阅读说明：本技术 焦距可变透镜装置及焦距可变透镜控制方法 (Focal length variable lens device and focal length variable lens control method ) 是由 酒井裕志 渡边裕 张玉武 于 2019-05-17 设计创作，主要内容包括：焦距可变透镜装置具有：透镜系统,折射率根据被输入的驱动信号而变化；物镜,配置在与透镜系统相同的光轴上；图像检测部,经由透镜系统及物镜对测量对象物的图像进行检测；共振锁定控制部,使驱动信号追随于透镜系统的共振频率；以及共振锁定延迟控制部,将基于共振锁定控制部的驱动信号(Cf)的变化量(dCi)的频率变化阶段化为预先设定的每个基准值(dCe)的n次变化而使其延迟。(Focal length variable lens device includes lens system, and refractive index changes according to the driving signal being entered；Object lens configure on optical axis identical with lens system；The image of measurement object object detects via lens system and object lens in image detection portion；Resonance locking control unit, makes driving signal follow the resonant frequency of lens system；And the locking delayed control unit of resonance, the n times that the frequency changes phase of the variable quantity (dCi) of the driving signal (Cf) based on resonance locking control unit turns to preset each a reference value (dCe) are changed and make its delay.)

1. a kind of focal length variable lens device comprising:

Lens system, refractive index change according to the driving signal being entered；Object lens are configured identical with aforesaid lens system On optical axis；The image of measurement object object detects via aforesaid lens system and aforementioned object lens in image detection portion；Resonance lock Determine control unit, aforementioned driving signal is made to follow the resonant frequency of aforesaid lens system；And the locking delayed control unit of resonance, make The frequency varying delay of aforementioned driving signal based on aforementioned resonance locking control unit.

2. focal length variable lens device as described in claim 1, which is characterized in that

The aforementioned locking delayed control unit of resonance has been set in advance defined a reference value, is reaching based on aforementioned resonance locking control Before the frequency variation of the aforementioned driving signal in portion, multiple frequencies of aforementioned each a reference value are changed with specific time interval Successively execute.

3. focal length variable lens device as claimed in claim 1 or 2, which is characterized in that

The aforementioned locking delayed control unit of resonance has been set in advance defined division number, will lock control unit based on aforementioned resonance Aforementioned driving signal frequency variation divided with aforementioned division number, by the multiple of each frequency variation marked off Frequency variation is successively executed with specific time interval.

4. a kind of focal length variable lens control method, which is characterized in that

Using changed with refractive index according to the driving signal being entered lens system, configuration with aforesaid lens system phase With optical axis on object lens, examine via the image that aforesaid lens system and aforementioned object lens detect the image of measurement object object The focal length that the resonance of survey portion and the resonant frequency for making aforementioned driving signal follow aforesaid lens system locks control unit is variable Lens devices；

When carrying out the frequency variation of the aforementioned driving signal based on aforementioned resonance locking control unit, the change of multiple stages is carried out Change.

Technical field

The present invention relates to focal length variable lens (lens) device and focal length variable lens control methods.

Background technique

As focal length variable lens device, such as develop using in (the U.S. Patent Application Publication No. 2010/ of document 1 No. 0177376 specification) in record principle liquid lens system (hereinafter referred to as lens system) device.

The cylindric vibration component formed by piezoelectric material is impregnated into transparent liquid and is formed by lens system.In In lens system, if the inner peripheral surface and outer peripheral surface to vibration component apply alternating voltage, vibration component is in a thickness direction It is flexible, make the liquid vibration of the inside of vibration component.By according to the eigentone of liquid to apply alive frequency into Row adjustment, in a liquid formed concentric circles standing wave, formed centered on the central axis of vibration component and refractive index is different Concentric circles region.Therefore, in lens system, if passing through light along the central axis of vibration component, the light It advances according to the refractive index of each region of concentric circles along the path of diverging or pack.

Focal length variable lens device is by lens system above-mentioned and object lens (such as the common convex lens for being used to link focus Or lens group) be configured on identical optical axis and constitute.

If making directional light to common objective lens entrance, focus knot is being in defined focal length by the light after passing through lens Focal position.In contrast, the light is by lens system if keeping directional light incident to the lens system with object lens arranged coaxial System diverging or pack, light after object lens by focus knot with original (the not state of lens system) focal position phase Than to position that is remote or closely deviating.

