阅读说明：本技术 一种真空chamber干燥机 (Vacuum chamber desiccator ) 是由 万堃鋆 于 2021-03-17 设计创作，主要内容包括：一种真空chamber干燥机,涉及LCD/OLED/半导体加工技术领域,包括干燥机包括由上部室体和下部室体贴合形成的密封设置的真空chamber、密封圈、多个设于下部室体上的真空排气通道、真空抽气装置、多个可升降的升降插销、用于带动所有的升降插销同时进行升降运动的升降装置,下部室体对应每个升降插销设有升降针孔,升降插销可相对升降针孔往复运动,升降装置包括框架以及驱动装置,所有的升降插销均安装在框架上,每个升降针孔对应设置有用于将升降插销保持在气密状态的真空压防漏气装置,真空压防漏气装置的两端分别与下部室体、框架连接,通过设置真空压防漏气装置,防止发生真空漏气现象,同时阻挡外部异物进入真空chamber中,从而减小加工玻璃不良的可能性。(A vacuum chamber dryer relates to the technical field of LCD/OLED/semiconductor processing, comprising a dryer, a sealing ring, a plurality of vacuum exhaust channels, a vacuum air extractor, a plurality of liftable lifting bolts and a lifting device, wherein the vacuum chamber is formed by the joint of an upper chamber body and a lower chamber body and is hermetically arranged, the vacuum exhaust channels are arranged on the lower chamber body, the lifting bolts are used for driving all the lifting bolts to simultaneously carry out lifting motion, the lower chamber body is provided with a lifting pin hole corresponding to each lifting bolt, the lifting bolts can reciprocate relative to the lifting pin holes, the lifting device comprises a frame and a driving device, all the lifting bolts are arranged on the frame, each lifting pin hole is correspondingly provided with a vacuum pressure air leakage prevention device used for keeping the lifting bolts in an airtight state, two ends of the vacuum pressure air leakage prevention devices are respectively connected with the lower chamber body and the frame, and the vacuum pressure air leakage prevention devices are arranged, the vacuum air leakage phenomenon is prevented, and external foreign matters are prevented from entering the vacuum chamber, so that the possibility of poor processed glass is reduced.)

1. A vacuum chamber dryer comprises a vacuum chamber (200) which is formed by an upper chamber body (201) and a lower chamber body (202) in a sealing mode, a sealing ring (240) arranged between the upper chamber body (201) and the lower chamber body (202), a plurality of vacuum exhaust channels (220) arranged on the lower chamber body (202), a vacuum air extraction device used for forming the sealing space of the vacuum chamber (200) into a vacuum state, a plurality of lifting pins (250) capable of ascending and descending, and a lifting device (280) used for driving all the lifting pins (250) to simultaneously carry out lifting motion, wherein the lower chamber body (202) is provided with a lifting pin hole (210) corresponding to each lifting pin (250), the lifting pins (250) can reciprocate relative to the lifting pin holes (210), and the lifting device (280) comprises a frame (281) and a driving device (282) used for driving the frame (281) to move up and down, all the lifting bolts (250) are installed on the frame (281), a vacuum pressure air leakage prevention device (260) for keeping the lifting bolts (250) in an airtight state is correspondingly arranged on each lifting pin hole (210), and two ends of the vacuum pressure air leakage prevention device (260) are respectively connected with the lower chamber body (202) and the frame (281).

2. The vacuum chamber dryer according to claim 1, wherein the vacuum pressure air leakage preventing means (260) comprises an elastic bellows (261), an upper connecting portion (262), and a lower connecting portion (263), the upper and lower connecting portions (262, 263) being fixedly installed at upper and lower ends of the elastic bellows (261), respectively, the upper connecting portion (262) being connected with the lower chamber body (202) in an airtight state, the lower connecting portion (263) being connected with the frame (281) in an airtight state.

3. The vacuum chamber dryer as claimed in claim 2, wherein the elastic bellows (261) is made of a resin material or a metal material.

4. The vacuum chamber dryer according to claim 1, wherein a guide member (270) for guiding the elevating movement is provided between the frame (281) and the lower chamber body (202).

