阅读说明：本技术 焦距可变透镜装置及焦距可变透镜控制方法 (Focal length variable lens device and focal length variable lens control method ) 是由 渡边裕 酒井裕志 于 2019-05-17 设计创作，主要内容包括：焦距可变透镜装置具有对图像检测条件进行设定的图像检测条件设定部；图像检测条件设定部能够设定反复进行图像检测循环的复合模式(S41)作为图像检测条件,所述图像检测循环包括至少1个多平面图像检测动作(S44)和至少1个单平面图像检测动作(S45)；在多平面图像检测动作(S44)中,在焦距可变透镜的焦距变化的1个周期的期间中,能够设定多个进行图像检测的焦距(S42)；在单平面图像检测动作(S45)中,在焦距可变透镜的焦距变化的1个周期的期间中,能够设定1个进行图像检测的焦距(S43)。(Focal length variable lens device has the image detection condition configuration par set to image detection condition；Image detection condition configuration par can set the composite mode (S41) that image detection circulation is repeated as image detection condition, and described image detection circulation includes the more flat image detection operations (S44) of at least one and at least one mono-plane images detection operation (S45)；In more flat image detection operations (S44), during 1 period of the focal length variations of focal length variable lens in, can set it is multiple carry out image detections focal lengths (S42)；In mono-plane images detection operation (S45), during 1 period of the focal length variations of focal length variable lens in, can set 1 progress image detection focal length (S43).)

1. a kind of focal length variable lens device, which is characterized in that

With focal length focal length variable lens periodically changed, measurement object object can be executed by aforementioned focal length variable lens Image detection image detection portion, made based on image detection condition related with the aforementioned focal length of aforementioned focal length variable lens Aforementioned image test section executes the lens control unit of aforementioned image detection and sets aforementioned image to aforesaid lens control unit and examines The image detection condition configuration par of survey condition,

Aforementioned image testing conditions configuration part can set the composite mode that image detection circulation is repeated as aforementioned image Testing conditions, described image detection circulation include that the more flat image detection operations of at least one and at least one mono-plane images detect Movement；

In aforementioned more flat image detection operations, in the phase in 1 period of the aforementioned focal length variations of aforementioned focal length variable lens Between in, multiple aforementioned focal lengths for carrying out aforementioned image detections can be set；

In aforementioned mono-plane images detection operation, in the phase in 1 period of the aforementioned focal length variations of aforementioned focal length variable lens Between in, 1 aforementioned focal length for carrying out aforementioned image detection can be set.

2. focal length variable lens device as described in claim 1, which is characterized in that

Aforementioned image testing conditions configuration part can select some of multiple images detection pattern and to aforesaid lens control unit into Row setting；

Aforementioned image detection pattern includes aforementioned composite mode, and including monoplane mode, more plane modes and mode frame by frame；

Under aforementioned monoplane mode, make only to include the aforementioned mono-plane images detection operation that 1 aforementioned focal length is designated Image detection circulation executes repeatedly；

Under aforementioned more plane modes, make only to include aforementioned more flat image detection operations that multiple aforementioned focal lengths are designated Image detection circulation executes repeatedly；

Under aforementioned mode frame by frame, make include the mutually different multiple aforementioned mono-plane images detection operations of aforementioned focal length image Detection circulation executes repeatedly.

3. focal length variable lens device as claimed in claim 1 or 2, which is characterized in that

Aforementioned focal length variable lens, which have, to be corresponded to the driving signal that is entered and the liquid lens unit of variations in refractive index and matches Set the object lens on optical axis identical with aforementioned liquids lens unit.

4. a kind of focal length variable lens control method, which is characterized in that

Using focal length variable lens device, with focal length focal length variable lens periodically changed, aforementioned coke can be passed through The image detection portion of the image detection of measurement object object is executed, based on the aforementioned coke with aforementioned focal length variable lens away from variable lens Aforementioned image test section is set to execute the lens control unit of aforementioned image detection and to aforementioned away from related image detection condition Lens control unit sets the image detection condition configuration par of aforementioned image testing conditions；

The composite mode that image detection circulation is repeated, described image detection circulation are set as aforementioned image testing conditions Including the more flat image detection operations of at least one and at least one mono-plane images detection operation；

In aforementioned more flat image detection operations, in the phase in 1 period of the aforementioned focal length variations of aforementioned focal length variable lens Between in, set multiple aforementioned focal lengths for carrying out aforementioned image detections；

In aforementioned mono-plane images detection operation, in the phase in 1 period of the aforementioned focal length variations of aforementioned focal length variable lens Between in, set 1 aforementioned focal length for carrying out aforementioned image detection.

Technical field

The present invention relates to focal length variable lens (lens) device and focal length variable lens control methods.

Background technique

As focal length variable lens device, such as develop using in (the U.S. Patent Application Publication No. 2010/ of document 1 No. 0177376 specification) in record principle liquid lens system (having the case where referred to as lens system below) device.

The cylindric vibration component formed by piezoelectric material is impregnated into transparent liquid and shape by liquid lens system At.In liquid lens system, if the inner peripheral surface and outer peripheral surface to vibration component apply alternating voltage, vibration component is in thickness It spends on direction and stretches, make the liquid vibration of the inside of vibration component.If according to the eigentone of liquid to application voltage Frequency be adjusted, then in a liquid formed concentric circles standing wave, formed centered on the central axis of vibration component and The region of the different concentric circles of refractive index.It in this state, should if passing through light along the central axis of vibration component Light is advanced according to the refractive index of each region of concentric circles along the path of diverging or pack.

Focal length variable lens device by liquid lens system above-mentioned and be used to link focus object lens it is (such as common convex Lens or lens group) it is configured on identical optical axis and constitutes.Using liquid lens system as liquid lens unit encapsulation, It is assembled into focal length variable lens device.

If making directional light to common objective lens entrance, focus knot is being in defined focal length by the light after passing through lens Focal position.In contrast, the light is by lens system if keeping directional light incident to the lens system with object lens arranged coaxial System diverging or pack, light after object lens by focus knot with original (the not state of lens system) focal position phase Than to position that is remote or closely deviating.

Thus, in focal length variable lens device, (make internal liquid by applying the driving signal inputted to lens system Body generates the alternating voltage of the frequency of standing wave) and increase and decrease the amplitude of the driving signal, it can will be filled as focal length variable lens The focal position set in a certain range (on the basis of the focal length of object lens, can by lens system increase and decrease defined variation Amplitude) arbitrarily control.

In focal length variable lens device, as the driving signal inputted to lens system, such as using sinuous AC signal.If being entered such driving signal, the focal length (focal position) of focal length variable lens device is with sine wave Shape variation.At this point, the light across lens system is not refracted, focal length variable lens device when the amplitude of driving signal is 0 Focal length is the focal length of object lens.When the amplitude of driving signal is in positive and negative peak value, the light across lens system is maximally rolled over It penetrates, the focal length of focal length variable lens device becomes the maximum state of focal length variations from object lens.

