阅读说明：本技术 微环延时矩阵及微波光子集成多波束相控阵芯片、系统 (Micro-loop delay matrix and microwave photon integrate multi-beam phased array chip, system ) 是由 李思敏 丛榕 黄梦昊 何正前 潘时龙 于 2019-08-26 设计创作，主要内容包括：本发明公开了一种微环延时矩阵,该微环延时矩阵包含由<I>N</I>×<I>M</I>个上传/下载型(add/drop)微环单元所组成的阵列；每个微环单元包括：至少一个微环谐振器,与所述微环谐振器分别耦合的一根输入光波导和一根输出光波导,用于调节输入光波导和输出光波导与微环谐振器之间耦合系数的耦合系数调节电极,以及用于调节微环谐振器的谐振波长的谐振波长调节电极；同一行的<I>M</I>个上传/下载型微环单元共用一根输入光波导,且同一行的<I>M</I>个上传/下载型微环单元的下载端耦合为一路,作为该行的输出端。本发明还公开了一种微波光子集成多波束相控阵芯片、系统。本发明理论上没有波束倾斜效应,工作带宽更宽,工作结构更加紧凑,控制更加灵活,且大幅降低成本。(The invention discloses a kind of micro-loop delay matrix, the micro-loop delay matrix include by N × M Array composed by a upload/downloading type (add/drop) micro-loop unit；Each micro-loop unit includes: at least one micro-ring resonator, the input waveguide coupled respectively with the micro-ring resonator and an output optical waveguide, electrode is adjusted for adjusting input waveguide and exporting the coefficient of coup of the coefficient of coup between optical waveguide and micro-ring resonator, and the resonance wavelength of the resonance wavelength for adjusting micro-ring resonator adjusts electrode；With a line M A upload/downloading type micro-loop piece input waveguide of units shared, and with a line M A upload/downloading type micro-loop unit downloading end is coupled as all the way, the output end as the row.The invention also discloses a kind of microwave photons to integrate multi-beam phased array chip, system.The present invention does not have beam tilt effect theoretically, and bandwidth of operation is wider, and work structuring is more compact, and control is more flexible, and cost is greatly reduced.)

1. a kind of micro-loop delay matrix, which is characterized in that the micro-loop delay matrix includes by N × M upload/downloading type micro-loop list Array composed by member, N, M are the integer greater than 1；Each upload/downloading type micro-loop unit includes: that at least one micro-loop is humorous Vibration device, the input waveguide coupled respectively with the micro-ring resonator and an output optical waveguide, for adjusting input light The coefficient of coup of the coefficient of coup adjusts electrode between waveguide and output optical waveguide and micro-ring resonator, and humorous for adjusting micro-loop The resonance wavelength of the resonance wavelength of vibration device adjusts electrode；With M upload/downloading type micro-loop piece input light of units shared of a line Waveguide, and be coupled as all the way with the M upload of a line/downloading type micro-loop unit downloading end, the output end as the row.

2. micro-loop delay matrix as described in claim 1, which is characterized in that with the M upload/downloading type micro-loop unit of a line Downloading end is respectively coupled as all the way after an amplitude control element.

3. a kind of microwave photon integrates multi-beam phased array chip, which is characterized in that be integrated on the chip with lower unit:

Laser array unit, it includes the lasers that M exports different wave length light carrier；

Single side-band modulator array element, it includes M electrooptic modulators, for using M microwave beam to described M different wave Long light carrier carries out single sideband modulation respectively, generates the road M single sideband modulated signal；

M × N coupling unit, for the coupled signal of the road M single sideband modulated signal to be divided into the road N；

Delay matrix is micro-loop delay matrix as claimed in claim 1 or 2, the N row input waveguide of the micro-loop delay matrix It is connect correspondingly with N number of output end of M × N coupling unit, upload/downloading type micro-loop unit of the i-th column jth row is set It is identical as the wavelength of the i-th road single sideband modulated signal that i-th of light carrier modulates by resonance peak and the i-th tunnel Qi Dui is unilateral Amount of delay with modulated signal is j × Δ τ_i, i=1,2 ..., M, j=1,2 ..., N, Δ τ_iFor corresponding to i-th column upload/under The adjustable delay parameter of load type micro-loop unit, by adjusting upload/downloading type micro-loop unit coefficient of coup in real time, thus it is possible to vary Δτ_i, to realize the real-time adjusting of beam direction；

Photodetector array unit, it includes N number of photodetectors, for correspondingly exporting the N row of delay matrix Signal is converted to electric signal.

