阅读说明：本技术 一种组合式柔性净气舱装置 (A kind of net gas cabin device of combined type flexible ) 是由 单飞虎 刘琦 于 2019-08-21 设计创作，主要内容包括：本发明涉及一种组合式柔性净气舱装置。该装置包括从下至上依次嵌套的多级舱室,每相邻两级舱室的相互嵌套部位设有弹性密封结构,其中,最底层舱室的底部密封,顶部开口,中间层舱室的底部和顶部均为开口,最顶层舱室的底部开口,顶部密封,所述最顶层舱室的顶部设有第一级舱室升降控制装置,所述多级舱室的外周方向设有竖向导柱,所述导柱的顶端设有电机驱动单元,用于驱动所述第一级舱室升降控制装置,使相互嵌套的多级舱室沿所述导柱升降运动,以改变组合式柔性净气舱装置的舱室体积,在升降运动过程中,相对运动的两极嵌套舱室之间的所述弹性密封结构处于收缩状态,运动到位后,所述弹性密封结构处于胀紧密封状态。(The present invention relates to a kind of net gas cabin devices of combined type flexible.The device includes successively nested multistage cabin from bottom to up, mutually nested position per adjacent two-stage cabin is equipped with elastic sealing structure, wherein, the sealed bottom in bottom cabin, top opening, the bottom and top in middle layer cabin are opening, the bottom opening in top cabin, top sealing, the top in the top cabin is equipped with first order cabin apparatus for controlling of lifting, the peripheral direction in the multistage cabin is equipped with vertical guide post, the top of the guide post is equipped with electric-motor drive unit, for driving first order cabin apparatus for controlling of lifting, make mutually nested multistage cabin along the guide post elevating movement, to change the chamber volume of the net gas cabin device of combined type flexible, during elevating movement, the elastic sealing structure between the two poles of the earth nesting cabin of relative motion is in contraction state, after movement in place, the elasticity Sealing structure is in swelling sealing state.)

1. a kind of net gas cabin device of combined type flexible, which is characterized in that including successively nested multistage cabin from bottom to up, every phase The mutually nested position in adjacent two-stage cabin is equipped with elastic sealing structure, wherein the sealed bottom in bottom cabin, top opening, The bottom and top in middle layer cabin are to be open, the bottom opening in top cabin, top sealing, the top cabin Top is equipped with first order cabin apparatus for controlling of lifting, and the peripheral direction in the multistage cabin is equipped with vertical guide post, the guide post Top, which is equipped with electric-motor drive unit, makes mutually nested multistage cabin for driving first order cabin apparatus for controlling of lifting Along the guide post elevating movement, to change the chamber volume of the net gas cabin device of combined type flexible, during elevating movement, relatively The elastic sealing structure between the two poles of the earth nesting cabin of movement is in contraction state, after movement in place, the elastic packing Structure is in swelling sealing state.

2. the net gas cabin device of combined type flexible according to claim 1, which is characterized in that each cabin in the multistage cabin Cross-sectional profile be round or the side n shape, wherein n≤3.

3. the net gas cabin device of combined type flexible according to claim 2, which is characterized in that each cabin in the multistage cabin Cross sectional dimensions it is tapered from bottom to up, that is, upper level cabin is nested in next stage cabin.

4. the net gas cabin device of combined type flexible according to claim 3, which is characterized in that the upper level cabin depth of nesting is The 1/3~1/2 of next stage cabin depth.

5. the net gas cabin device of combined type flexible according to claim 3, which is characterized in that the maximum in the upper level cabin Extension elongation is 1.5~3 times of next stage cabin depth.

6. the net gas cabin device of combined type flexible according to claim 1, which is characterized in that the electric-motor drive unit includes Motor, lead screw bearing and the vertical lead screw installed on power direction of transfer, the lead screw is parallel with the axis of the guide post, institute It states lead screw to connect and drive first order cabin apparatus for controlling of lifting along the guide post elevating movement, the guide post passes through guide sleeve It is rigidly attached on electric machine casing.