When obtaining image using such focal length variable lens device, with the Phase synchronization of the sine wave of driving signal and Luminous signal is exported, pulsing light is carried out.As a result, by focus focal length specified in the focal length changed with sinusoidal wave shape Pulsing light, the image of object of the detection in the focal length are carried out under state.If in one cycle with multiple phases into Row pulsing light, it is corresponding with each phase and carry out image detection, then the image of multiple focal lengths can also be obtained simultaneously.

In focal length variable lens device above-mentioned, if in one cycle with single phase carry out pulsing light and Image detection (mono-plane images detection operation) can then obtain focus in the single focus in the focal length for being equivalent to the phase Detection image (monoplane detection image) on face (plane).

In mono-plane images detection operation, position in the surface of object on the focus face is distinct focus It is imaged under state.But the position (focal length farther out or closer position) deviateed from focus face is in the (fuzzy of focus offset ) imaged under state.

On the other hand, if carrying out pulsing light and image detection (more flat images in one cycle with multiple phases Detection operation), then to be equivalent to the respective successively detection image of multiple focal lengths of each phase, it is sequentially overlapped and becomes 1 inspection Altimetric image (more plane monitoring-network images).As a result, obtaining focus in the image in multiple focus faces.

But in more flat image detection operations, even if a part of object is brightly taken the photograph in some focus face Picture is also imaged in other focus faces with fuzzy state.By by such each focus face image information be superimposed, such as There is the periphery void that can become distinct edge to paste the problem of such image etc. cannot ensure distinct image quality.

Decline for such image quality, have by mono-plane images detection operation above-mentioned to multiple focal lengths successively into Capable situation (image detection movement frame by frame).

That is, specified multiple focal lengths are carried out mono-plane images detection operation primarily with respect to the 1st focal length, are then closed Mono-plane images detection operation is carried out in the 2nd focal length, these movements are repeated to the quantity of specified focal length.

In the movement of such image detection frame by frame, since the image detection to each focal length is that mono-plane images detection is dynamic Make, so distinct image can be obtained under focus state respectively.

But in the movement of image detection frame by frame, the mono-plane images detection of the quantity due to carrying out specified focal length Movement, so having the problem that the image detection time is elongated in the increased situation of quantity of specified focal length.

Summary of the invention

Sufficient image quality can be obtained to multiple focal lengths the object of the present invention is to provide one kind and shorten image inspection Survey the focal length variable lens device and focal length variable lens control method of time.

Focal length variable lens device of the invention have focal length focal length variable lens periodically changed, can be by preceding State focal length variable lens execute measurement object object image detection image detection portion, based on before aforementioned focal length variable lens It states the related image detection condition of focal length and aforementioned image test section is made to execute the lens control unit of aforementioned image detection and right Aforesaid lens control unit sets the image detection condition configuration par of aforementioned image testing conditions, which is characterized in that aforementioned image inspection The composite mode that image detection circulation is repeated can be set as aforementioned image testing conditions, the figure by surveying condition configuration par As detection circulation includes the more flat image detection operations of at least one and at least one mono-plane images detection operation；Aforementioned mostly flat Face image detection movement in, during 1 period of the aforementioned focal length variations of aforementioned focal length variable lens in, can set more A aforementioned focal length for carrying out aforementioned image detection；In aforementioned mono-plane images detection operation, in aforementioned focal length variable lens During 1 period of aforementioned focal length variations, 1 aforementioned focal length for carrying out aforementioned image detection can be set.

It in the present invention, can be based on the image detection condition set by image detection condition configuration par, lens control unit Focusing variable lens are controlled, and carry out image detection by image detection portion.

At this point, it includes at least one that image detection portion executes repeatedly if setting composite mode as image detection condition The image detection of more flat image detection operations and at least one mono-plane images detection operation circulation.

For example, under composite mode, being repeated in a cycle in the case where carrying out the image detection of 3 focal lengths In comprising being set more flat image detection operations of 3 focal lengths and being set 2 mono-plane images of 1 focal length respectively The image detection of detection operation recycles.

For the image detected with such composite mode, by more flat image detection operations, although including focus It in the image information of whole focal lengths, but also include the image information of other focal lengths, not necessarily distinct.On the other hand, lead to Mono-plane images detection operation is crossed, becomes distinct image about 2 focal lengths.

Thus, by more flat image detection operations, can obtain same as a result, simultaneously as previous more flat images detection And by mono-plane images detection operation, the unavailable higher figure in previous more flat image detection operations can be obtained As quality.

In turn, in the previous movement of image detection frame by frame, need to be repeated the image detection of the quantity of focal length, if burnt Away from quantity increase then the image detection time is elongated, but under composite mode of the invention, be able to suppress mono-plane images detection The quantity of movement can shorten the image detection time.That is, being needed if 5 focal lengths are carried out with previous image detection frame by frame The time of 5 frame corresponding amounts of mono-plane images detection.But under composite mode of the invention, although such as to 5 focal lengths Carry out the image of image detection but distinctness only 2 focal lengths can in the case where, ensuring 5 with more flat image detection operations It, can be corresponding with total 3 frames as long as carrying out 2 mono-plane images detection operations on the basis of the image information of focal length The time of amount is with regard to enough.

According to the above, multiple focal lengths can be obtained sufficient image product by focal length variable lens device through the invention Matter, and the image detection time can be shortened.

In focal length variable lens device of the invention, it is preferred that aforementioned image testing conditions configuration part can select Multiple images detection pattern some and aforesaid lens control unit is set；Aforementioned image detection pattern includes aforementioned compound Mode, and including monoplane mode, more plane modes and mode frame by frame；Under aforementioned monoplane mode, make only to include being referred to The image detection circulation for having determined the aforementioned mono-plane images detection operation of 1 aforementioned focal length executes repeatedly；In aforementioned more plane moulds Under formula, make only to hold repeatedly including the image detection circulation of aforementioned more flat image detection operations of multiple aforementioned focal lengths is designated Row；Under aforementioned mode frame by frame, make include the mutually different multiple aforementioned mono-plane images detection operations of aforementioned focal length image Detection circulation executes repeatedly.

In the present invention, it as image detection mode, can select based on composite mode of the invention, and can select Previous monoplane mode, more plane modes, frame by frame mode.Thereby, it is possible to ensure previous same image inspection as needed Survey movement, and the effect of composite mode of the invention can be obtained.

In focal length variable lens device of the invention, it is preferred that aforementioned focal length variable lens have corresponding to defeated The driving signal that enters and the liquid lens unit of variations in refractive index and configuration are on optical axis identical with aforementioned liquids lens unit Object lens.

