阅读说明：本技术 加热器 (Heater ) 是由 浜田修 于 2018-04-24 设计创作，主要内容包括：本发明的加热器具备：陶瓷体(1),其呈棒状或筒状且在外周面具有从前端朝向后端延伸的狭缝状的凹部(11)；以及发热电阻体(2),其埋设于陶瓷体(1)的内部。并且,发热电阻体(2)包括并列配置的第一电阻体(21)以及第二电阻体(22)。另外,发热电阻体(2)具有：第一区域(31),在该第一区域中,第一电阻体(21)以及第二电阻体(22)在陶瓷体(1)的前端与后端之间沿着周向并行地来回往复折返；以及第二区域(32),其是接近狭缝状的凹部(11)的区域,且在第二区域中仅往复有第一电阻体(21)。(Heater of the invention has: ceramic body (1), has the recess portion (11) of the slit-shaped extended from front end towards rear end in rodlike or tubular and in outer peripheral surface；And heating resistor (2), it is embedded in the inside of ceramic body (1).Also, heating resistor (2) includes the first resistor body (21) and second resistance body (22) configured side by side.In addition, heating resistor (2) includes first area (31), in the first area, first resistor body (21) and second resistance body (22) the circumferentially concurrently reciprocating and turning-back back and forth between the front and rear end of ceramic body (1)；And second area (32), it is and only back and forth to have first resistor body (21) in the second area close to the region of the recess portion (11) of slit-shaped.)

1. a kind of heater, wherein have:

Ceramic body has the recess portion of the slit-shaped extended from front end towards rear end in rodlike or tubular and in outer peripheral surface；And

Heating resistor is embedded in the inside of the ceramic body,

The heating resistor includes the first resistor body and second resistance body configured side by side, and includes first area, at this In first area, the first resistor body and the second resistance body the front end of the ceramic body and the rear end it Between circumferentially concurrently reciprocating and turning-back back and forth；And second area, be close to the region of the recess portion of the slit-shaped, and Only back and forth there is the first resistor body in the second area.

2. heater according to claim 1, wherein

The resistance value of the first resistor body is smaller than the resistance value of the second resistance body.

3. heater according to claim 1 or 2, wherein

The line width of the first resistor body is thicker than the line width of the second resistance body.

4. heater according to claim 1 or 2, wherein

The resistivity of second resistance body described in the resistivity ratio of the first resistor body is small.

5. heater according to any one of claim 1 to 4, wherein

The first resistor body is with the recess portion close to the slit-shaped and line width gradually or periodically attenuates.

6. heater according to any one of claim 1 to 5, wherein

The first resistor body is with the recess portion close to the slit-shaped and the interval between pattern gradually or periodically narrows.

Technical field

The present invention relates to heated in fluid, powder heating, gas heating, lambda sensor, heater used in soldering iron etc..

Background technique

In the past, it is known that a kind of heater is configured to have: ceramic body, in rodlike or tubular and outer peripheral surface have from The recess portion for the slit-shaped that front end extends towards rear end；And heating resistor, it is embedded in the inside of the ceramic body, and generate heat Resistor body includes the first resistor body and second resistance body configured side by side.

Summary of the invention

Heater of the invention has: ceramic body, has in rodlike or tubular and in outer peripheral surface from front end towards rear end The recess portion of the slit-shaped of extension；And heating resistor, it is embedded in the inside of the ceramic body.The heating resistor includes The first resistor body and second resistance body configured side by side.In addition, heating resistor includes first area, in the first area In, the first resistor body and the second resistance body are between the front end and the rear end of the ceramic body along week To concurrently reciprocating and turning-back back and forth；And second area, it is close to the region of the recess portion of the slit-shaped, and in secondth area Only back and forth there is the first resistor body in domain.

Detailed description of the invention

Fig. 1 is the brief perspective views for showing an example of heater.

Fig. 2 is the fragmentary perspective cross sectional view of heater shown in FIG. 1.

