阅读说明：本技术 一种光栅刻刀方位角的调整方法 (Method for adjusting azimuth angle of grating graver ) 是由 糜小涛 张善文 齐向东 林雨 周敬萱 江思博 于海利 于宏柱 于 2019-09-19 设计创作，主要内容包括：本申请公开了一种光栅刻刀方位角的调整方法,包括：利用预先根据光栅刻刀方位角要求调整过方位角的光栅刻刀在基底上刻划第一刻线,并利用光栅刻刀进行压刃,得到光栅刻刀刃型；获取光栅刻刀刃型的刃尖与第一刻线之间的第一距离、光栅刻刀刃型的刃尾与第一刻线之间的第二距离及光栅刻刀刃型的长度,并得到光栅刻刀的方位角的第一偏转角度；判断第一偏转角度是否满足光栅刻刀方位角要求,若否,则根据第一偏转角度对光栅刻刀的方位角进行调整。本申请公开的上述技术方案,通过对光栅刻刀方位角偏转情况的定量计算实现对其的准确判断,并便于根据所得到的第一偏转角度实现对光栅刻刀的方位角的准确调整,以提高光栅刻刀方位角调整的准确性和效率。(The application discloses a method for adjusting an azimuth angle of a grating ruling tool, which comprises the following steps: utilizing a grating ruling tool with an azimuth angle adjusted according to the azimuth angle requirement of the grating ruling tool in advance to rul a first scribed line on the substrate, and utilizing the grating ruling tool to press a blade to obtain a blade shape of the grating ruling tool; acquiring a first distance between a blade tip of a grating carving tool blade type and a first reticle, a second distance between a blade tail of the grating carving tool blade type and the first reticle and the length of the grating carving tool blade type, and acquiring a first deflection angle of an azimuth angle of the grating carving tool; and judging whether the first deflection angle meets the requirement of the azimuth angle of the grating ruling tool, if not, adjusting the azimuth angle of the grating ruling tool according to the first deflection angle. According to the technical scheme, the accurate judgment of the deflection condition of the azimuth angle of the grating ruling tool is realized through quantitative calculation of the deflection condition of the azimuth angle of the grating ruling tool, and the accurate adjustment of the azimuth angle of the grating ruling tool is conveniently realized according to the obtained first deflection angle, so that the accuracy and the efficiency of the adjustment of the azimuth angle of the grating ruling tool are improved.)

1. A method for adjusting the azimuth angle of a grating ruling tool is characterized by comprising the following steps:

the method comprises the steps that a first scribed line is scribed on a substrate by a grating ruling tool which is adjusted in advance according to the azimuth angle requirement of the grating ruling tool and installed in a grating ruling machine, and the grating ruling tool is used for pressing edges at a position which is away from the first scribed line by a first preset length to obtain a grating ruling tool edge type;

acquiring a first distance between a blade tip of the grating carving knife edge type and the first reticle, a second distance between a blade tail of the grating carving knife edge type and the first reticle and the length of the grating carving knife edge type, and acquiring a first deflection angle of an azimuth angle of the grating carving knife by utilizing the first distance, the second distance and the length of the grating carving knife edge type;

and judging whether the first deflection angle meets the requirement of the azimuth angle of the grating ruling tool, if not, adjusting the azimuth angle of the grating ruling tool according to the first deflection angle so as to enable the first deflection angle to meet the requirement of the azimuth angle of the grating ruling tool.

2. The method for adjusting the azimuth angle of a grating ruling tool according to claim 1, wherein obtaining a first distance between a tip of the grating ruling tool and the first ruling line, a second distance between a tail of the grating ruling tool and the first ruling line, and a length of the grating ruling tool comprises:

scanning the first scribed line and the grating scribed edge by using a scanning instrument to obtain a scanning appearance;

and acquiring the first distance, the second distance and the length of the grating graver edge shape through the scanning topography.

3. The method for adjusting the azimuth angle of a grating ruling tool according to claim 2, wherein the obtaining of the first distance, the second distance and the length of the edge of the grating ruling tool from the scanning profile comprises:

measuring the distance between the deepest point of the tip and the deepest point of the first score line to obtain the first distance;

measuring a distance between an innermost extent of the blade tail and an innermost extent of the first score line to obtain the second distance;

and measuring the distance between the deepest part of the blade tip and the deepest part of the blade tail to obtain the length of the edge shape of the grating ruling tool.

