阅读说明：本技术 一种mems热式麦克风及其实现方法 (MEMS (micro-electromechanical system) thermal microphone and implementation method thereof ) 是由 朱哲政 杨凌濛 杨振川 高成臣 郝一龙 于 2021-08-20 设计创作，主要内容包括：本发明公开了一种MEMS热式麦克风及其实现方法。本发明在衬底上形成背腔,将敏感梁置于背腔上,并在背腔上设置上盖板形成驻波管；声波从驻波管的管口进入至驻波管内,声压变化引起敏感梁上的温度发生扰动；同时,声波入在驻波管的管底即背腔的表面反射形成驻波,驻波管的管底是硬声场边界,保证声粒子振速为零,敏感梁处的声压为驻波管的管口入射声压的两倍,因此敏感梁的温度只与入射声压成正比,不会受到声粒子振速的影响,消除谐波失真；本发明的麦克风结构与热式声粒子振速传感器类似,制造工艺相同,能够在同一个芯片上完成声压和声粒子振速的测量。(The invention discloses an MEMS (micro-electromechanical systems) thermal microphone and an implementation method thereof. The method comprises the steps of forming a back cavity on a substrate, placing a sensitive beam on the back cavity, and arranging an upper cover plate on the back cavity to form a standing wave tube; sound waves enter the standing wave tube from the tube opening of the standing wave tube, and the temperature on the sensitive beam is disturbed due to the change of the sound pressure; meanwhile, the sound waves enter the tube bottom of the standing wave tube, namely the surface of the back cavity, and are reflected to form standing waves, the tube bottom of the standing wave tube is a hard sound field boundary, the vibration speed of sound particles is guaranteed to be zero, and the sound pressure at the sensitive beam is twice of the incident sound pressure at the tube opening of the standing wave tube, so that the temperature of the sensitive beam is only in direct proportion to the incident sound pressure, the influence of the vibration speed of the sound particles is avoided, and harmonic distortion is eliminated; the microphone structure of the invention is similar to the thermal type sound particle vibration velocity sensor, the manufacturing process is the same, and the measurement of sound pressure and sound particle vibration velocity can be completed on the same chip.)

1. A MEMS thermal microphone, comprising: the temperature measuring device comprises a substrate, a sensitive beam, an electrode, a back cavity, an upper cover plate and a temperature measuring circuit; wherein, the substrate is made of hard material; a back cavity is arranged on the upper surface of the substrate; two ends of the sensitive beam are erected on the edge of a back cavity on the upper surface of the substrate, and a sensitive area of the sensitive beam is positioned on the back cavity; two electrodes are arranged on the part of the upper surface of the substrate, which is not provided with the back cavity; two ends of the sensitive beam are respectively connected with an electrode, and the two electrodes are connected to an external temperature measuring circuit; an upper cover plate is arranged on a back cavity on the upper surface of the substrate, the inner surface of the upper cover plate and the surface of the back cavity form a standing wave tube, and the upper cover plate is cylindrical or in a cover shape; the upper cover plate is hollow and has no upper bottom and lower bottom, the bottom end is positioned on the upper surface of the substrate and is hermetically connected with the upper surface of the substrate, the top end is used as a pipe orifice of the standing wave tube, the inner diameter of the upper cover plate is not less than the diameter of the upper surface of the back cavity, and the inner diameter d and the height L of the upper cover plate and the highest frequency f of the measured sound wave are same_hIn relation, the inner diameter d satisfies the following equation:

c₀is the speed of sound of the medium within the standing wave tube; the height L of the cylindrical upper cover plate satisfies the following formula:

one side of the upper cover plate of cover form is located the outward flange of back of the body chamber and is connected with the upper surface sealing of substrate, and the internal surface of roof is the plane, is located on the back of the body chamber and is on a parallel with the upper surface of substrate, and the opposite side has the distance with the upper surface of substrate to form the opening, and as the mouth of pipe of standing wave pipe, the distance s between the internal surface of roof and the upper surface of substrate is relevant with the frequency band of measuring the sound wave, satisfies the following formula:

the current is added to the sensitive beam through the electrode by the temperature measuring circuit, the current flows through the sensitive beam to generate joule heat, the temperature of the sensitive beam is more than 200 ℃, and stable temperature distribution is formed in the back cavity; sound waves enter the standing wave tube from the tube opening of the standing wave tube, and the temperature on the sensitive beam is disturbed due to the change of the sound pressure; meanwhile, the sound field not only has the change of sound pressure, but also has the change of the vibration velocity of sound particles, and the vibration velocity of the sound particles can take away the heat on the sensitive beam, so that the temperature of the sensitive beam is reduced, namely the vibration velocity of the sound particles can also change the temperature of the sensitive beam; when sound waves are incident into a standing wave tube formed by the upper cover plate and the back cavity, standing waves are formed at the tube bottom of the standing wave tube, namely the surface of the back cavity, in a reflecting mode, the tube bottom of the standing wave tube is a hard sound field boundary, the depth of the back cavity is larger than 250 micrometers so as to ensure that the heating temperature of the sensitive beam is larger than 200 ℃ and heat is not directly conducted away by a substrate, the upper limit of the depth enables the sensitive beam to be located in front of a first antinode of the vibration velocity of the sound particles, the disturbance of the vibration velocity of the sound particles on the temperature of the sensitive beam tends to zero, and the distance between the obtained sensitive beam and the tube bottom of the standing wave tube, namely the depth x of the back cavity meets the following formula:

the amplitude of sound pressure at the sensitive beam is twice of the amplitude of incident sound pressure at the pipe orifice of the standing wave pipe, the temperature of the sensitive beam is only in direct proportion to the incident sound pressure and cannot be influenced by the vibration speed of sound particles, and harmonic distortion is eliminated; the temperature measuring circuit collects temperature signals on the sensitive beam and converts the temperature signals into voltage signals to obtain the amplitude and frequency of sound pressure.

2. The MEMS thermal microphone of claim 1 wherein the substrate is silicon or glass.

3. The MEMS thermal microphone of claim 1 wherein the upper cover plate is silicon or stainless steel.

4. The MEMS thermal microphone according to claim 1, wherein the cover-shaped MEMS thermal microphone is used for the upper cover plate, a side portion of the substrate located in the back cavity is hollowed out to form a flow channel, the flow channel is located at a tube opening of the standing wave tube, and the thermal acoustic particle vibration velocity sensor is disposed in the flow channel, so that the cover-shaped thermal acoustic particle vibration velocity sensor and the MEMS thermal microphone are integrated on the same chip, and the thermal acoustic particle vibration velocity sensor is located at the same point as an acoustic center of the MEMS thermal microphone.

5. A method of implementing a MEMS thermal microphone according to claim 1, comprising the steps of:

1) preparing a device:

a) providing a substrate of a hard material;

b) a back cavity is arranged on the upper surface of the substrate;

c) erecting two ends of a sensitive beam at the edge of a back cavity on the upper surface of a substrate, wherein a sensitive area of the sensitive beam is positioned on the back cavity;

d) two electrodes are arranged on the part of the upper surface of the substrate, which is not provided with the back cavity;

e) two ends of the sensitive beam are respectively connected with an electrode, and the two electrodes are connected to an external temperature measuring circuit;

f) an upper cover plate is arranged on a back cavity on the upper surface of the substrate, the inner surface of the upper cover plate and the surface of the back cavity form a standing wave tube, and the upper cover plate is cylindrical or in a cover shape; the upper cover plate is hollow and has no upper bottom and lower bottom, the bottom is positioned on the upper surface of the substrate and is hermetically connected with the upper surface of the substrate, the top is used as a pipe orifice of the standing wave tube, the inner diameter of the upper cover plate is not less than the diameter of the upper surface of the back cavity, and the inner diameter d and the height L of the upper cover plate are equal to those of the upper surface of the back cavityMeasuring the maximum frequency f of the sound wave_hIn relation, the inner diameter d satisfies the following equation:

c₀is the speed of sound of the medium; the height L of the cylinder satisfies the following formula:

one side of the upper cover plate of cover form lies in the outward flange of back of the body chamber and is connected with the upper surface sealing of substrate, and the internal surface of roof is the plane, and is on a parallel with the upper surface of substrate, and the opposite side has the distance with the upper surface of substrate to form the opening, and as the mouth of pipe of standing wave pipe, the distance s between the internal surface of roof and the upper surface of substrate is relevant with the frequency band of measuring the sound wave, satisfies the following formula:

2) the current is added to the sensitive beam through the electrode by the temperature measuring circuit, and the current flows through the sensitive beam to generate joule heat to form stable temperature distribution in the back cavity;

3) sound waves enter the standing wave tube from the tube opening of the standing wave tube, and the temperature on the sensitive beam is disturbed due to the change of the sound pressure;

