A kind of thermoelectric material Seebeck coefficient test device and method
阅读说明：本技术 一种热电材料塞贝克系数测试装置及方法 (A kind of thermoelectric material Seebeck coefficient test device and method ) 是由 王雪强 王雪刚 于 2019-10-10 设计创作，主要内容包括：本发明涉及一种热电材料塞贝克系数测试装置及方法,属于半导体测试技术领域。为克服传统测试方法中操作复杂,测试精度低的不足,本发明将被测样品置于加热器和散热器之间,利用镍铬-镍硅差分热电偶直接测量样品两端的温差。将被测样品的塞贝克电压与镍铬-镍硅差分热电偶的塞贝克电压进行比较,通过调节电压平衡回路中的可变电阻的滑臂,使电位差计指示为零,利用电压平衡的原理,可求出被测样品的塞贝克系数。本发明通过巧妙的电路设计,实现了只需对一个测试参量进行统计,提高了效率,并且不干扰被测样品的塞贝克系数,提高了精确度。本发明可用于铠装热电偶、热流密度传感器等的塞贝克系数测量,在测量大量样品时更有优势。(The present invention relates to a kind of thermoelectric material Seebeck coefficient test device and methods, belong to semiconductor test technical field.Complicated for operation in conventional test methodologies to overcome, sample is placed between heater and radiator by the low deficiency of measuring accuracy, the present invention, and the temperature difference at sample both ends is directly measured using nickel chromium triangle-nisiloy differential thermocouple.The Seebeck voltage of sample is compared with nickel chromium triangle-nisiloy differential thermocouple Seebeck voltage, by the slide arm for adjusting the variable resistance in balance of voltage circuit, so that potential difference meter is designated as zero, using the principle of the balance of voltage, the Seebeck coefficient of sample can be found out.By cleverly circuit design, need to only a test parameter be counted the present invention by realizing, and improved efficiency, and do not interfere the Seebeck coefficient of sample, improved accuracy.The present invention can be used for the Seebeck coefficient measurement of armoured thermocouple, heat-flow density sensor etc., advantageously when measuring a large amount of samples.)
1. a kind of thermoelectric material Seebeck coefficient test device characterized by comprising matrix (1), bracket (2), radiator (4), elevating mechanism (5), heater (7), pressing plate (8), automatic compacting device (9), copper conductor I (10), differential thermocouple (11), Temperature end resistance (12), variable resistance (13), potential difference meter (14), low-temperature end resistance (15), reverse switch (16)；
The side of described matrix (1) is connect with the bottom side of bracket (2), the side of pressing plate (8) and the top side of bracket (2) Connection；Several automatic compacting devices (9) are installed in the lower section of the pressing plate (8), and heater is installed in the lower section of automatic compacting device (9) (7)；The top of described matrix (1) is installed by radiator (4)；
It is connected with copper conductor I (10) between the heater (7) and radiator (4), copper conductor I (10) is successively arranged from top to bottom Temperature end resistance (12), variable resistance (13), low-temperature end resistance (15)；The slide arm and potential difference meter of the variable resistance (13) (14) one end connection, the other end of the potential difference meter (14) has copper conductor II (17) and copper conductor III (18) to draw, described There is copper conductor IV (19) extraction in the lower end of low-temperature end resistance (15)；
Two contact points of differential thermocouple (11) side are thermally contacted with heater (7) and radiator (4) respectively, while again It remains electrically isolated from, two contact points of the other side are connect with reverse switch (16)；
Two electric contacts of described reverse switch (16) side are contacted with two of the differential thermocouple (11) other side respectively Point connection, reverse two electric contacts for switching (16) other side are connect with copper conductor II (17) and copper conductor IV (19) respectively, or It is connect with copper conductor IV (19) and copper conductor III (18).
2. thermoelectric material Seebeck coefficient test device as described in claim 1, which is characterized in that the side of the bracket (2) Side is equipped with elevating mechanism (5), is used for the height of adjusting bracket (2), so that pressing plate (8) is compressed sample (6), anti-sliding stop.
