阅读说明：本技术 发光分光分析装置 (Luminescence spectroscopic analyzer ) 是由 菅濑晶 于 2017-04-17 设计创作，主要内容包括：在发光分光分析装置中设置：放电室113,通过在内部产生放电来使试样进行激发发光；加压器146,作为收容液体的容器；气体供给源141,填充有被压缩成大气压以上的惰性气体；气体供给用管路142,一端与气体供给源141连接,另一端与放电室113连接；气体排出用管路145,一端与放电室113连接,另一端朝加压器146内的液体中打开；排气管路147,一端在加压器146内配置于比液体的液面更上方,另一端朝所述加压器146的外部打开；压力传感器151,测定气体供给用管路142内的惰性气体的压力；以及警告部件130、132,当由压力传感器151所得的测定值超过事先规定的值时对用户发出警告。由此,用户可立即知道在来自所述加压器的排气的流路产生了堵塞。(The emission spectroscopic analysis apparatus is provided with: a discharge cell 113 for exciting and emitting light from the sample by generating discharge therein; a pressurizer 146 as a container for containing liquid; a gas supply source 141 filled with an inert gas compressed to atmospheric pressure or higher; a gas supply line 142 having one end connected to the gas supply source 141 and the other end connected to the discharge chamber 113; a gas discharge pipe 145 having one end connected to the discharge chamber 113 and the other end opened to the liquid in the pressurizer 146; an exhaust line 147 having one end disposed above the liquid surface of the liquid in the pressurizer 146 and the other end opened to the outside of the pressurizer 146; a pressure sensor 151 for measuring the pressure of the inert gas in the gas supply line 142; and warning means 130 and 132 for warning the user when the measurement value obtained by the pressure sensor 151 exceeds a predetermined value. Thus, the user can immediately recognize that the clogging has occurred in the flow path of the exhaust gas from the pressurizer.)

1. A luminescence spectroscopic analysis apparatus comprising:

a) A discharge chamber for exciting and emitting light from the sample by generating discharge therein;

b) A pressurizer as a container for containing a liquid;

c) A gas supply source filled with an inert gas compressed to atmospheric pressure or higher;

d) A gas supply line having one end connected to the gas supply source and the other end connected to the discharge chamber;

e) A gas discharge pipe having one end connected to the discharge chamber and the other end opened into the liquid in the pressurizer;

f) An exhaust line having one end disposed above a liquid surface of the liquid in the pressurizer and the other end opened to an outside of the pressurizer;

g) A pressure sensor for measuring a pressure of the inert gas in an internal space of any one of the gas supply line, the discharge chamber, the gas discharge line, and the pressurizer; and

h) And a warning means for giving a warning to a user when a measurement value obtained by the pressure sensor exceeds a predetermined value.

2. a luminescence spectroscopic analysis apparatus comprising:

a) A discharge chamber for exciting and emitting light from the sample by generating discharge therein;

b) A pressurizer as a container for containing a liquid;

c) A gas supply source filled with an inert gas compressed to atmospheric pressure or higher;

d) A gas supply pipe having one end connected to the gas supply source and the other end opened into the discharge chamber;

e) A gas discharge pipe having one end opened into the discharge chamber and the other end opened into the liquid in the pressurizer;

f) An exhaust line having one end disposed above a liquid surface of the liquid in the pressurizer and the other end opened to an outside of the pressurizer;

g) A flow rate sensor that measures a flow rate of the inert gas in the gas supply line, the gas discharge line, or the exhaust line; and

h) and a warning means for giving a warning to a user when a measurement value obtained by the flow sensor is lower than a predetermined value.

3. a luminescence spectroscopic analysis apparatus according to claim 1 or 2, characterized in that: further comprises a flow regulating valve arranged on the gas supply pipeline, and

The pressure sensor or the flow sensor is disposed between the discharge chamber and the flow control valve in the gas supply line.

4. a luminescence spectroscopic analysis apparatus according to any one of claims 1 to 3, characterized in that: in addition to or instead of the warning means, a gas supply stopping means is provided that stops the supply of the inert gas from the gas supply source into the discharge chamber when a measured value obtained by the pressure sensor exceeds a predetermined value or when a measured value obtained by the flow sensor falls below a predetermined value.

