阅读说明：本技术 用于感测角速率的微机电陀螺仪及感测角速率的方法 (Method for sensing the micro-electro-mechanical gyroscope of angular speed and sensing angular speed ) 是由 D·普拉蒂 C·瓦尔扎希纳 L·G·法罗尼 M·F·布鲁内托 于 2015-11-30 设计创作，主要内容包括：一种微机电陀螺仪包括：衬底；固定到衬底的定子感测结构；第一质量块,其被弹性地耦合到衬底并可以相对于衬底在第一方向上移动；第二质量块,其被弹性地耦合到第一质量块并且可以相对于第一质量块在第二方向上移动；以及弹性约束到第二质量块和衬底并被电容耦合到定子感测结构的第三质量块,第三质量块可以相对于衬底在第二方向上以及相对于第二质量块在第一方向上移动。(A kind of micro-electro-mechanical gyroscope includes: substrate；Stator sensing structure fixed to substrate；First mass block is flexibly coupled to substrate and can be moved in a first direction relative to substrate；Second mass block is flexibly coupled to the first mass block and can be moved in a second direction relative to the first mass block；And elastic restraint to the second mass block and substrate and will be capacitively coupled to the third mass block of stator sensing structure, third mass block can move in a first direction in a second direction and relative to the second mass block relative to substrate.)

1. a kind of micro-electro-mechanical gyroscope, comprising:

Substrate；

Stator sensing structure fixed to the substrate；

Driving structure；

First mass block and the second mass block are flexibly coupled to the substrate, and can be opposite along first axle It is mobile in the substrate, wherein the driving structure be configured such that first mass block and second mass block along The first axle is mobile；

Third mass block and the 4th mass block are respectively elastically coupled to the substrate and first mass block and institute The second mass block is stated, first mass block and second mass block are configured such that the third mass block and described Four mass blocks are moved along the second axis transverse to the first axle relative to the substrate；

5th mass block and the 6th mass block are flexibly coupled to the third mass block and the 4th mass block, described Third mass block and the 4th mass block are configured such that first mass block and the 6th mass block along described First axle and the second axis are mobile；And

Sensing structure, is flexibly coupled to the 5th mass block and the 6th mass block, the 5th mass block and described 6th mass block is configured such that the sensing structure moves on the direction for being parallel to the first axle.

2. micro-electro-mechanical gyroscope according to claim 1, wherein first pair of sensing structure is coupled to the 5th mass block Opposite end, and second pair of sensing structure is coupled to the opposite end of the 6th mass block.

3. micro-electro-mechanical gyroscope according to claim 1, wherein the driving structure includes.

4. micro-electro-mechanical gyroscope according to claim 1, wherein first mass block and second mass block surround Central axis arrangement, wherein first mass block and second mass block are flexibly coupled to anchoring piece at center.

5. micro-electro-mechanical gyroscope according to claim 4 further includes respectively in the central axis and first mass Bridge between block and second mass block, wherein the first mass block and the second mass block are coupled to the anchoring by the bridge Part.

6. micro-electro-mechanical gyroscope according to claim 1, wherein the sensing structure is respectively relative to the driving structure Laterally arrange.

7. gyroscope according to claim 1, wherein the second direction is perpendicular to the first direction.

8. gyroscope according to claim 1, wherein the 5th mass block and the 6th mass block are not coupled to The substrate.

9. a kind of micro-electro-mechanical gyroscope, comprising:

Substrate；

Stator sensing structure fixed to the substrate；

Driving structure；

Mass block is flexibly coupled to the substrate, and can move along first axle relative to the substrate, wherein institute It states driving structure and is configured such that first mass block is moved along the first axle；

Second mass block, is flexibly coupled to the substrate and first mass block, and first mass block is configured as making Second mass block is obtained to move along the second axis transverse to the first axle relative to the substrate；

Third mass block, is flexibly coupled to second mass block, and second mass block is configured such that the third Mass block is moved along the first axle and the second axis；And

Sensing structure, is flexibly coupled to the third mass block, and the third mass block is configured such that the sensing knot Structure moves on the direction for being parallel to the first axle.

10. micro-electro-mechanical gyroscope according to claim 9, wherein the sensing structure is lateral relative to the driving structure Ground arrangement.

11. micro-electro-mechanical gyroscope according to claim 9, wherein the third mass block is not coupled to the substrate.