Fig. 3 is the cross-sectional view cut off with III-III line shown in FIG. 1.

Fig. 4 is the expanded view for showing the pattern of heating resistor shown in FIG. 1.

Fig. 5 is the expanded view for showing the pattern of another heating resistor of heater.

Fig. 6 is the expanded view for showing the pattern of another heating resistor of heater.

Fig. 7 is the expanded view for showing the pattern of another heating resistor of heater.

Specific embodiment

Previous heater is not in the structure of the recess arrangement heating resistor of the slit-shaped of ceramic body.Therefore, it is rising Wen Shi, temperature near the recess portion of slit-shaped lower than surrounding position temperature to generate temperature gradient, if applying thermal cycle, It is possible that generating micro-crack on ceramic body because of thermal stress.Moreover, crackle further develops, it is possible to lead to heating resistor It is nearby that starting point generates broken string etc. with the recess portion of slit-shaped, so that there are problems for durability.

In addition, in recent years, seeking the faster heater of heating rate, needing to further increase the durability of heater.

The present invention has been made in view of the above-described circumstances, it is intended that provide be able to suppress heating resistor broken string, And the heater of excellent in te pins of durability.

Hereinafter, being illustrated referring to an example of attached drawing to the heater of present embodiment.

Fig. 1 is the brief perspective views for showing an example of heater, and Fig. 2 is that the local cutting of heater shown in FIG. 1 is three-dimensional Figure.In addition, Fig. 3 is the cross-sectional view cut off with III-III line shown in FIG. 1.In addition, Fig. 4 is to show fever shown in FIG. 1 The expanded view of the pattern of resistor body.

Heater of the invention shown in FIG. 1 to FIG. 4 has: ceramic body 1, has in rodlike or tubular and in outer peripheral surface The recess portion 11 of the slit-shaped extended from front end towards rear end；And heating resistor 2, it is embedded in the inside of ceramic body 1.Separately Outside, heating resistor 2 includes the first resistor body 21 and second resistance body 22 configured side by side.Moreover, heating resistor 2 has First area 31, in the first area 31, first resistor body 21 and second resistance body 22 are in the front and rear end of ceramic body 1 Between circumferentially concurrently reciprocating and turning-back back and forth.Moreover, in addition, heating resistor 2 is close also with second area 32 The region of the recess portion 11 of slit-shaped, and only back and forth have first resistor body 21 in second area 32.

Ceramic body 1 is rodlike or tubular the component with length direction.As rodlike, for example, it is cylindric or Prism-shaped etc..It should be noted that mentioned herein is rodlike for example, it also includes the plate extended along specific direction.Separately Outside, as tubular, for example, cylindric or square tube shape.In the heater of this example, ceramic body 1 is cylindrical shape.Pottery The length of porcelain body 1 is for example set as 20~60mm.Ceramic body 1 is the outer diameter of section cylindrical shape or ceramic body 1 is section round When diameter be for example set as 2.5~5.5mm.

In the case where ceramic body 1 is tubular (cylindrical shape), so that the inner peripheral surface or outer peripheral surface of heating object and ceramic body 1 Mode of the contact to be heated uses heater.In addition, ceramic body 1 be it is rodlike in the case where so that heating object with Mode of the periphery face contact of ceramic body 1 to be heated uses heater.

Ceramic body 1 is made of the ceramic material of insulating properties.As the ceramic material of insulating properties, for example, oxidation Aluminium, silicon nitride or aluminium nitride.From with oxidative resistance and this point easy to manufacture consideration, aluminium oxide can be used, from it is high-intensitive, High tenacity, high-insulativity and excellent heat resistance this point consider, silicon nitride can be used, examine from excellent thermal conductivity this point Consider, aluminium nitride can be used.It should be noted that the change of metallic element contained by heating resistor 2 can be contained in ceramic body 1 Object is closed, such as in the case where heating resistor 2 contains tungsten or molybdenum, WSi can be contained in ceramic body 1₂Or MoSi₂。