Thus, in focal length variable lens device, (make internal liquid by applying the driving signal inputted to lens system Body generates the alternating voltage of the frequency of standing wave), increase and decrease the amplitude of the driving signal, can will be used as focal length variable lens device Focal position in a certain range (on the basis of the focal length of object lens, can by lens system increase and decrease defined variation width Degree) arbitrarily control.

In focal length variable lens device, as the driving signal inputted to lens system, such as using sinuous AC signal.If being entered such driving signal, the focal length (focal position) of focal length variable lens device is with sine wave Shape variation.At this point, the light across lens system is not refracted, focal length variable lens device when the amplitude of driving signal is 0 Focal length is the focal length of object lens.When the amplitude of driving signal is in positive and negative peak value, the light across lens system is maximally rolled over It penetrates, the focal length of focal length variable lens device becomes the maximum state of focal length variations from object lens.

When obtaining image using such focal length variable lens device, with the Phase synchronization of the sine wave of driving signal and Luminous signal is exported, pulsing light is carried out.As a result, by the shape for being in focal length specified in the focal length changed with sinusoidal wave shape Pulsing light, the image of object of the detection in the focal length are carried out under state.If carrying out arteries and veins in a period with multiple phases Punching illumination, it is corresponding with each phase and carry out image detection, then the image of multiple focal lengths can also be obtained simultaneously.

In focal length variable lens device above-mentioned, the influence by outside air temperature or the fever along with operation etc., thoroughly The liquid of the inside of mirror system and the temperature change of vibration component.Also, due to temperature change, eigentone changes, energy The frequency (resonant frequency) for obtaining the AC signal of standing wave also changes.If the driving signal inputted to lens system is and variation Preceding identical original state, then driving signal deviates from the peak value of resonant frequency, cannot efficiently obtain standing wave.

Using make driving signal for such resonant frequency variation automatic following resonance lock function.For example, false If the driving signal of assigned frequency is inputted to lens system, the strength grade of standing wave is maximum.Here, when under the grade of standing wave When drop, it is determined as that the frequency of driving signal deviates from the peak value for the resonance that can obtain standing wave by lens system, makes driving signal Frequency increases and decreases and captures new peak position.If the frequency of driving signal reaches new peak position, the grade of standing wave Maximum intensity can be reverted to.By continuously carrying out such follow up action for peak position, can be realized to can obtain To the automatic following (resonance locking) of the resonant frequency of standing wave.

In the focal length variable lens device above-mentioned, by for driving signal carry out to the frequency that can obtain standing wave from It is dynamic to follow (resonance locking), efficient standing wave can be obtained always.The automatic following of such frequency passes through to from lens system The resonant frequency that system returns is monitored with specified period, resets to the frequency of driving signal during it according to each It carries out.

But in the focal length variable lens device with resonance locking, if be for example based in image measurement movement The frequency locked that resonates changes greatly, then can temporarily obtain the time point variation of identical focal length, have the image essence that can be obtained The problem of degree decline.In addition, if the image in user's visual image measurement movement, then have the images such as the flickering on picture to become The problem of unstable situation, there are also the declines of observation property.

Summary of the invention

Standing wave can be efficiently generated the object of the present invention is to provide one kind and can obtain high-precision and stable figure The focal length variable lens device and focal length variable lens control method of picture.

Focal length variable lens device of the invention is characterized in that, comprising: lens system, refractive index is according to the drive being entered It moves signal and changes；Object lens configure on optical axis identical with aforesaid lens system；Image detection portion, via aforesaid lens system System and aforementioned object lens detect the image of measurement object object；Resonance locking control unit, before following aforementioned driving signal State the resonant frequency of lens system；And the locking delayed control unit of resonance, make the aforementioned drive based on aforementioned resonance locking control unit The frequency varying delay of dynamic signal.

In the present invention, as the locking delayed control unit that resonates, can use makes the driving based on resonance locking control unit The frequency varying delay of signal, i.e., make to change since frequency the mechanism slack-off to the time of completion.Specifically, can be with Change it periodically with small time interval using the frequency variation of resonance locking is divided into multiple variable quantities Mechanism etc..The frequency variation that resonance can also be made to lock spends the stipulated time and continuously changes.