5. A luminescence spectroscopic analysis apparatus according to any one of claims 1 to 3, characterized in that: in addition to or instead of the warning means, a gas discharge means is provided that discharges an inert gas to the outside from the gas discharge line or the pressurizer when a measured value obtained by the pressure sensor exceeds a predetermined value or when a measured value obtained by the flow sensor is lower than a predetermined value.

6. A luminescence spectroscopic analysis apparatus according to any one of claims 1 to 3, characterized in that: in addition to or instead of the warning means, a relief valve is provided in the gas discharge line or the pressurizer, the relief valve being opened in accordance with a pressure increase of the inert gas to release the inert gas in the gas discharge line or the pressurizer to the outside.

Technical Field

The present invention relates to a luminescence spectroscopic analyzer which excites and emits luminescence of a solid sample by electric discharge and measures the luminescence in a spectroscopic manner.

background

In a luminescence spectroscopy apparatus, a solid sample, which is a metal or a nonmetal, is generally subjected to energy application by arc discharge, spark discharge, or the like, thereby vaporizing and exciting the sample to emit light, and the emitted light is introduced into a spectrometer, and then a spectral line having a wavelength specific to each element is extracted and detected (for example, see patent document 1). In particular, a luminescence spectroscopic analyzer using spark discharge as an excitation source can perform highly accurate analysis, and is therefore widely used in a production plant for steel materials or nonferrous metal materials, for example, to analyze the composition of a metal body to be produced.

Fig. 3 shows a structure of a conventional general emission spectroscopy apparatus. The emission spectroscopic analysis apparatus includes: an excitation unit 210 that excites and emits light from the solid sample S; a spectroscopic unit 220 that detects the emission light from the sample S by wavelength dispersion; and a control and processing unit 230 for performing control and data processing of each unit.

The excitation unit 210 includes: a discharge generator 211, an electrode rod 212, a discharge chamber 213, a sample mounting plate 214, and a condenser lens 215. The discharge chamber 213 is provided with an analysis opening that opens obliquely upward and a light guide hole 213a for taking out light from the discharge chamber 213, and the sample placement plate 214 is detachably attached to the upper portion of the discharge chamber 213 so as to cover the analysis opening. The sample placement plate 214 has a central opening 214a smaller than the sample S, and the sample S is placed on the sample placement plate 214 so as to cover the central opening 214a of the sample placement plate 214, whereby a part of the lower surface (surface to be analyzed) of the sample S is exposed to the inside of the discharge chamber 213. The electrode rod 212 for discharge is disposed inside the discharge chamber 213 with its tip facing the central opening 214 a.

the discharge generator 211 applies a pulsed high voltage to the electrode rod 212 in synchronization with a predetermined frequency (for example, 400 Hz). The sample S such as an iron or nonferrous metal is excited to emit light by spark discharge from the electrode rod 212. The light emitted by the excitation light of the sample S passes through the light guide hole 213a provided in the discharge chamber 213, is condensed by the condenser lens 215, and is introduced into the spectroscopic unit 220 through the entrance slit 221.

the spectroscopic unit 220 includes, as disclosed in patent document 1 and the like, a diffraction grating 222 for dispersing the wavelength of light from the sample S, an exit slit 223a, an exit slit 223b, and an exit slit 223c disposed at positions where the spectral lines of the respective wavelengths reach, and a plurality of photodetectors (typically photomultiplier tubes) 224a, 224b, and 224c disposed behind the exit slits 223a, 223b, and 223c, in order to obtain spectral lines of wavelengths unique to the respective elements. The light entering the spectroscopic unit 220 from the excitation unit 210 through the entrance slit 221 is wavelength-dispersed by the diffraction grating 222, and light in a predetermined wavelength range passing through the exit slits 223a, 223b, and 223c among the wavelength-dispersed light is detected by the photodetectors 224a, 224b, and 224 c.

Detection signals from the photodetectors 224a, 224b, and 224c obtained by measurement of the sample are input to the control and processing unit 230 via an Analog/Digital (a/D) conversion unit 225, and intensity of a spectral line of a certain element having a certain content is obtained by performing predetermined data processing, and quantitative analysis or the like is performed on each element based on the intensity.

