阅读说明：本技术 等离子体发生装置 (Plasma producing apparatus ) 是由 神藤高广 于 2017-04-04 设计创作，主要内容包括：本发明提供一种等离子体发生装置,通过一对电极的端部之间的放电来产生等离子体,所述一对电极以彼此的侧面相向的状态配设,一对电极的放电侧的端面被切成彼此相对。(The present invention provides a kind of plasma producing apparatus, and plasma is generated by the electric discharge between the end of a pair of electrodes, and the pair of electrode is arranged with the opposite state in mutual side, and the end face of the discharge side of a pair of electrodes is cut into opposite to each other.)

1. a kind of plasma producing apparatus, plasma is generated by the electric discharge between the end of a pair of electrodes, described one Electrode is arranged with the opposite state in mutual side, the plasma producing apparatus is characterized in that,

The end face of the discharge side of the pair of electrode is cut into opposite to each other.

2. a kind of plasma producing apparatus, plasma is generated by the electric discharge between the end of a pair of electrodes, described one Electrode is arranged with the opposite state in mutual side, the plasma producing apparatus is characterized in that,

The end of the discharge side of the pair of electrode is set as the opposite wedge shape in mutual end face.

3. a kind of plasma producing apparatus, plasma is generated by the electric discharge between the end of a pair of electrodes, described one Electrode is arranged with the opposite state in mutual side, the plasma producing apparatus is characterized in that,

The first side toward each other of the pair of electrode with the pair of electrode being formed continuously from the first side respectively The end face angulation of discharge side be set as obtuse angle.

4. plasma producing apparatus according to claim 3, wherein

Centered on the axle center of the electrode and the second side of the side opposite with the first side with from the second side The end face angulation for the respective discharge side of the pair of electrode that face is formed continuously is set as acute angle.

5. plasma producing apparatus according to any one of claims 1 to 4, wherein

Each electrode of the pair of electrode is set as cylinder other than the end of discharge side.

Technical field

The present invention relates to putting between a kind of end by a pair of electrodes being arranged with the opposite state in mutual side Electricity generates the plasma producing apparatus of plasma.

Background technique

In plasma producing apparatus, as documented by following patent documents, processing gas is supplied to reaction chamber, It is supplied electric power to the multiple electrodes for being disposed in reaction chamber.Generate electric discharge in the reaction chamber as a result, processing gas is by plasma Change.

Summary of the invention

Problems to be solved by the invention

In plasma producing apparatus, plasma is generated by interelectrode electric discharge.Therefore, project of the invention It is to provide a kind of plasma producing apparatus that can steadily discharge between electrode.

A technical solution to solve project

In order to solve the above problems, a kind of plasma producing apparatus of this disclosure passes through the end of a pair of electrodes Between electric discharge generate plasma, the pair of electrode is arranged with the opposite state in mutual side, the pair of electrode The end face of discharge side be cut into opposite to each other.

Invention effect

It can be steadily due to generating electric discharge between the end face relative to each other in a pair of electrodes according to the disclosure It discharges.

Detailed description of the invention

Fig. 1 is the perspective view for indicating atmospheric pressure plasma generator.

Fig. 2 is the exploded view for indicating atmospheric pressure plasma generator.

Fig. 3 is the cross-sectional view for indicating atmospheric pressure plasma generator.

Fig. 4 is the perspective view for indicating internal block.

Fig. 5 is the main view, top view, side view for indicating internal block.

Fig. 6 is the perspective view for indicating holding member.

Fig. 7 is the main view for indicating holding member, top view, bottom view, side view.

Fig. 8 is the top view for indicating internal block.

Fig. 9 is the exploded view for indicating previous atmospheric pressure plasma generator.

Figure 10 is the top view for indicating the internal block of previous atmospheric pressure plasma generator.

Figure 11 is the cross-sectional view for indicating the atmospheric pressure plasma generator of variation.

Specific embodiment

Hereinafter, the embodiment of the present invention is described in detail with reference to accompanying drawings as mode for carrying out the present invention.