12. micro-electro-mechanical gyroscope according to claim 9, wherein the third mass block passes through a pair of of elastic element coupling To second mass block.

13. micro-electro-mechanical gyroscope according to claim 9, wherein the driving structure includes multiple fixed electrodes, it is described Multiple fixed electrode capacitances are coupled to multiple travelling electrodes.

14. gyroscope according to claim 9 further includes the bracket around central anchor, wherein first mass Block and second mass block are coupled to the central anchor by the bracket.

15. gyroscope according to claim 9, wherein the second direction is perpendicular to the first direction.

16. a kind of electronic system, comprising:

Micro-electro-mechanical gyroscope, comprising:

Substrate；

Stator sensing structure fixed to the substrate；

First mass block is flexibly coupled to the substrate, and can be mobile relative to the substrate along a first direction；

Second mass block is flexibly coupled to first mass block and the substrate, and can be transverse to described first It is mobile relative to first mass block in the second direction in direction；

Third mass block is flexibly coupled to second mass block, and is not coupled to the substrate, second mass Block is configured such that the third mass block is moved up in the first direction and the second party；And

Sensing structure, is flexibly coupled to the third mass block, and the third mass block is configured such that the sensing knot Structure moves in said first direction；And

Control unit is coupled to the gyroscope.

17. electronic system according to claim 16, wherein the electronic system is laptop, tablet computer, bee Cellular telephone, smart phone, messaging devices, digital music player and it is digital it is magazine at least one.

18. electronic system according to claim 16, wherein the sensing structure is configured as sensing in the first party Upward displacement.

19. electronic system according to claim 16, wherein the second direction is perpendicular to the first direction.

20. electronic system according to claim 16, wherein the sensing structure passes through single elastic element flexibly coupling The third mass block is closed, the third mass block makes it possible to move in said first direction and be limited in described second Movement on direction.

Technical field

This disclosure relates to the micro-electro-mechanical gyroscopes for sensing angular speed, and the method for sensing angular speed.

Background technique

It is well known that applying for MEMS (MEMS) is increasingly extensive in different technologies field, and achieves and make us Inspire as a result, especially in the production of inertial sensor, micro- integrated gyroscope and electromechanical oscillator.

Particularly, there are different types of MEMS gyroscopes, they are not by its complicated electromechanical structure and operation mould Formula is distinguished, but is distinguished in any case based on Coriolis acceleration detection.In such MEMS gyroscope In, mass block is flexibly constrained to substrate or stator, can translate up in mutually perpendicular driving direction and sensing side. By controlling equipment, by mass block in the driven direction to be vibrated at controlled frequency and amplitude.

When gyroscope is rotated along the axis perpendicular to driving direction and detection direction with an angular speed, due in driving side Upward movement, mass block are dominated by Coriolis force and are moved along detection direction.Position of the mass block on sensing direction It moves both speed by angular speed and in the driven direction to determine, and electric signal can be converted into.For example, mass block and substrate It can be capacitively coupled, so that capacitor depends on position of the mass block relative to substrate.Thus mass block is in detection direction Displacement can be detected in the form of the electric signal that amplitude is modulated, and the electric signal of amplitude modulation is proportional to angular speed, carrier wave Vibration frequency in driving mass block.Demodulator use so that obtain modulated signal with obtain instantaneous angular speed become can Energy.

However, in many cases, carrying about the acceleration signals of instantaneous angular rate information also includes not by Ke Liao Benefit accelerates determining spurious components, and thus exists in the form of interference.Such as frequently, since precision limits and produces stream Journey extension, spurious components are likely to be dependent on the fault of construction of micro-mechanical portion.Typically, by being mentioned between mass block and substrate The defects of elastic restraint of confession, drive mass block effective vibration motion may with theoretically desired direction and be misaligned. Such defect generally produces quadrature signal component, due to micro-structure rotation and be added on useful signal.It is practical On, as Coriolis force, it is this it is inconsistent cause mass block not only also to shift up in the driven direction in sensing side, and Capacitance variations are generated between mass block and substrate.

Obviously, consequence is the signal-to-noise ratio of deterioration and reading interface change dynamic, using the signal that will be read as generation Valence, and depending on the degree of defect in degree.

Summary of the invention

One or more embodiments of the invention discloses a kind of micro-electro-mechanical gyroscope and a kind of method for sensing angular speed.

