阅读说明：本技术 导光装置 (Light guide device ) 是由 中泽睦裕 于 2020-03-04 设计创作，主要内容包括：本发明的导光装置包括(13)多个反射单元(20),这些反射单元(20)反射入射光且以照射在被照射物上的方式导引。所述多个反射单元(20)沿所述入射光的行进方向排列。所述多个反射单元(20)分别包括反射所述入射光的第一导光部件(51)。所述多个反射单元(20),分别通过所述第一导光部件(51)旋转而在反射状态与通过状态之间进行切换,其中,该反射状态是使所述入射光反射的状态,该通过状态是使所述入射光通过的状态。在所述多个反射单元(20)之间,形成所述反射状态的时刻不同。在所述反射状态下,伴随所述第一导光部件(51)的旋转,所述入射光反射后的反射光产生偏转。所述反射光向被包括在扫描区域内的被照射点导引,该扫描区域供该反射单元(20)扫描所述被照射物。所述多个反射单元(20)的所述扫描区域与所述入射光的行进方向平行地排列配置。(The light guide device of the present invention includes (13) a plurality of reflection units (20), and these reflection units (20) reflect incident light and guide the incident light in a manner of irradiating on an irradiated object. The plurality of reflection units (20) are arranged along a traveling direction of the incident light. The plurality of reflection units (20) respectively include first light guide members (51) that reflect the incident light. The plurality of reflection units (20) are switched between a reflection state in which the incident light is reflected and a passage state in which the incident light is passed, by the rotation of the first light-guiding member (51), respectively. The timing at which the reflective state is formed differs between the plurality of reflective units (20). In the reflection state, the reflected light after the incident light is reflected is deflected as the first light guide member (51) rotates. The reflected light is guided to an irradiated point included in a scanning area for the reflecting unit (20) to scan the irradiated object. The scanning regions of the plurality of reflection units (20) are arranged in parallel to the traveling direction of the incident light.)

1. A light guide device, characterized in that:

the device comprises a plurality of reflecting units, a plurality of light-emitting units and a plurality of light-emitting units, wherein the reflecting units reflect incident light and guide the incident light in a mode of irradiating an irradiated object;

the plurality of reflection units are arranged along the traveling direction of the incident light;

the plurality of reflection units respectively include first light guide members that reflect the incident light;

a plurality of reflection units that are switched between a reflection state in which the first light-guiding member blocks the incident light and reflects the incident light and a passage state in which the first light-guiding member does not block the incident light and passes the incident light, by rotation of the first light-guiding member;

the timings at which the reflective states are formed are different among the plurality of reflection units;

in the reflective state, the reflected light after the incident light is reflected is deflected as the first light-guiding member rotates;

the reflected light is guided to an irradiated point included in a scanning area for the reflecting unit to scan the irradiated object;

the scanning regions of the plurality of reflection units are arranged in parallel to the traveling direction of the incident light.

2. A light guide device according to claim 1, wherein, in the plurality of reflection units, the first light-guide members are rotated at equal angular velocities and in the same direction,

every time one of the reflection units leaves, the rotational phase difference of the first light-guiding member between 2 of the reflection units increases by a certain angle.

3. A light guide device according to claim 1 or 2, wherein, in the plurality of reflection units, the rotation axes of the first light guide members are parallel to each other, and

in each of the plurality of reflection units, a rotation axis of the first light-guiding member is orthogonal to the incident light.

4. A light-guide device according to any one of claims 1 to 3, wherein, in the reflective state, the first light-guide member is reflected so as to be deflected along a plane perpendicular to a rotation axis of the first light-guide member,

the plane is offset in the direction of the rotation axis with respect to the incident light,

the plurality of reflection units respectively include second light guide members,

the second light guide member guides the reflected light reflected by the first light guide member to the scanning area by reflecting the reflected light.

5. A light guide device according to claim 4, wherein the first light-guiding member has:

a first reflecting surface formed in a planar shape inclined with respect to a plane perpendicular to a rotation axis of the first light-guiding member; and

a second reflecting surface formed in a planar shape inclined with respect to a plane perpendicular to the rotation axis of the first light-guiding member and formed to be inclined with respect to the plane

A direction in which the first reflecting surface is inclined with respect to a plane perpendicular to the rotation axis is opposite to a direction in which the second reflecting surface is inclined with respect to a plane perpendicular to the rotation axis,

the incident light is reflected by the first reflective surface and then reflected by the second reflective surface.

6. A light guide device according to claim 4 or 5, wherein in at least one of the plurality of reflection units, the first light-guide member of the other reflection unit rotates around the second light-guide member.

7. A light guide device according to claim 6, wherein the second light guide member reflects light reflected from the first light guide member while shifting the light toward a rotation axis of the first light guide member.

