阅读说明：本技术 一种微机电光悬浮旋转微粒子陀螺 (Micro-computer electro-optical suspension rotary microparticle gyroscope ) 是由 吴宇列 肖定邦 吴学忠 李兰 席翔 张勇猛 路阔 于 2019-10-22 设计创作，主要内容包括：本发明公开了一种微机电光悬浮旋转微粒子陀螺,包括自上而下依次间隔设置的上基片、主基片和下基片,上基片下部设有悬浮检测光电传感器；主基片中部开设有安装通孔和位于主基片上的检测光电传感器系统、光波导系统和检测激光源系统,安装通孔内安装有真空腔,下基片上部设有悬浮激光源、显微物镜和1/4波片,1/4波片设置于显微物镜和悬浮激光源之间,显微物镜用于汇聚激光并靠近真空腔一侧设置；悬浮检测光电传感器和悬浮激光源分别位于真空腔的上、下方,真空腔内设有微粒子,微粒子在激光作用下悬浮于真空腔内。本发明具有体积小、精度高的优点。(The invention discloses a micro-electromechanical electro-optical suspension rotary microparticle gyroscope, which comprises an upper substrate, a main substrate and a lower substrate which are sequentially arranged from top to bottom at intervals, wherein a suspension detection photoelectric sensor is arranged at the lower part of the upper substrate; the middle part of the main substrate is provided with a mounting through hole, and a detection photoelectric sensor system, an optical waveguide system and a detection laser source system which are positioned on the main substrate, a vacuum cavity is mounted in the mounting through hole, a suspension laser source, a microscope objective and an 1/4 wave plate are arranged at the upper part of the lower substrate, a 1/4 wave plate is arranged between the microscope objective and the suspension laser source, and the microscope objective is used for converging laser and is arranged close to one side of the vacuum cavity; the suspension detection photoelectric sensor and the suspension laser source are respectively positioned above and below the vacuum cavity, and micro-particles are arranged in the vacuum cavity and are suspended in the vacuum cavity under the action of laser. The invention has the advantages of small volume and high precision.)

1. a kind of sub- gyro of microcomputer electric light suspension rotating particle, it is characterised in that: on successively spaced from top to bottom Substrate (1), main substrate (2) and subtegulum (3), upper substrate (1) lower part are equipped with detection photoelectric sensor (4) that suspends；It is described Installation through-hole (21) and the detection Electro-Optic Sensor System (6) being located on main substrate (2), light wave are offered in the middle part of main substrate (2) Guiding systems (7) and detection laser source systems (8), the installation through-hole (21) is interior to be equipped with vacuum chamber (5), the detection photoelectric transfer Sensor system (6), optical waveguide systems (7) are set to that vacuum chamber (5) is ipsilateral and the optical waveguide systems (7) are located at vacuum chamber (5) Between detection Electro-Optic Sensor System (6), the detection laser source systems (8) are set to vacuum chamber (5) other side；

Subtegulum (3) top is equipped with suspension laser source (12), microcobjective (15) and quarter wave plate (16), the quarter wave plate (16) it is set between microcobjective (15) and suspension laser source (12), the microcobjective (15) is for converging laser and close The setting of vacuum chamber (5) side；

Suspension detection photoelectric sensor (4) and suspension laser source (12) are located at the upper and lower of vacuum chamber (5), described Particulate (13) are equipped in vacuum chamber (5), the particulate (13) is suspended in vacuum chamber (5) under laser action.

2. the sub- gyro of microcomputer electric light suspension rotating particle according to claim 1, it is characterised in that: the microcomputer electric light is outstanding The floating sub- gyro of rotating particle further includes piezoelectric ceramics substrate (9), and piezoelectric ceramics substrate (9) is installed on vacuum chamber (5) and close The setting of vacuum chamber (5) bottom side.

3. the sub- gyro of microcomputer electric light suspension rotating particle according to claim 2, it is characterised in that: the vacuum chamber (5) Including upper cover plate (51), lower master film (53) and side wall (52) for connecting upper cover plate (51) Yu lower master film (53), the piezoelectricity Ceramic substrate (9) is installed on lower master film (53).

4. the sub- gyro of microcomputer electric light suspension rotating particle according to claim 3, it is characterised in that: the vacuum chamber (5) Interior to be equipped with getter (54), the getter (54) is fixed on upper cover plate (51).

