阅读说明：本技术 一种用于晶硅粗磨精磨一体机的磨削主轴及其使用方法 (A kind of grinding spindle and its application method for roughly grinding fine grinding all-in-one machine for crystal silicon ) 是由 郭世锋 徐公志 王永华 尹美玲 于 2019-09-17 设计创作，主要内容包括：本发明涉及一种用于晶硅粗磨精磨一体机的磨削主轴及其使用方法,属于晶硅加工设备技术领域,包括粗磨主轴机构和精磨主轴机构,所述粗磨主轴机构包括粗磨头组件和与粗磨头组件连接的粗磨主轴组件,所述精磨主轴机构包括精磨头组件和与精磨头组件连接的精磨主轴组件,精磨主轴机构套设在粗磨主轴机构中并与所述驱动组件相连接,用于对晶硅进行粗磨和精磨,可在晶硅的同一位置进行粗磨及精磨加工,精磨加工余量减小,效率极大提高,具有广阔的市场前景。(The present invention relates to a kind of grinding spindles and its application method that fine grinding all-in-one machine is roughly ground for crystal silicon, belong to crystal silicon technical field of processing equipment, including corase grinding mainshaft mechanism and fine grinding mainshaft mechanism, the corase grinding mainshaft mechanism includes the corase grinding spindle assemblies roughly grinding head assembly and connecting with corase grinding head assembly, the fine grinding mainshaft mechanism includes the fine grinding spindle assemblies for refining head assembly and connecting with fine grinding head assembly, fine grinding mainshaft mechanism is set in corase grinding mainshaft mechanism and is connected with the driving component, for being roughly ground and being refined to crystal silicon, corase grinding and fine grinding can be carried out in the same position of crystal silicon, fine grinding surplus reduces, efficiency is greatly improved, it has a vast market foreground.)

1. a kind of grinding spindle for roughly grinding fine grinding all-in-one machine for crystal silicon, which is characterized in that including corase grinding mainshaft mechanism and fine grinding Mainshaft mechanism, the corase grinding mainshaft mechanism includes the corase grinding spindle assemblies roughly grinding head assembly (1) and connecting with corase grinding head assembly (1) (2), the fine grinding mainshaft mechanism includes the fine grinding spindle assemblies (4) for refining head assembly (3) and connecting with fine grinding head assembly (3), Fine grinding mainshaft mechanism is set in corase grinding mainshaft mechanism and is connected with the driving component (5), for roughly grinding to crystal silicon And fine grinding.

2. a kind of grinding spindle for roughly grinding fine grinding all-in-one machine for crystal silicon according to claim 1, which is characterized in that described Roughly grinding spindle assemblies (2) includes corase grinding main shaft (201), and the fine grinding spindle assemblies (4) include fine grinding main shaft (401) and eccentric shaft (402), the fine grinding main shaft (401) is sheathed in corase grinding main shaft (201), and rotates coaxially with corase grinding main shaft (201), described thick The end of mill main shaft (201) is provided with belt pulley (202), and main shaft compressed spring, and its are arranged with outside the fine grinding main shaft (401) It is connected with corase grinding main shaft (201), the eccentric shaft (402) is along perpendicular with corase grinding main shaft (201) and fine grinding main shaft (401) Direction setting.

3. a kind of grinding spindle for roughly grinding fine grinding all-in-one machine for crystal silicon according to claim 2, which is characterized in that described Corase grinding main shaft (201) on be provided with accommodate main shaft compressed spring (403) spring fixing groove (404), the one of the compressed spring End offsets with spring fixing groove (404), and the other end and fine grinding main shaft (401) are connected.

4. a kind of grinding spindle for roughly grinding fine grinding all-in-one machine for crystal silicon according to claim 3, which is characterized in that described The end of fine grinding main shaft (401) is provided with thrust bearing (405), and the eccentric shaft (402) makes with thrust bearing (405) cooperation With the periphery of the thrust bearing (405) is equipped with bearing (ball) cover.

5. a kind of grinding spindle for roughly grinding fine grinding all-in-one machine for crystal silicon according to claim 4, which is characterized in that described Fine grinding head assembly (3) is sheathed in corase grinding head assembly (1) comprising finishing wheel (301), the corase grinding head assembly (1) include Rough grinding wheel (101), the finishing wheel (301) and fine grinding main shaft (401) are connected, and the rough grinding wheel (101) and corase grinding are led Axis (201) is connected.