In the emission spectroscopic analyzer as described above, high-purity argon gas is introduced into the discharge chamber 213 at the time of measurement of a sample for the purpose of suppressing the influence of gas components in the discharge chamber 213 on an analysis result, stabilizing discharge to improve analysis accuracy, introducing the gas components into a spectroscope (spectroscopic unit 220) without attenuating light having a wavelength in the vacuum ultraviolet region, and preventing deterioration of analysis accuracy caused by retention of fine particles originating from the sample evaporated by discharge in the discharge chamber 213. Therefore, a gas supply line 242 for supplying argon gas from a gas supply source 241 such as a gas tank to the discharge chamber 213, and a gas discharge line 245 for discharging gas from the discharge chamber 213 are connected to the discharge chamber 213. The gas supply line 242 is provided with an on-off valve 243 and a flow rate control valve 244, and the argon gas is introduced into the discharge chamber 213 by controlling the processing unit 230 or by driving these valves by a user.

Further, in order to prevent the decrease in the purity of argon gas caused by the inflow of air from the surroundings, the pressure inside the discharge chamber 213 must be maintained higher than the atmospheric pressure. Therefore, the end of the gas discharge pipe 245 is not opened to the atmosphere, but is introduced into a container called a pressurizer 246 and opened to a liquid 246a such as water or oil contained in the pressurizer 246. At this time, the gas introduced into the pressurizer 246 from the end of the gas discharge line 245 is discharged to the outside through the discharge line 247 provided in the pressurizer 246. Further, one end of the exhaust line 247 is disposed above the liquid surface in the pressurizer 246, and the other end is open to the atmosphere outside the pressurizer 246.

some of the fine particles originating from the sample that evaporate in the discharge chamber 213 are captured by the liquid 246a in the pressurizer 246, but most pass through the pressurizer 246. Therefore, in order to prevent the particulates from being discharged into the room, the exhaust gas from the pressurizer 246 is usually discharged to the outside through an exhaust device, or as shown in fig. 3, is discharged into the room through a filter 248 provided on an exhaust pipe 247.

disclosure of Invention

problems to be solved by the invention

when the filter 248 is used as described, the filter must be replaced periodically. If the filter 248 is continuously used without replacement, the flow rate of the exhaust gas from the pressurizer 246 may be reduced due to clogging of the filter 248, and eventually the exhaust gas may not flow at all. Even when the exhaust gas is discharged to the outside through the exhaust device without using a filter, for example, the exhaust gas from the pressurizer 246 may not flow because particles of the evaporated sample are deposited in the flow path of the exhaust device or the end of the pipe for discharging the exhaust gas to the outside in a cold region freezes.

if the exhaust gas from the pressurizer 246 is overstressed due to such clogging of the flow path, the pressure in the gas flow path from the gas supply source 241 to the pressurizer 246 (i.e., the internal space of the gas supply line 242, the discharge chamber 213, the gas discharge line 245, and the pressurizer 246) is increased during the measurement of the sample, and at the moment the sample S is removed from the sample mounting plate 214 after the measurement is completed, there is a possibility that the liquid 246a in the pressurizer 246 flows back into the discharge chamber 213 to contaminate the discharge chamber 213.

The present invention has been made in view of the above circumstances, and an object thereof is to provide a luminescence spectroscopy apparatus which does not cause the above-described problem due to the blockage of the exhaust flow path from the pressurizer.

Means for solving the problems

The emission spectroscopic analysis apparatus according to claim 1 configured to solve the above problem is characterized by comprising:

a) A discharge chamber for exciting and emitting light from the sample by generating discharge therein;

b) A pressurizer as a container for containing a liquid;

c) a gas supply source filled with an inert gas compressed to atmospheric pressure or higher;

d) A gas supply line having one end connected to the gas supply source and the other end connected to the discharge chamber;

e) A gas discharge pipe having one end connected to the discharge chamber and the other end opened into the liquid in the pressurizer;

f) An exhaust line having one end disposed above a liquid surface of the liquid in the pressurizer and the other end opened to an outside of the pressurizer;

g) A pressure sensor for measuring a pressure of the inert gas in an internal space of any one of the gas supply line, the discharge chamber, the gas discharge line, and the pressurizer; and

h) And a warning means for giving a warning to a user when a measurement value obtained by the pressure sensor exceeds a predetermined value.

