阅读说明：本技术 一种用于扩散炉的称重恒温槽及其参数自动调整方法 (A kind of weighing thermostat and its parameter automatic adjusting method for diffusion furnace ) 是由 田杰成 徐有根 于 2019-09-17 设计创作，主要内容包括：本发明实施例公开了一种用于扩散炉的称重恒温槽,包括对源液冷却控温的温控平台、罩设在所述温控平台上方的隔热外壳,以及设置在所述温控平台上方且用于放置源液的源瓶托盘,所述源瓶托盘上设有用于实时计算源液重量的称重单元,所述称重单元连接有总控制器,所述总控制器通讯连接有气流通量单元,所述总控制器根据所述称重单元得到的源液重量,计算所述气流通量单元的氧气需求量和所述温控平台的制冷条件；采用自动计算降温时长,确定温度控制单元的工作时间,同时自动计算氧气的需求量,自动确定氧气管道通入扩散炉的流量,提高设备的稼动率。(The embodiment of the invention discloses a kind of weighing thermostats for diffusion furnace, including the temperature control console to source liquid cooling but temperature control, the thermally insulating housing being located above the temperature control console, and the source bottle holder disk above the temperature control console and for placing source liquid is set, the source bottle holder disk is equipped with the weighing unit for calculating source liquid weight in real time, the weighing unit is connected with master controller, the master controller communication connection has air-flow flux unit, the source liquid weight that the master controller is obtained according to the weighing unit, calculate the oxygen demand of the air-flow flux unit and the cryogenic conditions of the temperature control console；The duration that cools down, the working time of temperature control unit, while the automatic demand for calculating oxygen are calculated using automatic, the flow that oxygen channel is passed through diffusion furnace is automatically determined, improves the mobility of equipment.)

1. a kind of weighing thermostat for diffusion furnace, it is characterised in that: including to source liquid cooling but the temperature control console (1) of temperature control, The thermally insulating housing (2) being located above the temperature control console, and setting is above the temperature control console (1) and for placing source The source bottle holder disk (3) of liquid, the source bottle holder disk (3) are equipped with the weighing unit (4) for calculating source liquid weight in real time, the title Weight unit (4) is connected with master controller (5), and master controller (5) communication connection has air-flow flux unit (6), the master control The source liquid weight that device (5) processed obtains according to the weighing unit (4) calculates the oxygen demand of the air-flow flux unit (6) With the cryogenic conditions of the temperature control console (1).

2. a kind of weighing thermostat for diffusion furnace according to claim 1, it is characterised in that: the temperature control console (1) include the cavity solid box (101) being arranged below source bottle holder disk (3), and be mounted in the cavity solid box (101) The semiconductor cooler (102) in portion, the refrigeration end of the semiconductor cooler (102) is towards the source bottle holder disk (3), and described half The heating end of conductor refrigerator (102) is towards the surface of the cavity solid box (101), and the cavity solid box (101) is in institute It states and is equipped with thermal insulation board (103) between the heating end and refrigeration end of semiconductor cooler (102), the cavity solid box (101) Side plane lower end is equipped with the thermal vias (7) for cooling down to semiconductor cooler (102) heating end, and the cavity is three-dimensional The lower surface of box (101) is equipped with radiator fan (8).

3. a kind of weighing thermostat for diffusion furnace adjust automatically technique according to claim 2, it is characterised in that: institute It states source bottle holder disk (3) and is installed by being threadably mounted at the upper end of cavity solid box (101), the centre bit of the source bottle holder disk (3) There is the subsidence trough (9) for placing source bottle, the edge of the subsidence trough (9) is equipped with annular and increases platform (14), the annular Gather cold cover (11), the title of the weighing unit (4) equipped with abutting subsidence trough (9) inner wall in the upper surface for increasing platform (14) Weight position is mounted on subsidence trough (9) surface, and the lower surface of the subsidence trough (9) is equipped with several equally distributed perforation through-holes (10)。