6. a kind of grinding spindle for roughly grinding fine grinding all-in-one machine for crystal silicon according to claim 4 or 5, which is characterized in that The driving component (5) includes grinding wheel rotating electric machine (501) and finishing wheel extension and contraction control motor (502), the grinding wheel rotation The output end of motor (501) is connect with corase grinding main shaft (201), for driving corase grinding main shaft (201) and fine grinding main shaft (401) to turn Dynamic, the output end of the finishing wheel extension and contraction control motor (502) is connect with eccentric shaft (402), driving eccentric shaft (402) rotation To push the end of fine grinding main shaft (401) to the end motion far from eccentric shaft (402), realize that finishing wheel (301) protrude from Plane where roughing heads, for carrying out fine grinding operation to crystal silicon.

7. a kind of grinding spindle for roughly grinding fine grinding all-in-one machine for crystal silicon according to claim 6, which is characterized in that corase grinding Main shaft (201) and fine grinding main shaft (401) are realized by spline or flat key rotates driving.

8. a kind of grinding spindle for roughly grinding fine grinding all-in-one machine for crystal silicon according to claim 7, which is characterized in that described Fine grinding main shaft (401) and driving assembly (5) are each attached on fixing seat (6).

9. a kind of application method for the grinding spindle of crystal silicon corase grinding fine grinding all-in-one machine as claimed in claim 8, feature It is, comprising the following steps:

S1: when original state, finishing wheel (301) is located at rough grinding wheel (101) inside, and grinding wheel rotating electric machine (501) starts, slightly Grinding abrasive disk (101) carries out roughing operations to crystal silicon.

S2: finishing wait roughly grind, and refines drive control electric motor starting, and eccentric shaft (402) rotate driving refines main shaft (401) to separate One end motion of eccentric shaft (402), finishing wheel (301) protrude from the plane where rough grinding wheel (101), carry out essence to crystal silicon Mill.

Technical field

The invention belongs to crystal silicon technical field of processing equipment, relate in particular to a kind of for crystal silicon corase grinding fine grinding all-in-one machine Grinding spindle and its application method.

Background technique

Crystal silicon needs to carry out flour milling to the silicon single crystal rod after butt and polish chamfering, usual bistrique master before slicing process A grinding wheel (rough grinding wheel or finishing wheel) is respectively mounted on axle unit, the corase grinding that certainly will lead to silicon rod and fine grinding be not a position It sets, needs bigger fine grinding surplus that can just guarantee the processing of workpiece due to the variation of Working position, when leading to refine silicon rod, Grinding allowance how can be reduced, and more energy-efficient to carry out grinding to crystal silicon be our problems to be solved.

Summary of the invention

For various deficiencies of the prior art, a kind of mill for refining mainshaft mechanism and being set in corase grinding mainshaft mechanism is now provided Cut main shaft.

To achieve the above object, the invention provides the following technical scheme:

A kind of grinding spindle for roughly grinding fine grinding all-in-one machine for crystal silicon, including corase grinding mainshaft mechanism and fine grinding mainshaft mechanism, The corase grinding mainshaft mechanism includes the corase grinding spindle assemblies roughly grinding head assembly and connecting with corase grinding head assembly, the fine grinding main shaft machine Structure includes the fine grinding spindle assemblies for refining head assembly and connecting with fine grinding head assembly, and fine grinding mainshaft mechanism is set in corase grinding main shaft machine It is connected in structure and with the driving component, for being roughly ground and being refined to crystal silicon.

Further, the corase grinding spindle assemblies include corase grinding main shaft, and the fine grinding spindle assemblies are including fine grinding main shaft and partially Mandrel, the fine grinding collar bush are set in corase grinding main shaft, and are rotated coaxially with corase grinding main shaft, the main the tip of the axis setting of corase grinding Have a belt pulley, the fine grinding spindle jacket is equipped with main shaft compressed spring, and it is connected with corase grinding main shaft, the eccentric shaft along with It roughly grinds main shaft and refines the perpendicular direction setting of main shaft.

Further, the spring fixing groove for accommodating main shaft compressed spring, the compressed spring are provided on the corase grinding main shaft One end offset with spring fixing groove, the other end and fine grinding main shaft be connected.

Further, the main the tip of the axis of fine grinding is provided with thrust bearing, and the eccentric shaft is used cooperatively with thrust bearing, The periphery of the thrust bearing is equipped with bearing (ball) cover.

Further, the fine grinding head assembly is sheathed in corase grinding head assembly comprising finishing wheel, the corase grinding head assembly Including rough grinding wheel, the finishing wheel and fine grinding main shaft are connected, and the rough grinding wheel and corase grinding main shaft are connected.

