阅读说明：本技术 光扫描型影像投影装置 (Optical scanning type image projection device ) 是由 胜山俊夫 山田祥治 中尾慧 于 2020-12-28 设计创作，主要内容包括：关于光扫描型影像投影装置,通过对光源模块装置和光扫描镜装置的配置进行研究,来减小光扫描型影像投影装置的高度。光扫描型影像投影装置具有：第1基板,其设置有具有多个光波导和光合波部的光波导型合波器；第2基板,其设置有具有可动镜的光扫描镜装置；以及光学部件,其将从所述光波导型合波器射出的光束以成为与所述光束的射出方向不同的方向的方式引导至所述可动镜,所述第1基板和所述第2基板配置成相互平行的位置关系。(In the optical scanning type image projection apparatus, the height of the optical scanning type image projection apparatus is reduced by devising the arrangement of the light source module apparatus and the optical scanning mirror apparatus. The optical scanning type image projection apparatus includes: a 1 st substrate provided with an optical waveguide type multiplexer having a plurality of optical waveguides and an optical multiplexer unit; a 2 nd substrate provided with an optical scanning mirror device having a movable mirror; and an optical component that guides the light beam emitted from the optical waveguide type combiner to the movable mirror so as to be directed in a direction different from an emission direction of the light beam, wherein the 1 st substrate and the 2 nd substrate are arranged in a parallel positional relationship.)

1. An optical scanning type image projection apparatus includes:

a 1 st substrate provided with an optical waveguide type multiplexer having a plurality of optical waveguides and an optical multiplexer unit;

a 2 nd substrate provided with an optical scanning mirror device having a movable mirror; and

an optical component that guides the light beam emitted from the optical waveguide type combiner to the movable mirror so as to be directed in a direction different from an emission direction of the light beam,

The 1 st substrate and the 2 nd substrate are disposed in a parallel positional relationship with each other.

2. The optical scanning type image projection apparatus as claimed in claim 1,

the optical member has a function of guiding the light flux scanned by the movable mirror in a direction parallel to the main surface of the 2 nd substrate.

3. The optical scanning type image projection apparatus as claimed in claim 1,

the optical member has a function of guiding the light flux scanned by the movable mirror in a direction perpendicular to the main surface of the 2 nd substrate.

4. The optical scanning type image projection apparatus as claimed in any one of claims 1 to 3,

the light beam includes an optical path bent upward of the optical waveguide type combiner.

5. The optical scanning type image projection apparatus as claimed in any one of claims 1 to 4,

a main surface of the movable mirror is parallel to a main surface of the 2 nd substrate when not operating.

6. The optical scanning type image projection apparatus as claimed in any one of claims 1 to 5,

the optical scanning type image projection apparatus further includes a common mounting substrate on which the 1 st substrate and the 2 nd substrate are mounted.

7. The optical scanning type image projection apparatus as claimed in claim 6,

The whole of the mounting surface of the mounting substrate is flat,

the optical component includes:

a 1 st mirror provided on the mounting substrate; and

a 2 nd mirror that guides the light beam reflected by the 1 st mirror to the movable mirror,

the 2 nd reflecting mirror is disposed at a position facing the mounting surface of the mounting substrate.

8. The optical scanning type image projection apparatus as claimed in claim 7,

the 2 nd mirror is composed of 2 sub-mirrors,

the reflection of the light beam is performed between the 2 sub-mirrors.

9. The optical scanning type image projection apparatus as claimed in claim 7,

one of the 1 st mirror and the 2 nd mirror is a condensing mirror.

10. The optical scanning type image projection apparatus as claimed in claim 7 or 8,

the 1 st mirror is a non-condensing mirror,

a condensing lens is provided between the optical waveguide type multiplexer and the 1 st reflecting mirror.

11. The optical scanning type image projection apparatus as claimed in claim 1,

the optical member is a prism-shaped member having a plurality of reflection surfaces with respect to the light flux.

12. The optical scanning type image projection device as claimed in claim 11,

The prism-shaped member has a light-condensing reflective surface located above the prism-shaped member.

13. The optical scanning type image projection device as claimed in claim 11,

the prism-shaped member has a light-condensing reflective surface located below the prism-shaped member.

14. The optical scanning type image projection device as claimed in claim 11,

the prism-shaped member has a light-condensing reflective surface and 1 or more non-light-condensing reflective surfaces.

15. The optical scanning type image projection apparatus as claimed in claim 5,

a step is formed between the mounting surface of the 1 st substrate and the mounting surface of the 2 nd substrate of the mounting substrate.

16. The optical scanning type image projection device as claimed in claim 15,

the optical components are a condenser lens and a non-condensing mirror.

17. The optical scanning type image projection device as claimed in claim 15,

the optical component is a concentrating mirror.

18. The optical scanning type image projection apparatus as claimed in claim 6,

the optical scanning mirror device is disposed at a position facing a mounting surface of the mounting substrate.

19. The optical scanning type image projection device as claimed in claim 18,

the optical components are a condenser lens and a non-condensing mirror.

20. The optical scanning type image projection device as claimed in claim 18,

the optical component is a concentrating mirror.

21. The optical scanning type image projection apparatus as claimed in claim 19 or 20,

the mounting substrate further includes a mirror that reflects reflected light from the movable mirror.

22. The optical scanning type image projection apparatus as claimed in claim 19 or 20,

the mounting substrate has a window portion through which reflected light from the movable mirror passes.

23. The optical scanning type image projection apparatus as claimed in any one of claims 1 to 22,

light source elements are disposed at incident ends of the plurality of optical waveguides respectively as a light source module device,

the optical scanning type image projection apparatus has a cover member that covers the light source module device and the optical scanning mirror device.

24. The optical scanning type image projection device as claimed in claim 23,

the cover member has a 1 st cover member covering the light source module device and a 2 nd cover member covering the optical scanning mirror device.

Technical Field

The present invention relates to an optical scanning type image projection apparatus, and more particularly, to a light source module apparatus and an arrangement structure of an optical scanning mirror apparatus for reducing the height of the optical scanning type image projection apparatus.

Background

Conventionally, various beam projection apparatuses are known as apparatuses for scanning a beam such as a laser beam in 2 vertical directions. A two-dimensional optical scanning type image projection apparatus including the light source module apparatus and the optical scanning mirror apparatus is a system in which the light source module apparatus uses a lens and a mirror to combine laser beams of red, blue, and green, which are three primary colors of light, into one laser beam, and there is a difficulty in downsizing the light beam projection apparatus (for example, see patent document 1 and patent document 2).

On the other hand, a two-dimensional optical scanning type image projection apparatus including a three-primary-color light source module device in which a semiconductor laser and an optical waveguide type multiplexer are combined and an optical scanning mirror device has an advantage that the apparatus can be downsized and the power can be reduced, and is applied to a laser beam scanning type color image projection apparatus (for example, see patent document 3).