5. The vacuum chamber dryer according to claim 4, wherein the guide member (270) comprises a guide sleeve (271) and guide posts (272) inserted in the guide sleeve (271), the guide sleeve (271) is mounted on the frame (281), and the guide posts (272) are fixedly mounted on the bottom of the lower chamber body (202).

6. The vacuum chamber dryer as claimed in claim 1, wherein the lifting pins (250) are sequentially provided at intervals in a length and width direction of the frame (281).

Technical Field

The invention relates to the technical field of LCD/OLED/semiconductor processing, in particular to a vacuum chamber dryer.

Background

As liquid crystal display devices such as LCDs become larger, the solvent content in the coating liquid for forming a coating film on Glass also increases. Therefore, recently, as the vacuum environment is formed, the solvent is smoothly volatilized, and the curing of the coating film is performed according to the vcd (vacuum Chamber dry) process and the heating process, so that the solvent is volatilized, that is, the Glass drying and curing treatment are performed by the high-temperature drying process in combination for the curing of the coating film.

FIG. 4 is a diagram of a Glass vacuum drying apparatus used in a vacuum drying process according to the prior art. Referring to fig. 4, according to the Glass vacuum drying apparatus (100) of the conventional art, the upper chamber (102a) and the lower chamber (102b) are closely connected to form a single sealed vacuum chamber (102), and a sealing ring (120) is installed along the periphery of the lower chamber (102b) or the upper chamber (102a) for the convenience of connection when the upper chamber (102a) and the lower chamber (102b) are closely attached to each other; a plurality of lifting pins (130) capable of lifting and descending and a lifting device (150) capable of lifting and descending the plurality of lifting pins (130) are arranged inside and outside the sealed space of the vacuum chamber (102), and only one lifting pin (130) is shown in figure 4 for convenience of description.

A lifting pin hole (110) is formed at the bottom of the lower chamber (102b) of the vacuum chambers (102) for mounting a lifting pin (130), and a plurality of vacuum exhaust channels (112) are formed in the bottom of the lower chamber (102b) for forming a vacuum environment for the closed space in the vacuum chamber (102). As described above, in the conventional art, when the upper chamber (102a) and the lower chamber (102b) are separated from each other, the closed space of the vacuum chamber (102) is opened, and in the case that the plurality of lift pins (130) are moved upward to support the Glass (114), and then lowered to the bottom of the lower chamber (102b) to place the Glass (114) at a right position, the upper chamber (102a) is brought into contact with the lower chamber (102b) to form the closed space, and a vacuum environment is formed in the vacuum chamber (102) through the plurality of vacuum exhaust passages (112) in a state where the packing (120) is hermetically sealed from the outside. When the inside and the outside of the vacuum chamber (102) are hermetically isolated by the sealing ring (120) to form vacuum pressure inside the vacuum chamber (102), the vacuum degree and cleanliness are increased and a certain pattern of airflow is formed.

Further, in the above-described conventional technique, when the vacuum drying process is performed on Glass (114), abrasion of the seal ring (120) and foreign substances caused by the abrasion due to repeated contact or interleaving of the upper Chamber (102a) and the lower Chamber (102b) for realizing the vacuum Chamber (102) and the like are inevitable. The foreign matter is discharged to the outside through the vacuum exhaust passage (112) in the vacuum exhaust process when the Glass (114) is vacuum-dried, but some foreign matter may be scattered in the space above the Glass (114) due to the influence of the irregular airflow pattern, thereby adversely affecting the vacuum-drying of the Glass.