3. thermoelectric material Seebeck coefficient test device as described in claim 1, which is characterized in that described matrix (1) and dissipate Ceramic wafer (3) are equipped between hot device (4), between automatic compacting device (9) and heater (7), are used for insulation protection.
4. thermoelectric material Seebeck coefficient test device as described in claim 1, which is characterized in that the automatic compacting device It (9) include pressing plate (20) and curved support plate (21), the both ends of pressing plate (20) side are equipped with opposite groove, described The both ends of curved support plate (21) are caught in the groove, stressed size are applied by adjusting, to adjust heater (7), quilt Compression degree between sample (6) and radiator (4)；The curved support plate (21) gradually increases from centre to thickness of two sides Add；The curved support plate (21) is provided with several flutings on along its length.
5. thermoelectric material Seebeck coefficient test device as described in claim 1, which is characterized in that the differential thermocouple It (11) include nichrome wire I (111), nickel silicon alloy silk (112) and nichrome wire II (113)；The nichrome wire I (111) one end is connected with one end of the nickel silicon alloy silk (112), and is thermally contacted with the heater (7), while keeping again Electrical isolation forms temperature end thermocouple；One end of the nichrome wire II (113) and the nickel silicon alloy silk (112) it is another One end connects and is embedded into radiator (4) inside, and thermally contacts with the radiator (4), while remaining electrically isolated from again, is formed low Warm end thermocouple；The other end of the nichrome wire I (111), nichrome wire II (113) the other end respectively with inversely open Close two electric contacts connection of (16) side.
6. thermoelectric material Seebeck coefficient test device as claimed in claim 5, which is characterized in that the heater (7) Material is metallic copper, and the material of the radiator (4) is metallic copper, and temperature is kept constant.
7. thermoelectric material Seebeck coefficient test device as described in claim 1, which is characterized in that the copper conductor I (10) It is electrical contact between heater (7) and radiator (4).
8. a kind of thermoelectric material Seebeck coefficient test method, using thermoelectricity material described in claim 1~7 any claim Expect Seebeck coefficient test device, which is characterized in that specific test method are as follows:
The slide arm that the variable resistance (13) are adjusted when test makes the potential difference meter (14) be designated as zero, determines at this time may be used Power transformation hinders partial ohmic value xR corresponding to the slide arm of (13)2, according to xR2Sample (6) is found out relative to differential thermocouple (11) Seebeck coefficient, it may be assumed that
In formula, ɑsrFor the Seebeck coefficient of sample (6), ɑ0For the thermoelectric power of the differential thermocouple (11), R1For The resistance value of the low-temperature end resistance (15), R2For the total resistance value of (13) two fixing end of variable resistance, R3For the high temperature Hold the resistance value of resistance (12).
9. thermoelectric material Seebeck coefficient test method as claimed in claim 8, which is characterized in that by adjusting reverse switch (16) contact locations realize the test of the Seebeck coefficient of p-type thermoelectric material and N-type thermoelectric material；
When the nichrome wire I (111) passes through the extraction copper conductor II of inversely switch (16) and the potential difference meter (14) (17) contact is formed, the nichrome wire II (113) passes through inversely switch (16) and low-temperature end resistance (15) lower end When drawing copper conductor IV (19) formation contact, measurement is N-type thermoelectric material Seebeck coefficient；
When the nichrome wire I (111) is led by inversely switching the extraction copper of (16) and low-temperature end resistance (15) lower end Line IV (19) forms contact, and the nichrome wire II (113) is drawn by inversely switch (16) and the potential difference meter (14) When copper conductor III (18) forms contact out, measurement is p-type thermoelectric material Seebeck coefficient.
Technical field
The present invention relates to semiconductor test technical field, specifically a kind of thermoelectric material Seebeck coefficient test device and Method.
Background technique
With the development of aerospace cause, the application of thermoelectric material is also increasingly taken seriously.Utilize thermoelectric material The conversion of thermal energy and electric energy may be implemented in Seebeck effect.Two distinct types of conductor or semiconductor material are connected, endpoint is worked as There are when the temperature difference, material ends can generate electromotive force at place, which is known as Seebeck effect.In pyroelectric material performance parameter testing Aspect, the accurate test of Seebeck coefficient and characterization are mostly important one of contents.
