阅读说明：本技术 一种射频补偿发射探针 (A kind of RF compensation emitting probe ) 是由 张尊 汤海滨 曹晋滨 于 2019-07-19 设计创作，主要内容包括：本申请公开了一种射频补偿发射探针,其特征在于,包括发射探针头部、第一扼流电感线圈、第二扼流电感线圈、27.12MHz射频滤波器、13.56MHz射频滤波器、转换电阻、电压表、第一电流表、扫描电源、滤波电容器、数据采集器、第二电流表、第一保护电阻、直流加热电源、第二保护电阻、50欧同轴电缆,通过本发明的技术方案,对空间电位测量信号中的高频噪声能够有效滤除,不仅可以用于常规稳态等离子体空间电位的测量,更加适合用于射频等离子体空间电位的诊断测量。(This application discloses a kind of RF compensation emitting probes, it is characterized in that, including emitting probe head, first choke inductor, second choke inductor, 27.12MHz radio-frequency filter, 13.56MHz radio-frequency filter, transfer resistance, voltmeter, first ammeter, scanning power supply, filter condenser, data collector, second ammeter, first protective resistance, DC heating power supply, second protective resistance, 50 Europe coaxial cables, according to the technical solution of the present invention, high-frequency noise in space potential measuring signal can be effectively filtered out, it can be not only used for the measurement of conventional stationarity Plasma space potential, the diagnostic measurement being more suitable for radio frequency plasma space potential.)

1. a kind of RF compensation emitting probe, which is characterized in that including emitting probe head, the first choke inductor, second Choke inductor, 27.12MHz radio-frequency filter, 13.56MHz radio-frequency filter, transfer resistance, voltmeter, the first electric current Table, scanning power supply, filter condenser, data collector, the second ammeter, the first protective resistance, DC heating power supply, second protect Protect resistance, 50 Europe coaxial cables, wherein

The anode of the DC heating power supply connects one end of second protective resistance, the other end of second protective resistance The first end of first choke inductor is connected, the emitting probe head is separately connected first choke inductor Second end and second choke inductor first end, the second end connection described the of second choke inductor One end of one protective resistance, second ammeter connect the other end and the DC heating power supply of first protective resistance Cathode, the above connection is all made of 50 Europe coaxial cable；

The anode of the scanning power supply is sequentially connected in series first ammeter, the transfer resistance, 13.56MHz radio frequency filter The second end of second choke inductor is accessed after wave device, the 27.12MHz radio-frequency filter, the scanning power supply Cathode is sequentially connected in series the filter condenser and the earth；

One end of the voltmeter is connected between the transfer resistance and the 13.56MHz radio-frequency filter, other end access Greatly；

The record data channel of first ammeter, second ammeter and the voltmeter all with the data collector Connection.

2. a kind of RF compensation emitting probe according to claim 1, which is characterized in that the 13.56MHz rf filtering Design has tunable capacitor in device and the 27.12MHz radio-frequency filter.

Technical field

The invention belongs to plasma science and technical fields more particularly to a kind of measurement of Plasma space potential to examine Disconnected device, in particular to a kind of emitting probe that can be used in the measurement of radio frequency plasma space potential.

Background technique

Space potential in steady-state plasma is a stable value, and emitting probe is used to measure the space of plasma Current potential can obtain more believable test result.But radio frequency (Radio Frequency) plasma is different from stable state Plasma, it is driven by radio-frequency power supply, the periodicity with high frequency (MHz) or hyperfrequency (GHz), and plasma is empty Between current potential also there is synchronous cycle of oscillation.So common emitting probe may be only available in steady-state plasma, for penetrating The diagnosis of frequency Plasma space potential will cause biggish error, or even distortion.

Zhang Guilu of University Of Suzhou et al. proposes a kind of emitting probe, including ceramic tube, the first tungsten wire, second tungsten Silk group, third tungsten wire group and DC power supply.Lu Wenqi of Changzhou Institute of Dalian University of Technology Co., Ltd. et al. proposes one kind certainly Dynamic scanning emitting probe device, the device is by computer, data collecting card, isolation amplifier, probe heater circuit, probe bias electricity Road and probe composition.But above-mentioned emitting probe does not have the components such as high frequency filter, choking-winding, filter capacitor, it can only For the diagnosis of steady-state plasma space potential, the interference of high-frequency noise, Radio Frequency Plasma space potential can not be reduced Oscillation it is helpless.