In the present invention, basic knot picture can be obtained with object lens, and focal length can be changed by liquid lens unit.It is logical It crosses using liquid lens unit, does not need the mechanical mechanism for changing focal length, apparatus structure can be simplified.This Outside, liquid lens unit can be such that focal length changes periodically with the high speed for reaching tens kilo hertzs, additionally it is possible to be readily derived folded The more flat images for having added the image under multiple focal lengths are preferred as focal length variable lens of the invention.

Focal length variable lens control method of the invention is characterized in that, using focal length variable lens device, thering is coke Away from focal length variable lens periodically changed, the image detection of aforementioned focal length variable lens execution measurement object object can be passed through Image detection portion, examine aforementioned image based on image detection condition related with the aforementioned focal length of aforementioned focal length variable lens Survey portion executes the lens control unit of aforementioned image detection and sets the figure of aforementioned image testing conditions to aforesaid lens control unit As testing conditions configuration part；The composite mode that image detection circulation is repeated, institute are set as aforementioned image testing conditions Stating image detection circulation includes the more flat image detection operations of at least one and at least one mono-plane images detection operation；Aforementioned In more flat image detection operations, during 1 period of the aforementioned focal length variations of aforementioned focal length variable lens in, set it is more A aforementioned focal length for carrying out aforementioned image detection；In aforementioned mono-plane images detection operation, in aforementioned focal length variable lens During 1 period of aforementioned focal length variations, 1 aforementioned focal length for carrying out aforementioned image detection is set.

In the present invention, it can obtain illustrating such effect in focal length variable lens device of the invention.

In accordance with the invention it is possible to which sufficient image quality can be obtained for multiple focal lengths and can shorten image by providing The focal length variable lens device and focal length variable lens control method of detection time.

Detailed description of the invention

Fig. 1 is the schematic diagram for indicating one embodiment of the present invention.

Fig. 2 is the schematic diagram for indicating the structure of liquid lens unit of aforementioned embodiments.

Fig. 3 (A)~(C) is the schematic diagram for indicating the vibrational state of liquid lens unit of aforementioned embodiments.

Fig. 4 (A)~(E) is the schematic diagram for indicating the focal length of liquid lens unit of aforementioned embodiments.

Fig. 5 is the block figure for indicating the control section of aforementioned embodiments.

Fig. 6 is the flow chart for indicating the image detection movement of aforementioned embodiments.

Fig. 7 is the curve graph for indicating the monoplane mode of aforementioned embodiments.

Fig. 8 is the schematic diagram for indicating the focus state under aforementioned monoplane mode.

Fig. 9 is the schematic diagram for indicating the detection image under aforementioned monoplane mode.

Figure 10 is the curve graph for indicating more plane modes of aforementioned embodiments.

Figure 11 is the schematic diagram for indicating the focus state under aforementioned more plane modes.

Figure 12 is the schematic diagram for indicating the detection image under aforementioned more plane modes.

Figure 13 is the curve graph for indicating the more plane modes of others of aforementioned embodiments.

Figure 14 is the schematic diagram for indicating the focus state under the aforementioned more plane modes of others.

Figure 15 is the schematic diagram for indicating the detection image under aforementioned more plane modes.

Figure 16 is the curve graph for indicating the mode frame by frame of aforementioned embodiments.

Figure 17 (A) is the schematic diagram for indicating the focus state under aforementioned mode frame by frame.

Figure 17 (B) is the schematic diagram for indicating the focus state under aforementioned mode frame by frame.

Figure 17 (C) is the schematic diagram for indicating the focus state under aforementioned mode frame by frame.

Figure 18 (A)~(C) is the schematic diagram for indicating the detection image under aforementioned mode frame by frame.

Figure 19 is the curve graph for indicating the composite mode of aforementioned embodiments.

Figure 20 (A) is the schematic diagram for indicating the focus state under aforementioned composite mode.

Figure 20 (B) is the schematic diagram for indicating the focus state under aforementioned composite mode.

Figure 20 (C) is the schematic diagram for indicating the focus state under aforementioned composite mode.

Figure 21 (A)~(C) is the schematic diagram for indicating the detection image under aforementioned composite mode.

Figure 22 is the curve graph for indicating other composite modes of aforementioned embodiments.

Figure 23 (A) is the schematic diagram for indicating the focus state under aforementioned other composite modes.

Figure 23 (B) is the schematic diagram for indicating the focus state under aforementioned other composite modes.

Figure 24 (A)~(B) is the schematic diagram for indicating the detection image under aforementioned other composite modes.

Specific embodiment

Hereinafter, being based on Detailed description of the invention one embodiment of the present invention.

(focal length variable lens device 1)

In Fig. 1, focal length variable lens device 1 is the image that the surface of measurement object object 9 is directed at while changing focal length The device detected.

For this purpose, focal length variable lens device 1 have configure object lens 2 on optical axis A identical with the surface crosswise and Liquid lens unit 3, the image that the image of the measurement object object 9 obtained by object lens 2 and liquid lens unit 3 is detected Test section 4 and the pulsing light portion 5 that pulsing light is carried out to the surface of measurement object object 9.

In focal length variable lens device 1, focal length variable lens are constituted by object lens 2 and liquid lens unit 3.

In turn, focal length variable lens device 1, which has, controls the movement of liquid lens unit 3 and pulsing light portion 5 Lens control unit 6 and control PC7 for being operated to lens control unit 6.

Control is made of with PC7 existing personal computer, by executing defined control software, realizes desired function Energy.It is used in PC7 in control, also includes the function that image is taken into and is handled from image detection portion 4.

Object lens 2 are made of existing convex lens.

Image detection portion 4 is by existing CCD (Charge Coupled Device, charge-coupled device) imaging sensor Or camera of other forms etc. is constituted, it can be using incident image Lg as the detection image Im of defined signal form to control System is exported with PC7.

Pulsing light portion 5 is made of light-emitting components such as LED (Light Emitting Diode, light emitting diode), works as quilt When having input luminous signal Ci from lens control unit 6, so that illumination light Li is shone the stipulated time, be able to carry out for measurement object object The pulsing light on 9 surface.Illumination light Li is measured the surface reflection of object 9, the reflection on the surface from measurement object object 9 Light Lr forms image Lg by object lens 2 and liquid lens unit 3.

Liquid lens unit 3 is in Inner Constitution liquid lens system, with input from lens control unit 6 Cf pairs of driving signal It answers and variations in refractive index.Driving signal Cf is the exchange for making the frequency of the generation standing wave of liquid lens unit 3, is sinuous friendship Flow signal.

In focal length variable lens device 1, by based on the focal length of object lens 2, make the refractive index of liquid lens unit 3 Variation, can be such that the focal length Df to focal position Pf arbitrarily changes.

(liquid lens unit 3)

In Fig. 2, liquid lens unit 3 has columnar shell 31, cylindric in being internally provided with for shell 31 Vibration component 32.Vibration component 32 is by the liner for the elastic system being installed between its outer peripheral surface 33 and the inner peripheral surface of shell 31 39 bearings.