(A) structure of atmospheric pressure plasma generator

The atmospheric pressure plasma generator 10 of the embodiment of the present invention is shown in FIG. 1 to FIG. 3.Atmos plasma Body generating device 10 is the device for generating plasma under atmospheric pressure.In atmospheric pressure plasma generator 10 has Portion's block 12, bottom piece 14, irradiation mouth 18, holding member 20, a pair of electrodes 24,26, connecting member 28 and upper mass 30.This Outside, Fig. 1 is the perspective view of atmospheric pressure plasma generator 10, and Fig. 2 is the atmospheric pressure plasma in addition to upper mass 30 The exploded perspective view of generating device 10, Fig. 3 are the cross-sectional views of atmospheric pressure plasma generator 10.

Internal block 12 is made of ceramic, as shown in Figure 4 and 5, by approximately cuboid shape main part 32 and formed It is constituted in the flange part 34 of the upper limb of main part 32.In addition, Fig. 4 is the perspective view of internal block 12, Fig. 5 is the master of internal block 12A The side view of view, the top view of internal block 12B and internal block 12C.

The cylinder recess portion 36,38 of a pair of of cylinder is formed in the upper surface of the flange part 34 of internal block 12.In turn, with even The mode for tying a pair of of cylinder recess portion 36,38 is formed with from the bottom surface of a pair of of cylinder recess portion 36,38 towards the inside of main part 32 Link recess portion 40.Further, since the width of connection recess portion 40 is smaller than the diameter of cylinder recess portion 36,38, therefore cylinder recess portion 36,38 Bottom surface be set as the step surface 46,48 of substantially U-shaped.In addition, connection recess portion 40 is set as more being directed towards bottom surface then width Narrow shape with the level is formed with 6 first flow path 50 in the bottom surface of connection recess portion 40 extending in the up and down direction. Also, above-mentioned 6 first flow path 50 are open in the lower surface of internal block 12.In addition, constituent element in the present specification is big In the case where causing rectangle, the width direction of this composition element means short side direction, direction i.e. orthogonal with longitudinal direction.Separately Outside, longitudinal direction is recorded as length direction.

As shown in Fig. 2, bottom piece 14 is shaped generally as rectangular shape, it is made of ceramic.In the upper surface of bottom piece 14 It is formed with the incorporating section 60 for storing internal block 12.Incorporating section 60 is the bottom outlet that has in the upper surface of bottom piece 14 opening, such as Shown in Fig. 3, by being located at the first incorporating section 62 of bottom surface side and being constituted positioned at the second incorporating section 64 of open side.

The depth dimensions of first incorporating section 62 and the height dimension of main part 32 of internal block 12 are roughly the same, the first storage The width dimensions and length dimension in portion 62 are more slightly longer than the width dimensions and length dimension of the main part 32 of internal block 12.Separately Outside, the depth dimensions of the second incorporating section 64 are more slightly longer than the height dimension of the flange part 34 of internal block 12, the width of the second incorporating section 64 It spends size and length dimension is more slightly longer than the width dimensions and length dimension of the flange part 34 of internal block 12.It therefore, will be internal Block 12 is inserted into from the opening of incorporating section 60, the main part 32 of internal block 12 is accommodated in the first incorporating section 62, by internal block 12 Flange part 34 is accommodated in the second incorporating section 64.Further, since height gauge of the depth dimensions of the second incorporating section 64 than flange part 34 Modest ability, therefore upper surface being internally located at than bottom piece 14 in incorporating section 60 of the upper surface of flange part 34, i.e. internal block 12 Locate on the lower upper surface.That is, the inside of the whole incorporating section 60 for entering bottom piece 14 with the state being buried of internal block 12.

In addition, being formed extending in the up and down direction in the bottom surface of incorporating section 60, the i.e. bottom surface of the first incorporating section 62 There are 6 second flow paths 66, above-mentioned 6 second flow paths 66 are open in the lower surface of bottom piece 14.Also, by the way that internal block 12 is received It is contained in incorporating section 60 and second flow path 66 is connected to the first flow path 50 of internal block 12.