In addition, ceramic body 1 for example with rodlike or tubular core material 12 and the side to cover core material 12 in a manner of set The surface section 13 set.In addition, ceramic body 1 has the recess portion 11 of the slit-shaped extended from front end towards rear end in outer peripheral surface.Here, The depth (thickness of surface section 13) of recess portion 11 is for example set as 0.1~1.5mm.In addition, the opening width of recess portion 11 is for example set as 0.3~2mm.It should be noted that opening width refers to, in the case where ceramic body 1 is cylindric section or section round, Along the length of a curve of outer diameter in the cross section of ceramic body 1.

Heating resistor 2 is embedded in the inside of ceramic body 1.The case where ceramic body is made of core material 12 and surface section 13 Under, heating resistor 2 for example configures between core material 12 and surface section 13.

Heating resistor 2 is generated heat by electric current flowing, thus heating ceramic body 1.Heating resistor 2 is for example by with tungsten (W), dystectic metal such as molybdenum (Mo), rhenium (Re) electric conductor as main component is constituted.For the size of heating resistor 2, For example, width can be set as 0.3~2mm, thickness is set as 0.01~0.1mm, by the length of whole heating resistors 2 It is added obtained overall length and is set as 500~5000mm.Above-mentioned size according to the heating temperature of heating resistor 2 and can be applied It is added on voltage of heating resistor 2 etc. and is appropriately configured.

In addition, heating resistor 2 configures in such a way that the front end side in ceramic body 1 most generates heat.Shown in FIG. 1 to FIG. 4 In example, heating resistor 2 has return portion (snake portion), alongst turns back repeatedly in the front end side of ceramic body 1 And circumferentially it is arranged.In addition, heating resistor 2 becomes a pair of of straight part, and each straight part in the rear end side of return portion Rear end be electrically connected with aftermentioned lead division.The shape in the cross section of heating resistor 2 can appoint for circle, ellipse, rectangle etc. The shape of meaning.In heating resistor 2, return portion is not the pattern only turned back repeatedly in front end side, is also possible in front end side The pattern reciprocal back and forth between rear end side.It should be noted that the detailed pattern about heating resistor 2 will be aftermentioned.

In heating resistor 2, a pair of return portion and rear end side that identical material formation front end side can be used is straight Linear portion.In addition, the area of section of straight part can be made to be greater than the section face of return portion in order to inhibit unnecessary fever Product, or the content of the material of ceramic body 1 contained by straight part is reduced, to make the resistance value of the per unit length of straight part Less than the resistance value of the per unit length of return portion.

Lead division is embedded in the rear end side of ceramic body 1.Lead division is for example made of via conductors, one end and heating electric The rear end of resistance body 2 is electrically connected and the other end be drawn out to ceramic body 1 rear end side side.Lead division can by with heating electric The identical material of resistance body 2 is constituted, and can also be made of the resistance value material lower than the resistance value of heating resistor 2.It needs to illustrate , lead division is omitted in Fig. 4.

Electrode pad 5 has been set as needed in the side of the rear end side of ceramic body 1, the electrode pad 5 and has been embedded in pottery The lead division of the inside of porcelain body 1 is electrically connected.Moreover, electrode pad 5 is engaged with lead terminal, thus with external circuit (external electrical Source) electrical connection.The example shown in FIG. 1 to FIG. 4, the position for drawing lead division have at 3, and each position is provided with electrode pad 5. Here, at the 3 of Fig. 4 in electrode pad 5, via lead division with 22 this both sides's of first resistor body 21 and second resistance body What one end connected is the first pad 51 as shared pad, is connect via lead division with the other end of first resistor body 21 It is the second pad 52, what is connect via lead division with the other end of second resistance body 22 is third pad 53.