Fig. 32 shows a two-dimensional optical scanning type image projection apparatus proposed by the present inventors. The three primary color light source module device 140 is formed by combining a red semiconductor laser chip 147, a green semiconductor laser chip 148, a blue semiconductor laser chip 149, and an optical waveguide combiner 143. The light beams emitted from the three primary color light source module device 140 are irradiated onto the scanning mirror 131 of the two-dimensional optical scanning mirror device 130. The scanning mirror 131 two-dimensionally scans the incident light beam by the solenoid coil 132. Further, reference numerals 120 and 121 denote mounting substrates.

Documents of the prior art

Patent document

Patent document 1: japanese patent No. 4856758

Patent document 2: japanese patent No. 5281923

Patent document 3: international publication No. 2015/170505

Non-patent document

Non-patent document 1: FORN-2019.7No.329, pp.36-39 of electric wave technical association

Disclosure of Invention

Problems to be solved by the invention

In a two-dimensional optical scanning type image projection apparatus (optical engine) including a three-primary-color light source module device and a two-dimensional optical scanning mirror device in which the semiconductor laser and the optical waveguide type multiplexer are combined, when the two-dimensional optical scanning type image projection apparatus is put to practical use, it is necessary to minimize the size thereof. In this case, the width and depth of the two-dimensional optical scanning type image projection apparatus need to be reduced, but particularly when applied to a spectacle type display, the height needs to be reduced in addition to the width and depth of the image projection apparatus.

For example, in the case of non-patent document 1, since a light beam emitted from a three-primary-color light source module device in which a semiconductor laser and an optical waveguide type multiplexer are combined is irradiated onto and reflected by a scanning mirror of a two-dimensional optical scanning mirror device, the two-dimensional optical scanning mirror device needs to be installed obliquely as shown in fig. 19. Therefore, there is a disadvantage that the height of the two-dimensional optical scanning type image projection apparatus becomes large by the amount of tilting the optical scanning mirror device.

The present invention has an object to reduce the height of an optical scanning type image projection apparatus by devising the arrangement of a light source module apparatus and an optical scanning mirror apparatus in the optical scanning type image projection apparatus.

Means for solving the problems

In one aspect, an optical scanning type image projection apparatus includes: a 1 st substrate provided with an optical waveguide type multiplexer having a plurality of optical waveguides and an optical multiplexer unit; a 2 nd substrate provided with an optical scanning mirror device having a movable mirror; and an optical component that guides the light beam emitted from the optical waveguide type combiner to the movable mirror so as to be directed in a direction different from an emission direction of the light beam, wherein the 1 st substrate and the 2 nd substrate are arranged in a parallel positional relationship.

Effects of the invention

In one aspect, in an optical scanning type image projection apparatus, the height of the optical scanning type image projection apparatus can be reduced by devising the arrangement of a light source module device and an optical scanning mirror device.

Drawings

Fig. 1 is a conceptual configuration diagram of an optical scanning type image projection apparatus according to an embodiment of the present invention.

Fig. 2 is a perspective view of a main part of an optical scanning type image projection apparatus according to an embodiment of the present invention.

Fig. 3 is a conceptual configuration diagram of an optical scanning type image projection apparatus according to embodiment 1 of the present invention.

Fig. 4 is a perspective view of a main part of an optical scanning type image projection apparatus according to embodiment 1 of the present invention.

Fig. 5 is an explanatory diagram of a light scanning situation in the optical scanning type image projection apparatus according to embodiment 1 of the present invention.

Fig. 6 is a conceptual configuration diagram of an optical scanning type image projection apparatus according to embodiment 2 of the present invention.

Fig. 7 is an explanatory view of the optical scanning state in the optical scanning type image projection apparatus according to embodiment 2 of the present invention.

Fig. 8 is a conceptual configuration diagram of an optical scanning type image projection apparatus according to embodiment 3 of the present invention.

Fig. 9 is a conceptual configuration diagram of an optical scanning type image projection apparatus according to embodiment 4 of the present invention.

Fig. 10 is a perspective view of a main part of an optical scanning type image projection apparatus according to embodiment 5 of the present invention.

Fig. 11 is an explanatory view of a light scanning situation in the optical scanning type image projection apparatus according to embodiment 5 of the present invention.

Fig. 12 is a conceptual configuration diagram of an optical scanning type image projection apparatus according to embodiment 6 of the present invention.

Fig. 13 is a conceptual configuration diagram of an optical scanning type image projection apparatus according to embodiment 7 of the present invention.

Fig. 14 is a conceptual configuration diagram of an optical scanning type image projection apparatus according to embodiment 8 of the present invention.

Fig. 15 is a conceptual configuration diagram of an optical scanning type image projection apparatus according to embodiment 9 of the present invention.

Fig. 16 is a conceptual configuration diagram of an optical scanning type image projection apparatus according to embodiment 10 of the present invention.

Fig. 17 is a conceptual configuration diagram of an optical scanning type image projection apparatus according to embodiment 11 of the present invention.

Fig. 18 is a conceptual configuration diagram of an optical scanning type image projection apparatus according to embodiment 12 of the present invention.

Fig. 19 is a conceptual configuration diagram of an optical scanning type image projection apparatus according to embodiment 13 of the present invention.

Fig. 20 is an explanatory view of a reflection state in the optical scanning type image projection apparatus according to embodiment 13 of the present invention.

Fig. 21 is a conceptual configuration diagram of a main part of an optical scanning type image projection apparatus according to embodiment 14 of the present invention.

Fig. 22 is a conceptual configuration diagram of a main part of an optical scanning type image projection apparatus according to embodiment 15 of the present invention.

Fig. 23 is a conceptual configuration diagram of a main part of an optical scanning type image projection apparatus according to embodiment 16 of the present invention.

Fig. 24 is a conceptual configuration diagram of a main part of an optical scanning type image projection apparatus according to embodiment 17 of the present invention.

Fig. 25 is a conceptual configuration diagram of an optical scanning type image projection apparatus according to embodiment 18 of the present invention.

Fig. 26 is a conceptual configuration diagram of an optical scanning type image projection apparatus according to embodiment 19 of the present invention.

Fig. 27 is a conceptual configuration diagram of an optical scanning type image projection apparatus according to embodiment 20 of the present invention.

Fig. 28 is a conceptual configuration diagram of an optical scanning type image projection apparatus according to embodiment 21 of the present invention.

Fig. 29 is a conceptual configuration diagram of an optical scanning type image projection apparatus according to embodiment 22 of the present invention.

Fig. 30 is a conceptual configuration diagram of an optical scanning type image projection apparatus according to embodiment 23 of the present invention.

Fig. 31 is a conceptual configuration diagram of an optical scanning type image projection apparatus according to embodiment 24 of the present invention.

Fig. 32 is a schematic perspective view of an electromagnetic drive type two-dimensional optical scanning type image projection apparatus proposed by the present inventors.