Irradiation mouth 18 is fixed on the lower surface of bottom piece 14.It is formed with extending in the up and down direction in irradiation mouth 18 6 third flow paths 70, upper surface and lower surface opening of the above-mentioned 6 third flow paths 70 in irradiation mouth 18.Also, each third stream Road 70 is connected to each second flow path 66 of internal block 12.

Holding member 20 is made of ceramic, as shown in Fig. 6 and Fig. 7, by a pair of of retainer 72,74 and 76 structure of linking part At.A pair of of retainer 72,74 is discretely arranged with the opposite state in mutual side, and is linked by linking part 76.Above-mentioned a pair Each free main part 78 of retainer 72,74 and protruding portion 80 are constituted.Main part 78 is set as substantially having bottom cylindrical shape.In addition, Protruding portion 80 is set as the diameter short cylinder shape smaller than main part 78, slightly prominent downwards from the bottom surface of main part 78.It should Bottom opening of the upper end of protruding portion 80 in main part 78.

In addition, the outer diameter of main part 78 is set as, protrusion roughly the same with the width dimensions of flange part 34 of internal block 12 The outer diameter in portion 80 is set as the internal diameter slightly smaller size of the cylinder recess portion 36,38 than internal block 12.In addition, a pair of of retainer 72, From the axle center of main part 78, close direction is deviated to each other in the axle center of 74 protruding portion 80, the separating distance of a pair of of protruding portion 80 It is set as identical as the separating distance of a pair of of cylinder recess portion 36,38 of internal block 12.

In addition, the bottom surface of a pair of of retainer 72,74 respective main parts 78 is set as step surface, by the first bottom surface 82 and the Two bottom surfaces 84 are constituted.Second bottom surface 84 protrudes downwards from the first bottom surface 82.Second bottom surface 84 is formed as, and keeps towards from a pair The isolated direction in the side 88 of the opposite side of the side 86 relative to each other of the protruding portion 80 of frame 72,74 and in substantially fan expand Exhibition.That is, the first bottom surface 82 is formed in 86 side of side of protruding portion 80, the second bottom surface 84 is formed in 88 side of side of protruding portion 80. In addition, the second bottom surface 84 protrudes downwards from the first bottom surface 82, locate against the top positioned at the lower end than protruding portion 80.

In addition, linking part 76 a pair of of retainer 72,74 above-mentioned a pair of of the retainer 72 of side connection toward each other, 74.The width dimensions of linking part 76 are set as that roughly same outer diameter with the main part 78 of retainer 72,74, linking part 76 it is outer The outer peripheral surface of wall surface and main part 78 is sleekly continuous.In addition, as described above, the outer diameter quilt of the main part 78 of retainer 72,74 It is set as roughly the same with the width dimensions of flange part 34 of internal block 12.In addition, the length dimension of linking part 76 is designed to make The length dimension of holding member 20 is consistent with the length dimension of flange part 34 of internal block 12.The width of holding member 20 as a result, Size and length dimension are set as roughly the same with the width dimensions of the flange part 34 of internal block 12 and length dimension.

In addition, the bottom surface 90 of linking part 76 is coplanar with the first bottom surface 82 of the main part 78 of retainer 72,74, linking part 76 Bottom surface 90 and the first bottom surface 82 of main part 78 be set as round and smooth flat surface.In addition, in linking part 76, in a pair of of retainer 72, the through hole 96 vertically extended is formed between 74, the upper end of through hole 96 is open in the upper surface of linking part 76, Lower end is open in the lower surface of linking part 76.

