Sample stake and sample repositioning method can be resetted
阅读说明：本技术 可复位样品桩和样品复位方法 (Sample stake and sample repositioning method can be resetted ) 是由 张文涛 鲍芳 张庆珍 刘伟新 俞凌杰 李志明 于 2018-05-25 设计创作，主要内容包括：本发明公开了一种样品复位方法,用于扫描电镜分析,包括以下步骤：将样品和两个定位柱固定在样品桩的台面上；记录所观察分析的样品微区的坐标以及两个定位柱顶面中心标记点的坐标；再次对样品进行观察分析时,获得两个定位柱顶面中心标记点的新坐标；获取所观察分析的样品微区的新坐标；根据所观察分析的样品微区的新坐标,扫描电镜复位至所观察分析的样品微区。本发明提供的样品复位方法可以快速准确的将样品复位到原来的观察视野,满足某些实验条件下的重复观察需要。(The invention discloses a kind of sample repositioning methods, are used for scanning electron microscope analysis, comprising the following steps: sample and two positioning columns are fixed on the table top of sample stake；The coordinate for the sample microcell analyzed observed by record and the coordinate of two positioning column end face center mark points；When carrying out observation analysis to sample again, the new coordinate of two positioning column end face center mark points is obtained；The new coordinate for the sample microcell analyzed observed by obtaining；According to the new coordinate of the sample microcell of observed analysis, the sample microcell of analysis observed by scanning electron microscope is reset to.Sample can fast and accurately be reset to original field of view by sample repositioning method provided by the invention, meet the repeated observation needs under certain experiment conditions.)
1. a kind of sample repositioning method, which comprises the following steps:
S1, sample and two positioning columns are fixed on the table top of sample stake；
S2, the sample stake for being fixed with the sample and positioning column is fixed on the sample stage of scanning electron microscope, utilizes the scanning Electronic Speculum carries out observation analysis to the microcell of the sample, and the coordinate (x, y) and two for the sample microcell analyzed observed by recording Coordinate (the x of a positioning column end face center mark pointa, ya) and (xb, yb)；
S3, again to sample carry out observation analysis when, the sample stake for carrying the sample and positioning column is once again secured in and is swept It retouches on the sample stage of Electronic Speculum, and obtains the new coordinate (x of two positioning column end face center mark points by scanning electron microscopea', ya') and (xb', yb')；
S4, according to plane rectangular coordinates transformation for mula and the new coordinate (x of acquired positioning column end face center mark pointa', ya') and (xb', yb') obtain the new coordinate (x', y') of the corresponding sample microcell analyzed observed for the first time；
S5, the control that the new coordinate (x', y') of the corresponding sample microcell analyzed observed for the first time is inputted to sample platform of scanning electronic microscope Field of view is moved to the corresponding sample microcell analyzed observed for the first time by molding block, the scanning electron microscope.
2. sample repositioning method according to claim 1, which is characterized in that in the step S1, will using conducting resinl The sample is pasted onto the sample stake.
3. sample repositioning method according to claim 2, which is characterized in that obtain the ginseng of changes in coordinates using following formula Number:
x0=x 'a-xacosθ+yasinθ
y0=y 'a-xasinθ-yacosθ
Wherein, θ is the rotation angle of front and back changes in coordinates twice, (x0, y0) be co-ordinate zero point translation parameters.
4. sample repositioning method according to claim 3, which is characterized in that analyzed observed by being obtained using following formula The new coordinate (x', y') of sample microcell:
X '=xcos θ-ysin θ+x0
Y '=xsin θ+ycos θ+y0
5. sample repositioning method according to claim 1, which is characterized in that the cross section of the table top of the sample stake is circle Shape, the center of circle of table top of the line of two positioning columns Jing Guo the sample stake.
6. sample repositioning method according to claim 1, which is characterized in that the mark point of the positioning column is positioned at described The crosshair of positioning column end face center position.
