阅读说明：本技术 一种真空实验系统及实现方法 (A kind of vacuum experiment system and implementation method ) 是由 郭东亮 梁学锋 涂云宏 张东伟 支佳运 李壮 冯小磊 马世伟 朱丹丹 于 2019-09-04 设计创作，主要内容包括：本发明公开了一种真空实验系统及实现方法,本发明实施例设置真空实验系统,该真空实验系统中包括实验腔体及真空单元,真空单元通过实验腔体的气体出口连接到实验腔体中,具体包括机械泵和分子泵,采用抽真空方式及维持真空环境的方式实现实验腔体的高真空环境。因此,本发明实施例构造真空单元,由真空单元对实验腔体的高真空环境进行控制,在不依赖于外部环境的前提下提供真空环境。(The invention discloses a kind of vacuum experiment system and implementation methods, vacuum experiment system is arranged in the embodiment of the present invention, it include experiment cavity and vacuum unit in the vacuum experiment system, vacuum unit is connected in experiment cavity by testing the gas vent of cavity, mechanical pump and molecular pump are specifically included, the high vacuum environment of experiment cavity is realized using the mode that vacuumizes and the mode for maintaining vacuum environment.Therefore, the embodiment of the present invention constructs vacuum unit, is controlled by high vacuum environment of the vacuum unit to experiment cavity, provides vacuum environment under the premise of independent of external environment.)

1. a kind of vacuum experiment system characterized by comprising the system comprises experiment cavity (101) and vacuum units (102), experiment cavity (101) is connect by gas vent with vacuum unit (102), wherein vacuum unit (102) includes:

After mechanical pump (1021), the first electronic valve (1022), filter (1023) and molecular pump (1024) series connection, access gas goes out Mouthful；

It when forming level-one vacuum to experiment cavity (101), opens the first electronic valve (1022), starts mechanical pump (1021), it is real The air molecule in cavity (101) is tested under the action of mechanical pump (1021), by gas vent and molecular pump (1024), is passed through It after the filtering of filter (1023), is drawn into mechanical pump (1021) by the first electronic valve (1022), until testing cavity (101) after the starting pressure for reaching molecular pump (1024), start molecular pump (1024), continue to extract in experiment cavity (101) Air molecule.

2. the system as claimed in claim 1, which is characterized in that the experiment cavity (101) also accesses vacuum meter unit (1011), the vacuum environment of experiment cavity (101) is monitored to obtain vacuum values, and shown.

3. the system as claimed in claim 1, which is characterized in that the experiment cavity (101) goes back cut-in pressure meter unit (1012), pressure monitoring is carried out to experiment cavity (101) and obtains pressure value, and shown.

4. the system as claimed in claim 1, which is characterized in that the vacuum experiment system is applied in satellite platform.

5. the system as claimed in claim 1, which is characterized in that further include: gas storage is returned with supply unit (103) and gas It receives and Multiplexing Unit (104), wherein

Gas storage, which is connected to supply unit (103) by gas access, tests in cavity (101), by gas access by gas Body is input in experiment cavity (101), until the pressure of experiment cavity (101) reaches setting value；

One end of gas recycling and separate experiment cavity (101) of one end access vacuum unit (102) of Multiplexing Unit (104), separately One end is connected to gas storage and supply unit (103), after the completion of testing the experiment of cavity (101), by way of vacuum unit (102) The gas of recovery experiment cavity (101) is input to gas storage and storage in supply unit (103).

6. system as claimed in claim 5, which is characterized in that the gas storage is unidirectional by inflating with supply unit (103) Valve (1036), storage cylinder (1031), the first shut-off valve (1032), pressure reducing valve (1033), the second shut-off valve (1034) and the first electricity Magnet valve (1035) is composed in series, wherein

When pressurizeing for experiment cavity (101), inflation check valve (1036) is closed, the first shut-off valve (1032) is successively opened, subtracts Pressure valve (1033), the second shut-off valve (1034) and the first solenoid valve (1035), so that the gas in storage cylinder (1031) passes through gas Body entrance is input in experiment cavity (101), and the pressure until testing cavity (101) reaches setting value, successively closes first section Only valve (1032), pressure reducing valve (1033), the second shut-off valve (1034) and the first solenoid valve (1035)；

In the gas of discharge experiment cavity (101), inflation check valve (1036) is opened, the first shut-off valve is successively closed (1032), pressure reducing valve (1033), the second shut-off valve (1034) and the first solenoid valve (1035), by gas recycling and Multiplexing Unit (104) gas storage is input to by inflating check valve (1036) from experiment cavity (101) by way of the gas that vacuum unit (102) recycles In bottle (1031).