Vibration component 32 is that piezoelectric material is formed as to cylindric structure, by between outer peripheral surface 33 and inner peripheral surface 34 It is applied the alternating voltage of driving signal Cf, to vibrate in a thickness direction.

In the inside of shell 31, be filled with the higher liquid 35 of permeability makes mass-impregnation exist for vibration component 32 In liquid 35, the inside of cylindric vibration component 32 is full of by liquid 35.The alternating voltage of driving signal Cf is adjusted to make The liquid 35 of inside in vibration component 32 generates the frequency (such as 70KHz) of standing wave.

As shown in figure 3, if vibrating vibration component 32, being sent out in internal liquid 35 in liquid lens unit 3 The region (referring to the portion (A) Fig. 3 and the portion Fig. 3 (B)) for the concentric circles that refractive index alternately changes occurs for raw standing wave.

At this point, the distance (radius) away from central axis and the relationship of the refractive index of liquid 35 of liquid lens unit 3 become Index distribution W shown in the portion Fig. 3 (C) is such.

In Fig. 4, since driving signal Cf is sinuous AC signal, so the liquid in liquid lens unit 3 The amplitude of fluctuation of 35 index distribution W changes also with it.Also, the region of the concentric circles occurred in liquid 35 Refractive index is changed with sinusoidal wave shape, and the focal length Df for arriving focal position Pf as a result, is changed with sinusoidal wave shape.

In the state of Fig. 4 (A), the amplitude of index distribution W becomes maximum, liquid lens unit 3 make across light it is poly- Beam, focal position Pf is closer, and focal length Df becomes most short.

In the state of Fig. 4 (B), index distribution W becomes flat, and liquid lens unit 3 makes to pass through as former state across light, burnt Point position Pf and focal length Df becomes the value of standard.

In the state of Fig. 4 (C), index distribution W becomes maximum with Fig. 4 (A) reversed polarity, amplitude, liquid lens unit 3 Make across light diffusion, focal position Pf farther out, focal length Df become maximum.

In the state of Fig. 4 (D), index distribution W becomes flat again, liquid lens unit 3 make across light as former state It passes through, the value of focal position Pf and focal length Df as standard.

In the state of Fig. 4 (E), the state of Fig. 4 (A) is turned again to, same variation is repeated below.

In this way, driving signal Cf is sinuous AC signal, focal position Pf in focal length variable lens device 1 And focal length Df is also changed as the focus of Fig. 4 changes waveform Mf with sinusoidal wave shape.

At this point, if focus change waveform Mf arbitrary time point in focal position Pf measurement object object 9 into Row pulsing light detects the focus in focal length Df that can then obtain arbitrarily illuminating time point in time point image to be illuminated The image of position Pf.

(lens control unit 6)

As shown in figure 5, in focal length variable lens device 1, by driving signal Cf from lens control unit 6, shine Signal Ci and image sensing signal Cc, to the vibration of liquid lens unit 3, pulsing light portion 5 shine and image detection portion 4 Image detection is controlled.At this point, the vibrational state Vf as liquid lens unit 3, will be applied on liquid lens unit 3 Active power or driving current etc. are returned to lens control unit 6.

Lens control unit 6 has the drive control part 61 to 3 output drive signal Cf of liquid lens unit, to pulsing light Portion 5 exports the light emitting control 62 of luminous signal Ci and exports the image detection control of image sensing signal Cc to image detection portion 4 Portion 63 processed.

In order to which the image detections conditions such as setting to lens control unit 6 operate, it is connected to control and uses PC7.

(control PC7)

Control has the lens operation of the operation for lens control unit 6 such as setting for carrying out image detection condition with PC7 Portion 71, will test from image detection portion 4 image Im be taken into and the image processing part 72 that handles and accept user can for focal length Become the operation interface 73 of the operation of lens devices 1.

Lens operation portion 71 has based on image detection condition configuration par 711 of the invention.

Image detection condition configuration par 711 accepts the operation of user via operation interface 73, as image detection condition Select some of multiple images detection pattern.As multiple images detection pattern, monoplane mode, more plane moulds can choose Formula, frame by frame mode and composite mode.

The specifically narration in detail later of these image detection modes, but by being set to lens control unit 6, lens Control unit 6 makes liquid lens unit 3, image detection portion 4 and pulsing light portion 5 execute following such image detection movement.

Under the mode of monoplane, executing lens control unit 6 repeatedly only includes the monoplane figure that 1 focal length Df is designated As the image detection of detection operation recycles.

In multi-planar mode, lens control unit 6 is made to execute only more planes comprising multiple focal length Df are designated repeatedly The image detection circulation of image detection movement.

Under mode frame by frame, lens control unit 6 is made to execute the multiple mono-plane images mutually different comprising focal length Df repeatedly The image detection of detection operation recycles.In mode frame by frame, user can select the quantity of mono-plane images detection operation (1 The quantity of the image detected in a circulation) and respective focal length Df.

Under composite mode, execute lens control unit 6 repeatedly including more flat image detection operations of at least one and at least The image detection circulation of 1 mono-plane images detection operation.

In more flat image detection operations under composite mode, in 1 week that the focal length Df of liquid lens unit 3 changes Multiple progress can be set in during phase (1 period for changing waveform Mf as the sinuous focus of driving signal Cf) The focal length Df of image detection.

In the mono-plane images detection operation under composite mode, in 1 week that the focal length Df of liquid lens unit 3 changes During phase, the focal length Df of 1 progress image detection can be set.There are multiple mono-plane images detections dynamic in composite mode In the case where work, different focal length Df can be set separately.

Image detection condition configuration par 711 be set in the parameter that is needed in selected image detection mode (focal length Df's Quantity and value, the quantity of mono-plane images detection operation etc.), lens control unit 6 is set as image detection condition.

The lens control unit 6 for being set image detection condition passes through to liquid lens unit 3, image detection portion 4 and arteries and veins It rushes illumination portion 5 to be controlled, the image detection circulation of appointed image detection mode can be repeated, keep focal length variable saturating Lens device 1 executes desired image detection.

(setting of image detection condition)

In Fig. 6, the setting operation carried out by image detection condition configuration par 711 is indicated and based on the saturating of the setting The order of the control action of mirror control unit 6.

In image detection condition configuration par 711, specified (the processing S1) of image detection mode is accepted first.Image detection The specified of mode is operable to carry out by user to operation interface 73 (referring to Fig. 5).

Operation based on user, image detection condition configuration par 711 carry out monoplane mode as image detection mode Setting (processing S11), the setting (processing S21) of more plane modes, the frame by frame setting (processing S31) of mode, composite mode Some of setting (processing S41).

If setting image detection mode, image detection condition configuration par 711 is just set according to image detection mode Parameter required for the image detection mode.The setting of these parameters carries out operation interface 73 also by user (referring to Fig. 5) It operates to carry out.