Further, the driving component includes grinding wheel rotating electric machine and finishing wheel extension and contraction control motor, the grinding wheel rotation The output end of rotating motor is connect with corase grinding main shaft, and for driving corase grinding main shaft and fine grinding main axis, the finishing wheel is flexible The output end of control motor and eccentric axis connection drive eccentric shaft turns to push the main the tip of the axis of fine grinding to separate eccentric shaft One end motion realizes that finishing wheel protrudes from the plane where roughing heads, for carrying out fine grinding operation to crystal silicon.

Further, corase grinding main shaft and fine grinding main shaft pass through spline or flat key realization rotation driving.

Further, the fine grinding main shaft and driving assembly are each attached in fixing seat.

In addition, the present invention also provides a kind of application methods of grinding spindle that fine grinding all-in-one machine is roughly ground for crystal silicon, including with Lower step:

S1: when original state, finishing wheel is located inside rough grinding wheel, and the starting of grinding wheel rotating electric machine, rough grinding wheel is to crystalline substance Silicon carries out roughing operations.

S2: finishing wait roughly grind, and refines drive control electric motor starting, and eccentric shaft turns driving fine grinding is main axially away from eccentric shaft An end motion, finishing wheel protrudes from the plane where rough grinding wheel, refines to crystal silicon.

The beneficial effects of the present invention are:

1, fine grinding collar bush is set in corase grinding main shaft, drives fine grinding main shaft and corase grinding main axis by the way that belt pulley is synchronous, It may be implemented in same position to process crystal silicon, workpiece accuracy is greatly improved.

2, can the same position to crystal silicon carry out respectively corase grinding and fine grinding, fine grinding surplus is small, and processing efficiency It is greatly improved.

3, rough grinding wheel and finishing wheel are switched over by finishing wheel extension and contraction control motor, due to the height of grinding position Degree is integrated, and equipment can be made compact to design, greatly reduce the occupied area of equipment, be conducive to the layout of workshop appliance.

4, the rotation of rough grinding wheel and finishing wheel need to only be driven by grinding wheel rotating electric machine, and cost can be greatly reduced.

Detailed description of the invention

Fig. 1 is overall structure diagram of the invention；

Fig. 2 is cross-sectional view of the invention.

In attached drawing: 1- roughly grinds head assembly, 101- rough grinding wheel, 2- corase grinding spindle assemblies, 201- and roughly grinds main shaft, 202- belt Wheel, 3- fine grinding head assembly, 301- finishing wheel, 4- fine grinding spindle assemblies, 401- refine main shaft, 402- eccentric shaft, 403- main shaft Compressed spring, 404- spring fixing groove, 405- thrust bearing, 5- driving assembly, 501- grinding wheel rotating electric machine, 502- finishing wheel Extension and contraction control motor, 6- fixing seat.

Specific embodiment

It is right below with reference to attached drawing of the invention in order to make those skilled in the art more fully understand technical solution of the present invention Technical solution of the present invention carries out clear, complete description, and based on the embodiment in the application, those of ordinary skill in the art exist Other similar embodiments obtained under the premise of creative work are not made, shall fall within the protection scope of the present application. In addition, the direction word mentioned in following embodiment, such as "upper" "lower" " left side " " right side " etc. are only the directions with reference to attached drawing, because This, the direction word used is for illustrative and not limiting the invention.

The invention will be further described with preferred embodiment with reference to the accompanying drawing.

Referring to Fig.1-2, a kind of grinding spindle for roughly grinding fine grinding all-in-one machine for crystal silicon, including corase grinding mechanism, fine grinding mechanism With driving assembly 5, the corase grinding mechanism includes the corase grinding spindle assemblies 2 roughly grinding head assembly 1 and connecting with corase grinding head assembly 1, institute Stating fine grinding mechanism includes the fine grinding spindle assemblies 4 for refining head assembly 3 and connecting with fine grinding head assembly 3, and fine grinding mechanism is set in slightly It is connected in grinding machine structure and with driving assembly 5, for being roughly ground and being refined to crystal silicon.

The fine grinding head assembly 3 is sheathed in corase grinding head assembly 1.The fine grinding head assembly 3 includes finishing wheel 301, institute Stating corase grinding head assembly 1 includes rough grinding wheel 101, and the finishing wheel 301 is sheathed in rough grinding wheel 101.