The Seebeck coefficient ɑ of materialsrIt can indicate are as follows:
In formula, Δ T is the temperature difference of material ends, VsrFor the Seebeck voltage generated in the temperature difference.
In the Seebeck coefficient of test material, it is necessary first to a temperature difference is generated at the both ends of sample, by two pairs of thermoelectricity Temperature is measured when accidental resemblance, obtains the temperature difference, and voltage is measured by survey voltage probe.For most semi-conductor thermoelectric materials, the temperature difference Δ T usually can choose in 5~10K range, can substantially meet temperature difference T condition as small as possible in this way, while again can Obtain a Seebeck voltage V that is sufficiently large, being easy to be measuredsr。
However, Seebeck coefficient test philosophy seems simply, but there are complicated for operation, surveys in traditional test method Try the problems such as precision is low.Because traditional test method is not only needed using thermocouple assay temperature difference, but also to be tested simultaneously The Seebeck voltage that the temperature difference generates, in addition thermal contact resistance also can carry out biggish error to calibration tape.
Other than the thermoelectric cell used in the aerospace, in thermoelectric generating device, thermoelectric (al) type heat-flow density sensor, temperature In the components such as poor refrigerator or equipment, it is also desirable to being tested and being demarcated to the Seebeck coefficient of its electrode material.Especially It is to have expedited the emergence of huge test need with industrial automation, intelligentized universal, extensive use of the thermoelectric material in life It asks.Traditional Seebeck coefficient test device inefficiency in the case where testing a large amount of samples.Therefore, in addition to meeting test essence Really, outside easy to operate requirement, it is also necessary to which meeting being capable of requirement to quickly being tested a large amount of samples.
Summary of the invention
For deficiency complicated for operation in traditional Seebeck coefficient test method, measuring accuracy is low, in conjunction with a large amount of test cords The actual demand of seebeck coefficient, the present invention provides a kind of thermoelectric material Seebeck coefficient test device and methods, are surveyed with improving Try precision and testing efficiency.
To achieve the above objectives, the technical solution adopted by the present invention is that:
A kind of thermoelectric material Seebeck coefficient test device, comprising: matrix 1, bracket 2, ceramic wafer 3, radiator 4, lifting Mechanism 5, heater 7, pressing plate 8, automatic compacting device 9, copper conductor I 10, differential thermocouple 11, temperature end resistance 12, can power transformation Hinder 13, potential difference meter 14, low-temperature end resistance 15, inversely switch 16；
The side of described matrix 1 is connect with the bottom side of bracket 2, and the side of pressing plate 8 and the top side of bracket 2 connect It connects；Several automatic compacting devices 9 are installed in the lower section of the pressing plate 8, and heater 7 is installed in the lower section of automatic compacting device 9；The base The top of body 1 is installed by radiator 4；
Copper conductor I 10 is connected between the heater 7 and radiator 4, copper conductor I 10 is successively arranged high temperature from top to bottom Hold resistance 12, variable resistance 13, low-temperature end resistance 15；The slide arm of the variable resistance 13 is connect with one end of potential difference meter 14, The other end of the potential difference meter 14 has copper conductor II 17 and copper conductor III 18 to draw, and there is copper in the lower end of the low-temperature end resistance 15 Conducting wire IV 19 is drawn；
Two contact points of 11 side of differential thermocouple have respectively with heater 7 and radiator 4 it is good thermally contact, Keep good electrical isolation again simultaneously, two contact points of the other side are connect with reverse switch 16；Utilize the differential thermocouple 11, it can directly measure the temperature difference at 6 both ends of sample；
Two electric contacts of 16 side of reverse switch are contacted with two of 11 other side of differential thermocouple respectively Two electric contacts of point connection, reverse 16 other side of switch are connect with copper conductor II 17 and copper conductor IV 19 respectively, or are led with copper Line IV 19 and copper conductor III 18 connect.
Based on the above technical solution, the side of the bracket 2 is equipped with elevating mechanism 5, the height for adjusting bracket 2 Degree makes pressing plate 8 compress sample 6, anti-sliding stop.
Based on the above technical solution, between described matrix 1 and radiator 4, automatic compacting device 9 and heater 7 Between be equipped with ceramic wafer 3, be used for insulation protection.