According to one embodiment of present invention, a kind of micro-electro-mechanical gyroscope includes substrate and the stator sensing fixed to substrate Structure.The gyroscope further comprise Elastic Coupling to substrate and can be moved in a first direction relative to substrate first Mass block and Elastic Coupling to the first mass block and can be moved in a second direction relative to the first mass block second Mass block.The gyroscope includes that the third mass block of Elastic Coupling to the second mass block enables to move up in a first direction Dynamic and Elastic Coupling enables to move in a second direction to substrate, and third mass block will be capacitively coupled to stator sense Geodesic structure.

Detailed description of the invention

Present disclosure in order to better understand, now by only by way of non-limiting example mode and refer to following drawings, Some embodiments of the present disclosure are described.In the accompanying drawings:

Fig. 1 is the simplified block diagram according to the micro-electro-mechanical gyroscope of the embodiment of the present disclosure；

Fig. 2 is the simplification top view of a part of the micro-electro-mechanical gyroscope of Fig. 1；

Fig. 3 is the simplification top view according to a part of the micro-electro-mechanical gyroscope of the different embodiments of the disclosure；

Fig. 4 is the simplified block diagram for being incorporated with the electronic system of the micro-electro-mechanical gyroscope according to present disclosure.

Specific embodiment

With reference to Fig. 1, micro-electro-mechanical gyroscope according to an embodiment of the present disclosure is referred to by label 1 comprising substrate 2, micro- knot Structure 3, control equipment 4 and reading equipment 5.As being explained in detail below, micro-structure 3 include movable part and relative to The fixed part of substrate 2.It controls equipment 4 and micro-structure 3 forms control loop, and be configured as keeping the movable of micro-structure 3 Part is vibrated with controlled frequency and amplitude relative to substrate.In order to reach this purpose, control equipment 4 is received from micro- The position signal S of structure 3_PAnd driving signal S is provided to micro-structure 3_D.According to the movement of the moving part of micro-structure 3, read Equipment 5 provides output signal Sout.Angular speed of the output signal Sout instruction substrate 2 relative to gyroscope rotary shaft.

Fig. 2 shows the micro-structure 3 of substrate 2 and more details in accordance with an embodiment of the present disclosure.Particularly, micro-structure 3 includes Drive mass block 7, transducing (transduction) mass block 8 and movable sensing structure 10.

It drives mass block 7 flexibly to be constrained by substrate 2, and can be moved on driving direction D1 relative to substrate 2.Make In, control equipment 4 keeps driving mass block 7 to be vibrated near a resting position on driving direction D1.In order to reach This purpose, control equipment 4 drive the movable driving electrodes 12a of mass block 7 using being fixed to, and fixed to substrate 2 Stator driving electrode 12b.Movable driving electrodes 12a and stator driving electrode 12b comes capacitive coupling and base with comb teeth-shaped configuration Driving direction D1 is parallel on this.Stator driving electrode 12b by electric connection line (being not shown due to simplified) receive come The driving signal S of automatic control control equipment 4_D.Drive signal carrier of the vibration definition of mass block 7 for the transducing chain of gyroscope 1.

Drive mass block 7 to substrate 2 elastic connection by elastic mounting element 11 or " deflection division " (" flexure ") come It obtains, elastic mounting element 11 or " deflection division " are configured such that driving mass block 7 can vibrate simultaneously on driving direction D1 And prevent other movements of driving mass block 7, the especially movement on the transducing direction D2 perpendicular to driving direction D1.At this In and hereinafter, about both driving direction D1 and transducing direction D2 or other any directions, " prevent from moving in one direction It is dynamic " and similar statement should be understood the movement being substantially confined on the direction, and in constraint definition technology and Geometry limits permitted content and is mutually compatible with.Therefore, mentioned statement cannot be understood to it is possible in disabled orientation The presence of spuious movement contradicts, they are likely to be at interference signal relative to carrier wave defined by the vibration for driving mass block Source, but these movements are only ideally by the specific configuration of elastic element and constraint actually rigid in those directions It is prevented.

Transducing mass block 8 is flexibly tied to driving mass block 7, and can be relative to driving mass block in transducing direction It is moved on D2.