4. a kind of microwave photon integrates multi-beam phased array system, which is characterized in that the system includes micro- as claimed in claim 3 Wave integreted phontonics multi-beam phased array chip and the antenna array that is made of N number of bay, N number of bay and institute The output end for stating N number of photodetector of photodetector array unit connects correspondingly.

5. microwave photon as claimed in claim 4 integrates multi-beam phased array system, which is characterized in that its emitted i-th The signal of microwave beam and the angle theta of antenna array normal direction_i=arcsin (Δ τ_i/ d × c), d is adjacent antenna spacing, and c is The light velocity.

Technical field

The present invention relates to multi-beam phased-array technique fields more particularly to a kind of microwave photon to integrate multi-beam phased array core Piece.

Background technique

With space flight and the fast development of missilery and its stealthy and electronic countermeasure technology application, the machinery of early stage Formula scanning radar is due to the limitation of system, and such as the defects of structure is complicated, and reaction speed is slow, the performance for being unable to satisfy radar now refers to Mark such as meets the shorter tracking of radar and monitoring distance, multi-target imaging and faster speed.When photoelectric technology is effectively answered For radar, the electric scanning of radar wave speed is realized, so that the Optical Controlled Phased Array Antenna for developing generation preferably resolves these Problem.The velocity of wave of Optical Controlled Phased Array Antenna antenna is formed to be scanned with velocity of wave, is by controlling the phase delay of microwave signal come real Existing.It is turned to from without mechanical movement, is provided with accurate beam position and strong two-dimensional scanning flexibility.It benefits from The big bandwidth of light unit part and low-loss, microwave photon Wave beam forming have size is small, controls flexible, light-weight, anti-electromagnetism to do The advantages that disturbing.However, can only realize the wave beam of narrowband due to its intrinsic beam tilt effect based on the phased array of phase-shift theory It is formed.

Nearly ten years, it has progressed for microwave photon Multibeam synthesis both at home and abroad.Compared to based on separate unit part Microwave photon Wave beam forming scheme is realized wave beam control, by the volume and cost of the system that greatly reduces on chip. RoeloffzenC GH, DijkPWLV, OldenbeuvingRM, etal. et al. report a kind of based on area of light blass matrix Microwave photon integrates multi-beam scheme (RoeloffzenC GH, DijkPWLV, Oldenbeuving R M, et al.Integrated optical beaMforMers[C]//International Topical MeetingonMicrowa VePhotonics.IEEE, 2015:1-3.), M.A.Piqueras, T.Mengual, O.Navasquillo et al. report one Microwave photon of the kind based on area of light butler matrix integrates Multibeam synthesis scheme (Piqueras MA.Opto-Microwave Butler Matrixes based front-end for aMulti-beaM large direct radiating array antenna[C]//Society of Photo-Optical InstruMentation Engineers.Society of Photo-Optical InstruMentation Engineers (SPIE) Conference Series, 2017:133.), two Person is to constitute the wave beam that a micro-loop delay matrix unit forms multiple directions by optical coupling unit and phase-shifting unit.Two kinds The problems such as scheme is all based on phase-shift theory, and there are wave beam strabismus.2017, TessemaN et al. realize based on when delay The microwave photon of technology integrates Multibeam synthesis scheme, (Tessema N, Cao Z, Van Zantvoort J H C, et al.K-band RF multi-beamformer using Si3N4TTD for home-satellite communications[C]//Optical Fiber Communication Conference.Optical Society OfAmerica, 2017:Tu2I.5.) program is using traditional wildcard-filter style (all-pass) micro-loop delay line, and such micro-loop is only With delay function, the signal being modulated at different wave length can not be selected, to individually control in each wave beam difference array element The amplitude of signal.Also, since controlled amounts are very little, it is difficult to adjust amount of delay when in use.2018, anteclise army et al. reported (anteclise army, Zhu Chen, Zhou Linjie, the integrated multi-beam optical phased array delay network of Chen Jianping, Liu Jiao based on wavelength-division multiplex: in State, 201810424574.X [F] .2018.11.06).The program uses micro-loop to select as beam splitter to be modulated on different wave length Signal, using fixed delay line to signal be delayed, chip size is larger, and can not each wave beam of flexible modulation direction.This Although two kinds based on when the Multibeam synthesis scheme that postpones do not have beam tilt effect, or can not individually control signal Amplitude and delay, it is difficult to adjust the amplitude size and beam position of each array element signals, practical application receive greatly influence and Limitation；In order to which the device for realizing that filtering and delay use is excessive, system redundancy is big, and chip volume is larger, is unfavorable for giving birth to It produces.

