阅读说明：本技术 一种干涉式激光波长测量装置及其使用方法 (Interferometric laser wavelength measuring device and using method thereof ) 是由 潘俊涛 张巍巍 张鹏辉 肖岩 于 2019-10-25 设计创作，主要内容包括：本发明涉及一种干涉式激光波长测量装置及其使用方法,包括：已知激光光学组件,用于发射已知激光束并实现干涉测量,得到参考的干涉数据；待测激光光学组件,用于对待测激光束实现干涉测量,并参照已知激光光学组件得到的干涉数据,计算得到待测激光束的波长；第一直角反射镜、与第一直角反射镜平行设置的第二直角反射镜,且第二直角反射镜的反射结构与第一直角反射镜的反射结构相对,所述已知激光光学组件发射的已知激光束和待测激光光学组件发射的待测激光束在第一直角反射镜和第二直角反射镜之间进行多次反射。只要利用一束已知波长的激光束,即可通过本装置得到任何待测激光束的波长,且本装置操作简便,计算得到的待测激光束波长精度也高。(the invention relates to an interference laser wavelength measuring device and a using method thereof, wherein the interference laser wavelength measuring device comprises: the known laser optical assembly is used for emitting a known laser beam and realizing interference measurement to obtain reference interference data; the laser optical assembly to be measured is used for realizing interference measurement on the laser beam to be measured, and calculating to obtain the wavelength of the laser beam to be measured by referring to interference data obtained by a known laser optical assembly; the laser device comprises a first right-angle reflecting mirror and a second right-angle reflecting mirror which is arranged in parallel with the first right-angle reflecting mirror, wherein the reflecting structure of the second right-angle reflecting mirror is opposite to the reflecting structure of the first right-angle reflecting mirror, and a known laser beam emitted by the known laser optical component and a laser beam to be detected emitted by the laser optical component to be detected are reflected for multiple times between the first right-angle reflecting mirror and the second right-angle reflecting mirror. The device can obtain the wavelength of any laser beam to be measured by only utilizing one laser beam with known wavelength, and is simple and convenient to operate, and the calculated wavelength precision of the laser beam to be measured is high.)

1. an interferometric laser wavelength measuring device, characterized by: the method comprises the following steps:

The known laser optical assembly is used for emitting a known laser beam and realizing interference measurement to obtain reference interference data;

The laser optical assembly to be measured is used for realizing interference measurement on the laser beam to be measured, and calculating to obtain the wavelength of the laser beam to be measured by referring to interference data obtained by a known laser optical assembly;

the laser device comprises a first right-angle reflecting mirror and a second right-angle reflecting mirror which is arranged in parallel with the first right-angle reflecting mirror, wherein the reflecting structure of the second right-angle reflecting mirror is opposite to the reflecting structure of the first right-angle reflecting mirror, and a known laser beam emitted by the known laser optical component and a laser beam to be detected emitted by the laser optical component to be detected are reflected for multiple times between the first right-angle reflecting mirror and the second right-angle reflecting mirror.

2. The interferometric laser wavelength measuring device according to claim 1, characterized in that:

the known laser optical assembly comprises:

a known laser source for emitting a known laser beam;

The first spectroscope is used for receiving a known laser source emitted by the known laser source, transmitting the received known laser beam to the first condenser lens and reflecting the received known laser beam to the first right-angle reflecting mirror;

A first condenser lens for receiving the known laser beam transmitted by the first beam splitter and the known laser beam reflected by the second right-angle reflector and transmitting the received known laser beam to the first photodetector;

A first photodetector for receiving the known laser beam transmitted by the first condenser lens;

and the first processor is used for detecting the interference phenomenon generated on the first photoelectric detector and obtaining reference interference data.

3. the interferometric laser wavelength measuring device according to claim 1, characterized in that:

the laser optical component to be measured comprises:

The second spectroscope is used for receiving the laser beam to be detected, transmitting the received laser beam to be detected to the second condenser lens and reflecting the received laser beam to the first right-angle reflecting mirror;

The second condenser lens is used for receiving the laser beam to be detected transmitted by the second beam splitter and the laser beam to be detected reflected by the second right-angle reflector and transmitting the received laser beam to be detected to the second photoelectric detector;

The second photoelectric detector is used for receiving the laser beam to be detected transmitted by the second condenser lens;

and the second processor is used for detecting the interference phenomenon generated on the second photoelectric detector and calculating the wavelength of the laser beam to be detected according to the interference data obtained by the known laser optical component.