In the present invention, control unit is locked as resonance, can use the mechanism for executing existing resonance lock out action.

In the present invention, control unit, the peak of the current resonant frequency of driving signal duplet lens system are locked by resonance Value carries out automatic following, can efficiently generate standing wave.

Execute resonate lock out action when, by by the locking delayed control unit of resonating make based on resonance locking control unit from Dynamic follow postpones to the follow up action of resonant frequency, becomes flat the frequency of driving signal.As a result, even if being based on In the case that the frequency of resonance locking changes greatly, the frequency variation being actually executed also becomes gentle, can prevent in frequency The time point that the image that occurs in the case where changing greatly obtains is irregular and the flickering of picture etc., can obtain high-precision figure Picture.

In focal length variable lens device of the invention, it is preferred that the aforementioned locking delayed control unit of resonance is set in advance Determine defined a reference value, before the frequency variation for reaching the aforementioned driving signal based on aforementioned resonance locking control unit, Multiple frequencies of aforementioned each a reference value are changed and are successively executed with specific time interval.

In the present invention, even if in the case where the frequency of the driving signal based on resonance locking control unit changes greatly, The frequency variation for the driving signal being actually executed is also as the interim variation of each a reference value.Thus, as long as by benchmark Value according to the time point that can prevent image from obtaining is irregular and the range of the flickering of picture etc. in variable quantity set, energy Enough be reliably prevented the acquirement of these images time point is irregular and the flickering of picture etc..

In focal length variable lens device of the invention, it is preferred that the aforementioned locking delayed control unit of resonance is set in advance Defined division number is determined, the frequency of the aforementioned driving signal based on aforementioned resonance locking control unit has been changed with aforementioned division Number is divided, and multiple frequencies of each frequency variation marked off are changed and are successively executed with specific time interval.

In the present invention, even if in the case where the frequency of the driving signal based on resonance locking control unit changes greatly, The frequency variation for the driving signal being actually executed also becomes the interim variation for dividing sub-quantity, respectively variable quantity when variation Become lesser value compared with the variation of the frequency of original driving signal is whole.Thus, it is possible to be reliably prevented image acquirement Time point is irregular and the flickering of picture etc..

In turn, due to passing through preset division number, the number of the interim variation of each specific time interval It is limited, so even if can also prevent completion in the whole biggish situation of variable quantity of the frequency variation of driving signal Until time it is elongated.

Focal length variable lens control method of the invention is characterized in that, using with refractive index according to the driving being entered Signal and change lens system, object lens of the configuration on optical axis identical with aforesaid lens system, via aforesaid lens system And aforementioned object lens image detection portion that the image of measurement object object is detected and to follow aforementioned driving signal aforementioned The focal length variable lens device of the resonance locking control unit of the resonant frequency of lens system；It is carrying out based on aforementioned resonance locking control When the frequency variation of the aforementioned driving signal in portion processed, the variation of multiple stages is carried out.

In the present invention, when based on the resonance lock out action of resonance locking control unit, by carrying out multiple stages Variation can make the frequency varying delay of the driving signal based on resonance locking control unit, can obtain in the present invention above-mentioned Focal length variable lens device in the such effect of explanation.

In accordance with the invention it is possible to which standing wave can efficiently be generated and can obtain high-precision and stablize by providing one kind Image focal length variable lens device and focal length variable lens control method.

Detailed description of the invention

Fig. 1 is the schematic diagram for indicating one embodiment of the present invention.

Fig. 2 is the schematic diagram for indicating the structure of lens system of aforementioned embodiments.

Fig. 3 (A)~(C) is the schematic diagram for indicating the vibrational state of lens system of aforementioned embodiments.

Fig. 4 (A)~(E) is the schematic diagram for indicating the focal length of lens system of aforementioned embodiments.

Fig. 5 is the block figure for the major part for indicating aforementioned embodiments.

Fig. 6 is the curve graph for indicating the variation of resonant frequency of aforementioned embodiments.

Fig. 7 is the curve graph for indicating the resonance lock function of aforementioned embodiments.

Fig. 8 is the flow chart for indicating the resonance lock out action of aforementioned embodiments.

Fig. 9 is the curve graph of the variation detection of the resonant frequency in the resonance lock out action for indicate aforementioned embodiments.