Summary of the invention

The purpose of the present invention is to solve effective measurements of radio frequency plasma space potential, provide a kind of radio frequency benefit Emitting probe is repaid, the specific technical solution of the present invention is as follows:

A kind of RF compensation emitting probe, which is characterized in that including emitting probe head, the first choke inductor, Two choke inductors, 27.12MHz radio-frequency filter, 13.56MHz radio-frequency filter, transfer resistance, voltmeter, the first electric current Table, scanning power supply, filter condenser, data collector, the second ammeter, the first protective resistance, DC heating power supply, second protect Protect resistance, 50 Europe coaxial cables, wherein the anode of the DC heating power supply connects one end of second protective resistance, institute The other end for stating the second protective resistance connects the first end of first choke inductor, and the emitting probe head connects respectively Connect the second end of first choke inductor and the first end of second choke inductor, second choke induction The second end of coil connects one end of first protective resistance, and second ammeter connects the another of first protective resistance The cathode of one end and the DC heating power supply, the above connection are all made of 50 Europe coaxial cable；The scanning power supply is just Pole is sequentially connected in series first ammeter, the transfer resistance, the 13.56MHz radio-frequency filter, the 27.12MHz radio frequency The second end of second choke inductor is accessed after filter, the cathode of the scanning power supply is sequentially connected in series the filtered electrical Container and the earth；One end of the voltmeter is connected between the transfer resistance and the 13.56MHz radio-frequency filter, separately One end access the earth；The record data channel of first ammeter, second ammeter and the voltmeter all with it is described Data collector connection.

Preferably, it is respectively designed in the 13.56MHz radio-frequency filter and the 27.12MHz radio-frequency filter adjustable Capacitor.

The beneficial effects of the present invention are:

1. two symmetrical choke inductors are added at emitting probe head both ends, it being capable of Radio Frequency Plasma sky Between current potential the higher-order of oscillation generate compensation and barrier, pass through the steady-state component in radio frequency plasma space potential, not only fit For the measurement of steady-state plasma space potential, and Radio Frequency Plasma space potential is able to carry out accurate measurement.

2. the high frequency filter of 13.56MHz and 27.12MHz are added in probe voltage measurement circuit, it can be to the frequency The high-frequency noise of rate is effectively filtered out, and the measurement accuracy of radio frequency plasma space potential is substantially increased.

3. being added to filter condenser in probe voltage measurement circuit, the exchange that can be filtered out in probe voltage signal is made an uproar Sound ingredient keeps the direct current of output smoother, keeps the measurement of Plasma space potential more accurate credible.

4. the comprehensive Combination Design for having used choking-winding, high frequency filter and filter condenser, measures space potential High-frequency noise in signal can effectively filter out, and can be not only used for the measurement of conventional stationarity Plasma space potential, more Diagnostic measurement suitable for radio frequency plasma space potential.

Detailed description of the invention

It in order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, below will be to institute in embodiment Attached drawing to be used is needed to be briefly described, the features and advantages of the present invention will be more clearly understood by referring to the accompanying drawings, attached Figure is schematically to but should not be understood as carrying out any restrictions to the present invention, for those of ordinary skill in the art, not Under the premise of making the creative labor, other drawings may be obtained according to these drawings without any creative labor.Wherein:

Fig. 1 is a kind of circuit connection diagram of RF compensation emitting probe disclosed by the invention；

Fig. 2 is the current -voltage curve figure under the different heating current condition of one embodiment of the invention.

Drawing reference numeral explanation:

1- emitting probe head, the first choke inductor of 2-, the second choke inductor of 3-, the filter of 4-27.12MHz radio frequency Wave device, 5-13.56MHz radio-frequency filter, 6- transfer resistance, 7- voltmeter, the first ammeter of 8-, 9- scanning power supply, 10- filtering Capacitor, 11- data collector, the second ammeter of 12-, the first protective resistance of 13-, 14- DC heating power supply, 15- second are protected Protect resistance, the Europe 16-50 coaxial cable.

Specific embodiment

To better understand the objects, features and advantages of the present invention, with reference to the accompanying drawing and specific real Applying mode, the present invention is further described in detail.It should be noted that in the absence of conflict, the implementation of the application Feature in example and embodiment can be combined with each other.

In the following description, numerous specific details are set forth in order to facilitate a full understanding of the present invention, still, the present invention may be used also To be implemented using other than the one described here other modes, therefore, protection scope of the present invention is not by described below Specific embodiment limitation.