Based on the above technical solution, the automatic compacting device 9 includes pressing plate 20 and curved support plate 21, institute The both ends for stating 20 side of pressing plate are equipped with opposite groove, and the both ends of the curved support plate 21 are caught in the groove；Pass through Stressed size is applied in adjusting, to adjust the compression degree between heater 7, sample 6 and radiator 4；The arc branch Fagging 21 is the segmental arc of variable thickness, is gradually increased from centre to thickness of two sides；The curved support plate 21 along its length on It is provided with several flutings.
Based on the above technical solution, the differential thermocouple 11 includes nichrome wire I 111, nickel silicon alloy silk 112 and nichrome wire II 113；One end of the nichrome wire I 111 is connected with one end of the nickel silicon alloy silk 112, and With the heater 7 have it is good thermally contact, while keeping good electrical isolation again, form temperature end thermocouple；The nickel chromium triangle One end of alloy wire II 113 connects with the other end of the nickel silicon alloy silk 112 and is embedded into inside radiator 4, and with it is described Radiator 4 has good thermo-contact, while keeping good electrical isolation again, forms low-temperature end thermocouple；The nichrome wire I 111 other end, the other end of nichrome wire II 113 are connect with two electric contacts of reverse 16 side of switch respectively.
Based on the above technical solution, the material of the heater 7 is metallic copper, and the material of the radiator 4 is Metallic copper, and temperature is kept constant.
It based on the above technical solution, is electrical contact between the copper conductor I 10 and heater 7 and radiator 4.
A kind of thermoelectric material Seebeck coefficient test method, using the thermoelectric material Seebeck coefficient test device, Specific test method are as follows:
As long as adjusting the slide arm of the variable resistance 13 when test, so that the potential difference meter 14 is designated as zero, determine this When variable resistance 13 slide arm corresponding to partial ohmic value xR2, according to xR2Sample 6 can be found out relative to difference thermoelectricity Even 11 Seebeck coefficient, it may be assumed that
In formula, ɑsrFor the Seebeck coefficient of sample, ɑ0For the thermoelectric power of the differential thermocouple 11, R1For The resistance value of the low-temperature end resistance 15, R2For the total resistance value of 13 liang of fixing ends of variable resistance, R3For the temperature end electricity The resistance value of resistance 12.
Based on the above technical solution, by adjusting the contact locations of reverse switch 16, p-type thermoelectric material is realized With the test of N-type thermoelectric material Seebeck coefficient；
When the nichrome wire I 111 passes through II 17 shape of extraction copper conductor of inversely switch 16 and the potential difference meter 14 At contact, the nichrome wire II 113 passes through the extraction copper conductor IV of inversely switch 16 and 15 lower end of low-temperature end resistance When 19 formation contact, measurement is N-type thermoelectric material Seebeck coefficient；
When the nichrome wire I 111 passes through the extraction copper conductor of inversely switch 16 and 15 lower end of low-temperature end resistance IV 19 form contact, the extraction copper conductor III that the nichrome wire II 113 passes through inversely switch 16 and the potential difference meter 14 When 18 formation contact, measurement is p-type thermoelectric material Seebeck coefficient.
Thermoelectric material Seebeck coefficient test device and method of the present invention, have the advantages that
Conventional method at least needs to test three temperature end temperature, low-temperature end temperature and Seebeck voltage parameters, and heats The temperature of device and radiator needs accurately control, and enable to provide a constant temperature difference for sample.However, true A fixed constant temperature difference, is actually not easy to.Device of the present invention when in use, by sample be placed in heater and Between radiator, a temperature difference is generated at the both ends of sample；It is real by utilizing differential thermocouple known to Seebeck coefficient Show and only needed to measure a tested parameter, has greatly reduced the parameter of test, improve testing efficiency.
Potential difference meter is high precision measurement instrument made of the principle that is mutually balanced according to measured voltage and known voltage, with The major advantage that voltmeter is compared is not required to the branch obtaining current from measurand when being test, because not doing without influencing circuit under test Tested numerical value is disturbed, the electromotive force result of test is accurate and reliable.Therefore the present invention has the advantages that measuring accuracy is high, greatly Improve accuracy and sensitivity.