Figure 10 is the curve graph for indicating the frequency of the resonance locking control unit of aforementioned embodiments and following.

Figure 11 is the staged curve graph based on the locking delayed control unit that resonates for indicating aforementioned embodiments.

Figure 12 is the curve graph for indicating the driving signal based on resonance lock out action of aforementioned embodiments.

Figure 13 is the flow chart for indicating the resonance lock out action of other embodiments of the invention.

Figure 14 is the staged curve graph based on the locking delayed control unit that resonates for indicating aforementioned other embodiments.

Specific embodiment

Hereinafter, being based on Detailed description of the invention one embodiment of the present invention.

(focal length variable lens device 1)

In Fig. 1, focal length variable lens device 1 while changing focal length in order to detect the surface of measurement object object 9 Image has object lens 2, lens system 3 and the image detection portion 4 configured on optical axis A identical with the surface crosswise.

In turn, focal length variable lens device 1 has the pulsing light portion that pulsing light is carried out to the surface of measurement object object 9 5, the movement in duplet lens system 3 and pulsing light portion 5 is controlled lens control unit 6 and be used to lens control unit 6 into The control PC7 of row operation.

Control is made of with PC7 existing personal computer, by executing defined control software, realizes desired function Energy.It is used in PC7 in control, also includes the function that image is taken into and is handled from image detection portion 4.

Object lens 2 are made of existing convex lens.

Image detection portion 4 is by existing CCD (Charge Coupled Device, charge-coupled device) imaging sensor Or camera of other forms etc. is constituted, it can be using incident image Lg as the detection image Im of defined signal form to control System is exported with PC7.

Pulsing light portion 5 is made of light-emitting components such as LED (Light Emitting Diode, light emitting diode), works as quilt When having input luminous signal Ci from lens control unit 6, so that illumination light Li is shone the stipulated time, be able to carry out for measurement object object The pulsing light on 9 surface.Illumination light Li is measured the surface reflection of object 9, the reflection on the surface from measurement object object 9 Light Lr forms image Lg by object lens 2 and lens system 3.

Lens system 3 is corresponding with the driving signal Cf inputted from lens control unit 6 and variations in refractive index.Driving signal Cf is So that lens system 3 is generated the exchange of the frequency of standing wave, is sinuous AC signal.

In focal length variable lens device 1, by based on the focal length of object lens 2, become the refractive index of lens system 3 Change, the focal length Df to focal position Pf can be made arbitrarily to change.

(lens system 3)

In Fig. 2, lens system 3 has columnar shell 31, is internally provided with cylindric vibration in shell 31 Component 32.Vibration component 32 is by liner 39 of the elastic system being installed between its outer peripheral surface 33 and the inner peripheral surface of shell 31 It holds.

Vibration component 32 is that piezoelectric material is formed as to cylindric structure, by between outer peripheral surface 33 and inner peripheral surface 34 It is applied the alternating voltage of driving signal Cf, to vibrate in a thickness direction.

In the inside of shell 31, be filled with the higher liquid 35 of permeability makes mass-impregnation exist for vibration component 32 In liquid 35, the inside of cylindric vibration component 32 is full of by liquid 35.The alternating voltage of driving signal Cf is adjusted to make The liquid 35 of inside in vibration component 32 generates the frequency of standing wave.

As shown in figure 3, if vibrating vibration component 32, being stayed in internal liquid 35 in lens system 3 The region (referring to the portion (A) Fig. 3 and the portion Fig. 3 (B)) for the concentric circles that refractive index alternately changes occurs for wave.

At this point, the relationship of the refractive index of the distance (radius) and liquid 35 away from central axis of lens system 3 becomes Fig. 3 (C) index distribution W shown in portion is such.

In Fig. 4, since driving signal Cf is sinuous AC signal, so the liquid 35 in lens system 3 The amplitude of fluctuation of index distribution W changes also with it.Also, the refraction in the region of the concentric circles occurred in liquid 35 Rate is changed with sinusoidal wave shape, and the focal length Df for arriving focal position Pf as a result, is changed with sinusoidal wave shape.

In the state of Fig. 4 (A), the amplitude of index distribution W becomes maximum, lens system 3 make across light pack, it is burnt Point position Pf is closer, and focal length Df becomes most short.