In the case where setting monoplane mode (processing S11), due in during image detection acts by repeatedly The image detection circulation of execution is only made of mono-plane images detection operation, so only setting in the mono-plane images detection operation 1 focal length Df (focal length D1) (processing S12).

In the case where setting more plane modes (processing S21), due in during image detection acts by repeatedly The image detection circulation of execution is only made of more flat image detection operations, so setting in more flat image detection operations The quantity (focus number np) in focus face and the focal length Df (focal length D1~Dnp) (processing S22) in each focus face.

In the case where setting mode (processing S31) frame by frame, due to being held in during image detection acts repeatedly Capable image detection circulation is made of multiple mono-plane images detection operations, so setting passes through mono-plane images detection operation The quantity (frame numbers nf) of the picture (frame) of detection and the focal length Df (focal length Df1~Dnf) (processing S32) of each picture.

In the case where setting composite mode (processing S41), the image detection movement during in be repeatedly executed at predetermined intervals Image detection circulation is made of the mono-plane images detection operation of 1 or more more flat image detection operations and 1 or more.Cause This, as more flat image detection operations parameter and the focal length Df of the quantity (the focus number np) and each focus face that set focus face (focal length D1~Dnp) (processing S42).Meanwhile the parameter as mono-plane images detection operation, set picture detected (frame) Quantity (frame numbers nf) and each picture focal length Df (focal length Df1~Dnf) (processing S43).

These processing S42 and processing S43 both can be sequentially on the contrary, or parallel simultaneously.

In composite mode, the focus number np of more flat image detection operations and the frame numbers of mono-plane images detection operation Nf can be selected arbitrarily.It multiple focal length D1~Dnp in more flat image detection operations and is detected by mono-plane images dynamic Make and set focal length Df1~Dnf either identical value, or different values.As main purposes, Ke Yiju Mode below out: substantially detecting multiple focal length D1~Dnp in more flat image detection operations, by it is therein some It is set as focal length Df1~Dnf, carries out the detailed detection based on mono-plane images detection operation.

If setting the parameter of each picture detection pattern, image detection condition configuration par 711 is just by set figure As detection pattern and its parameter are transmitted to lens control unit 6.It is transmitted 6 base of lens control unit of image detection mode and parameter Hold in the inner, liquid lens unit 3, image detection portion 4 and pulsing light portion 5 are controlled, executes the image that user specifies Detection operation.

In the case where setting monoplane mode (processing S11), lens control unit 6 is executed only repeatedly by the list of focal length D1 The image detection circulation (processing S13) that flat image detection operation is constituted.

In the case where setting more plane modes (processing S21), lens control unit 6 execute repeatedly only by focal length D1~ The image detection circulation (processing S23) that more flat image detection operations of Dnp are constituted.

In the case where setting mode (processing S31) frame by frame, lens control unit 6 executes the monoplane of frame numbers nf repeatedly Image detection acts (being focal length Df1~Dnf respectively) continuous image detection circulation (processing S33).

In the case where setting composite mode (processing S41), lens control unit 6 executes the more of focal length D1~Dnp repeatedly Flat image detection operation (processing S44) and the mono-plane images detection operation of frame numbers nf (are focal length Df1~Dnf respectively, locate Manage S45) continuous image detection circulation.

Then, the monoplane mode of present embodiment, the specific of more plane modes, frame by frame mode and composite mode are moved It is illustrated.

(monoplane mode)

Fig. 7 to Fig. 9 indicates the movement of the monoplane mode of present embodiment.

In Fig. 7, under the mode of monoplane, executing lens control unit 6 repeatedly only includes mono-plane images detection operation The image detection of Cms recycles LPs.

Here, driving signal Cf is in order to be driven to liquid lens unit 3 (referring to Fig.1) and from lens control unit 6 The sinuous focus given changes waveform Mf (referring to Fig. 4).When driving signal Cf is maximum value, liquid lens unit 3 And the focal length Df of object lens 2 (referring to Fig.1) is nearest focal length Dt, when driving signal Cf is minimum value, focal length Df is farthest Focal length Db.

Monoplane mode image detection circulation LPs in, by a cycle of driving signal Cf with referred to It will be from lens control unit 6 to the luminous signal of pulsing light portion 5 (referring to Fig.1) on the position of the corresponding phase theta 1 of fixed focal length D1 Ci transmission, to obtain focus by image detection portion 4 (referring to Fig.1), in the monoplane detection image Ims of focal length D1, (reference is schemed 9)。

In fig. 8, the position 91,92,93 that measurement object object 9 has height different on the surface.Each position 91,92,93 Configuration is between aforementioned nearest focal length Dt and farthest focal length Db (between corresponding focus face Pt, Pb).Thus, object lens 2 And liquid lens unit 3 can distinguish focus in each position 91,92,93 consistent focus face P1, P2, P3.

Mono-plane images detection operation Cms is set to focal length D1, if focal length D1 corresponds to focus face P1, with focus face The consistent position 91 P1 is under focus state by image detection.On the other hand, position 92,93 (consistent with focus face P2, P3) from Focus face P1 deviates, by image detection in the state of not focus.

In Fig. 9, the region I91 corresponding with position 91 in the detection image Ims of monoplane is due in the state of focus It is detected, so being detected as brighter and distinct image.On the other hand, with position 92,93 corresponding region I92, I93 by Yu Cong focus deviate in the state of be detected, so correspond respectively to the distance away from focus face P1 and as darker and not distinct Image be detected.

Thus, it is enough as long as it can obtain about the distinct image of region I91, in the figure for not needing region I92, I93 In the case where the distinctness of picture, as long as utilizing the monoplane mode.

(more plane mode .1)

Figure 10 to Figure 12 indicates the movement of more plane modes of present embodiment.

In Figure 10, in multi-planar mode, executing lens control unit 6 repeatedly only includes more flat image detection operations The image detection of Cmm recycles LPm.

Here, the driving signal Cf in Figure 10 and Figure 11, focal length Dt, Db, focus face Pt, Pb are illustrated in Fig. 7 and Fig. 8 It is such.

In the image detection circulation LPm of more plane modes, if focus number np=2 is set as, the one of driving signal Cf 2 focal lengths D1, D2 are specified in a period, are shone on the position of corresponding phase theta 1, θ 2 from the transmission of lens control unit 6 Signal Ci obtains focus in more plane monitoring-network image Imm (referring to Fig.1 2) of focal length D1, D2.

In Figure 11, if more flat image detection operation Cmm are set to focal length D1, D2 (focus face P1, P2), with conjunction The consistent position 91,92 focal plane P1, P2 is respectively under focus state by image detection.But in focus in (the focus face of position 91 P1 in the state of), position 92 (focus face P2) in the state of no focus by image detection, in focus in 92 (focus of position Face P2) in the state of, position 91 (focus face P1) is in the state of no focus by image detection.