As shown in figure 3, combining the holding member 20 of such construction with internal block 12.In detail, by holding member The protruding portion 80 of 20 a pair of of retainer 72,74 is inserted in a pair of of cylinder recess portion 36,38 of internal block 12.Protruding portion 80 as a result, Lower end and cylinder recess portion 36,38 step surface 46,48 it is opposite.But the depth dimensions of cylinder recess portion 36,38 are than protruding portion 80 Overhang from the second bottom surface 84 is big.Therefore, the second bottom surface 84 of holding member 20 is contacted with the upper surface of internal block 12, is dashed forward The lower end in portion 80 and the step surface 46,48 of cylinder recess portion 36,38 are opposite with the state with gap out.In this way, by that will keep Component 20 is combined with internal block 12, and the connection recess portion 40 of internal block 12 is kept the blocking of component 20, by connection recess portion 40 and is protected It holds component 20 and reaction chamber 100 is divided.

In addition, as described above, the width dimensions and length dimension of holding member 20 are set as the flange with internal block 12 The width dimensions and length dimension in portion 34 are roughly the same.Therefore, the lower end of the holding member 20 after being combined with internal block 12 It is accommodated in the second incorporating section 64 of bottom piece 14 together with the flange part 34 of internal block 12.

A pair of electrodes 24,26 is each formed as substantial cylindrical, the retainer of the outer diameter of electrode 24,26 than holding member 20 72,74 internal diameter is small.Also, electrode 24,26 is remained by socket 102 in the inside of retainer 72,74 and is vertically extended Posture.The lower end of electrode 24,26 is prominent from the lower end of the lower end of retainer 72, i.e. protruding portion 80, and is inserted in reaction The inside of room 100.

In addition, the lower end for being inserted in the electrode 24,26 of the inside of reaction chamber 100 is set as the opposite wedge in mutual end face Shape.In detail, the lower end of a pair of electrodes 24,26 by the side 106 relative to each other from a pair of electrodes 24,26 towards with this 108 ground of side of the opposite side in side 106 is cut off downwards.That is, the lower end surface 110 of a pair of electrodes 24,26 is cut into Opposite to each other.In addition, side 106 and lower end surface 110 are formed by angle and are set as obtuse angle, side as another expression way Face 108 and lower end surface 110 are formed by angle and are set as acute angle.And then as another expression way, the lower end of electrode 24,26 Face 110 is set as from side 106 towards the then inclined conical surface downward of side 108.

In addition, connecting member 28 is formed as plate, the insertion hole vertically extended is formed in connecting member 28 120.The upper end of insertion hole 120 is open in the upper surface of connecting member 28, and lower end is open in the lower surface of connecting member 28.Insert The inside dimension in hole 120 is more bigger than the size in the width direction and length direction of holding member 20.Also, connecting member 28 exists The upper surface of bottom piece 14 is fixed in the state of so that holding member 20 is inserted through insertion hole 120.In addition, connecting member 28 is upper The upper surface of the linking part 76 of surface and holding member 20 is set as roughly the same height, the retainer 72 of holding member 20, 74 upper end, i.e. main part 78 extend upward from the upper surface of connecting member 28.

In addition, upper mass 30 is shaped generally as rectangular shape, it is formed with a pair in the lower surface of upper mass 30 opening Recess portion 126.The inside dimension of recess portion 126 is more bigger than the outside dimension of the main part 78 of retainer 72,74.Also, in retainer 72,74 Main part 78 be embedded in the state of recess portion 126, the upper surface of connecting member 28 is fixed in the lower surface of upper mass 30.This Outside, the depth dimensions of recess portion 126 are bigger than elongation of the main part 78 from the upper surface of connecting member 28.Therefore, in recess portion 126 Bottom surface and main part 78 between have gap.Cricoid elastomer 128 is inserted in the gap with the state of compression.It protects as a result, Component 20 is held to be exerted a force downward by the elastic force of elastomer 128, in the inside of the incorporating section of bottom piece 14 60, make internal block 12 with Holding member 20 is close to.

In addition, being formed with a pair of of the First Series access 130 being connected to a pair of of recess portion 126 in upper mass 30.First system The feedway (illustration omitted) for the processing gas that column access 130 and supply are only made of non-active gas such as nitrogen links.In turn, The second access 132 being connected to the through hole 96 of holding member 20 is also formed in upper mass 30.Second access 132 with Supply for giving processing gas made of the non-active gas such as oxygen isoreactivity gas and nitrogen in arbitrary proportion mixing air fills Set (illustration omitted) connection.