In the state of Fig. 4 (B), index distribution W becomes flat, and lens system 3 makes to pass through as former state across light, focus position Setting Pf and focal length Df becomes the value of standard.

In the state of Fig. 4 (C), index distribution W becomes to be made with Fig. 4 (A) reversed polarity and amplitude maximum, lens system 3 The light diffusion passed through, farther out, focal length Df becomes maximum to focal position Pf.

In the state of Fig. 4 (D), index distribution W becomes flat again, lens system 3 make across light as former state pass through, Focal position Pf and focal length Df becomes the value of standard.

In the state of Fig. 4 (E), the state of Fig. 4 (A) is turned again to, same variation is repeated below.

In this way, driving signal Cf is sinuous AC signal, focal position Pf in focal length variable lens device 1 And focal length Df is also changed as the focus of Fig. 4 changes waveform Mf with sinusoidal wave shape.

At this point, if focus change waveform Mf arbitrary time point in focal position Pf measurement object object 9 into Row pulsing light detects the focus in focal length Df that can then obtain arbitrarily illuminating time point in time point image to be illuminated The image of position Pf.

(lens control unit 6)

Fig. 1 is returned to, in focal length variable lens device 1, passes through driving signal Cf, luminous letter from lens control unit 6 Number Ci and image sensing signal Cc, the vibration of duplet lens system 3, pulsing light portion 5 shine and the inspection of the image in image detection portion 4 Survey is controlled.In order to which the setting etc. to the lens control unit 6 for controlling these operates, it is connected to control and uses PC7.

In Fig. 5, lens control unit 6 has the drive control part 61 to 3 output drive signal Cf of lens system, to pulse Illumination portion 5 exports the light emitting control 62 of luminous signal Ci and exports the image inspection of image sensing signal Cc to image detection portion 4 Survey control unit 63.

Drive control part 61 has resonance locking control unit 611 and the locking delayed control unit 612 of resonance.

Resonance locking control unit 611 is when lens system 3 is vibrated based on the driving signal Cf being entered, according to being applied to Active power or driving current in lens system 3 detect the vibrational state Vf of lens system 3.Also, by referring to lens system The vibrational state Vf of system 3 is adjusted the frequency of driving signal Cf, can be locked as the current resonance frequency of lens system 3 Rate.In addition, vibrational state Vf can also be detected with the vibrating sensor being arranged in lens system 3.

In fig. 6, it is supposed that the vibration characteristics of lens system 3 is S1, then driving signal Cf is set to vibration characteristics S1's Peak value.If there is no temperature change etc. in lens system 3, by the vibration for the lens system 3 that resonance locking control unit 611 detects Dynamic characteristic indicates the peak position frequency of vibration characteristics S1 identical with driving signal Cf.

Here, suppose that the vibration characteristics variation for passing through the lens systems such as temperature change 3 is S2.

From the vibration characteristics of lens system 3 that resonance locking control unit 611 detects to the peak shifts of vibration characteristics S2, with Driving signal Cf deviation.In the case where having input driving signal Cf to the lens system 3 as vibration characteristics S2, driving signal The frequency of Cf is not peak position in vibration characteristics S2, cannot assign sufficient active power to lens system 3, under efficiency Drop.

In Fig. 7, resonance locking control unit 611 detects the vibrational state Vf that detects from lens system 3 and from drive control Portion 61 is input to the deviation of the driving signal Cf in lens system 3, retrieves the current peak position of lens system 3 and captures Afterwards, the frequency of the driving signal Cf exported from drive control part 61 is changed to current peak position.

As a result, the frequency of the driving signal Cf inputted from drive control part 61 to lens system 3 is matched with current lens Thus the peak value of resonant frequency under the vibration characteristics S2 of system 3 carries out the automatic following of frequency.

Fig. 5 is returned to, in drive control part 61, from the resonance driving signal Cf that controls of locking control unit 611 by saturating Before mirror system 3 exports, implement the delay disposal of the frequency variation based on the locking delayed control unit 612 that resonates.

Resonate locking delayed control unit 612 for by resonance locking 611 automatic following of control unit driving signal Cf frequency Rate variation carries out the lesser stage by changing the variation for the smaller stage of variable quantity with tiny time interval Variation, to make the frequency varying delay of driving signal Cf.

