阅读说明：本技术 一种基于mems的雪花型单刀五掷开关 (Snowflake type single-pole five-throw switch based on MEMS ) 是由 吴倩楠 范丽娜 李孟委 *** 王姗姗 韩路路 于 2019-10-23 设计创作，主要内容包括：本发明属于单刀五掷开关技术领域,具体涉及一种基于MEMS的雪花型单刀五掷开关,包括衬底、输入信号线和输出信号线,所述输入信号线和输出信号线固定在衬底上,所述输入信号线有一条,所述输出信号线有五条,所述输入信号线与输出信号线连接,每条输出信号线上均设有开关。本发明的结构设计简单对称,体积较小,触点采用双触点结构,相较于单触点而言,双触点的有效接触面积大一点,提高了开关下拉时与触点接触的可靠性,当静电力作用于开关上电极时,双触点结构可以减小开关下拉带来的冲击力,作为缓冲,并有效的降低上电极和触点的形变程度,也大大提高了开关的寿命。本发明用于微波信号的选通切换。(The invention belongs to the technical field of single-pole five-throw switches, and particularly relates to a snowflake type single-pole five-throw switch based on an MEMS (micro electro mechanical system). The double-contact structure has simple and symmetrical structural design and small volume, adopts the double-contact structure, has larger effective contact area compared with a single contact, improves the reliability of contact with the contact when the switch is pulled down, can reduce the impact force caused by the pull-down of the switch when electrostatic force acts on the upper electrode of the switch, is used as a buffer, effectively reduces the deformation degree of the upper electrode and the contact, and greatly prolongs the service life of the switch. The invention is used for gating and switching the microwave signals.)

1. The utility model provides a snowflake type single-pole five-throw switch based on MEMS which characterized in that: the novel LED display panel is characterized by comprising a substrate (1), input signal lines (2) and output signal lines (3), wherein the input signal lines (2) and the output signal lines (3) are fixed on the substrate (1), one input signal line (2) is provided, five output signal lines (3) are provided, the input signal line (2) is connected with the output signal lines (3), and each output signal line (3) is provided with a switch.

2. The MEMS-based snowflake single-pole five-throw switch of claim 1, wherein: the switch includes drive electrode (4), lead wire (5), fixed anchor point (6), contact, upper electrode (9), bottom electrode (10), the one end of upper electrode (9) is fixed on output signal line (3) through fixed anchor point (6), the one end of bottom electrode (10) is fixed with the contact, the other end setting of upper electrode (9) is directly over the contact, the other end of bottom electrode (10) is fixed on output signal line (3).

3. The MEMS-based snowflake single-pole five-throw switch of claim 2, wherein: the contacts comprise a first contact (7) and a second contact (8), and the first contact (7) and the second contact (8) are fixed on the lower electrode (10).

4. The MEMS-based snowflake single-pole five-throw switch of claim 2, wherein: the upper electrode (9) adopts an H-shaped structure.

5. The MEMS-based snowflake single-pole five-throw switch of claim 2, wherein: and a driving electrode (4) is arranged right below the middle part of the upper electrode (9), the driving electrode (4) is fixed on the substrate (1), and the driving electrode (4) is connected with a lead (5).

6. A MEMS-based snowflake single pole five throw switch as defined by claims 1, 2 and 5 wherein: the surface of the substrate (1) is provided with ground wires (11), and the ground wires (11) are scattered around the input signal wires (2), the output signal wires (3) and the lead wires (5).

7. the MEMS-based snowflake single-pole five-throw switch of claim 2, wherein: the substrate (1) is made of high-resistance silicon or glass.

8. The MEMS-based snowflake single-pole five-throw switch of claim 1, wherein: the input signal line (2) and the five output signal lines (3) are distributed in a snowflake shape.