4. The method of claim 2, wherein the scanning device is an atomic force microscope or a scanning electron microscope.

5. The method for adjusting the azimuth angle of a grating ruling tool according to claim 1, wherein the grating ruling tool is used for edging at a position which is away from the first ruling line by a first preset length to obtain a grating ruling tool edge shape, and the method comprises the following steps:

pressing edges at different positions which are away from the first scribed line by a first preset length by using the grating graver to obtain a plurality of alternative grating graver edge types;

and selecting one alternative grating carving tool edge type with the best edge type from the alternative grating carving tool edge types as the grating carving tool edge type.

6. The method for adjusting the azimuth angle of a grating ruling tool according to claim 1, wherein the step of pressing the edge by using the grating ruling tool comprises the following steps:

repeating a preset number of times of blade pressing actions on the substrate, wherein the blade pressing actions comprise the action of dropping the grating ruling tool and the action of lifting the grating ruling tool.

7. The method of any of claims 1 to 6, further comprising, after scribing a first scribe line on the substrate using a grating scriber installed in a grating scriber and having its azimuth angle adjusted in advance according to the azimuth angle requirement of the grating scriber, the method of adjusting the azimuth angle of the grating scriber further comprising:

scribing a second scribed line at a position which is away from the first scribed line by a second preset length by using the grating scribing tool; the second scribed line is parallel to the first scribed line, and the grating scribed edge is positioned between the first scribed line and the second scribed line;

acquiring a third distance between the blade tip and the second scribed line and a fourth distance between the blade tail and the second scribed line;

obtaining a second deflection angle of the azimuth angle of the grating ruling tool by utilizing the third distance, the fourth distance and the length of the edge shape of the grating ruling tool;

and obtaining an average deflection angle by using the first deflection angle and the second deflection angle, taking the average deflection angle as the first deflection angle, and executing the step of judging whether the first deflection angle meets the azimuth angle requirement of the grating ruling tool.

Technical Field

The application relates to the technical field of grating preparation, in particular to a method for adjusting an azimuth angle of a grating ruling tool.

Background

In the preparation of the grating, the mechanical etching grating is formed by extruding and polishing a film layer on a grating substrate plated with a metal film layer by using a grating ruling tool. The structural parameters of the grating ruling tool and the adjustment parameters before ruling influence the grating groove shape, so that performance indexes of ghost lines, stray light, diffraction efficiency and the like of the grating are influenced. For the grating ruling tool, the adjusting parameters mainly comprise an azimuth angle, a positioning angle and a pitch angle, and the adjusting precision of the angles can have a decisive influence on the quality of the grating.

Currently, the adjustment of the azimuth angle of the grating ruling tool is generally realized by qualitative observation through a microscope and then adjustment according to the observation result. Specifically, two scribed lines with a certain interval are scribed on a grating substrate, the edge shape of a grating ruling tool is pressed between the two scribed lines, a plurality of scribed lines are scribed, then the relation between the edge shape of the grating ruling tool and the two scribed lines and the quality of the scribed lines are observed under a microscope to judge whether the azimuth angle meets the requirement, if not, the azimuth angle of the grating ruling tool is adjusted, and then the steps are repeatedly executed until the azimuth angle meets the requirement. However, since the above process cannot accurately provide a determination result, the accuracy of the azimuth determination is reduced, and accordingly, the accuracy of the adjustment of the azimuth angle of the grating ruling tool is reduced, thereby reducing the quality of the prepared grating. In addition, since it is necessary to repeatedly determine and adjust the azimuth angle, the efficiency of the azimuth angle adjustment is reduced.

In summary, how to improve the accuracy and efficiency of adjusting the azimuth angle of the grating ruling tool is a technical problem to be solved urgently by those skilled in the art.

Disclosure of Invention

In view of this, an object of the present application is to provide a method for adjusting an azimuth angle of a grating ruling tool, which is used to improve accuracy and efficiency of adjusting the azimuth angle of the grating ruling tool.