About the staged delay disposal based on the locking delayed control unit 612 that resonates, in action specification below in detail Thin narration.

(control PC7)

Control has lens operation portion 71 for set etc. to lens control unit 6 operation with PC7, from image detection Portion 4 will test image Im and be taken into and the image processing part 72 that handles and accept user for the behaviour of focal length variable lens device 1 The operation interface 73 of work.

Lens operation portion 71 has resonance lock operation portion 711.Resonance lock operation portion 711 can select locking to stop mould Formula and locking are after Discontinuous Conduction mode.These each modes can be switched by user using operation interface 73.

Resonance lock operation portion 711 is set as locking after Discontinuous Conduction mode, becomes effectively to resonate and lock control unit 611, carries out The automatic following to resonant frequency based on resonance locking control unit 611.

On the other hand, by being set as locking stop mode, resonance locking control unit 611 is invalidated, no longer carries out to altogether The automatic following of vibration frequency.In this case, it is able to carry out the acquirement of the high precision image under certain resonant frequency.

(resonance lock out action)

Then, the resonance lock out action of present embodiment is illustrated referring to Fig. 8 to Figure 12.

In the present embodiment, the vibrational state Vf of 61 one side duplet lens system 3 of drive control part of lens control unit 6 into Row detection, is on one side driven lens system 3 by driving signal Cf.Also, continued by being set as locking in lens operation portion 71 Mode carries out resonance lock out action in drive control part 61.

In resonance lock out action, according to the rules period, resonance locking control unit 611 is referring to vibrational state Vf, to follow Change the frequency of driving signal Cf in the mode of resonant frequency.At this point, for having changed frequency by resonance locking control unit 611 Driving signal Cf afterwards carries out the delay disposal of the frequency variation based on the locking delayed control unit 612 that resonates.

Specifically, (time point t1, t2, t3 ... of Fig. 9) carries out the processing of Fig. 8 during according to the rules.

In fig. 8, resonance locking control unit 611 detects its variable quantity dVi (processing S11), makes to drive referring to vibrational state Vf Dynamic signal Cf follows (processing S12).

In Fig. 9, at vibrational state Vf, can each time point t1, t2, t3 ... detect from the variable quantity dV1 of preceding time point, dV2,dV3….Wherein, variable quantity dV1, dV6~dV8 is smaller value, but the biggish time point t2 of slope of vibrational state Vf Variable quantity dV2~dV5 of~t5 becomes bigger value.

In Figure 10, the variable quantity dV1 of the driving signal Cf of automatic following and the vibrational state Vf under each time point t1~t8 ~dV8 is corresponding, is set as the interim signal as variable quantity dC1~dC8 in each time point t1~t8.According to vibrational state Vf Slope, in driving signal Cf, variable quantity dC2~dC5 under time point t2~t5 becomes bigger value.

Fig. 8 is returned to, the driving signal Cf's then based on resonance locking control unit 611 follows (processing S12), is locked by resonance Surely the variable quantity dCi for postponing the driving signal Cf that 612 pairs of control unit resonance locking control units 611 are set is detected (processing S13)。

The locking delayed control unit 612 that resonates is based on preset a reference value dCe, determines that resonance locking control unit 611 is set Fixed variable quantity dCi (dCi≤dCe) equal or smaller with a reference value dCe (processing S14).

When variable quantity dCi is equal or smaller with a reference value dCe, the locking delayed control unit 612 that resonates is set as, as when The variation of the driving signal Cf of point ti and execute the variable quantity dCi (processing S15) that resonance locking control unit 611 is set as former state.

On the other hand, when variable quantity dCi is bigger than a reference value dCe, the locking delayed control unit 612 that resonates is set as, by when The variation of driving signal Cf under point ti is executed as the interim variation on the basis of a reference value dCe.

Specifically, the variable quantity dCi that sets of resonance locking control unit 611 is removed with a reference value dCe, quotient n and remaining is calculated Number dCm (processing S16).It is dCi=n × dCe+dCm at this time.

Then, the variation as the driving signal Cf under time point ti is set as with a reference value dCe execution n times, with remainder DCm is executed 1 time, successively executes (processing S17) respectively with time dte interval.In addition, time dte is locked relative to resonance is executed The specified time limit of movement is sufficiently small value.