(B) generation of the plasma based on atmospheric pressure plasma generator

In atmospheric pressure plasma generator 10, pass through above structure, in the inside of reaction chamber 100, processing gas It is in plasma, irradiates plasma from the third flow path 70 of irradiation mouth 18.Hereinafter, explain in detail based on atmospheric pressure etc. from The generation of the plasma of daughter generating device 10.

In atmospheric pressure plasma generator 10, by the processing gas being only made of non-active gas from First Series Access 130 is supplied via the inside of the retainer 72,74 of holding member 20 to reaction chamber 100.In addition, will by non-active gas and The processing gas that active gases is constituted is supplied via the through hole 96 of holding member 20 to reaction chamber 100 from the second access 132. At this point, applying voltage to a pair of electrodes 24,26, flowing has electric current between a pair of electrodes 24,26 in reaction chamber 100.By This, generates electric discharge between a pair of electrodes 24,26, by the electric discharge that processing gas is plasmarized.In addition, due to anti- It answers in room 100, electrode 24,26 is disposed in the position of the wall surface of the close connection recess portion 40 of internal block 12, therefore passes through direction electricity Pole 24,26 applies voltage and makes wall surface flowing of the electric current along connection recess portion 40.It is not only between a pair of electrodes 24,26 as a result, edge The wall surface of connection recess portion 40 also generates electric discharge, by the electric discharge that processing gas is plasmarized.Also, in reaction chamber 100 The plasma of middle generation via internal block 12 first flow path 50 to the lower part block 14 second flow path 66 flow.In turn, wait from Daughter is flowed to the third flow path 70 of irradiation mouth 18, irradiates plasma from the lower end of the third flow path 70 to handled object.

(C) durability of atmospheric pressure plasma generator improves

In this way, in atmospheric pressure plasma generator 10, it will place and generating electric discharge in the inside of reaction chamber 100 Process gases is plasmarized, irradiates plasma from the third flow path 70 of irradiation mouth 18.In addition, plasma refers to composition gas The molecule of body is ionized and is divided into the state of cation with electronics, the gas after being equivalent to ionization.Such plasma exists It generates in reaction chamber 100, and is sprayed from reaction chamber 100 to first flow path 50.

But the gas after the ionization of the inside of reaction chamber 100 is successively sprayed from reaction chamber 100 to first flow path 50, but It is the case where being trapped in the narrow region there are the gas after the ionization when entering very narrow region.For example, by In in the mutual contact surface of component divided to reaction chamber 100, face is in contact with each other, therefore is thought of as gapless.However, When being thought of as the bulk of molecule to constitute gas as benchmark, even contact surface, the gas after ionization can also enter portion The mutual contact surface of part.When gas after ionization enters the contact surface in such very narrow region, the gas after ionization Body is trapped in the inside of the contact surface, and there are generate to be charred in contact surface and concentrating electric discharge to the gas after the ionization Hidden danger.Especially in reaction chamber 100, due between a pair of electrodes 24,26 generate electric discharge, when a pair of electrodes 24, There are when contact surface, being easy to generate in the contact surface to be charred between 26, component that reaction chamber 100 is divided, i.e. inside Block 12, holding member 20 etc. are easy to deteriorate.In addition, due to towards the concentration of the electric discharge of contact surface, there are the hidden of discharge instability Suffer from.