8. A light guide device according to claim 7, wherein the second light guide member has:

a first light guide reflection surface formed in a planar shape inclined with respect to a plane perpendicular to a rotation axis of the first light guide; and

a second light guide reflection surface formed in a planar shape inclined with respect to a plane perpendicular to the rotation axis of the first light guide member,

the first light guiding reflection surface is inclined to a plane perpendicular to the rotation axis in a direction opposite to a direction in which the second light guiding reflection surface is inclined to a plane perpendicular to the rotation axis,

the light reflected by the first light guide member is reflected by the first light guide reflection surface and then reflected by the second light guide reflection surface.

9. A light guide device according to any one of claims 1 to 8, wherein in each of the plurality of reflection units, 2 or more even numbers of the first light-guiding members are arranged so as to be equally divided by 360 ° at the same angular interval.

10. A light guide device according to any one of claims 1 to 9, wherein the plurality of reflection units each include a lens for scanning, and

the scanning lens is disposed on an optical path from the first light guide member to the scanning area.

11. An optical scanning device characterized in that:

comprising a light guide device according to any one of claims 1 to 10, and

the light emitted from the first light guide member rotating in each of the plurality of reflection units is guided to an arbitrary irradiated point included in the linear scanning line,

an optical path length from an incident position where light is incident on the first light guide member to the irradiated point is substantially constant over all irradiated points on the scanning line,

the scanning speed of the light guided from each of the plurality of reflection units on the scanning line is substantially constant.

Technical Field

The present invention generally relates to a light guide device.

Background

Conventionally, a technique of scanning light from a light source along a linear scanning line has been widely used in an image forming apparatus, a laser processing apparatus, and the like. Patent document 1 discloses an optical beam scanning device mounted on such a device.

The optical beam scanning device of patent document 1 includes a rotary polygon mirror, a plurality of scanning units, a beam switching member, and a beam switching control section. The light beam from the light source device is incident on the light beam switching member. The beam switching control unit is configured to control the beam switching member so that deflection of a beam by the rotating polygon mirror of the scanning unit is repeated for each reflection surface of the rotating polygon mirror, and the scanning units sequentially perform one-dimensional scanning of a spot beam (light beam).

[ Prior art documents ]

[ patent document ]

Patent document 1: japanese patent laid-open publication No. 2016-206245

Disclosure of Invention

Technical problem to be solved by the invention

In the configuration of patent document 1, the light beam switching member is electrically controlled by a light beam switching control unit to switch the optical path of the light beam so that the light beam from the light source device is incident on one scanning unit. Thereby, the structure to switch the optical path of the light beam becomes complicated, and there is still room for improvement in this respect.

Accordingly, an object of the present invention is to provide a light guide device capable of switching a scanning region with a simple structure.

Technical scheme for solving problems

The problems to be solved by the present invention are as described above, and means for solving the problems and effects thereof will be described below.

According to an aspect of the present invention, there is provided a light guide device configured as follows. That is, the light guide device includes a plurality of reflection units that reflect incident light and guide the incident light so as to be irradiated on an irradiated object. The plurality of reflection units are arranged along the traveling direction of the incident light. The plurality of reflection units respectively include first light guide members that reflect the incident light. The plurality of reflection units are switched between a reflection state in which the first light-guiding member blocks the incident light and reflects the incident light and a passage state in which the first light-guiding member does not block the incident light and passes the incident light, by rotation of the first light-guiding member. The timing at which the reflective state is formed differs between the plurality of reflection units. In the reflective state, the reflected light after the incident light is reflected is deflected as the first light-guiding member rotates. The reflected light is directed toward an irradiated point included in a scanning area for the reflecting unit to scan the irradiated object. The scanning regions of the plurality of reflection units are arranged in parallel to the traveling direction of the incident light.

In this way, by rotating the first light-guiding member among the plurality of reflection units, the reflection unit that reflects incident light is mechanically changed, and the scanning area that faces the irradiation object can be switched. Therefore, the scan region can be switched with a simple configuration.

Effects of the invention

According to the present invention, it is possible to provide a light guide device capable of switching a scanning region with a simple configuration.

Drawings

Fig. 1 is a perspective view of a laser processing apparatus including a light guide device according to an embodiment of the present invention;

FIG. 2 is a schematic view showing the constitution of a light guide device;

fig. 3 is a perspective view showing a state where one reflection unit reflects light;

fig. 4 is a perspective view showing a state where the reflection unit passes light;

fig. 5 is a diagram showing a state in which a first reflection unit of the plurality of reflection units reflects light;

fig. 6 is a diagram showing a state in which the second reflecting unit reflects light;

fig. 7 is a diagram showing a modification of the reflection unit; and

fig. 8 is a diagram showing a modification of the light guide device. .

Detailed Description

Embodiments of the present invention will be described below with reference to the drawings. First, a configuration of a laser processing apparatus (optical scanning apparatus) 1 including a light guide device 13 according to an embodiment of the present invention will be described with reference to fig. 1. Fig. 1 is a perspective view of a laser processing apparatus 1.

