阅读说明：本技术 一种基于苯并环丁烯和氧化硅球的微透镜制备方法 (Method for preparing microlens based on benzocyclobutene and silicon oxide balls ) 是由 解意洋 庞伟 潘冠中 徐晨 王秋华 于 2019-09-25 设计创作，主要内容包括：本发明公开了一种基于苯并环丁烯和氧化硅球的微透镜制备方法,利用SiO2和BCB来作为微透镜的制备材料不仅可以制备出不同球冠大小微透镜还可以制备出不同弧度的微透镜。该微透镜包括衬底、BCB和SiO2微球,用匀胶机将混有SiO2微球的BCB旋涂在衬底上,经加热固化和等离子刻蚀(RIE)在衬底上制备出由BCB和SiO2微球构成的微透镜结构。利用SiO2和BCB来作为微透镜的制备材料不仅可以制备出不同球冠大小微透镜还可以制备出不同弧度的微透镜。(The invention discloses a method for preparing a micro-lens based on benzocyclobutene and silicon oxide spheres, which can be used for preparing micro-lenses with different spherical crown sizes and micro-lenses with different radians by using SiO2 and BCB as the preparation materials of the micro-lens. The micro-lens comprises a substrate, BCB and SiO2 microspheres, wherein the BCB mixed with the SiO2 microspheres is spin-coated on the substrate by a spin coater, and a micro-lens structure consisting of the BCB and the SiO2 microspheres is prepared on the substrate through heating curing and plasma etching (RIE). The SiO2 and BCB are used as the preparation materials of the micro lens, so that the micro lens with different spherical crown sizes and different radians can be prepared.)

1. A microlens prepared based on etching technology is characterized in that: the micro-lens comprises a substrate (1), BCB (2) and SiO2 microspheres (3), wherein the BCB (2) mixed with the SiO2 microspheres (3) is spin-coated on the substrate (1) by a spin coater, and a micro-lens structure consisting of the BCB (2) and the SiO2 microspheres (3) is prepared on the substrate (1) through heating curing and plasma etching.

2. A microlens fabricated based on etching techniques as claimed in claim 1, wherein: the SiO2 microspheres (3) had diameters of 5 μm, 6 μm or 7 μm, respectively.

3. A method for preparing a micro lens based on etching technology is characterized in that: the preparation process of the method is as follows,

step 1, cleaning a substrate (1) by using ultrasonic waves; the substrate (1) is placed in a beaker filled with acetone, and then the beaker is placed in an ultrasonic machine for ultrasonic cleaning; repeating the steps twice, changing the acetone into ethanol, and performing ultrasonic repeated cleaning again; then the substrate (1) is washed by deionized water for 20 times or more; obtaining the cleaned substrate (1);

step 2, drying the cleaned substrate (1) by using a nitrogen gun, and then placing the substrate in an oven with the temperature of 100 ℃ for 5 minutes to ensure that the surface of the substrate (1) is dried;

step 3, uniformly dissolving SiO2 microspheres (3) in BCB (2); weighing a proper amount of SiO2 microspheres (3) and BCB (2) by using an electronic scale, dissolving the weighed SiO2 microspheres and the BCB (2) together, and then putting the mixture into an ultrasonic cleaning machine for ultrasonic cleaning to ensure that the SiO2 microspheres (3) are uniformly distributed in the BCB (2);

step 4, spin-coating BCB (2) mixed with SiO2 microspheres (3) on the substrate (1) by using a spin coater, and setting a corresponding temperature gradient on a hot plate to ensure that the BCB (2) is fully cured;

and 5, etching the cured chip by using plasma, and controlling etching conditions and time to ensure that the BCB (2) except the SiO2 microsphere (3) area is completely etched, so that a micro-lens structure is obtained, and the micro-lens structure with different radians can be obtained by continuously increasing the etching time.

Technical Field

The invention belongs to the technical field of micro-nano processing, and particularly relates to a method for designing, processing and preparing a micro-lens.

Background

Microlenses have important applications in improving the beam quality of semiconductor light emitting devices (e.g., light emitting diodes, lasers, etc.), and have wide applications in optical communications, optical interconnects and optical switching, optical information processing, and micro-optical sensors. The conventional microlens preparation process has many disadvantages, such as rough lens surface, difficulty in forming uniform spherical lens, complicated processing steps, high processing cost, etc. Benzocyclobutene polymers (BCB) have a plurality of excellent properties (good film forming property, high film flatness, good retentivity, excellent mechanical property, high temperature resistance, small dielectric constant, small dielectric loss, low moisture absorption rate and the like), and are widely applied to the fields of high-tech microelectronic and electrical appliances, medical materials, aerospace, photoelectric devices, nonlinear optical materials and the like.