In Figure 12, region I91 corresponding with position 91 is in focal length D1 as focus in more plane monitoring-network image Imm State is detected as brighter and distinct image.In addition, region I92 corresponding with position 92 becomes focus in focal length D2 State, as brighter and distinct image be detected.That is, region I91, I92 this 2 is detected as distinct image.

But region I91 in focal length D2 not focus it is darker without distinctness in the state of be detected, it by with coke Away from the distinct image superposition under D1 as a result, becoming the slightly dark feint image (area with monoplane detection image Ims Domain I91 is compared).It is also same about region I92.

On the other hand, region I93 corresponding with position 93 due to focal length D1, D2 which in all from focus deviate, institute To be detected as image darker and feint than region I91, I92.

Thus, by more plane modes, region I91, I92 in multiple focal length D1, D2 can be compared simultaneously Distinct image.

But as described above, even than sharper region I91, I92, vividness also declines than monoplane mode, So in order to obtain distinct image and need to be additionally carried out the image detection of monoplane mode.

(more plane mode .2)

Figure 13 to Figure 15 indicates the movement in the different settings of more plane modes.

At Figure 10 to more plane modes illustrated in fig. 12, it is set as focus number np=2, in more flat image detection operations In Cmm, image detection is carried out with focal length D1, D2 (focus face P1, P2), with the consistent position focus face P1, P2 91,92 in focus It is detected under state.

In contrast, being set as focus number np=3 under more plane modes of Figure 13 to Figure 15, detected in more flat images It acts in Cmm, image detection is carried out with focal length D1, D2, D3 (focus face P1, P2, P3), with the focus face consistent portion P1, P2, P3 Position 91,92,93 is under focus state by image detection.

In Figure 15, in more plane monitoring-network image Imm, with position 91,92,93 corresponding region I91, I92, I93 points Other focus in focal length D1, D2, D3 some, as brighter and distinct image be detected.But region I91, I92, I93 exist Focus in the state of other 2 focal lengths darker without distinctness in the state of be detected, superposition as a result, becoming suitable Dark feint image (compared with region I91, I92 of Figure 12).

Thus, in multi-planar mode, although can obtain the region in multiple focal lengths than sharper image simultaneously, But it should be noted that with increasing focus number np and the impaired this point of vividness.

(mode frame by frame)

Figure 16 to Figure 18 indicates the movement of the mode frame by frame of present embodiment.

Under mode frame by frame, executing lens control unit 6 repeatedly includes that the detection of multiple (frame numbers nf) mono-plane images is dynamic Make the image detection circulation LPf of Cms (focal length Df1~Dnf).

Here, the driving signal Cf in Figure 16 and Figure 17 A, Figure 17 B, focal length Dt, Db, focus face Pt, Pb are in Fig. 7 and figure As illustrating in 8.

In addition, the mono-plane images detection operation Cms under mode and the movement under aforementioned monoplane mode are same frame by frame 's.

In Figure 16, image detection circulation LPf is set to frame numbers nf=3, by 3 mono-plane images detection operation Cms (image detection act Cm1, Cm2, Cm3) connection and constitute.In image detection movement Cm1, Cm2, Cm3, it is switched to respectively Focal length D1, D2, D3.

In portion (A) of Figure 16, image detection movement Cm1 be set as focal length D1, in a cycle of driving signal Cf with Phase theta 1 carries out image detection.

In Figure 17 A, in image detection movement Cm1, focus is in focus corresponding with focal length D1 face P1, measurement object object 9 position 91 is under focus state by image detection.

In portion (A) of Figure 18, it is based on for the detection image Im1 of image detection movement Cm1, area corresponding with position 91 Domain I91 in the state of focus due to being detected, so being detected as brighter and distinct image.On the other hand, with position 92,93 corresponding region I92, I93 in the state of deviateing from focus due to being detected, so corresponding respectively to away from focus face P1 Distance and as darker and feint image be detected.

Equally, in the image detection movement Cm2 in portion (B) of Figure 16, it is set as focal length D2, monoplane figure is carried out with phase theta 2 As detection operation Cms.

Also, as Figure 17 B, in image detection movement Cm2, focus is surveyed in focus corresponding with focal length D2 face P2 The position 92 of amount object 9 is under focus state by image detection.

As a result, be based on for the detection image Im2 of image detection movement Cm2 as portion (B) of Figure 18, with The corresponding region I92 in position 92 is detected as brighter and distinct image, is made with position 91,93 corresponding region I91, I93 It is detected for darker and feint image.

In turn, in the image detection movement Cm3 in portion (C) of Figure 16, it is set as focal length D3, monoplane figure is carried out with phase theta 3 As detection operation Cms.

Also, as Figure 17 C, in image detection movement Cm3, focus is surveyed in focus corresponding with focal length D3 face P3 The position 93 of amount object 9 is under focus state by image detection.

As a result, be based on for the detection image Im3 of image detection movement Cm3 as portion (C) of Figure 18, with The corresponding region I93 in position 93 is detected as brighter and distinct image, is made with position 91,92 corresponding region I91, I92 It is detected for darker and feint image.

In Figure 16, if image detection recycles LPf and is performed from image detection movement Cm1 to image detection movement Cm3, Turn again to image detection movement Cm1 and repeatedly.

As a result, being successively repeatedly available detection image Im1~Im3 shown in Figure 18 in mode frame by frame.

Thus, under mode frame by frame, respectively in image detection movement Cm1~Cm3, it can obtain being equivalent to monoplane figure As the distinct detection image Ims of detection operation Cms.In particular, relative to multiple focal lengths are not avoided that in multi-planar mode Detection image quality decline, can be avoided the deterioration of such image under mode frame by frame.

But since image detection circulation LPf includes image detection movement Cm1~Cm3, so it should be noted that a series of Processing in time for needing increase this point.

(composite mode .1)

Figure 19 to Figure 21 indicates the movement of the composite mode of present embodiment.

Under composite mode, make lens control unit 6 execute repeatedly include the more flat image detection operation Cmm of at least one and The image detection of at least one mono-plane images detection operation Cms recycles LPc.

Here, Figure 19 and Figure 20 A, Figure 20 B, the driving signal Cf in Figure 20 C, focal length Dt, Db, focus face Pt, Pb be As illustrating in Fig. 7 and Fig. 8.

Composite mode shown in Figure 19 to Figure 21 is by flat image detection operation Cmm more than 1 and 2 mono-plane images inspections Survey acts the example that Cms constitutes image detection circulation LPc.

The mono-plane images detection operation Cms and more flat image detection operation Cmm of image detection circulation LPc are constituted with before Movement in the monoplane mode stated and more plane modes is same.

In Figure 19, image detection recycle LPc by the Cmm of flat image detection operation more than 1 (image detection act Cm1) and 2 mono-plane images detection operation Cms (image detection acts Cm2, Cm3) are constituted.