Fig. 5 to 7 are sectional views showing the Glass vacuum drying apparatus of the conventional art with a rejection member in an enlarged view in which the main portions thereof are enlarged, according to embodiments 1 to 3. Referring to fig. 5 to 7, the Glass vacuum drying apparatus (100) according to the conventional art is provided with a foreign matter discharge member (140) guiding discharge of foreign matter generated by abrasion of the sealing ring (120) when vacuum is formed in the closed space of the vacuum chamber (102). When foreign matters are generated due to the staggering or frequent contact of the upper Chamber (102a) and the lower Chamber (102b), the foreign matters are enabled to flow to the inlet side of a vacuum exhaust channel (112) formed at the bottom of the lower Chamber (102b) without scattering in the vacuum exhaust process of the vacuum Chamber (102), and an artificial path is formed for guiding the flow, the foreign matter exhaust component (140) forms a partition plate which extends up and down and forms an exhaust hole (142) at the middle on the upper surface of the lower Chamber (100b) at the inner moving position of the sealing ring (120) and the vacuum Chamber (102) (see figure 7), a certain interval is left between the upper surface of the lower Chamber (102b) and the lower surface of the upper Chamber (102a), the partition plate is extended up and down to form a partition plate with the exhaust hole (142), or the edge of the upper Chamber (102a) extends towards the inside of the vacuum Chamber (102) transversely, a separator is constructed (see fig. 6).

In the conventional technology, a foreign matter discharge member (140) for discharging foreign matters is provided in the vacuum chamber (102) along the periphery of the seal ring (120). The foreign matter discharging member (140) prevents the foreign matters generated by the breakage of the seal ring (120) from scattering to the space on the Glass (114) in the vacuum chamber (102) in the vacuum exhaust process of the vacuum chamber (102), and leads the foreign matters to the inlet side of the vacuum exhaust channel (112) from the exhaust hole (142) through the airflow, thereby reducing the fraction defective of the Glass.

However, the Glass vacuum drying apparatus (100) of the above conventional art has the following problems: in the prior art, according to the lifting device (150), a plurality of lifting pins (130) are lifted or lowered through lifting pin holes (110) formed at the bottom of a lower chamber (102 b). In this case, the lift pin hole (110) must have a certain gap to allow the lift pin (130) to be raised or lowered. Therefore, even if a plurality of vacuum exhaust channels (112) are used to form a vacuum atmosphere in the closed space in the vacuum chamber (102) at the bottom of the bottom chamber (102b), a vacuum pressure and air leakage phenomenon is generated due to the gap between the lifting pin (130) and the lifting pin hole (110).

In addition, foreign materials may flow into the vacuum chamber (102) through the lift pin hole (110) due to a gap between the lift pin (130) and the lift pin hole (110), and accordingly Glass (114) may be damaged. Therefore, a new solution to the above-mentioned problem caused by the gap between the lift pin (130) and the lift pin hole (110) is also required while not interfering with the lift pin (130), and thus there is a need for improvement.

Disclosure of Invention

Aiming at the defects in the prior art, the invention aims to provide a vacuum chamber dryer, which has the following specific scheme:

a vacuum chamber dryer comprises a vacuum chamber, a sealing ring, a plurality of vacuum exhaust channels, a vacuum air extractor, a plurality of liftable lifting bolts and a lifting device, wherein the vacuum chamber is formed by an upper chamber body and a lower chamber body in a sealing mode, the sealing ring is arranged between the upper chamber body and the lower chamber body, the vacuum exhaust channels are arranged on the lower chamber body, the vacuum air extractor is used for enabling a sealing space of the vacuum chamber to be in a vacuum state, the liftable lifting bolts and the lifting device are used for driving all the lifting bolts to simultaneously perform lifting motion, the lower chamber body is provided with lifting pin holes corresponding to all the lifting bolts, the lifting bolts can reciprocate relative to the lifting pin holes, the lifting device comprises a frame and a driving device for driving the frame to move up and down, all the lifting bolts are arranged on the frame, and each lifting pin hole is correspondingly provided with a vacuum air pressing device for keeping the lifting bolts in an airtight state, and two ends of the vacuum pressure air leakage prevention device are respectively connected with the lower chamber body and the frame.

Further, the vacuum pressure leakage prevention device comprises an elastic corrugated pipe, an upper connecting part and a lower connecting part, wherein the upper connecting part and the lower connecting part are fixedly installed at the upper end and the lower end of the elastic corrugated pipe respectively, the upper connecting part is connected with the lower chamber body in an airtight state, and the lower connecting part is connected with the frame in an airtight state.

Further, the elastic corrugated pipe is made of a resin material or a metal material.