The corase grinding spindle assemblies 2 include corase grinding main shaft 201, and the fine grinding spindle assemblies 4 are including fine grinding main shaft 401 and partially Mandrel 402, the fine grinding main shaft 401 is sheathed in the corase grinding main shaft 201 and rotates coaxially with corase grinding main shaft 201, and the two Rotation driving is realized by spline or flat key.The head end of the corase grinding main shaft 201 is connected with rough grinding wheel 101, and its end End is connected with belt pulley 202, meanwhile, it is arranged with tensioner between the periphery and belt pulley 202 of corase grinding main shaft 201, that is to say, It is that belt pulley 202 is rotated by tensioner drive corase grinding main shaft 201, corase grinding main shaft 201 passes through spline or flat key drive fine grinding Main shaft 401 rotates.The head end of the fine grinding main shaft 401 is connected with finishing wheel 301, and end passes through tensioner and belt pulley 202 are connected, and realize that belt pulley 202 drives corase grinding main shaft 201 and fine grinding main shaft 401 to rotate synchronously.In the present embodiment, main shaft is roughly ground 201 realize rotation driving by spline with fine grinding main shaft 401.

Specifically, the spring fixing groove 404 for accommodating main shaft compressed spring 403, main shaft are provided on the corase grinding main shaft 201 Compressed spring 403 is located in spring fixing groove 404, effectively fixed main shaft compressed spring 403 can not influence its reset function again Energy.One end of the main shaft compressed spring 403 is offseted by spring fixing groove 404 and corase grinding main shaft 201, and the other end passes through gear Crab bolt and fine grinding main shaft 401 are connected.That is, refining main shaft 401 along close when main shaft compressed spring 403 is compressed The direction of finishing wheel 301 moves, and finishing wheel 301 protrudes from rough grinding wheel, when main shaft compressed spring 403 resets, fine grinding Main shaft 401 is moved along the direction far from finishing wheel 301, and finishing wheel 301 is retracted in rough grinding wheel 101.

To be provided with thrust bearing 405 in the end of the fine grinding main shaft 401 convenient for the fine grinding of finishing wheel 301 operation, The thrust bearing 405 is located at the end of fine grinding main shaft 401, and its periphery is equipped with bearing (ball) cover, the eccentric shaft 402 along Perpendicular direction is arranged with fine grinding main shaft 401 and corase grinding main shaft 201.That is, the rotation of eccentric shaft 402 passes through thrust bearing 405, so that main shaft compressed spring 403 is compressed, finishing wheel 301 is pushed out, flat where so that it is protruded from rough grinding wheel 101 Face contacts with crystal silicon and is refined；Eccentric shaft 402 stops operating, and main shaft compressed spring 403 resets, and fine grinding main shaft 401 is to close The side of eccentric shaft 402 moves, and finishing wheel 301 is retracted in rough grinding wheel 101, and rough grinding wheel 101 is contacted with crystal silicon first It is roughly ground.

The driving component 5 includes grinding wheel rotating electric machine 501 and finishing wheel extension and contraction control motor 502, the grinding wheel rotation The output end of rotating motor 501 is connected with corase grinding main shaft 201, for driving corase grinding main shaft 201 and fine grinding main shaft 401 to rotate.Specifically The output end on ground, the grinding wheel rotating electric machine 501 is connected by belt with belt pulley 202.The finishing wheel extension and contraction control The output end of motor 502 is connected with eccentric shaft 402, and the rotation of driving eccentric shaft 402 is to push the end of fine grinding main shaft 401 to remote An end motion from the eccentric shaft 402 realizes the plane that finishing wheel 301 protrudes from where rough grinding wheel 101, for crystalline substance Silicon carries out fine grinding operation.In the present embodiment, grinding wheel rotating electric machine 501 and finishing wheel extension and contraction control motor 502 are servo electricity Machine.

It is conducive to grinding preferably to fix the grinding spindle, the corase grinding spindle assemblies 2 and driving assembly 5 are each attached to bottom On seat 6.

When original state, finishing wheel extension and contraction control motor 502 is inactive, and main shaft compressed spring 403 is in free state, Finishing wheel 301 is located inside rough grinding wheel 101, that is to say, that when corase grinding, finishing wheel 301 is not located at rough grinding wheel 101 In the same face, only rough grinding wheel 101 is contacted with crystal silicon, and grinding wheel rotating electric machine 501 starts, and corase grinding sand 101 carries out crystal silicon thick Mill operation.It is finished wait roughly grind, finishing wheel extension and contraction control motor 502 starts, and driving eccentric shaft 402 rotates, to push fine grinding master Axis 401 is to the end motion close to finishing wheel 301, at this point, finishing wheel 301 protrudes from the plane where rough grinding wheel 101, And contacted with crystal silicon and crystal silicon is refined, that is to say, that when fine grinding, only finishing wheel 301 is contacted with crystal silicon.

The above has been described in detail, described above, is only a preferred embodiment of the present invention, when cannot It limit the scope of implementation of the present invention, i.e., it is all according to the made equivalent changes and modifications of the application range, it should still belong to covering scope of the present invention It is interior.