For more flat image detection operation Cmm of image detection movement Cm1, it is set as focus number np=3, sets coke Away from D1, D2, D3.

With regard to image detection movement Cm1 then more flat image detection operation Cmm mono-plane images detection operation Cms and Speech, is appointed as frame numbers nf=2, is specified based on this and sets 2 image detections movements Cm2, Cm3.It is dynamic for image detection Make Cm2 setting focal length D1, focal length D2 is set for image detection movement Cm3.

In portion (A) of Figure 19, in image detection movement Cm1, the more flat images detection for executing focal length D1, D2, D3 is dynamic Make Cmm, image detection is carried out with phase theta 1, θ 2, θ 3 in a cycle of driving signal Cf.

In Figure 20 A, image detection movement Cm1 more flat image detection operation Cmm in, focus in focal length D1, Corresponding focus face P1, P2, the P3 of D2, D3, the position 91,92,93 of measurement object object 9 is under focus state by image detection.

In portion (A) of Figure 21, the detection image Im1 based on image detection movement Cm1 becomes to be detected based on more flat images The more plane monitoring-network image Imm for acting Cmm, with corresponding region I91, I92, I93 difference focus in position 91,92,93 in focal length Some of D1, D2, D3 are detected as brighter and distinct image.

But region I91, I92, I93 in detection image Im1 in the state that focus is in other 2 focal lengths with compared with Dark and feint state is detected, superposition as a result, becoming quite dark feint image.

Wherein, region I92 due to other focus face P1, P3 be respectively at relative to just in the focus face P2 of focus it is close Distance, so region I91, I93 for being applied will not become than darker, as a result, as brighter than region I91, I93 Image is detected.

In contrast, in region I91, I93, region I93, the I91 being applied respectively farther out, the region I91 that is applied, I93 is darker than region I92, as a result, being detected as the image darker than region I92.

Therefore, in detection image Im1, the mutual boundary line I94 of darker region I91, I93 becomes unintelligible, compares The boundary line I95 of bright region I92 and darker region I93 is possible to become more difficult to differentiate.

The mono-plane images detection operation Cms of focal length D1 is executed in image detection movement Cm2 in portion (B) of Figure 19, Image detection is carried out with phase theta 1 in a cycle of driving signal Cf.

In Figure 20 B, image detection movement Cm2 mono-plane images detection operation Cms in, focus in D1 pairs of focal length The focus face P1 answered, the position 91 of measurement object object 9 is under focus state by image detection.

In portion (B) of Figure 21, the detection image Im2 based on image detection movement Cm2 becomes to be detected based on mono-plane images Act Cms monoplane detection image Ims, region I91 corresponding with position 91 due in the state of focus be detected, so It is detected as brighter and distinct image.On the other hand, with position 92,93 corresponding region I92, I93 due to from focus It is detected in the state of deviation, so corresponding to the distance away from focus face P1 and being detected as darker and feint image.

In detection image Im2, the boundary line I95 of darker region I92, I93 become unintelligible, but brighter region The boundary line I94 of I91 and darker region I93 can be detected as distinct image.

Equally, in the image detection movement Cm3 in portion (C) of Figure 19, the mono-plane images detection operation of focal length D2 is executed Cms carries out mono-plane images detection operation Cms in a cycle of driving signal Cf with phase theta 2.

Also, as Figure 20 C, in image detection movement Cm3, focus is surveyed in focus corresponding with focal length D2 face P2 The position 92 of amount object 9 is under focus state by image detection.

As a result, as portion (C) of Figure 21, in the detection image Im3 based on image detection movement Cm3, with portion 92 corresponding region I92 of position are detected as brighter and distinct image, with position 91,93 corresponding region I91, I93 conducts Darker and feint image is detected.

In Figure 19, if image detection recycles LPf to image detection movement Cm1 (more flat image detection operation Cmm) And be performed until image detection movement Cm2, Cm3 (2 mono-plane images detection operation Cms), then turn again to image detection Act Cm1 and repeatedly.

As a result, being successively repeatedly available detection image Im1~Im3 shown in Figure 21 in composite mode.

Thus, under composite mode, Cm1 is acted by image detection and obtains focus in the mostly flat of 3 focal lengths D1, D2, D3 Face detection image Imm, and Cm2, Cm3 are acted by image detection and obtain focus in the monoplane detection image of focal length D1, D2 Ims。

Wherein, image detection movement Cm1 in, although by with focus in other focus faces image be superimposed without The quality decline of detection image is avoided, but obtains focus in more plane monitoring-network image Imm of 3 focal lengths D1, D2, D3.

On the other hand, in image detection movement Cm2, Cm3, it is only capable of obtaining difference focus in the image in 1 focus face, but Focus can become brighter and distinct in the image of region I91 or region I92 in the focus face.

Using composite mode, by being set, so that for not being required high-precision region or side Boundary line is with more plane monitoring-network image Imm to cover, for being required that high-precision region or boundary line utilize monoplane detection figure As Ims, it can ensure high-precision while carry out efficient image detection.

That is, in the mode frame by frame of Figure 16, it is dynamic by carrying out 3 mono-plane images detections for 3 focal lengths D1, D2, D3 Make Cms, carries out high-precision image detection with whole focal length D1, D2, D3.

If carrying out image detection under mode frame by frame to 5 focal lengths, then image detection circulation LPf is needed to set 5 A mono-plane images detection operation Cms, due to carrying out the image detection of 5 frames, so the circular treatment time is also elongated.But 5 In a focal length, it is required that high-precision is only 2, just sufficient with the image detection movement under more plane modes about other 3 In the case where enough, by using composite mode, the processing time can be shortened.

That is, by using including setting the plane monitoring-network image Imm more than 1 of 5 focal lengths and being set to need high-precision The image detection of the monoplane detection image Ims of 2 focal lengths of degree recycles LPc, can be by adding up to the image of 3 frame corresponding amounts to examine Survey acts Cm1~Cm3 to ensure the detection image needed.

In this way, can ensure the high-precision of the part needed by utilizing composite mode while shorten the processing time.

(composite mode .2)

Figure 22 to Figure 24 indicates the movement under the different settings of composite mode.

In the composite mode illustrated by Figure 19 to Figure 21, by the Cmm of flat image detection operation more than 1, (image detection is dynamic Make Cm1, focus number np=3) and 2 mono-plane images detection operation Cms (image detection acts Cm2, Cm3, frame numbers nf=2) It constitutes image detection and recycles LPc.

In contrast, only by the Cmm of flat image detection operation more than 1, (image is examined in the composite mode of Figure 22 to Figure 24 Survey acts Cm1, focus number np=3) and 1 mono-plane images detection operation Cms (image detection acts Cm2, frame numbers nf=1) It constitutes image detection and recycles LPc.Such frame numbers nf=1 is equivalent to the minimal structure of composite mode.