4) meanwhile, the sound field not only has the change of sound pressure, but also has the change of the vibration velocity of sound particles, and the vibration velocity of the sound particles can take away the heat on the sensitive beam, so that the temperature of the sensitive beam is reduced, namely the vibration velocity of the sound particles can also change the temperature of the sensitive beam; when sound waves are incident into a standing wave tube formed by the upper cover plate and the back cavity, standing waves are formed at the tube bottom of the standing wave tube, namely the surface of the back cavity, in a reflecting mode, the tube bottom of the standing wave tube is a hard sound field boundary, the depth of the back cavity is larger than 250 micrometers, the fact that the heating temperature can be larger than 200 ℃ and heat is not directly conducted away by a substrate is guaranteed, the upper limit of the depth enables a sensitive beam to be located in front of a first antinode of the vibration velocity of the sound particles, the fact that the vibration velocity of the sound particles is approximately zero in disturbance on the temperature of the sensitive beam is guaranteed, and the distance between the obtained sensitive beam and the bottom of the standing wave tube, namely the depth x of the back cavity meets the following formula:

the sound pressure at the sensitive beam is twice of the incident sound pressure of the pipe orifice of the standing wave pipe, the temperature of the sensitive beam is only in direct proportion to the incident sound pressure and cannot be influenced by the vibration speed of sound particles, and harmonic distortion is eliminated;

5) the temperature measuring circuit collects temperature signals on the sensitive beam and converts the temperature signals into voltage signals to obtain the amplitude and frequency of sound pressure.

6. The implementation method of claim 5, further comprising dividing the amplitude of the sound pressure at the sensing beam by two to obtain the amplitude of the incident sound pressure at the orifice of the standing wave tube according to the fact that the amplitude of the sound pressure at the sensing beam is twice the amplitude of the incident sound pressure at the orifice of the standing wave tube.

7. The method of claim 5, wherein the sound wave enters the standing wave tube from the tube orifice of the standing wave tube, and the temperature on the sensitive beam is disturbed by the sound pressure change Δ P, and the disturbance Δ T satisfies the following formula:

wherein, T_mAnd P_mRespectively representing the ambient temperature and the atmospheric pressure, and gamma is the specific heat ratio of the gas; increasing the heating temperature T of the sensitive beam_mThe temperature disturbance Δ T is increased, thereby improving the sensitivity of the microphone.

Technical Field

The invention relates to a micro-electromechanical sensing technology, in particular to an MEMS (micro-electromechanical system) thermal microphone and an implementation method thereof.

Background

The sound is the vibration propagation of medium molecules, the density of the medium corresponds to the change of sound pressure, and the vibration speed of the medium molecules corresponds to the vibration speed of the sound particles. The sound pressure is a scalar quantity and can be directly measured by a microphone, the vibration velocity of sound particles is a vector quantity, and the most effective detection means at present is based on a thermal principle. The thermal acoustic vector sensor consists of a heating beam and a temperature measuring beam, wherein the heating beam provides stable thermal field distribution, the temperature measuring beam senses the disturbance of acoustic particles to a thermal field during vibration, and the vibration speed of the acoustic particles is measured through the temperature change of the temperature measuring beam.

In order to obtain complete sound field information, the measurement of sound pressure and vibration velocity is currently achieved by combining a thermal acoustic particle vibration velocity sensor with a conventional micro-electromechanical system (MEMS) microphone in the same probe. This solution has the following disadvantages:

the two sensors are assembled together, so that the acoustic center common point cannot be ensured, and the measured sound pressure and vibration velocity signals have phase difference;

traditional piezoelectric type and capacitance type microphones are difficult to integrate with a thermal type sound particle vibration velocity sensor in a single chip due to different manufacturing processes.

Disclosure of Invention

In order to solve the problems in the prior art, the invention provides an MEMS thermal microphone and an implementation method thereof.

One object of the present invention is to provide a MEMS thermal microphone.