Summary of the invention

Wavelength-division can be achieved at the same time the technical problem to be solved by the present invention is to overcome the deficiencies of the prior art and to provide one kind to answer With and delay, and structure is simpler, each parameter can flexible modulation micro-loop delay matrix；And it is provided based on the micro-loop delay matrix A kind of microwave photon integrated multi-beam phased array chip, system, do not have beam tilt effect theoretically, bandwidth of operation is wider, work It is more compact to make structure, control is more flexible, and cost is greatly reduced.

Technical solution of the present invention is specific as follows:

A kind of micro-loop delay matrix, the micro-loop delay matrix include by N × M upload/downloading type (add/drop) micro-loop Array composed by unit, N, M are the integer greater than 1；Each upload/downloading type micro-loop unit includes: at least one micro-loop Resonator, the input waveguide coupled respectively with the micro-ring resonator and an output optical waveguide, for adjusting input The coefficient of coup of the coefficient of coup adjusts electrode between optical waveguide and output optical waveguide and micro-ring resonator, and for adjusting micro-loop The resonance wavelength of the resonance wavelength of resonator adjusts electrode；With the M upload/input of downloading type micro-loop units shared one of a line Optical waveguide, and be coupled as all the way with the M upload of a line/downloading type micro-loop unit downloading end, the output end as the row.

It is further preferred that M upload/downloading type micro-loop unit downloading end with a line respectively passes through an amplitude control It is coupled as all the way after unit processed.

A kind of microwave photon integrates multi-beam phased array chip, is integrated on the chip with lower unit:

Laser array unit, it includes the lasers that M exports different wave length light carrier；

Single side-band modulator array element, it includes M electrooptic modulators, for a to the M not with M microwave beam Co-wavelength light carrier carries out single sideband modulation respectively, generates the road M single sideband modulated signal；

M × N coupling unit, for the coupled signal of the road M single sideband modulated signal to be divided into the road N；

Delay matrix, for micro-loop delay matrix described in any technical solution as above, the N row input of the micro-loop delay matrix Optical waveguide is connect correspondingly with N number of output end of M × N coupling unit, upload/downloading type micro-loop unit of the i-th column jth row To be arranged to resonance peak identical as the wavelength of the i-th road single sideband modulated signal that i-th of light carrier is modulated and it is to i-th The amount of delay of road single sideband modulated signal is j × Δ τ_i, i=1,2 ..., M, j=1,2 ..., N, Δ τ_iFor corresponding to the i-th column Upload/downloading type micro-loop unit adjustable delay parameter, by adjusting upload/downloading type micro-loop unit coefficient of coup in real time, It can change Δ τ_i, to realize the real-time adjusting of beam direction；

Photodetector array unit, it includes N number of photodetectors, for correspondingly by the N row of delay matrix Output signal is converted to electric signal.

A kind of integrated multi-beam phased array system of microwave photon, the system include that microwave photon as described above integrates multi-beam Phased array chip and the antenna array being made of N number of bay, N number of bay and the photodetector array The output end of N number of photodetector of unit connects correspondingly.

Preferably, the microwave photon integrate the signal of i-th of microwave beam that multi-beam phased array system is emitted with The angle theta of antenna array normal direction_i=arcsin (Δ τ_i/ d × c), d is adjacent antenna spacing, and c is the light velocity.

Compared with prior art, technical solution of the present invention has the advantages that

Microwave photon of the present invention integrates multi-beam phased array chip and is often cascading M upload/downloading type micro-loop on the way, right In i-th of micro-loop, the signal of preceding i-1 wave beam is exported from the downloading end of preceding i-1 micro-loop respectively, the signal of i-th of wave beam from I-th of micro-loop downloading end output, the signal of remaining wave beam are exported from straight-through end, and are exported in the downloading end of rear M-i micro-loop, are filled Divide the straight-through part using micro-loop frequency spectrum resource and download part, while using the filtering of micro-loop and delay function, effectively reducing Chip complexity.

The present invention is integrated with laser array unit, single side-band modulator array element, M × N coupling on one chip The components such as unit, micro-loop delay matrix, photodetector array unit have aobvious in many aspects such as volume, stability, power consumptions Work advantage.