7. the net gas cabin device of combined type flexible according to claim 6, which is characterized in that the first order cabin lifting control Device processed includes multiple drive rods and the communicating joint for being placed in compartment roof center, is symmetrically provided with multiple through-holes on the communicating joint, Each drive rod passes through the symmetrical through-hole of the communicating joint, and both ends are engaged with the corresponding lead screw by screw thread respectively.

8. the net gas cabin device of combined type flexible according to claim 6, which is characterized in that middle layer cabin periphery is set There is second level cabin apparatus for controlling of lifting, second level cabin apparatus for controlling of lifting includes that cabin fixed part and multiple liftings pass Dynamic portion, the peripheral outer wall of the cabin fixed part and phase emergency chamber rigidly fix, and the multiple lifting and driving portion is respectively and accordingly The lead screw pass through screw thread engage.

9. the net gas cabin device of combined type flexible according to claim 1, which is characterized in that the elastic sealing structure is ring The annular gap of shape Expansion sealing circle, multi-stage annular Expansion sealing circle from bottom to up is cumulative, and has on the inside of annular gap more The wave heave of a elasticity, cabins at different levels are alternate nested with annular ex-pansion sealing ring, can incite somebody to action after the wave heave inflation Cabin wall in annular gap compresses.

10. the net gas cabin device of combined type flexible according to claim 9, which is characterized in that in the cabin at different levels Bottom is laid with gas flow, is connected to the corresponding annular ex-pansion sealing ring bottom air inlet, in the annulars at different levels The air inlet of the bottom of Expansion sealing circle is equipped with pressure-control valve, for controlling the gas into the annular ex-pansion sealing ring Pressure.

Technical field

The invention belongs to design of Sealing Structure and technical field is applied, more particularly to a kind of combined type flexible Net gas cabin device.

Background technique

Seal hatch is divided into high low vacuum seal cabin and inert gas seal cabin at present, and wherein the former mainly passes through aspiration pump Group carries out continuous fast pump to the cabin of fixed volume, reaches required vacuum environment, therefore its cabin must be able to Huge pressure difference caused by vacuum external atmosphere pressure in cabin is born, cabin steel plate thickness is not less than 40mm, and palpus under normal conditions Increase its rigidity by transverse and longitudinal rib, equipment cost and operation expense are very high.And inert gas seal cabin, it is usually logical It crosses two methods and reaches inert ambient environment.

The first: displacement method gradually replaces the indoor air in cabin of fixed volume, until in cabin by inert gas Inert gas index required for work is reached, shortcoming is that time swap is longer, and inert gas usage amount is huge, cost It is high.

Second: first pumping, rear substitution carry out gas to cabin using vacuum pump group that is, by means of the method for vacuum chamber It extracts, reduces air content in cabin as far as possible, then gradually replaced using inert gas and reach inertia required for work Gas index, shortcoming are that the cabin hardware condition that the method requires almost is no different with vacuum chamber, higher cost.

In addition, when occupying volume far below inert gas cabin for work requirements, because of fixed cabin reason, it has to adopt Volume is occupied with 100% work chamber, so that working efficiency reduces and increased costs.

Therefore, to solve the deficiencies in the prior art, a kind of net gas cabin device of combined type flexible is inventor provided.

Summary of the invention

It, will be at by using flexible gas cabin the embodiment of the invention provides a kind of net gas cabin device of combined type flexible Shape cabin is set as assembly, classification flexible control, the mode of Expansion sealing plug and improves inert gas cabin structure, meets to height The Cabin Design application demand of benefit, low cost.