Given this situation, it is configured in atmospheric pressure plasma generator 10, in reaction chamber 100, only exists There are contact surfaces for opposite side between a pair of electrodes 24,26.In detail, as described above, passing through 20 He of holding member Internal block 12 and reaction chamber 100 is divided, the protruding portion 80 of a pair of of retainer 72,74 of holding member 20 is inserted in inside A pair of of cylinder recess portion 36,38 of block 12.The step surface 46,48 of the lower end of protruding portion 80 and cylinder recess portion 36,38 is opposite as a result,. However, the depth dimensions of cylinder recess portion 36,38 are bigger than overhang of the protruding portion 80 from the second bottom surface 84.Therefore, maintaining part Second bottom surface 84 of part 20 is contacted with the upper surface of internal block 12, the lower end of protruding portion 80 and the step surface of cylinder recess portion 36,38 46,48 is opposite with the state with gap.That is, only the second bottom surface 84 is contacted with internal block 12 in holding member 20.Change speech It, as shown in figure 8, the upper surface of the flange part 34 in internal block 12, only with the shape phase of the second bottom surface 84 of holding member 20 The position (figure bend) answered is formed towards the contact surface 140 of holding member 20.

The contact surface 140 is located at opposite between a pair of electrodes 24,26 for being inserted in the connection recess portion 40 of internal block 12 Side.That is, be configured in atmospheric pressure plasma generator 10, in reaction chamber 100, only with a pair of electrodes 24,26 Between there are contact surface, i.e. the second bottom surface 84 and the contact surfaces 140 of internal block 12 and holding member 20 opposite side.

In addition, not only being indicated between a pair of electrodes 24,26 to be equivalent to a pair of of electricity of the width of the diameter of electrode 24,26 connection The region of pole 24,26, two for being also represented by and linking the line orthogonal of a pair of electrodes 24,26 and pass through a pair of electrodes 24,26 are straight Region between line.In detail, linking the region of a pair of electrodes 24,26 to be equivalent to the width of the diameter of electrode 24,26 is Refer to the region impaled in fig. 8 by single dotted broken line.On the other hand, with connection a pair of electrodes 24,26 line orthogonal and pass through one Two straight lines to electrode 24,26 are the double dot dash lines 148 in Fig. 8.Therefore, mean two pairs between a pair of electrodes 24,26 Between chain-dotted line 148.That is, in reaction chamber 100, only being drawn with a pair of of two point in atmospheric pressure plasma generator 10 There are the contact surfaces of internal block 12 and holding member 20 for opposite side between line 148.

On the other hand, as shown in figure 9, previous atmospheric pressure plasma generator 150 is by a pair of of retainer 152, interior Portion's block 154, connecting member 156, bottom piece 158, irradiation mouth (illustration omitted) and upper mass (illustration omitted) are constituted.Here, In atmospheric pressure plasma generator 150, the following table of a pair of of retainer 152 is assembled by the upper surface of internally block 154 Face and function the inside of internal block 154 as reaction chamber.Therefore, only illustrate retainer 152 and internal block 154.

A pair of of retainer 152 is formed as cylindrical shape, and lower end surface is set as flat surface.In addition, internal block 154 is by substantially The main part 166 of rectangular shape and the flange part 168 for the upper end for being formed in main part 166 are constituted.It is formed in internal block 154 Recess portion 170, recess portion 170 is open in the upper surface of flange part 168, and reaches the inside of main part 166.The upper table of flange part 168 Face is set as flat surface in addition to recess portion 170, and the width dimensions of flange part 168 are set as and the diameter of retainer 152 substantially phase Same size.Also, so that the lower surface of retainer 152 is contacted with the upper surface of the upper surface of internal block 154, i.e. flange part 168 Mode composite cage 152 and internal block 154.The recess portion 170 of internal block 154 is kept frame 152 and is divided into reaction as a result, Room.Also, make a pair of electrodes and being inserted into a pair of electrodes (referring to Fig.1 0) 176,178 to the inside of a pair of of retainer 152 176,178 lower end enters the inside of recess portion 170.

In atmospheric pressure plasma generator 150, as described above, so that the lower end surface of flat retainer 152 with The mode composite cage 152 and internal block 154 of the upper end face contact of flat internal block 154.Therefore, in internal block 154 In upper surface, as shown in Figure 10, position (figure bend) corresponding with the shape of the lower end surface of retainer 152 is formed towards guarantor Hold the contact surface 180 of frame 152.The contact surface 180 extends between a pair of electrodes 176,178.That is, contact surface 180 extend to Link the line orthogonal of a pair of electrodes 176,178 and passes through the region between two straight lines 182 of a pair of electrodes 176,178.

