阅读说明：本技术 微型接收器 (Miniature receiver ) 是由 A·M·拉福特 R·沃斯 D·J·M·莫金 于 2019-06-06 设计创作，主要内容包括：本发明涉及一种微型接收器,该微型接收器包括：第一可动膜片,其声学连接到中间容积；以及第二可动膜片,其声学连接到该中间容积和后容积,其中该中间容积的声学顺应性小于相应的第一可动膜片和第二可动膜片的声学顺应性。本发明还涉及一种相关联的方法。(the present invention relates to a micro receiver, comprising: a first movable diaphragm acoustically connected to the intermediate volume; and a second moveable diaphragm acoustically coupled to the intermediate volume and the back volume, wherein the intermediate volume has an acoustic compliance less than the acoustic compliance of the respective first and second moveable diaphragms. The invention also relates to an associated method.)

1. A miniature receiver, said miniature receiver comprising:

-a first movable diaphragm acoustically connected to the intermediate volume; and

-a second movable diaphragm acoustically connected to the intermediate and back volumes,

Wherein the intermediate volume has an acoustic compliance that is less than the acoustic compliance of the respective first and second moveable diaphragms.

2. the miniature receiver of claim 1 further comprising a front volume, wherein

-a first surface of a first movable diaphragm is acoustically connected to the front volume and an opposite second surface of the first movable diaphragm is acoustically connected to the intermediate volume, and

-a first surface of the second movable diaphragm is acoustically connected to the intermediate volume and an opposite second surface of the second movable diaphragm is acoustically connected to the back volume.

3. The miniature receiver of claim 2, wherein the front volume is acoustically connected to a sound outlet of the miniature receiver.

4. The micro-receiver of claim 2 or 3, wherein the first movable membrane forms part of a first MEMS die and the second movable membrane forms part of a second MEMS die.

5. A miniature receiver according to claim 2 or 3, wherein the first and second moveable diaphragms form part of the same MEMS die.

6. The miniature receiver of claim 4, wherein the first and second MEMS die are disposed on opposite surfaces of a substrate that at least partially separates the front volume and the back volume.

7. The micro-receiver of any preceding claim, wherein the first and/or second moveable membranes each comprise a substantially planar membrane comprising an integrated drive structure.

8. the micro-receiver of claim 7, wherein the integrated drive structure comprises a layer of piezoelectric material disposed between a first electrode and a second electrode, and the first and second electrodes of the respective first and second movable diaphragms are electrically coupled in parallel.

9. The micro-receiver of any one of claims 1 to 6, wherein the first and/or second movable diaphragms each comprise a substantially planar electrostatic diaphragm.

10. The micro-receiver of any preceding claim, wherein the first and second moveable membranes comprise respective, substantially planar first and second membranes, the substantially planar first and second membranes being arranged in a substantially parallel manner in structure.

11. The micro-receiver of any preceding claim, further comprising an additional movable diaphragm arranged in series with the first and second movable diaphragms.

12. A personal device comprising a miniature receiver according to any one of the preceding claims, the personal device being selected from the group consisting of a hearing aid, a hearing device, a wearable apparatus, a mobile communication device and a tablet.

13. A method for operating a miniature receiver, the miniature receiver comprising: a first movable diaphragm acoustically connected to the intermediate volume; and a second moveable diaphragm acoustically coupled to the intermediate volume and the back volume, wherein the intermediate volume has an acoustic compliance less than an acoustic compliance of the respective first and second moveable diaphragms, the method comprising the step of operating the first and second moveable diaphragms in accordance with one or more electrical drive signals.

14. The method of claim 13, wherein,

-a first surface of said first movable diaphragm is acoustically connected to the front volume and an opposite second surface of said first movable diaphragm is acoustically connected to said intermediate volume, and

-a first surface of the second movable diaphragm is acoustically connected to the intermediate volume and an opposite second surface of the second movable diaphragm is acoustically connected to the back volume.

15. The method of claim 13 or 14, wherein the first and second moveable diaphragms each comprise a substantially planar diaphragm comprising an integrated drive structure comprising a layer of piezoelectric material disposed between a first electrode and a second electrode.

Technical Field

The invention relates to a micro-receiver comprising at least a first movable membrane and a second movable membrane, the first and second movable membranes being acoustically connected via an intermediate volume, the acoustic compliance of the intermediate volume being smaller than the acoustic compliance of the respective first and second movable membranes.