In Figure 11, the stage of the variation of driving signal Cf based on processing S16 and processing S17, under time point ti is indicated Change the state of processing.

In time point ti, control unit 611 is locked by resonance, referring to vibrational state Vf, sets the variable quantity of driving signal Cf DCi (the processing S13 of Fig. 8 above-mentioned).If variable quantity dCi is the biggish value (place of Fig. 8 above-mentioned relative to a reference value dCe Manage S14), then quotient n and remainder dCm (the processing S16 of Fig. 8 above-mentioned), a reference value are calculated by the locking delayed control unit 612 that resonates The interim variation of dCe is n times, and the interim variation of remainder dCm is 1 time, respectively successively with the interval defined time dte It executes.

As a result, the frequency variation of the driving signal Cf under time point ti first reaches the variation that resonance locking control unit 611 is set It measures dCi (=n × dCe+dCm).

Driving signal Cf in Figure 12, after indicating processing S13~S17 delay disposal by Fig. 8.

In driving signal Cf, variable quantity dC1, dC6~dC8 under time point t1, t6~t8 are due to being smaller than a reference value dCe Value, so executing variable quantity dC1, dC6~dC8 as former state by processing S13~S15 of Fig. 8.

On the other hand, since variable quantity dC2~dC5 under time point t2~t5 is the value bigger than a reference value dCe, so by scheming 8 processing S13~S17 progress is staged, is transformed to 2 stages in time point t2,4 stages is transformed in time point t3, in time point T4 is transformed to 5 stages, was transformed to for 3 stages in time point t5, delays to reach the time until variable quantity dC2~dC5 respectively, and And the variable quantity under each stage is restricted to less than a reference value dCe.

(effect of embodiment)

Present embodiment from the description above can obtain following such effect.

In the present embodiment, control unit 611 is locked by resonance, driving signal Cf automatic following lens system 3 is worked as The peak value of preceding resonant frequency can efficiently generate standing wave.

When executing resonance lock out action, by being made by the locking delayed control unit 612 that resonates based on resonance locking control unit 611 automatic following postpones to the follow up action of resonant frequency, becomes flat the frequency of driving signal Cf.As a result, Even if in the biggish situation of variable quantity dCi of the frequency variation based on resonance locking, the frequency for the stage being actually executed The variable quantity (=a reference value dCr) of variation also becomes flat, and can prevent the image occurred in the case where frequency changes greatly The time point of acquirement is irregular or the flickering of picture etc., can obtain high-precision image.

In the present embodiment, the locking delayed control unit 612 that resonates has preset defined a reference value dCe, is reaching Before the variable quantity dCi of the frequency variation of driving signal Cf based on resonance locking control unit 611, with stipulated time dte interval Successively execute multiple frequencies variation of each a reference value dCe.Therefore, even if in the driving letter based on resonance locking control unit 611 In the biggish situation of variable quantity dCi of the frequency variation of number Cf, the frequency variation for the driving signal Cf being actually executed also is set For the interim variation of each a reference value dCe.Thus, as long as according to that the time point of image acquirement can be prevented irregular and picture Flickering etc. range in variable quantity set a reference value dCe, it will be able to be reliably prevented the time point of these images acquirement not Rule and the flickering of picture etc..

In addition, in the present embodiment, through the processing S14 amount of being changed dCi compared with a reference value dCe, when equal Or variable quantity dCi is used for the variation of driving signal Cf as former state when smaller, when variable quantity dCi is bigger than a reference value dCe at Manage the staged processing of S16~S17.

But the processing for handling S14, S15 also can be omitted.It in the case, is quotient n=in the division of processing S16 0, remainder dCm=dCi, as a result, the variation in 1 stage based on variable quantity dCi of execution.

But by using processing S14, S15, processing can be omitted in the case where variable quantity dCi is smaller than a reference value dCe The calculating of S16, S17.

(other embodiments)

Other embodiments of the invention are indicated in Figure 13 and Figure 14.

In embodiment above-mentioned, as the explanation in Fig. 8~Figure 12, pass through using using using a reference value dCe The interim variation of quotient n and remainder dCm that division obtains.

In contrast, in Figure 13 and Figure 14, preset and divide number m, by with the division number m by driving signal The variable quantity dCi of the frequency variation of Cf is divided, and executes the interim variation under smaller variable quantity dCd (=dCi/m).