In the above-described emission spectroscopic analyzer having a function of supplying the inert gas from the gas supply source into the discharge chamber through the gas supply line and discharging the inert gas from the discharge chamber to the outside through the gas discharge line, the pressurizer and the exhaust line, if a blockage occurs in the flow path of the exhaust gas from the pressurizer, the pressure in the flow path of the inert gas reaching the pressurizer from the gas supply source through the discharge chamber abnormally increases. Therefore, in the invention 1, the pressure of the inert gas in the internal space of any one of the inert gas flow path, i.e., the gas supply line, the discharge chamber, the gas discharge line, or the pressurizer, is measured by the pressure sensor, and a warning is given to the user when the obtained measurement value exceeds a predetermined value. Thus, the user can immediately recognize that the flow path of the exhaust gas from the pressurizer is clogged, and take measures such as replacing a filter provided in the flow path of the exhaust gas, and performing inspection and maintenance of the exhaust equipment including the flow path. As a result, such a problem as the backflow of the liquid in the pressurizer as described above can be prevented.

Further, the emission spectroscopic analysis apparatus according to claim 2 may be configured to solve the above-mentioned problem, and includes:

a) A discharge chamber for exciting and emitting light from the sample by generating discharge therein;

b) A pressurizer as a container for containing a liquid;

c) A gas supply source filled with an inert gas compressed to atmospheric pressure or higher;

d) A gas supply pipe having one end connected to the gas supply source and the other end opened into the discharge chamber;

e) A gas discharge pipe having one end opened into the discharge chamber and the other end opened into the liquid in the pressurizer;

f) An exhaust line having one end disposed above a liquid surface of the liquid in the pressurizer and the other end opened to an outside of the pressurizer;

g) A flow rate sensor that measures a flow rate of the inert gas in the gas supply line, the gas discharge line, or the exhaust line; and

h) And a warning means for giving a warning to a user when a measurement value obtained by the flow sensor is lower than a predetermined value.

in the above-described emission spectroscopic analyzer having a function of supplying the inert gas from the gas supply source into the discharge chamber through the gas supply line and discharging the inert gas from the discharge chamber to the outside through the gas discharge line, the pressurizer, and the exhaust line, if a blockage occurs in the flow path of the exhaust gas from the pressurizer, the flow rate of the inert gas in the gas supply line, the discharge line, and the exhaust line abnormally decreases. Therefore, in the invention 2, the flow rate of the inert gas in the gas supply line, the gas discharge line, or the exhaust line is measured by a flow rate sensor, and a warning is given to a user when the obtained measurement value is lower than a predetermined value. Thus, the user can immediately recognize that the flow path of the exhaust gas from the pressurizer is clogged, and take measures such as replacing a filter provided in the flow path of the exhaust gas, and performing inspection and maintenance of the exhaust equipment including the flow path. As a result, it is possible to prevent a problem such as a backflow of the liquid in the pressurizer.

as the warning means according to claim 1 or 2, there may be considered the following warning means: when the measured value obtained by the pressure sensor exceeds a predetermined value or when the measured value obtained by the flow rate sensor is lower than a predetermined value, the meaning or the meaning that the blockage is generated in the flow path of the exhaust gas from the pressurizer is output to a screen of a monitor in the form of characters or figures or output from a speaker in the form of sound. The warning means is not limited to these warning means, and may be configured to turn on a lamp or sound a buzzer when a measured value obtained by the pressure sensor exceeds a predetermined value or when a measured value obtained by the flow sensor falls below a predetermined value.

The emission spectroscopic analysis device according to the above 1 or 2 is preferably as follows: the discharge chamber may further include a flow rate regulating valve provided in the gas supply line, and the pressure sensor or the flow rate sensor may be disposed between the discharge chamber and the flow rate regulating valve in the gas supply line.

The emission spectroscopic analyzer according to claim 1 or 2 may further include a gas supply stopping unit that stops supply of the inert gas from the gas supply source to the discharge chamber when a measured value obtained by the pressure sensor exceeds a predetermined value or when a measured value obtained by the flow sensor is lower than a predetermined value, in addition to or instead of the warning unit.

according to this configuration, when the flow path of the exhaust gas from the pressurizer is clogged, the supply of the inert gas is automatically stopped, and therefore, even when the user is not near the apparatus, the pressure of the inert gas can be prevented from further increasing.