Detailed Description

Here, a two-dimensional optical scanning type image projection apparatus according to an embodiment of the present invention will be described with reference to fig. 1 and 2. Fig. 1 is a conceptual configuration diagram of a two-dimensional optical scanning type image projection apparatus according to an embodiment of the present invention, and fig. 2 is a perspective view of a main part of the two-dimensional optical scanning type image projection apparatus according to the embodiment of the present invention. The two-dimensional optical scanning type image projection apparatus includes: a light source module device substrate 11 which is a 1 st substrate provided with an optical waveguide type multiplexer 12 having a plurality of optical waveguide patterns 14 and an optical multiplexer unit; a two-dimensional optical scanning mirror device substrate 21 serving as a 2 nd substrate on which a two-dimensional optical scanning mirror device 20 having a movable mirror 22 is provided; and an optical component 25 that guides the light beam emitted from the optical waveguide type multiplexer 12 to the movable mirror 22 so as to be directed in a direction different from the emission direction. Here, the light source module device 10 is formed by disposing the light source element 15 on the incident end of the optical waveguide type multiplexer 12 and the plurality of optical waveguide patterns 14. In the embodiment of the present invention, the light source module device substrate 11 and the two-dimensional optical scanning mirror device substrate 21 are arranged so as to be in a parallel positional relationship with each other.

The two-dimensional optical scanning mirror device 20 has a movable frame member 23 attached to the inside of a non-movable frame member 24 via a hinge, and a movable mirror 22 attached to the inside of the movable frame member 23 via a hinge. In this case, it is preferable that the main surface of the movable mirror 22 be parallel to the main surface of the two-dimensional optical scanning mirror device substrate 21 when not operating, so that the height of the two-dimensional optical scanning type image projection device can be reduced. Here, as a driving principle of the two-dimensional optical scanning mirror device 20, a piezoelectric driving type using a piezoelectric effect is used, but an electrostatic driving type or an electromagnetic driving type may be used.

The two-dimensional optical scanning type image projection apparatus generally has a light source module mounting device substrate 11 and twoAnd a common mounting board 30 for the scanning mirror device board 21. The mounting surface of the mounting substrate 30 is flat as a whole, and as the optical component 25, the 1 st mirror (25) may be used on the mounting substrate 30₂) And will be reflected by the 1 st mirror (25)₂) The reflected output composite beam 40 is directed to the 2 nd mirror (25) of the movable mirror 22₃). In this case, the 2 nd mirror (25)₃) The mounting substrate 30 may be disposed at a position (top surface of the cover member) facing the mounting surface.

The 1 st mirror (25) may be used ₂) And a 2 nd mirror (25)₃) One of them is used as a light-condensing mirror. In the first reflection mirror (25)₂) When the non-condensing mirror is used, the optical waveguide type multiplexer 12 and the 1 st mirror (25) may be used₂) A condenser lens (25) is arranged between the two₁). Alternatively, as the optical member 25, a prism-shaped member (25) having a plurality of reflection surfaces with respect to the output multiplexed beam 40 may be used₆)。

As the mounting substrate 30, a stepped substrate having a step between the mounting surface of the light source module device substrate 11 and the mounting surface of the two-dimensional optical scanning mirror device substrate 21 may be used, and in this case, the mounting surface of the two-dimensional optical scanning mirror device substrate 21 may be set to the lower stage side. In this case, the optical member 25 may be a condenser lens 25₁And a non-condensing reflector (25)₇) Alternatively, a condensing mirror (25) may be used₈)。

The two-dimensional optical scanning mirror device 20 may be disposed at a position (top surface of the cover member) facing the mounting surface of the mounting substrate 30. In this case, as the optical unit 25, a condenser lens 25 may be used₁And a non-condensing reflector 25₂Alternatively, a condenser mirror 25 may be used₅. Further, the mounting board 30 may be provided with a mirror 26 that reflects the reflected light from the movable mirror 22, and when the mirror 26 is not provided, the mounting board 30 may be provided with a window portion (35) that transmits the reflected light from the movable mirror 22.

In a two-dimensional optical scanning type image projection apparatus, an overlay light is providedThe source module device 10 and the cover member 31 of the two-dimensional optical scanning mirror device 20. The cover member 31 may be divided into 1 st cover member (31) for covering the light source module device 10₁) And a 2 nd cover member (31) covering the two-dimensional optical scanning mirror device 20₂)。

The light source element 15 in this case is typically a blue semiconductor laser 15₁Green semiconductor laser 15₂And a red semiconductor laser 15₃However, the light source may be a light source via a Light Emitting Diode (LED), an optical fiber, or a front sphere optical fiber, and when a front sphere optical fiber or an optical fiber is used, a liquid laser or a solid laser may be used as the light source.

Further, as the light source module device substrate 11 and the two-dimensional optical scanning mirror device substrate 21, an Si substrate, a glass substrate, a sapphire substrate, a plastic substrate, or the like may be used. In addition, the optical waveguide pattern 14 is formed₁～14₃In the case of (3), the optical waveguide forming layer 13 to be a lower cladding layer may be provided on the light source module device substrate 11, a material serving as a core layer may be provided thereon, and the core layer may be etched, and an upper core layer may be provided thereon. As the material of the optical waveguide forming layer 13, the core layer and the upper cladding layer, SiO may be used ₂The glass-based material may be other than the above-mentioned material, for example, transparent plastic such as acrylic resin or other transparent materials may be used. When a light source element having a wavelength other than RGB is used as the light source element 15, a semiconductor material such as Si or GaN may be used as the cladding layer or the core layer. The structure of the optical multiplexer unit is arbitrary, but the optical multiplexer unit proposed in patent document 1 is shown here.

According to the above configuration, the height of the two-dimensional optical scanning type image projection apparatus can be reduced, and thus, when the image projection apparatus is housed in a portion of the "temple (temple)" of the spectacle frame of the spectacle display, the thickness of the "temple" can be reduced, and the two-dimensional optical scanning type image projection apparatus can be housed so as to be inconspicuous in appearance.

When packaging the two-dimensional optical scanning type image projection apparatus, it is necessary to use wire bonding when connecting the wiring to the light source module apparatus 10 and the two-dimensional optical scanning mirror apparatus 20, which are constituent components, to the pads. In the embodiment of the present invention, since the light source module device substrate 11 provided with the optical waveguide type multiplexer 12 and the two-dimensional optical scanning mirror device substrate 21 provided with the two-dimensional optical scanning mirror device 20 having the movable mirror 22 are arranged in parallel, when the wire bonding device is used, it is not necessary to perform wire bonding separately, and bonding can be performed simultaneously.