In this way, when there are the retainers 152 and internal block that are divided to reaction chamber between a pair of electrodes 176,178 When 154 contact surface, ionized gas is easy to enter contact surface 180 due to the electric discharge generated between electrode 176,178. Especially in the case where generating electric discharge along the wall surface divided to reaction chamber, the gas after ionization is easy to enter contact surface 180.Also, when the gas after ionization enters contact surface 180 and is detained, electric discharge concentrates on contact surface 180.It contacts as a result, Face 180 is charred and deteriorates.In this way, in previous atmospheric pressure plasma generator 150, guarantor that reaction chamber is divided It holds frame 152 and internal block 154 is easy to deteriorate, durability is lower.In addition, in order to improve durability, as retainer 152 etc. Material considers to use the higher material of heat resistance, but cost increases.

On the other hand, in atmospheric pressure plasma generator 10, as shown in figure 8, in reaction chamber 100, only with There are the contact surfaces 140 of internal block 12 and holding member 20 for opposite side between a pair of electrodes 24,26.That is, in a pair of of electricity The contact surface 140 of internal block 12 and holding member 20 is not present between pole 24,26.Therefore, even if between a pair of electrodes 24,26 Electric discharge is generated, the gas after ionization is also difficult to enter the contact surface 140 of internal block 12 Yu holding member 20.In addition, even if In the case where electric discharge is produced along the wall surface divided to reaction chamber 100 from a pair of electrodes 24,26, it is also difficult to enter contact Face 140.It, can thereby, it is possible to prevent the deterioration for being charred and generating of the contact surface 140 due to internal block 12 Yu holding member 20 Improve the durability of internal block 12 and holding member 20.In this way, in atmospheric pressure plasma generator 10, by constant The more material of internal block 12 etc. and the shape for improveing internal block 12 etc., can prevent the cost liter generated due to material altering Height can be realized the raising of the durability of internal block 12 etc..In addition, the concentration by inhibiting the electric discharge towards contact surface, it can Ensure stable electric discharge.

Furthermore, as shown in figure 3, being formed between the second bottom surface 84 and electrode 24,26 of holding member 20 from Two bottom surfaces 84 protruding portion 80 outstanding downwards, is formed with downwards between the contact surface 140 and electrode 24,26 of internal block 12 The step surface 46,48 of recess.Also, protruding portion 80 is opposite with the state with gap with step surface 46,48.Structure in this way It makes, the contact surface of internal block 12 and holding member 20 is located against the top positioned at the lower end than electrode 24,26.In addition, protruding portion 80 with Blocking internal block 12 and the mode of the contact surface of holding member 20 extend.It is ionized as a result, because of the electric discharge in electrode 24,26 Gas is more difficult to enter the contact surface of internal block 12 Yu holding member 20, further improves the durable of internal block 12 etc. Property.

In addition, holding member 20 is only supported in the second bottom surface 84 of a pair of of retainer 72,74 by the upper surface of internal block 12. That is, the end of the only side at the both ends in the diametrical direction of substantially circular bottom surface of retainer 72,74 is by internal block 12 Upper surface support, stability is lower.Therefore, a pair of of retainer 72,74 is linked by linking part 76, it is ensured that holding member 20 Stability.

(D) generation of the stable plasma of the electric discharge based on electrode

In addition, in atmospheric pressure plasma generator 10, as described above, being put by being generated between electrode 24,26 Electricity and generate plasma.Therefore, in atmospheric pressure plasma generator 10, in order to steadily be put between electrode The lower end of electricity, electrode 24,26 is set as wedge shape.