Background

The available Sound Pressure Level (SPL) from the receiver depends on various parameters: one of the parameters is the effective area of the movable diaphragm of the receiver. For a given membrane displacement, a larger membrane area favors a larger SPL. Therefore, to achieve a large effective diaphragm area, it is useful to have multiple diaphragms in the receiver. These diaphragms are usually placed acoustically and electrically in parallel.

For receivers with substantially closed back volumes, acoustic back volume compliance can play a significant role in optimizing the receiver for high SPL. The general rule is that the combined compliance of the motor and diaphragm should be similar to the acoustic back volume compliance.

Therefore, a receiver having a large or multiple diaphragms requires a membrane or motor having very high stiffness. However, this may reduce the efficiency of the driving diaphragm.

In view of the above, it may be seen as an object of embodiments of the present invention to provide a miniature receiver capable of generating a larger SPL.

It may be seen as a further object of embodiments of the present invention to provide a miniature receiver comprising a plurality of moveable diaphragms acoustically coupled in series.

disclosure of Invention

In a first aspect, the above object is met by providing a micro receiver comprising:

-a first movable diaphragm acoustically connected to the intermediate volume; and

-a second movable diaphragm acoustically connected to the intermediate and back volumes,

wherein the intermediate volume has an acoustic compliance less than that of the respective first and second moveable diaphragms.

In the present context, the term "miniature receiver" should be understood as a sound producing receiver having dimensions allowing it to be applied in an earpiece, such as a hearing aid or a hearing device, e.g. a hearing device carried near or outside the ear or a hearing device at least partly located in the ear canal.

furthermore, the term "movable diaphragm" should be understood herein as a combination of a movable or deformable mechanical element or elements acoustically coupled to the air on both sides such that a movement of the movable diaphragm or a part of said movable diaphragm moves the air in a section of the acoustic frequency band.

The low acoustic compliance of the intermediate volume with respect to the acoustic compliance of the first and second moveable diaphragms ensures that the movements of the first and second moveable diaphragms are coupled by a substantially rigid connection. Thus, movement of one diaphragm in one direction will provide a force to the other diaphragm in the same direction. Thus, the intermediate volume acts as a rigid connection between the first movable diaphragm and the second movable diaphragm, thereby transferring forces therebetween and ensuring that the first and second movable diaphragms perform similar volume displacements in response to an applied electrical drive signal.

The miniature receiver of the present invention may further comprise a front volume, wherein

-a first surface of the first movable diaphragm is acoustically connected to the front volume, an opposite second surface of the first movable diaphragm is acoustically connected to the intermediate volume, and

-a first surface of the second movable diaphragm is acoustically connected to the intermediate volume and an opposite second surface of the second movable diaphragm is acoustically connected to the back volume.

the front volume may be acoustically connected to the sound outlet of the miniature receiver such that the generated sound is allowed to exit the miniature receiver.

for a typical miniature receiver, the total volume may be between 10-400 mm³Within the range of (1). For such a miniature receiver, the front, back and intermediate volumes may be 2-20%, 2-20% and 25-80% of the total volume, respectively.

In contrast to the front volume, the intermediate volume and the back volume may constitute a substantially closed volume.

The first moveable membrane may form part of a first micro-electro-mechanical system (MEMS) die and the second moveable membrane may form part of a second MEMS die. The first and second MEMS die may be disposed on opposite surfaces of a substrate that at least partially separates the front volume and the back volume of the micro-receiver. In particular, the first and second MEMS die may be aligned with an opening in the substrate such that the first and second moveable membranes cover the opening in the substrate.

Alternatively, the first and second moveable diaphragms may form part of the same MEMS die.

the first moveable diaphragm and/or the second moveable diaphragm may each comprise a substantially planar diaphragm. Further, the first and/or second moveable diaphragms may each include an integrated drive structure adapted to move the first and/or second moveable diaphragms in response to one or more electrical drive signals applied to the integrated drive structure. The integrated drive structure of each of the first and/or second moveable diaphragms may include a layer of piezoelectric material disposed between a first electrode and a second electrode. Alternatively, the first movable diaphragm and/or the second movable diaphragm may each comprise a substantially planar electrostatic diaphragm.

alternatively, separate drive structures (e.g., separate piezoelectric drivers or balanced armatures) may be applied to drive the first and second moveable diaphragms in response to one or more electrical drive signals applied to the separate drive structures.

