阅读说明：本技术 一种基于表面等离激元的温度探测装置 (Temperature detection device based on surface plasmon ) 是由 杨雯 李佳保 杨培志 邓书康 葛文 王琴 于 2021-08-10 设计创作，主要内容包括：本发明属于温度探测领域,特别是涉及一种基于表面等离激元的温度探测装置。装置包括透明弹性材料层、金属阵列结构和热膨胀材料块,金属阵列结构设置在透明弹性材料层上,金属阵列结构由周期性排布的金属单元组成,金属单元上设置有缺口,金属单元和金属单元之间有缝隙,热膨胀材料块设置在缺口内。热膨胀材料块由于温度的改变发生膨胀,缝隙变窄,从而导致出射光谱中共振谷的位置发生移动,通过共振谷的位置移动,实现温度探测。本发明基于表面等离激元实现温度的探测,通过探测光信号来实现温度的探测,装置结构简单,更有利于在恶劣环境下使用,探测的精度高,体积小,方便集成。(The invention belongs to the field of temperature detection, and particularly relates to a temperature detection device based on surface plasmons. The device comprises a transparent elastic material layer, a metal array structure and a thermal expansion material block, wherein the metal array structure is arranged on the transparent elastic material layer and consists of metal units which are periodically arranged, gaps are arranged on the metal units, gaps are arranged between the metal units and the metal units, and the thermal expansion material block is arranged in the gaps. The thermal expansion material block expands due to the change of temperature, and the gap narrows, so that the position of a resonance valley in the emergent spectrum moves, and the temperature detection is realized through the position movement of the resonance valley. The invention realizes the temperature detection based on the surface plasmon, realizes the temperature detection by detecting the optical signal, has simple structure, is more favorable for being used in severe environment, has high detection precision and small volume, and is convenient for integration.)

1. A surface plasmon-based temperature detection device is characterized by comprising a transparent elastic material layer, a metal array structure and a thermal expansion material block;

the metal array structure is arranged on the transparent elastic material layer;

the metal array structure consists of metal units which are periodically arranged, and gaps are arranged on the metal units;

gaps are formed between the metal units;

said block of thermally expansive material being disposed within said gap;

the thermal expansion material block expands due to temperature change, the gap narrows, and accordingly the position of a resonance valley in an emergent spectrum moves, and temperature detection is achieved through the position movement of the resonance valley.

2. The surface plasmon-based temperature sensing device of claim 1 wherein said gap is rectangular and said gap extends through said metal unit.

3. The surface plasmon-based temperature sensing device of claim 1 wherein said gap is trapezoidal, said gap extending through said metal unit.

4. The surface plasmon based temperature detection apparatus of claim 2 or 3 further comprising an elasto-optic material disposed within said gap.

5. The surface plasmon-based temperature sensing device of claim 1, wherein the gap has a width of 100nm to 200 nm.

6. The surface plasmon-based temperature detection apparatus of claim 3 further comprising a plurality of metal particles disposed on both sides of said gap top and on said block of thermally expansive material.

7. The surface plasmon-based temperature sensing device of claim 1 wherein the material of the metal array structure is a noble metal material.

8. The surface plasmon-based temperature sensing device of claim 1, wherein the material of said block of thermally expansive material is an ethylene vinyl acetate polymer.

9. The surface plasmon based temperature detection apparatus of claim 4 wherein said photoelastic material is lead lanthanum zirconate titanate.

Technical Field

The invention belongs to the field of temperature detection, and particularly relates to a temperature detection device based on surface plasmons.

Background

At present, temperature sensors play an important role in safety production. For example, in a laboratory temperature-dependent instrument, a temperature-controlled test chamber, a high-temperature furnace; temperature-related places in production, temperatures under mines, temperatures in workshops, etc. However, most of the conventional temperature sensors are realized by the change of an electric signal, and the temperature sensor based on the change of the electric signal is greatly limited in practical application, so that on one hand, the use of the electric signal can cause additional potential safety hazards to certain environments (such as coal mines), and on the other hand, the temperature sensor is greatly interfered by the environment and has low detection precision when used in severe environments.