The laser processing apparatus 1 shown in fig. 1 can process a workpiece (irradiation object) 100 by performing optical scanning while irradiating the workpiece 100 with laser light.

In the present embodiment, the laser processing apparatus 1 is capable of performing non-thermal processing. The non-thermal process may be, for example, an ablation process. The ablation process is a process of irradiating a part of the workpiece 100 with laser light to evaporate the part of the workpiece 100. The laser processing apparatus 1 may be configured to perform thermal processing, that is, to melt the workpiece 100 by the heat of the laser beam to perform processing.

The workpiece 100 is a plate-like member. The workpiece 100 is made of CFRP (carbon fiber reinforced plastic), for example. The workpiece 100 is not limited to a plate-like member, and may be a block-like member, for example. Further, the workpiece 100 may be made of other materials.

The laser light used in the laser processing apparatus 1 may be visible light or electromagnetic waves in a frequency band other than visible light. In the present embodiment, not only visible light but also various electromagnetic waves having a wider frequency band are referred to as "light".

As shown in fig. 1, the laser processing apparatus 1 includes a conveying unit 11, a laser generator 12, and a light guide device 13.

The conveying portion 11 can convey the workpiece 100 in a direction substantially perpendicular to the main scanning direction of the laser processing apparatus 1. Then, the laser processing is performed while the workpiece 100 is conveyed by the conveying unit 11.

In the present embodiment, the conveying portion 11 is a belt conveyor. The conveying unit 11 is not particularly limited, and may be a roller conveyor or a configuration for conveying the workpiece 100 by gripping it. In addition, the conveying section 11 may be omitted, and the workpiece 100 that is not fixed may be irradiated with the laser beam to be processed.

The laser generator 12 is a light source of laser light, and can generate short-time and wide-pulse laser light by pulse oscillation. The time width of the pulse laser is not particularly limited, and may be, for example, a short time interval of nanosecond, picosecond, or femtosecond. The laser generator 12 may be configured to generate CW laser light by continuous wave oscillation.

The light guide device 13 guides the laser light generated by the laser generator 12 so as to irradiate the workpiece 100. The laser light guided by the light guide device 13 is irradiated to an irradiated point 102 on a scanning line 101 set on the surface of the workpiece 100. As will be described in detail later, the irradiated point 102 irradiated with the laser light on the workpiece 100 is moved along the linear scanning line 101 at a substantially constant speed by the operation of the light guide device 13. Thereby, optical scanning can be realized.

Next, the light guide device 13 will be described in detail with reference to fig. 2. Fig. 2 is a schematic diagram showing the configuration of the light guide device 13.

As shown in fig. 2, the light guide device 13 includes a plurality of reflection units 20. In the present embodiment, the plurality of reflection units 20 are disposed inside the housing 17 provided in the light guide device 13.

The plurality of reflection units 20 respectively reflect the laser light incident from the laser generator 12 and guide the laser light toward the workpiece 100. In the following description, the laser light incident on each reflection unit 20 from the laser generator 12 may be referred to as incident light. The plurality of reflection units 20 are arranged in a linear shape along the traveling direction of the incident light. The arrangement direction of the reflection units 20 also coincides with the longitudinal direction of the scanning line 101. The plurality of reflection units 20 are disposed at positions spaced apart from the scanning lines 101 by substantially the same distance, respectively.

Hereinafter, regarding the plurality of reflection units 20, the reflection unit 20 located on the most upstream side in the traveling direction of the incident light may be referred to as a first reflection unit 21. In addition, the remaining reflection units 20 may be referred to as a second reflection unit 22, a third reflection unit 23, a fourth reflection unit 24, a fifth reflection unit 25, a sixth reflection unit 26, a seventh reflection unit 27, an eighth reflection unit 28, and a ninth reflection unit 29 in order from the first reflection unit 21 toward the downstream side in the traveling direction of the incident light.

Each reflection unit 20 can perform optical scanning by deflecting and reflecting laser light. The region (scanning region) where the workpiece 100 is optically scanned by each reflection unit 20 is different from the scanning regions of the other reflection units 20. Fig. 1 and 2 show a first scanning area 31, a second scanning area 32, a third scanning area 33, a fourth scanning area 34, a fifth scanning area 35, a sixth scanning area 36, a seventh scanning area 37, an eighth scanning area 38, and a ninth scanning area 39. The 9 scanning regions are arranged in a linear array. The scanning line 101 is constituted by a set of these scanning regions.

The first scanning area 31 is scanned by the first reflecting unit 21, and then, each scanning area is sequentially scanned by the corresponding reflecting unit 20. The ninth scanning area 39 is scanned by the ninth reflecting unit 29.