The first and second moveable diaphragms may include respective substantially planar first and second diaphragms that are arranged in a substantially parallel manner in the structure. Alternatively, the first and second moveable diaphragms may be arranged at an angle relative to each other. The angle may be up to 20 degrees.

The first and second electrodes of the respective first and second movable diaphragms may be electrically coupled in parallel. With this arrangement, the integrated drive structure of the first and second movable diaphragms will receive the same electrical drive signal during operation.

although the micro-receiver has been disclosed as having two movable diaphragms, it should be noted that the micro-receiver may also include additional movable diaphragms arranged in series with the first and second movable diaphragms disclosed above. Furthermore, the movable diaphragms in series may be combined with other movable diaphragms via a parallel embodiment, for example two movable diaphragms in series in parallel with a third movable diaphragm.

In a second aspect, the invention relates to a personal device comprising a miniature receiver according to the first aspect, the personal device being selected from the group consisting of a hearing aid, a hearing device, a wearable apparatus, a mobile communication device and a tablet computer.

In a third aspect, the present invention relates to a method for operating a miniature receiver, the miniature receiver comprising: a first moveable diaphragm acoustically coupled to the intermediate volume; a second moveable diaphragm acoustically coupled to the intermediate volume and the back volume, wherein the intermediate volume has an acoustic compliance that is less than an acoustic compliance of the respective first and second moveable diaphragms, the method comprising the step of operating the first and second moveable diaphragms in accordance with one or more electrical drive signals.

The miniature receiver may be implemented as discussed in connection with the first aspect of the invention. Thus, a first surface of the first moveable diaphragm is acoustically connected to the front volume and an opposing second surface of the first moveable diaphragm is acoustically connected to the intermediate volume. In addition, a first surface of a second moveable diaphragm is acoustically coupled to the intermediate volume and an opposing second surface of the second moveable diaphragm is acoustically coupled to the back volume.

As previously described, the first moveable membrane may form part of a first MEMS die and the second moveable membrane may form part of a second MEMS die. Alternatively, the first and second moveable diaphragms may form part of the same MEMS die.

The first and second moveable diaphragms may each comprise a substantially planar diaphragm including an integrated drive structure. The integrated driving structure of each of the first and second movable diaphragms may include a piezoelectric material layer disposed between the first electrode and the second electrode. The first and second electrodes of the respective first and second moveable diaphragms may be electrically coupled in parallel. With this arrangement, the integrated drive structure of the first and second movable diaphragms will receive the same electrical drive signal during operation.

Drawings

The invention will now be explained in further detail with reference to the accompanying drawings, in which:

FIG. 1 illustrates the general concept of the present invention;

FIG. 2 shows a piezoelectric diaphragm;

FIG. 3 shows an electrostatically driven diaphragm;

Fig. 4 shows a single MEMS die and a triple stacked MEMS die;

Fig. 5 shows a dual stacked MEMS die and a die-in-die (die-die) MEMS die;

FIG. 6 illustrates a flip-chip mounted MEMS die and a dual layer MEMS die;

Fig. 7 shows two dual stacked MEMS die in a package;

FIG. 8 shows a micro receiver employing two double stacked MEMS bare chips;

Fig. 9 shows a micro receiver employing stacked MEMS die.

while the invention is susceptible to various modifications and alternative forms, specific embodiments have been shown by way of example in the drawings and will be described in detail herein. However, it should be understood that the invention is not intended to be limited to the particular forms disclosed. On the contrary, the intention is to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention as defined by the appended claims.

Detailed Description

In its most general aspect, the present invention is directed to a miniature receiver comprising a first moveable diaphragm and a second moveable diaphragm, the first and second moveable diaphragms being acoustically connected via an intermediate volume, the intermediate volume having an acoustic compliance less than the respective acoustic compliances of the first and second moveable diaphragms. The small acoustic compliance of the intermediate volume relative to the acoustic compliance of the first and second moveable diaphragms ensures that the first and second moveable diaphragms are driven in the same direction and perform the same volume displacement in response to an applied electrical drive signal.

