阅读说明：本技术 形状测定用探头 (Measuring shape probe ) 是由 田中仁 舟桥隆宪 佐佐木亘 于 2019-05-06 设计创作，主要内容包括：本发明提供一种形状测定用探头,形状测定用探头具有可动构件、触针、空气轴承、第1磁铁、第2磁铁、第1支承部、第2支承部以及弹性件。第1磁铁和第2磁铁相对于可动构件的轴中心大致对称地固定在空气轴承的上端部。第1支承部通过磁力与第1磁铁连结。第2支承部通过磁力与第2磁铁连结。弹性件为板状,粘接固定于可动构件的上端部,并且载置在第1支承部和第2支承部上。(The present invention provides a kind of measuring shape probe, and measuring shape has movable link, contact pilotage, air bearing, the 1st magnet, the 2nd magnet, the 1st supporting part, the 2nd supporting part and elastic component with probe.1st magnet and the 2nd magnet are substantially symmetrically fixed on the upper end of air bearing relative to the axis center of movable link.1st supporting part is linked by magnetic force and the 1st magnet.2nd supporting part is linked by magnetic force and the 2nd magnet.Elastic component is plate, is bonded and fixed to the upper end of movable link, and is positioned on the 1st supporting part and the 2nd supporting part.)

1. a kind of measuring shape probe, has:

Rodlike movable link has the reflecting surface of reflection laser in upper end；

Contact pilotage is arranged in the lower end of the movable link, contacts with object；

Air bearing has axis hole, so that the movable link is penetrated through the axis hole and can movably be propped up along the 1st direction It holds；

1st magnet and the 2nd magnet, the axis center relative to the movable link are substantially symmetrically fixed on the air bearing Upper end；

1st supporting part, can movably pass through magnetic force on the 1st magnet and the 1st magnet links, the 1st supporting part It for ball shape and is magnetic substance；

2nd supporting part, can movably pass through magnetic force on the 2nd magnet and the 2nd magnet links, the 2nd supporting part It for ball shape and is magnetic substance；And

The elastic component of plate, is bonded and fixed to the upper end of the movable link, and be placed in the 1st supporting part with it is described On 2nd supporting part.

2. measuring shape probe according to claim 1, wherein

The 1st magnetic substance is configured between the 1st magnet and the 1st supporting part, by the magnetic force of the 1st magnet via institute It states the 1st magnetic substance and supports the elastic component in the 1st supporting part,

The 2nd magnetic substance is configured between the 2nd magnet and the 2nd supporting part, by the magnetic force of the 2nd magnet via institute It states the 2nd magnetic substance and supports the elastic component in the 2nd supporting part.

3. measuring shape probe according to claim 1, wherein

The 1st nonmagnetic material is configured between the 1st magnet and the 1st supporting part, by the magnetic force of the 1st magnet via described 1st nonmagnetic material and support the elastic component in the 1st supporting part,

The 2nd nonmagnetic material is configured between the 2nd magnet and the 2nd supporting part, by the magnetic force of the 2nd magnet via described 2nd nonmagnetic material and support the elastic component in the 2nd supporting part.

4. measuring shape described according to claim 1~any one of 3 is popped one's head in, wherein

The upper surface of 1st magnet and the 2nd magnet is plane, and the 1st supporting part and the 2nd supporting part are Steel ball.

5. measuring shape probe according to claim 1, wherein

The air bearing has the 1st recess portion and second recesses,

At least part and the 1st magnet configuration of 1st supporting part in the 1st recess portion,

At least part and the 2nd magnet configuration of 2nd supporting part are in the second recesses.

Technical field

This disclosure relates to obtain the 3 d shape testing dress of the location information in the measured face of optical component or mold etc. The measuring shape for the contact set is popped one's head in.

Background technique

As the method for the surface shape as aspherical shape for accurately measuring optical component or mold etc., extensively It is general that it has been known that there is 3 d shape testing machines.In general, the measurement 3 d shape testing machine of probe with contact, makes on one side The front end of measurement probe contact on one side with object moves measurement along the surface of object with probe, according to measure use pop one's head in and The positional relationship of datum level measures the surface shape of object.As one of such measuring machine, laser length meter is utilized With the 3 d shape testing machine of datum plane mirror.

Here, being illustrated using Figure 10 to existing 3 d shape testing machine.Figure 10 is existing 3 d shape testing The schematic structural diagram of machine.In Figure 10, object 2 (such as lens etc.) is positioned on platform 101.Moreover, 3 d shape testing Machine 100 is constituted are as follows: and contact the measurement for being installed on moving body 103 with the aspect of measure 2a of object 2 with the front end of probe 105, Follow measurement along aspect of measure 2a with the front end of probe 105, to be measured to the surface shape of object 2.

X-axis objective table portion 109 and Y-axis objective table portion are provided with on the moving body 103 of probe 105 being provided with measurement 110, become the structure that moving body 103 can be made mobile in X-direction and Y direction.Moving body 103 can follow object as a result, The surface shape of the aspect of measure 2a of body 2 scans moving body 103 in X-direction and Y direction respectively.

Moreover, being configured with X reference mirror 106, Y reference by referring to mirror supporting part on the platform 101 for being placed with object 2 Mirror 107, Z reference mirror 108.In turn, laser length measurement optical system 104 is provided on moving body 103.By optical interferometry, with On the basis of the respective reference mirror of XYZ, survey length is carried out with the distance of probe 105 to measurement, thus 3 d shape testing machine can obtain The location information of the XYZ coordinate with probe 105 must be measured (for example, referring to patent document 1).