7. one kind can reset sample stake characterized by comprising
Table top, there are two positioning round orifice for the end face edge tool of the table top；
Positioning column, the positioning column are arranged in the positioning round orifice.
8. according to claim 7 reset sample stake, which is characterized in that correspond to the positioning on the circumference of the table top The position of circular hole is equipped with screw, and the screw is for the positioning column to be fixed in the positioning round orifice.
9. according to claim 7 reset sample stake, which is characterized in that the center of the bottom surface of the table top is equipped with Fixed column, the fixed column can be placed in the fixation hole of the sample stage of the scanning electron microscope, with the fixation sample stake.
10. according to claim 7 reset sample stake, which is characterized in that the positioning column is located at the table top or more Height it is equal with the height of the sample.
Technical field
The present invention relates to sample detection technical fields, can reset sample stake and sample repositioning method more particularly, to one kind.
Background technique
Scanning electron microscope is that microscopic observation, analysis are carried out for the surface morphology and composition feature to solid material Instrument and equipment.Sample is usually sticked in sample stake, is then attached on the sample stage of scanning electron microscope.Pass through control scanning electron microscope Mechanical motor carrys out mobile example platform, can observe the microscopic feature of sample different zones.
It in certain research work, needs that repeatedly sample is put under scanning electron microscope and carries out repeated observation, this needs is found Last observation position.Although scanning electron microscope is able to record the three-dimensional coordinate of observation position every time and is resetted, next Secondary when being fixed on sample on sample stage, coordinate value has occurred that change, therefore coordinate value before is not available.At this moment Generally can only general location of the area on sample according to the observation, found in conjunction with the shape characteristic of part.Due to scanning electron microscope The scale of observation is often in Nano grade, and field of view is only micron order, therefore the method for this reset is relatively difficult and low Effect.
Summary of the invention
For the above-mentioned technical problem in the presence of the prior art, the invention proposes one kind can reset sample stake and sample Repositioning method.According to an aspect of the present invention, sample repositioning method the following steps are included:
S1, sample and two positioning columns are fixed on the table top of sample stake；
S2, the sample stake for carrying the sample and positioning column is fixed on the sample stage of scanning electron microscope, using described Scanning electron microscope carries out observation analysis to the microcell of the sample, and the coordinate (x, y) for the sample microcell analyzed observed by recording with And coordinate (the x of two positioning column end face center mark pointsa, ya) and (xb, yb)；
S3, again to sample carry out observation analysis when, the sample stake for carrying the sample and positioning column is fixed again On the sample stage of scanning electron microscope, and pass through the new coordinate of scanning electron microscope two positioning column end face center mark points of acquisition (xa', ya') and (xb', yb')；
S4, according to plane rectangular coordinates transformation for mula and the new coordinate of acquired positioning column end face center mark point (xa', ya') and (xb', yb') obtain the new coordinate (x', y') of the corresponding sample microcell analyzed observed for the first time；
S5, the new coordinate (x', y') of the corresponding sample microcell analyzed observed for the first time is inputted into sample platform of scanning electronic microscope Control module, the scanning electron microscope by field of view be moved to it is corresponding for the first time observed by the sample microcell analyzed.
In a kind of implementation method, in the step S1, the sample is pasted onto the sample stake using conducting resinl On.
In a kind of implementation method, the parameter of changes in coordinates is obtained using following formula:
x0=x 'a-xacosθ+yasinθ
y0=ya′-xasinθ-yacosθ
Wherein, θ is the rotation angle of front and back changes in coordinates twice, (x0, y0) be co-ordinate zero point translation parameters.
In a kind of implementation method, the new coordinate (x', y') for the sample microcell analyzed observed by being obtained using following formula:
X '=xcos θ-ysin θ+x0
Y '=xsin θ+ycos θ+y0
In a kind of implementation method, the cross section of the table top of the sample stake is circle, the line of two positioning columns The center of circle of table top by the sample stake.