7. system as claimed in claim 5, which is characterized in that the gas recycling is with Multiplexing Unit (104) by booster (1041), pressure stabilizing bottle (1042) and the second electronic valve (1043) are composed in series, wherein

It in the gas of discharge experiment cavity (101), opens the second electronic valve (1043), starts booster (1041), air chamber The gas of body (101) recycling successively passes through pressure stabilizing bottle (1042) and booster by gas vent after vacuum unit (102) (1041) it after, is transferred in gas storage and supply unit (103)；

When pressurizeing for experiment cavity (101), close the second electronic valve (1043).

8. a kind of vacuum experiment implementation method characterized by comprising

Setting experiment cavity and vacuum unit test the gas vent connection vacuum unit of cavity；

When forming level-one vacuum to experiment cavity, under the mechanical pumping action of vacuum unit setting, the air point in cavity is tested Son is continued to be discharged from gas vent, until the pressure of experiment cavity reaches the molecule pump startup pressure of vacuum unit setting；

Vacuum unit cracking pressure pump continues the air molecule for extracting experiment cavity, realizes high vacuum environment for experiment cavity.

9. method according to claim 8, which is characterized in that this method further include:

Vacuum unit is additionally provided with filter, carries out to the air molecule by the air flue discharge between experiment cavity and mechanical pump Filtering.

10. method according to claim 8, which is characterized in that this method further include: setting gas store with supply unit and Gas recycling and Multiplexing Unit, gas storage with supply unit by gas access is connected to experiment cavity in, gas storage and Gas is input in experiment cavity by supply unit by gas access, until the pressure of experiment cavity reaches setting value；

One end one end of access vacuum unit far from experiment cavity of gas recycling and Multiplexing Unit.The other end is linked into gas storage It deposits and supply unit, by the gas of gas vent recovery experiment cavity, is input to gas after the completion of testing the experiment of cavity It stores and is stored in supply unit.

Technical field

The present invention relates to experimental technique field, in particular to a kind of vacuum experiment system and implementation method.

Background technique

A large amount of experimental data and experimental result are provided for every field in the Space Experiments that satellite platform carries out, it is different The various experiments of type are all implemented in satellite platform.It is very high in the cost that satellite platform is tested, including launch cost, Test energy cost and in space orbit operating cost etc..In order to reduce research experiment cost, in terms of experimental design and planning The principle of low cost and high reliability is followed as far as possible, and the experimental system being arranged in satellite platform completes multinomial difference as far as possible Experiment, therefore, when experimental system is arranged, the guiding theory drawn close using specificity experimental system to versatility experimental system, The function of the experimental system of setting is expanded as far as possible.Further, it is contemplated that the complexity of satellite platform environment, institute The experimental system of setting needs to be avoided as much as the dependence to external environment.

It wherein, is exactly one vacuum experiment system of construction in satellite platform when realizing vacuum experiment in satellite platform, Vacuum environment is provided for experiment, still, the vacuum experiment system provided at present needs to rely on the external rings in satellite platform Border, that is, the level-one vacuum environment of satellite platform offer is provided, high vacuum experimental system can be just obtained, this is to construction Vacuum experiment systematic difference environment causes very big limitation.

Similarly, vacuum experiment system on the ground, it is also desirable to rely on external environment, can just obtain high vacuum experiment system System, this causes very big limitation to construction vacuum experiment systematic difference environment.

Summary of the invention

In view of this, the embodiment of the present invention provides a kind of vacuum experiment system, which can be independent of external rings Vacuum environment is provided under the premise of border.

The embodiment of the present invention also provides a kind of vacuum experiment implementation method, and this method can be independent of external environment Under the premise of vacuum environment is provided.

The embodiments of the present invention are implemented as follows:

A kind of vacuum experiment system, comprising: the system comprises experiment cavity and vacuum unit, experiment cavity passes through gas Outlet is connect with vacuum unit, wherein vacuum unit includes:

After mechanical pump, the first electronic valve, filter and molecule series connection of pumps, gas vent is accessed；

When forming level-one vacuum to experiment cavity, the first electronic valve is opened, starts mechanical pump, tests the air in cavity Molecule is under the action of mechanical pump, by gas vent and molecular pump, after the filtering of filter, passes through the first electronic valve quilt It is drawn into mechanical pump, after experiment cavity reaches the starting pressure of molecular pump, starts molecular pump, continue to extract experiment cavity In air molecule.

The experiment cavity also accesses vacuum meter unit, is monitored to obtain vacuum values to the vacuum environment of experiment cavity, And it shows.