Next, being divided into mechanical structure, auto-focusing optical system and control method about auto focus control, referring to figure 11 structural example is illustrated.Probe positions are controlled by auto focus control, so that measurement is with the front end of probe 105 with big Constant power is caused to contact with the aspect of measure 2a of object 2.

Firstly, being illustrated to mechanical structure.Measurement with probe 105 become movable link 111 be inserted into air bearing 131 and The construction that can be moved on Z coordinate direction.In addition, movable link 111 is equipped with contact pilotage 112 in lower end, it is equipped in upper end Reflecting surface 113.Laser Fzo is irradiated to the reflecting surface 113, the measurement of the position of reflecting surface 113 is carried out according to reflected light.

The elastic component for flexiblely limiting the movement of Z-direction is installed on movable link 111, leaf spring is specifically installed 114.The leaf spring 114 is configured to extend relative to the upper end of movable link 111 to the two sides of Figure 11.Moreover, the two sides of leaf spring 114 Lower surface contacted with the supporting-point 133 of guide portion 115, movable link 111 becomes via leaf spring 114 is with supporting-point 133 The structure that fulcrum is suspended.In measuring shape, in the state that movable link 111 is suspended in midair by leaf spring 114, movable link 111 It is followed up and down relative to aspect of measure 2a.At this point, the direction XY of movable link 111 is limited by air bearing 131, become Free-moving structure in z-direction.

Next, being illustrated to auto-focusing optical system.The laser G irradiated from semiconductor laser 117₀Pass through standard Straight lens 118, and pass through polarization beam apparatus 119 and the wavelength plate of λ/4 120.Then, laser G₀It is reflected by dichronic mirror 121, by poly- Optical lens 122 is concentrated on the reflecting surface 113 of the upper end of movable link 111.

Then, pass through collector lens 122 in the reflected light that reflecting surface 113 reflects, reflected by dichronic mirror 121, by polarization point Beam device 119 is totally reflected, by 123 optically focused of lens.Then, light is separated into two beams by semi-transparent semi-reflecting lens 124, passes through eyelet 125a respectively And eyelet 125b, light is distinguished by photodetector 126a and photodetector 126b.

Next, the control method to auto focus control is illustrated.Two photodetector 126a and photodetector The detection output of 126b is input into error signal generating unit 127.Focus error signal is output to from error signal generating unit 127 Servo circuit 128.By the linear motor 129 of 128 drive control of servo circuit, by the position focusing of probe body 116 to can obtain To the position of defined measurement power.

Finally, being illustrated to the method for supporting movable link 141 using air bearing 144.Supporting-point 133 in Figure 11 It is unique physical contact point in the moving up and down of Z-direction of movable link 111.Therefore, the frictional resistance at supporting-point 133 As movable link 111 it is fine move up and down in big load will be because.

Therefore, as shown in figure 12, the structure using two steel balls 150 is proposed for the bearing of movable link 141.Root According to such structure, so that supporting-point 133 is become point contact with the contact of elastic component 149, can will be moved down on movable link 141 The frictional force of elastic component 149 and steel ball 150 in dynamic inhibits smaller.As a result, can reduce relative to movable link 141 The frictional resistance moved up and down.As the fixing means of steel ball 150, such as have and V slot 140 is implemented to air bearing, by steel ball 150 are set to V slot 140, utilize method that adhesive etc. is fixed etc. (for example, referring to patent document 2).By by supporting-point 133 are set as steel ball 150, also have many advantages, such as that torsion will not be generated on the elastic component of plate.

Citation

Patent document

Patent document 1: Japanese Unexamined Patent Publication 6-265340 bulletin

Patent document 2: Japanese Unexamined Patent Publication 2006-78367 bulletin

Summary of the invention

Measuring shape has movable link, contact pilotage, air bearing, the 1st magnet, the 2nd magnet, the 1st supporting part, the with probe 2 supporting parts and elastic component.

Movable link be it is rodlike, upper end have reflection laser reflecting surface.

The lower end of movable link is arranged in contact pilotage, contacts with object.

Air bearing has axis hole, makes movable link perforation axis hole and can movably be supported along the 1st direction.

1st magnet and the 2nd magnet are substantially symmetrically fixed on the upper end of air bearing relative to the axis center of movable link Portion.

1st supporting part is magnetic substance and is ball shape, and magnetic force can be movably passed through on the 1st magnet and the 1st magnet connects Knot.

2nd supporting part is magnetic substance and is ball shape, and magnetic force can be movably passed through on the 2nd magnet and the 2nd magnet connects Knot.

Elastic component is plate, is adhesively fixed on the upper end of movable link, and is positioned in the 1st supporting part and the 2nd bearing In portion.

Detailed description of the invention

Figure 1A is the solid for indicating to have used the structure of 3 d shape testing device of the measurement probe in embodiment 1 Figure.

Figure 1B is the skeleton diagram for having used the auto-focusing optical system of the measurement probe in embodiment 1.

Fig. 2A is the cross-sectional view of the measurement probe in embodiments of the present invention 1.

Fig. 2 B is the amplification explanatory diagram near the steel ball of measurement probe.