Focus number np is set as in more flat image detection operation Cmm of image detection movement Cm1 in portion (A) of Figure 22 =3, set focal length D1, D2, D3.This is identical as the image detection in portion (A) of Figure 19 above-mentioned movement Cm1, shown in Figure 23 A The relationship of focus face and focal length is identical as Figure 20 A, and detection image Im1 shown in portion (A) of Figure 24 is identical as the portion (A) of Figure 21.

Detection image Im1 namely based on image detection movement Cm1 is mostly flat based on more flat image detection operation Cmm Face detection image Imm distinguishes focus in certain of focal length D1, D2, D3 with position 91,92,93 corresponding region I91, I92, I93 It is a, it is detected as brighter and distinct image.

The mono-plane images detection operation Cms of focal length D3 is executed in image detection movement Cm2 in portion (B) of Figure 22, Image detection is carried out with phase theta 3 in a cycle of driving signal Cf.

In Figure 23 B, image detection movement Cm2 mono-plane images detection operation Cms in, focus in D3 pairs of focal length The focus face P3 answered, the position 93 of measurement object object 9 is under focus state by image detection.

In portion (B) of Figure 24, the detection image Im2 based on image detection movement Cm2 is dynamic based on mono-plane images detection Make the monoplane detection image Ims of Cms, region I93 corresponding with position 93 is detected in the state of focus, as brighter Distinct image is detected.On the other hand, with position 91,92 corresponding region I91, I92 due in the state deviateed from focus It is lower to be detected, so being detected respectively according to the distance away from focus face P3 as darker and feint image.

In detection image Im2, boundary line I94 and boundary line I95 are due to for darker region I91 and brighter region The boundary of I93 and the boundary of darker region I92 and brighter region I93, so can be respectively as distinct image quilt Detection.

In this way, being set by the focal length for carrying out mono-plane images detection operation Cms using composite mode and being appropriately performed It is fixed, in the high-precision of the part for ensuring to need while it can will shorten the processing time.

(effect of embodiment)

According to embodiments described above, following such effect can be obtained.

It in the present embodiment, can be based on the image detection condition set by image detection condition configuration par 711, lens 6 focusing variable lens of control unit (liquid lens unit 3 and object lens 2) are controlled, and carry out image inspection by image detection portion 4 It surveys.

At this point, it includes at least that image detection portion 4 executes repeatedly if setting composite mode as image detection condition The image detection of flat image detection operation Cmm more than 1 and at least one mono-plane images detection operation Cms recycle LPc.

As a result, the image detected under composite mode passes through more planes based on more flat image detection operation Cmm Detection image Imm, comprising focus in the image information of set whole focal lengths.But the even if image comprising other focal lengths Information, it is also not necessarily distinct.

On the other hand, in the monoplane detection image Ims based on mono-plane images detection operation Cms, about set Focal length can obtain distinct image.

Thus, in composite mode, by more flat image detection operation Cmm, it can obtain and previous more plane modes It is same as a result, and by mono-plane images detection operation Cms, can obtain by previous more flat image detection operations The unavailable higher image quality of Cmm.

In turn, under previous mode frame by frame, need to be repeated the mono-plane images detection operation of the quantity of focal length Cms, if the quantity of focal length increases, the image detection time is elongated.In contrast, under the composite mode of present embodiment, It is able to suppress the quantity (frame numbers nf) of mono-plane images detection operation Cms, the image detection time can be shortened.That is, if to 5 A focal length carries out the image detection of previous mode frame by frame, then need the 5 frame corresponding amounts of mono-plane images detection operation Cms when Between.But under composite mode, although such as only 2 focal lengths can in the image that 5 focal lengths are carried out with image detection distinctness In the case where, on the basis of ensuring the image information of 5 focal lengths with more flat image detection operation Cmm, about 2 focal lengths As long as carrying out mono-plane images detection operation Cms, adding up to can be enough with the time of 3 frame corresponding amounts.

In this way, multiple focal lengths can be obtained sufficient image product by focal length variable lens device 1 according to the present embodiment Matter, and the image detection time can be shortened.

In the present embodiment, image detection condition configuration par 711 can select monoplane mode, more plane modes, by Some of frame pattern and composite mode image detection modes can set lens control unit 6 corresponding with each image detection mode Image detection circulation.

Therefore, it can arbitrarily select based on composite mode of the invention and previous monoplane mode, more plane moulds Formula, frame by frame mode can ensure previous same image detection movement as needed, and can obtain based on of the invention The effect of composite mode.

In the focal length variable lens device 1 of present embodiment, as focal length variable lens, using according to the drive being entered Object lens 2 of the liquid lens unit 3 and configuration of dynamic signal and variations in refractive index on optical axis A identical with liquid lens unit 3 Combination.

Therefore, basic knot picture can be obtained by object lens 2, and focal length can be changed by liquid lens unit 3.By making With liquid lens unit 3, the mechanical mechanism for changing focal length is not needed, apparatus structure can be simplified.In addition, liquid Body lens unit 3 can be such that focal length changes periodically with the high speed for reaching tens kilo hertzs, additionally it is possible to be readily derived superposition More plane monitoring-network image Imm of image under multiple focal lengths, are preferred as focal length variable lens of the invention.

(variation)

In addition, the change in the range of the purpose of the present invention can be reached the present invention is not limited to embodiment above-mentioned Shape etc. includes in the present invention.

In embodiment above-mentioned, flat image detection operation Cmm more than 1 and 2 or 1 are used as composite mode The combination of a mono-plane images detection operation Cms.But as composite mode of the invention, as long as including the more planes of at least one Image detection movement Cmm and at least one mono-plane images detection operation Cms, respective quantity can arbitrarily be set.

For example, focus number np in more flat image detection operation Cmm more situation etc., being difficult to be set as more than 1 The case where flat image detection operation Cmm, is inferior, as long as more flat image detection operation Cmm of setting 2 or more.This Outside, about mono-plane images detection operation Cms, as long as also the quantity in the focus face of brighter and distinct image is set as needed Determine frame numbers nf.At this point, as the example of Figure 23, it is right by the position 93 for selecting with being clipped by 2 positions 91,92 The focus face P3 answered can carry out the inspection of 2 boundary lines I94, I95 (referring to Figure 24) with 1 mono-plane images detection operation Cms It surveys, by also carrying out setting appropriate, Neng Goushi when selecting the focus face for executing mono-plane images detection operation Cms Now further high efficiency.

In embodiment above-mentioned, in image detection condition configuration par 711, monoplane mode can be selected, put down more Surface model, frame by frame some of mode and composite mode image detections mode, but the image detection mode other than composite mode is to appoint Meaning, some of monoplane mode, more plane modes, mode frame by frame appropriate can also be omitted.

In embodiment above-mentioned, as focal length variable lens device 1 focal length variable lens and use liquid lens The combination of unit 3 and object lens 2.But the present invention is not limited to the structures, the focal length based on other principles also can be used can Become lens.