The emission spectroscopic analysis device according to claim 1 or 2 may further include a gas discharge unit configured to discharge an inert gas to the outside from the gas discharge pipe or the pressurizer when a measured value obtained by the pressure sensor exceeds a predetermined value or when a measured value obtained by the flow sensor is lower than a predetermined value.

Further, the following configuration may be adopted: instead of the gas releasing means, the gas discharge line or the pressurizer is provided with a relief valve (relief valve) which is opened in accordance with a pressure rise of the inert gas and releases the inert gas in the gas discharge line or the pressurizer to the outside.

According to this configuration, when the flow path of the exhaust gas from the pressurizer is clogged, the inert gas is discharged from the gas discharge pipe or the pressurizer through the gas discharge member or the relief valve, and therefore, even when the user is located at a place remote from the apparatus, abnormal increase in the pressure of the inert gas can be immediately eliminated.

ADVANTAGEOUS EFFECTS OF INVENTION

As described above, according to the emission spectroscopy apparatus of the present invention including the above-described configuration, when the flow path of the exhaust gas from the pressurizer is clogged due to, for example, clogging of the filter, accumulation of sample particles in the exhaust device, or freezing of the pipe, the above-described meaning is detected based on the measurement value of the pressure sensor or the flow sensor, and a warning is given to the user, supply of the inert gas is stopped, or the inert gas is discharged to the outside of the apparatus. Therefore, undesirable pressure rise can be prevented, and troubles such as reverse flow of the liquid in the pressurizer can be avoided.

Drawings

fig. 1 is a schematic configuration diagram of a luminescence spectroscopic analysis apparatus according to an embodiment of the present invention.

FIG. 2 is a schematic configuration diagram of a luminescence spectroscopic analyzer according to another embodiment of the present invention.

FIG. 3 is a schematic configuration diagram of a conventional emission spectroscopic analyzer.

Detailed Description

The emission spectroscopic analyzer of the present invention will be described below with reference to embodiments. Fig. 1 is a diagram showing a main part configuration of a luminescence spectroscopic analysis apparatus according to the present embodiment. The same or corresponding constituent elements as those in fig. 3 are denoted by the same reference numerals as the last two digits, and the description thereof is omitted as appropriate.

the main difference between the emission spectroscopic analysis apparatus of the present embodiment and a conventional emission spectroscopic analysis apparatus is that a pressure sensor 151 is provided in a gas flow path from the gas supply source 141 to the pressurizer 146 through the discharge chamber 113. When the exhaust line 147 for discharging the gas in the pressurizer 146 or the filter 148 provided in the exhaust line 147 is clogged, the inert gas (here, argon gas) cannot be appropriately discharged from the pressurizer 146, and thus the pressure in the gas flow path increases. Therefore, by monitoring the pressure in the gas flow path by the pressure sensor 151, clogging of the exhaust line 147 or the filter 148 can be immediately detected.

The pressure sensor 151 may be provided in any one of the components constituting the flow path of the argon gas, i.e., the gas supply line 142, the discharge chamber 113, the gas discharge line 145, and the pressurizer 146. However, since the particles of the evaporated sample are suspended in the argon gas in the discharge chamber 113 and on the downstream side thereof, it is desirable to provide the pressure sensor 151 on the upstream side of the discharge chamber 113 in order to avoid the influence of the particles on the measurement value. Further, the pressure in the flow path on the upstream side of the flow rate control valve 144 is higher than that on the downstream side, and even if the exhaust line 147 or the filter 148 is clogged as described above, the pressure fluctuation range is smaller than that on the downstream side. Therefore, in the emission spectroscopic analyzer of the present embodiment, the pressure sensor 151 is disposed at a position downstream of the flow rate control valve 144 in the gas supply line 142.