In detail, in previous atmospheric pressure plasma generator, electrode is set as cylindrical shape, the side of electrode Face and the lower end surface of electrode are formed by angle and are set as right angle.That is, in the lower end of a pair of electrodes, side is formed with lower end surface Corner for 90 degree is relative to each other, and lower end surface is towards underface, hardly relatively.Also, by being supplied to above-mentioned a pair of electrodes Electric power and between the lower end of a pair of electrodes generate electric discharge.At this point, the lower end surface due to a pair of electrodes is hardly opposite, consider Be difficult between the lower end surface of a side and the lower end surface of another party of a pair of electrodes generate electric discharge and a side's of a pair of electrodes Electric discharge is generated between 90 degree of corner and 90 degree of the corner of another party.

When electric discharge concentrates on the corner of electrode like this, there are towards having gently in the supplying electric power of electrode The case where micro- disorder.In detail, it when steadily supplying electric current to electrode, changes to current cycle.Another party Face, in previous atmospheric pressure plasma generator, in several periods in hundreds of~thousands of periods, there are amplitudes The case where reduction.In this case, it although in a flash, there are the hidden danger that electric discharge stops, not being expected to.

Given this situation, in atmospheric pressure plasma generator 10, the lower end of electrode 24,26 is set as wedge The lower end surface 110 of shape, a pair of electrodes 24,26 is relative to each other.That is, in the lower end of a pair of electrodes 24,26, side 106 and lower end The face obtuse-angulate corner of 110 shape is relative to each other, and lower end surface 110 is also relative to each other.Also, by above-mentioned a pair of electrodes 24,26 It supplies electric power and considers to generate between the corner at the obtuse angle in the corner and another party at the obtuse angle of a side of a pair of electrodes 24,26 and put Electricity also generates electric discharge between the lower end surface 110 of a side of a pair of electrodes 24,26 and the lower end surface 110 of another party.At this point, with Compared with electric discharge concentrates on 90 degree of the corner of a side of a pair of electrodes between 90 degree of another party of corner the case where, Neng Gouwen Surely it is supplied electric power to electrode.That is, even if amplitude will not reduce in several periods in hundreds of~thousands of periods.As a result, It can steadily discharge between electrode, it can be ensured that the generation of stable plasma.

By the way, in the above-described embodiments, atmospheric pressure plasma generator 10 is plasma producing apparatus An example.Electrode 24,26 is an example of electrode.Side 106 is an example of first side.Side 108 is an example of second side. Lower end surface 110 is an example of end face.

In addition, the present invention is not limited to the above embodiments, can be implemented with the knowledge based on those skilled in the art Various changes, improvement various modes implemented.Specifically, for example, in the above-described embodiments, as shown in figure 3, protecting The bottom surface for holding frame 72,74 is formed with from the second bottom surface 84 protruding portion 80 outstanding downwards, is formed in the upper surface of bottom piece 14 There is the step surface 46,48 being recessed downwards from contact surface 140.Also, the second bottom surface 84 is contacted with contact surface 140, protruding portion 80 It is opposite with the state with gap with step surface 46,48.On the other hand, can also be as shown in figure 11, at the bottom of retainer 72,74 Face is formed with the step surface 200 being recessed upwards from the second bottom surface 84, is formed in the upper surface of bottom piece 14 from contact surface 140 Protruding portion 210 outstanding upwards.Also, the second bottom surface 84 is contacted with contact surface 140, and step surface 200 and protruding portion 210 are to have There is the state in gap opposite.

In addition, in the above-described embodiments, applying the present invention to atmospheric pressure plasma generator 10, but also can Apply the present invention to the plasma producing apparatus for generating plasma under reduced pressure.

In addition, in the above-described embodiments, the lower end surface 110 of electrode 24,26 is set as flat surface, but can also be set as The various shapes such as flexure plane, step surface.

In addition, dry air can also be used as processing gas in the above-described embodiments.

Description of symbols

10: atmospheric pressure plasma generator (plasma producing apparatus)

24: electrode

26: electrode

106: side (first side)

108: side (second side)

110: lower end surface (end face)