Example 1

Here, a two-dimensional optical scanning type image projection apparatus according to embodiment 1 of the present invention will be described with reference to fig. 3 to 5. Fig. 3 is a conceptual configuration diagram of a two-dimensional optical scanning type image projection apparatus according to embodiment 1 of the present invention, fig. 4 is a perspective view of a main part of the two-dimensional optical scanning type image projection apparatus according to embodiment 1 of the present invention, and fig. 5 is an explanatory diagram of an optical scanning situation in the two-dimensional optical scanning type image projection apparatus according to embodiment 1 of the present invention. As shown in fig. 3, the two-dimensional optical scanning type image projection apparatus according to embodiment 1 of the present invention is configured such that a light source module apparatus substrate 11 provided with an optical waveguide type multiplexer 12 having 3 optical waveguide patterns 14 and an optical multiplexer portion, and a two-dimensional optical scanning mirror apparatus substrate 21 provided with a piezoelectric driving type two-dimensional optical scanning mirror apparatus 20 having a movable mirror 22 are mounted on a common mounting substrate 30. As the optical waveguide type combiner 12, an optical waveguide type combiner of the type shown in patent document 3 is used.

Here, the chip size of the light source module device 10 is set to 6mm (depth) × 4mm Width ((Width)) × 1mm (Height). Specifically, first, SiO having a thickness of 15 μm to be the optical waveguide forming layer 13 was formed on the light source module device substrate 11 composed of a Si substrate having a thickness of 1mm by flame hydrolysis ₂And (3) a membrane. Then, in SiO₂The film was also flame-hydrolyzed to form SiO 2 μm thick₂-GeO₂Layer (with refractive index difference Δ n ═ 0.5%, Δ n ═ n₁-n₂)/n₁And (4) defining. n is₁: refractive index of core, n₂: the refractive index of the cladding). Thereon, use and usePhoto-exposure method of contact mask to form optical waveguide pattern 14 with waveguide width of 2 μm₁～14₃As an optical multiplexer.

Then, in the optical waveguide pattern 14₁～14₃As a covering layer for covering the whole, SiO with a thickness of 20 μm was used₂A film (not shown) was formed as an upper cover layer by flame hydrolysis in the same manner. Further, the light guide pattern 14 for blue₁And an optical waveguide pattern 14 for red₃Since the light incident portion needs to be bent at a right angle, a deep trench having a depth of 30 μm is formed by etching the bent portion by a convergent ion beam method using Ga, and light of the waveguide is totally reflected on the trench sidewall. Then, only the region of the optical multiplexer is remained, and the SiO of the other part is etched₂The film is removed entirely, and the light source module device substrate 11 is exposed to form the optical waveguide type multiplexer 12.

An optical waveguide pattern 14 in the optical waveguide type multiplexer 12₁～14₃Is provided with a blue semiconductor laser 15₁Green semiconductor laser 15 ₂And a red semiconductor laser 15₃As the light source module device 10. At this time, the blue semiconductor laser 15 is used₁Green semiconductor laser 15₂And a red semiconductor laser 15₃Laser emitting end and optical waveguide pattern 14₁～14₃The light source module device substrate 12 made of an Si substrate is etched to a predetermined depth.

On the other hand, the Si wafer is subjected to MEMS processing to form a two-dimensional optical scanning mirror device 20 having a Width (Width) of 7mm (depth) x 5mm (Width) x 0.7mm (Height). The two-dimensional optical scanning mirror device 20 includes a movable mirror 22, a movable frame member 23, and a non-movable frame member 24. The movable mirror 22 has a size ofAn Al film is formed on the surface thereof. The reflectance of the movable mirror 22 is 90% or more of the reflectance of all of red, green, and blue.

In the non-movable outer frame partA piezoelectric material film such as PZT is formed on the surface of the substrate 24, and a pad 38 for piezoelectric actuation is formed₁～38₄). For the bonding pad (38) for piezoelectric drive₁～38₄) A driving voltage of 35KHz for a high-speed (horizontal) axis driving frequency, 60Hz for a low-speed (vertical) axis driving frequency, and ± 15V for a maximum driving voltage is applied, whereby the movable mirror 22 is simultaneously rotated in the horizontal direction and the vertical direction. At this time, the high-speed (horizontal) pivot angle (mirror pivot angle) is, for example, ± 15deg, and the low-speed (vertical) pivot angle (mirror pivot angle) is, for example, ± 15 deg.

In embodiment 1 of the present invention, there are provided: condenser lens 25₁A light guide type combiner 12 for combining the outgoing combined light beam 40 emitted from the optical waveguide type combiner; non-condensing reflector 25₂A bending unit for bending the emitted combined beam 40 at least 1 time upward; and a non-condensing reflector 25₃Which will be reflected by the non-condensing mirror 25₂The curved outgoing composite beam 40 is reflected toward the movable mirror 22.

Here, the condensing lens 25 is used₁For example, a combined lens of a convex lens and a concave lens having a thickness of, for example, 0.7mm and a focal length of 1.35mm is used. As non-condensing mirrors 25₂A non-condensing mirror 25, which is a mirror formed by providing an Al film on the surface of quartz glass, is used₂The angle of the reflection surface of (2) with respect to the mounting surface of the mounting substrate 30 is, for example, 8deg, and the size of the reflection surface is 5mm (vertical) × 3mm (horizontal). Further, the non-condensing reflector 25 is formed₃A non-condensing mirror 25, which is a mirror formed by providing an Al film on the surface of quartz glass, is used₃The angle of the reflection surface of (2) with respect to the mounting surface of the mounting substrate 30 is, for example, 24deg, and the size of the reflection surface is 1.2mm (vertical) × 1.2mm (horizontal).

In the two-dimensional optical scanning type image projection apparatus, a cover member 31 having a window 32 is provided so as to cover the light source module apparatus 10 and the two-dimensional optical scanning mirror apparatus 20. The lid member 31 is generally made of a light-shielding metal member such as Al having a thickness of 0.5mm, but may be made of an insulating member. Is focused by the non-condensing reflector 25 ₃The reflected output composite beam 40 is two-dimensionally scanned by the movable mirror 22, and is emitted through the window 32 to be displayed on a screen or viewedProjecting an image on the retina.

As shown in fig. 4, the light source module device 10 and the two-dimensional optical scanning mirror device 20 are die-bonded to a common mounting board 30, and a land 16 is provided on one end side of the mounting board 30₁～16₃And on-substrate wiring 17₁～17₄. Blue semiconductor laser 15₁Green semiconductor laser 15₂And a red semiconductor laser 15₃By means of a bonding wire 18₁～18₃Is connected to the bonding pad 16₁～16₃So as to be energized. On the other hand, a land 36 is provided on the other end side of the mounting board 30₁～36₄And on-substrate wiring 37₁～37₄. A pad 38 provided on the surface of the immovable outer frame member 24₁～38₄By bonding wires 39₁～39₄And a pad 36₁～36₃Connected to be powered on.

In this case, since the light source module device 10 and the two-dimensional optical scanning mirror device 20 are already provided in parallel on the common mounting substrate 30 for wire bonding, wire bonding can be performed under substantially the same bonding conditions without changing the bonding direction or the like.