The change of temperature can make object that small deformation occur, and the present invention passes through pressing plate and the automatic impaction of autonomous Design dress It sets and compresses sample, it can be achieved that automatically adjusting the size of pressing force depending on the temperature, efficiently avoid sample Or the sliding of differential thermocouple.
Detailed description of the invention
The present invention has following attached drawing:
Fig. 1 the structural representation of present invention；
Schematic perspective view Fig. 2 of the invention；
The schematic diagram of Fig. 3 automatic compacting device 9 of the present invention；
The schematic diagram of Fig. 4 present invention test Seebeck coefficient；
The schematic diagram of Fig. 5 11 thermometric of differential thermocouple difference of the present invention；
The schematic diagram of Seebeck coefficient is tested in Fig. 6 traditional technology.
In figure: 1-matrix, 2-brackets, 3-ceramic wafers, 4-radiators, 5-elevating mechanisms, 6-samples, 7- Heater, 8-pressing plates, 9-automatic compacting devices, 10-copper conductors I, 11-differential thermocouples, 111-nichrome wires I, 112-nickel silicon alloy silks, 113 nichrome wires II, 12-temperature end resistance, 13-variable resistances, 14-potential difference meters, 15- Low-temperature end resistance, 16-reverse switches, 17-copper conductors II, 18-copper conductors III, 19-copper conductors IV, 20-pressing plate, 21-curved support plates.
Specific embodiment
Below in conjunction with attached drawing, invention is further described in detail.
As shown in Fig. 1~5, thermoelectric material Seebeck coefficient test device of the present invention, comprising: matrix 1, bracket 2, Ceramic wafer 3, radiator 4, elevating mechanism 5, heater 7, pressing plate 8, automatic compacting device 9, copper conductor I 10, differential thermocouple 11, Temperature end resistance 12, variable resistance 13, potential difference meter 14, low-temperature end resistance 15, inversely switch 16；
The side of described matrix 1 is connect with the bottom side of bracket 2, and the side of pressing plate 8 and the top side of bracket 2 connect It connects；Several automatic compacting devices 9 are installed in the lower section of the pressing plate 8, can depending on the temperature certainly by automatic compacting device 9 The lower section of the dynamic size for adjusting pressing force, automatic compacting device 9 is installed by heater 7；The top of described matrix 1 is installed by radiator 4；
Copper conductor I 10 is connected between the heater 7 and radiator 4, copper conductor I 10 is successively arranged high temperature from top to bottom Hold resistance 12, variable resistance 13, low-temperature end resistance 15；The slide arm of the variable resistance 13 is connect with one end of potential difference meter 14, The other end of the potential difference meter 14 has copper conductor II 17 and copper conductor III 18 to draw, and there is copper in the lower end of the low-temperature end resistance 15 Conducting wire IV 19 is drawn；
Two contact points of 11 side of differential thermocouple have respectively with heater 7 and radiator 4 it is good thermally contact, Keep good electrical isolation again simultaneously, two contact points of the other side are connect with reverse switch 16；Utilize the differential thermocouple 11, it can directly measure the temperature difference at 6 both ends of sample；
The temperature end resistance 12 and the low-temperature end resistance 15 are fixed by the two of copper conductor and the variable resistance 13 End connects, meanwhile, the temperature end resistance 12 and the low-temperature end resistance 15 are by copper conductor and the heater 7 and described dissipate Hot device 4 connects, and forms series loop.
Two electric contacts of 16 side of reverse switch are contacted with two of 11 other side of differential thermocouple respectively Two electric contacts of point connection, reverse 16 other side of switch are connect with copper conductor II 17 and copper conductor IV 19 respectively, or are led with copper Line IV 19 and copper conductor III 18 connect.
Based on the above technical solution, the side of the bracket 2 is equipped with elevating mechanism 5, the height for adjusting bracket 2 Degree makes pressing plate 8 compress sample 6, anti-sliding stop.
Based on the above technical solution, between described matrix 1 and radiator 4, automatic compacting device 9 and heater 7 Between be equipped with ceramic wafer 3, be used for insulation protection.