Fig. 3 A is movable link, elastic component and the steel ball before the movable link in existing way starts to move downwards Skeleton diagram.

Fig. 3 B is the figure of the friction of rest power generated between the elastic component and steel ball indicated in figure 3 a.

Fig. 4 A is that the movable link in existing way starts downwards the general of the movable link moved, elastic component and steel ball Sketch map.

Fig. 4 B is the figure of the friction of rest power generated between the elastic component and steel ball indicated in Figure 4 A.

Fig. 5 A is movable link, elastic component and the steel ball before the movable link in existing way starts to move upwards Skeleton diagram.

Fig. 5 B is the figure of the friction of rest power generated between the elastic component and steel ball indicated in fig. 5.

Fig. 6 A is that the movable link in existing way starts the general of the movable link moved, elastic component and steel ball upwards Sketch map.

Fig. 6 B is the figure of the friction of rest power generated between the elastic component and steel ball indicated in fig. 6.

Fig. 7 A is the skeleton diagram of the movement of the elastic component and steel ball when the movable link in embodiment 1 moves downwards.

Fig. 7 B is the skeleton diagram of the movement of the elastic component and steel ball when the movable link in embodiment 1 is moved upward.

Fig. 8 is the cross-sectional view of the measurement probe in embodiment 2.

Fig. 9 is the cross-sectional view of the measurement probe in embodiment 3.

Figure 10 is the perspective view for indicating to have used the existing measurement structure of the 3 d shape testing machine of probe.

Figure 11 is the skeleton diagram of existing auto-focusing optical system.

Figure 12 is the cross-sectional view of existing measurement probe.

Symbol description

1: platform, 2: object, 2a: aspect of measure, 3: moving body, 4: laser length measurement optical system, 5: measurement probe, 6:X Reference mirror, 7:Y reference mirror, 8:Z reference mirror, 9:X axis objective table portion, 10:Y axis objective table portion, 11:Z axis objective table portion, 12:He- Ne laser, 13: 3 d shape testing device, 21: movable link, 22: contact pilotage, 23: reflecting surface, 24: air bearing, 24a: axis Hole, 24b: recess portion, the 24b1: the 1 recess portion, 24b2: second recesses, 25: air bearing main body, 26: shell, 27: pneumatic fitting, 28: Slot, 29: elastic component, 30: steel ball, the 30a: the 1 supporting part, the 30b: the 2 supporting part, 31: magnet, the 31a: the 1 magnet, 31b: the 2 Magnet, 40: control unit, 41: auto-focusing optical system, 42: compressor, 60: magnetic substance, the 60a: the 1 magnetic substance, 60b: the 2 Magnetic substance, 70: nonmagnetic material, the 70a: the 1 nonmagnetic material, the 70b: the 2 nonmagnetic material, 100: 3 d shape testing machine, 101: flat Platform, 103: moving body, 104: laser length measurement optical system, 105: measurement probe, 106:X reference mirror, 107:Y reference mirror, 108:Z reference mirror, 109:X axis objective table portion, 110:Y axis objective table portion, 111: movable link, 112: contact pilotage, 113: reflecting surface, 114: leaf spring, 115: guide portion, 116: probe body, 117: semiconductor laser, 118: collimation lens, 119: polarization beam splitting Device, 120: λ/4 wavelength plates, 121: dichronic mirror, 122: collector lens, 123: lens, 124: semi-transparent semi-reflecting lens, 125a: eyelet, 125b: eyelet, 126a: photodetector, 126b: photodetector, 127: error signal generating unit, 128: servo circuit, 129: line Property motor, 133: supporting-point, 140:V slot, 141: movable link, 144: air bearing, 149: elastic component, 150: steel ball, 416: Probe body, 417: semiconductor laser, 418: collimation lens, 419: polarization beam apparatus, 420: λ/4 wavelength plates, 421: color separation Mirror, 422: collector lens, 423: lens, 424: semi-transparent semi-reflecting lens, 425a: eyelet, 425b: eyelet, 426a: photodetector, 426b: photodetector, 427: error signal generating unit, 428: servo circuit, 429: linear motor, C: axis center, Fz: laser, G: laser.

Specific embodiment

In the existing structure, the leaf spring 114 for being installed on movable link 111 is supported by steel ball 150 with putting, therefore can Reducing friction resistance.But when movable link 111 carries out several nanometers to several microns when moving up and down up and down, in leaf spring 114 Frictional resistance is generated between supporting-point 133.This becomes the load of movable link 111 moved up and down, and becomes for making contact pilotage The control that is contacted with constant power of front end and object in unstable element.

Hereinafter, the embodiment in the disclosure is described in detail referring to attached drawing.

(embodiment 1)

Figure 1A is to indicate to have used the measurement outline knot of the 3 d shape testing device of probe involved in embodiment 1 The perspective view of structure.

Compared with existing 3 d shape testing machine shown in Fig. 10, measurement spy involved in embodiment 1 has been used Structure near the supporting part of two ball shapes of first 53 d shape testing device 13 differs widely.

Hereinafter, the outline of the movement of the measurement probe 5 when recording measurement.Make front end and mounting of the measurement with probe 5 In the state of the aspect of measure 2a contact of the object 2 of platform 1, measurement can be relatively moved with probe 5 in XY axis direction.With Movement of the measurement with probe 5 to XY axis direction, the front end of measurement probe 5 is on one side along the aspect of measure 2a constant of object 2 Ground, which maintains contact force, is followed on one side to measure the shape of the aspect of measure 2a of object 2.