In order to achieve the above purpose, the present application provides the following technical solutions:

a method for adjusting the azimuth angle of a grating ruling tool comprises the following steps:

the method comprises the steps that a first scribed line is scribed on a substrate by a grating ruling tool which is adjusted in advance according to the azimuth angle requirement of the grating ruling tool and installed in a grating ruling machine, and the grating ruling tool is used for pressing edges at a position which is away from the first scribed line by a first preset length to obtain a grating ruling tool edge type;

acquiring a first distance between a blade tip of the grating carving knife edge type and the first reticle, a second distance between a blade tail of the grating carving knife edge type and the first reticle and the length of the grating carving knife edge type, and acquiring a first deflection angle of an azimuth angle of the grating carving knife by utilizing the first distance, the second distance and the length of the grating carving knife edge type;

and judging whether the first deflection angle meets the requirement of the azimuth angle of the grating ruling tool, if not, adjusting the azimuth angle of the grating ruling tool according to the first deflection angle so as to enable the first deflection angle to meet the requirement of the azimuth angle of the grating ruling tool.

Preferably, the acquiring a first distance between the edge tip of the grating-cutting edge shape and the first scribe line, a second distance between the edge tail of the grating-cutting edge shape and the first scribe line, and a length of the grating-cutting edge shape includes:

scanning the first scribed line and the grating scribed edge by using a scanning instrument to obtain a scanning appearance;

and acquiring the first distance, the second distance and the length of the grating graver edge shape through the scanning topography.

Preferably, the obtaining the first distance, the second distance and the length of the edge shape of the grating ruling tool through the scanning topography includes:

measuring the distance between the deepest point of the tip and the deepest point of the first score line to obtain the first distance;

measuring a distance between an innermost extent of the blade tail and an innermost extent of the first score line to obtain the second distance;

and measuring the distance between the deepest part of the blade tip and the deepest part of the blade tail to obtain the length of the edge shape of the grating ruling tool.

Preferably, the scanning instrument is an atomic force microscope or a scanning electron microscope.

Preferably, the pressing edge is performed by using the grating ruling tool at a position away from the first scribed line by a first preset length to obtain a grating ruling tool edge shape, including:

pressing edges at different positions which are away from the first scribed line by a first preset length by using the grating graver to obtain a plurality of alternative grating graver edge types;

and selecting one alternative grating carving tool edge type with the best edge type from the alternative grating carving tool edge types as the grating carving tool edge type.

Preferably, the pressing blade with the grating ruling tool includes:

repeating a preset number of times of blade pressing actions on the substrate, wherein the blade pressing actions comprise the action of dropping the grating ruling tool and the action of lifting the grating ruling tool.

Preferably, after scribing the first scribe line on the substrate by using the grating ruling tool which is previously adjusted in azimuth angle according to the azimuth angle requirement of the grating ruling tool and is installed in the grating ruling machine, the method further comprises the following steps:

scribing a second scribed line at a position which is away from the first scribed line by a second preset length by using the grating scribing tool; the second scribed line is parallel to the first scribed line, and the grating scribed edge is positioned between the first scribed line and the second scribed line;

acquiring a third distance between the blade tip and the second scribed line and a fourth distance between the blade tail and the second scribed line;

obtaining a second deflection angle of the azimuth angle of the grating ruling tool by utilizing the third distance, the fourth distance and the length of the edge shape of the grating ruling tool;

and obtaining an average deflection angle by using the first deflection angle and the second deflection angle, taking the average deflection angle as the first deflection angle, and executing the step of judging whether the first deflection angle meets the azimuth angle requirement of the grating ruling tool.

The application provides a method for adjusting an azimuth angle of a grating ruling tool, which comprises the following steps: the method comprises the steps of utilizing a grating ruling tool which is used for adjusting an azimuth angle in advance according to the azimuth angle requirement of the grating ruling tool and is installed in a grating ruling machine to ruling a first scribed line on a substrate, and utilizing the grating ruling tool to press a blade at a position which is away from the first scribed line by a first preset length so as to obtain a blade type of the grating ruling tool; acquiring a first distance between a blade tip of the grating carving tool blade type and a first reticle, a second distance between a blade tail of the grating carving tool blade type and the first reticle and the length of the grating carving tool blade type, and acquiring a first deflection angle of an azimuth angle of the grating carving tool by utilizing the first distance, the second distance and the length of the grating carving tool blade type; and judging whether the first deflection angle meets the requirement of the azimuth angle of the grating ruling tool, if not, adjusting the azimuth angle of the grating ruling tool according to the first deflection angle so as to enable the first deflection angle to meet the requirement of the azimuth angle of the grating ruling tool.