The detection signal from the pressure sensor 151 is sent to the control and processing unit 130. Detection signals from the photodetectors 124a, 124b, and 124c of the spectroscope unit 120 are input to the control and processing unit 130 via the a/D converter 125. The control and processing unit 130 includes dedicated hardware, general-purpose hardware (such as a personal computer), or a combination thereof, and is further connected with an input unit 131 including a keyboard and the like, and an output unit 132 including a monitor or a speaker. The control and processing unit 130 performs control of the discharge generation unit 111, the on-off valve 143, the flow rate adjustment valve 144, and the like, in addition to predetermined data processing based on detection signals from the pressure sensor 151, the photodetector 124a, the photodetector 124b, and the photodetector 124 c. In the present embodiment, the control and processing unit 130 and the output unit 132 function as a warning means in cooperation with each other.

Next, a basic operation flow when a sample is measured in the emission spectroscopic analyzer of the present embodiment will be described. First, the user sets the sample S on the sample placement plate 114 of the excitation unit 110, and instructs the control and processing unit 130 to start the flushing (purge) of the discharge chamber 113 by performing a predetermined operation using the input unit 131. Then, the control and processing unit 130 opens the on-off valve 143 provided in the gas supply line 142 from the gas supply source 141 to the discharge chamber 113, and flushes the air inside the discharge chamber 113 with argon gas.

The flow rate of argon gas at this time is adjusted by the flow rate adjusting valve 144. The flow rate adjustment valve 144 includes a needle valve (needle valve) for reducing the flow rate of the fluid flowing through the gas supply line 142, and a dial (dial) for adjusting the opening degree of the needle valve, and the user manually operates the dial to change the opening degree of the needle valve, thereby adjusting the flow rate of the argon gas. Further, a reference of the flow rate obtained when the dial is rotated at various angles is described around the dial, and the flow rate is set to a relatively high value (for example, 5L/min) when the sample measurement is performed, and is set to a relatively low value (for example, 1L/min) when the flow rate is not measured. Hereinafter, the former is referred to as a "high flow" state, and the latter is referred to as a "low flow" state. Further, at the start time point of the flushing operation, the flow rate is set to "low".

Thereafter, at a point in time when a predetermined time has elapsed since the start of the flushing of the discharge chamber 113, the user operates the dial provided in the flow rate adjustment valve 144 to increase the argon flow rate to "high", and then performs a predetermined operation by the input unit 131 to instruct the control and processing unit 130 to perform the sample measurement. Then, the control and processing unit 130 controls the discharge generating unit 111, thereby applying a pulse-like high voltage from the discharge generating unit 111 to the electrode rod 112, and exciting the sample S to emit light by spark discharge from the electrode rod 112. The light emitted at this time passes through a light guide hole 113a provided in the discharge chamber 113, is condensed by a condenser lens 115, and is emitted toward the spectroscopic unit 120. The light emitted from the excitation unit 110 enters the spectroscopic unit 120 through the entrance slit 121, and is dispersed in wavelength by the diffraction grating 122. Light in a predetermined wavelength range among the wavelength-dispersed light passes through the exit slit 123a, the exit slit 123b, and the exit slit 123c, and is detected by the light detectors 124a, 124b, and 124 c.

When the sample measurement is completed once, the user operates the dial of the flow rate adjustment valve 144 again to return the argon gas flow rate to "low". Then, the sample S is replaced, or the position or the direction of the sample S on the sample placement plate 114 is changed so that a region of the surface of the sample S to be measured, which is not subjected to measurement, is exposed from the central opening 114 a. Thereafter, the user operates the dial of the flow rate adjustment valve 144 again to increase the flow rate of argon gas to "high", and instructs the control and processing unit 130 to perform the sample measurement using the input unit 131.

Thereafter, the replacement of the sample or the change of the position and the measurement of the sample are alternately performed as described above, and at the time point when all necessary measurements are completed, the user instructs the control and processing unit 130 to complete the flushing of the discharge chamber 113 through the input unit 131. Then, the control and processing unit 130 closes the on-off valve 143 of the gas supply line 142 to stop the introduction of the argon gas into the discharge chamber 113.

in the spectroluminescence analyzer of the present embodiment, the pressure in the gas supply line 142 is monitored by the pressure sensor 151 during the period from the start of the flushing of the discharge chamber 113 to the end of the flushing, which is associated with the measurement of the sample as described above. That is, the detection signal from the pressure sensor 151 is sent to the control and processing unit 130 at predetermined time intervals, and the control and processing unit 130 sequentially determines whether or not the measured value of the pressure obtained from the detection signal exceeds a predetermined upper limit value. When it is determined that the measurement value exceeds the upper limit value, a warning sound is emitted from a speaker of the output unit 132, and a message notifying the user that the exhaust passage from the pressurizer 146 (i.e., the exhaust passage 147 and the filter 148) is clogged is displayed on a screen of a monitor provided in the output unit 132.