The experiment cavity also cut-in pressure meter unit carries out pressure monitoring to experiment cavity and obtains pressure value, and shows.

The vacuum experiment system is applied in satellite platform.

Further include: gas storage and supply unit and gas recycling and Multiplexing Unit, wherein

Gas storage is connected in experiment cavity with supply unit by gas access, is inputted gas by gas access Into experiment cavity, until the pressure of experiment cavity reaches setting value；

One end one end of access vacuum unit far from experiment cavity of gas recycling and Multiplexing Unit, it is another to terminate to gas Storage and supply unit, by way of the gas of vacuum unit recovery experiment cavity, are input to gas after the completion of testing the experiment of cavity Body is stored and is stored in supply unit.

The gas storage and supply unit are by inflation check valve, storage cylinder, the first shut-off valve, pressure reducing valve, the second cut-off Valve and the first solenoid valve are composed in series, wherein

When for experiment cavity pressurization, inflation check valve is closed, successively opens the first shut-off valve, pressure reducing valve, the second cut-off Valve and the first solenoid valve, so that the gas in storage cylinder is input in experiment cavity by gas access, until experiment cavity Pressure reaches setting value, successively closes the first shut-off valve, pressure reducing valve, the second shut-off valve and the first solenoid valve；

In the gas of discharge experiment cavity, inflation check valve is opened, the first shut-off valve, pressure reducing valve, second are successively closed Shut-off valve and the first solenoid valve pass through gas recycling and Multiplexing Unit from experiment cavity by way of the gas that vacuum unit recycles Inflation check valve is input in storage cylinder.

The gas recycling and Multiplexing Unit are composed in series by booster, pressure stabilizing bottle and the second electronic valve, wherein

In the gas of discharge experiment cavity, the second electronic valve is opened, starts booster, the gas of air cavity recycling is logical Gas vent is crossed, after vacuum unit successively after pressure stabilizing bottle and booster, is transferred in gas storage and supply unit；

When for experiment cavity pressurization, the second electronic valve is closed.

A kind of vacuum experiment implementation method, comprising:

Setting experiment cavity and vacuum unit test the gas vent connection vacuum unit of cavity；

When forming level-one vacuum to experiment cavity, under the mechanical pumping action of vacuum unit setting, the sky in cavity is tested Gas molecule is continued to be discharged from gas vent, until the pressure of experiment cavity reaches the molecule pump startup pressure of vacuum unit setting Power；

Vacuum unit cracking pressure pump continues the air molecule for extracting experiment cavity, realizes high vacuum ring for experiment cavity Border.

This method further include:

Vacuum unit is additionally provided with filter, to the air molecule by the air flue discharge between experiment cavity and mechanical pump It is filtered.

This method further include: setting gas, which is stored, to be stored and supply with supply unit and gas recycling and Multiplexing Unit, gas Unit is answered to be connected in experiment cavity by gas access, gas is input to supply unit by gas access by gas storage It tests in cavity, until the pressure of experiment cavity reaches setting value；

One end one end of access vacuum unit far from experiment cavity of gas recycling and Multiplexing Unit.The other end is linked into gas Body storage and supply unit, by the gas of gas vent recovery experiment cavity, are input to after the completion of testing the experiment of cavity Gas is stored and is stored in supply unit.

As seen from above, vacuum experiment system is arranged in the embodiment of the present invention, include in the vacuum experiment system experiment cavity and Vacuum unit, vacuum unit are connected in experiment cavity by testing the gas vent of cavity, specifically include mechanical pump and molecule Pump realizes the high vacuum environment of experiment cavity using the mode that vacuumizes and the mode for maintaining vacuum environment.Therefore, the present invention is implemented Example construction vacuum unit is controlled by high vacuum environment of the vacuum unit to experiment cavity, independent of external environment Under the premise of vacuum environment is provided.

Detailed description of the invention

Fig. 1 is vacuum experiment system structure diagram provided in an embodiment of the present invention；

Fig. 2 is vacuum experiment implementation method flow chart provided in an embodiment of the present invention.

Appended drawing reference

101- tests cavity

The storage of 103- gas and supply unit

1031- storage cylinder

The first shut-off valve of 1032-

1033- pressure reducing valve

The second shut-off valve of 1034-

The first solenoid valve of 1035-

1036- inflates check valve

1037- first pressure sensor

1038- second pressure sensor

1039- safety valve

The recycling of 104- gas and Multiplexing Unit

1041- booster

1042- pressure stabilizing bottle

The second electronic valve of 1043-

1044- third pressure sensor

102- vacuum unit

1021- mechanical pump

1022- third electronic valve

1023- filter

1024- molecular pump

The 4th electronic valve of 1025-

1026- mechanical pump check valve

1011- vacuum meter unit

1012- pressure gauge unit

Specific embodiment

To make the objectives, technical solutions, and advantages of the present invention more comprehensible, right hereinafter, referring to the drawings and the embodiments, The present invention is further described.