3 d shape testing device 13 makes to be installed on the measurement of moving body 3 and is followed with 5 front end of popping one's head in and be fixed on platform 1 The aspect of measure 2a of object 2 measures the shape of object 2 by the location information of each point of measurement object 2.As location information Measuring method is respectively configured X reference mirror 6, Y reference mirror 7 and Z reference mirror 8 via reference mirror supporting part on the platform 1, passes through Based on the laser length measurement optical system 4 of the optical interferometry using each reference mirror as datum level, to obtain the coordinate bit of XYZ It sets.

It is provided with X-axis objective table portion 9 and Y-axis objective table portion 10 being provided with the measurement moving body 3 of probe 5, makes to measure The surface shape that the aspect of measure 2a of object 2 is followed with probe 5, moves moving body 3 in X-direction and Y direction respectively.

Moreover, z-stage portion 11 can movably be supported in platform along Z-direction, that is, up and down direction (vertical direction) 1, the measurement probe 5 that bearing is contacted with the aspect of measure 2a of object 2 in lower end enables measurement to be moved up and down with probe 5.

Control unit 40 and auto-focusing optical system 41, X-axis objective table portion 9, Y-axis objective table portion 10, z-stage portion 11, He-Ne laser 12 etc. connects, and 3 d shape testing movement is controlled by carrying out respective action control.

Here, about according to contacting the measurement front end of probe 5 with the aspect of measure 2a of object 2 with the power of constant Mode controls the auto focus control of probe positions, is divided into mechanical structure, auto-focusing optical system 41, control method, reference The structural example of Figure 1B is illustrated.

Firstly, being illustrated to mechanical structure.Measurement with probe 5 become movable link 21 perforation insertion air bearing 24 and The structure that can be moved on Z coordinate direction.In addition, movable link 21 is equipped with contact pilotage 22 in lower end, it is equipped with instead in upper end Penetrate face 23.Laser Fz is irradiated to the reflecting surface 23, the measurement of the position of reflecting surface 23 is carried out according to the reflected light of the reflecting surface 23.

The elastic component 29 for the movement for flexiblely limiting Z-direction is installed in movable link 21, leaf spring is specifically installed. The elastic component 29 is configured to extend relative to the upper end of movable link 21 to the two sides of Figure 1B, as described below, becomes relative to sky Gas bearing 24 is suspended the structure of bearing.

In measuring shape, in the state that movable link 21 is suspended in midair by elastic component 29 relative to air bearing 24, movably Component 21 is followed up and down relative to aspect of measure 2a.At this point, movable link 21, which becomes, is limited in XY by air bearing 24 Movement on direction and free-moving structure in z-direction.

Next, being illustrated to auto-focusing optical system 41.The laser G irradiated from semiconductor laser 417 passes through Collimation lens 418, and pass through polarization beam apparatus 419 and the wavelength plate of λ/4 420.Then, laser G is reflected by dichronic mirror 421, is passed through Collector lens 422 is concentrated on the reflecting surface 23 of the upper end of movable link 21.

Then, pass through collector lens 422 in the reflected light that reflecting surface 23 reflects, reflected by dichronic mirror 421, by polarization beam splitting Device 419 is totally reflected, by 423 optically focused of lens.Then, light is separated into two beams by semi-transparent semi-reflecting lens 424, respectively by eyelet 425a with And eyelet 425b, light is distinguished by photodetector 426a and photodetector 426b.

Next, the control method to auto focus control is illustrated.Two photodetector 426a and photodetector The detection output of 426b is input into error signal generating unit 427.Focus error signal is output to from error signal generating unit 427 Servo circuit 428.By the linear motor 429 of 428 drive control of servo circuit, by the position focusing of probe body 416 to can obtain To the position of defined measurement power.

Fig. 2A is the enlarged cross-sectional view of the front end of the measurement probe 5 in embodiment 1.

Measurement at least has with probe 5: contact pilotage 22；Rodlike movable link 21；Air bearing 24；Two magnet 31 the (the 1st Magnet 31a and the 2nd magnet 31b)；The supporting part (the 1st supporting part 30a and the 2nd supporting part 30b) of two ball shapes, in other words as Elastic component supporting part；And the elastic component 29 of plate.

Contact pilotage 22 is set to the measurement lower end of probe 5, contacts with the aspect of measure 2a of object 2.

Movable link 21 has the reflecting surface 23 of laser Fz of the reflection from laser length measurement optical system 4 in upper end.

Movable link 21 is inserted into and carry out it can only along axial direction (the 1st direction) i.e. Z-direction movably by air bearing 24 Bearing.

Two magnet 31 are fixed on substantially symmetric relative to the axis center C of movable link 21 in the upper end of air bearing 24 Position.

The example of the elastic component supporting part of two ball shapes is metal ball, more specifically steel ball 30.Two steel balls 30 It is placed on the plane i.e. upper surface of two magnet 31, and magnetic force can be movably passed through and linked.

Elastic component 29 is adhesively fixed on the upper end of movable link 21, and extend to two ball shapes steel ball 30 and by Mounting bearing.In other words, elastic component 29 is adhesively fixed on the upper end of movable link 21, and is positioned in two steel balls 30 the (the 1st Supporting part 30a and the 2nd supporting part 30b) on.