even when the exhaust from the pressurizer 146 is performed normally, the pressure in the gas supply line 142 is different between the case where the argon gas flow rate is "high" and the case where the argon gas flow rate is "low". That is, the internal pressure of the gas supply line 142 is relatively high when the flow rate is "high", and the internal pressure is relatively low when the flow rate is "low". Therefore, it is preferable that the upper limit value be set individually for the case of "high" flow rate and the case of "low" flow rate. These upper limit values may be set by the user from the input unit 131 at the time of measurement, or may be set at the time of factory shipment of the device and stored in the memory in the control and processing unit 130.

The present invention is not limited to the above-described examples, and can be appropriately modified within the scope of the present invention. For example, in the above example, the blockage of the flow path of the exhaust gas from the pressurizer is detected based on the detection value of the pressure sensor, but a flow rate sensor may be provided instead of the pressure sensor. In this case, the flow rate sensor is provided in any one of the gas supply line 142, the gas discharge line 145, and the exhaust line 147, and a warning is given to the user when the flow rate detected by the flow rate sensor is lower than a predetermined lower limit value.

In addition to or instead of the warning to the user as described above, the control and processing unit 130 may close the on-off valve 143 provided in the gas supply line 142 to stop the supply of the argon gas when the measured value of the pressure sensor exceeds the predetermined upper limit value or when the measured value of the flow rate sensor is lower than the predetermined lower limit value. According to this configuration, when the exhaust gas from the pressurizer 146 cannot flow normally, the supply of the argon gas to the discharge chamber 113 is automatically stopped, and therefore, even when the user is not near the apparatus, a further increase in the pressure of the argon gas can be prevented.

as shown in fig. 2, a bypass 152 and a flow path switching valve 153 may be provided in the gas discharge line 145, and when the value measured by the pressure sensor 151 exceeds a predetermined upper limit value or the value measured by the flow rate sensor falls below a predetermined lower limit value, the control and processing unit 130 may switch the flow path switching valve 153 so that the argon gas discharged from the discharge chamber 113 flows toward the bypass 152 instead of the pressurizer 146. According to this configuration, when the exhaust line 147 or the filter 148 is clogged, the argon gas is automatically discharged from the gas discharge line 145 to the outside, and therefore, even when the user is located at a place remote from the apparatus, the pressure in the flow path can be immediately reduced. Instead of the bypass 152 and the flow path switching valve 153, a relief valve (discharge valve) may be provided to allow gas to escape from the gas discharge line 145 when the pressure abnormally increases. The relief valve is normally in a state of closing the valve by the force of a spring, but when a pressure equal to or higher than the force of the spring is received by an increase in the internal pressure, the valve opens, and as a result, the argon gas in the gas discharge line 145 is discharged to the outside. When the flow path switching valve 153 or the release valve is provided, it is desirable that the exhaust gas from the bypass pipe 152 or the release valve is sent to a predetermined collection container instead of the atmosphere in order to prevent fine particles of the sample contained in the exhaust gas from the discharge chamber 113 from being released to the periphery of the apparatus.

description of the symbols

110. 210: excitation part

111. 211: discharge generating part

112. 212, and (3): electrode bar

113. 213: discharge chamber

113a, 213 a: light guide hole

114. 214: sample placing plate

114a, 214 a: center opening

120. 220, and (2) a step of: light splitting part

121. 221: entrance slit

122. 222: diffraction grating

123a to 123c, 223a to 223 c: outlet slit

124a to 124c, 224a to 224 c: light detector

130: control and processing unit (warning device)

131: input unit

132: output unit

141. 241: gas supply source

142. 242: gas supply pipeline

143. 243, and (3) a step of: switch valve

144. 244: flow regulating valve

145. 245: gas discharge pipeline

146. 246: pressurizer

147. 247: exhaust pipeline

148. 248: filter

151: pressure sensor

152: shunt tube

153: a flow path switching valve.