Microwave photon of the present invention integrates multi-beam phased array system and is based on delay principle, theoretically imitates without beam tilt It answers, bandwidth of operation is wider, and work structuring is more compact, and control is more flexible, and cost is greatly reduced.

Detailed description of the invention

Fig. 1 is the structural schematic diagram of micro-loop delay matrix provided by the invention；

Fig. 2 is that/the structural schematic diagram of downloading type micro-loop unit is individually uploaded in micro-loop delay matrix；

Fig. 3 is the structural schematic diagram that microwave photon provided by the invention integrates multi-beam phased array chip

Fig. 4 is that the microwave photon of the present invention of 2 array element, 2 wave beam integrates the structural schematic diagram of multi-beam phased array chip；

Fig. 5 is the principle schematic diagram of micro-loop delay matrix in Fig. 4 chip；

Fig. 6 is the transmission response and output signal power schematic diagram of four micro-loops in phased array chip shown in Fig. 4；

Fig. 7 is that the delay of single micro-loop in phased array chip shown in Fig. 4 responds schematic diagram；

Fig. 8 is the directional diagram of two wave beams in phased array chip shown in Fig. 4.

Appended drawing reference meaning in figure is as follows:

1, micro-loop delay matrix, 2, amplitude control element, 3, upload/downloading type micro-loop unit, 4, the coupling unit of M × 1,5, Micro-ring resonator, 6, coefficient of coup adjusting electrode, 7, resonance wavelength adjusting electrode, 8, laser array unit, 9, single-side belt tune Device array element processed, 10, M × N coupling unit, 11, photodetector array unit.

Specific embodiment

For it is existing based on when delay technology microwave photon integrate Multibeam synthesis scheme deficiency, solution of the invention Thinking is to make full use of the straight-through part of micro-loop frequency spectrum resource under using upload/downloading type micro-loop building micro-loop delay matrix Part is carried, while using the filtering of micro-loop and delay function, thus while the big bandwidth of realization adjustable Multibeam synthesis, effectively Reduce chip complexity.

For the ease of public understanding, technical solution of the present invention is described in detail with reference to the accompanying drawing:

The specific structure of micro-loop delay matrix of the present invention as shown in Figure 1, its with N number of input port, each input port Corresponding a line, total N row composition；Every a line of micro-loop delay matrix is micro- by the M upload/downloading type for sharing an input waveguide Ring element 3 forms, and each upload/downloading type micro-loop unit 3 downloading end is separately connected an amplitude control element 2, for pair The amplitude of downloading end output signal is controlled, and M by the downloading end output signal adjusted of amplitude control element 2 via one The coupling unit of a M × 14 is coupled as all the way, the output end as the row；N, M is the integer greater than 1.

The used upload of micro-loop delay matrix of the present invention/downloading type micro-loop unit 3 structure is as shown in Fig. 2, comprising: one A or multiple micro-ring resonators 5, the input waveguide coupled respectively with the micro-ring resonator 5 and an output light wave It leads, adjusts electrode for adjusting input waveguide and exporting the coefficient of coup of the coefficient of coup between optical waveguide and micro-ring resonator 5 6, and the resonance wavelength adjusting electrode 7 of the resonance wavelength for adjusting micro-ring resonator 5.

Microwave photon as shown in Figure 3 can be obtained based on above-mentioned micro-loop delay matrix and integrate multi-beam phased array chip, such as It shown in Fig. 3, is integrated on the chip with lower unit: laser array unit 8 (comprising M laser), single side-band modulator battle array Column unit 9 (including M single side-band modulator), M × N coupling unit 10, micro-loop delay matrix unit 1, photodetector array Unit 11 (including N number of photodetector)；It is connected between each unit by optical waveguide；It is carried by the light that laser array unit 8 exports Wave is respectively connected to the light carrier input terminal of each single side-band modulator in single side-band modulator array element 9, each single side-band modulator Output end be separately connected M input terminal of M × N coupling unit 10, N number of output end of M × N coupling unit 10 is separately connected micro- N number of output end of N number of input terminal of ring delay matrix unit 1, micro-loop delay matrix unit 1 is separately connected photodetector array N number of photodetector input terminal of unit 11, the output signal of N number of photodetector export N number of to external antenna battle array respectively Bay.