Transducing mass block 8 and the elastic connection of driving mass block 7 are obtained by elastic mounting element 13, elastic mounting member Part 13 is configured such that transducing mass block 8 can vibrate on the D2 of transducing direction relative to driving mass block 7 and prevent from changing Other relative movements of energy mass block 8 relative to driving mass block 7, the especially movement on driving direction D1.Conversely, because Drive the pulling action of mass block 7 and constraint that elastic mounting element 13 applies, relative to substrate 2, transducing mass block 8 both can be It can also be moved on driving direction D1 on the D2 of transducing direction.

Movable sensing structure 10 includes the set 16a of bracket 15 and movable sensing electrode, and movable sensing electrode 16a is by bracket 15 support and are parallel to driving direction D1 extension.Bracket 15 is flexibly constrained by transducing mass block 8 and substrate 2.Relative to lining Bottom 2, bracket 15 can move on the D2 of transducing direction；Relative to transducing mass block 8, bracket 15 can move on driving direction D1.

Bracket 15 and the elastic connection of substrate 2 are obtained by elastic mounting element 18, and elastic mounting element 18 is configured For bracket 15 is vibrated on the D2 of transducing direction relative to substrate 2 and prevent bracket 15 relative to substrate 2 other It is mobile, the especially movement on driving direction D1.

Bracket 15 is coupled to transducing mass block 8 by elastic coupling element 20, and elastic coupling element 20 is configured as preventing Relative movement on the D2 of transducing direction between transducing mass block 8 and bracket 15.On the contrary, elastic coupling element 20 makes transducing matter Other relative movements are able to carry out between gauge block 8 and bracket 15.Particularly, allow translational vibration on driving direction D1 and Whirling vibration.Therefore, transducing mass block 8 transmits in a rigid manner in the movement substantially on the D2 of transducing direction, and is driving The rotary motion of translational motion and transducing mass block on dynamic direction is at least partly compensated by elastic coupling element 20.Due to Elastic coupling element 20 allows the displacement between bracket 15 and transducing mass block 8 on driving direction D1, as has been described, branch Frame 15 can be constrained to substrate 2, due to acting on the Coriolis force of transducing mass block 8 thus not having to offset useful translation Component.If the rigid connection only between transducing mass block 8 and movable sensing structure 10, this will be impossible.

Movable sensing structure 10 is capacitively coupled to stator sensing structure 30, and stator sensing structure 30 includes being fixed to substrate 2 And the stator sensing electrode 16b extended on driving direction D1.Particularly, movable sensing electrode 16a and stator sensing electrode 16b is coupled according to " parallel-plate " mechanism and according to position of the sensing structure 10 relative to substrate 2 movable on the D2 of transducing direction To limit the capacitor with capacitor variable.

As mentioned, in use, control equipment 4 keeps driving mass block 7 on driving direction D1 with controlled frequency Rate and amplitude vibrations.Elastic mounting element 13 to drive mass block and transducing mass block 8 only can on the D2 of transducing direction phase To movement, due to the connection of elastic mounting element 13, movement of the transducing mass block 8 by driving mass block 7 on driving direction D1 Middle pulling.When substrate 2 is rotated perpendicular to driving direction D1 to transducing direction D2 around gyroaxis G, transducing mass block 8 is by transducing Coriolis force on the D2 of direction.Thus transducing mass block 8 vibrates on the D2 of transducing direction, and the amplitude of vibration depends on driving side Linear pulling speed on D1, and the angular speed with substrate 2 around gyroaxis G vibrates.The defect of elastic mounting element 11 is led The spuious displacement caused may be added in displacement due to Coriolis force.Component caused by spuious displacement is identical with carrier wave Change in frequency, but relative to 90 ° of Coriolis force item phase shift, this is because the component depends on the position on driving direction D1 Rather than speed.Due to allowing the elastic coupling element 20 of the only relative translation motion on driving direction D1, transducing mass block 8 Total translation on the D2 of transducing direction is delivered to movable sensing structure 10.