4. a kind of weighing thermostat for diffusion furnace according to claim 2, it is characterised in that: the thermal insulation board It (103) include being fixedly mounted on the central plate (1031) of cavity solid box (101) inner wall center, and be hinged in described The movable plate (1032) of (1031) two parallel sides of core, the inner wall of the cavity solid box (101) is in the movable plate (1032) lower section is equipped with for limiting the movable plate (1032) horizontal positioned edge blend stop (15), the cavity solid box (101) two parallel inners are equipped with driving motor (12), are equipped with and are used on the output shaft of the driving motor (12) The shuttle shape push plate (13) for pushing the movable plate (1032) to rotate.

5. a kind of weighing thermostat for diffusion furnace according to claim 4, it is characterised in that: the temperature control console It (1) further include the first controller (104) for receiving and processing the weighing unit (4) data, the semiconductor cooler (102) it is connect with the output unit of first controller (104), the annular, which is increased, is equipped with temperature on the inner walls of platform (14) Sensor (105), the temperature sensor (105) connect with the input terminal of the first controller (104), first controller (104) cryogenic temperature for receiving the master controller (5) regulates and controls the timer (105) to source liquid refrigeration work.

6. a kind of weighing thermostat for diffusion furnace according to claim 1, it is characterised in that: the air-flow flux list First (6) include second controller (601), oxygen tank (602), nitrogen gas tank (608) and the total output connecting with oxygen tank (602) It manages (603), is equipped with and mixes gas-distributing pipe (604) between total efferent duct (603) and the source bottle escape pipe, total efferent duct (603) pre-aeration is installed to be in charge of (605) between diffusion furnace air inlet, total efferent duct (603) is equipped with and described the The flowmeter solenoid valve (606) of two controllers (601) output end connection.

7. a kind of weighing thermostat for diffusion furnace according to claim 6, it is characterised in that: the nitrogen gas tank (608) end that escape pipe is in charge of (605) with mixing gas-distributing pipe (604) and the pre-aeration respectively is connect, the nitrogen Gas tank (608), source bottle escape pipe, mixing gas-distributing pipe (604) and the pre-aeration, which are in charge of on (605), is respectively equipped with one-way cock (607), the oxygen demand that the second controller (601) receives the master controller (5) controls the flowmeter solenoid valve (606) and the switch of one-way cock (607).

8. a kind of parameter automatic adjusting method of the weighing thermostat for diffusion furnace, which comprises the steps of:

Step 100, semiconductor cooler work, are pre-chilled thermostat, keep the low temperature environment of thermostat；

Step 200 is passed through source liquid into source bottle, and weighing unit calculates source liquid weight in real time, and sends source liquid weight to always Controller calculates refrigerating thermal-insulation temperature and oxygen demand according to source liquid weight；

Step 300, transmitting control data, the first controller pass through the cooling working time of Timer Controlling semiconductor cooler, The demand of second controller allotment oxygen；

Step 400, in advance by quantitative oxygen and nitrogen simultaneously be passed through in diffusion furnace；

Step 500 stops semiconductor cooler work, by the heating end heat spreader of semiconductor cooler to refrigeration end, source liquid Heating volatilization, while the source liquid gas of evaporation being mixed with oxygen, nitrogen and is passed through diffusion furnace；

Step 600 continues for the oxygen of surplus and nitrogen to be passed through in diffusion furnace, with the complete decomposition reaction of source liquid gas.

9. a kind of parameter automatic adjusting method of weighing thermostat for diffusion furnace according to claim 8, feature It is, in step 100, is separated between the refrigeration end and heating end of the semiconductor cooler by thermal insulation board, semiconductor system The refrigeration end of cooler cools down to source liquid, and the heating end of semiconductor cooler is cooled down by radiator fan.