The embodiment of the present invention proposes a kind of net gas cabin device of combined type flexible, which includes successively embedding from bottom to up The multistage cabin of set, the mutually nested position per adjacent two-stage cabin are equipped with the elastic sealing structure of inflatable control, wherein most The sealed bottom in bottom cabin, top opening, the bottom and top in middle layer cabin are opening, and the bottom in top cabin is opened Mouthful, top sealing, the top in the top cabin is equipped with first order cabin apparatus for controlling of lifting, the periphery in the multistage cabin Direction is equipped with vertical guide post, and the top of the guide post is equipped with electric-motor drive unit, for driving the first order cabin lifting control Device processed makes mutually nested multistage cabin along the guide post elevating movement, to change the cabin of the net gas cabin device of combined type flexible Building volume, during elevating movement, the elastic packing of the inflatable control between the two poles of the earth nesting cabin of relative motion Structure is in contraction state, and after movement in place, the elastic sealing structure is in swelling sealing state.

Further, the cross-sectional profile in each cabin in the multistage cabin is the round or side n shape, wherein n≤3.

Further, the cross sectional dimensions in each cabin in the multistage cabin is tapered from bottom to up, that is, upper level cabin is embedding It covers in next stage cabin.

Further, the upper level cabin depth of nesting is the 1/3~1/2 of next stage cabin depth.

Further, the maximum extension elongation in the upper level cabin is 1.5~3 times of next stage cabin depth.

Further, the electric-motor drive unit includes the motor installed on power direction of transfer, lead screw bearing and erects To lead screw, the lead screw is parallel with the axis of the guide post, and the lead screw connects and drives first order cabin elevating control Device is rigidly attached on electric machine casing along the guide post elevating movement, the guide post by guide sleeve.

Further, first order cabin apparatus for controlling of lifting includes multiple drive rods and is placed in compartment roof center Communicating joint, multiple through-holes are symmetrically provided on the communicating joint, and each drive rod passes through the symmetrical through-hole of the communicating joint, both ends point It is not engaged with the corresponding lead screw by screw thread.

Further, middle layer cabin periphery is equipped with second level cabin apparatus for controlling of lifting, the second level cabin Apparatus for controlling of lifting includes cabin fixed part and multiple lifting and driving portions, the peripheral outer wall of the cabin fixed part and phase emergency chamber It rigidly fixes, the multiple lifting and driving portion is engaged with the corresponding lead screw by screw thread respectively.

Further, the elastic sealing structure is annular ex-pansion sealing ring, multi-stage annular Expansion sealing from bottom to up The annular gap of circle is cumulative, and has the wave heave of multiple elasticity on the inside of annular gap, and cabins at different levels and annular ex-pansion seal Alternate nesting is enclosed, the cabin wall in annular gap can be compressed after the wave heave inflation.

Further, it is laid with gas flow in the bottom in the cabin at different levels, with the corresponding annular ex-pansion The connection of sealing ring bottom air inlet, the air inlet in the bottom of the annular ex-pansion sealing rings at different levels are equipped with pressure-control valve, use Enter the gas pressure in the annular ex-pansion sealing ring in control.

To sum up, by the present invention in that with flexible multilevel gas cabin, i.e., assembly, the flexible control of classification are set by forming cabin System, multistage cabin carry out nesting by the Expansion sealing mode of elastic sealing structure, are moved by the OQ t in nested cabin, Volume of compartment size can conveniently be changed.The device of the invention inherits the advantage in substitution gas design forming cabin, together When improve substitute mode and cabin structure, make its more flexibleization, economization, while also having optimization cabin structure, which adopts Gas cabin is designed with flexible controllable method, high reliability, inexpensive soft can be provided for scientific research and engineering application The net gas cabin of property.

Detailed description of the invention

In order to illustrate the technical solution of the embodiments of the present invention more clearly, will make below to required in the embodiment of the present invention Attached drawing is briefly described, it should be apparent that, drawings described below is only some embodiments of the present invention, for For those of ordinary skill in the art, without creative efforts, it can also be obtained according to these attached drawings other Attached drawing.