Technical Field

the invention belongs to the technical field of single-pole five-throw switches, and particularly relates to a snowflake type single-pole five-throw switch based on an MEMS.

background

The radio frequency MEMS technology is an advanced manufacturing technology developed on the basis of semiconductors, silicon is used as a main material, mechanical and electrical properties are excellent, and MEMS devices are characterized by small volume, light weight and low energy consumption, are convenient for integration and batch production, can complete tasks which cannot be completed by large-size electromechanical systems, can be embedded into the large-size systems, and improve automation, intellectualization and reliability levels to a new level. Has very wide application prospect in almost all fields contacted by people.

The MEMS switch is an important device in radio frequency MEMS devices, a PIN diode is adopted in a traditional single-pole five-throw switch, and the number of tube cores of the PIN diode of the traditional single-pole five-throw switch is large, so that the PIN diode needs to be welded by a skilled bonding process, and the PIN diode is inconvenient to maintain. For example, the limited liability company of microwave technology in gulf of Sichuan discloses an LC resonance type single-pole five-throw microwave switch (application number: CN 107819174A), which adopts PIN diodes connected in parallel with an LC series filter circuit, two PIN diodes connected in series and in opposite directions, and a drive control circuit connected with the input ends of the two PIN diodes. However, the five-throw switch has many components, poor index, large insertion loss and complex microwave circuit and control circuit. In order to solve the defects of multiple components, large insertion loss and large volume of the single-pole five-throw switch, the MEMS switch is manufactured by adopting the MEMS technology, has the advantages of small insertion loss, low power consumption, small volume, good linearity and the like, and becomes an ideal device capable of replacing the traditional switch in the fields of wireless communication, test instruments, phased array radars and the like.

disclosure of Invention

Aiming at the technical problems, the snowflake type single-pole five-throw switch based on the MEMS is simple in structure, small in size and high in practicability.

In order to solve the technical problems, the invention adopts the technical scheme that:

The snowflake type single-pole five-throw switch based on the MEMS comprises a substrate, an input signal line and output signal lines, wherein the input signal line and the output signal lines are fixed on the substrate, one input signal line is arranged, five output signal lines are arranged, the input signal line is connected with the output signal lines, and each output signal line is provided with a switch.

The switch comprises a driving electrode, a lead, a fixed anchor point, a contact, an upper electrode and a lower electrode, wherein one end of the upper electrode is fixed on an output signal line through the fixed anchor point, one end of the lower electrode is fixed with the contact, the other end of the upper electrode is arranged right above the contact, and the other end of the lower electrode is fixed on the output signal line.

The contacts include a first contact and a second contact, which are fixed on the lower electrode.

The upper electrode adopts an H-shaped structure.

and a driving electrode is arranged right below the middle part of the upper electrode, the driving electrode is fixed on the substrate, and the driving electrode is connected with a lead.

The surface of the substrate is provided with ground wires which are scattered around the input signal wires, the output signal wires and the lead wires.

The substrate is made of high-resistance silicon or glass.

The input signal line and the five output signal lines are distributed in a snowflake shape.

Compared with the prior art, the invention has the following beneficial effects:

The upper electrode of the microwave signal processing circuit adopts an H-shaped structure, the contact is arranged on the lower electrode, the upper electrode of the corresponding switch is pulled down under the driving of the driving electrode under the driving of the H-shaped upper electrode, and the switch is conducted, so that the gating switching of the microwave signal can be realized. The double-contact structure has simple and symmetrical structural design and small volume, adopts the double-contact structure, has larger effective contact area compared with a single contact, improves the reliability of contact with the contact when the switch is pulled down, can reduce the impact force caused by the pull-down of the switch when electrostatic force acts on the upper electrode of the switch, is used as a buffer, effectively reduces the deformation degree of the upper electrode and the contact, and greatly prolongs the service life of the switch.

drawings

FIG. 1 is a schematic view of the overall structure of the present invention;

FIG. 2 is a schematic diagram of the overall structure of the switch of the present invention;

FIG. 3 is a schematic structural diagram of the anchor point of the present invention;

FIG. 4 is a schematic diagram of a dual contact configuration according to the present invention;