Electrode pad 5 for example can be only made of the conductor layer comprising molybdenum (Mo) or tungsten (W), can also be in the conductor layer The coating layer being for example made of Ni-B or Au is arranged in surface.For the electrode pad 5, for example, 50~300 μm of thickness, and incite somebody to action Length and width are set as such as 5~10mm.

Moreover, as shown in figure 4, heating resistor 2 includes the first resistor body 21 and second resistance body 22 configured side by side. It include the first resistor body 21 and second resistance body 22 configured side by side by heating resistor 2, so as to use temperature In lower situation, only the heating resistor (such as first resistor body 21) of Xiang Yifang applies voltage to inhibit calorific value, or Apply in the case where lower use at higher temperature, while to multiple heating resistors (first resistor body 21 and second resistance body 22) Voltage is to improve calorific value.That is, calorific value can be easily adjusted.

In addition, heating resistor 2 includes first area 31, and in the first area 31, first resistor body 21 and second The circumferentially concurrently reciprocating and turning-back back and forth between the front and rear end of ceramic body 1 of resistor body 22；And second area 32, It is only back and forth to have first resistor body 21 close to the region of the recess portion 11 of slit-shaped, and in the second area 32.

At this point, the pattern as the heating resistor 2 in first area 31, first resistor body 21 is configured in ceramic body 1 Front end side, second resistance body 22 is concurrently configured along the first resistor body 21 in rear end side, and make first resistor body 21 And the circumferentially reciprocating and turning-back back and forth between the front and rear end of ceramic body 1 of second resistance body 22.In addition, as second area The pattern of heating resistor 2 in 32, only back and forth there is first resistor body 21, with the first resistor body 21 for being located at first area 31 Together respectively close to the two sides of the recess portion of slit-shaped 11, to be configured with 3 first resistor bodies 21.

It is not to be configured to only back and forth have the previous of first resistor body 21 in the region close to the recess portion 11 of slit-shaped In structure, heating when, even if first first resistor body 21 is heated, due to first resistor body 21 with the recess portion close to slit-shaped It is reciprocal in the separate region in 11 region, therefore the temperature near the recess portion 11 of slit-shaped is lower, the recess portion far from the slit-shaped The temperature in the region near 11 is higher, to be difficult to make the temperature distribution homogenization of the outer peripheral surface of heater.

In contrast, heater according to the present invention, first heats first resistor body 21 in heating, to only back and forth have Temperature near the second area 31 of the first resistor body 21 and the recess portion 11 of slit-shaped increases.Therefore, when can make heating Heater outer peripheral surface temperature distribution homogenization, to mitigate thermal stress and then improve durability.

In addition, according to this structure, as shown in figure 4, most due to the electric current from the first pad 51 supply as shared pad The distance between the return portion of the first resistor body 21 first reached and the return portion of second resistance body 22 farther out, therefore can will be applied It is added on the thermal stress dispersion of each return portion, to improve the durability of heater.

Here it is possible to which the resistance value of first resistor body 21 is set as the resistance value less than second resistance body 22.If resistance value Smaller then electric current increases, therefore the heat generated becomes larger.Therefore, the heating rate near the recess portion 11 of slit-shaped becomes faster, thus Make the temperature distribution homogenization of the outer peripheral surface of heater, and mitigate thermal stress, therefore durability improves.

As make the resistance value of first resistor body 21 be less than second resistance body 22 resistance value method, such as such as Fig. 5 institute Show, the line width of first resistor body 21 can be used than the structure of the line width thick (width) of second resistance body 22.At this point, by second resistance The line width of body 22 is set as such as 1.1~1.5 times of the line width of first resistor body 21.It should be noted that discerning whether as this It is non-constant in entire scope in the line width of first resistor body 21 when the structure of sample, and the line width of second resistance body 22 is in entirety In the case where being constant in range, by the line width of the line width at the position of most thin (narrow) of first resistor body 21 and second resistance body 22 It compares.In addition, the line width in second resistance body 22 is non-constant in entire scope, and the line width of first resistor body 21 is whole In the case where being constant within the scope of body, by the line of the line width at the position of most thick (width) of second resistance body 22 and first resistor body 21 Width compares.In addition, the feelings all non-constant in entire scope in the line width of first resistor body 21 and second resistance body 22 Under condition, by the line width of the line width at the position of most thin (narrow) of first resistor body 21 and the position of most thick (width) of second resistance body 22 It compares.