Fig. 1 is a kind of general structure schematic diagram of the net gas cabin device of combined type flexible of the embodiment of the present invention.

Fig. 2 is a kind of schematic top plan view of the net gas cabin device of combined type flexible of the invention.

Fig. 3 is A-A profile structure diagram in Fig. 2.

In figure:

1- communicating joint；2- lead screw；3- first order cabin apparatus for controlling of lifting；The second level 4- cabin apparatus for controlling of lifting；5- Guide post I；6- substrate；7- bottom plate；8- guide post II；9- bottom cabin；10- guide post III；11- middle layer cabin；12- top layer cabin Room；13- hatchcover；14- drive rod I；15- drive rod II；16- drive rod III, IV；17- electric-motor drive unit；18- guide post IV； 19- electric machine casing；20- elastic sealing structure；21- middle layer cabin outer wall；22- first waveform protrusion；Outside 23- bottom cabin Wall；The second wave heave of 24-；25- top layer cabin outer wall；26- middle layer back cover；27- bottom back cover；28- gas flow；29- Pressure-control valve.

Specific embodiment

Embodiments of the present invention are described in further detail with reference to the accompanying drawings and examples.Following embodiment it is detailed Thin description and attached drawing cannot be used to limit the scope of the invention for illustratively illustrating the principle of the present invention, i.e., of the invention It is not limited to described embodiment, covers part, component and connection type under the premise of without departing from the spirit of the present invention Any modification, replacement and improvement.

It should be noted that in the absence of conflict, the features in the embodiments and the embodiments of the present application can phase Mutually combination.The application is described in detail below with reference to accompanying drawings and in conjunction with the embodiments.

Fig. 1 is a kind of general structure schematic diagram of the net gas cabin device of combined type flexible of the embodiment of the present invention, referring to Fig. 1~ Shown in Fig. 3, which includes successively nested multistage cabin from bottom to up, and the present embodiment is with 3 grades shown in Fig. 1 embodiment Illustrate for cabin, in concrete practice, can be 3+x grades of cabins (x≤0), wherein the mutually nested portion per adjacent two-stage cabin Position is equipped with the elastic sealing structure 20 of inflatable control, wherein the sealed bottom in bottom cabin 9, top opening, middle layer cabin The bottom and top of room 11 are opening, and the bottom opening in top cabin 12, top seals, can also set between cabins at different levels Limit feedback device is set, moves up and down and limits for nested structure.The top in the top cabin 12 is equipped with the first cabin liter Control device 3 drops, and the peripheral direction in the multistage cabin is equipped with vertical guide post (5,8,10,18), and the top of the guide post is equipped with Electric-motor drive unit 17 leads mutually nested multistage cabin along described for driving first cabin apparatus for controlling of lifting 3 Column elevating movement, to change the chamber volume of the net gas cabin device of combined type flexible, during elevating movement, the two of relative motion The elastic sealing structure between extremely nested cabin is in contraction state, and after movement in place, the elastic sealing structure is in Swelling sealing state.

The device of the invention by using flexible gas cabin, i.e., by multistage forming cabin be set as assembly, classification it is soft Property control, Expansion sealing plug mode improve inert gas cabin structure.Improve traditional inert gas cabin substitution gas Mode, shorten time swap, reduce inert gas consumption.Working efficiency is improved, equipment use cost is reduced.

Specifically, the cross-sectional profile in each cabin in the multistage cabin is the round or side n shape, wherein n≤3.Referring to It is the good cabin of circular cross-sectional shape shown in Fig. 1-Fig. 3, each cabin can also be designed to that cross section is the shape of the side n shape, That is triangle, quadrangle, pentagon, hexagon etc..If the shape in cabin uses straight line, adjacent both sides transition position needs Rounded corner is conducive to cabin and smoothly goes up and down.