Vacuum experiment system is arranged in the embodiment of the present invention, includes testing cavity and vacuum unit in the vacuum experiment system, Vacuum unit is connected in experiment cavity by testing the gas vent of cavity, mechanical pump and molecular pump is specifically included, using pumping The mode of vacuum mode and maintenance vacuum environment realizes the high vacuum environment of experiment cavity.

Therefore, the embodiment of the present invention constructs vacuum unit, is controlled by high vacuum environment of the vacuum unit to experiment cavity System, provides vacuum environment under the premise of independent of external environment.

The vacuum experiment system of setting of the embodiment of the present invention can also be applied in satellite platform using on the ground It realizes.It either applies on satellite platform or using on the ground, all will not depend upon external environment.Below to apply The vacuum experiment system of satellite platform is described in detail for how specifically providing vacuum environment.

Fig. 1 is vacuum experiment system structure diagram provided in an embodiment of the present invention, which can be set It in satellite platform, also can be set in ground, comprising: experiment cavity 101 and vacuum unit 102, experiment cavity 101 pass through Gas vent is attached with vacuum unit 102, wherein vacuum unit 102 includes:

After mechanical pump 1021, the first electronic valve 1022, filter 1023 and molecular pump 1024 are connected, access gas goes out Mouthful；

When forming level-one vacuum to experiment cavity 101, the first electronic valve 1022 is opened, starts mechanical pump 1021, experiment Air molecule in cavity 101 is under the action of mechanical pump 1021, after gas vent and molecular pump 1024, by filter It after 1023 filtering, is drawn into mechanical pump 1021 by the first electronic valve 1022, until experiment cavity 101 reaches molecular pump After 1024 starting pressure, start molecular pump 1024, continues to extract the air molecule in experiment cavity 101, to test cavity 101 Realize high vacuum environment.

Within the system, the level-one vacuum environment is actually low vacuum environment.

Within the system, molecular pump 1024 is actually the air molecule directed flow controlled in experiment cavity 101, is made It obtains the lasting discharge of air molecule and tests cavity 101.

Within the system, experiment cavity 101 also access vacuum meter unit 1011, to test cavity 101 vacuum environment into Row monitoring obtains vacuum values, and shows.

Within the system, experiment cavity 101 goes back cut-in pressure meter unit 1012, carries out pressure monitoring to experiment cavity 101 Pressure value is obtained, and is shown.

After vacuumizing using the system to experiment cavity 101, high vacuum ring is formed in experiment cavity 101 Border, the rank of vacuum environment are determined by molecular pump 1024.

Within the system, the effect of filter 1023 be to the impurity of air molecule extracted from experiment cavity 101 into Row filtering, avoids the damage to mechanical pump 1021.

Within the system, further includes: gas storage and supply unit 103 and gas recycling and Multiplexing Unit 104, wherein

Gas storage, which is connected to supply unit 103 by gas access, tests in cavity 101, by gas access by gas Body is input in experiment cavity 101, until the pressure of experiment cavity 101 reaches setting value；

One end one end of access vacuum unit 102 far from experiment cavity 101 of gas recycling and Multiplexing Unit 104, it is another Gas storage and supply unit 103 are terminated to, after the completion of testing the experiment of cavity 101, by way of 102 recovery experiment of vacuum unit The gas of cavity 101, is input to gas storage and stores in supply unit 103.

Specifically, gas storage is with supply unit 103 by inflation check valve 1036, storage cylinder 1031, the first shut-off valve 1032, pressure reducing valve 1033, the second shut-off valve 1034 and the first solenoid valve 1035 are composed in series, wherein

When pressurizeing for experiment cavity 101, inflation check valve 1036 is closed, successively opens the first shut-off valve 1032, decompression Valve 1033, the second shut-off valve 1034 and the first solenoid valve 1035, so that the gas in storage cylinder 1031 is inputted by gas access To experiment cavity in, until experiment cavity pressure reach setting value, successively close the first shut-off valve 1032, pressure reducing valve 1033, Second shut-off valve 1034 and the first solenoid valve 1035；

Discharge experiment cavity 101 gas when, open inflation check valve 1036, successively close the first shut-off valve 1032, Pressure reducing valve 1033, the second shut-off valve 1034 and the first solenoid valve 1035, by gas recycling with Multiplexing Unit 104 from experiment cavity 101 are input in storage cylinder 1031 by way of the gas that vacuum unit 102 recycles by inflating check valve 1036.