10. a kind of parameter automatic adjusting method of weighing thermostat for diffusion furnace according to claim 8, feature It is, is 1~1.5, in step 500, the escape pipe of liquid in source in oxygen and the nitrogen proportion of diffusion furnace in step 400 Interior, the proportion of oxygen and nitrogen is 1/3~1/2.

Technical field

The present embodiments relate to phosphorus diffusing technique fields, and in particular to a kind of weighing thermostat for diffusion furnace and its Parameter automatic adjusting method.

Background technique

Due to being all made of P-type wafer in silicon solar cell actual production, it is therefore desirable to PN junction can just be obtained by forming N-type layer, This is usually to be realized by being spread under the high temperature conditions using phosphorus source, POCl₃It is that current phosphorus diffusion uses to obtain more one kind Impurity source is a kind of colorless and transparent liquid, has penetrating odor, and property is unstable, it is easy to hydrolyze, while also pole It is volatile.

The technological principle of diffusion furnace is exactly to mix phosphorus atoms in silicon wafer to form N-type semiconductor, and POCL3 is at 600 DEG C of high temperature When can decompose, chemical equation of the POCl3 in diffusion furnace are as follows:

5POCl₃=P₂O₅+3PCl₅；

Then P₂O₅With Si, O₂Reaction generates silica, phosphorus and chlorine:

4PCl₅+5O₂=2P₂O₅+10Cl₂；2P₂O₅+ 5Si=5Si O₂+4P。

Most important in the reaction of this technique is exactly O₂And POCL₃, so their flow will have a direct impact on the resistance of silicon wafer Value, therefore in diffusion furnace work, it needs to POCL₃After the weighing of source liquid, and according to the intake of source liquid weight calculating oxygen, and And simultaneously in order to guarantee that the POCL3 liquid of volatilization imports the stability in diffusion furnace, mixing increases nitrogen in oxygen, and nitrogen will The POCL3 liquid for carrying volatilization is passed through in diffusion furnace.

Additionally, due to POCL₃Source liquid highly volatile needs to keep the cryogenic conditions of thermostat in weighing, but existing Thermostat there is also following defects:

(1), it cannot achieve and synchronize to the synchronous cooling down of the upper and lower ends of source liquid bottle, therefore POCL₃Source liquid is in weighing It is unstable, it is readily volatilized；

(2)POCL₃Source liquid weighing operation, can not be accurate in real time without organically blending with the demand of cooling temperature, oxygen The diffusion techniques parameters such as reaction source liquid weight and corresponding throughput, temperature need artificial by virtue of experience calling technological file, mistake Journey is cumbersome and time-consuming.

Summary of the invention

For this purpose, the embodiment of the present invention provides a kind of weighing thermostat and its parameter automatic adjusting method for diffusion furnace, The duration that cools down, the working time of temperature control unit, while the automatic demand for calculating oxygen are calculated using automatic, automatically Determine that oxygen channel is passed through the flow of diffusion furnace, with solve in the prior art can not in real time accurate response source liquid weight with it is corresponding The problem of diffusion techniques parameter such as throughput, temperature.

To achieve the goals above, embodiments of the present invention provide the following technical solutions: a kind of title for diffusion furnace Weight thermostat, including to source the liquid cooling but temperature control console of temperature control, the thermally insulating housing being located above the temperature control console, Yi Jishe The source bottle holder disk above the temperature control console and for placing source liquid is set, the source bottle holder disk is equipped with for calculating source in real time The weighing unit of liquid weight, the weighing unit are connected with master controller, and the master controller communication connection has air-flow flux list Member, the source liquid weight that the master controller is obtained according to the weighing unit, calculates the oxygen demand of the air-flow flux unit The cryogenic conditions of amount and the temperature control console.

As a preferred solution of the present invention, the temperature control console includes the cavity solid being arranged in below the bottle holder disk of source Box, and be mounted on the semiconductor cooler inside the cavity solid box, the refrigeration end of the semiconductor cooler is towards institute Source bottle holder disk is stated, towards the surface of the cavity solid box, the cavity solid box exists the heating end of the semiconductor cooler Thermal insulation board is equipped between the heating end and refrigeration end of the semiconductor cooler, the side plane lower end of the cavity solid box is equipped with Thermal vias for cooling down to semiconductor cooler heating end, and the lower surface of the cavity solid box is equipped with radiation air Fan.