Disclosure of Invention

The invention aims to provide a simple and low-cost microlens preparation method based on an etching process, and the SiO2 and the BCB are used as the preparation materials of the microlens, so that the microlenses with different spherical crown sizes and different radians can be prepared.

As shown in fig. 1, one of the microlenses prepared based on the etching technique is a microlens comprising a substrate (1), BCB (2) and SiO2 microspheres (3), BCB (2) mixed with SiO2 microspheres (3) is spin-coated on the substrate (1) by a spin coater, and a microlens structure composed of BCB (2) and SiO2 microspheres (3) is prepared on the substrate (1) by heat curing and plasma etching (RIE).

The SiO2 microspheres (3) had diameters of 5 μm, 6 μm or 7 μm, respectively.

Therefore, the invention provides that the Reactive Ion Etching (RIE) technology is utilized to deeply and carefully research the preparation of microlenses with different spherical crown sizes and microlenses with the same spherical crown size by adopting silicon oxide pellets (the diameters are respectively 5 microns, 6 microns and 7 microns) and benzocyclobutene (BCB), the optimal parameters are determined, and the microlenses with different spherical crown diameters and good appearance are realized.

Drawings

FIG. 1: the invention adopts the side view of the whole structure of the microlens prepared by the etching process;

FIG. 2: a side view of the substrate;

FIG. 3: side view of BCB mixed with SiO2 microspheres spin coated on a substrate;

FIG. 4: etching a side view of the lens structure by Reactive Ion Etching (RIE);

in the figure: 1. substrate 2, BCB 3, SiO2 microspheres.

Detailed Description

The process for manufacturing the microlens of the present invention will be described with reference to fig. 2 to 4.

A microlens prepared based on an etching technique includes a substrate (1), BCB (2) and SiO2 microspheres (3). BCB (2) mixed with SiO2 microspheres (3) is spin-coated on a substrate (1) by a spin coater, the BCB is solidified by a hot plate, and then plasma etching (RIE) is carried out on the substrate (1) to prepare a micro-lens structure consisting of the BCB (2) and the SiO2 microspheres (3).

A method for preparing a micro lens based on etching technology comprises the following steps:

step 1, cleaning a substrate (1) by using ultrasonic. The substrate (1) is placed in a beaker containing acetone, and then the beaker is placed in an ultrasonic machine for ultrasonic cleaning. After repeating twice, the acetone is changed into ethanol, and ultrasonic repeated cleaning is carried out again. Then the substrate (1) is washed by deionized water for 20 times or more; the substrate (1) after cleaning is obtained.

And 2, drying the cleaned substrate (1) by using a nitrogen gun, and then placing the substrate in an oven with the temperature of 100 ℃ for 5 minutes to ensure that the surface of the substrate (1) is dried.

And 3, uniformly dissolving the SiO2 microspheres (3) in the BCB (2). An electronic scale is used for weighing and dissolving proper amount of SiO2 microspheres (3) and BCB (2) together, and then the mixture is put into an ultrasonic cleaning machine for ultrasonic cleaning so as to ensure that the SiO2 microspheres (3) are uniformly distributed in the BCB (2).

And 4, spin-coating the BCB (2) mixed with the SiO2 microspheres (3) on the substrate (1) by using a spin coater, and setting a corresponding temperature gradient on a hot plate to ensure that the BCB (2) is fully cured.

And 5, etching the cured chip by using plasma etching (RIE), and controlling etching conditions and time to ensure that the BCB (2) except the SiO2 microsphere (3) area is completely etched, so that a micro-lens structure is obtained, and the micro-lens structure with different radians can be obtained by continuously increasing the etching time.

The invention provides a method for preparing microlenses with different spherical crown sizes and microlenses with the same spherical crown size by adopting silicon oxide pellets (the diameters are respectively 5 mu m, 6 mu m and 7 mu m) and benzocyclobutene (BCB) and utilizing a Reactive Ion Etching (RIE) technology, which deeply and finely researches the preparation of the microlenses with different spherical crown sizes and the microlenses with the same spherical crown size, determines optimal parameters and realizes the microlenses with different spherical crown diameters and good appearance.