Microwave photon shown in Fig. 3 integrates multi-beam phased array chip can be to the delay of the signal of M different microwave beams It is controlled with amplitude, so that direction set by this M beam position, the normal angle with antenna array are respectively θ₁, θ₂…… θ_M.By adjusting the delay size of micro-loop delay unit to change the delay inequality of adjacent array element receiving and transmitting signal, this M can be made Microwave beam direction changes.M laser issues the long light carrier of M Different lightwave, and wavelength is respectively λ₁、λ₂……λ_M, The signal of M wave beam is loaded into respectively in M single side-band modulator, is obtained composed by M routing carrier wave and 1 or -1 rank sideband of ﹢ Single sideband singal.After every road single sideband singal is coupled as all the way by M × N coupling unit, then coupled signal is divided into N again Road output.In micro-loop delay matrix, every a line all has input coupled signal composed by M single sideband modulated signal, adjustment Each upload/downloading type micro-loop unit transmission response, so that the i-th column upload/downloading type micro-loop unit downloading end only exports i-th The single sideband singal of a wave beam；Each upload/downloading type micro-loop unit delay response is adjusted, so that the upload of the column of jth row i-th/under The downloading end of load type micro-loop unit is j × Δ τ for the amount of delay of signal_i, so that the signal beam of the i-th column is oriented to θ_i, θ_iFor arcsin (Δ τ_i/d×c),θ_iFor the signal of i-th of wave beam and the angle of antenna array normal direction, d is between adjacent antenna Away from c is the light velocity.For upload/downloading type micro-loop unit of the i-th row jth column, electrode can be adjusted by adjusting the coefficient of coup in real time It is j × Δ τ to adjust its amount of delay in real time_i2, to change the direction of i-th of wave beam in real time.Each upload/downloading type micro-loop list It is equal that the output signal of the downloading end of member can be adjusted to amplitude by amplitude control element.M amplitude control element of every row Output signal passes through the coupling unit of M × 1 again and is combined into all the way, and the output signal of the coupling unit of N number of M × 1 is visited by photoelectricity respectively After the correspondence photodetector of survey device matrix unit is converted to electric signal, output to corresponding bay.

In order to enable the public more fully understands technical solution of the present invention, below with simplest 2 array element, 2 wave beam For microwave photon integrates multi-beam phased array system, and it is combined with the theoretical analysis of to be further elaborated:

As shown in figure 4,2 array element, the 2 wave beam microwave photon in the present embodiment is integrated and is integrated on multi-beam phased array chip: Laser array unit 8 (including 2 lasers), single side-band modulator array element 9 (including 2 single side-band modulators), 2 × 2 coupling units 10, micro-loop delay matrix unit 1, photodetector array unit 11 (including 2 photodetectors)；Each unit Between pass through optical waveguide connect；The two-way wavelength exported by laser array unit 8 is respectively λ₁、λ₂Light carrier be respectively connected to list The light carrier input terminal of two single side-band modulators, the output end of two single side-band modulators in sideband modulator array element 9 Two input terminals of 2 × 2 coupling units 10 are separately connected, two output ends of 2 × 2 coupling units 10 are separately connected micro-loop delay Two output ends of two input terminals of matrix unit 1, micro-loop delay matrix unit 1 are separately connected photodetector array unit 11 two photodetector input terminals, the output signal of two photodetectors are exported respectively to two days of external antenna battle array Linear array member.

Micro-loop delay matrix unit 1 in the present embodiment is as shown in figure 5, include four uploads/3 institute of downloading type micro-loop unit 2 × 2 arrays of composition, each upload/downloading type micro-loop unit 3 downloading end are separately connected an amplitude control element 2, are used for The amplitude of downloading end output signal is controlled, every a line uploads/the downloading end output signal difference of downloading type micro-loop unit 3 Through being coupled as all the way by 2 × 1 coupling units 4 after the adjustment of amplitude control element 2, the output end as the row.

If the continuous laser of two lasers output are as follows:

E_c1(t)=E_c1cos(ω_c1t)

E_c2(t)=E_c2cos(ω_c2t)

Wherein E_c1, E_c2It is the amplitude of two beam laser, ω respectively_c1, ω_c2Respectively two beam laser frequencies.

After phase-modulation, two-beam is

E₁(t)=E_c1cos(ω_c1t+βcos(ω_Rt))

E₂(t)=E_c2cos(ω_c2t+βcos(ω_Rt))

β is the index of modulation, ω_RFor the centre frequency for the radiofrequency signal that bandwidth is B.