FIG. 5 is a schematic diagram of the structure of the upper electrode, contact, lower electrode and output line assembly of the present invention;

FIG. 6 is a schematic structural diagram of an H-shaped upper electrode according to the present invention;

FIG. 7 is a schematic diagram of the insertion loss of the second port of the present invention;

FIG. 8 is an isolated schematic view of a sixth port of the present invention with the second port closed;

FIG. 9 is a schematic diagram of the insertion loss of the third port of the present invention;

FIG. 10 is an isolation diagram of the fourth port of the present invention with the third port closed;

FIG. 11 is a schematic diagram of the insertion loss of a fourth port according to the present invention;

FIG. 12 is an isolation diagram of the second port with the fourth port closed according to the present invention;

Wherein: the device comprises a substrate 1, an input signal line 2, an output signal line 3, a driving electrode 4, a lead 5, a fixed anchor point 6, a first contact 7, a second contact 8, an upper electrode 9, a lower electrode 10 and a ground wire 11.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

A snowflake type single-pole five-throw switch based on an MEMS (micro electro mechanical system) comprises a substrate 1, input signal lines 2 and output signal lines 3, wherein the input signal lines 2 and the output signal lines 3 are fixed on the substrate 1, one input signal line 2 is provided, five output signal lines 3 are provided, the input signal lines 2 are connected with the output signal lines 3, and each output signal line 3 is provided with a switch. The driving voltage is applied to the switch, the switch is in a closed state under the action of the electrostatic force, signal gating can be realized, and when the driving voltage is not added to the switch, the switch cannot deform and is in an open state, and signal gating cannot be realized.

further, the switch comprises a driving electrode 4, a lead 5, a fixing anchor 6, a contact, an upper electrode 9 and a lower electrode 10, wherein one end of the upper electrode 9 is fixed on the output signal line 3 through the fixing anchor 6, one end of the lower electrode 10 is fixed with the contact, the other end of the upper electrode 9 is arranged right above the contact, and the other end of the lower electrode 10 is fixed on the output signal line 3.

Further, the contact includes first contact 7 and second contact 8, first contact 7 and second contact 8 are fixed on bottom electrode 10, the effective area of contact of double contact is a little big, the reliability of contact with first contact 7 and second contact 8 when having improved the switch and pulling down, when electrostatic force acts on switch upper electrode 9, the impact force that the double contact structure can reduce the switch and pull down and bring, as the buffering to the deformation degree of effectual reduction upper electrode 9 and contact has also improved the life-span of switch greatly.

further, it is preferable that the upper electrode 9 has an H-shaped structure.

Further, a driving electrode 4 is arranged right below the middle part of the upper electrode 9, the driving electrode 4 is fixed on the substrate 1, the driving electrode 4 is connected with a lead 5, and the driving electrode 4 applies a driving voltage through the lead 5.

Further, it is preferable that the surface of the substrate 1 is provided with ground lines 11, and the ground lines 11 are scattered around the input signal lines 2, the output signal lines 3, and the leads 5.

Further, preferably, the substrate 1 is made of high-resistance silicon or glass, and the high-resistance silicon with low conductivity is selected, so that loss of the radio-frequency signals in the transmission process is reduced, and good low-loss characteristics of the radio-frequency signals in the transmission process are ensured.

furthermore, one input signal line 2 and five output signal lines 3 are distributed in a snowflake shape, and the structure switch is small in insertion loss, simple in structure symmetry and easy to process and manufacture.

The working principle of the invention is as follows: the driving voltage is applied to the driving electrode, the upper electrode is gradually bent downwards to generate deformation under the action of the electrostatic force, the end, out of which the upper electrode is suspended, extends out of the upper electrode and is contacted with the contact, the switch is in a closed state, gating of signals can be realized, when the driving voltage is not added to the driving electrode, the upper electrode cannot generate deformation, the upper electrode is not contacted with the contact and does not form a path, and the switch is in an open state and cannot realize gating of the signals.