As shown in fig. 5, the outgoing combined beam 40 emitted from the optical waveguide type combiner 12 is focused on the condensing lens 25 ₁After converging, in a non-converging mirror 25₂Bent upward and passes through the non-condensing reflector 25₃And is reflected toward the movable mirror 22. The reflected output composite beam 40 is two-dimensionally scanned by the movable mirror 22, and is emitted from the window 32, and an image is projected onto a screen or retina.

In fig. 5, the reflected beam 41 indicates a case where the angle of the movable mirror is 0deg, the reflected beam 42 indicates a case where the angle of the movable mirror 22 is inclined by 12deg, and the reflected beam 43 indicates a case where the angle of the movable mirror 22 is inclined by 12deg in the opposite direction.

As described above, in embodiment 1 of the present invention, since the 1 st substrate 12 of the light source module device 10 and the two-dimensional optical scanning mirror device substrate 21 of the two-dimensional optical scanning mirror device 20 are disposed in parallel on the common mounting substrate 30, wire bonding is facilitated. Further, when the cover member 31 is provided and the package is formed, the thickness of the internal space between the surface of the mounting substrate 30 and the top surface of the cover member 31 can be made extremely thin and low in height, which is about 3 mm.

Example 2

Here, a two-dimensional optical scanning type image projection apparatus according to embodiment 2 of the present invention will be described with reference to fig. 6 and 7. Fig. 6 is a conceptual configuration diagram of a two-dimensional optical scanning type image projection apparatus according to embodiment 2 of the present invention, and fig. 7 is an explanatory diagram of an optical scanning situation in the two-dimensional optical scanning type image projection apparatus according to embodiment 2 of the present invention. As shown in fig. 6, in the two-dimensional optical scanning type image projection apparatus according to embodiment 2 of the present invention, the light source module apparatus substrate 11 provided with the optical waveguide type multiplexer 12 having 3 optical waveguide patterns 14 and an optical multiplexer portion and the two-dimensional optical scanning mirror apparatus substrate 21 provided with the piezoelectric-driven two-dimensional optical scanning mirror apparatus 20 having the movable mirror 22 in the two-dimensional optical scanning type image projection apparatus according to embodiment 1 are mounted on the common mounting substrate 30. As the optical waveguide type combiner 12, an optical waveguide type combiner of the type shown in patent document 3 is used.

As shown in FIG. 7, in example 2 of the present invention, the non-condensing mirror 25 in example 1 is used₃Divided into non-condensing mirrors 25_3-1、25_3-2. The outgoing combined beam 40 emitted from the optical waveguide type combiner 12 is focused on the condenser lens 25₁After converging, in a non-converging mirror 25₂Bent upward and passes through the non-condensing reflector 25_3-1、25_3-2And is reflected toward the movable mirror 22. The reflected output composite beam 40 is two-dimensionally scanned by the movable mirror 22, and is emitted from the window 32, and an image is projected onto a screen or retina.

In fig. 7, the reflected beam 41 indicates a case where the angle of the movable mirror is 0deg, the reflected beam 42 indicates a case where the angle of the movable mirror 22 is inclined by 12deg, and the reflected beam 43 indicates a case where the angle of the movable mirror 22 is inclined by 12deg in the opposite direction.

As described above, in embodiment 2 of the present inventionThe non-condensing reflector provided on the top surface of the cover member 31 is divided into the non-condensing reflectors 25_3-1、25_3-2Therefore, the thickness of the internal space between the surface of the mounting substrate 30 and the top surface of the cover member 31 can be reduced to about 2mm, and the package can be made thinner and lower in height.

Example 3

Next, a two-dimensional optical scanning type image projection apparatus according to example 3 of the present invention will be described with reference to fig. 8, in which the non-condensing mirror 25 in example 1 is used ₃The light collecting reflector is replaced by a light collecting reflector, and a light collecting lens (25) is not needed₁). Fig. 8 is a conceptual configuration diagram of a two-dimensional optical scanning type image projection apparatus according to embodiment 3 of the present invention, and here, the shapes and the arrangement of the respective mirrors are schematically illustrated, but the actual shapes are based on embodiment 1 described above.

As shown in fig. 8, the two-dimensional optical scanning type image projection apparatus according to embodiment 3 of the present invention is configured such that a light source module apparatus substrate 11 provided with an optical waveguide type multiplexer 12 having 3 optical waveguide patterns 14 and an optical multiplexer portion, and a two-dimensional optical scanning mirror apparatus substrate 21 provided with a piezoelectric driving type two-dimensional optical scanning mirror apparatus 20 having a movable mirror 22 are mounted on a common mounting substrate 30. As the optical waveguide type combiner 12, an optical waveguide type combiner of the type shown in patent document 3 is used.

In example 3 of the present invention, the non-condensing mirror 25 is provided to bend the outgoing combined beam 40 emitted from the optical waveguide type combiner 12 upward₂And a non-condensing reflector 25₂A condensing mirror 25 for reflecting the curved outgoing combined beam 40 in a state of being condensed toward the movable mirror 22₄. The reflected output composite beam 40 is two-dimensionally scanned by the movable mirror 22, and is emitted from the window 32, and an image is projected onto a screen or retina.

In embodiment 3 of the present invention, the condensing mirror 25 is used₄Therefore, the condenser lens (25) is not required₁) The depth of the two-dimensional optical scanning type image projection apparatus can be shortened. Other effects are the same as those of embodiment 1 described above.

Example 4

Next, a two-dimensional optical scanning type image projection apparatus according to example 4 of the present invention will be described with reference to fig. 9, in which the non-condensing mirror 25 in example 1 is used₂The light collecting reflector is replaced by a light collecting reflector, and a light collecting lens (25) is not needed₁). Fig. 9 is a conceptual configuration diagram of a two-dimensional optical scanning type image projection apparatus according to embodiment 4 of the present invention, and here, the shapes and the arrangement of the respective mirrors are schematically illustrated, but the actual shapes are based on embodiment 1 described above.

As shown in fig. 9, the two-dimensional optical scanning type image projection apparatus according to embodiment 4 of the present invention is configured such that a light source module apparatus substrate 11 provided with an optical waveguide type multiplexer 12 having 3 optical waveguide patterns 14 and an optical multiplexer portion, and a two-dimensional optical scanning mirror apparatus substrate 21 provided with a piezoelectric driving type two-dimensional optical scanning mirror apparatus 20 having a movable mirror 22 are mounted on a common mounting substrate 30. As the optical waveguide type combiner 12, an optical waveguide type combiner of the type shown in patent document 3 is used.