Each reflection unit 20 can repeatedly switch between a reflection state in which incident light is reflected and scanned and a transmission state in which incident light is transmitted downstream without being reflected. When the reflection unit 20 is in the reflection state, light scanning of a corresponding scanning area (for example, the first scanning area 31 in the case of the first reflection unit 21) is performed. When the reflecting unit 20 is in the passing state, the reflecting unit 20 does not perform light scanning.

The timing of forming the reflective state of each reflective unit 20 differs between the plurality of reflective units 20. Thereby, the plurality of scanning regions are scanned by switching the reflection unit 20 to be in the reflection state.

In the present embodiment, the reflection units 20 forming the reflection state are sequentially switched one by one from the upstream side toward the downstream side in the traveling direction of the incident light. Specifically, the reflection unit 20 is formed in the reflection state by the first reflection unit 21, the second reflection unit 22, and the third reflection units 23 and … in this order. However, the reflecting means 20 may be switched to the reflecting state in order from the downstream side, or may be switched in order different from the arrangement order of the reflecting means 20.

Next, referring to fig. 3 to 6, each reflection unit 20 will be described in detail. Fig. 3 is a perspective view showing a state in which one reflection unit 20 reflects light. Fig. 4 is a perspective view showing a state where the reflection unit 29 passes light. Fig. 5 is a diagram showing a state in which the first reflecting unit 21 among the plurality of reflecting units 20 reflects light. Fig. 6 is a diagram showing a state in which the second reflecting unit 22 reflects light.

Fig. 3 shows only the first reflection unit 21 of the 9 reflection units 20. Since the 9 reflection units 20 have the same configuration, the first reflection unit 21 will be described as a representative example in the following description.

As shown in fig. 3, the first reflecting unit 21 includes a rotary table (rotary member) 41, a motor (drive source) 42, a first light guide member 51, a second light guide member 52, and a scanning lens 53.

In the present embodiment, the turntable 41 is a hollow disk-shaped member and is rotatable about the rotation shaft 20 c. One end of a hollow cylindrical transmission shaft 43 is fixed to the turntable 41. The transmission shaft 43 is rotatably supported by a housing, not shown, of the reflection unit 20.

The motor 42 can rotate the rotary table 41. The rotary table 41 rotates together with the transmission shaft 43 by transmitting the driving force of the motor 42 to the transmission shaft 43. In the present embodiment, the motor 42 is an electric motor, but is not limited thereto.

The first light-guiding member 51 is provided integrally with the rotating table 41 so as to be rotatable about the rotating shaft 20 c. The rotation axis 20c is disposed so as to be orthogonal to the optical path of the laser beam incident on the reflection unit 20. Hereinafter, the optical path of the laser light incident on the reflection unit 20 may be referred to as a first optical path L1. The incident light traveling along the first light path L1 is received by a reflecting surface, which will be described later, provided in the first light-guiding member 51, and can be reflected. The first light-guiding member 51 is fixed to the vicinity of the outer periphery of the rotating table 41 by screws or the like.

An even number of 2 or more first light-guiding members 51 are provided on one rotating table 41 (one reflection unit 20). The first light-guide members 51 have the same shape.

In the present embodiment, 2 first light-guiding members 51 are provided on one rotating table 41. The 2 first light-guiding members 51 are equally divided by 360 ° and arranged on the turntable 41. Specifically, as shown in fig. 3, one first light-guiding member 51 is disposed at a position 180 ° different from the other first light-guiding member 51.

The first light-guiding member 51 is formed in a block shape by a metal such as aluminum. The first light guide 51 includes a first reflective surface 61 and a second reflective surface 62. Specifically, the first light-guiding member 51 is formed with a groove having a V-shaped cross section, which is open on the side away from the rotation shaft 20 c. A first reflection surface 61 and a second reflection surface 62 are formed on the inner wall of the groove.

The first reflection surface 61 and the second reflection surface 62 are formed in a planar shape. The first reflecting surface 61 is disposed obliquely to a virtual plane perpendicular to the rotation axis 20 c. The second reflecting surface 62 is disposed obliquely to a virtual plane perpendicular to the rotation axis 20 c.

The first reflecting surface 61 and the second reflecting surface 62 are inclined in opposite directions at equal angles (specifically, 45 °) to each other with respect to a virtual plane perpendicular to the rotation axis 20 c. Therefore, the first reflecting surface 61 and the second reflecting surface 62 are arranged to form a V shape.

In the present embodiment, the 2 first light-guiding members 51 are arranged at positions corresponding to mutually opposing sides of a regular polygon (specifically, a regular octagonal shape). Thus, the central angle corresponding to the entire first light-guiding member 51 is 20 °. The first light-guiding member 51 is not disposed at a position corresponding to a side other than the facing side.