The advantage of the miniature receiver of the present invention is that it improves SPL compared to conventional receivers having a substantially closed back volume. With the miniature receiver according to the invention, the compliance of the movable diaphragm or diaphragms is of the same order of magnitude as the acoustic load determined by the compliance of the back volume. Therefore, the micro receiver of the present invention has advantages due to the following reasons:

1) An additional degree of freedom is added to the effective diaphragm area, i.e. when the movable diaphragms are arranged in series, it is easier to find space and to allocate space for more diaphragm area.

2) Additional degrees of freedom in the optimization of the micro-receivers, since the ratio of receiver stiffness to back volume stiffness can be optimized, which allows for a more compliant membrane design.

Referring now to FIG. 1, a miniature receiver 100 according to the present invention is depicted. As shown in fig. 1, the miniature receiver 100 includes a housing 104 and a sound outlet 112 disposed in the housing. The sound outlet 112 is acoustically connected to the front volume 101, which is acoustically sealed from the back volume 102 via the substrate 107, the first MEMS die 108 and the second MEMS die 109. The MEMS die 108, 109 are both aligned with openings in the substrate and secured to the substrate 107 via respective die attachments 110, 111.

As shown in fig. 1, the first movable diaphragm 105 forms a portion of the MEMS die 108, and the second movable diaphragm 106 forms a portion of the MEMS die 109. The first and second movable diaphragms 105, 106 are arranged in a substantially parallel manner.

As shown in fig. 1, an upper surface of first movable diaphragm 105 is acoustically coupled to front volume 101, while an opposing lower surface of first movable diaphragm 105 is acoustically coupled to middle volume 103. Similarly, the upper surface of the second movable diaphragm 106 is acoustically connected to the intermediate volume 103, while the opposite lower surface of the second movable diaphragm 106 is acoustically connected to the back volume 102.

As previously mentioned, intermediate volume 103 has an acoustic compliance that is less than the respective acoustic compliances of first and second moveable diaphragms 105, 106. The smaller acoustic compliance of the intermediate volume 103 relative to the acoustic compliance of the first and second moveable diaphragms 105, 106 ensures that the first and second moveable diaphragms are driven in the same direction and that the first and second moveable diaphragms perform the same volume displacement in response to an applied electrical drive signal.

The first and second movable diaphragms 105, 106 each include an integrated drive structure adapted to move the first and second movable diaphragms 105, 106 in response to an applied electrical drive signal. Although not shown in fig. 1, the integrated drive structure of each of the first and second movable diaphragms 105, 106 may include a layer of piezoelectric material disposed between a first electrode and a second electrode. The first and second electrodes of the respective first and second movable diaphragms are electrically coupled in parallel such that an electrical drive signal applied to the first movable diaphragm 105 is also applied to the second movable diaphragm 106.

The piezoelectric means for driving the first and second movable diaphragms 105, 106 may be implemented as shown in fig. 2. Alternatively, the drive mechanism for driving the first and second movable diaphragms 105, 106 may be implemented as electrostatic devices each having an associated back plate (backplate) as shown in fig. 3.

In the embodiment shown in fig. 2, a piezoelectric rod 203 forming a movable diaphragm is depicted. The movable diaphragm may be any one of the movable diaphragms 105, 106 in fig. 1. The piezoelectric rods 203 are fixed to the MEMS body 201. An opening or gap 202 is provided in the central part, see a in fig. 2. The gap 202 between the rods 203 is so narrow that acoustic leakage through the gap does not affect the acoustic output in the audible frequency range. The piezoelectric rods 203 thus effectively behave as a sealed diaphragm. The acoustic leakage through the gap determines the low frequency roll-off of the acoustic output of the miniature receiver.