In example 4 of the present invention, the condensing mirror 25 is provided to bend the outgoing combined beam 40 emitted from the optical waveguide type combiner 12 upward₅In the light-condensing reflector 25₅In the condensed state, the output combined beam 40 is directed to the non-condensing mirror 25₃Curved and made of non-condensing mirrors 25₃And is reflected toward the movable mirror 22. The reflected output composite beam 40 is two-dimensionally scanned by the movable mirror 22, and is emitted from the window 32, and an image is projected onto a screen or retina.

In embodiment 4 of the present invention, the condensing mirror 25 is used₅Therefore, the condenser lens (25) is not required₁) The depth of the two-dimensional optical scanning type image projection apparatus can be shortened. Other effects are the same as those of embodiment 1 described above.

Example 5

Next, a two-dimensional optical scanning type image projection apparatus according to example 5 of the present invention will be described with reference to fig. 10 and 11, but the two-dimensional optical scanning type image projection apparatus is used instead of the non-condensing mirror 25 in example 1₂、25₃2 pieces of optical members for changing the optical path, anda prism having 2 reflecting surfaces is used. Fig. 10 is a perspective view of a main part of a two-dimensional optical scanning type image projection apparatus according to example 5 of the present invention, and fig. 11 is an explanatory view of an optical scanning situation in the two-dimensional optical scanning type image projection apparatus according to example 5 of the present invention.

As shown in fig. 10, the two-dimensional optical scanning type image projection apparatus according to embodiment 5 of the present invention is configured such that a light source module apparatus substrate 11 provided with an optical waveguide type multiplexer 12 having 3 optical waveguide patterns 14 and an optical multiplexer portion, and a two-dimensional optical scanning mirror apparatus substrate 21 provided with a piezoelectric driving type two-dimensional optical scanning mirror apparatus 20 having a movable mirror 22 are mounted on a common mounting substrate 30. As the optical waveguide type combiner 12, an optical waveguide type combiner of the type shown in patent document 3 is used.

In example 5 of the present invention, the outgoing combined beam 40 emitted from the optical waveguide type combiner 12 is bent upward via the condensing lens 25₁A prism 25 having 2 reflecting surfaces is provided₆。

As shown in fig. 11, the outgoing combined beam 40 emitted from the optical waveguide type combiner 12 is focused on the condensing lens 25₁After being converged, the light passes through a prism 25₆Bent upward and reflected toward the movable mirror 22. The reflected output composite beam 40 is two-dimensionally scanned by the movable mirror 22, and is emitted from the window 32, and an image is projected onto a screen or retina.

In fig. 11, a reflected light beam 41 indicates a case where the angle of the movable mirror is 0deg, a reflected light beam 42 indicates a case where the angle of the movable mirror 22 is inclined by 12deg, and a reflected light beam 43 indicates a case where the angle of the movable mirror 22 is inclined by 12deg in the opposite direction. Furthermore, a prism 25 is shown ₆The cover member 31 may be fixed to the mounting substrate 30.

Example 6

Next, a two-dimensional optical scanning type image projection apparatus according to embodiment 6 of the present invention will be described with reference to fig. 12, but a substrate having a step may be used as the mounting substrate in embodiment 1, and a configuration having no step may be adopted. As shown in fig. 12, the two-dimensional optical scanning type image projection apparatus according to embodiment 6 of the present invention is provided with a deviceA light source module device substrate 11 of an optical waveguide type multiplexer 12 having 3 optical waveguide patterns 14 and an optical multiplexer is mounted on an upper stage mounting part 30 of a mounting substrate 30₁On the lower mounting part 30 of the mounting substrate 30₂A piezoelectric driving type two-dimensional optical scanning mirror device 20 having a movable mirror 22 is mounted thereon. As the optical waveguide type combiner 12, an optical waveguide type combiner of the type shown in patent document 3 is used.

In example 6 of the present invention, the outgoing combined beam 40 emitted from the optical waveguide type combiner 12 is focused by the condensing lens 25₁Incident on the non-condensing mirror 25 in a condensed state₇Will be reflected by the non-condensing mirror 25₇The reflected outgoing combined wave beam 40 is incident on the movable mirror 22. The incident output composite beam 40 is two-dimensionally scanned by the movable mirror 22, and is emitted from the window 33, and an image is projected onto a screen or a retina.

In example 6 of the present invention, since the mounting substrate 30 provided with the step is used, the non-condensing mirror 25 is not required₂、52₃A condensing reflector 25₄、25₅And the like, and therefore, the two-dimensional optical scanning type image projection apparatus can be easily assembled.

Example 7

Next, a two-dimensional optical scanning type image projection apparatus according to example 7 of the present invention will be described with reference to fig. 13, in which the cover member in example 6 is divided into 2 pieces. As shown in fig. 13, in a two-dimensional optical scanning type image projection apparatus according to embodiment 7 of the present invention, a light source module apparatus substrate 11 provided with an optical waveguide type multiplexer 12 having 3 optical waveguide patterns 14 and an optical multiplexer is mounted on an upper stage mounting portion 30 of a mounting substrate 30₁On the lower mounting part 30 of the mounting substrate 30₂A piezoelectric driving type two-dimensional optical scanning mirror device 20 having a movable mirror 22 is mounted thereon. As the optical waveguide type combiner 12, an optical waveguide type combiner of the type shown in patent document 3 is used.

In example 7 of the present invention, the cover light source module device 10 and the condenser lens 25 are disposed₁Window 34 of₁Light source module device cover partPiece 31₁A covering two-dimensional optical scanning mirror device 20 and a non-condensing mirror 25 are arranged ₇Window 34 of₂The two-dimensional optical scanning mirror device part cover member 31₂。

In example 7 of the present invention, since the mounting substrate 30 provided with the step is used, the cover member 31 is divided into the light source module device part cover member 31₁And a two-dimensional optical scanning mirror device part cover member 31₂The cover member 31 is easily manufactured. Other effects are the same as in example 6.

Example 8

Next, although the two-dimensional optical scanning type image projection apparatus according to example 8 of the present invention is described with reference to fig. 14, the non-condensing mirror in example 6 is replaced with a condensing mirror, and the condensing lens 25 is not necessary₁. As shown in fig. 14, in a two-dimensional optical scanning type image projection apparatus according to embodiment 8 of the present invention, a light source module apparatus substrate 11 provided with an optical waveguide type multiplexer 12 having 3 optical waveguide patterns 14 and an optical multiplexer is mounted on an upper stage mounting portion 30 of a mounting substrate 30₁On the lower mounting part 30 of the mounting substrate 30₂A piezoelectric driving type two-dimensional optical scanning mirror device 20 having a movable mirror 22 is mounted thereon. As the optical waveguide type combiner 12, an optical waveguide type combiner of the type shown in patent document 3 is used.

In example 8 of the present invention, the outgoing combined beam 40 emitted from the optical waveguide type combiner 12 is incident on the condensing mirror 25 ₈Will be reflected by the non-condensing mirror 25₈The reflected output multiplexed beam 40 in the condensed state enters the movable mirror 22. The incident output composite beam 40 is two-dimensionally scanned by the movable mirror 22, and is emitted from the window 33, and an image is projected onto a screen or a retina.