4. The interferometric laser wavelength measuring device according to claim 1, characterized in that:

The interference type laser wavelength measuring device is arranged in a shell, the known laser optical component, the laser optical component to be measured and the first right-angle reflector are fixed relative to the shell, and the second right-angle reflector moves in the vertical direction.

5. The interferometric laser wavelength measuring device according to claim 4, characterized in that: and a black light absorption material is arranged in the shell.

6. an interferometric laser wavelength measuring device according to any one of claims 1-5, characterized in that: the second right-angle reflector is connected with a precision displacement device, and the precision displacement device drives the second right-angle reflector to move in the vertical direction.

7. an interferometric laser wavelength measuring device according to any one of claims 1-5, characterized in that: the first right-angle reflecting mirror comprises N groups of reflecting structures, the second right-angle reflecting mirror comprises M groups of reflecting structures, and the reflecting structures contained in the first right-angle reflecting mirror and the second right-angle reflecting mirror are the same.

8. the method of claim 1, wherein the interferometric laser wavelength measuring device comprises: the method specifically comprises the following steps:

Step S1: disposing an interferometric laser wavelength measuring device within the housing;

step S2: starting a known laser source, enabling the known laser source to emit a known laser beam to a first beam splitter, and enabling the first beam splitter to transmit the known laser beam to a first condensing lens and reflect the known laser beam to a first right-angle reflecting mirror; vertically moving the precision displacement device to cause constructive/destructive interference on the first photodetector;

step S3: arranging a laser beam to be detected and a known laser beam in parallel, enabling the laser beam to be detected to be incident to a second beam splitter, enabling the laser beam to be detected to be transmitted to a second condenser lens and reflected to a first right-angle reflector by the second beam splitter, and enabling a second photoelectric detector to generate constructive/destructive interference;

step S4: controlling a precise displacement device to drive a second right-angle reflector to move towards a vertical direction far away from/close to a first right-angle reflector, stopping moving the second right-angle reflector until A times of constructive/destructive interference appears on a first photoelectric detector, recording the number A of times of constructive/destructive interference appearing on the first photoelectric detector by a first processor, and simultaneously recording the number B of times of constructive/destructive interference appearing on a second photoelectric detector by a second processor;

Step S5: and calculating the wavelength lambda' of the laser to be measured according to the constructive interference frequency A recorded by the first processor and appearing on the first photoelectric detector, the constructive interference frequency B recorded by the second processor and appearing on the second photoelectric detector and the wavelength lambda of the known laser beam.

9. The method of claim 8, wherein the interferometric laser wavelength measuring device comprises: the step S1 specifically includes the following steps:

Step S11: fixedly arranging a first right-angle reflecting mirror in a shell;

Step S12: arranging a second right-angle reflecting mirror connected with a precise displacement device and a first right-angle reflecting mirror in parallel in a shell, wherein the reflecting structure of the first right-angle reflecting mirror is arranged opposite to the reflecting structure of the second right-angle reflecting mirror;

Step S13: the known laser source is arranged in the shell, so that a known laser beam emitted by the known laser source and a laser beam to be measured are both parallel to the horizontal direction of the first right-angle reflecting mirror and the second right-angle reflecting mirror;

step S14: fixedly arranging a first spectroscope and a second spectroscope in a shell, wherein the first spectroscope is inclined by 45 degrees relative to a known laser beam path emitted by a known laser source, and the second spectroscope is arranged in parallel with the first spectroscope;

step S15: arranging a first condenser lens and a first photoelectric detector in a shell, so that a known laser beam reflected by the last group of reflecting structures of the second right-angle reflecting mirror and a known laser beam transmitted by the first beam splitter fall on the first photoelectric detector; and the second condenser lens and the second photoelectric detector are arranged in the shell, so that the laser beam to be detected reflected by the last group of reflecting structures of the second right-angle reflector and the laser beam to be detected transmitted by the second beam splitter can fall on the second photoelectric detector.