According to the technical scheme disclosed by the application, the first deflection angle of the azimuth angle of the grating ruling tool is obtained through the first distance between the edge tip of the edge shape of the grating ruling tool and the first scribed line of the grating ruling tool, the second distance between the edge tail of the edge shape of the grating ruling tool and the first scribed line and the length of the edge shape of the grating ruling tool, whether the first deflection angle meets the requirement of the azimuth angle of the grating ruling tool is judged, the azimuth angle of the grating ruling tool is adjusted according to the first deflection angle when the first deflection angle is not met, the accurate judgment of the azimuth angle of the grating ruling tool is realized through the quantitative calculation of the deflection condition of the azimuth angle of the grating ruling tool, the accurate adjustment of the azimuth angle of the grating ruling tool is conveniently realized according to the obtained first deflection angle, the accuracy of the azimuth angle adjustment of the grating ruling tool is improved, and the azimuth angle of the grating ruling tool can be directly adjusted according to the first deflection angle, so that, therefore, the efficiency of adjusting the azimuth angle of the grating ruling tool can be improved.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced below, it is obvious that the drawings in the following description are only embodiments of the present application, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.

Fig. 1 is a flowchart of a method for adjusting an azimuth angle of a grating ruling tool according to an embodiment of the present disclosure;

FIG. 2 is a schematic diagram of a substrate surface after an operation process is performed on the substrate surface by a grating ruling tool according to an embodiment of the present disclosure;

fig. 3 is a schematic cross-sectional view of a grating ruling blade type edge provided in an embodiment of the present disclosure;

fig. 4 is a schematic cross-sectional view of a grating engraved edge type edge tail according to an embodiment of the present disclosure.

Detailed Description

The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

Referring to fig. 1 and fig. 2, in which fig. 1 shows a flowchart of an adjusting method of an azimuth angle of a grating ruling tool according to an embodiment of the present disclosure, and fig. 2 shows a schematic diagram of a substrate surface after an operation process is performed on the substrate surface by using the grating ruling tool according to an embodiment of the present disclosure. The method for adjusting the azimuth angle of the grating ruling tool provided by the embodiment of the application can comprise the following steps:

s11: the method comprises the steps of utilizing a grating ruling tool which is used for adjusting the azimuth angle in advance according to the azimuth angle requirement of the grating ruling tool and is installed in a grating ruling machine to ruling a first scribed line on a substrate, and utilizing the grating ruling tool to press a blade at a position which is away from the first scribed line by a first preset length so as to obtain a blade shape of the grating ruling tool.

In the grating preparation process, the azimuth angle of the grating ruling tool is adjusted in advance according to the azimuth angle requirement of the grating ruling tool, the grating ruling tool with the adjusted azimuth angle is installed in a grating ruling machine, and the grating ruling tool is used for ruling a first ruling line A on a substrate. Considering that the grating ruling tool is mainly used for ruling the grating film layer, in order to enable the adjustment of the azimuth angle of the grating ruling tool to be closer to a real application scene and improve the accuracy of judgment and adjustment of the azimuth angle of the grating ruling tool, the substrate can be provided with the film layer for preparing the grating, so that the grating ruling tool can judge and adjust the azimuth angle of the grating ruling tool through ruling and edge pressing on the film layer.

After the first scribe line a is scribed, a grating scribe knife installed in the grating scribe machine may be used to scribe the first scribe line a at a first preset length d₁Pressing the edge to obtain the edge shape of the grating ruling tool corresponding to the grating ruling tool. Wherein the first preset length d₁The length is set in advance according to the shape of the first reticle A and the grating ruling tool.

S12: the method comprises the steps of obtaining a first distance between a blade tip of a grating carving tool blade type and a first groove, a second distance between a blade tail of the grating carving tool blade type and the first groove and the length of the grating carving tool blade type, and obtaining a first deflection angle of an azimuth angle of a grating carving tool by utilizing the first distance, the second distance and the length of the grating carving tool blade type.