In embodiment 8 of the present invention, the non-condensing mirror 25 is used₈Therefore, a condensing lens is not required, and the depth of the two-dimensional optical scanning type image projection apparatus can be shortened. Other effects are the same as in example 5.

Example 9

Next, the present invention is described with reference to FIG. 15The two-dimensional optical scanning type image projection apparatus of the present embodiment 9 is explained, but the two-dimensional optical scanning mirror device 20 and the non-condensing mirror 25 of the embodiment 1 are used₃The configuration relationship of (2) is opposite. Fig. 15 is a conceptual configuration diagram of a two-dimensional optical scanning type image projection apparatus according to example 9 of the present invention, and here, the shape and arrangement of each mirror are also schematically illustrated, but the actual shape is based on example 1 described above.

As shown in fig. 15, the two-dimensional optical scanning type image projection apparatus according to embodiment 9 of the present invention is configured such that a light source module apparatus substrate 11 provided with an optical waveguide type multiplexer 12 having 3 optical waveguide patterns 14 and an optical multiplexer unit is mounted on a mounting substrate 30. On the other hand, a two-dimensional optical scanning mirror device substrate 21 provided with a piezoelectric driving type two-dimensional optical scanning mirror device 20 having a movable mirror 22 is attached to the top surface portion of the cover member 31. In this case, the light source module device substrate 11 and the two-dimensional optical scanning mirror device substrate 21 are also arranged in parallel with each other. As the optical waveguide type combiner 12, an optical waveguide type combiner of the type shown in patent document 3 is used.

In example 9 of the present invention, the light is emitted from the optical waveguide type multiplexer 12 and is collected by the collecting lens 25₁The non-condensing reflector 25 is provided by bending the condensed outgoing combined beam 40 upward₂Will be reflected by the non-condensing mirror 25₂The curved outgoing combined beam 40 is irradiated to the movable mirror 22. The emitted combined beam 40 is two-dimensionally scanned by the movable mirror 22, reflected by the mirror 26 provided on the mounting board 30, and then emitted from the window 32, and an image is projected on a screen or a retina.

In example 9 of the present invention, the two-dimensional optical scanning mirror device substrate 21 is not overlapped with the optical waveguide type multiplexer 12, and can be positioned closer to the optical waveguide type multiplexer 12 side, and the length ("depth") of the entire two-dimensional optical scanning type image projection device can be reduced. Other effects are the same as those of embodiment 1 described above.

Example 10

Next, a two-dimensional optical scanning type image projection apparatus according to example 10 of the present invention will be described with reference to fig. 16, but the mirror 26 in example 9 is not provided, and the window 35 is provided on the mounting substrate 30. Fig. 16 is a conceptual configuration diagram of a two-dimensional optical scanning type image projection apparatus according to embodiment 10 of the present invention, and here, the shape and arrangement of each mirror are also schematically illustrated, but the actual shape is based on embodiment 1 described above.

As shown in fig. 16, the two-dimensional optical scanning type image projection apparatus according to embodiment 10 of the present invention is configured such that a light source module apparatus substrate 11 provided with an optical waveguide type multiplexer 12 having 3 optical waveguide patterns 14 and an optical multiplexer unit is mounted on a mounting substrate 30. On the other hand, a two-dimensional optical scanning mirror device substrate 21 provided with a piezoelectric driving type two-dimensional optical scanning mirror device 20 having a movable mirror 22 is attached to the top surface portion of the cover member 31. As the optical waveguide type combiner 12, an optical waveguide type combiner of the type shown in patent document 3 is used.

In example 10 of the present invention, the light is emitted from the optical waveguide type multiplexer 12 and is collected by the collecting lens 25₁The non-condensing reflector 25 is provided by bending the condensed outgoing combined beam 40 upward₂Will be reflected by the non-condensing mirror 25₂The curved outgoing combined beam 40 is irradiated to the movable mirror 22. The emitted combined beam 40 is two-dimensionally scanned by the movable mirror 22, is emitted from the window 35 provided in the mounting board 30, and projects an image on a screen or a retina.

In example 10 of the present invention, since the window 35 is provided at the position where the reflecting mirror 26 is provided in example 8 on the mounting substrate 30, the depth of the two-dimensional optical scanning type image projection apparatus can be further shortened. Other effects are the same as those of embodiment 1 described above.

Example 11

Next, a two-dimensional optical scanning type image projection apparatus according to example 11 of the present invention will be described with reference to fig. 17, but the non-condensing mirror 25 in example 9 will be described₂Replaced by a condensing mirror 25₄Without the need for the condenser lens 25₁. Here, the shape and arrangement of each mirror are also schematically illustrated, but the actual shape is based on the above-described embodiment 1.

As shown in fig. 17, the two-dimensional optical scanning type image projection apparatus according to embodiment 11 of the present invention is configured such that a light source module apparatus substrate 11 provided with an optical waveguide type multiplexer 12 having 3 optical waveguide patterns 14 and an optical multiplexer unit is mounted on a mounting substrate 30. On the other hand, a two-dimensional optical scanning mirror device substrate 21 provided with a piezoelectric driving type two-dimensional optical scanning mirror device 20 having a movable mirror 22 is attached to the top surface portion of the cover member 31. As the optical waveguide type combiner 12, an optical waveguide type combiner of the type shown in patent document 3 is used.

In example 11 of the present invention, the condensing mirror 25 is provided to bend the outgoing combined beam 40 emitted from the optical waveguide type combiner 12 upward₄By means of a converging mirror 25₄The emitted combined beam 40 is irradiated to the movable mirror 22. The emitted combined beam 40 is two-dimensionally scanned by the movable mirror 22, reflected by the mirror 26 provided on the mounting board 30, and then emitted from the window 32, and an image is projected on a screen or a retina.

In example 11 of the present invention, the non-condensing mirror 25 in example 9 was used₂Replaced by a condensing mirror 25₄Without the need for the condenser lens 25₁Therefore, the depth of the two-dimensional optical scanning type image projection apparatus can be shortened. Other operational effects are the same as in embodiment 1 and embodiment 9 described above.

Example 12

Next, a two-dimensional optical scanning type image projection apparatus according to example 12 of the present invention will be described with reference to fig. 18, but the mirror 26 in example 11 is not provided, and the window 35 is provided on the mounting substrate 30. Fig. 18 is a conceptual configuration diagram of a two-dimensional optical scanning type image projection apparatus according to embodiment 11 of the present invention, and here, the shape and arrangement of each mirror are also schematically illustrated, but the actual shape is based on embodiment 1 described above.