Gas in storage cylinder 1031 can be the various types gas that experiment cavity 101 carries out pressure test, such as Argon gas.

It is equipped with first pressure sensor 1037 between storage cylinder 1031 and the first shut-off valve 1032, detects storage cylinder 1031 pressure when pressure is big, then opens pressure reducing valve 1033；It is set between the first shut-off valve 1032 and the second shut-off valve 1033 There are second pressure sensor 1038, the gas pressure transmitted in detection gas storage and the air flue in supply unit 103, second At 1038 position of pressure sensor, it can also be equipped with temperature sensor, for gas storage and the air flue in supply unit 103 In gas temperature detected.

It is equipped with safety valve 1039 between the first solenoid valve 1035 and gas access, for when gas storage and supply unit When the gas transmitted in air flue in 103 is dangerous, close.It is also equipped with solenoid valve at safety valve 1039, for controlling safety The opening and closing of valve.

Gas recycling is composed in series with Multiplexing Unit 104 by booster 1041, pressure stabilizing bottle 1042, the second electronic valve 1043, Wherein,

In the gas of discharge experiment cavity 101, the second electronic valve 1043 is opened, booster 1041 is started, tests cavity The gases of 101 recycling by way of vacuum unit 102 successively after pressure stabilizing bottle 1042 and booster 1041, are passed by gas vent It is defeated to gas storage with supply unit 103 in；

When pressurizeing for experiment cavity 101, the second electronic valve 1043 is closed.

It further include third pressure sensor 1044 in gas recycling and Multiplexing Unit 104, positioned at booster 1041 and surely Between pressure bottle 1042, the pressure between booster 1041 and pressure stabilizing bottle 1042 is monitored.

It further include that pressure passes between the booster 1041 in gas recycling and Multiplexing Unit 104 and inflation check valve 1036 Sensor and temperature sensor, for booster pressure and temperature detect.

Fig. 2 is vacuum experiment method flow diagram provided in an embodiment of the present invention, the specific steps are that:

Step 201, setting experiment cavity and vacuum unit test the gas vent connection vacuum unit of cavity；

In the method, the experiment cavity and vacuum unit constitute vacuum experiment system, which can To be arranged in satellite platform or on ground；

Step 202, to experiment cavity formed level-one vacuum when, vacuum unit setting mechanical pumping action under, experiment Air molecule in cavity is continued to be discharged from gas vent, until the pressure of experiment cavity reaches the molecule of vacuum unit setting Pump startup pressure；

Step 203, vacuum unit cracking pressure pump, continue the air molecule for extracting experiment cavity, realize for experiment cavity High vacuum environment.

In the method, vacuum unit is additionally provided with the first electronic valve, the air flue between control experiment cavity and mechanical pump Opening and closing.

In the method, vacuum unit is additionally provided with filter, arranges by the air flue between experiment cavity and mechanical pump Air molecule out is filtered.

In the method, real-time pressure monitoring also is carried out to experiment cavity and vacuum monitors.

In the method, the high vacuum experiment of satellite platform is carried out in the experiment cavity of the high vacuum environment.

This method further include: setting gas, which is stored, to be stored and supply with supply unit and gas recycling and Multiplexing Unit, gas Unit is answered to be connected in experiment cavity by gas access, gas is input to supply unit by gas access by gas storage It tests in cavity, until the pressure of experiment cavity reaches setting value；

One end one end of access vacuum unit far from experiment cavity of gas recycling and Multiplexing Unit.The other end is linked into gas Body storage and supply unit, by the gas of gas vent recovery experiment cavity, are input to after the completion of testing the experiment of cavity Gas is stored and is stored in supply unit.

As can be seen that needing to form level-one vacuum ring before the embodiment of the present invention provides high vacuum environment for experiment cavity Border, that is, low vacuum environment (being formed by the way of mechanical pump extraction), after the fore vacuum degree for reaching molecule pump startup, touching Molecule pump startup is sent out to experiment cavity pumping high vacuum, prepares high vacuum environment for experiment cavity.

In this way, using system and method provided in an embodiment of the present invention, so that it may realize the high vacuum environment of experiment cavity, The various vacuum experiments of satellite platform are carried out in real sample cavity.

The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention Within mind and principle, any modification, equivalent substitution, improvement and etc. done be should be included within the scope of the present invention.