As a preferred solution of the present invention, the source bottle holder disk is by being threadably mounted at the upper end of cavity solid box, The center of the source bottle holder disk is equipped with the subsidence trough for placing source bottle, and the edge of the subsidence trough is equipped with annular and adds Cold cover, the title of the weighing unit are gathered equipped with the abutting subsidence trough inner wall in plateau, the upper surface that the annular increases platform Weight position is mounted on subsidence trough surface, and the lower surface of the subsidence trough is equipped with several equally distributed perforation through-holes.

As a preferred solution of the present invention, the thermal insulation board includes being fixedly mounted on cavity solid box inner wall centre bit The central plate set, and it is hinged on the movable plate of two parallel sides of central plate, the inner wall of the cavity solid box is described The lower section of movable plate is equipped with for limiting the horizontal positioned edge blend stop of the movable plate, and two of the cavity solid box are parallel Inner surface is equipped with driving motor, and the shuttle shape for pushing the movable plate rotation is equipped on the output shaft of the driving motor Push plate.

As a preferred solution of the present invention, the temperature control console further includes for receiving and processing the weighing unit First controller of data, the semiconductor cooler are connect with the output unit of first controller, and the annular is increased Temperature sensor is installed, the temperature sensor is connect with the input terminal of the first controller, first control on the inner wall of platform The cryogenic temperature that device processed receives the master controller regulates and controls the timer to source liquid refrigeration work.

As a preferred solution of the present invention, the air-flow flux unit includes second controller, oxygen tank, nitrogen gas tank And with the tank connected total efferent duct of oxygen, be equipped between total efferent duct and source bottle escape pipe and mix gas-distributing pipe, institute It states and pre-aeration is installed between total efferent duct and diffusion furnace air inlet is in charge of, total efferent duct is equipped with and second control The flowmeter solenoid valve of device output end connection

As a preferred solution of the present invention, the escape pipe of the nitrogen gas tank respectively with the gas-distributing pipe and described of mixing The end connection that pre-aeration is in charge of, the nitrogen gas tank, source bottle escape pipe, mixing gas-distributing pipe and the pre-aeration are in charge of to be set respectively There is one-way cock, the oxygen demand that the second controller receives the master controller controls the flowmeter solenoid valve and list To the switch of valve.

On the other hand, the present invention also provides it is a kind of for diffusion furnace weighing thermostat parameter automatic adjusting method, Include the following steps:

Step 100, semiconductor cooler work, are pre-chilled thermostat, keep the low temperature environment of thermostat；

Step 200 is passed through source liquid into source bottle, and weighing unit calculates source liquid weight in real time, and source liquid weight is sent To master controller, refrigerating thermal-insulation temperature and oxygen demand are calculated according to source liquid weight；

Step 300, transmitting control data, when the first controller passes through the cooling work of Timer Controlling semiconductor cooler Between, second controller deploys the demand of oxygen；

Step 400, in advance by quantitative oxygen and nitrogen simultaneously be passed through in diffusion furnace；

Step 500 stops semiconductor cooler work, by the heating end heat spreader of semiconductor cooler to refrigeration end, The heating volatilization of source liquid, while the source liquid gas of evaporation being mixed with oxygen, nitrogen and is passed through diffusion furnace；

Step 600 continues for the oxygen of surplus and nitrogen to be passed through in diffusion furnace, with the complete decomposition reaction of source liquid gas.

As a preferred solution of the present invention, in step 100, the refrigeration end and heating end of the semiconductor cooler Between separated by thermal insulation board, the refrigeration end of semiconductor cooler cools down to source liquid, and the heating end of semiconductor cooler is by dissipating Hot-air fan cooling.