The MEMS thermal microphone of the present invention comprises: the temperature measuring device comprises a substrate, a sensitive beam, an electrode, a back cavity, an upper cover plate and a temperature measuring circuit; wherein, the substrate is made of hard material; a back cavity is arranged on the upper surface of the substrate; two ends of the sensitive beam are erected on the edge of a back cavity on the upper surface of the substrate, and a sensitive area of the sensitive beam is positioned on the back cavity; two electrodes are arranged on the part of the upper surface of the substrate, which is not provided with the back cavity; two ends of the sensitive beam are respectively connected with an electrode, and the two electrodes are connected to an external temperature measuring circuit; an upper cover plate is arranged on the back cavity on the upper surface of the substrate, the inner surface of the upper cover plate and the surface of the back cavity form a standing wave tube, and the upper cover plate adoptsCylindrical or hood-shaped; the upper cover plate is hollow and has no upper bottom and lower bottom, the bottom end is positioned on the upper surface of the substrate and is hermetically connected with the upper surface of the substrate, the top end is used as a pipe orifice of the standing wave tube, the inner diameter of the upper cover plate is not less than the diameter of the upper surface of the back cavity, and the inner diameter d and the height L of the upper cover plate and the highest frequency f of the measured sound wave are same_hIn relation, the inner diameter d satisfies the following equation:

c₀is the speed of sound of the medium within the standing wave tube; the height L of the cylindrical upper cover plate satisfies the following formula:

one side of the upper cover plate of cover form is located the outward flange of back of the body chamber and is connected with the upper surface sealing of substrate, and the internal surface of roof is the plane, is located on the back of the body chamber and is on a parallel with the upper surface of substrate, and the opposite side has the distance with the upper surface of substrate to form the opening, and as the mouth of pipe of standing wave pipe, the distance s between the internal surface of roof and the upper surface of substrate is relevant with the frequency band of measuring the sound wave, satisfies the following formula:

the current is added to the sensitive beam through the electrode by the temperature measuring circuit, the current flows through the sensitive beam to generate joule heat, the temperature of the sensitive beam is more than 200 ℃, and stable temperature distribution is formed in the back cavity; sound waves enter the standing wave tube from the tube opening of the standing wave tube, and the temperature on the sensitive beam is disturbed due to the change of the sound pressure; meanwhile, the sound field not only has the change of sound pressure, but also has the change of the vibration velocity of sound particles, and the vibration velocity of the sound particles can take away the heat on the sensitive beam, so that the temperature of the sensitive beam is reduced, namely the vibration velocity of the sound particles can also change the temperature of the sensitive beam; when sound waves are incident into a standing wave tube formed by the upper cover plate and the back cavity, standing waves are formed at the tube bottom of the standing wave tube, namely the surface of the back cavity, in a reflecting mode, the tube bottom of the standing wave tube is a hard sound field boundary, the depth of the back cavity is larger than 250 micrometers so as to ensure that the heating temperature of the sensitive beam is larger than 200 ℃ and heat is not directly conducted away by a substrate, the upper limit of the depth enables the sensitive beam to be located in front of a first antinode of the vibration velocity of the sound particles, the disturbance of the vibration velocity of the sound particles on the temperature of the sensitive beam tends to zero, and the distance between the obtained sensitive beam and the tube bottom of the standing wave tube, namely the depth x of the back cavity meets the following formula:

the amplitude of sound pressure at the sensitive beam is twice of the amplitude of incident sound pressure at the pipe orifice of the standing wave pipe, the temperature of the sensitive beam is only in direct proportion to the incident sound pressure and cannot be influenced by the vibration speed of sound particles, and harmonic distortion is eliminated; the temperature measuring circuit collects temperature signals on the sensitive beam and converts the temperature signals into voltage signals to obtain the amplitude and frequency of sound pressure. The sound wave enters the standing wave tube from the tube opening of the standing wave tube, and the temperature disturbance delta T on the sensitive beam caused by the change delta P of the sound pressure meets the following formula:

wherein, T_mAnd P_mAmbient temperature and atmospheric pressure, respectively, gamma is the specific heat ratio of the gas, the specific heat ratio of air is usually taken to be 1.40. Increasing the heating temperature T of the sensitive beam_mThe temperature disturbance Δ T can be increased, i.e. the sensitivity of the microphone is improved.

The substrate is made of silicon or glass.

The upper cover plate is made of silicon or stainless steel.

Further, the cover-shaped MEMS thermal microphone is adopted as the upper cover plate, the side part, located on the back cavity, of the substrate is hollowed to form a flow channel, the flow channel is located at the pipe opening of the standing wave pipe, and the thermal acoustic particle vibration speed sensor is arranged in the flow channel, so that the cover-shaped thermal acoustic particle vibration speed sensor and the MEMS thermal microphone are integrated on the same chip, and the thermal acoustic particle vibration speed sensor and the sound center of the MEMS thermal microphone are in the same point.

The invention also aims to provide a method for realizing the MEMS thermal microphone.