Disclosure of Invention

In order to solve the problems that the existing sensor is greatly interfered by the environment and has low detection precision and the like when used in a severe environment, the invention provides a temperature detection device based on surface plasmons, and the problems of large use error and low detection precision in the severe environment are solved.

The purpose of the invention is realized by the following technical scheme:

a surface plasmon-based temperature detection device comprises a transparent elastic material layer, a metal array structure and a thermal expansion material block;

the metal array structure is arranged on the transparent elastic material layer;

the metal array structure consists of metal units which are periodically arranged, and gaps are arranged on the metal units;

gaps are formed between the metal units;

said block of thermally expansive material being disposed within said gap;

the thermal expansion material block expands due to temperature change, the gap narrows, and accordingly the position of a resonance valley in an emergent spectrum moves, and temperature detection is achieved through the position movement of the resonance valley.

Optionally, the notch is rectangular, and the notch penetrates through the metal unit.

Optionally, the notch is trapezoidal, and the notch penetrates through the metal unit.

Optionally, the elastic light material is further included, and the elastic light material is arranged in the gap.

Optionally, the width of the gap is 100nm to 200 nm.

Optionally, the thermal expansion device further comprises a plurality of metal particles, and the metal particles are arranged on two sides of the top of the gap and on the thermal expansion material block.

Optionally, the material of the metal array structure is a noble metal material.

Optionally, the material of the block of thermally expansive material is an ethylene vinyl acetate polymer.

Optionally, the elastic and optical material is lead lanthanum zirconate titanate.

According to the specific embodiment provided by the invention, the invention discloses the following technical effects:

1. the thermal expansion material block expands due to temperature change, the gap narrows, and accordingly the position of a resonance valley in an emergent spectrum moves, and temperature detection is achieved through the position movement of the resonance valley.

2. Based on the detection of surface plasmons, the structure of the device is in a nanometer level, and the device is simple in structure, small in size and convenient to integrate.

3. The detection device realizes the detection of temperature through detecting optical signals, avoids the use of electric signals from causing additional potential safety hazards to certain environments (such as coal mines) on one hand, and has small interference of the environment when used in severe environment on the other hand.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without inventive exercise.

FIG. 1 is a sectional view of a surface plasmon-based temperature detection apparatus according to example 1;

FIG. 2 is a sectional view of a surface plasmon-based temperature detection apparatus according to example 2;

FIG. 3 is a sectional view of a surface plasmon-based temperature detection apparatus according to example 3;

FIG. 4 is a sectional view of a surface plasmon-based temperature sensing apparatus according to example 4.

Description of the symbols:

1-a transparent elastomeric layer, 2-a metal unit, 21-a first metal block, 22-a second metal block, 3-a block of thermally expansive material, 4-a gap, 5-a metal particle.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

The terms "first," "second," "third," and the like in the description and in the claims, as well as in the drawings, if any, are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the objects so described are interchangeable under appropriate circumstances. Furthermore, the terms "comprising" and "having," as well as any variations thereof, are intended to cover non-exclusive inclusions.

In the present disclosure, the drawings discussed below and the embodiments used to describe the principles of the present disclosure are for illustration purposes only and should not be construed to limit the scope of the present disclosure. Those skilled in the art will understand that the principles of the present invention may be implemented in any suitably arranged system. Reference will now be made in detail to the exemplary embodiments, examples of which are illustrated in the accompanying drawings. Further, a terminal according to an exemplary embodiment will be described in detail with reference to the accompanying drawings. Like reference symbols in the various drawings indicate like elements.

The terms used in the description of the present invention are only used to describe specific embodiments, and are not intended to show the concept of the present invention. Unless the context clearly dictates otherwise, expressions used in the singular form encompass expressions in the plural form. In the present specification, it is to be understood that terms such as "comprising," "having," and "containing" are intended to specify the presence of stated features, integers, steps, acts, or combinations thereof, as taught in the present specification, and are not intended to preclude the presence or addition of one or more other features, integers, steps, acts, or combinations thereof. Like reference symbols in the various drawings indicate like elements.