As a preferred solution of the present invention, in step 400, in the oxygen of diffusion furnace and nitrogen proportion for 1~ 1.5, in step 500, in the escape pipe of source liquid, the proportion of oxygen and nitrogen is 1/3~1/2.

Embodiments of the present invention have the advantages that

(1) present invention is according to the data of weighing platform, automatic to calculate cooling duration, when the work of temperature control unit Between, while the automatic demand for calculating oxygen, the flow that oxygen channel is passed through diffusion furnace is automatically determined, by reflecting source in time Source liquid weight in bottle selects the diffusion techniques Parameter Files such as corresponding gas flow, temperature according to source liquid weight, without artificial According to source liquid weight or access times switching technique, improves the mobility of equipment and reduce probability of human error, to improve expansion The uniformity of day labor skill sheet resistance；

(2) thermostat of the invention by place source bottle pallet setting be quickly cooled down space, can to source bottle up and down Both ends carry out the synchronous cooling of first time, improve cooling down efficiency, are handled by the cooling in time to source liquid, can be effective The heated volatilization of source liquid is avoided, prevents the outlet tracheal rupture of source liquid from the dangerous situations generation such as explode.

Detailed description of the invention

It, below will be to embodiment party in order to illustrate more clearly of embodiments of the present invention or technical solution in the prior art Formula or attached drawing needed to be used in the description of the prior art are briefly described.It should be evident that the accompanying drawings in the following description is only It is merely exemplary, it for those of ordinary skill in the art, without creative efforts, can also basis The attached drawing of offer, which is extended, obtains other implementation attached drawings.

Structure depicted in this specification, ratio, size etc., only to cooperate the revealed content of specification, for Those skilled in the art understands and reads, and is not intended to limit the invention enforceable qualifications, therefore does not have technical Essential meaning, the modification of any structure, the change of proportionate relationship or the adjustment of size are not influencing the function of the invention that can be generated Under effect and the purpose that can reach, should all still it fall in the range of disclosed technology contents obtain and can cover.

Fig. 1 is the integral cutting structural schematic diagram of the weighing thermostat in embodiment of the present invention；

Fig. 2 is the weighing thermostat shell mechanism schematic diagram in embodiment of the present invention；

Fig. 3 is that the thermostat unitary side in embodiment of the present invention cuts open structural schematic diagram；

Fig. 4 is that the thermal insulation board in embodiment of the present invention overturns dynamic structure schematic diagram；

Fig. 5 is the structural block diagram of the parameter adjustment control in embodiment of the present invention；

Fig. 6 is the structural block diagram of the air-flow flux unit in embodiment of the present invention；

Fig. 7 is the flow diagram of the parameter regulation means in embodiment of the present invention.

In figure:

1- temperature control console；2- thermally insulating housing；The source 3- bottle holder disk；4- weighing unit；5- master controller；6- air-flow flux list Member；7- thermal vias；8- radiator fan；9- subsidence trough；10- penetrates through through-hole；11- gathers cold cover；12- driving motor；13- shuttle shape Push plate；14- annular increases platform；The edge 15- blend stop；

101- cavity solid box；102- semiconductor cooler；103- thermal insulation board；The first controller of 104-；105- temperature passes Sensor；

1031- central plate；1032- movable plate；

601- second controller；602- oxygen tank；The total efferent duct of 603-；604- mixing gas-distributing pipe；605- pre-aeration is in charge of； 606- flowmeter solenoid valve；607- one-way cock；608- nitrogen gas tank.

Specific embodiment

Embodiments of the present invention are illustrated by particular specific embodiment below, those skilled in the art can be by this explanation Content disclosed by book is understood other advantages and efficacy of the present invention easily, it is clear that described embodiment is the present invention one Section Example, instead of all the embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art are not doing Every other embodiment obtained under the premise of creative work out, shall fall within the protection scope of the present invention.