The invention discloses an implementation method of an MEMS (micro-electromechanical system) thermal microphone, which comprises the following steps of:

1) preparing a device:

a) providing a substrate of a hard material;

b) a back cavity is arranged on the upper surface of the substrate;

c) erecting two ends of a sensitive beam at the edge of a back cavity on the upper surface of a substrate, wherein a sensitive area of the sensitive beam is positioned on the back cavity;

d) two electrodes are arranged on the part of the upper surface of the substrate, which is not provided with the back cavity;

e) two ends of the sensitive beam are respectively connected with an electrode, and the two electrodes are connected to an external temperature measuring circuit;

f) an upper cover plate is arranged on a back cavity on the upper surface of the substrate, the inner surface of the upper cover plate and the surface of the back cavity form a standing wave tube, and the upper cover plate is cylindrical or in a cover shape; the upper cover plate is hollow and has no upper bottom and lower bottom, the bottom end is positioned on the upper surface of the substrate and is hermetically connected with the upper surface of the substrate, the top end is used as a pipe orifice of the standing wave tube, the inner diameter of the upper cover plate is not less than the diameter of the upper surface of the back cavity, and the inner diameter d and the height L of the upper cover plate and the highest frequency f of the measured sound wave are same_hIn relation, the inner diameter d satisfies the following equation:

c₀is the speed of sound of the medium; the height L of the cylinder satisfies the following formula:

one side of the upper cover plate of cover form lies in the outward flange of back of the body chamber and is connected with the upper surface sealing of substrate, and the internal surface of roof is the plane, and is on a parallel with the upper surface of substrate, and the opposite side has the distance with the upper surface of substrate to form the opening, and as the mouth of pipe of standing wave pipe, the distance s between the internal surface of roof and the upper surface of substrate is relevant with the frequency band of measuring the sound wave, satisfies the following formula:

2) the current is added to the sensitive beam through the electrode by the temperature measuring circuit, and the current flows through the sensitive beam to generate joule heat to form stable temperature distribution in the back cavity;

3) sound waves enter the standing wave tube from the tube opening of the standing wave tube, and the temperature on the sensitive beam is disturbed due to the change of the sound pressure;

4) meanwhile, the sound field not only has the change of sound pressure, but also has the change of the vibration velocity of sound particles, and the vibration velocity of the sound particles can take away the heat on the sensitive beam, so that the temperature of the sensitive beam is reduced, namely the vibration velocity of the sound particles can also change the temperature of the sensitive beam; when sound waves are incident into a standing wave tube formed by the upper cover plate and the back cavity, standing waves are formed at the tube bottom of the standing wave tube, namely the surface of the back cavity, in a reflecting mode, the tube bottom of the standing wave tube is a hard sound field boundary, the depth of the back cavity is larger than 250 micrometers, the fact that the heating temperature can be larger than 200 ℃ and heat is not directly conducted away by a substrate is guaranteed, the upper limit of the depth enables a sensitive beam to be located in front of a first antinode of the vibration velocity of the sound particles, the fact that the vibration velocity of the sound particles is approximately zero in disturbance on the temperature of the sensitive beam is guaranteed, and the distance between the obtained sensitive beam and the bottom of the standing wave tube, namely the depth x of the back cavity meets the following formula:

the sound pressure at the sensitive beam is twice of the incident sound pressure of the pipe orifice of the standing wave pipe, the temperature of the sensitive beam is only in direct proportion to the incident sound pressure and cannot be influenced by the vibration speed of sound particles, and harmonic distortion is eliminated;

5) the temperature measuring circuit collects temperature signals on the sensitive beam and converts the temperature signals into voltage signals to obtain the amplitude and frequency of sound pressure.

Further, according to the fact that the amplitude of the sound pressure at the sensitive beam is twice of the amplitude of the incident sound pressure at the pipe orifice of the standing wave tube, the amplitude of the sound pressure at the sensitive beam is divided by two to obtain the amplitude of the incident sound pressure at the pipe orifice of the standing wave tube.