Furthermore, a guide member for guiding the lifting movement is arranged between the frame and the lower chamber body.

Furthermore, the guide member comprises a guide sleeve and a guide post inserted into the guide sleeve, the guide sleeve is mounted on the frame, and the guide post is fixedly mounted at the bottom of the lower chamber body.

Furthermore, the lifting bolts are arranged at intervals along the length direction and the width direction of the frame in sequence.

Compared with the prior art, the invention has the following beneficial effects:

(1) the dryer is used in industries such as semiconductors or flat panel displays, during operation, glass is placed on the lifting pin for processing, the driving device works to drive the frame to move upwards, the lifting pin penetrates through the lifting pin hole to jack the glass, and the vacuum air exhaust device is matched with the vacuum exhaust channel to enable the vacuum chamber to be in a vacuum state, so that the vacuum drying of the glass is realized;

(2) by arranging the guide member, the guide post reciprocates in the guide sleeve when the lifting bolt carries out lifting motion, thereby realizing the guide function and leading the lifting function to be smoothly carried out;

(3) through setting up the frame, a plurality of glass can process simultaneously during vacuum drying operation to reach the advantage that a drying project realized a plurality of glass, provide work efficiency.

Drawings

FIG. 1 is an overall schematic diagram of an embodiment of the present invention;

FIG. 2 is a schematic structural view showing the positions of the vacuum exhaust passage and the lifting pin hole according to the present invention;

FIG. 3 is a schematic view showing the structure of the vacuum pressure leakage prevention device according to the present invention;

FIG. 4 is a schematic view of a Glass vacuum drying apparatus used in the vacuum drying process in the background art;

fig. 5 to 7 are enlarged sectional views of the Glass vacuum drying apparatus with a foreign material discharging member according to embodiments 1 to 3 of the related art.

Reference numerals: 200. vacuum chamber; 201. an upper chamber body; 202. a lower chamber body; 210. lifting pin holes; 220. a vacuum exhaust channel; 230. glass; 240. a seal ring; 250. a lifting bolt; 260. A vacuum pressure anti-leakage device; 261. an elastic bellows; 262. an upper connecting portion; 263. a lower connecting portion; 270. a guide member; 271. a guide sleeve; 272. a guide post; 280. a lifting device; 281. a frame; 282. a drive device.

Detailed Description

The present invention will be described in further detail with reference to examples and drawings, but the present invention is not limited to these examples.

With reference to fig. 1 and 2, a vacuum chamber dryer is a large-scale machine as a whole, and a portion mainly used for vacuum drying of glass 230 is a vacuum chamber200, and is formed by attaching an upper chamber 201 and a lower chamber 202, the upper chamber 201 and the lower chamber 202 are equivalent to an upper die and a lower die, which can reciprocate relatively, and when glass 230 is processed, the vacuum chamber200 needs to be sealed to form a vacuum state, so as to meet processing conditions.

In order to improve the sealing performance between the upper chamber body 201 and the lower chamber body 202, the dryer further includes a sealing ring 240 disposed between the upper chamber body 201 and the lower chamber body 202. In order to realize the vacuum chamber200 forming the sealed space in the vacuum state, the dryer further comprises a plurality of vacuum exhaust channels 220 arranged on the lower chamber body 202, and a vacuum pumping device for forming the sealed space of the vacuum chamber200 in the vacuum state, wherein the vacuum pumping device is a prior art, and when the vacuum pumping device is operated, gas in the vacuum chamber200 is pumped out through the vacuum exhaust channels 220 to form negative pressure until the vacuum chamber is in the vacuum state.

In order to facilitate the worker to place the glass 230 to be processed, the dryer further includes a plurality of lifting pins 250 capable of being lifted and lowered, and a lifting device 280 for driving all the lifting pins 250 to perform lifting motion simultaneously. In detail, the lower chamber body 202 is provided with a lifting pin hole 210 corresponding to each lifting pin 250, and the lifting pin 250 can reciprocate relative to the lifting pin hole 210. When the dryer is not started to be processed, the worker places the glass 230 on the top of the lifting pin 250 so that the glass 230 is supported by the lifting pins 250, and when the lifting device 280 is operated, the lifting pin 250 moves upward relative to the lifting pin hole 210, so that the glass 230 placed on the lifting pin 250 is jacked up to cooperate with the upper chamber body 201.