However the effect of about harness defects, the especially constraint of the elastic mounting element 11 of connection driving mass block 7 to substrate 2 The effect of defect is transferred to movable sensing structure 10 with the much smaller degree of the contribution than Coriolis force.As a result, due to changing To the contribution of 10 the two of transducing mass block 8 and sensing mass block by driving mass block 7 caused by driving defect on energy direction D2 The elastic mounting element 18 between elastic mounting element 13 and movable sensing structure 10 and substrate 2 between transducing mass block 8, And the elastic coupling element 20 between transducing mass block 8 and bracket 15 is decayed.Particularly, elastic coupling element 20 can also Weaken spuious rotary motion, spuious rotary motion passes to transducing mass block 8 by driving mass block 7, can not be by elastic suspended Set the full remuneration of element 13.On the contrary, the contribution of the Coriolis force generation on the D2 of transducing direction from transducing mass block 8 Promotion is directly obtained, and is transmitted undampedly by elastic coupling element 20, elastic coupling element 20 can produce in the direction d 2 Raw substantially rigid coupling, this contribution are influenced by the movement of elastic mounting element 13 and elastic mounting element 18, and And sensing mass block 10 is then passed in a manner of zero-decrement.Drive the Coriolis force on mass block 7 alternatively elastic 11 complete equipilibrium of suspension members.

Relative to useful contribution is detected to angular speed, the weight of spuious contribution is thus weakened, and correspondingly signal-to-noise ratio obtains Promotion is arrived.

Fig. 3 shows various embodiments of the invention.In this case, in addition to control equipment and reading equipment (are not shown Except out), micro-electro-mechanical gyroscope 100 further includes substrate 102 and micro-structure 103.

Micro-structure 103 include two actuating mass blocks, 106, two 107, two transducing mass blocks 108 of driving mass block with And four movable sensing structures 110, all of which are arranged symmetrically about center anchoring 109.

More specifically, actuating mass block 106 relative to center anchoring 109 be arranged symmetrically and in direction of actuation it is right Together.Actuating mass block 106 is flexibly coupled to substrate 102 for vibrating in fixed direction of actuation.To the company of substrate 102 Elastic element 111 was connected to obtain for being connected to corresponding outer end.By elastic coupling element 112 and bridge 113, two Actuating mass block 106 is further coupled, and is consecutively connected to center anchoring 109.Bridge 113 is by the branch around center anchoring Frame limits and is connected to anchoring with can be relative to two vertical axises in flat out-of-plane vibration.

Actuating mass block 106 is configured with the set 115a of corresponding movable actuation electrode, movable actuation electrode 115a with Comb teeth-shaped configuration is capacitively coupled to fixed to the stator activation electrodes 115b on substrate 2.Equipment (not shown) is controlled to use movably Activation electrodes 115a and stator activation electrodes 115b, to remain actuated mass block 106 relative to direction of actuation with controlled frequency It is vibrated with amplitude and, for example, common phase shift.

Driving mass block 107 is arranged symmetrically and relative to center anchoring 109 in the driving perpendicular to direction of actuation It is aligned on the D1 ' of direction.Driving mass block 107 is flexibly coupled to substrate 102 and actuating mass block 106 in driving direction It is vibrated on D1 '.Particularly, each driving mass block 107 is coupled to two actuating quality by corresponding elastic mounting element 117 Block 106, elastic mounting element 117 are configured as to activate conversion of motion of the mass block 106 in direction of actuation as driving quality Movement of the block 107 on driving direction D1 '.The vibration motion for activating common phase shift of the mass block 106 in direction of actuation causes Drive the vibration motion of corresponding common phase shift of the mass block 107 on driving direction D1 '.

Driving mass block 107 is further coupled to substrate 10 by elastic mounting element 118 and by elastic connection member Part 120 is coupled to bridge 113.Elastic mounting element 118 and elastic coupling element 120 are configured as preventing driving mass block 107 horizontal To in the movement of driving direction D1 '.

Each transducing mass block 108 is flexibly coupled to corresponding in driving mass block 107 by elastic coupling element 121 Drive mass block.Transducing mass block 108 is arranged symmetrically about center anchoring 109.Elastic coupling element 121, which is configured such that, to be changed Energy mass block 108 can relatively move on the transducing direction D2 ' perpendicular to driving direction D1 ' relative to driving mass block 107, And prevent transducing mass block 108 from relatively moving on driving direction D1 ' (in one embodiment relative to driving mass block 107 In, transducing direction D2 ' is parallel to direction of actuation).

Be coupled to each transducing mass block 108 accordingly may be used relative to transducing direction D2 ' on the opposite sides two Dynamic geodesic structure 110.