B of fig. 2 shows an enlarged view of the circled portion of a of fig. 2. As shown in fig. 2 b, the piezoelectric rods form a layered structure comprising a piezoelectric material 207 arranged between two electrodes 206, 208. The electrodes 206, 208 are adapted to be connected to a voltage source, see c of fig. 2. The elastic layer 209 is fixed to the electrode 208 and forms an integral part of the MEMS body 204 and defines, in combination with said MEMS body, the volume 205. The volume 205 forms part of the front volume 101 or the back volume 102, see fig. 1.

figure 2 c shows the piezoelectric rods in a deflected position as indicated by arrow 210. The deflection of the piezoelectric rods is provided by applying a voltage to the electrodes 211, 212, whereby the piezoelectric rods deflect up or down depending on the polarity of the applied voltage. Also, volume 213 is disposed below the rod. Since the gap between the rods is very narrow, so that the rods behave as a movable diaphragm in the audible frequency range, sound pressure can be generated when a suitable drive signal/voltage is applied to the electrodes 211, 212. Alternatively, if the movable diaphragm is fixed to a piezoelectric rod and a suitable drive signal/voltage is applied to the electrodes 211, 212, a sound pressure change may be generated. Such a separate membrane may be a polymer membrane, a metal membrane or a composite material, and may include a rigid region and a compliant region.

Fig. 3 shows an alternative drive mechanism for the first and second movable diaphragms 105, 106 of fig. 1. In a of fig. 3, an electrostatically actuated membrane with an associated back plate is depicted. Referring to a of fig. 3, a conductive diaphragm 303, a MEMS body 301 and a volume 302 are depicted. The volume 302 forms part of the front volume 101 or the back volume 102, see fig. 1. B of fig. 3 shows an enlarged view of a of fig. 3. As shown in b of fig. 3, the membrane 304 is arranged on the spacer 305 such that a distance from the back plate 306 having the through-hole 307 is ensured. The MEMS body 309, which supports the diaphragm 304 and spacer 305, together with the back plate 306, define a volume 308. In fig. 3 c, the voltage source has been connected to the conductive membrane 310 and perforated backplate 311 above the container 315. As shown in fig. 3 c, the applied voltage deflects the diaphragm 310 in the direction of the back plate 311. The sound pressure variation can be generated by applying a suitable drive signal/voltage between the diaphragm 310 and the perforated backplate 311. As previously described, the diaphragm 310 is supported by the MEMS body 312 via the spacer 314.

With respect to fig. 3, it should be noted that electret based structures may also be applied. In the following, various embodiments of MEMS die and combinations thereof are discussed.

Referring now to a of fig. 4, an embodiment in the form of a single MEMS die 401 comprising a moveable membrane 402 is depicted. The movable diaphragm 402 may be of the type disclosed in connection with fig. 2 (piezoelectric), fig. 3 (electrostatic) or of a completely different type. Turning now to b of fig. 4, an embodiment of a MEMS die 406, 408, 410 comprising three stacks 403, 404, 405 is depicted. Each of the MEMS die 406, 408, 410 includes a respective moveable diaphragm 407, 409, 411 that is coupled in series. Intermediate volumes 412, 413 are provided between the movable diaphragms 407, 409 and between the movable diaphragms 409, 411. The stacked MEMS die 406, 408, 410 shown in b of fig. 4 are similar in size, so they can be stacked directly on top of each other.

As previously mentioned, the low acoustic compliance of the intermediate volumes 412, 413 with respect to the acoustic compliance of the movable diaphragms 407, 409, 411 ensures that the movement of the movable diaphragms 407, 409, 411 is locked by a substantially rigid connection. Thus, movement of one diaphragm in one direction will apply a force in the same direction to the other diaphragm. Thus, the intermediate volume acts as a rigid connection between the movable diaphragms 407, 409, 411, thereby transferring forces between them and ensuring that the movable diaphragms 407, 409, 411 perform similar volume displacements in response to an applied electrical drive signal. The drive structures of the movable diaphragms 407, 409, 411 are electrically coupled in parallel such that a common electrical drive signal may be applied to the drive structures of the movable diaphragms 407, 409, 411.

The stacking of MEMS die as depicted in fig. 4 a is advantageous in that more membrane area can be easily provided when multiple membranes are arranged in series.

Referring now to a of fig. 5, an embodiment comprising two stacked MEMS die 501, 503 is depicted. Each of the MEMS die 501, 503 comprises a respective movable membrane 502, 504, which are arranged in series. An intermediate volume 506 is provided between the movable diaphragms 502, 504. In contrast to the arrangement shown in b of fig. 4, the stacked MEMS die shown in a of fig. 5 have different outer dimensions due to the enlarged support structure 505. The intermediate volume 506 functions as disclosed above, i.e. as a rigid connection between the movable diaphragms 502, 504, thereby transferring forces therebetween and ensuring that the movable diaphragms 502, 504 perform similar volume displacements in response to applied electrical drive signals.