5. the sub- gyro of microcomputer electric light suspension rotating particle according to claim 3, it is characterised in that: the microcomputer electric light is outstanding The floating sub- gyro of rotating particle further includes vibrating cantalever beam (11), and the vacuum chamber (5) passes through vibrating cantalever beam (11) and main substrate (2) it connects.

6. the sub- gyro of microcomputer electric light suspension rotating particle according to claim 3, it is characterised in that: the lower master film (53) It is connect by vibrating cantalever beam (11) with main substrate (2).

7. the sub- gyro of microcomputer electric light suspension rotating particle according to any one of claim 1 to 6, it is characterised in that: institute It states subtegulum (3) top and is additionally provided with object lens support unit (14) and wave plate support unit (17), the object lens support unit (14) Support microcobjective (15) and quarter wave plate (16) are respectively used to wave plate support unit (17).

8. the sub- gyro of microcomputer electric light suspension rotating particle according to any one of claim 1 to 6, it is characterised in that: institute Stating detection Electro-Optic Sensor System (6), to include X detect photoelectric sensor to shaft detection photoelectric sensor (61) and Y-direction shaft (62), the optical waveguide systems (7) include X to optical waveguide (71) and Y-direction optical waveguide (72), the detection laser source systems (8) Including X to detection laser source (81) and Y-direction detection laser source (82), the X is located at X to optical waveguide (71) and detects photoelectricity to shaft Between sensor (61) and vacuum chamber (5), the X is oppositely arranged to detection laser source (81) and X to optical waveguide (71), the Y It is located between Y-direction shaft detection photoelectric sensor (62) and vacuum chamber (5) to optical waveguide (72), the Y-direction optical waveguide (72) and Y It is oppositely arranged to optical waveguide (72).

9. the sub- gyro of microcomputer electric light suspension rotating particle according to any one of claim 1 to 6, it is characterised in that: institute It states vacuum chamber (5) to be prepared using glass material, the upper substrate (1), main substrate (2) and subtegulum (3) are all made of siliceous Material is prepared.

Technical field

The present invention relates to gyroscope technology and microelectromechanical processes technology more particularly to a kind of suspension rotation of microcomputer electric light are micro- Particle gyro.

Background technique

Gyroscope is the sensor for measuring the movement of carrier relative inertness Space Rotating, is motion measurement, inertial navigation, guidance The core devices in the fields such as control, it is military in the high-end industrial equipment such as aerospace, intelligent robot, guided munition and precision strike There is very important application value in device.Since Gyro Precision directly determines the performance of these industry and weaponry, because This high accuracy gyroscope is the grand strategy device of relationship National Industrial and military lifeblood, and western countries have carried out this very stringent Embargo measure.

Inertial and satellite navigation is two kinds of most important airmanships, and wherein satellite navigation is state-of-the-art at present leads Boat technology, it can provide in global range without drift, high-precision real-time navigation information, suffer from dual-use field Very extensive application.But satellite navigation signals are generally more faint, under special and complex environment, such as tunnel, thick forest, room Interior, underground, underwater etc., satellite-signal is highly prone to block.Traditional inertial navigation technology has developed comparative maturity, is flying It is widely used on the equipment such as machine, naval vessel, submarine and guided missile.But the high-precision inertial navigation equipment of tradition it is bulky, It is at high cost, and precision is limited, long-time inertial navigation add up error is big.And inertial navigation technology most critical device is exactly high-precision Gyro, therefore modern full autonomous navigation technology has urgent demand to the gyro of high-precision, small size.

Moment gyroscope is difficult to meet the needs of not depending on satellite full autonomous navigation technology.Moment gyroscope can substantially be divided into Lower four seed types: first is that mechanical rotor class gyro, includes mainly liquid floated gyroscope, electrostatic gyroscope, flexible gyroscope etc., this gyro is Search time longest and precision highest gyro, but this gyro difficulty of processing is big, volume is big, at high cost, reliability is poor. Second is that the optical gyroscope based on Sagnac effect, includes mainly laser gyro and optical fibre gyro, this kind of Gyro Precision is higher, nothing Rotatable parts, reliability is preferable, at present using more and more.But optical gyroscope precision is influenced by volume, it is difficult to it minimizes, and The limit of accuracy is difficult to be promoted.Third class is the vibration class gyro based on coriolis force effect, and especially MEMS (MEMS) is shaken Dynamic gyroscope structure is simple, small in size, at low cost, lower using more and more extensive but this kind of Gyro Precision at present, is typically employed in In the navigation of low precision and posture measurement and control area.4th class is atom laser gyroscope, and the basic principle of this kind of gyro is the object based on atom The gyroscopic inertia of matter wave interference and atomic spin.Atom laser gyroscope theoretically has the limit of accuracy of superelevation, but its structure is complicated, body Product is big, is influenced by extraneous factor, manufactures difficulty.Current gyro is not able to satisfy high-tech army in high-precision, small size performance Thing domain requirement.