After obtaining the first reticle A and the grating carving knife edge type, acquiring a first distance a between the knife edge of the grating carving knife edge type and the first reticle A₁Obtaining a second distance a between the edge tail of the grating carving knife edge type and the first reticle A₂And obtaining the length l of the edge of the grating graver and utilizing the first distance a₁Second, secondDistance a₂And the length l of the edge of the grating carving tool passes through a formula theta₁＝|a₁-a₂I/L obtaining a first deflection angle theta of the azimuth angle of the grating ruling tool₁The method and the device can realize the quantitative measurement of the deflection condition of the azimuth angle of the grating ruling tool, thereby improving the accuracy and precision of the judgment of the azimuth angle of the grating ruling tool.

S13: and judging whether the first deflection angle meets the requirement of the azimuth angle of the grating ruling tool, if so, determining that the first deflection angle meets the requirement of the azimuth angle of the grating ruling tool and finishing the judgment and adjustment of the azimuth angle of the grating ruling tool, and if not, executing the step S14.

S14: and adjusting the azimuth angle of the grating ruling tool according to the first deflection angle so that the first deflection angle meets the requirement of the azimuth angle of the grating ruling tool.

At a first deflection angle theta₁Thereafter, the first deflection angle θ can be determined₁Whether the azimuth angle requirement of the grating ruling tool is met or not, and if so, determining a first deflection angle theta₁The azimuth angle requirement of the grating ruling tool is met, at the moment, the judgment and adjustment of the azimuth angle of the grating ruling tool can be finished, and the grating ruling tool in the current state (namely the azimuth angle is the current azimuth angle) can participate in the preparation of the grating to obtain the grating with higher quality; if not, the first deflection angle theta can be obtained according to the obtained first deflection angle theta₁The azimuth angle of the grating ruling tool is adjusted, and the specific adjustment process can be as shown in steps S11 to S13, until the first deflection angle θ₁Can meet the requirement of the azimuth angle of the grating ruling tool.

The first deflection angle theta of the azimuth angle of the grating ruling tool can be accurately calculated₁Therefore, when the first deflection angle θ₁When the requirement of the azimuth angle of the grating ruling tool is not met, the first deflection angle theta can be used₁The azimuth angle of the grating ruling tool is adjusted, and compared with the current method that the azimuth angle of the grating ruling tool is adjusted through a qualitative observation result, the method can utilize the first deflection angle theta₁The angle to be adjusted of the azimuth angle of the grating ruling tool is accurately given, so that the accuracy of the adjustment of the azimuth angle of the grating ruling tool can be improvedAnd (5) determining. In addition, the first deflection angle theta can be utilized₁The angle of the grating ruling tool which is adjusted according to the azimuth angle is accurately given, so that compared with the current actions of adjusting through a qualitative observation result with lower accuracy and repeatedly judging and adjusting due to deviation of the qualitative observation result, the method and the device can reduce the action of repeatedly judging and adjusting according to the first deflection angle theta₁The number of times of the steps S11 to S13 that are repeatedly executed when the azimuth angle of the grating ruling tool is adjusted may be even successful in one-time adjustment without repeating the actions of the steps S11 to S13, so that the efficiency of adjusting the azimuth angle of the grating ruling tool may be improved, and the efficiency of grating preparation may be further improved.

According to the technical scheme disclosed by the application, the first deflection angle of the azimuth angle of the grating ruling tool is obtained through the first distance between the edge tip of the edge shape of the grating ruling tool and the first scribed line of the grating ruling tool, the second distance between the edge tail of the edge shape of the grating ruling tool and the first scribed line and the length of the edge shape of the grating ruling tool, whether the first deflection angle meets the requirement of the azimuth angle of the grating ruling tool is judged, the azimuth angle of the grating ruling tool is adjusted according to the first deflection angle when the first deflection angle is not met, the accurate judgment of the azimuth angle of the grating ruling tool is realized through the quantitative calculation of the deflection condition of the azimuth angle of the grating ruling tool, the accurate adjustment of the azimuth angle of the grating ruling tool is conveniently realized according to the obtained first deflection angle, the accuracy of the azimuth angle adjustment of the grating ruling tool is improved, and the azimuth angle of the grating ruling tool can be directly adjusted according to the first deflection angle, so that, therefore, the efficiency of adjusting the azimuth angle of the grating ruling tool can be improved.