Technical Field

The invention relates to the technical field of measuring instruments, in particular to an interference type laser wavelength measuring device and a using method thereof.

Background

The measurement precision of the laser interferometer is directly related to the precision of the laser wavelength, the traditional measurement of the laser with unknown wavelength is troublesome and inaccurate, and the precision requirement on the laser wavelength is difficult to guarantee.

disclosure of Invention

the invention aims to overcome the defects in the prior art and provide an interference type laser wavelength measuring device and a using method thereof.

in order to achieve the above object, the embodiments of the present invention provide the following technical solutions:

An interferometric laser wavelength measuring device, comprising:

the known laser optical assembly is used for emitting a known laser beam and realizing interference measurement to obtain reference interference data;

The laser optical assembly to be measured is used for realizing interference measurement on the laser beam to be measured, and calculating to obtain the wavelength of the laser beam to be measured by referring to interference data obtained by a known laser optical assembly;

The laser device comprises a first right-angle reflecting mirror and a second right-angle reflecting mirror which is arranged in parallel with the first right-angle reflecting mirror, wherein the reflecting structure of the second right-angle reflecting mirror is opposite to the reflecting structure of the first right-angle reflecting mirror, and a known laser beam emitted by the known laser optical component and a laser beam to be detected emitted by the laser optical component to be detected are reflected for multiple times between the first right-angle reflecting mirror and the second right-angle reflecting mirror.

The method uses the known laser beam, obtains the interference data of the known laser beam as reference interference data by a method of increasing the optical path difference, increases the optical path difference variable quantity which is the same as that of the known laser beam by the laser beam to be measured, and obtains the wavelength of the laser beam to be measured according to the reference interference data.

Still further, to better implement the present invention, said known laser optical assembly comprises:

a known laser source for emitting a known laser beam;

The first spectroscope is used for receiving a known laser source emitted by the known laser source, transmitting the received known laser beam to the first condenser lens and reflecting the received known laser beam to the first right-angle reflecting mirror;

A first condenser lens for receiving the known laser beam transmitted by the first beam splitter and the known laser beam reflected by the second right-angle reflector and transmitting the received known laser beam to the first photodetector;

A first photodetector for receiving the known laser beam transmitted by the first condenser lens;

And the first processor is used for detecting the interference phenomenon generated on the first photoelectric detector and obtaining reference interference data.

Furthermore, in order to better implement the present invention, the laser optical assembly to be tested includes:

The second spectroscope is used for receiving the laser beam to be detected, transmitting the received laser beam to be detected to the second condenser lens and reflecting the received laser beam to the first right-angle reflecting mirror;

The second condenser lens is used for receiving the laser beam to be detected transmitted by the second beam splitter and the laser beam to be detected reflected by the second right-angle reflector and transmitting the received laser beam to be detected to the second photoelectric detector;

the second photoelectric detector is used for receiving the laser beam to be detected transmitted by the second condenser lens;

and the second processor is used for detecting the interference phenomenon generated on the second photoelectric detector and calculating the wavelength of the laser beam to be detected according to the interference data obtained by the known laser optical component.

furthermore, in order to better implement the present invention, the interferometric laser wavelength measuring device is disposed in the housing, and the known laser optical component, the laser optical component to be measured, and the first cube mirror are fixed with respect to the housing, and the second cube mirror moves in the vertical direction.

furthermore, in order to better implement the present invention, a black light absorbing material is disposed inside the housing.