Summary of the invention

The technical problem to be solved by the present invention is to overcome the deficiencies in the prior art, provide a kind of small in size, with high accuracy micro- The electromechanical sub- gyro of light suspension rotating particle.

In order to solve the above technical problems, the invention adopts the following technical scheme:

A kind of sub- gyro of microcomputer electric light suspension rotating particle, including from top to bottom successively spaced upper substrate, main substrate and Subtegulum, the upper substrate lower part are equipped with the detection photoelectric sensor that suspends；Installation through-hole and position are offered in the middle part of the main substrate In installation in detection Electro-Optic Sensor System, optical waveguide systems and detection laser source systems on main substrate, the installation through-hole There is a vacuum chamber, the detection Electro-Optic Sensor System, optical waveguide systems are set to that vacuum chamber is ipsilateral and the optical waveguide systems position Between vacuum chamber and detection Electro-Optic Sensor System, the detection laser source systems are set to the vacuum chamber other side；Under described Substrate top is equipped with suspension laser source, microcobjective and quarter wave plate, and the quarter wave plate is set to microcobjective and suspension laser Between source, the microcobjective is for converging laser and being arranged close to vacuum chamber side；Suspension detection photoelectric sensor and Suspension laser source is located at the upper and lower of vacuum chamber, is equipped with particulate in the vacuum chamber, the particulate is in laser action Under be suspended in vacuum chamber.

As further improvement to above-mentioned technical proposal:

The sub- gyro of the microcomputer electric light suspension rotating particle further includes piezoelectric ceramics substrate, and piezoelectric ceramics substrate is installed on vacuum chamber Upper and close vacuum chamber bottom side is arranged.

The vacuum chamber includes upper cover plate, lower master film and the side wall for connecting upper cover plate and lower master film, the piezoelectricity pottery Ceramic chip is installed on lower master film.

Getter is equipped in the vacuum chamber, the getter is fixed on upper cover plate.

The sub- gyro of the microcomputer electric light suspension rotating particle further includes vibrating cantalever beam, and the vacuum chamber passes through vibrating cantalever The connection of Liang Yuzhu substrate.

The lower master film is connected by vibrating cantalever Liang Yuzhu substrate.

The subtegulum top is additionally provided with object lens support unit and wave plate support unit, the object lens support unit and wave plate Support unit is respectively used to support microcobjective and quarter wave plate.

The detection Electro-Optic Sensor System, which includes X, detects photoelectric sensor and Y-direction shaft detection photoelectric sensing to shaft Device, the optical waveguide systems include X to optical waveguide and Y-direction optical waveguide, and the detection laser source systems include X to detection laser source Laser source is detected with Y-direction, the X is located at X between shaft detection photoelectric sensor and vacuum chamber to optical waveguide, and the X is to inspection Laser source and X is surveyed to be oppositely arranged to optical waveguide, the Y-direction optical waveguide be located at Y-direction shaft detect photoelectric sensor and vacuum chamber it Between, the Y-direction optical waveguide is oppositely arranged with Y-direction optical waveguide.

The vacuum chamber is prepared using glass material, and the upper substrate, main substrate and subtegulum are all made of siliceous material Material is prepared.

