阅读说明：本技术 一种可在线观测的真空检漏仪 (Vacuum leak detector capable of realizing online observation ) 是由 廖洪钢 于 2019-09-30 设计创作，主要内容包括：本发明公开了一种可在线观测的真空检漏仪,包括：机体、样品座部件、抽真空装置、检测机构和同轴光调节器；样品座部件设于所述机体顶部；抽真空装置设于所述机体内侧；检测机构设于机体顶部；同轴光调节器设于检测机构左侧,用于调节所述检测机构拍摄时光线的明亮度。本发明可在线观测样品杆/样品在真空中是否有泄漏、破损等缺陷,进行预抽真空,实现事先防止异常样品杆/样品进入电镜中,避免污染电镜环境。(the invention discloses a vacuum leak detector capable of on-line observation, which comprises: the device comprises a machine body, a sample base part, a vacuumizing device, a detection mechanism and a coaxial light regulator; the sample seat part is arranged at the top of the machine body; the vacuumizing device is arranged on the inner side of the machine body; the detection mechanism is arranged at the top of the machine body; the coaxial light adjuster is arranged on the left side of the detection mechanism and used for adjusting the brightness of light rays when the detection mechanism shoots. The invention can online observe whether the sample rod/sample has the defects of leakage, damage and the like in vacuum, pre-vacuumize, prevent abnormal sample rod/sample from entering the electron microscope in advance and avoid polluting the environment of the electron microscope.)

1. an on-line observable vacuum leak detector, comprising:

a body;

the sample seat component is arranged at the top of the machine body and is used for accommodating a transmission electron microscope sample rod;

A vacuum pumping device; the sample holder component is arranged on the inner side of the machine body, is connected with the sample holder component and is used for vacuumizing the sub-sample holder component;

the detection mechanism is arranged at the top of the machine body and is used for detecting, shooting and detecting the sample rod on the inner side of the sample seat component; and

And the coaxial light adjuster is arranged on the left side of the detection mechanism and used for adjusting the brightness of light rays when the detection mechanism shoots.

2. an on-line observable vacuum leak detector as defined in claim 1, wherein: the sample holder component comprises a cannula and a plunger seat component; the insertion pipe is fixedly connected with the inserted rod seat component.

3. An on-line observable vacuum leak detector as defined in claim 2, wherein: the rod socket assembly comprises a socket, a first light-transmitting element, a second light-transmitting element, a first end cover and a second end cover; the first light-transmitting element is fixedly connected with the socket through a first end cover, and the second light-transmitting element is fixedly connected with the socket through a second end cover.

4. An on-line observable vacuum leak detector as defined in claim 3, wherein: and a frosted surface is arranged on one surface of the second light-transmitting element and used for enhancing the diffuse reflection of the bottom lamp.

5. an on-line observable vacuum leak detector as defined in claim 1, wherein: the detection mechanism comprises a microscope lens element, a shooting element, an adjusting mechanism and a display; one end of the adjusting mechanism is fixedly connected with the display, and the other end of the adjusting mechanism is connected with the microscope lens element and used for accurately observing a specific area of the sample and expanding the observation area of the sample; the microscope lens element and the shooting element are coaxially arranged and used for shooting and imaging.

6. An on-line observable vacuum leak detector as defined in claim 5, wherein: the adjusting mechanism comprises a lens cone fixing table, a microscope lifting table, a front-back moving part, a left-right moving part and a screw adjusting handle; the left-right moving part is fixedly arranged on the microscope lifting platform and is connected with the left-right moving part in a sliding manner; the lens cone fixing table is arranged on the front-back moving part; the screw adjusting handles are provided with two screw adjusting handles, one screw adjusting handle is connected with the front-back moving part, and the other screw adjusting handle is connected with the left-right moving part.

7. an on-line observable vacuum leak detector as defined in claim 1, wherein: the vacuum pumping device comprises a support frame, a molecular pump, a vacuum gauge and a tee joint; the molecular pump is arranged above the support frame; the tee joint is arranged at the air inlet end of the molecular pump; the vacuum gauge is fixedly arranged on the tee joint.