In addition, as make the resistance value of first resistor body 21 be less than second resistance body 22 resistance value method, can also be with It is less than the structure of the resistivity of second resistance body 22 using the resistivity of first resistor body 21.At this point, by first resistor body 21 Resistivity is set as such as the 20~80% of second resistance body 22.In order to become such relationship, it is, for example, possible to use tungsten-molybdenums to close The materials such as gold use the materials such as tungsten-rhenium alloy as second resistance body 22 as first resistor body 21.In addition, conductor material phase Together, even if insulating materials identical with ceramic body 1 to the addition of second resistance body 22 than first resistor body more than 21, the can also be made The resistivity of the resistivity ratio second resistance body 22 of one resistor body 21 is small.

In addition, as shown in Figure 6, or, as first resistor body 21 is close to the recess portion 11 of slit-shaped, line width is gradually Ground periodically attenuates and (narrows).If there are the part (portions that the area of section becomes smaller that line width attenuates in first resistor body 21 Point), then compared with other parts, become larger in the heat that the part that the line width attenuates generates.Only back and forth there is first resistor body as a result, Temperature near 21 second area 31 and the recess portion 11 of slit-shaped increases, to make the Temperature Distribution of the outer peripheral surface of heater Homogenization mitigates thermal stress and improves durability.

It can discern whether in the following manner as such structure: for example, comparison first resistor body 21 is farthest away from narrow The position (central portion in Fig. 6) of the recess portion 11 of gap-like, positioned at first area 31 and the intersection of second area 32 position, connect This line width at three of the position of the recess portion 11 of nearly slit-shaped.At this point, each position refers to the position in the circumferential direction of ceramic body 1, In In the case that the position at circumferential position is identical and line width changes along its length, the line of the front end in measured length direction Wide, center line width and the line width of rear end are simultaneously equalized, the line by thus obtained value as the position in the circumferential direction Width is distinguished.

It should be noted that the line width of second resistance body 22 is constant in entire scope, second in Fig. 6 In region 32, it is located adjacent to recess portion 11 of the line width of the first resistor body 21 of 11 side of recess portion of slit-shaped than being located remotely from slit-shaped The line width of the first resistor body 21 of side is thin.Moreover, even the line width at position most thin in first resistor body 21, also more electric than second The line width of resistance body 22 is thick (width).Thereby, it is possible to further increase the heat generated near the recess portion 11 of slit-shaped.

But as first resistor body 21 is close to the recess portion 11 of slit-shaped, line width gradually or periodically becomes The form carefully (to narrow), it is not limited to which form shown in fig. 6, the line width that can be used for first resistor body 21 compare second resistance The case where line width of body 22 thin (narrow).At this point it is possible to be the line width of first resistor body 21 in entire scope internal ratio second resistance body 22 line width is thin (narrow).Alternatively, it is also possible to be configured to, farthest away from position (Fig. 6 of the recess portion of slit-shaped 11 in first resistor body 21 In central portion) line width it is thicker than the line width of second resistance body 22 (width), closest to the recess portion of slit-shaped in first resistor body 21 The line width at 11 position (the most thin position of line width) is thinner (narrow) than the line width of second resistance body 22.

In addition, as shown in Figure 7, or, as first resistor body 21 is close to the recess portion 11 of slit-shaped, between pattern Interval gradually or periodically narrows.If the narrower intervals between pattern, first resistor body 21 is closely configured, thus The heat that the region generates becomes larger.With this configuration, can also make the second area 31 for only back and forth having first resistor body 21 and Temperature near the recess portion 11 of slit-shaped increases, to make the temperature distribution homogenization of the outer peripheral surface of heater, mitigates thermal stress And improve durability.