In addition, the cross sectional dimensions in each cabin in the multistage cabin is tapered from bottom to up, that is, upper level cabin is nested in In next stage cabin.Specifically in the circular-shaped chamber of the embodiment of the present invention 1, from bottom cabin to the cross section in top cabin Tapered diameter can guarantee that cabins at different levels are successively nested from bottom to up.

As a kind of preferred embodiment, the upper level cabin depth of nesting is next stage cabin depth 1/3~1/2.It is appropriate The depth of nesting not only can guarantee reliable nesting between the cabin of the two poles of the earth, but also can guarantee and shape cabin by the Level Change for going up and down the two poles of the earth cabin The total measurement (volume) of room.

As another preferred embodiment, the maximum extension elongation in upper level cabin is next stage cabin depth 1.5~3 Times.Maximum extension elongation is related with cabin and height and the depth of nesting, and ibid, extension elongation appropriate ensure that between cabin Nested reliability and cabin total measurement (volume) and variable range.

Preferably, the electric-motor drive unit 17 includes the motor installed on power direction of transfer, lead screw bearing and erects To lead screw 2, the lead screw 2 is parallel with the axis of the guide post (5,8,10,18), and lead screw 2 connects and drives the first order cabin Room apparatus for controlling of lifting 3 is rigidly attached on electric machine casing 19 along the guide post elevating movement, the guide post by guide sleeve, top Electric-motor drive unit 17 by driving first order cabin apparatus for controlling of lifting 3, to drive top cabin 12 from middle layer The nested position stretching motion in cabin 11 realizes the elevating movement in the two poles of the earth cabin, to change the volume in cabin.In electric machine casing The fixed device such as guide sleeve, lead screw bearing can also be configured on 19, and the rotational motion of motor is made to be converted into the elevating movement of lead screw.This The height of each guide post is identical in invention, and height depends on the sum of cabins at different levels coupling superposition and its fitting allowance.

Further, first order cabin apparatus for controlling of lifting 3 includes multiple drive rods (14,15,16) and is placed in cabin The communicating joint 1 of room top center, referring to Fig. 1, communicating joint 1 and drive rod (14,15,16) are each provided at the hatchcover 13 in top layer cabin 12 On.Multiple through-holes are symmetrically provided on communicating joint 1, each drive rod is that one end is connect with the through-hole of communicating joint 1, the other end with The corresponding lead screw is engaged by screw thread.Drive rod is realized by connection energy conservation to be symmetrical arranged, and can make all drive rods It is synchronous to carry out elevating movement.In addition, vertical guide groove (not shown) is equipped on each guide post, for constraining respective drive Bar (each drive rod is symmetrically and evenly to be distributed relative to communicating joint 1).

It should be noted that the quantity of guide post and lead screw is 4, in concrete practice in embodiment shown in FIG. 1, guide post It can accordingly be designed according to the cross-sectional shape in multistage cabin with the quantity of lead screw.

11 periphery of middle layer cabin is equipped with second level cabin apparatus for controlling of lifting 4, the second level cabin lifting control Device 4 processed includes cabin fixed part and multiple lifting and driving portions, the peripheral outer wall rigidity of the cabin fixed part and phase emergency chamber Fixed, the multiple lifting and driving portion is engaged with the corresponding lead screw by screw thread respectively.By lifting and driving portion along lead screw Threads turn, can make second level cabin apparatus for controlling of lifting 4 relative to lead screw 2 carry out elevating movement, fixed by cabin Portion is thus by 11 elevating movement of layer cabin in driving, so as to change the overall volume size in forming cabin.

Shown in Figure 3, the elastic sealing structure 20 of the inflatable control is annular ex-pansion sealing ring, from bottom to up The annular gap of multi-stage annular Expansion sealing circle is cumulative, and has the wave heave (middle layer of multiple elasticity on the inside of annular gap The first waveform protrusion 22 of the inside of cabin inner walls 21,23 inside of bottom cabin inner walls the second wave heave 24), cabins at different levels with The alternate nesting of annular ex-pansion sealing ring nests into top layer cabin outer wall 25 in the gap of the annular ex-pansion sealing ring of top layer It goes, the cabin wall in annular gap can be compressed after wave heave inflation, to make two adjacent cabins closely It is nested together and limits.