It is connect as described above, being equipped in lower end with the aspect of measure 2a of object 2 positioned at measurement with the movable link 21 in probe 5 The contact pilotage 22 of touching.In addition, being equipped with reflecting surface 23 in the upper end of movable link 21.In order to carry out survey length using optical interferometry, from Laser length measurement optical system 4 irradiates laser Fz to reflecting surface 23.In addition, movable link 21 is to be inserted into the axis hole of air bearing 24 The state of 24a is kept, and can only be moved in its axial direction.Air bearing 24 is inserted into axis hole in the movable link 21 that will be used as axis It is supported in the state of 24a.Moreover, air bearing 24 has: the air bearing main body 25 of barrel shape, be provided with for insert Enter the guidance of movable link 21 of axis hole 24a and the air flue of blows air；And outer wall, install or be incorporated into other component. In the present embodiment, the outer wall of air bearing 24 is formed by measuring with the shell 26 of probe 5.

Shell 26 is to be set to the measurement container of the tubular of the front end of probe 5, keeps air bearing 24 in front end.In shell The pneumatic fitting 27 for being sent into air to air bearing main body 25 is provided on body 26, it is empty to be blown into compression from compressor 42 etc. Gas.It is formed with slot 28 on the surface of air bearing main body 25, the slot 28 delimited by the inner sidewall of shell 26 and the inner wall of slot 28 Interior space is formed as the path for flowing air.

According to this structure, in the assay when XY is mobile, movable link 21 is in air bearing 24 relative to the direction XY Movement is limited, and can only be moved in z-direction.

The elastic component 29 and reflecting surface 23 of plate are dividually fixed on movable structure near the axis center C of movable link 21 The upper end of part 21.Elastic component 29 is configured to become right angle orientation with movable link 21.Specific example as elastic component 29 is plate Spring.When movable link 21 penetrates through the axis hole 24a of air bearing main body 25, the both ends of elastic component 29 with be located at air bearing The mode contacted on two steel balls 30 of the upper surface of main body 25 loads.That is, movable link 21 is supported on two via elastic component 29 Two steel balls 30 at end, become the state being suspended in the inside of air bearing 24.

Next, existing the side XY while being contacted with aspect of measure 2a to the contact pilotage 22 for being installed on the measurement front end of probe 5 Measurement when relative movement is illustrated with the movement of the Z-direction of probe 5 upwards.

The laser Fz from laser length measurement optical system 4 is radiated at peace in the movable link 21 that lower end is equipped with contact pilotage 22 Reflecting surface 23 loaded on upper end.It is configured to measure the position of reflecting surface 23 according to the reflected light of laser Fz.Moreover, and laser Fz is different, and the laser G from auto-focusing optical system 41 is irradiated to reflecting surface 23.According to the reflected light of laser G, detection assay Z-stage portion 11 is controlled by auto focus control in the Z-axis direction with the relative position of the reflecting surface 23 in probe 5, So that reflecting surface 23 is relative constant on the position that the Z-direction in probe 5 is used in measurement.Moreover, reflection of the measurement in probe 5 Face 23 is on the position of Z-direction, and the front end that relative constant position is set at contact pilotage 22 is contacted with aspect of measure 2a and elasticity Part 29 is supported and is become the position of the state of suspention by two steel balls 30.

The contact pilotage 22 for being installed on measurement probe 5 as a result, can be maintained and aspect of measure 2a with the small power of constant The positional relationship of contact.Here, small power is, for example, several mgf to tens mgf.

In this way, carry out measurement remaining constant auto focus control with the position of the reflecting surface 23 in probe 5 on one side, On one side by X-axis objective table portion 9 and Y-axis objective table portion 10, make the z-stage portion 11 comprising measurement probe 5 relative to The aspect of measure 2a of object 2 is relatively moved on the direction XY.In this case, even if movable link 21 is according to aspect of measure 2a's The concave-convex variation of shape and change up and down, upper and lower variation can be also followed by z-stage portion 11, thus in the side XY In upward movement, measurement can be continued with probe 5 with constant insisting on to be contacted with the aspect of measure 2a of object 2.

However, existing method as shown in figure 12 is such, and when the steel ball 150 for supporting movable link 141 is fixed, elasticity Part 149 and when moving up and down correspondingly flexure up and down of movable link 141, the position of the contact point of elastic component 149 and steel ball 150 It can deviate.Therefore, small frictional force can be generated between elastic component 149 and steel ball 150.Moreover, the frictional force becomes opposite In the frictional resistance of movable link 141 moved up and down.Hereinafter, this is described in detail.

It is shown in figure 3 a in movable link 141 from static movable link 141, bullet before it will move downwards Property part 149 and steel ball 150.Show in figure 3b movable link 141 it is static when elastic component 149 and steel ball 150 contact point week The enlarged drawing on side.

Referring to Fig. 3 B, to the elastic component 149 and steel before movable link 141 is mobile since static state is downwards The frictional force generated between ball 150 is illustrated.When the tilt angle relative to horizontal direction of elastic component 149 is set as θ, by F is applied to steel ball 150 in vertical direction in elastic component 149₁Power, therefore as F₁Power component a part, steel ball The resistance that 150 pairs of elastic components 149 apply is F₁COSθ.Here, be friction of rest between elastic component 149 and steel ball 150, if therefore Coefficient of friction of rest is set as μ, then the frictional force generated between elastic component 149 and steel ball 150 is μ F₁COSθ。

Next, showing the movable link 141 when movable link 141 starts downwards mobile, elastic component 149 in Figure 4 A With steel ball 150.The contact point periphery of elastic component 149 and steel ball 150 when movable link 141 starts mobile is shown in figure 4b Enlarged drawing.