The invention has the advantages that:

the method comprises the steps of forming a back cavity on a substrate, placing a sensitive beam on the back cavity, and arranging an upper cover plate on the back cavity to form a standing wave tube; sound waves enter the standing wave tube from the tube opening of the standing wave tube, and the temperature on the sensitive beam is disturbed due to the change of the sound pressure; meanwhile, the sound waves enter the tube bottom of the standing wave tube, namely the surface of the back cavity, and are reflected to form standing waves, the tube bottom of the standing wave tube is a hard sound field boundary, the vibration speed of sound particles is guaranteed to be zero, and the sound pressure at the sensitive beam is twice of the incident sound pressure at the tube opening of the standing wave tube, so that the temperature of the sensitive beam is only in direct proportion to the incident sound pressure, the influence of the vibration speed of the sound particles is avoided, and harmonic distortion is eliminated; the microphone structure of the invention is similar to the thermal type sound particle vibration velocity sensor, the manufacturing process is the same, and the measurement of sound pressure and sound particle vibration velocity can be completed on the same chip.

Drawings

Fig. 1 is a schematic diagram of a first embodiment of a MEMS thermal microphone of the present invention, wherein (a) is a cross-sectional view and (b) is a top view;

fig. 2 is a cross-sectional view of a second embodiment of the MEMS thermal microphone of the present invention;

fig. 3 is a cross-sectional view of the upper cover plate of the MEMS thermal microphone integrated with the thermal acoustic particle vibration velocity sensor.

Detailed Description

The invention will be further elucidated by means of specific embodiments in the following with reference to the drawing.

Example one

As shown in fig. 1, the upper cover plate of the present embodiment is cylindrical, and the MEMS thermal microphone of the present embodiment includes: the temperature measuring device comprises a substrate 1, a sensitive beam 3, an electrode 5, a back cavity 4, an upper cover plate 2 and a temperature measuring circuit; wherein, the substrate is made of hard material; a back cavity is arranged on the upper surface of the substrate; two ends of the sensitive beam are erected on the edge of a back cavity on the upper surface of the substrate, and a sensitive area of the sensitive beam is positioned on the back cavity; on a substrateTwo electrodes are arranged on the part of the upper surface which is not provided with the back cavity; two ends of the sensitive beam are respectively connected with an electrode, and the two electrodes are connected to an external temperature measuring circuit; an upper cover plate is arranged on a back cavity on the upper surface of the substrate, and a standing wave tube is formed by the inner surface of the upper cover plate and the surface of the back cavity; the upper cover plate is hollow and has no upper bottom and lower bottom, the bottom end is positioned on the upper surface of the substrate and is hermetically connected with the upper surface of the substrate, and the top end is used as a pipe orifice of the standing wave tube, and for the highest frequency f_hWhen the medium in the standing wave tube is air at 20kHz, the inner diameter d of the cylindrical upper cover plate is less than 1 cm and the height L of the cylindrical upper cover plate is less than 4.3 mm; the distance between the sensitive beam and the tube bottom of the standing wave tube, namely the depth x of the back cavity, is less than 4.3 mm.

In the second embodiment, the first embodiment of the method,

as shown in fig. 2, the upper cover plate of this embodiment is in a cover shape, one side of the cover-shaped upper cover plate is located at the outer edge of the back cavity and is connected to the upper surface of the substrate in a sealing manner, the inner surface of the top wall is a plane and is located above the back cavity and parallel to the upper surface of the substrate, an opening is formed at the other side of the cover plate and the upper surface of the substrate at a distance, the opening is used as a tube orifice of a standing wave tube, and a distance s between the inner surface of the top wall and the upper surface of the substrate is less than 8.5 mm. The upper cover plate is in a cover shape, the bottom surface of the back cavity and the side surface of the pipe orifice facing the standing wave pipe form the pipe bottom of the standing wave pipe, the distance from the sensitive beam to the bottom surface of the back cavity and the distance from the sensitive beam to the side surface of the back cavity facing the pipe orifice of the standing wave pipe are the depth x of the back cavity, and x is smaller than 4.3 mm.

As shown in fig. 3, the cover-shaped MEMS thermal microphone is used as the upper cover plate, the side portion of the substrate located in the back cavity is hollowed to form a flow channel, the flow channel is located at the orifice of the standing wave tube, and the thermal acoustic particle vibration velocity sensor is disposed in the flow channel, so that the cover-shaped MEMS thermal microphone and the thermal acoustic particle vibration velocity sensor 7 are integrated on the same chip, and the thermal acoustic particle vibration velocity sensor and the acoustic center of the MEMS thermal microphone are in the same point.

Finally, it is noted that the disclosed embodiments are intended to aid in further understanding of the invention, but those skilled in the art will appreciate that: various substitutions and modifications are possible without departing from the spirit and scope of the invention and the appended claims. Therefore, the invention should not be limited to the embodiments disclosed, but the scope of the invention is defined by the appended claims.