Next, being illustrated to an example of the manufacturing method of heater.It should be noted that in this example, to ceramics The case where body is made of aluminum oxide ceramics is illustrated.

Firstly, in order to make by with Al₂O₃The ceramic body 1 that aluminum oxide ceramics as main component are constituted, makes Al₂O₃Contain There is SiO₂、CaO、MgO、ZrO₂Equal sintering aids are modulated, and thus obtained ceramic slurry are configured to sheet, to make The ceramic green sheet of surface section 13 as ceramic body 1.

In the interarea of a side of the ceramic green sheet, the electricity of heating resistor 2 is formed into using the methods of silk-screen printing The pattern of resistance body cream.In addition, in the face with the face opposite side for forming heating resistor 2 of ceramic green sheet, with heating resistor 2 Formation similarly, by become electrode pad 5 conductor paste be formed as defined pattern form.In addition, being carried out in ceramic green sheet The filling of hole machined and conductor paste, the hole machined are used to for heating resistor 2 being electrically connected with electrode pad 5, the conductor paste Filling is used to form the via conductors as lead division.

Here, the pattern of heating resistor 2 carries out pattern in the following manner and is formed, for example, as shown in figure 4, from shared pad 51 configure the pattern of multiple resistor bodies (including first resistor body 21 and second resistance body) side by side, and the figure of multiple resistor bodies is arranged Case reciprocal first area 31 back and forth up and down, and up and down reciprocatingly with the pattern of only outermost resistor body (first resistor body 21) Mode second area 32 is set.

Resistor body cream and conductor paste can make by the following method: to can by with ceramic body while firing and The refractory metals such as W, Mo, Re of production blending ceramic raw material, adhesive, organic solvent etc. are simultaneously kneaded.At this point, according to adding The purposes of hot device, change become resistor body resistor body cream or the length of pattern of conductive paste, the distance for pattern of turning back or between Every and pattern line width, so as to which the sites of heat generation of heating resistor 2, resistance value are set as desired value.

On the other hand, by extrusion molding, molding become the cylindric or cylindric aluminum oxide ceramics of core material 12 at Type body.

Then, it is dispersed with the closely sealed liquid of the aluminum oxide ceramics of same composition to the core material 12 coating, will become above-mentioned The aluminum oxide ceramic green sheet of surface section 13 winds and is sealed at the core material 12, so as to obtain the oxidation as ceramic body 1 Aluminum is integrally formed body.

It should be noted that the slit-shaped extended along its length is arranged for the outer peripheral surface (side) in ceramic body 1 Recess portion 11 (groove portion), between being arranged between the end and end of the aluminum oxide ceramic green sheet (surface section 13) for being wound in core material 12 Gap.

The aluminum oxide obtained in this way is integrally formed body in the mixed gas (shaping gas) of hydrogen or nitrogen and hydrogen It is for example burnt into equal non-oxidizing gas environment with 1500~1600 DEG C, and in the electrode pad of the outer peripheral surface of ceramic body 15 On for example by electrolytic coating be arranged Ni plated film, to make aluminum oxide one sintered body.

In addition, use Ag solder, scolding tin etc. as solder, by as the lead terminal of power supply being for example made of Ni with Electrode pad 5 engages.Insulating materials can be coated in lead terminal in advance, and only remove the insulating materials of part needed for engagement It removes, then connect the part for eliminating insulating materials with electrode pad 5.Alternatively, it is also possible to by Ni line and electrode pad 5 After connection, insulation tube is set in Ni line.

The heater of present embodiment can be obtained by above method.

Description of symbols

1: ceramic body

11: the recess portion of slit-shaped

12: core material

13: surface section

2: heating resistor

21: first resistor body

22: second resistance body

31: first area

32: second area

5: electrode pad

51: the first pads

52: the second pads

53: third pad.