Specifically, shown in Figure 3, annular ex-pansion sealing ring can be rigidly connected with upper level cabin inner walls, with next stage City outer wall is tightly connected by elastic waveform stereoscopic protrusion, wherein have at the trough between wave heave aperture not less than Φ 2 with Its wave crest connection, and the sealing ring at trough and cabin wall surface are rigidly connected.

Multiple gas flows 28 are laid on the bottom substrate 6 in the cabins at different levels, with the corresponding annular ex-pansion Sealing ring bottom air inlet is connected to (being provided with air inlet in the bottom of middle layer back cover 26 and bottom back cover 27), convenient for annular Expansion sealing circle carries out inflation/deflation, to control the contraction state of elastic sealing structure 20, in the annular ex-pansion sealing rings at different levels The air inlet of bottom be equipped with pressure-control valve 29, for control into the gas pressure in the annular ex-pansion sealing ring, reality It is pressurizeed under existing different operating conditions to elastic sealing structure, pressure maintaining and release.Referring to Fig. 3, substrate 6 and bottom cabin rigid seal The bottom end external member of connection, lead screw 2 is connect by lead screw bearing with substrate 6, and guide post (5,8,10,18) and substrate 6 are rigidly connected, base The also mountable bottom plate 7 in the bottom of plate 6.

It should be noted that the corresponding pressure of setting can be classified in elastic sealing structure between multistage nested cabin Control valve 29, so as to grading control.The pressure of multiple gas flows 28 and the bottom on the bottom substrate of bottom cabin Force control valve, which matches, to be evenly arranged, and multiple gas flows are in 30~60 degree of arrangements, annular ex-pansion sealing ring bottom air inlet It is equally spaced with arrangement center upper thread.

To sum up, realize that technical solution of the present invention includes at least following key element:

1, successively nested multistage cabin from bottom to up in device, is based on plug composite structure and controlled elasticity sealing Structure is essential element, the flexible insulating gas cabin designed.

2, in nested Multi-stage flexible cabin, the cross-sectional shape in each cabin is round or triangle, four sides Shape, pentagon, hexagon etc., and when according to straight line, adjacent both sides transition needs rounded corner.

3, nested Multi-stage flexible cabin, originally needs to be preferably minimized by cabin apparatus for controlling of lifting, all bullets of swelling Property sealing structure, then by way of substitution gas Rapid replacement cabin gas to standard, it is subsequent based on use condition successively Change chamber volume.

4, when needing to increase cabin, by reducing the Expansion sealing pressure of cabin inner elastic sealing structure, swelling is not required to Raised cabin pressure is wanted, when being increased to desired height, in the fixed limit of all sealing structures of swelling.

5, in nested Multi-stage flexible cabin, between two neighboring pole cabin, upper level minimum insert depth is next stage cabin The 1/3~1/2 of depth；

6, between two neighboring pole cabin, the maximum extension elongation in upper level cabin is 1.5~3 times of next stage cabin depth.

By upper, the present invention inherits the advantage in substitution gas design forming cabin, while improving substitute mode and cabin knot Structure makes its more flexibleization, economization, while also having optimization cabin structure, and technology of the invention is set using flexible controllable method Gas cabin is counted, high reliability, the net gas cabin of the flexibility of low cost can be provided for scientific research and engineering application.

The above description is only an example of the present application, is not restricted to the application.The scope of the present invention is not being departed from In the case where to those skilled in the art, various changes and changes are possible in this application.It is all in spirit herein and Any modification, equivalent replacement, improvement and so within principle, should be included within the scope of claims hereof.