Compared with the prior art, the advantages of the present invention are as follows:

The sub- gyro of a kind of microcomputer electric light suspension rotating particle of the invention is one kind based on MEMS technology technology, in main substrate On obtained and will test laser source systems, optical waveguide systems, vacuum chamber and the detection device portions such as Electro-Optic Sensor System To novel theoretical calculation precision be up to 10^-11°/the high-precision small size gyro of h.The core devices of the gyro are in laser Lower particulate of the stable suspersion in vacuum chamber is acted on, according to the momentum interaction principle of laser, particulate is in microcobjective The light intensity of formation after convergence in equal light field, is not suspended in steadily in vacuum chamber under the action of optical gradient forces, leads at this time Laser becomes circularly polarized laser after crossing quarter wave plate effect, and circularly polarized laser acts on particulate, the rotational momentum hair of laser Changing, so that active force is generated to particulate, so that particulate realizes rotation under the action of circularly polarized laser, due to vacuum Middle smooth aerosols damping is very small, and the particulate of rotation can achieve high revolving speed, reaches as high as 1GHz, generally may be used In 1MHz or more, much higher than the revolving speed (several hundred Hz) of conventional mechanical rotor.It is good fixed to be had according to the object of ultrahigh speed rotation Axis still can keep the rotation axis of itself constant after carrier rotation, and then high-speed rotating particulate just realizes Excellent gyroscopic inertia, his rotation axis do not change.At this time by detecting the spatial attitude of particulate rotation axis Angle can obtain the angle and angular velocity information of motion carrier further according to the gyroscopic inertia of ultrahigh speed rotating particle.

The present invention is suspended in the particulate in vacuum chamber due in no laser action and vacuum chamber bottom interior wall is direct Contact, on microscopic fields, since the scale size of particulate is several hundred nanometers to tens microns, intermolecular Van der Waals at this time Power will become a very important factor, and in the initial time of laser action, Van der Waals force suffered by particulate will be significantly big Trapping stiffness under laser action can reliably suspend to guarantee particulate in an initial condition, so initial to particulate Apply an effect of vibration, the constraint of Van der Waals force can be got rid of, therefore piezoelectric ceramics substrate is installed into vacuum chamber bottom (PZT), the vibration at high speed that vacuum chamber is driven by the vibration at high speed to piezoelectric ceramics substrate, so that the particle in vacuum chamber Son gets rid of the constraint of Van der Waals force in the initial state, is reliably achieved suspension.

Upper substrate lower part of the invention is equipped with the detection photoelectric sensor that suspends, and believes for the sub- position of detection of particles and with frequency Breath, the detection photoelectric sensor that suspends is by receiving from the laser beam by particulate, by dividing laser amplitude phase Analysis compares to obtain the position obtained particulate in the vacuum chamber and frequency information.

In the present invention, when particulate stable suspersion will become circular polarization in vacuum chamber and then addition quarter wave plate, laser State laser.Particulate under the action of the circular polarization state laser in gyro just starts high speed rotation, is swashed using a branch of circular polarization Light light beam forms rotary optical potential well after ligh trap Force system, and particulate is driven to make high speed rotation, to realize in gyro The photic rotation of particulate achievees the purpose that the manipulation of particle angular speed and control in gyro.

Subtegulum of the invention is equipped with suspension laser source, microcobjective and quarter wave plate, and collection suspends and rotation function is one Body can reliably guarantee that the particulate in vacuum realizes high speed even ultrahigh speed rotation after stablizing rotation, for lower base Spacing distance between piece and main substrate needs specific control according to actual needs to realize optimal performance.

When carrier rotates, due to gyroscopic inertia, its rotation axis can be kept not the particulate that ultrahigh speed rotates in carrier Become, the space attitude angle so as to cause rotation axis and carrier can change.Therefore pass through real-time measurement particulate Spatial attitude, and the size for parsing extraneous input angular velocity counter can be pushed away by the variation at the spatial attitude angle of particulate. The spatial attitude of real-time measurement particulate is the key that present invention high-precision, small size gyro.In order to realize particle subspace appearance State angle, angular velocity of rotation size and Orientation measurement, the present invention be respectively equipped on main substrate detection laser source systems and with The corresponding detection Electro-Optic Sensor System of difference.The weak detection laser irradiation launched by detection laser beam is to suspension The particulate that ultrahigh speed rotation is done under state, under the action of rotating particle, phase can occur for the amplitude and frequency of weak detection laser The variation answered is swashed by the weak detection for receiving irradiated particulate in the corresponding detection Electro-Optic Sensor System of main substrate at this time Light is analyzed by amplitude, the frequency to the weak detection laser received, by the amplitude and frequency with initial weak detection laser Rate compares the spatial attitude angle that can obtain particle, and the variation after the spatial attitude angle of particulate counter can push away solution The size of extraneous input angular velocity is precipitated.