Referring to Fig. 4 B, generated between the elastic component 149 and steel ball 150 when starting mobile downwards to movable link 141 Frictional force is illustrated.With it is static when it is identical, due to F₁Power act on steel ball 150 along vertical direction from elastic component 149, therefore Steel ball 150 is F to the resistance that elastic component 149 applies₁COSθ.Here, since movable link 141 starts downwards movement and in bullet The frictional force generated between property part 149 and steel ball 150 is dynamic friction, if therefore dynamic friction coefficient is set as μ ', frictional force is μ’F₁COSθ。

Next, show in fig. 5 movable link 141 since it is static up to will upwards it is mobile before can Dynamic component 141, elastic component 149 and steel ball 150.Show in figure 5B movable link 141 it is static when elastic component 149 and steel ball The enlarged drawing on 150 contact point periphery.

Referring to Fig. 5 B, to the elastic component 149 and steel before movable link 141 is mobile since static state is upwards The frictional force generated between ball 150 is illustrated.F₂Power act on steel ball 150, therefore steel along vertical direction from elastic component 149 Ball 150 is F to the resistance that elastic component 149 applies₂COSθ.Here, since what is generated between elastic component 149 and steel ball 150 rubs Wiping power be friction of rest, if therefore coefficient of friction of rest is set as μ, the friction generated between elastic component 149 and steel ball 150 Power is μ F₂COSθ。

Next, showing the movable link 141 when movable link 141 starts mobile upwards, elastic component 149 in fig. 6 With steel ball 150, the contact point periphery of the elastic component 149 and steel ball 150 when movable link 141 starts mobile is shown in fig. 6b Enlarged drawing.

Referring to Fig. 6 B, generated between the elastic component 149 and steel ball 150 when starting mobile upwards to movable link 141 Frictional force is illustrated.With it is static when it is identical, due to F₂Power act on steel ball 150 along vertical direction from elastic component 149, therefore Steel ball 150 is F to the resistance that elastic component 149 applies₂COSθ.Here, since movable link 141 starts movement and in bullet upwards The frictional force generated between property part 149 and steel ball 150 is dynamic friction, if therefore dynamic friction coefficient is set as μ ', in elastic component The frictional force generated between 149 and steel ball 150 is μ ' F₂COSθ.That is, being kept in auto focus control in movable link 141 When constant position, movable link 141, which is repeated, to be moved up and down, but whenever the upper and lower moving direction of movable link 141 is cut When changing, can be generated on movable link 141 from friction of rest power μ F₁COS θ or μ F₂COS θ is to kinetic force of friction μ ' F₁COS θ or μ ' F₂The resistance of COS θ progress nonlinear change.In addition, the elastic component in the case where movable link 141 moves in the up-down direction The power F that 149 pairs of steel balls 150 apply₁With power F₂, power F₁Specific force F₂Greatly.Therefore, movable link 141 it is upper mobile when and lower movement When, frictional force it is of different sizes.

In this way, frictional resistance can be generated relative to moving up and down for movable link 141, and the frictional resistance is non-linearly Variation, and the size of frictional force in the up-down direction is mutually different, therefore the movable link 141 based on auto focus control is right The tracing ability of the shape of the aspect of measure 2a of object 2 can be deteriorated.

Therefore, in the present embodiment, the flexure for elastic component 29 relative to the up and down motion of movable link 21, so that The offset between elastic component 29 and two steel balls 30 will not be generated respectively.That is, making two steel balls 30 relative to air bearing 24 Supporting construction is not the simple fixture construction based on V slot, and is set to can allow for the branch mobile relative to air bearing 24 Hold construction.

Specifically, the flexure for being configured to each steel ball 30 and elastic component 29 correspondingly can be from the axis of movable link 21 Heart C is moved forward and backward along radiation direction.

Next, each steel ball 30 explained in detail below can be from the axis center direction of movable link 21 along radiation direction The structure of back-and-forth motion.That is, as shown in Figure 2 A, in air bearing 24 and in the position substantially symmetric relative to axis center C, such as It separates 180 degree interval and fixes two magnet 31.Moreover, steel ball 30 is respectively set on the upper surface of the two magnet 31, utilize The magnetic force of magnet 31 enables air bearing 24 movably to link with steel ball 30.As the consolidating relative to air bearing 24 of magnet 31 Determine method, such as has the method etc. being fixed using adhesive etc..Specifically, in air bearing 24, relative to axis center C It separates 180 degree interval and forms two recess portion 24b (the 1st recess portion 24b1 and second recesses 2462).It is using adhesive that magnet 31 is fixed In each recess portion 24b.Here, magnet 31 at least has plane in upper surface, it is for example, cylindric.Next, in each magnetic The upper surface of iron 31 loads steel ball 30, can movably keep steel ball 30 using the magnetic force of magnet 31.Finally, in each steel ball Elastic component 29 is loaded on 30.As shown in Figure 2 B, about the depth D of recess portion 24b₃In the residue other than the thickness of magnet 31 Dimension D₂, as an example, it is set as that magnet 31 can be stored in recess portion 24b and the lower half close to steel ball 30 can be stored The size of partial degree.In such manner, it is possible to stably keep magnet 31 and steel ball 30 in air bearing 24.