The method for adjusting the azimuth angle of the grating ruling tool provided by the embodiment of the application obtains a first distance between the edge tip of the edge type of the grating ruling tool and the first reticle, a second distance between the edge tail of the edge type of the grating ruling tool and the first reticle and the length of the edge type of the grating ruling tool, and may include:

scanning the first scribed line and the grating scribing knife edge by using a scanning instrument to obtain a scanning appearance;

and obtaining the first distance, the second distance and the length of the edge of the grating graver by scanning the topography.

The first distance a may be obtained in the following manner₁A second distance a₂And length l of the edge of the grating carving tool:

scanning the whole first reticle A (or the edge-shaped part of the first reticle A) and the whole grating carving knife edge by using a scanning instrument to obtain scanning appearances corresponding to the first reticle A and the grating carving knife edge, and then obtaining a first distance a by scanning the appearances₁A second distance a₂And the length l of the edge of the grating ruling tool, the mode of acquiring the scanning morphology by scanning and acquiring the related data according to the scanning morphology is convenient for acquiring the related data, and the accuracy of acquiring the data can be improved, so that the accuracy of determining the azimuth deflection condition of the grating ruling tool can be improved, and the accuracy and the efficiency of adjusting the azimuth of the grating ruling tool can be improved.

Note that, in order to obtain the first distance a₁A second distance a₂The first reticle a and the grating-facet type need to be brought together (i.e. as a whole) for scanning.

Referring to fig. 3 and 4, fig. 3 shows a schematic cross-sectional view at a sharp point of a grating ruling tool provided by an embodiment of the present application, and fig. 4 shows a schematic cross-sectional view at a tail of the grating ruling tool provided by the embodiment of the present application. The method for adjusting the azimuth angle of the grating ruling tool provided by the embodiment of the application obtains the first distance, the second distance and the length of the edge type of the grating ruling tool by scanning the morphology, and can include the following steps:

measuring a distance between an innermost extent of the tip and an innermost extent of the first score line to obtain a first distance;

measuring a distance between an innermost point of the blade tail and an innermost point of the first score line to obtain a second distance;

and measuring the distance between the deepest part of the blade tip and the deepest part of the blade tail to obtain the length of the edge shape of the grating graver.

In order to increase the first distance a obtained₁A second distance a₂And the length l of the grating cutting edgeDegree and accuracy, then for the first distance a₁Can be obtained by measuring the distance between the deepest part of the edge-shaped tip of the grating ruling knife and the deepest part of the first ruling line A by scanning the topography and taking the distance as the first distance a₁(ii) a For the second distance a₂In other words, the distance between the deepest part of the edge-shaped end of the grating blade and the deepest part of the first scribed line a can be measured by scanning the profile and taken as the second distance a₂(ii) a For the length l of the grating ruling blade shape, the distance between the deepest part of the grating ruling blade shape blade tip and the deepest part of the grating ruling blade shape blade tail (i.e. the length of the connecting line between the two parts) can be measured and taken as the length l of the grating ruling blade shape.

According to the method for adjusting the azimuth angle of the grating ruling tool, the scanning instrument can be an atomic force microscope or a scanning electron microscope.

Specifically, an atomic force microscope or a scanning electron microscope can be used as a scanning instrument for scanning the first reticle a and the grating edge type to obtain a scanning morphology with higher resolution, so that the accuracy of data acquisition is improved.

The method for adjusting the azimuth angle of the grating ruling tool provided by the embodiment of the application utilizes the grating ruling tool to press the edge at the position away from the first scribed line by the first preset length to obtain the edge type of the grating ruling tool, and may include:

pressing edges at different positions which are away from the first scribed line by a first preset length by using a grating graver to obtain a plurality of alternative grating graver edge types;

and selecting one alternative grating carving tool edge type with the best edge type from the multiple alternative grating carving tool edge types as the grating carving tool edge type.

When the grating ruling tool is used for pressing the edge to obtain the grating ruling tool edge type, the grating ruling tool can be used for pressing the edge at different positions which are away from the first reticle A by a first preset length to obtain a plurality of alternative grating ruling tool edge types, and then one alternative grating ruling tool edge type with the best edge type can be selected from the alternative grating ruling tool edge types to be used as the grating ruling tool edge type to obtain data, so that the accuracy and the precision of data obtaining are improved.