In the present invention, in order to guarantee that particulate can be steadily suspended in vacuum chamber by laser, reliable vacuum is needed Environment guarantees that reliable vacuum degree is equipped with getter in vacuum chamber.It is placed on the subtegulum of the lower section of main substrate and integrates at this time Suspension laser source, suspension laser source are placed in the lower section of the vacuum chamber of main substrate, by the work of switch control suspension laser source, It acts on forming the light field that intensity does not wait using high order focusing possessed by the laser through microcobjective, under the action of trapping stiffness By the molecule stable suspersion at the maximum position of light intensity, the particulate in vacuum chamber can be steadily suspended at this time In transparent vacuum chamber.

Detailed description of the invention

Fig. 1 is the principle of the present invention figure.

Fig. 2 is main view of the invention.

Fig. 3 is schematic perspective view of the invention.

Fig. 4 is the main view of upper substrate.

Fig. 5 is the schematic perspective view of upper substrate.

Fig. 6 is the main view of main substrate.

Fig. 7 is the schematic perspective view of main substrate.

Fig. 8 is the schematic perspective view (removing vacuum chamber) of main substrate.

Fig. 9 is the cross-sectional view of vacuum chamber.

Figure 10 is the main view of subtegulum.

Figure 11 is the schematic perspective view of subtegulum.

Figure 12 is partial enlarged view at A in Figure 10.

Each label indicates in figure:

1, upper substrate；2, main substrate；21, installation through-hole；3, subtegulum；4, suspend detection photoelectric sensor；5, vacuum chamber；51, Upper cover plate；52, side wall；53, lower master film；54, getter；6, Electro-Optic Sensor System is detected；61, X detects photoelectric transfer to shaft Sensor；62, Y-direction shaft detects photoelectric sensor；7, optical waveguide systems；71, X is to optical waveguide；72, Y-direction optical waveguide；8, detection swashs Light-source system；81, X to detection laser source；82, Y-direction detects laser source；9, piezoelectric ceramics substrate；11, vibrating cantalever beam；12, it hangs Floating laser source；13, particulate；14, object lens support unit；15, microcobjective；16, quarter wave plate；17, wave plate support unit；18, Laser.

Specific embodiment

To keep the purpose of the present invention, technical solution clearer, following will be combined with the drawings in the embodiments of the present invention, to this Technical solution in invention is clearly and completely described, it will be apparent that embodiment described in invention is A part of the embodiment in the present invention is not whole embodiments of the invention.What is certain is that based on the reality in the present invention Example is applied, as long as those skilled in the art's any other implementation obtained under the premise of not making any creative work Example, ought to all regard a part of the embodiment of the present invention as, should belong in protection scope of the present invention.

As shown in Figure 1, the working principle of the invention, the suspension laser 18 reflected from suspension laser source 12, by aobvious Speck mirror 15 is converged, and the different light field of light intensity is formed in convergent point position, under the action of suspension gradient force, by particulate 13 steadily suspend, and after 13 stable suspersion of particulate, the mode of suspension laser source 12 are changed by addition quarter wave plate 16, is driven Dynamic 13 high speed of particulate even ultrahigh speed rotation, realizes gyroscopic effect, gyro of the invention is compared to traditional MEMS gyro, body Product will be reduced significantly, while can also guarantee precision.

As shown in Fig. 2 to 12, the sub- gyro of a kind of microcomputer electric light suspension rotating particle of the invention, including from top to bottom successively Spaced upper substrate 1, main substrate 2 and subtegulum 3, upper 1 lower part of substrate are equipped with the detection photoelectric sensor 4 that suspends；Main substrate 2 Middle part offers installation through-hole 21 and detection Electro-Optic Sensor System 6, optical waveguide systems 7 and detection on main substrate 2 swash Light-source system 8, vacuum chamber 5 is equipped in installation through-hole 21, and detection Electro-Optic Sensor System 6, optical waveguide systems 7 are set to vacuum Chamber 5 is ipsilateral and optical waveguide systems 7 are located between vacuum chamber 5 and detection Electro-Optic Sensor System 6, and detection laser source systems 8 are arranged In 5 other side of vacuum chamber；3 top of subtegulum is equipped with suspension laser source 12, microcobjective 15 and quarter wave plate 16, and quarter wave plate 16 is set It is placed between microcobjective 15 and suspension laser source 12, microcobjective 15 is for converging laser and being arranged close to 5 side of vacuum chamber； Suspension detection photoelectric sensor 4 and suspension laser source 12 are located at the upper and lower of vacuum chamber 5, are equipped with particulate in vacuum chamber 5 13, particulate 13 is suspended in vacuum chamber 5 under the effect of laser 18.