The invention aims to provide a temperature detection device based on surface plasmons, so that the detection accuracy of temperature is higher, and the detector can be used in a severe environment.

In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.

Example 1

As shown in fig. 1, the surface plasmon-based temperature detection apparatus includes a transparent elastic material layer 1, a metal array structure, and a thermally expansive material block 3; the metal array structure is arranged on the transparent elastic material layer 1; the metal array structure is composed of metal units 2 which are periodically arranged, and gaps are arranged on the metal units 2; a gap 4 is arranged between the metal unit 2 and the metal unit 2; said block 3 of thermally expandable material is arranged in said gap.

The material of the thermal expansion material block is ethylene-vinyl acetate polymer, the thermal expansion coefficient is large, and the temperature change of the thermal expansion material block is proportional to the length change so as to realize the temperature detection with higher sensitivity.

The transparent elastic material layer is made of polydimethylsiloxane, so that light can penetrate through the transparent elastic material layer, and the transmission spectrum of the device can be conveniently tested.

The principle of the device is as follows:

when light irradiates on the metal array structures which are periodically arranged, the light and the metal array structures which are periodically arranged interact with each other, plasmon resonance is formed on the surfaces of the metal array structures, and transmission spectral lines are obtained by detecting signals of transmitted light. The intensity of the transmitted light, and the shift of the peaks and valleys in the transmission line, is dependent on the shape of the metal array, and the variation in the pitch of the metal array structural elements. The invention is based on the property that the block of thermally expandable material 3 is deformed by a change in temperature, that is to say the block of thermally expandable material 3 expands as the temperature rises. The metal unit is urged by the expansion of the block of thermally expandable material 3, causing narrowing of the gap 4, which results in a red shift from the wavelength of the surface plasmon resonance in the gap 4, resulting in a red shift in the position of the resonance valley in the spectral line.

Due to the large coefficient of thermal expansion of the block of thermally expansive material 3, the temperature change of the block of thermally expansive material is proportional to the change in length. That is, the width of the slit 4 is changed by temperature, and the coupling between the metal units is changed, thereby realizing high-precision detection. The change in temperature corresponds to a red shift of the resonance line. The invention realizes the temperature detection based on the surface plasmon, realizes the temperature detection through the movement of the resonance valley of the spectral line, and has the advantages of high detection precision, simple device structure, small volume and convenient integration.

The distance between the gaps 4 is 100nm-200nm, so that coupling between the metal units 2 is facilitated, and strong surface plasmon resonance can be generated in the gaps 4. When the distance of the gap 4 is less than 100nm, the manufacturing difficulty is high; when the distance of the slits 4 is greater than 200nm, the coupling between the gold elements is weak, that is, the expansion of the thermally-expansible material block 3 does not significantly change the coupling between the metal elements, the sensitivity of detection is not high, so that the slit pitch between the metal elements is set to be between 100nm and 200 nm.

The metal array structure is made of a noble metal material, the noble metal material can generate surface plasmon resonance under illumination, and the noble metal material is preferably gold or silver.

In this embodiment, the shape of the notch is not limited, so the preparation is simple. When the size of the gap is enlarged, the width of the slit 4 can be changed more, thereby shifting the transmission valley in the transmission spectrum more, thereby realizing high-sensitivity temperature detection.

Example 2

As shown in fig. 2, the surface plasmon-based temperature detection device includes a transparent elastic material layer 1, a metal array structure and a thermal expansion material block 3, wherein the metal array structure is disposed on the transparent elastic material layer 1; the metal array structure is composed of metal units which are periodically arranged, wherein the metal units are provided with through gaps, and the cross sections of the gaps are rectangular. The metal unit is divided into a first metal block 21 and a second metal block 22, and the block 3 of thermally expansive material is disposed in the gap between the first metal block 21 and the second metal block 22. That is to say, the thermal expansion material block 3 is in contact with the transparent elastic material layer 1, and the expansion of the thermal expansion material block 3 will drive the deformation of the transparent elastic material layer 1.