In addition, the position substantially symmetric relative to axis center C is not limited to separate two positions at 180 degree interval, such as It is also possible to separate three positions at 120 degree of intervals.

Here, recess portion 24b has the function of preventing steel ball 30 from rolling and falling off from magnet 31.In order to realize the function, close In the diameter of steel ball 30, even if it is required that measurement when steel ball 30 on magnet 31 it is small rolling and move, steel ball 30 will not It is contacted with the open edge of recess portion 24b.As specific an example, when the diameter of steel ball 30 is 1mm, the distance of the rolling of steel ball 30 It is up to tens μm.Additionally it is believed that the mismachining tolerance of magnet 31 and recess portion 24b are up to 100 μm or so.Assuming that in magnet 31 Diameter be processed 100 μm and the diameter of recess portion 24b small and be processed big 100 μm in the case where, the center of magnet 31 is opposite 100 μm can be deviated in the center of recess portion 24b.Therefore, even if steel ball 30 rolls tens μm on magnet 31 in measurement, steel ball 30 It will not be contacted with the open edge of recess portion 24b, therefore as shown in Figure 2 B, about the diameter of recess portion 24b, need to make recess portion 24b's Clearance distance D between open edge and steel ball 30₁For (100 μm)+(tens μm)=(100 μm) Zuo You.

In addition, as described above, steel ball 30 rolls on magnet 31 without falling off from magnet 31.Therefore, as The depth D of recess portion 24b₃In the remaining dimension D other than the thickness of magnet 31₂Specific example, preferably steel ball 30 1/2 or more and 2/3 or less of diameter.

It is shown in Fig. 7 A and Fig. 7 B when linking steel ball 30 and air bearing 24 using magnet 31, on movable link 21 The case where elastic component 29 when lower mobile and steel ball 30.

As shown in Figure 7 A, the situation mobile to -Z direction (that is, lower section) along the shape of aspect of measure 2a in movable link 21 Under, elastic component 29 is projectedly bent downwards, correspondingly, each steel ball 30 also on the upper surface of corresponding magnet 31 to The direction of the axis center C of movable link 21 rolls (Fig. 7 A (b)).Moreover, Z axis carries when movable link 21 is mobile to -Z direction Object platform portion 11 is mobile to -Z direction, and the distance of reflecting surface 23 and auto-focusing optical system 41 is controlled, to return to The position determined.That is, when movable link 21 returns to determined position, since the flexure of elastic component 29 is also restored, because Correspondingly each steel ball 30 rolls on the upper surface of corresponding magnet 31 for this, and to the axis center C with movable link 21 Opposite direction returns.

Next, as shown in Figure 7 B, in the case where movable link 21 is mobile to +Z direction (i.e. top), elastic component 29 to Top flexure, correspondingly, each steel ball 30 is also to the axis center C of movable link 21 on the upper surface of corresponding magnet 31 Direction an opposite side roll (Fig. 7 B (b)).Moreover, when movable link 21 is mobile to +Z direction, due to reflecting surface 23 Shorten at a distance from auto-focusing optical system 41, therefore z-stage portion 11 is mobile to +Z direction, and reflecting surface 23 and from The distance of dynamic Focused Optical system 41 is controlled, to again return to determined position.That is, being returned in movable link 21 When the position determined, since the flexure of elastic component 29 is also restored, correspondingly each steel ball 30 is in corresponding magnet It rolls on 31 upper surface, and is returned to the axis center direction of movable link 21.

For with movable link 21 move up and down, the flexure of elastic component 29, in the prior art, in bearing elasticity Frictional resistance can be generated between the steel ball 150 and elastic component 149 of part 149.But according to the present embodiment, pass through each steel ball 30 correspondingly roll on the upper surface of each magnet 31 with the flexure of elastic component 29, so as to mitigate frictional resistance.It is tied Fruit is, the tracing ability of auto focus control improves, and the aspect of measure 2a of object 2 and the contact force of contact pilotage 22 when measurement become permanent It is fixed.

That is, two steel balls 30 are movably concatenated on two magnet 31 by magnetic force respectively, it is bonded and fixed to movable The elastic component 29 of the plate of the upper end of component 21 is placed on two steel balls 30 and is suspended bearing.Therefore, in elastic component 29 As movable link 21 is when moving up and down and bending, by eliminating elastic component 29 and the offset on the contact surface of steel ball 30, subtract Few frictional resistance, the tracing ability of the auto focus control of the position control as movable link 21 improve.According to this structure, Contact measurement in the 3 d shape testing device 13 to be measured with the aspect of measure 2a of object 2 with the front end of probe 5, with It compares in the past, measurement can be maintained constant with the power that the front end of probe 5 is applied to aspect of measure 2a.In turn, since power is kept To be constant, therefore measurement can be contacted with smaller power with aspect of measure 2a with the front end of probe 5.

In turn, as described above, the tracing ability of auto focus control improves, compared with the conventional method, contact force is more constant, because Even if this obtains contact force setting themselves smaller, it is also able to carry out following for auto focus control.