8. An on-line observable vacuum leak detector as defined in claim 7, wherein: the supporting frame is provided with a damping mechanism, and the damping mechanism is an annular damping pad.

9. an on-line observable vacuum leak detector as defined in claim 5, wherein: the microscope lens element adopts a high-low power microscope, and the magnification range of the microscope lens element is 50-800 times; the high-low power microscope coaxial light can be adjusted.

Technical Field

The invention belongs to the field of vacuum fittings of transmission electron microscopes, and particularly relates to a vacuum leak detector capable of realizing online observation.

Background

the transmission electron microscope is used as a microscopic observation device, and can directly utilize the material performance of the surface material of a sample to carry out microscopic imaging so as to observe the advantages of the microstructure of the uneven surface of various samples. The sample rod of the sample carrier is matched with an in-situ detection chip, so that the resolution can reach the atomic level. Researchers can capture the dynamic induction of the sample to the environment through an in-situ technology, and important information such as the size, the shape, the crystal structure change and the like is included.

However, the transmission electron microscope has extremely high requirements on the sample rod when in use, and the sample stage and the in-situ detection chip are required to have high cleanliness, no damage, no leakage, no moisture, no dust and other attachments. If pollution, damage and the like exist in the detection, the detection environment of the transmission electron microscope is influenced, damage is caused, the service life is seriously influenced, and the observation effect is also influenced.

Disclosure of Invention

the invention aims to provide a vacuum leak detector capable of online observation, which has the advantages of high vacuumizing speed, accurate sample observation, capability of matching with a transmission electron microscope sample rod for detection, reduction of pollution of the sample rod to a transmission electron microscope, improvement of observation precision and the like.

In order to achieve the above object, the present invention provides an online observable vacuum leak detector, comprising:

The heat dissipation device comprises a machine body, wherein heat dissipation holes are formed in two sides of the machine body and used for timely discharging heat inside the machine body, the service life is prolonged, pulleys are arranged at the bottom of the machine body and used for facilitating moving of equipment, and a control panel is arranged at the top of the machine body and used for controlling the operation of the equipment;

the sample seat component is arranged at the top of the machine body and is used for accommodating a transmission electron microscope sample rod;

A vacuum pumping device; the sample holder component is arranged on the inner side of the machine body, is connected with the sample holder component and is used for vacuumizing the sub-sample holder component;

A detection mechanism arranged at the top of the machine body and used for detecting, shooting and detecting the sample rod at the inner side of the sample seat component, an

And the coaxial light adjuster is arranged on the left side of the detection mechanism and used for adjusting the brightness of light rays when the detection mechanism shoots.

In one embodiment, the sample holder assembly comprises a cannula and a plunger holder assembly; the insertion pipe is fixedly connected with the inserted rod seat component.

In one embodiment, the jack assembly includes a jack, a first optically transparent member, a second optically transparent member, a first end cap and a second end cap; the first light-transmitting element is fixedly connected with the socket through a first end cover, and the second light-transmitting element is fixedly connected with the socket through a second end cover.

In one embodiment, a frosted surface is arranged on one surface of the second light-transmitting element for enhancing the diffuse reflection of the bottom lamp.

In one embodiment, a damping mechanism is arranged on the supporting frame, and the damping mechanism is an annular damping pad.

In one embodiment, the microscope lens element adopts a high-low power microscope, and the magnification range of the microscope lens element is 50-800 times; the high-low power microscope coaxial light can be adjusted.

In one embodiment, the detection mechanism comprises a microscope lens element, a photographing element, an adjustment mechanism and a display; one end of the adjusting mechanism is fixedly connected with the display, and the other end of the adjusting mechanism is connected with the microscope lens element; the microscope lens element and the shooting element are coaxially arranged.

in one embodiment, the adjusting mechanism comprises a lens cone fixing table, a microscope lifting table, a front-back moving part, a left-right moving part and a screw adjusting handle; the left-right moving part is fixedly arranged on the microscope lifting platform and is connected with the left-right moving part in a sliding manner; the lens cone fixing table is arranged on the front-back moving part; the screw adjusting handles are provided with two screw adjusting handles, one screw adjusting handle is connected with the front-back moving part, and the other screw adjusting handle is connected with the left-right moving part.