Core apparatus of the present invention is ultrahigh speed rotating particle 13 with gyroscopic inertia, and structure devices are few, therefore is had There is the precision of superelevation, but also there is the requirement for meeting small size, there is very wide application prospect and huge market price Value.Upper substrate 1, main substrate 2 and subtegulum 3 are three parts to interact again independently of one another, wherein upper substrate 1 and subtegulum The transmitting and detection of 3 high-power suspension laser 18 outside realization face respectively.The laser emitted from suspension laser source 12 18 act on forming the inconsistent light intensity of light intensity by the convergence of microcobjective 15, focus ligh trap are formed outside face, thus to particle Son 13 generates the effect of optical gradient forces, and particulate 13 is steadily suspended in the maximum point of light intensity, under the action of optical gradient forces The realization of particulate 13 steadily suspends.Quarter wave plate 16 is mainly used for changing the suspension emitted from suspension laser source 12 The mode of laser 18, effect after 13 stable suspersion of particulate through quarter wave plate 16 are realized the high speed of particulate 13 or even are surpassed High speed rotation.The suspension detection photoelectric sensor 4 integrated on upper substrate 1 is placed in the surface of vacuum chamber 5, is irradiated to by detection The amplitude and phase information of the suspension laser 18 of particulate 13, by the processing and analysis of information, available rotating particle 13 position and frequency information.

The sub- gyro of microcomputer electric light suspension rotating particle further includes piezoelectric ceramics substrate 9, and piezoelectric ceramics substrate 9 is installed on vacuum It is arranged on chamber 5 and close to 5 bottom side of vacuum chamber.Piezoelectric ceramics substrate 9 is micro- under suspension initial time microstate for overcoming Van der Waals force between particle 13 and vacuum chamber 5 is to the effect of contraction of particulate 13, by vibration piezoelectric ceramics substrate 9 to vacuum Chamber 5 realizes a high-frequency vibration, makes particulate 13 overcome the constraint of Van der Waals force by high-frequency vibration.

As shown in figure 9, vacuum chamber 5 is including upper cover plate 51, lower master film 53 and for connecting upper cover plate 51 and lower master film 53 Side wall 52, piezoelectric ceramics substrate 9 are installed on lower master film 53.Vacuum chamber 5 is in order to guarantee to be the micro- of ultrahigh speed rotation inside gyro Particle 13 can move in stable position and 13 motion profile of particulate is avoided to be difficult to the phenomenon that capturing.

In the present embodiment, vacuum chamber 5 is prepared using glass material, and particulate 13 is placed in a transparent vacuum chamber 5 In, upper cover plate 51 is closely linked by vacuum cement and four pieces of side walls 52, is formed and is closed, thoroughly by lower master film 53 Furthermore suspension transparent vacuum chamber 5 also may be implemented by other microelectromechanical processes such as MEMS etching, oxidations in bright vacuum chamber 5.

Getter 54 is equipped in vacuum chamber 5, getter 54 is fixed on upper cover plate 51, and getter 54 is wanted for reaching target The vacuum environment asked can realize vacuum environment by the effect of getter 54 after vacuum chamber 5 seals.

In other embodiments, experimental condition and it can require the production method of vacuum chamber 5 and process that can carry out It is correspondingly improved, the addition of particulate 13 should be paid attention to during making vacuum chamber 5, pays attention to that vacuum chamber 5 cannot be polluted, avoids The interference moved to particulate 13 is caused, the precision and performance of gyro are influenced.

In the present embodiment, upper substrate 1, main substrate 2 and subtegulum 3 are all made of siliceous material and are prepared.

Gyro of the invention is by micro-electromechanical technology, using plane plus three-dimensional composite manufacturing technology, in substrates such as silicon, glass On process the devices such as electronics, machinery and optics, to produce the subtegulum 3 of gyro, main substrate 2 and upper substrate 1 and integrated Part on each substrate, by the coordinate operation of three substrates to realize whipping top function, integrated level is high, precision is high.