As shown in Figure 1, a kind of RF compensation emitting probe of the invention, including emitting probe head 1, the first choke induction Coil 2, the second choke inductor 3,27.12MHz radio-frequency filter 4,13.56MHz radio-frequency filter 5, transfer resistance 6, electricity Press table 7, the first ammeter 8, scanning power supply 9, filter condenser 10, data collector 11, the second ammeter 12, first protection electricity Hinder 13, DC heating power supply 14, the second protective resistance 15,50 Europe coaxial cables 16, wherein the anode of DC heating power supply 14 is even One end of the second protective resistance 15 is connect, the other end of the second protective resistance 15 connects the first end of the first choke inductor 2, hair It penetrates end of probe 1 and is separately connected the second end of the first choke inductor 2 and the first end of the second choke inductor 3, second The second end of choke inductor 3 connects one end of the first protective resistance 13, and the second ammeter 12 connects the first protective resistance 13 The other end and DC heating power supply 14 cathode, the above connection is all made of 50 Europe coaxial cable 16；Scanning power supply 9 is just Pole is sequentially connected in series the first ammeter 8, transfer resistance 6,13.56MHz radio-frequency filter 5,27.12MHz radio-frequency filter 44 and is followed by Enter the second end of the second choke inductor 3, the cathode of scanning power supply 9 is sequentially connected in series filter condenser 10 and the earth；Voltmeter 7 One end be electrically connected between the transfer resistance 6 and the 13.56MHz radio-frequency filter 5, the other end access the earth；First The record data channel of ammeter 8, the second ammeter 12 and voltmeter 7 is all connect with data collector 11.

Choke inductor can lead to low frequency, resistance high frequency, pass through the steady-state component in radio frequency plasma space potential, And barrier action is generated to its high fdrequency component.Symmetrical first choke inductor and the second choke induction line are used in the present invention Circle, can symmetrical compensation high frequency noise components, while can by the stable potential signal of low frequency, stop high frequency current potential oscillation Signal.

High frequency filter is formed by the capacitor, adjustable condenser, inductor combinations of particular value, in the present invention 13.56MHz radio-frequency filter and 27.12MHz radio-frequency filter the two particular value high frequency filters can respectively by The high fdrequency component of 13.56MHz and 27.12MHz is filtered, and can effectively reduce test loop high-frequency noises.

Filter condenser is to keep the direct current signal of output smoother for filtering out AC noise ingredient.

First choke inductor and the second choke inductor, 13.56MHz radio-frequency filter and the filter of 27.12MHz radio frequency Wave device and the comprehensive of filter condenser use, and can be effectively reduced the high-frequency noise in circuit, keep DC component more smooth, Suitable in the space potential diagnostic test of radio frequency plasma.

In some embodiments, it is respectively designed in 13.56MHz radio-frequency filter 5 and 27.12MHz radio-frequency filter 4 Tunable capacitor has the function of a certain range of noise signal to adjust noise reduction.

The course of work of a kind of RF compensation emitting probe of the invention are as follows: firstly, DC heating power supply 14 is opened, from small Heated current is adjusted to big, heated current is output to emitting probe by the second protective resistance 15 and the first choke inductor 2 Head 1 is heated and emits thermoelectron, when emitting probe head has the light of apparent launching electronics, record second The heated current value I that ammeter 12 measures_heat, it is stored in data collector.

Scanning power supply 9 is opened, the frequency and amplitude for adjusting electric power output voltage generate that an amplitude is adjustable, frequency is in 1Hz To sawtooth voltage signal adjustable between 10Hz, such as frequency is 1Hz, and peak-to-peak value is ± 100V, and sawtooth signal passes through the One ammeter 8, transfer resistance 6,13.56MHz radio-frequency filter 5,27.12MHz radio-frequency filter 4 and the second choke inductor 3 reach emitting probe head 1, control the voltage scanning on emitting probe head 1.Effect of the emitting probe head 1 in scanning voltage Under, it generates different probe currents and is sequentially delivered to after the ballast effect that probe current passes through the second choke inductor 3 27.12MHz radio-frequency filter 4 and 13.56MHz radio-frequency filter 5, the two filters will be to the 27.12MHz in probe current It being filtered with the high-frequency noise of 13.56MHz, filtered probe current is acquired by transfer resistance 6 by the first ammeter 8, The collected probe current of first ammeter 8 and the corresponding probe voltage obtained by the measurement of voltmeter 7, while being input to data In collector 11.Using collected probe voltage as abscissa, collected probe current is ordinate, forms typical electricity Stream-voltage curve is obtained with the space potential value V of plasma from point of inflexion on a curve_p, as shown in Fig. 2, three curves It is corresponding to be different heated current I_heat, acquired and obtained by the second ammeter 12；Abscissa is by the collected spy of voltmeter 7 Needle voltage, ordinate are by the collected probe current of the first ammeter 8.

In the present invention, term " first ", " second ", " third ", " the 4th " are used for description purposes only, and should not be understood as Indication or suggestion relative importance.Term " multiple " refers to two or more, unless otherwise restricted clearly.

The foregoing is only a preferred embodiment of the present invention, is not intended to restrict the invention, for the skill of this field For art personnel, the invention may be variously modified and varied.All within the spirits and principles of the present invention, made any to repair Change, equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.