In Figure 13, resonance locking control unit 611 detects its variable quantity dVi (processing S21), makes referring to vibrational state Vf Driving signal Cf follows (processing S22).Then, by the locking delayed control unit 612 that resonates, resonance locking control unit 611 is set The variable quantity dCi of fixed driving signal Cf is detected (processing S23).These processing S21~S23 and processing S11 above-mentioned~ S13 is same.

Once detecting variable quantity dCi, the locking delayed control unit 612 that resonates is just by variable quantity dCi to divide number m progress It divides, the variable quantity dCd=dCi/m (processing S24) of calculation stages.

Then, the variation as the driving signal Cf of time point ti, was set as m variation with variable quantity dCd with the time The interval dte successively executes (processing S25).

In Figure 14, the staged of the variation based on processing S24 and processing S25, time point ti driving signal Cf is indicated The state of processing.

In time point ti, control unit 611 is locked by resonance, referring to vibrational state Vf, to the variable quantity dCi of driving signal Cf Set (the processing S23 of Figure 13 above-mentioned).Pass through the locking delayed control unit 612 that resonates, the variable quantity dCd of calculation stages =dCi/m (the processing S24 of Figure 13 above-mentioned), by the interim variation of variable quantity dCd with m times respectively with the defined time The interval dte successively executes.

As a result, the frequency variation of the driving signal Cf of time point ti first reaches the variable quantity that resonance locking control unit 611 is set DCi (=dCd × m).

In the present embodiment, the locking delayed control unit 612 that resonates has preset defined division number m, will be based on The variable quantity dCi of the frequency variation of the driving signal Cf of resonance locking control unit 611 is divided with dividing number m, will be divided Multiple frequencies variation of each variable quantity dCd of frequency out is successively executed with stipulated time dte interval.Therefore, even if in base It is locked in the biggish situation of variable quantity dCi of frequency variation of the driving signal Cf of control unit 611 in resonance, the drive actually executed The frequency variation of dynamic signal Cf is also the interim variation for dividing number m amount, variable quantity dCd=dCi/m when each variation and The variable quantity dCi of the frequency variation of driving signal Cf originally is integrally compared as lesser value.Thus, it is possible to be reliably prevented The time point that image obtains is irregular and the flickering of picture etc..

In turn, pass through preset division number m, the number of the interim variation at the interval each stipulated time dte It is limited, it, also always can be with so even if in the whole biggish situation of variable quantity dCi of the frequency variation of driving signal Cf Time dte × n completes variation, and the time until completion can be prevented elongated.

In addition, the change in the range of the purpose of the present invention can be reached the present invention is not limited to embodiment above-mentioned Shape etc. includes in the present invention.

In the foregoing embodiment, locking delayed control unit 612 is resonated referring to preset a reference value dCe or division time Number m, but these a reference values dCe or division number m can also be stored in the locking delayed control unit 612 of resonance, or can also It is used in PC7 to control or user in storage to other storage regions that drive control part 61 be arranged etc., being also possible to storage The value inputted from control with PC7.

In the foregoing embodiment, setting resonance lock operation portion 711, to the effective or nothing of resonance locking control unit 611 Effect switches over, but such resonance lock operation portion 711 also can be omitted, can also be by resonance locking control unit 611 always Execute resonance lock out action.

In the foregoing embodiment, in order to carry out lens system 3 driving and control and use lens control unit 6 and control With the combination of PC7, but they may be the device for carrying out the one of driving, control or operation of lens system 3 together.But It is that, by being set as lens control unit 6 and the control combination of PC7 as aforementioned embodiments, can make in lens system 3 The hardware needed in driving and control is independently used as dedicated lens control device.Furthermore, it is possible to by lens control unit 6 operation and Setting adjustment, there are also being taken into for image to be realized using the higher personal computer of versatility.

In the foregoing embodiment, driving signal Cf and focus are changed into waveform Mf and is set as sine wave, but it is also possible to Triangular wave, Sawtooth waves, rectangular wave or other waveforms.

The specific structure of lens system 3 can suitably change, and shell 31 and vibration component 32 can also other than cylindrical shape To be hexagonal tubular etc., their size and the attribute of liquid 35 also can be selected suitably.