The sub- gyro of microcomputer electric light suspension rotating particle further includes vibrating cantalever beam 11, and vacuum chamber 5 passes through vibrating cantalever beam 11 It is connect with main substrate 2.In the present embodiment, it is all made of the connection of vibrating cantalever beam 11 realization and main substrate 2 in 5 two sides of vacuum chamber, Vibrating cantalever beam 11 have good fatigue properties, it is ensured that vacuum chamber 5 is in piezoelectric ceramics substrate 9(PZT) drive under do Being reliably connected between main substrate 2 when high-frequency vibration, and do not interfere with and integrate mechanical, optics device on main substrate 2 The performance of part.

In the present embodiment, lower master film 53 is connect by vibrating cantalever beam 11 with main substrate 2.

In the present embodiment, piezoelectric ceramics substrate 9 is reliably integrated on the lower master film 53 of vacuum chamber 5, passes through piezoelectric ceramics base Piece 9(PZT) high-frequency vibration drive vacuum chamber 5 lower master film 53 vibrate.

3 top of subtegulum is additionally provided with object lens support unit 14 and wave plate support unit 17, object lens support unit 14 and wave plate Support unit 17 is respectively used to support microcobjective 15 and quarter wave plate 16.

It detects Electro-Optic Sensor System 6 and detects photoelectric sensor 61 and Y-direction shaft detection photoelectric sensor to shaft including X 62, optical waveguide systems 7 include X to optical waveguide 71 and Y-direction optical waveguide 72, and detecting laser source systems 8 includes X to detection laser source 81 Laser source 82 is detected with Y-direction, X is located at X between shaft detection photoelectric sensor 61 and vacuum chamber 5 to optical waveguide 71, and X is to detection Laser source 81 and X are oppositely arranged to optical waveguide 71, and Y-direction optical waveguide 72 is located at Y-direction shaft detection photoelectric sensor 62 and vacuum chamber 5 Between, Y-direction optical waveguide 72 is oppositely arranged with Y-direction optical waveguide 72.X is to vertical with Y-direction, and X is to detection laser source 81 and X to optical waveguide 71 are oppositely arranged about vacuum chamber 5, i.e. vacuum chamber 5 is located at X to detection laser source 81 and X between optical waveguide 71, Y-direction optical waveguide 72 are oppositely arranged with Y-direction optical waveguide 72 about vacuum chamber 5, i.e., vacuum chamber 5 is between Y-direction optical waveguide 72 and Y-direction optical waveguide 72.

X detects detection laser irradiation particulate 13 of the laser source 82 from both direction to detection laser source 81 and Y-direction, realizes Measurement to its spatial attitude detects anti-raw reflection after laser irradiation high speed rotation particulate 13, and frequency and amplitude can occur Variation is reinforced to optical waveguide 71 and Y-direction optical waveguide 72 to reflection detection laser using X at this time, then respectively by X to detection Laser source 81 and Y-direction detection laser source 82 acquire, and can determine that high speed rotation particulate 13 rotates by signal analysis and processing The spatial attitude angle of axis.When carrier rotation, according to detection Electro-Optic Sensor System 6, optical waveguide systems 7 and detection laser source The implementation angular speed and angle information of the available carrier in spatial attitude angle for rotating particle 13 that system 8 obtains, thus real Existing whipping top function.

In the present embodiment, laser can be used (from X to detection simultaneously three directions of x, y, z of transparent vacuum chamber 5 Laser source 81, Y-direction detect laser source 82, suspension laser source 12) irradiation, operating control to 13 real-time perfoming of particulate therein will The motion profile of aerosols 13 constrains in inside vacuum chamber 5, avoids the uncertainty of 13 motion profile of particulate, reaches Preferably implement the purpose of control to it.

Although the present invention has been disclosed as a preferred embodiment, however, it is not intended to limit the invention.It is any to be familiar with ability The technical staff in domain, without deviating from the scope of the technical scheme of the present invention, all using the technology contents pair of the disclosure above Technical solution of the present invention makes many possible changes and modifications or equivalent example modified to equivalent change.Therefore, all Without departing from the content of technical solution of the present invention, according to the present invention technical spirit any simple modification made to the above embodiment, Equivalent variations and modification, all shall fall within the protection scope of the technical scheme of the invention.