relative to the limiting outer shell 4 along the axial direction.

specifically, a thin wire, the remaining part of which is covered with an insulating material except for the end-working part, is inserted into the plasma so that the end-working part is in contact with the plasma, and the other end is connected to an electrode for generating the plasma through an adjustable power supply, the potential of the wire to the plasma is changed, and important parameters such as the temperature and density of the plasma can be determined according to the boltzmann relationship of charged particles under the action of a repulsive field, and such a wire is called a langmuir probe.

referring to fig. 1 and 2, the sliding inner housing 2 is a cylinder with a bottom, and the probe 1 penetrates out of a first end of the sliding inner housing 2 (i.e., the bottom of the sliding inner housing 2). A boss 9 of 5 first end fixed connection of pivot is equipped with the internal thread in the boss 9, and the second end of probe 1 is equipped with the external screw thread with 9 internal thread looks adaptations of boss, and probe 1 second end and 9 threaded connection of boss to realize the fixed connection of probe 1 and pivot 5. The rotating shaft 5 is made of conductive metal.

the limiting outer shell 4 is also a cylinder with a bottom, and the sliding inner shell 2 penetrates out of the first end of the limiting outer shell 4 (namely, the cylinder bottom of the limiting outer shell 4). The limiting shell 4 is connected with the bolt through the fixing hole 8, so that the limiting shell is fixed on a clamp or other supports.

In order to realize that the limiting outer shell 4 limits the sliding inner shell 2 to rotate around the axial direction, the shape of the sliding inner shell 2 is non-circular, such as oval, cuboid and the like, and the inner cavity of the limiting outer shell 4 is matched with the shape of the sliding inner shell 2, so that the sliding inner shell 2 cannot rotate around the axial direction; and serves as a slide so that the sliding inner case 2 slides in the axial direction. For example, the limiting outer shell 4 and the sliding inner shell 2 are both in a shape of a cuboid, so that the sliding inner shell 2 cannot rotate but can slide in the axial direction.

The side wall of the sliding inner housing 2 is also threadedly coupled to the outer side wall of the rotating shaft 5, and the internal thread of the sliding inner housing 2 and the external thread of the rotating shaft 5 should be large pitch threads facilitating relative movement.

The rotating shaft 5 is connected with the motor through a coupler, and under the limitation of the coupler, the rotating shaft 5 cannot move along the axial direction and can only rotate under the driving of the motor.

in the embodiment, the probe 1 is connected with the rotating shaft 5, and the limiting outer shell 4 limits the sliding inner shell 2 to axially rotate, so that the sliding inner shell 2 is driven to axially slide under the rotation of the rotating shaft 5, and the length of the probe 1 (the length of the probe 1 exposed in a plasma environment, namely the length of the probe 1 extending out of the sliding inner shell 2) is changed by sliding the limiting outer shell 4 under the condition that the position of the probe 1 is not changed; the present embodiment ensures the accuracy of the position of the probe 1, ensures the spatial accuracy, and does not cause interference with the flow field generated by the electric thruster 10.

Optionally, the outer side wall of the sliding inner shell 2 is provided with a limiting protrusion, and the inner wall of the limiting outer shell 4 is provided with a limiting groove 7 matched with the limiting protrusion along the axial direction.

Specifically, the rotating shaft 5 is cylindrical, and the limiting protrusions are arranged on two sides of the top end of the rotating shaft 5. Correspondingly, as shown in fig. 3, 4 and 5, the limiting grooves 7 on the inner wall of the limiting shell 4 along the axial direction are arranged on two sides of the corresponding positions of the two limiting protrusions, and the limiting protrusions are matched with the limiting grooves 7 in shape.

This embodiment sets up spacing arch through setting up at 2 lateral walls of slip inner shell, sets up spacing recess 7 along the axial in the inside of spacing shell 4, has realized spacing to slip inner shell 2 for slip inner shell 2 can not rotate around the axial, has ensured under the drive of pivot 5, and slip inner shell 2 is along endwise slip.

optionally, the device further comprises a return spring 3, a first end of the return spring 3 is connected with the sliding inner shell 2, and a second end of the return spring 3 is connected with the rotating shaft 5.