In one embodiment, the vacuum pumping device comprises a support frame, a molecular pump, a vacuum gauge and a tee joint; the molecular pump is arranged above the support frame; the tee joint is arranged at the air inlet end of the molecular pump; the vacuum gauge is fixedly arranged on the tee joint.

Compared with the prior art, the invention has the following beneficial effects:

(1) The invention can be suitable for the vacuum pumping test of sample rods of TFS/FEI, JEOL, Hitachi electron microscope and other types, the vacuum pumping speed is high, and the vacuum pumping speed can reach 6.3E-5hPa within 3 minutes;

(2) Whether the sample rod/sample has the defects of leakage, damage and the like in vacuum or not is observed on line by arranging a high-low power microscope, so that the abnormal sample rod/sample can be prevented from entering the electron microscope in advance, and the environment of the electron microscope is prevented from being polluted;

(3) By arranging the damping mechanism, the vibration from the molecular pump can be greatly reduced, the display observation effect of the sample is improved, and the service life is prolonged;

(4) the specific area of the sample can be accurately observed and the observation area of the sample can be enlarged by arranging the position adjusting mechanism;

(5) The coaxial light of the high-low power microscope is adjustable, and the LED bottom light is arranged, so that the detection of a sample is facilitated.

Drawings

FIG. 1 is a schematic three-dimensional structure of an embodiment of the present invention;

FIG. 2 is a cross-sectional view of a sample holder assembly according to an embodiment of the invention;

FIG. 3 is an enlarged view of part A;

FIG. 4 is a schematic structural diagram of an adjusting mechanism according to an embodiment of the present invention;

reference numerals: the microscope comprises a machine body 1, a sample holder part 2, a vacuum extractor 3, a detection mechanism 4, a coaxial light regulator 5, a light source 6, a heat dissipation hole 11, a pulley 12 control panel 13, an insertion tube 21, a plunger holder assembly 22, a support frame 31, a molecular pump 32, a vacuum gauge 33, a tee joint 34, a microscope lens element 41, a shooting element 42, an adjusting mechanism 43, a display 44, a socket 221, a first light transmission element 222, a second light transmission element 223, a first end cover 224, a second end cover 225, a lens barrel fixing table 431, a microscope lifting table 432, a front-back moving part 433, a left-right moving part 434 and a screw adjusting handle 435.

Detailed Description

In order to make the technical solutions of the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

The present invention provides an on-line observable vacuum leak detector, as shown in fig. 1, for achieving the above objects, the on-line observable vacuum leak detector comprising:

The machine body 1 is provided with heat dissipation holes 11 at two sides, the heat dissipation holes 11 are fixedly arranged on the axial flow fan and used for timely discharging heat generated by electronic elements inside the machine body 1 during working out of the machine body to enable the electronic elements to work in a constant temperature environment, the service life is prolonged, in addition, the bottom of the machine body 1 is also provided with pulleys 12, the whole equipment can be shifted as long as the machine body 1 is slightly pushed when shifting is needed, and the top of the machine body 1 is provided with a control panel 13 for controlling the operation of the equipment;

the sample base part 2 is arranged at the top of the machine body 1 and is used for accommodating a transmission electron microscope sample rod to be detected;

The vacuumizing device 3 is arranged on the inner side of the machine body 1, an air inlet of the vacuumizing device 3 is connected with the sample base part 2 and used for vacuumizing the sub-sample base part 2, and the vacuumizing device 3 is in circuit connection with the control panel 13;

a detection mechanism 4 arranged at the top of the machine body 1 and positioned at the rear side of the vacuumizing device 3 and used for shooting, detecting and displaying the sample rod at the inner side of the sample seat part 2, and

A coaxial light adjuster 5 (the structure and connection relationship of which are well known to those skilled in the art and will not be described in detail herein) is disposed at the left side of the detecting mechanism 4 for adjusting the brightness of the light when the detecting mechanism 4 shoots.