The edge shape of the alternative grating ruling tool with the best edge shape refers to the edge shape of the alternative grating ruling tool, which is matched with the shape of the grating ruling tool, has the most obvious edge shape and is most easy to acquire relevant data.

Of course, in addition to obtaining a plurality of alternative grating ruling tool edge types by performing edge pressing at different positions away from the first reticle a by a first preset length, a plurality of alternative grating ruling tool edge types can be obtained by performing edge pressing at positions away from the first reticle a by different lengths, and then one alternative grating ruling tool edge type with the best edge type is selected from the plurality of alternative grating ruling tool edge types as the grating ruling tool edge type.

The method for adjusting the azimuth angle of the grating ruling tool provided by the embodiment of the application utilizes the grating ruling tool to press the edge, and can include the following steps:

repeating the pressing blade actions for a preset number of times on the substrate, wherein the pressing blade actions comprise the action of dropping the grating ruling tool and the action of lifting the grating ruling tool.

When the grating ruling tool is used for ruling, a preset number of ruling motions (wherein one complete ruling motion comprises one motion of falling the grating ruling tool and one motion of lifting the grating ruling tool) can be repeated on the substrate to obtain the grating ruling tool blade with obvious blade shape and high blade shape goodness of fit.

The method for adjusting the azimuth angle of the grating ruling tool provided by the embodiment of the application can further include, after the first scribed line is scribed on the substrate by the grating ruling tool which is used for adjusting the azimuth angle in advance according to the requirement of the azimuth angle of the grating ruling tool and is installed in the grating ruling machine:

scribing a second scribed line at a position which is away from the first scribed line by a second preset length by using a grating scribing knife; the second reticle is parallel to the first reticle, and the grating carving knife edge is positioned between the first reticle and the second reticle;

acquiring a third distance between the blade tip and the second scribed line and a fourth distance between the blade tail and the second scribed line;

obtaining a second deflection angle of the grating azimuth angle by using the third distance, the fourth distance and the length of the grating carving knife edge;

and obtaining an average deflection angle by using the first deflection angle and the second deflection angle, taking the average deflection angle as the first deflection angle, and executing the step of judging whether the first deflection angle meets the azimuth angle requirement of the grating ruling tool.

After obtaining the first scribe line a, a grating ruling tool may be used to distance the first scribe line a by a second preset length d₂The second scribe line B is scribed at the position of (a), wherein the second scribe line B is parallel to the first scribe line a and the grating scribe knife can be located between the first scribe line a and the second scribe line B (see fig. 2 to 4 in particular). Then, a third distance B between the edge-type tip of the grating ruling tool and the second ruling line B can be obtained₁A fourth distance B between the edge tail of the grating cutting edge and the second scribed line B₂(the specific acquisition mode is to acquire the first distance a from the first reticle A and the grating carving edge type₁A second distance a₂Similarly, not described in detail herein) and may utilize the third distance b₁A fourth distance b₂And the length l of the edge of the grating ruling tool is calculated by the formula theta₂＝|b₁-b₂Obtaining a second deflection angle theta of the azimuth angle of the grating ruling tool₂. Then, the first deflection angle θ can be utilized₁A second deflection angle theta₂And obtaining an average deflection angle, taking the average deflection angle as a first deflection angle, and executing a step of judging whether the first deflection angle meets the requirement of the azimuth angle of the grating ruling tool, namely executing step S13 and related steps thereof.

By the aid of the method, the accuracy of the acquired first deflection angle can be improved, and therefore the accuracy of azimuth angle judgment and adjustment is improved.

Of course, the second scribe line B and the first scribe line a may be scribed on the same side of the grating-scribing edge shape, and then the above steps are performed to obtain the average deflection angle, and the average deflection angle is used as the first deflection angle to determine and adjust the azimuth angle.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Furthermore, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include elements inherent in the list. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element. In addition, parts of the above technical solutions provided in the embodiments of the present application, which are consistent with the implementation principles of corresponding technical solutions in the prior art, are not described in detail so as to avoid redundant description.

The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the application. Thus, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.