When the 2 first light-guiding members 51 rotate together with the rotating table 41, the state where the laser light that has entered the reflection unit 20 and has traveled along the first optical path L1 is received by the first light-guiding members 51 and the state where the laser light is not received are alternately switched. As shown in fig. 3, any one of the 2 first light-guiding members 51 blocks a state of incident light, that is, the above-described reflective state. As shown in fig. 4, the 2 first light-guiding members 51 are in a state of not blocking incident light, i.e., the passing state.

Focusing on the case of one first light-guiding member 51, the first light-guiding member 51 cuts the optical path of incident light twice every 360 ° rotation. As described above, the first light-guiding member 51 has the reflecting surfaces (specifically, the first reflecting surface 61 and the second reflecting surface 62) for reflecting the incident light formed only on the side away from the rotation axis 20 c. In one of the 2 cuts, the reflective surface of the first light-guiding member 51 faces upstream in the traveling direction of the incident light, and thus the light can be efficiently reflected. On the other hand, in the remaining one-time cutting, since the reflection surface of the first light-guiding member 51 faces the downstream side in the traveling direction of the incident light, the first light-guiding member 51 does not function effectively even if light is irradiated on the first light-guiding member 51.

However, in the present embodiment, any one of the first light-guiding members 51 is disposed so as to form a pair with the other first light-guiding member 51 that is different in phase by 180 °. Therefore, at the time when the first light-guiding member 51 cuts the optical path in the direction in which the incident light cannot be efficiently reflected, the first light-guiding member 51 on the opposite side surely cuts the optical path in the direction in which the incident light is efficiently reflected. Thus, the first light-guiding member 51 having the reflecting surface not facing the incident light does not substantially obstruct the passage of the incident light, and therefore, the light can be efficiently utilized as a whole.

The first light path L1 is orthogonal to the rotation axis 20 c. The 2 first light-guiding members 51 are arranged so as to be out of phase by 180 ° with each other. Therefore, the incident light can be received only by the first light-guiding member 51 positioned on the upstream side of the first optical path L1, out of the 2 first light-guiding members 51 arranged with the rotation shaft 20c interposed therebetween.

When the first light-guiding member 51 reaches the predetermined rotational phase, the first reflecting surface 61 is disposed so as to overlap the first optical path L1. Thereby, the incident light is reflected by the first reflection surface 61 and then reflected by the second reflection surface 62.

The first reflection surface 61 and the second reflection surface 62 of the first light-guiding member 51 face a direction perpendicular to the rotation axis 20c when viewed along the rotation axis 20 c. As shown in fig. 3, when the first light-guiding member 51 is rotated in a state where the first light-guiding member 51 receives incident light, the directions of the first reflection surface 61 and the second reflection surface 62 continuously change. Thereby, the direction of the light emitted from the second reflecting surface 62 smoothly changes in the direction indicated by the black arrow in fig. 3. In this way, deflection of the emitted light can be achieved.

Since the first reflection surface 61 and the second reflection surface 62 are arranged in a V shape, the emitted light is deflected along a plane perpendicular to the rotation axis 20c as indicated by black arrows in fig. 3 with the rotation of the first light-guiding member 51. This plane is offset in the direction of the rotation axis 20c with respect to the first optical path L1. This allows light emitted from the first light-guiding member 51 to be incident on the second light-guiding member 52.

The laser light is incident on the reflection unit 20 so as to be orthogonal to the rotation axis 20 c. When the rotational phase of the first light-guiding member 51 completely matches the direction of the incident light, the first reflection surface 61 and the second reflection surface 62 are orthogonal to the incident light when viewed along the rotation axis 20 c. Thus, at this time, the laser light is reflected 2 times by the first light-guiding member 51 so as to be folded back, and is emitted in a direction parallel to and opposite to the direction of the first optical path L1 as shown by the second optical path L2 in fig. 3.

The second light guide member 52 reflects the light emitted from the first light guide member 51 and guides the light to the scanning area (first scanning area 31) corresponding to the first reflecting unit 21.

The second light-guiding member 52 is disposed at a position shifted by an appropriate distance in the direction of the rotation axis 20c with respect to the 1 st optical path L1. The second light guide 52 is fixed to one end of the elongated fixed shaft 44 in the longitudinal direction by a screw or the like. An elongated recess 44a formed along the optical path of incident light is formed in the fixed shaft 44. Thus, the laser light from the laser generator 12 is guided to the first light-guiding member 51 side through the recess 44a as the light passage without being blocked by the second light-guiding member 52 and the fixed shaft 44.

The second light guide 52 is formed in a block shape using a metal such as aluminum. The second light guide member 52 includes a first light guide reflection surface 66 and a second light guide reflection surface 67. Specifically, when viewed along the rotation axis 20c, the second light-guiding member 52 is formed with a groove having a V-shaped cross section, and the groove opens on a side inclined by 45 ° with respect to the direction of the first optical path L1. A first light guiding reflection surface 66 and a second light guiding reflection surface 67 are formed on the inner wall of the groove.