Based on the above technical solution, the automatic compacting device 9 includes pressing plate 20 and curved support plate 21, institute The both ends for stating 20 side of pressing plate are equipped with opposite groove, and the both ends of the curved support plate 21 are caught in the groove；Pass through Stressed size is applied in adjusting, to adjust the compression degree between heater (7), sample (6) and radiator (4)；It is described Curved support plate 21 is the segmental arc of variable thickness, is gradually increased from centre to thickness of two sides；The curved support plate 21 is along length Several flutings are provided on direction.
Based on the above technical solution, the differential thermocouple 11 includes nichrome wire I 111, nickel silicon alloy silk 112 and nichrome wire II 113；One end of the nichrome wire I 111 is connected with one end of the nickel silicon alloy silk 112, and With the heater 7 have it is good thermally contact, while keeping good electrical isolation again, form temperature end thermocouple；The nickel chromium triangle One end of alloy wire II 113 connects with the other end of the nickel silicon alloy silk 112 and is embedded into inside radiator 4, and with it is described Radiator 4 has good thermo-contact, while keeping good electrical isolation again, forms low-temperature end thermocouple；The nichrome wire I 111 other end, the other end of nichrome wire II 113 are connect with two electric contacts of reverse 16 side of switch respectively.
Based on the above technical solution, the material of the heater 7 is metallic copper, and the material of the radiator 4 is Metallic copper, and temperature is kept constant.
It based on the above technical solution, is electrical contact between the copper conductor I 10 and heater 7 and radiator 4.
Based on above-mentioned thermoelectric material Seebeck coefficient test device, the present invention provides a kind of thermoelectric material Seebeck systems Number test method, specific test method are as follows:
As long as adjusting the slide arm of the variable resistance 13 when test, so that the potential difference meter 14 is designated as zero, determine this When variable resistance 13 slide arm corresponding to partial ohmic value xR2, according to xR2Sample 6 can be found out relative to difference thermoelectricity Even 11 Seebeck coefficient, it may be assumed that
In formula, ɑsrFor the Seebeck coefficient of sample, ɑ0For the thermoelectric power of the differential thermocouple 11, R1For The resistance value of the low-temperature end resistance 15, R2For the total resistance value of 13 liang of fixing ends of variable resistance, R3For the temperature end electricity The resistance value of resistance 12.
By adjusting the contact locations of reverse switch 16, p-type thermoelectric material and N-type thermoelectric material Seebeck may be implemented The test of coefficient.
When the nichrome wire I 111 passes through II 17 shape of extraction copper conductor of inversely switch 16 and the potential difference meter 14 At contact, the nichrome wire II 113 passes through the extraction copper conductor IV of inversely switch 16 and 15 lower end of low-temperature end resistance When 19 formation contact, measurement is N-type thermoelectric material Seebeck coefficient.
When the nichrome wire I 111 passes through the extraction copper conductor of inversely switch 16 and 15 lower end of low-temperature end resistance IV 19 form contact, the extraction copper conductor III that the nichrome wire II 113 passes through inversely switch 16 and the potential difference meter 14 When 18 formation contact, measurement is p-type thermoelectric material Seebeck coefficient.
Sample 6 is placed between heater 7 and radiator 4 by the present invention, straight using nickel chromium triangle-nisiloy differential thermocouple 11 Connect the temperature difference at measurement 6 both ends of sample；Using the principle of the balance of voltage, by the Seebeck voltage of sample 6 and nickel chromium triangle-nickel The Seebeck voltage of silicon differential thermocouple 11 is compared, by adjusting the slide arm of the variable resistance 13 in balance of voltage circuit, So that potential difference meter 14 is designated as zero, the Seebeck coefficient of sample 6 can be found out.The present invention is real by cleverly circuit design Need to only a parameter be measured by having showed, and reduced test parameter, improved efficiency, and do not interfere measured numerical value, Accuracy is improved；The present invention can be used for the survey of the Seebeck coefficient of the devices such as armoured thermocouple, heat-flow density sensor Amount, advantageously when measuring a large amount of samples.
The content being not described in detail in this specification belongs to the prior art well known to professional and technical personnel in the field.
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