In addition, the magnetic force of magnet 31 has immediate vicinity most strong and magnetic force is with the property that dies down towards outside.Therefore, When stablizing, steel ball 30 is maintained at the center of magnet 31.Therefore, in the case where removing measurement probe 5, alternatively, even if In the case where being impacted to measurement with probe 5 application itself, steel ball 30 can also recover to the regulation on the upper surface of magnet 31 Position.

(the 2nd embodiment)

Next, being illustrated using 2nd embodiment of the Fig. 8 to the disclosure.The measurement of 2nd embodiment probe 5 It is 5 same structures of probe to be used with the measurement of the 1st embodiment, therefore be illustrated centered on difference.

Identical as the 1st embodiment, in the substantially symmetric position the axis center C away from movable link 21, two steel balls 30 are matched It is placed in air bearing 24, in the lower part of steel ball 30, magnet 31 is fixed in air bearing 24.However, not with the 1st embodiment Together, configured with the face precision with the contact surface of steel ball 30, high (such as surface is thick between steel ball 30 and magnet 31 for the 2nd embodiment Rugosity Ra be 6.3 or more) magnetic substance 60 (such as SUS etc.).That is, configuring between the 1st supporting part 30a and the 1st magnet 31a 1 magnetic substance 60a.Moreover, configuring the 2nd magnetic substance 60b between the 2nd supporting part 30b and the 2nd magnet 31b.Magnet 31 has material Upper frangible property, it is difficult to which face precision is improved by attrition process etc..Therefore, by by it is easy carry out attrition process SUS etc. Magnetic substance 60 is inserted between magnet 31 and steel ball 30, the rolling of steel ball 30 can be kept good on the basis of keeping magnetic force.In addition, According to this method, steel ball 30 will not be rolled directly on magnet 31, therefore can also obtain the effect for preventing magnet 31 from wearing.

(the 3rd embodiment)

Next, being illustrated using 3rd embodiment of the Fig. 9 to the disclosure.

The measurement of 3rd embodiment probe 5 is that 5 same structures of probe are used with the measurement of the 1st embodiment, because This is illustrated centered on difference.

Identical as the 1st embodiment, in the substantially symmetric position the axis center C away from movable link 21, two steel balls 30 are matched It is placed in air bearing 24, in the lower part of steel ball 30, magnet 31 is fixed in air bearing 24.However, not with the 1st embodiment Together, the 3rd embodiment has configures nonmagnetic material 70 between steel ball 30 and magnet 31, adjusts magnet 31 by nonmagnetic material 70 Magnetic force mechanism.That is, configuring the 1st nonmagnetic material 70a between the 1st supporting part 30a and the 1st magnet 31a.Moreover, at the 2nd The 2nd nonmagnetic material 70b is configured between bearing portion 30b and the 2nd magnet 31b.As described in the 1st embodiment, become each steel ball 30 with The flexure of elastic component 29 is correspondingly relative to the axis center C of movable link 21 along the structure of radiation direction scroll forward and backward.Here, In Steel ball 30 when leaving 31 center of magnet it is generated based on the recuperability of magnetic force relative to acting on elastic component 29 and steel ball 30 In the case that friction of rest power is strong, steel ball 30 cannot be rolled, and the flexure with elastic component 29 is correspondingly in elastic component 29 and steel ball 30 Between can generate frictional resistance.In turn, even if in steel ball 30 in the case where being rolled on magnet 31, if the recuperability of magnet is strong, Then there is also move up and down the case where control becomes resistance to the movable link 21 based on auto focus control.Therefore, it is necessary to The magnetic force of magnet 31 is adjusted, but the minor adjustment of the magnetic force of magnet itself is difficult.Therefore, between magnet 31 and steel ball 30 It configures nonmagnetic material 70 and is able to carry out the fine tuning of the magnetic force of magnet 31 by adjusting the thickness or material of the nonmagnetic material 70 It is whole, so as to obtain the optimal magnetic force for auto focus control.Moreover, by improving nonmagnetic material 70 and steel ball 30 The face precision of contact surface, so as to obtain the effect similar with effect shown in the 2nd embodiment.

In addition, by the arbitrary embodiment example in appropriately combined above-mentioned various embodiments, it is each so as to play From the effect having.Furthermore it is possible to carry out embodiment combination with one another, and it is able to carry out the feature in embodiment each other Combination.

As described above, the disclosure reduces fine friction when movable link moves up and down for solving existing project Resistance keeps moving up and down for movable link more smooth.Thereby, it is possible to provide measurement with the front end of probe with constant power and survey Determine the measuring shape probe of face contact.

In other words, according to the mode of the disclosure, two be ball shape and be magnetic substance supporting part by magnetic force at two It is movably concatenated on magnet, the elastic component for being bonded and fixed to the plate of the upper end of movable link is positioned in two ball shapes Supporting part on and be suspended bearing.According to this structure, make the measurement front end of probe and the measurement face contact of object It is compared with the past come in the 3 d shape testing device that is measured, front end that measurement is popped one's head in can be applied to aspect of measure Power be maintained constant.In turn, due to power remain it is constant, measurement with probe front end can with smaller power and measurement Face contact.

It is non-that the probe of measurement involved in the aforesaid way of the disclosure is applicable not only to measurement optical component or mold etc. The 3 d shape testing device of the surface shape of spherical surface object can be applicable to the chip or magnetic of measurement semiconductors manufacture The measurement probe of the shape measuring apparatus of the flatness of the light sheets such as storage dish or thickness etc. etc..