Fig. 5 b shows an embodiment in which one MEMS die 509 is arranged in the hollow portion of another MEMS die 507. Likewise, each of the MEMS die 507, 509 includes a respective movable membrane 508, 510 arranged in series. An intermediate volume 511 is provided between the movable diaphragms 508, 510. The intermediate volume 511 functions as described above, i.e. as a rigid connection between the movable diaphragms 508, 510. A direct advantage of the embodiment shown in b of fig. 5 is that it has a limited height due to the arrangement of the die form in the die.

referring now to a of fig. 6, an embodiment is depicted comprising two flip-chip mounted MEMS die 601, 603. Each of the MEMS die 601, 603 includes a respective movable diaphragm 602, 604 arranged in series. An intermediate volume 606 is provided between the movable diaphragms 602, 604. The intermediate volume 606 functions as disclosed above, i.e. as a rigid connection between the movable diaphragms 602, 604. The MEMS die 601, 603 are attached to each other via a die attach 605. In b of fig. 6, an embodiment is depicted comprising a MEMS die 607, the MEMS die 607 having two moveable membranes 608, 609 separated by an intermediate volume 610. Likewise, the intermediate volume 610 acts as a rigid connection between the movable diaphragms 602, 604.

Fig. 7 shows a miniature receiver 700 comprising a receiver housing 715 having a sound outlet 714 acoustically connected to a common front volume 713. Two MEMS components (each of which includes two MEMS die 701, 703 and 707, 709) are arranged within the receiver housing 715. As shown in fig. 7, the upper MEMS component comprises two MEMS die 701, 703 each comprising a respective movable membrane 702, 704 arranged in series. An intermediate volume 705 is provided between the moveable diaphragms 702, 704. The intermediate volume 705 acts as a rigid connection between the moveable diaphragms 702, 704. A first back volume 706 is disposed behind the movable diaphragm 702. Similarly, the lower MEMS component comprises two MEMS die 707, 709 that each comprise a respective movable membrane 708, 710 arranged in series. Likewise, an intermediate volume 711 is provided between the movable diaphragms 708, 710. The intermediate volume 711 serves as a rigid connection between the movable diaphragms 708, 710. A second back volume 712 is disposed behind the movable diaphragm 710. The drive structure of the four movable diaphragms 702, 704, 708, 710 is adapted to be driven by the same drive signal.

Referring now to a of fig. 8, another embodiment 800 of the present invention is depicted. As shown in fig. 8 a, the micro receiver 800 includes a housing 811 and a sound outlet 812 disposed in the housing. The sound outlet 812 is acoustically connected to the front volume 801 which is acoustically sealed from the two back volumes 802, 803 via the substrate portions 813, 818, 819 and the first, second, third and fourth MEMS die 814, 815, 816, 817. The two back volumes 802, 803 are acoustically separated from each other by a wall 810. The MEMS die 814, 815, 816, 817 are all aligned with openings in the substrate portions and are also secured to the substrate portions 813, 818, 819 via respective die attachments.

As shown in fig. 8 a, the first moveable membrane 806 forms part of a MEMS die 814, while the second moveable membrane 807 forms part of a MEMS die 815. The first and second moveable diaphragms 806, 807 are arranged in a substantially parallel manner. Similarly, the third movable diaphragm 808 forms part of the MEMS die 816 and the fourth movable diaphragm 809 forms part of the MEMS die 817. The third and fourth movable diaphragms 808, 809 are arranged in a substantially parallel manner.

the upper surfaces of the first and third moveable diaphragms 806, 808 are acoustically coupled to the front volume 801, while the opposing lower surfaces of the first and third moveable diaphragms 806, 808 are acoustically coupled to the intermediate volumes 804, 805, respectively. Similarly, the upper surfaces of the second and fourth movable diaphragms 807, 809 are acoustically connected to the respective intermediate volumes 804, 805, while the opposite lower surfaces of the second and fourth movable diaphragms 807, 809 are acoustically connected to the respective back volumes 803, 802.