The first light guiding reflection surface 66 and the second light guiding reflection surface 67 are formed in a planar shape. The first light guide reflection surface 66 is disposed obliquely to a virtual plane perpendicular to the rotation axis 20 c. The second light guide reflection surface 67 is disposed obliquely to a virtual plane perpendicular to the rotation axis 20 c.

The first light guiding reflection surface 66 and the second light guiding reflection surface 67 are inclined in opposite directions at equal angles (specifically, 45 °) to each other with respect to a virtual plane perpendicular to the rotation axis 20 c. Thus, the first light guiding reflection surface 66 and the second light guiding reflection surface 67 are arranged to form a V shape.

The first light guide reflection surface 66 and the second light guide reflection surface 67 of the second light guide member 52 are arranged so as to cover the deflection range of the light generated by the first light guide member 51. The first light guide reflection surface 66 is disposed corresponding to the plane including the deflection range of the light emitted from the first light guide member 51. Thereby, the laser light is reflected by the first light guiding reflection surface 67 and then reflected by the second light guiding reflection surface 67.

The scanning lens 53 is a free-form lens, and a known f θ lens can be used, for example. The scanning lens 53 is disposed between the second light guide 52 and the first scanning area 31. The scanning lens 53 can keep the focal length constant in the central portion and the peripheral portion of the scanning range.

The 9 light reflection units 20 configured as described above are arranged in the traveling direction of the incident light from the laser generator 12, thereby configuring the light guide device 13 shown in fig. 2. In all the reflection units 20, the rotation axes 20c of the first light-guiding members 51 are parallel to each other. In the 9 reflection units 20, the first light-guiding members 51 are rotated at equal angular velocities and in the same direction. The rotational phase of the first light-guiding member 51 differs between the plurality of reflection units 20. This makes it possible to make the timing at which the first light-guiding member 51 receives the incident light different between the plurality of reflection units 20. In the present embodiment, the rotational phase difference of the first light-guiding member 51 between 2 reflection units 20 increases by a certain angle (20 ° in the present embodiment) each time one reflection unit 20 is separated. This enables the plurality of reflection units 20 to be switched to the reflection state in the order of arrangement.

The rotation of the first light-guiding member 51 linked to the plurality of reflection units 20 can be realized by controlling the motors 42 provided in the plurality of reflection units 20 to rotate synchronously, for example. However, for example, the transmission shafts 43 may be coupled to each other by a gear, a belt, or the like and driven by a common motor to realize the interlocking rotation of the first light-guiding member 51.

Fig. 5 shows a case where only the first reflecting unit 21 of the 9 reflecting units 20 is in a reflecting state. Fig. 6 shows a case where the first reflecting unit 21 is changed to the passing state and the second reflecting unit 22 is changed to the reflecting state as a result of the first light-guiding member 51 of each reflecting unit 20 being rotated from the state of fig. 5. By sequentially switching the reflection units 20 for performing optical scanning in this manner, optical scanning along the long scanning line 101 can be achieved as a whole.

In the mutually adjacent reflection units 20, the transmission shaft 43 of the reflection unit 20 on the upstream side of the incident light is mounted on the fixed shaft 44 of the reflection unit 20 on the downstream side. Thereby, the first light-guiding member 51 of the upstream-side reflecting unit 20 rotates around the second light-guiding member 52 of the downstream-side reflecting unit 20. As described above, since light is reflected while being shifted in the second light-guiding member 52, the light emitted from the second light-guiding member 52 is not blocked by the rotating first light-guiding member 51. With this arrangement, the light guide device 13 can be miniaturized, and the scanning areas of the respective reflection units 20 can be easily brought close to each other.

As described above, the light guide device 13 according to the present embodiment includes the plurality of reflection units 20, and the reflection units 20 reflect incident light and guide the incident light so as to be irradiated on the workpiece 100. And a plurality of reflection units 20 arranged along a traveling direction of incident light. The plurality of reflection units 20 respectively include first light-guiding members 51 that reflect incident light. The plurality of reflection units 20 are switched between a reflection state in which the first light-guiding member 51 receives incident light and reflects the incident light and a passage state in which the first light-guiding member 51 does not receive the incident light and passes the incident light, by rotation of the first light-guiding member 51. The timing of forming the reflective state differs between the plurality of reflection units 20. In the reflective state, the reflected light after the incident light is reflected is deflected as the first light-guiding member 51 rotates. The reflected light is directed toward an irradiated spot 102 included in a scanning area where the reflection unit scans the workpiece 100. The first scanning region 31 of the first reflecting means 21 and the second scanning regions 32 and … of the second reflecting means 22 are arranged in parallel with the traveling direction of incident light.