After amplification, single-side belt filtering, wavelength-division multiplex, the light of micro-loop delay matrix unit 1 is inputted are as follows:

E=E_c1[J₀(β)cos(ω_c1t)+J₁(β)cos((ω_c1+ω_R)t+π/2)]+E_c2[J₀(β)cos(ω_c2t)+J₁ (β)cos((ω_c2+ω_R)t+π/2)]

Into after micro-loop delay matrix unit 1, it is divided into two-way transmission, the phase and width of output is adjusted using the micro-loop on each road Degree, upload/downloading type micro-loop unit 3 power function are as follows:

T (λ) is transmission end power function, and D (λ) is downloading end power function, t₁And t₂Coupled zone respectively above and below micro-loop Transmission coefficient, α are attenuation constant in ring, and n is effective refractive index, and L is micro-loop perimeter, and λ is input wavelength,For electrode introducing Phase change.By adding DC voltage regulation t on the electrode₁And t₂AndFall in signal in the delay bandwidth of micro-loop, And amplitude function near flat in delay bandwidth.

Upload/downloading type micro-loop unit 3 delay function are as follows:

Wherein, τ_tFor transmission end delay, τ_dFor downloading end delay, amount of delay and t₁And t₂It is related, as shown in fig. 7, single micro- The reference time delay of ring is [0, τ].As shown in fig. 6, adjusting t₁And t₂AndSo that the signal of the 1st wave beam is from the of the first row The signal of the output of one upload/downloading type micro-loop unit (abbreviation ring 1) downloading end, second wave beam is logical from the straight-through end of ring 1 It crosses, and is exported in second upload of the first row/downloading type micro-loop unit (abbreviation ring 2) downloading end, in the second row, the 1st The signal of wave beam is exported from first upload/downloading type micro-loop unit (abbreviation ring 3) downloading end of the second row, second wave beam Signal pass through from the straight-through end of ring 3, and in the downloading of second upload of the second row/downloading type micro-loop unit (abbreviation ring 4) End output, adjusts the t of each micro-loop unit₁And t₂, the amount of delay by each micro-loop signal can be changed, turn so as to adjust photoelectricity Change the direction of the launch of rear radiofrequency signal.For ring 1, ω_c1+ω_RRadiofrequency signal delay in frequency point two sides is Δ τ₁；For ring 2, ω_c2+ ω_RRadiofrequency signal delay in frequency point two sides is Δ τ₂；For ring 3, ω_c1+ω_RRadiofrequency signal delay in frequency point two sides is 2 Δ τ₁；For Ring 4, ω_c2+ω_RRadiofrequency signal delay in frequency point two sides is 2 Δ τ₂(τ>2Δτ₂)；Fig. 8 is the microwave of 2 array element of the present embodiment, 2 wave beam The directional diagram of integreted phontonics multi-beam phased array system, Δ τ₁Corresponding direction θ₁, in [0, τ/2], range is adjustable；Δτ₂Corresponding direction θ₂, in [0, τ/2], range is adjustable.The independent real-time, tunable of 1~ring of ring 4 passes through reality for each upload/downloading type micro-loop unit When adjust t₁And t₂, so that the amount of delay of ring 1 is Δ τ₁', the amount of delay of ring 3 is 2 Δ τ₁', the amount of delay of ring 2 is Δ τ₂', ring 4 Amount of delay be 2 Δ τ₂', then the direction of first wave beam can be adjusted to θ₁'；The direction of second wave beam is adjusted to θ₂’。

After photoelectric conversion, array element 1 emits signal and is proportional to A 1 output signal of micro-loop delay matrix unit₁cos(ω_R(t +Δτ₁))+A₂cos(ω_R(t+Δτ₂)), array element 2 emits signal and is proportional to A₁cos(ω_R(t+2Δτ₁))+A₂cos(ω_R(t+2 Δτ₂)).The output signal of two photodetectors is respectively connected to two bays of external antenna battle array, can emit simultaneously Direction is θ₁And θ₂Two different beams signal.Also, by adjusting the t of micro-loop unit₁And t₂, thus it is possible to vary signal prolongs Shi Liang, to adjust the direction of two wave beams in real time.

To sum up, it is a kind of compact, high reliablity that microwave photon provided by the invention, which integrates multi-beam phased array chip, multiple The low Wave beam forming scheme of miscellaneous degree.