As described above, both intermediate volumes 804, 805 have an acoustic compliance that is less than the respective acoustic compliance of first, second, third and fourth movable diaphragms 806-809. Having a small acoustic compliance of intermediate volumes 804, 805 relative to the acoustic compliance of movable diaphragms 806-809 ensures that first and second movable diaphragms 806, 807 are driven in the same direction and perform the same volume displacement in response to an applied electrical drive signal. The same applies to the third and fourth movable diaphragms 808, 809.

The movable diaphragms 806-809 each comprise an integrated drive structure adapted to move the movable diaphragms 806-809 in response to an applied electrical drive signal. Although not shown in a of fig. 8, the integrated drive structure of each of the movable diaphragms 806-809 may include a layer of piezoelectric material disposed between a first electrode and a second electrode. The first and second electrodes of the respective movable diaphragms 806-809 are electrically coupled in parallel such that the electrical drive signal applied to the first movable diaphragm 806 is also applied to the second movable diaphragm 807. Similarly, the electrical drive signal applied to the third movable diaphragm 808 is also applied to the fourth movable diaphragm 809. In fact, the same electrical drive signal may be applied to all movable diaphragms.

the piezoelectric means for driving the movable diaphragms 806-809 can be implemented as shown in fig. 2. Alternatively, the drive mechanism for driving the movable diaphragms 806-809 can be implemented as electrostatic devices each having an associated back plate as shown in fig. 3.

Referring now to the embodiment 820 depicted in b of fig. 8, an acoustic filter 821 is inserted between the two back volumes (reference numerals 802, 803 in a of fig. 8). The acoustic filter 821 may be implemented in various ways, including a mesh structure for attenuating acoustic pressure. The embodiment shown in b of fig. 8 is the same as the embodiment shown in a of fig. 8 except for the acoustic filter 821.

Turning now to fig. 9, another embodiment 900 of the present invention is depicted. As shown in fig. 9, the miniature receiver 900 includes a housing 908 and a sound outlet 909 disposed in the housing. The sound outlet 909 is acoustically connected to the front volume 901, which is acoustically sealed from the two back volumes 902, 903 via the substrate portions 915, 916 and the first, second and third MEMS bare chips 911-913. The two back volumes 902, 903 are acoustically connected via an acoustic filter 910 arranged in a wall 914. The MEMS bare chips 911-913 are all aligned with openings in the substrate portions 915, 916 and are secured to the substrate portions 915, 916 via respective bare chip attachments.

as shown in fig. 9, the first movable membrane 905 forms part of a MEMS die 911, while the second and third movable membranes 906, 907 form part of respective MEMS dies 912, 913. The first, second and third movable diaphragms 905-907 are arranged in a substantially parallel manner.

the upper surface of first movable diaphragm 905 is acoustically connected to front volume 901 and the opposite lower surface of first movable diaphragm 905 is acoustically connected to middle volume 904. Similarly, the upper surfaces of the second and third movable diaphragms 906, 907 are acoustically connected to the intermediate volume 904, while the opposite lower surfaces of the second and third movable diaphragms 906, 907 are acoustically connected to the respective back volumes 903, 902.

The acoustic compliance of intermediate volume 904 is less than the respective acoustic compliance of first, second and third movable diaphragms 905-907. As previously described, the small acoustic compliance of intermediate volume 904 relative to the acoustic compliance of movable diaphragms 905-907 ensures that movable diaphragms 905-907 are driven in the same direction and that the first movable diaphragm 905 performs the same volume displacement as the combination of second and third movable diaphragms 906, 907 in response to the applied electrical drive signal.

Similar to the previous embodiments, the movable diaphragms 905-907 each comprise an integrated drive mechanism adapted to move the movable diaphragms 905-907 in response to an applied electrical drive signal. Although not shown in fig. 9, the integrated drive structure of each of the movable diaphragms 905-907 may include a layer of piezoelectric material disposed between a first electrode and a second electrode. The first and second electrodes of the respective movable diaphragms 905-907 are electrically coupled in parallel such that the electrical drive signal applied to the first movable diaphragm 905 is also applied to the second and third movable diaphragms 906, 907. It should be noted that other electrical connections may be applied.

The piezoelectric means for driving the movable diaphragms 905-907 can be implemented as shown in fig. 2. Alternatively, the drive mechanism for driving the movable diaphragms 905-907 can be implemented as electrostatic devices each having an associated back plate as shown in fig. 3. It should be noted that electret based structures may also be applied.