Specifically, referring to fig. 1, the return spring 3 is sleeved at the second end of the probe 1 and is located in a cavity formed by the rotating shaft 5 and the sliding inner shell 2; the return spring 3 serves to return the sliding inner housing 2. When the first end of the rotating shaft 5 is connected with the boss 9, the second end of the return spring 3 is fixedly connected with the boss 9.

The embodiment realizes the resetting of the sliding inner shell 2 through the resetting spring 3.

Optionally, the device further comprises a motor, and an output end of the motor is connected with the rotating shaft 5.

Specifically, the motor is connected with the rotating shaft 5 through a coupler, and the coupler ensures that the rotating shaft 5 cannot move along the axial direction when transmitting the power generated by the motor. In order to avoid influencing the measuring result, the coupler is made of ceramics.

This embodiment passes through motor drive pivot 5 and rotates, compares in manual rotation pivot 5, can ensure that pivot 5 only rotates and does not change the position, and then guarantees not changing with the position of the probe 1 that pivot 5 is connected.

optionally, a stop protrusion of the sliding inner shell 2 is located at the second end of the sliding inner shell 2.

Specifically, as shown in fig. 1, a stopper protrusion of the sliding inner case 2 is provided at the second end of the sliding inner case 2. Spacing arch only sets up the one end at slip inner shell 2, ensures like this that spacing shell 4 plays spacing effect simultaneously, reduces the area of contact of slip inner shell 2 with spacing shell 4, improves the slidability of slip inner shell 2.

Optionally, the limiting outer shell 4 and the sliding inner shell 2 are made of ceramic materials.

Specifically, the ceramic has characteristics of high temperature resistance and small thermal deformation amount at high temperature. The inner sliding inner shell 2 is non-conductive and hard ceramic, so that the probe 1 can be placed to vibrate under the aerodynamic force of the plume, and the position of the probe 1 is stable; the outer confinement shell 4 isolates most of the plasma outside and can accommodate wires connecting the spindle 5. Spacing shell 4 and slip inner shell 2 adopt ceramic material to shield external electron and ion to must guarantee during the installation between slip inner shell 2 and the spacing shell 4, the leakproofness between spacing shell 4 and the probe 1, avoid external electron, ion to get into the Langmuir probe, adsorbed by electrically conductive pivot 5 (metal bolt), influence measuring result.

optionally, the probe 1 is made of tungsten or molybdenum, and the rotating shaft 5 is a conductive bolt.

Specifically, the probe 1 of the present embodiment is integrally machined by using two cylindrical tungsten rods. After the tungsten rod is thermally deformed, the gap between the tungsten rod and the sliding inner shell 2 is reduced, which is helpful for protecting the first end of the tungsten rod and preventing the first end of the tungsten rod from contacting plasma. The rotating shaft 5 has a conductive function and is made of high-conductivity metal such as red copper.

One possible assembly method for the langmuir probe of this example is: the first end of the probe 1 penetrates through the first end of the sliding inner shell 2, the second end of the probe 1 penetrates through the reset spring 3 and then is in threaded connection with the boss 9 of the rotating shaft 5, and the reset spring 3 is tightly pressed by the sliding inner shell 2; and then the limiting bulge of the sliding inner shell 2 is matched with the limiting groove 7 of the limiting outer shell 4, and the sliding inner shell 2 is sleeved in the limiting outer shell 4.

the working principle of the langmuir probe of this example is: the ceramic sliding inner shell 2 and the limiting outer shell 4 shield external plasma, the limiting outer shell 4 is fixed and limits the sliding inner shell 2 to rotate around the axial direction, and the limiting outer shell 4 is in threaded fit with the rotating shaft 5; under the drive and the fixing of motor, pivot 5 only rotates around the axle, drives the slip inner shell 2 and slides along the axial, realizes that probe 1 position is fixed and expose the probe 1 length change in plasma, realizes the shrink and stretch out of probe 1 promptly. The probe 1 is shown in the retracted and extended states in fig. 4 and 5.