In a kind of implementation method, the mark point of the positioning column is the cross positioned at positioning column end face center position Silk.
Another invention according to the present invention, what is proposed resets sample stake, comprising:
Table top, there are two positioning round orifice for the end face edge tool of the table top；
Positioning column, the positioning column are arranged in the positioning round orifice.
In a kind of implementation method, the position that the positioning round orifice is corresponded on the circumference of the table top is equipped with screw, described Screw is for the positioning column to be fixed in the positioning round orifice.
In a kind of implementation method, the center of the bottom surface of the table top is equipped with fixed column, and the fixed column can be held It is placed in the fixation hole of the sample stage of the scanning electron microscope, with the fixation sample stake.
In a kind of implementation method, the height that the positioning column is located on the table top is equal with the height of the sample.
Compared with the prior art, the advantages of the present invention are as follows more when needing when carrying out sample analysis using scanning electron microscope It is provided by the invention to reset sample stake and sample repositioning method when the secondary same microcell to same sample carries out observation analysis Sample fast and accurately to be reset to original field of view, meet the repeated observation needs under certain experiment conditions.
Detailed description of the invention
The preferred embodiment of the present invention is described in detail below in conjunction with attached drawing.In figure:
Fig. 1 shows the flow chart of sample repositioning method according to the present invention.
Fig. 2 is the sample according to an embodiment of the present invention that the sample stake for carrying sample and positioning column is put into scanning electron microscope The field of view schematic diagram one of platform.
Fig. 3 is the sample according to an embodiment of the present invention that the sample stake for carrying sample and positioning column is put into scanning electron microscope The field of view schematic diagram two of platform.
Fig. 4 shows the top view according to an embodiment of the present invention for resetting sample stake.
Fig. 5 shows the main view according to an embodiment of the present invention for resetting sample stake.
In the accompanying drawings, identical component uses identical appended drawing reference.The attached drawing is not drawn according to the actual ratio.
Specific embodiment
Below in conjunction with attached drawing, the present invention will be further described.
As shown in Figure 1, it is shown that sample repositioning method according to the present invention, comprising the following steps:
S1, sample and two positioning columns are fixed on the table top of sample stake；
S2, the sample stake for carrying sample and positioning column is fixed on the sample stage of scanning electron microscope, utilizes scanning electron microscope The coordinate (x, y) and two positioning columns for the sample microcell that is carried out by observation analysis, and is analyzed observed by recording for the microcell of sample Coordinate (the x of end face center mark pointa, ya) and (xb, yb)；
S3, again to sample carry out observation analysis when, the sample stake for carrying sample and positioning column is once again secured in and is swept It retouches on the sample stage of Electronic Speculum, and obtains the new coordinate (x of two positioning column end face center mark points by scanning electron microscopea', ya') and (xb', yb')；
S4, according to plane rectangular coordinates transformation for mula and the new coordinate of acquired positioning column end face center mark point (xa', ya') and (xb', yb') obtain the new coordinate (x', y') of the corresponding sample microcell analyzed observed for the first time；
S5, the new coordinate (x', y') of the corresponding sample microcell analyzed observed for the first time is inputted into sample platform of scanning electronic microscope Control module, the scanning electron microscope by field of view be moved to it is corresponding for the first time observed by the sample microcell analyzed.
When carrying out sample analysis using scanning electron microscope, divide when needing repeatedly observe to the same microcell of same sample When analysis, sample can fast and accurately be reset to original field of view by sample repositioning method provided by the invention, meet certain Repeated observation under a little experiment conditions needs.
In one embodiment, in step sl, sample is pasted onto sample stake using conducting resinl.Preferably, sample is viscous It is attached to the middle position of sample stake, the setting of guide pile cannot be influenced.