Since the number of the lifting pins 250 in the drying machine is large, if each lifting pin 250 works independently, a plurality of devices for driving the lifting pin to lift are required, which is high in cost, and if the movement process of each lifting pin 250 is different, the supported glass 230 is prone to be inclined, which causes defects. In this embodiment, the lifting device 280 includes a frame 281 and a driving device 282 for driving the frame 281 to move up and down, all the lifting pins 250 are installed on the frame 281, one end of each lifting pin 250 is fixedly connected with the frame 281, the lifting pins 250 are sequentially arranged along the length and width directions of the frame 281 at intervals, the distance between two adjacent lifting pins 250 is set according to the size of the glass 230 to be processed, the glass 230 with a large size can be placed on all the lifting pins 250, and a plurality of glass 230 with a small size can be placed on the lifting tea pins at the same time.

In this embodiment, the frame 281 is generally square, and is internally reinforced by a plurality of cross beams arranged in a staggered manner, and the driving device 282 needs to perform linear motion and may be implemented by a motor, a cylinder driving device 282, and other transmission devices.

Since the plurality of lifting pins 250 are required to perform the lifting motion at the same time, in order to further improve the smoothness of the lifting motion, a guide member 270 for guiding the lifting motion is disposed between the frame 281 and the lower chamber 202. The guide member 270 includes a guide sleeve 271 and a guide post 272 inserted into the guide sleeve 271, the guide sleeve 271 is installed on the frame 281, the guide post 272 is fixedly installed at the bottom of the lower chamber body 202, and the guide post 272 reciprocates in the guide sleeve 271 when the elevating pin 250 performs an elevating motion, thereby performing a guiding function.

As shown in fig. 3, in the prior art, in order to ensure smooth movement of the lifting pin 250, the aperture of the lifting pin hole 210 is slightly larger than the diameter of the lifting pin 250, so that a gap exists between the lifting pin hole 210 and the lifting pin 250. Each of the lift pin holes 210 is correspondingly provided with a vacuum pressure leakage prevention device 260 for maintaining the lift pin 250 in an airtight state, and both ends of the vacuum pressure leakage prevention device 260 are respectively connected to the lower chamber body 202 and the frame 281. The vacuum pressure leakage preventing apparatus 260 includes an elastic bellows 261, an upper connection part 262, and a lower connection part 263, the elastic bellows 261 is made of a resin material or a metal material, such as teflon, stainless steel, and when compressed, the total length of the elastic bellows 261 is shortened. The upper and lower connection portions 262 and 263 may be provided as sealing type flanges, the upper and lower connection portions 262 and 263 are fixedly installed at the upper and lower ends of the elastic bellows 261, respectively, the upper connection portion 262 is connected with the lower chamber body 202 in an airtight state, and the lower connection portion 263 is connected with the frame 281 in an airtight state. In order to ensure the airtight state, an expansion type sealing ring can be arranged in the gap.

By providing the vacuum pressure leakage prevention means 260, the elastic bellows 261 is compressed when the lifting pin 250 moves upward, and when the lifting pin 250 is raised in the height direction to a height H, the compressed length of the elastic bellows 261 is also H, and the lifting pin 250 is similarly set when it is lowered. And because the upper connecting part 262 and the lower connecting part 263 are arranged, the lifting bolt 250 keeps an airtight state when lifting movement is carried out due to the cooperation of the three parts, the vacuum pressure air leakage phenomenon is prevented, and in addition, external foreign matters can be prevented from entering the vacuum chamber200 from a gap between the lifting bolt 250 and the lifting pin hole 210.

The above description is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above embodiments, and all technical solutions belonging to the idea of the present invention belong to the protection scope of the present invention. It should be noted that modifications and embellishments within the scope of the invention may occur to those skilled in the art without departing from the principle of the invention, and are considered to be within the scope of the invention.