the langmuir probe provided by this embodiment has at least the following advantages:

The probe 1 can be stretched without replacing the probe 1, so that the consistency in the experimental process is ensured, and the stability of measurement is ensured; when the probe 1 stretches, the position of the probe 1 is kept unchanged, so that the measuring accuracy is ensured; the probe 1 is connected with the rotating shaft 5 through threads, so that the probe is convenient to disassemble and replace, and the detection requirements of probes 1 with different diameters can be met; the probe 1 can be electrically insulated from the external plasma environment and the supporting structure, the resistance of the probe 1 is small, and the influence on the measurement result is reduced.

Referring to fig. 6, the present embodiment also provides a langmuir probe detection system, including the langmuir probe according to any of the previous embodiments, the electric thruster 10, the scanning power supply 11, the data acquisition module 12, and the data processing module 13; the langmuir probe is located in the vacuum plume formed by the electric thruster 10, the langmuir probe is respectively connected with the scanning power supply 11 and the data acquisition module 12, and the data acquisition module 12 is connected with the data processing module 13.

Optionally, a brush 6 is further included, and the brush 6 is connected between the rotating shaft 5 and the scanning power supply 11.

Specifically, the rotating shaft 5 of the langmuir probe is connected to the scanning power supply 11 and the data acquisition module 12, respectively, and the current flows through the probe 1, the rotating shaft 5, and the brush 6 and then enters the data acquisition module 12.

the electric brush 6 is used for realizing the circuit connection of the movable parts (the probe 1 and the rotating shaft 5) with the data acquisition module 12 and the scanning power supply 11, and the phenomena of interference, looseness, welding failure and the like caused by the direct connection of metal wires are avoided.

Referring to fig. 7, the present embodiment also provides a langmuir probe detection method, including the steps of:

S100, igniting and spraying plasma by the electric thruster 10 to form a plume;

S200, a scanning power supply 11 provides scanning voltage for the Langmuir probe, the probe 1 receives electrons or ions in the plume, and the electrons or ions enter a sheath layer of the probe 1 and are collected to form current flowing through the probe 1; the data acquisition module 12 respectively acquires the current flowing through the probe 1 and the voltage at two ends of the probe 1, and sends the current and the voltage to the data processing module 13;

s300, rotating the rotating shaft 5, changing the length of the probe 1 penetrating out of the sliding inner shell 2, and repeating the steps to measure the current and the voltage of the probe 1 penetrating out of the sliding inner shell 2 at different lengths;

S400, the data processing module 13 obtains volt-ampere characteristic curves of the probe 1 penetrating out of the sliding inner shell 2 under different lengths according to the collected current and voltage;

And S500, calculating plume parameters according to the volt-ampere characteristic curve.

specifically, after scanning is finished, and the length of one type of probe 1 penetrating out is measured, the motor is connected with electricity to drive the coupler to work, the sliding inner shell 2 is pushed to move, the extending length of the probe 1 is changed, and the step S200 is repeated to obtain volt-ampere characteristic curves under different lengths of the probe 1 (the length of the extending sliding inner shell 2). The plume parameters include electron number density and electron temperature.

in summary, the embodiment of the present invention provides a langmuir probe, a langmuir probe detection system, and a langmuir probe detection method, which achieve the telescopic motion of the probe 1; when the probe 1 is contracted or extended, the position of the needle point is ensured to be unchanged; supporting the replacement of tungsten rod probes 1 with different diameters, and adapting to the measurement requirement; except the probe 1, all the components are under the protection of ceramics; the connection of the moving parts (probe 1 and shaft 5) to the external measuring circuit of probe 1 is achieved by means of brushes 6.

The above description is only for the specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.