By adopting the technical scheme, when a chip is carried on a sample rod observed by a transmission electron microscope, the sample rod is firstly inserted into the sample seat part 2, the vacuumizing device 3 is started to vacuumize the sample seat part 2, then the detection mechanism 4 is adjusted to enable the adjustment mechanism 4 to be positioned right above the chip on the sample rod, then the coaxial light regulator 5 is adjusted to enable the sample rod at the inner side of the sample seat part 2 to be positioned in an optimal light source environment, finally, shooting imaging is carried out through the detection mechanism 4, whether the sample rod is polluted, damaged or attached with pollutants and the like is judged, the whole sample rod is taken out and placed into the transmission electron microscope for observation after judging that the whole sample rod has high cleanliness, no damage and leakage, no moisture, no dust and the like are attached, so that the abnormal sample rod/sample can be effectively prevented from entering the electron microscope in advance, the pollution to the environment of the electron microscope is avoided, the display observation effect of the sample is improved, and the service life is prolonged. The sample holder part 2, the vacuum extractor 3, and the detection mechanism 4 will be described in detail below.

as shown in fig. 2, the sample holder assembly 2 comprises a cannula 21 and a plunger assembly 22, wherein the cannula 21 and the plunger assembly 22 are fixedly connected directly through a fastener, and a seal is provided at the contact part for preventing air leakage when vacuum is pumped. Furthermore, the rod socket assembly 22 includes a socket 221, a first light-transmitting element 222, a second light-transmitting element 223 (one of the surfaces is a frosted surface for increasing diffuse reflection light), a first end cap 224 and a second end cap 225, the first light-transmitting element 222 is fixedly connected with the socket 221 through the first end cap 224, the second light-transmitting element 223 is fixedly connected with the socket 221 through the second end cap 225, wherein a joint surface of the first light-transmitting element 222 and the socket 221, and a joint surface of the second light-transmitting element 223 and the socket 221 are respectively provided with a second sealing through for sealing, and when in use, the first end cap 224 and the second end cap 225 are locked to press the deformation of the sealing ring for sealing. In the present embodiment, the first transparent element 222 and the second transparent element 223 are limited to be made of transparent tempered glass, so that it can be ensured that no crack occurs during vacuum pumping. In addition, an LED bottom lamp light source 6 is arranged below the second transmission element in the using process, the LED bottom lamp light source 6 is sleeved on a through hole formed in the second end cover 225, the installation with a source is convenient, the LED lamp is selected as the light source, the light emitted by the LED lamp can enable the whole detection environment to be in a brighter shooting environment, and therefore sufficient illumination environment is provided for detection of the detection mechanism 4, if the brightness needs to be adjusted, the brightness of the light emitted by the light source can be adjusted by adjusting the coaxial light adjuster 5.

Referring back to fig. 1 and fig. 3, in the present embodiment, the detecting mechanism 4 includes a microscope lens element 41, a shooting element 42, an adjusting mechanism 43 and a display 44; the adjusting mechanism 43 for adjusting the shooting position has one end fixedly connected with the display 44, and can adjust the height in the vertical direction by screwing when in use, and the other end connected with the microscope lens element 41, and the microscope lens element 41 and the shooting element 42 are coaxially arranged. In the present embodiment, the imaging element 42 preferably performs imaging using a digital video camera. Specifically, when the imaging is required, the height in the vertical direction is adjusted, and then the horizontal front, rear, left, and right positions are adjusted by the adjustment mechanism 43, so that the environment imaged by the imaging element 42 is an optimal position.