In one embodiment, as shown in Figures 2 and 3, Fig. 2 and Fig. 3 be respectively for the first time by sample stake (carry sample and Positioning column) sample stake (carries sample and positioning by the field of view schematic diagram and second of sample stage that is put into scanning electron microscope Column) be put into scanning electron microscope sample stage field of view schematic diagram.In Fig. 2, A (xa, ya) and B (xb, yb) respectively indicate sample stake When being put into the sample stage of scanning electron microscope for the first time, the coordinate of two positioning column centre mark points.In Fig. 3, the coordinate of dotted line expression System is coordinate system when utilizing scanning electron microscopic observation for the first time, and the coordinate system that solid line indicates is to utilize scanning electron microscopic observation for the second time When coordinate system, A'(xa', ya') and B'(xb', yb') when respectively indicating sample stake and being put into the sample stage of scanning electron microscope for the second time, The coordinate of two positioning column centre mark points.Utilize plane rectangular coordinates transformation for mula:
X '=xcos θ-ysin θ+x0
Y '=xsin θ+ycos θ+y0
When seeking carrying the sample stake of sample and positioning column and being put into the sample stage of scanning electron microscope for the second time, observed by corresponding New the coordinate C'(x', y' of the sample microcell of analysis).In above-mentioned formula, θ is the rotation angle of front and back coordinate system twice, (x0, y0) be Coordinate origin translation parameters.
In above-mentioned formula, to acquire new the coordinate C'(x', y' of the observed sample microcell analyzed), it need to first acquire sin θ, cos θ, x0, y0.Specifically, by the new coordinate A'(x of two positioning column end face center mark pointsa', ya') and B'(xb', yb') Transformation for mula above is substituted into respectively, is obtained:
x′a=xacosθ-yasinθ+x0
ya'=xasinθ+yacosθ+y0
x′b=xbcosθ-ybsinθ+x0
y′b=xbsinθ+ybcosθ+y0
It solves above-mentioned about xa', ya', xb', yb' equation group, obtain:
x0=x 'a-xacosθ+yasinθ
y0=ya′-xasinθ-yacosθ
The sin θ that will be obtained, cos θ, x0, y0The formula about x' and y' is brought into, so that the sample analyzed observed by obtaining is micro- New the coordinate C'(x', y' in area).
As shown in Figure 2 and Figure 5, sample stake, including table top 1 and two positioning columns 2 can be resetted by providing one kind.Table top 1 There are two positioning round orifice 12, positioning columns 2 to be arranged in positioning round orifice 12 for end face edge tool.Height that positioning column 2 spreads from the table with The height of sample 3 is equal, when observing under scanning electron microscope in this way, can make the mark point of the observation microcell and positioning column 2 of sample 3 Picture keep clear simultaneously.
Preferably, the cross section of the table top 1 that can reset sample stake is circle, and the line of two positioning columns 2 passes through sample The center of circle of the table top 1 of stake.Two positioning columns 2 can be relative to the diameter symmetry of sample stake, can also be asymmetric.It is understood that , the line of two positioning columns 2 can also be without the center of circle of table top 1.
In one embodiment, as shown in Fig. 2, the mark point of positioning column 2 is the cross positioned at 2 end face center position of positioning column Silk 21.
In one embodiment, positioning column 2 is fixed in the following manner in the positioning round orifice 12 of table top 1.As shown in Fig. 2, The position that positioning round orifice 12 is corresponded on the circumference of table top 1 is equipped with screw 11 and tightens after positioning column 2 pierces into positioning round orifice 12 Positioning column 2 is fixed in positioning round orifice 12 by screw 11.
In one embodiment, the center of the bottom surface of table top 1 is equipped with fixed column 13, and fixed column 13 can be placed in scanning In the fixation hole of the sample stage of Electronic Speculum, to fix sample stake, when guaranteeing observation every time, position of the sample stake under scanning electron microscope It is constant.
The foregoing is merely the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, Ren Heben The technical staff in field can be easy to carry out and be altered or varied in technical scope disclosed by the invention, and this change or change Change should be covered by the protection scope of the present invention.Therefore, protection scope of the present invention should be with the protection model of claims Subject to enclosing.
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