Specifically, in the invention, light irradiates on the metal array structure, the light interacts with the periodically arranged metal array structure, and plasmon resonance is formed on the metal array structure. When the temperature rises, the thermal expansion material block 3 expands, and due to the fact that the notch penetrates through the metal unit 2, the thermal expansion material 3 and the transparent elastic material layer 1 are in contact with each other, the thermal expansion material block 3 expands, on one hand, the first metal block 21 and the second metal block 22 of the metal unit are squeezed to move outwards, the distance of the gap 4 is narrowed, and the position of a transmission valley in the transmission spectrum is red-shifted. The detection of the temperature is achieved by detecting the red shift of the resonance valley. The notch penetrates through the metal unit, so that the thermal expansion material block 3 is in direct contact with the transparent elastic material layer 1, the spectral line red shift amount is larger, and the detection precision is higher.

Furthermore, the slit 4 is further provided with an elasto-optic material, specifically, the elasto-optic material is lead lanthanum zirconate titanate, the external temperature changes, the expansion amount of the thermal expansion material block 3 changes, the width of the slit 4 changes, that is, when the temperature rises, the thermal expansion material block 3 expands, the distance between the metal unit 2 and the metal unit 2 becomes narrow, and the expansion of the thermal expansion material block 3 exerts a force on the first metal block 21 and the second metal block 22, and the acting force acts on the elasto-optic material, so that the isotropic elasto-optic material becomes an anisotropic elasto-optic material, that is, the refractive index of the elasto-optic material changes. Specifically, the increase in temperature causes, on the one hand, the expansion of the block of thermally expandable material 3, narrowing the width of the gap 4. On the other hand, the refractive index of the elasto-optical material is changed, the higher the temperature is, the larger the stress is, the higher the refractive index of the elasto-optical material is, the coupling between the metal units is changed, and the spectral line is red-shifted. Thus, the introduction of the elasto-optic material increases the amount of red-shifting of the valleys of resonance in the transmission spectrum, resulting in higher accuracy of detection.

Example 3

On the basis of the embodiment 2, the present invention is different from the embodiment 2 only in that, as shown in fig. 3, the notch on the metal unit of the embodiment is trapezoidal, the notch penetrates through the metal unit, the contact area with the first metal block 21 and the second metal block 22 is increased, in addition, the pushing force of the expansion of the thermal expansion material block 3 applied to the metal blocks is not uniform, the pushing force applied to the upper ends of the first metal block 21 and the second metal block 22 is increased, the gap 4 between the first metal block 21 and the adjacent second metal block 22 becomes an inverted wedge shape, and the transmission amount of light passing through the gap is reduced. The gap is trapezoidal, the change amount of the gap 4 is larger under the change of the temperature, the red shift of the spectral line is more obvious, and the accuracy of temperature detection is higher.

Example 4

On the basis of embodiment 3, the present invention is different from embodiment 3 only in that, as shown in fig. 4, a plurality of metal particles 5 are further included, and the metal particles 5 are disposed on both sides of the top of the slit 4 and on the thermally-expansible material block 3. The thermal expansion material block 3 expands, so that on one hand, the resonance distance between the metal particles 5 and the metal units is changed, the distance of expansion resonance of the thermal expansion material block is increased, and the corresponding spectral line red shift of the metal particle scattering is realized; on the other hand, due to the arrangement of the metal particles, light close to the gaps is scattered, so that light intensity between the gaps of the metal units is weakened, transmitted light is reduced, resonance valleys in a detection spectrum are more obvious, and measurement is more accurate.

The detection device realizes the detection of temperature through detecting optical signals, avoids the use of electric signals from causing additional potential safety hazards to certain environments (such as coal mines) on one hand, and has small interference of the environment when used in severe environment on the other hand.

The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.

The principles and embodiments of the present invention have been described herein using specific examples, which are provided only to help understand the method and the core concept of the present invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In view of the above, the present disclosure should not be construed as limiting the invention.