as shown in fig. 4, the adjusting mechanism 43 includes a barrel fixing stage 431, a microscope elevating stage 432, a front-rear moving member 433, a left-right moving member 434, and a screw adjusting knob; the left-right moving part 434 is fixedly arranged on the microscope lifting table 432 and can reciprocate back and forth under the action of external force, the front-back moving part 433 is connected with the left-right moving part 434 in a sliding manner and can reciprocate back and forth along the left-right moving part 434, the lens barrel fixing table 431 is arranged on the front-back moving part 433 and is used for driving the lens barrel fixing table 431 to displace, and the displacement realizes high-precision displacement, in the embodiment, dovetail grooves are adopted, so that enough strength and accurate displacement can be ensured, in addition, in the embodiment, two screw adjusting handles 435 are arranged, one screw adjusting handle is connected with the front-back moving part 433 and is used for controlling the displacement distance of the front-back moving part 433, the other screw adjusting handle is connected with the left-right moving part 434 and is used for controlling the displacement distance of, and then the actions of the front-back moving part 433 and the left-right moving part 434 can be adjusted to adjust the detection mechanism 4 to a proper position so that the shooting element 42 can obtain a complete chip picture.

Referring back to fig. 1, the vacuum pumping device 3 includes a support frame 31, a molecular pump 32, a vacuum gauge 33 and a tee joint 34; the molecular pump 32 (preferably a turbo molecular pump) is arranged above the support frame 31, the tee 34 is arranged at the air inlet end of the molecular pump 31, and the adjacent rod inserting seat assemblies 22 are in quick connection; the vacuum gauge 33 is connected to the tee by a snap. During specific use, the other end of the tee joint is connected with the inserting rod seat assembly 22 through the corrugated pipe, a complete gas circuit is formed, then the molecular pump 32 is started to vacuumize, the vacuum gauge 33 always works in the whole vacuumizing process, the vacuumizing condition is monitored, in addition, the influence brought by vibration is reduced in the working process, the support frame 31 in the embodiment is additionally provided with the multiple groups of annular shock absorption pads 311, the vibration brought by the molecular pump 32 can be effectively reduced through the annular shock absorption pads 311 on the setting layer, the display observation effect of a sample is improved, and the service life is prolonged.

Further, in this embodiment, the microscope lens element 41 employs a high-low power microscope, and the magnification range is 50-800 times; in addition, the high-low power microscope coaxial light can be adjusted.

the use principle of the invention is as follows: inserting a transmission electron microscope sample rod to be detected along the insertion tube 21, enabling the chip part of the sample rod to be positioned in the middle of the insertion rod seat component 22, and adjusting the coaxial light adjuster 5 to enable light rays with certain brightness to irradiate and penetrate through the insertion rod seat component 22; before the sample rod is detected, the interior of the plunger seat assembly 22 needs to be vacuumized, so that the interior of the plunger seat assembly 22 meets the detection requirement; the detection mechanism 4 is operated, the microscope lens element 41 is used for magnifying the product below the first light-transmitting element 222, the shooting element 42 shoots the content displayed by the microscope lens element 41 and transmits the shot image to the display 44, the chip image displayed by the display 44 is compared with the system picture, and whether the chip is polluted, damaged or leaked or not is judged.

In conclusion, the invention can be applied to the vacuum pumping test of TFS/FEI, JEOL, Hitachi electron microscope and other types of sample rods, the vacuum pumping speed is high, and the vacuum pumping speed can reach 6.3E-5hPa within 3 minutes; and whether the sample rod/sample has the defects of leakage, damage and the like in vacuum or not is observed on line, so that the abnormal sample rod/sample can be prevented from entering the electron microscope in advance, and the environment of the electron microscope is prevented from being polluted.

finally, it should be noted that the above-mentioned embodiments are only used for illustrating the technical solutions of the present invention and not for limiting the same, and although the present invention is described in detail with reference to the above-mentioned embodiments, it should be understood by those skilled in the art that the modifications and equivalents of the specific embodiments of the present invention can be made by those skilled in the art after reading the present specification, but these modifications and variations do not depart from the scope of the claims of the present application.