Thus, by rotating the first light guide member 51 in each of the plurality of reflection units 20, the reflection unit 20 that reflects incident light can be mechanically changed, and the scanning area to the workpiece 100 can be switched. Therefore, the scan region can be switched with a simple configuration.

In the present embodiment, in the plurality of reflection units 20, the first light-guiding members 51 rotate at the same angular velocity and in the same direction. Every time one reflection unit 20 leaves, the rotational phase difference of the first light-guiding member 51 between 2 reflection units 20 increases by a certain angle.

Thereby, the regularity switching of the reflection unit 20 that reflects the incident light and the synchronization of the deflection of the light to scan can be achieved. In addition, the plurality of scanning regions can be scanned in the order of arrangement.

In the present embodiment, in the plurality of reflection units 20, the rotation axes 20c of the first light-guiding members 51 are parallel to each other. In each of the plurality of reflection units 20, the rotation axis 20c of the first light-guide member 51 is orthogonal to the incident light.

Thus, the incident light can pass through the reflection unit 20 in the transmission state and reach the reflection unit 20 in the reflection state.

In the present embodiment, in the reflecting state of the reflecting means 20, the first light-guiding member 51 is reflected so as to be deflected along a plane perpendicular to the rotation axis 20c of the first light-guiding member 51. The plane is shifted in the direction of the rotation axis 20c with respect to the incident light incident on the reflection unit 20. The plurality of reflection units 20 respectively include second light-guide members 52. The second light-guiding member 52 reflects the reflected light reflected by the first light-guiding member 51 and guides the reflected light to the scanning area.

Thus, the second light guide member 52 reflects light, thereby increasing the degree of freedom in the position of the scanning region. Further, by reflecting the light while shifting the light by the first light-guiding member 51, a layout can be realized in which the incident light entering the reflection unit 20 is not blocked by the second light-guiding member 52.

In the present embodiment, the first light-guiding member 51 includes a first reflecting surface 61 and a second reflecting surface 62. The first reflecting surface 61 is formed in a planar shape inclined with respect to a plane perpendicular to the rotation axis 20c of the first light-guiding member 51. The second reflecting surface 62 is formed in a planar shape inclined with respect to a plane perpendicular to the rotation axis 20c of the first light-guiding member 51. The direction in which the first reflecting surface 61 is inclined with respect to the plane perpendicular to the rotation axis 20c is opposite to the direction in which the second reflecting surface 62 is inclined with respect to the plane perpendicular to the rotation axis 20 c. The incident light is reflected by the first reflective surface 61 and then reflected by the second reflective surface 62.

This makes it possible to realize a simple structure in which light is reflected while being shifted in the first light-guiding member 51.

In the present embodiment, in all the reflection units 20 except the first reflection unit 21 among the plurality of reflection units 20, the first light-guiding members 51 of the other reflection units 20 rotate around the second light-guiding member 52.

This can shorten the distance between the reflection units 20, and can reduce the size of the light guide device 13.

In the present embodiment, the second light-guiding member 52 reflects light reflected from the first light-guiding member 51 while shifting the light in the direction of the rotation axis 20c of the first light-guiding member 51.

This prevents the light reflected by the second light-guiding member 52 from being blocked by the first light-guiding member 51 rotating around the second light-guiding member 52.

In the present embodiment, the second light-guiding member 52 includes a first light-guiding reflection surface 66 and a second light-guiding reflection surface 67. The first light guide reflection surface 66 is formed in a planar shape inclined with respect to a plane perpendicular to the rotation axis 20c of the first light guide member 51. The second light guide reflection surface 67 is formed in a planar shape inclined with respect to a plane perpendicular to the rotation axis 20c of the first light guide member 51. The first light guiding reflection surface 66 is inclined in a direction opposite to the direction in which the second light guiding reflection surface 67 is inclined in a plane perpendicular to the rotation axis 20 c. The light reflected by the first light guide 51 is reflected by the first light guide reflection surface 66 and then reflected by the second light guide reflection surface 67.

This makes it possible to realize a simple structure in which light is reflected while being shifted in the second light-guiding member 52.

In the present embodiment, an even number of 2 or more first light-guiding members 51 are disposed in each of the plurality of reflection units 20 so as to be equally divided by 360 ° at the same angular interval.

Thus, the plurality of first light-guiding members 51 are rotated, and the reflecting unit 20 can be switched to the multi-reflection state every time it is rotated. Since the plurality of first light-guiding members 51 are arranged in pairs with the rotation axis 20c interposed therebetween, the incident light is not blocked by the first light-guiding members 51 other than the rotation phase reflected for scanning the incident light.

In the present embodiment, each of the plurality of reflection units 20 includes a scanning lens 53. The scanning lens 53 is disposed on an optical path from the first light-guiding member 51 to the scanning area.

This makes it easy to focus on each scanning area.