Furthermore, in order to better implement the present invention, the second corner cube reflector is connected to a precision displacement device, and the precision displacement device drives the second corner cube reflector to move in the vertical direction.

furthermore, in order to better implement the present invention, the first corner reflector includes N sets of reflective structures, the second corner reflector includes M sets of reflective structures, and the reflective structures included in the first corner reflector and the second corner reflector are the same.

furthermore, in order to better implement the invention, the method specifically comprises the following steps:

Step S1: disposing an interferometric laser wavelength measuring device within the housing;

step S2: starting a known laser source, enabling the known laser source to emit a known laser beam to a first beam splitter, and enabling the first beam splitter to transmit the known laser beam to a first condensing lens and reflect the known laser beam to a first right-angle reflecting mirror; vertically moving the precision displacement device to cause constructive/destructive interference on the first photodetector;

step S3: arranging a laser beam to be detected and a known laser beam in parallel, enabling the laser beam to be detected to be incident to a second beam splitter, enabling the laser beam to be detected to be transmitted to a second condenser lens and reflected to a first right-angle reflector by the second beam splitter, and enabling a second photoelectric detector to generate constructive/destructive interference;

Step S4: controlling a precise displacement device to drive a second right-angle reflector to move towards a vertical direction far away from/close to a first right-angle reflector, stopping moving the second right-angle reflector until A times of constructive/destructive interference appears on a first photoelectric detector, recording the number A of times of constructive/destructive interference appearing on the first photoelectric detector by a first processor, and simultaneously recording the number B of times of constructive/destructive interference appearing on a second photoelectric detector by a second processor;

Step S5: and calculating the wavelength lambda' of the laser to be measured according to the constructive interference frequency A recorded by the first processor and appearing on the first photoelectric detector, the constructive interference frequency B recorded by the second processor and appearing on the second photoelectric detector and the wavelength lambda of the known laser beam.

the step S1 specifically includes the following steps:

step S11: fixedly arranging a first right-angle reflecting mirror in a shell;

Step S12: arranging a second right-angle reflecting mirror connected with a precise displacement device and a first right-angle reflecting mirror in parallel in a shell, wherein the reflecting structure of the first right-angle reflecting mirror is arranged opposite to the reflecting structure of the second right-angle reflecting mirror;

Step S13: the known laser source is arranged in the shell, so that a known laser beam emitted by the known laser source and a laser beam to be measured are both parallel to the horizontal direction of the first right-angle reflecting mirror and the second right-angle reflecting mirror;

step S14: fixedly arranging a first spectroscope and a second spectroscope in a shell, wherein the first spectroscope is inclined by 45 degrees relative to a known laser beam path emitted by a known laser source, and the second spectroscope is arranged in parallel with the first spectroscope;

Step S15: arranging a first condenser lens and a first photoelectric detector in a shell, so that a known laser beam reflected by the last group of reflecting structures of the second right-angle reflecting mirror and a known laser beam transmitted by the first beam splitter fall on the first photoelectric detector; and the second condenser lens and the second photoelectric detector are arranged in the shell, so that the laser beam to be detected reflected by the last group of reflecting structures of the second right-angle reflector and the laser beam to be detected transmitted by the second beam splitter can fall on the second photoelectric detector.

compared with the prior art, the invention has the beneficial effects that:

the method uses the known laser beam, obtains the interference data of the known laser beam as reference interference data by a method of increasing the optical path difference, increases the optical path difference variable quantity which is the same as that of the known laser beam by the laser beam to be measured, and obtains the wavelength of the laser beam to be measured according to the reference interference data. The device can obtain the wavelength of any laser beam to be measured by only utilizing one laser beam with known wavelength, and is simple and convenient to operate, and the calculated wavelength precision of the laser beam to be measured is high.

drawings

in order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.

FIG. 1 is a schematic view of the apparatus of the present invention;

FIG. 2 is a schematic view of a corner cube reflector according to the present invention.

Description of the main elements

The laser device comprises a known laser source 100, a first spectroscope 101, a first condenser lens 102, a first photoelectric detector 103, a laser source 200 to be measured, a second spectroscope 101, a second condenser lens 202, a second photoelectric detector 203, a first right-angle reflector 301, a second right-angle reflector 302, a precision displacement device 303, a first reflection inclined plane 304 and a second reflection inclined plane 305.

Detailed Description

the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without making any creative effort, shall fall within the protection scope of the present invention.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures. Also, in the description of the present invention, the terms "first", "second", and the like are used for distinguishing between descriptions and not necessarily for describing a relative importance or implying any actual relationship or order between such entities or operations.