Each movable sensing structure 110 includes the set 126a of bracket 115 and movable sensing electrode, corresponding bracket 115 Support the set 126a of movable sensing electrode.Bracket 115 is flexibly tied to corresponding transducing mass block 108 and substrate 102, and And it can be moved up on the D2 ' of transducing direction and relative to corresponding transducing mass block 108 in driving direction D1 ' relative to substrate It is dynamic.

The elastic connection of bracket 115 to substrate 102 is obtained by elastic mounting element 128,128 quilt of elastic mounting element It is configured so that bracket 115 can vibrate on the D2 ' of transducing direction relative to substrate 102, and prevents bracket 115 relative to lining Movement of the bottom 102 on driving direction D1 '.

The elastic connection of bracket 115 to corresponding transducing mass block 108 is obtained by elastic mounting element 129, elasticity Suspension members 129 are configured such that transducing mass block 108 can shake on driving direction D1 ' relative to corresponding bracket 115 It is dynamic, and prevent the relative movement between bracket 115 and corresponding transducing mass block 108 on the D2 ' of transducing direction.

Movable sensing structure 110 is capacitively coupled to corresponding stator sensing structure 130, which includes The set 126b of corresponding stator sensing electrode fixed to substrate 102.Particularly, movable sensing electrode 126a and stator sensing Electrode 126b is according to the coupling of parallel-plate mechanism and according to sensing structure 110 movable on the D2 ' of transducing direction relative to substrate 102 position limits the capacitor with capacitor variable.

In the embodiment shown, actuating mass block 106 and driving mass block 107 can be constrained to substrate 102, so that Corresponding out-of-plane rotary motion is allowed to.In practice, the elastic connection member of actuating mass block 106 and driving mass block 107 Part can be configured to realize around be parallel to driving direction D1 ' (for activate mass block 106) or transducing direction D2 ' (for driving Mass block 107) corresponding axis rotation.In this case, actuating mass block 106 and driving mass block 107 can be by capacitor couplings Close the electrode (not shown) being disposed in the corresponding portion of substrate 102.This make it possible provide multiaxis gyroscope, Substrate 102 can also be detected also relative to being parallel to driving direction D1 ' or transducing direction D2 ' (in practice, is parallel to substrate 102 Surface) axis rotation.

Also in this case, transducing mass block 108 and movable sensing structure 110 are separated with driving mass block 107, and And it is coupled to the transmitting for interfering spuious movement (due to caused by about harness defects) to arrive sensing structure.In practice, bracket 115 with Elastic mounting member between elastic mounting element 128 and transducing mass block 108 and corresponding bracket 115 between substrate 102 It is hoped that there will be the results for part 129.

A part of electronic system 200 according to an embodiment of the present disclosure is shown in Fig. 4.System 200 is incorporated to mechanoelectric conversion Device 1, and the laptop or tablet computer, cellular phone, intelligence that may such as have wireless connection capability can be used in Can phone, messaging devices, digital music player, digital camera etc equipment or other be designed as processing, storage, hair In the equipment for sending or receiving information.Particularly, electroacoustic transducing device 1 can be used for executing voice control function, such as in computer Movement activation user interface in or the console or Satellite Navigation Set of video-game in.

Electronic system 200 may include control unit 210, input and output (I/O) equipment 220 (for example, keyboard or display screen), The memory 260 of gyroscope 100, wireless interface 240 and volatibility or nonvolatile type is coupled by bus 250 one It rises.In one embodiment, battery 280 can be used for for the power supply of system 200.It should be noted that the scope of the present disclosure is not It is limited to must have one or all embodiments for listing equipment.

Control unit 210 may include such as one or more microprocessors, microcontroller similar devices.

I/O equipment 220 can be used for generating message.Wireless interface 240 can be used to send a message to have and penetrate in system 200 Frequently the wireless communication system of (RF) signal or receive from the system message.The example of wireless interface may include antenna, nothing Line transceiver, such as dipole antenna, although the scope of the present disclosure is not limited to this.Further, I/O equipment 220 can provide Indicate storage content be by output format for numbers (if having stored digital information) or in the form of analog information (if Stored analog information) voltage.

Difference embodiment described above can be combined to provide further embodiment.It can be retouched in detail according to above State to embodiment make these or other change.In general, in following claims, the term used should not be interpreted Limiting claim is specific embodiment disclosed in the specification and in the claims, and should be interpreted as including it is all can The embodiment of energy is together with claim equivalent full scope claimed.Correspondingly, claim is not limited to this public affairs Open content.