The laser processing apparatus 1 of the present embodiment includes a light guide device 13. The light emitted from the first light-guiding member 51 rotating in each of the plurality of reflection units 20 is guided to an arbitrary irradiated point 102 included in the linear scanning line 101. The optical path length from the incident position of the light on the first light guide 51 to the irradiated point 102 is substantially constant at all irradiated points on the scanning line 101. The scanning speed of the light guided from each of the plurality of reflection units 20 on the scanning line 101 is substantially constant.

This enables favorable optical scanning along the long scanning line 101.

Next, a modification of the light guide device 13 will be described with reference to fig. 7. In the description of the present modification, the same or similar components as those of the above-described embodiment are assigned the same reference numerals in the drawings, and the description thereof is omitted.

In the modification shown in fig. 7, when the rotational phase of the first light-guiding member 51 completely matches the direction of the incident light, the reflection surface of the first light-guiding member 51 is disposed obliquely at an angle of 45 degrees with respect to the incident light when viewed along the rotation axis 20 c. Therefore, in the reflection unit 20 of the modification, the first light-guiding member 51 deflects the reflected light within an angular range centered on a direction in which the direction of the incident light is changed by 90 ° when viewed along the rotation axis 20 c.

In the modification of fig. 7, the reflection surface of the first light-guiding member 51 is inclined, and thus the second light-guiding member 52 can be omitted although slight deformation occurs during optical scanning. Therefore, it is not necessary to form V-shaped grooves in the first light-guiding member 51 as in the above-described embodiment. In other words, the reflecting surface of the first light-guiding member 51 that reflects incident light can be formed in a planar shape parallel to the rotation axis 20 c.

Although the preferred embodiment and the modified examples of the present invention have been described above, the above configuration can be modified as follows, for example.

The number of the reflection units 20 can be set according to the shape such as the length of the irradiation object, and can be, for example, 3, 4, or 5.

The plurality of reflection units 20 can be slightly separated from each other. Further, a mirror or the like that bends the direction of incident light may be disposed between the plurality of reflection units 20.

Instead of scanning along a single long straight line-shaped scanning line 101, the entire light guide device 13 may be configured to scan along a plurality of unconnected scanning lines 101. The plurality of scanning lines 101 may be arranged to be separated in the longitudinal direction of the scanning lines 101, or may be arranged to be separated in a direction perpendicular to the longitudinal direction. In addition, the directions of the plurality of scanning lines 101 may be different from each other.

In the light guide device 13x shown in fig. 8, 2 reflection units 20 scan along 2 scanning lines 101 arranged in parallel at appropriate intervals. Fig. 8 is a view as viewed from a direction perpendicular to the processing surface of the workpiece 100. The number of the scanning lines 101 may be 3 or more.

In the above embodiment, the number of the first light-guiding members 51 in each reflection unit 20 is set to 2, but the present invention is not limited thereto, and for example, the number may be set to 4, 6, or 8.

The center angle of the first light-guiding member 51 can be appropriately changed. For example, the center angle may be changed so as to have a center angle (30 °) corresponding to one side of a regular dodecagon, instead of the center angle of 20 °.

In the above embodiment, the first light-guiding member 51 of the reflection unit 20 adjacent to the reflection unit 20 on the upstream side in the traveling direction of the incident light is disposed so as to rotate around the second light-guiding member 52 of the reflection unit 20. However, the second light-guiding member 52 may be disposed between the reflection unit 20 and the reflection unit 20 adjacent to the reflection unit 20 at a position downstream in the traveling direction of the incident light.

The first reflection surface 61 and the second reflection surface 62 of the first light-guiding member 51 can also be realized by a prism.

The first light guide reflection surface 66 and the second light guide reflection surface 67 of the second light guide member 52 can also be realized by a prism.

The first light-guiding member 51 may be fixed to, for example, an arm-shaped rotating member instead of the rotating table 41.

Instead of fixing the second light-guiding member 52 to the rotating table 41 of the adjacent reflection unit 20 and the fixed shaft 44 inserted into the transmission shaft 43, the second light-guiding member 52 may be fixed in a suspended manner using, for example, a gate-shaped frame. In this case, the turntable 41 and the transmission shaft 43 do not need to be hollow.

The optical scanning device to which the light guide device 13 is applied is not limited to the laser processing device 1, and may be an image forming device, for example.

In view of the above teachings, it should be evident that the present invention is capable of numerous modifications and variations. Therefore, it is to be understood that within the scope of the appended claims, the invention may be practiced otherwise than as specifically described.

Description of the reference numerals

1 laser processing device (optical scanning device)

13 light guide device

The 20 reflection unit 20c rotates the shaft 51, the first light guide member 52, the second light guide member 53, the scanning lens 61, the first reflection surface 62, the second reflection surface 66, the first light guide reflection surface 67, and the second light guide reflection surface 100 to irradiate a point on the workpiece (irradiation object) 101 where a scanning line 102 is irradiated.