As shown in fig. 18, the two-dimensional optical scanning type image projection apparatus according to embodiment 12 of the present invention is configured such that a light source module apparatus substrate 11 provided with an optical waveguide type multiplexer 12 having 3 optical waveguide patterns 14 and an optical multiplexer unit is mounted on a mounting substrate 30. On the other hand, a two-dimensional optical scanning mirror device substrate 21 provided with a piezoelectric driving type two-dimensional optical scanning mirror device 20 having a movable mirror 22 is attached to the top surface portion of the cover member 31. As the optical waveguide type combiner 12, an optical waveguide type combiner of the type shown in patent document 3 is used.

In example 12 of the present invention, the condensing mirror 25 is provided to bend the outgoing combined beam 40 emitted from the optical waveguide type combiner 12 upward₄Will be reflected by the collecting mirror 25₄The curved outgoing combined beam 40 is irradiated to the movable mirror 22. The emitted combined beam 40 is two-dimensionally scanned by the movable mirror 22, is emitted from the window 35 provided in the mounting board 30, and projects an image on a screen or a retina.

In example 12 of the present invention, since the window 35 is provided at the position where the reflecting mirror 26 is provided in example 10 on the mounting substrate 30, the depth of the two-dimensional optical scanning type image projection apparatus can be further shortened. Other operational effects are the same as in embodiment 1 and embodiment 9 described above.

Example 13

Next, a two-dimensional optical scanning type image projection apparatus according to example 13 of the present invention will be described with reference to fig. 19 and 20, but the condenser lens in example 5 is eliminated. Fig. 19 is a conceptual configuration diagram of a two-dimensional optical scanning type image projection apparatus according to example 13 of the present invention, and fig. 20 is an explanatory diagram of a reflection state in the two-dimensional optical scanning type image projection apparatus according to example 13 of the present invention. As shown in fig. 20, from the incident surface 25_9-1Incident on a condensing reflecting surface 25 provided above _9-3Prism 25 of₉On the non-condensing reflecting surface 25_9-2And is bent upwards. The curved light beam is condensed by the light-condensing reflective surface 25_9-3Reflected from the emission surface 25_9-4And is emitted toward the movable mirror 22. The emitted output complex beam is two-dimensionally scanned by the movable mirror 22, is emitted from the window 32, and is projected onto a screen or a retina.

Similarly to fig. 11, the reflected beam 41 indicates a case where the angle of the movable mirror is 0deg, the reflected beam 42 indicates a case where the angle of the movable mirror 22 is inclined by 12deg, and the reflected beam 43 indicates a case where the angle of the movable mirror 22 is inclined by 12deg in the opposite direction. Furthermore, a prism 25 is shown₉The cover member 31 may be fixed thereto, but may be fixed theretoOn the mounting substrate 30.

Here, the incident surface 25_9-1Is for making the emitted light incident on the prism 25₉Or a concave curved surface that is perpendicular to each incident light ray constituting the light beam at the light incident position of the light ray. If the curved surface is a concave surface which is perpendicular to each incident light beam at the light incident position, there is no difference in refraction angle due to the difference in wavelength of the incident light, and there is an advantage that there is no wavelength dependence of the light condensing characteristics.

Non-condensing reflective surface 25 _9-2Is a planar reflecting surface for bending the radiated light toward the upper surface. The angle of the reflecting surface is preferably configured so that all incident light rays constituting the light beam are totally reflected, but the total reflection is not necessarily required, and the light beam may be configured by the prism 25₉A reflective metal film or the like is formed on the surface of the substrate to reflect incident light.

Light-condensing reflective surface 25_9-3The reflecting/condensing curved surface is a curved surface for diffusing light and condensing light emitted from the optical waveguide type multiplexer 12, and a preferred curved surface is an elliptic curved surface. The reflecting/condensing curved surface is also preferably an angle of the reflecting surface by total reflection, but not necessarily total reflection, and may be formed by the prism 25₉A reflective metal film or the like is formed on the surface of the substrate to reflect incident light.

Emission surface 25_9-4The light beam is emitted from the prism, or is a concave or convex curved surface that is perpendicular to each emitted light beam at the light emission position of the light beam. Prism 25₉The other faces of (a) may be arbitrary faces but generally planar faces are used. Prism 25₉The material of (A) is SiO₂Glass is used, but any material that transmits light such as transparent resin may be used. In example 13, the light-condensing reflective surface is one, but the number of light-condensing reflective surfaces may be 2 or more, and it is needless to say that the number of reflective surfaces may be further increased by including a non-light-condensing reflective surface.

Example 14

Next, a description will be given of two-dimensional structure of example 14 of the present invention with reference to FIG. 21An optical scanning type image projection apparatus. Only the main part is illustrated here, except for the prism 25₁₀The same as example 13 was repeated except for the above-mentioned points. FIG. 21 is an explanatory view of a main part of a two-dimensional optical scanning type image projection apparatus according to embodiment 14 of the present invention, which is taken from an incident surface 25_10-1Enters the prism 25₁₀On the non-condensing reflecting surface 25_10-2And is bent upwards. Curved light beam on condensing reflecting surface 25_10-3After reflection, on the non-condensing reflecting surface 25_10-4Reflected from the emission surface 25_10-5And is emitted toward the movable mirror 22. The emitted output complex beam is two-dimensionally scanned by the movable mirror 22, and an image is projected onto a screen or a retina.

In example 14 of the present invention, the non-light-condensing reflective surface is increased by 1 and reflected at 3, so that the size of the entire imaging device can be reduced. Prism 25₁₀The structure and material of each surface are the same as those of the above-described example 13. Prism 25₁₀The fixing member may be fixed to the mounting substrate or may be fixed to the lid member. In example 14, the number of light-condensing reflective surfaces may be 2 or more, and it is needless to say that the number of reflective surfaces may be further increased by including a non-light-condensing reflective surface.

Example 15

Next, a two-dimensional optical scanning type image projection apparatus according to example 15 of the present invention will be described with reference to fig. 22, except that a prism 25 is used₁₁The same as example 14 except for the structure of (1). FIG. 22 is a diagram illustrating a main part of a two-dimensional optical scanning type image projection apparatus according to embodiment 15 of the present invention, and is a sectional surface 25_11-6Prism 25₁₁Divided into 2 parts, shaped, etc. as the prism 25 of example 14₁₀The same is true.

In embodiment 15 of the present invention, the splitting prism 25₁₁And thus has a prism 25₁₁The manufacturing of (2) becomes easy. Prism 25₁₁The fixing member may be fixed to the mounting substrate or may be fixed to the lid member. In example 15, the number of light-condensing reflective surfaces may be 2 or more, and it is needless to say that the number of reflective surfaces may be further increased by including a non-light-condensing reflective surface.

Example 16

Next, a two-dimensional optical scanning type image projection apparatus according to example 16 of the present invention will be described with reference to fig. 23, except that a prism 25 is used₁₂The same as example 14 except for the structure of (1). FIG. 23 is a diagram illustrating a main part of a two-dimensional optical scanning type image projection apparatus according to embodiment 16 of the present invention, and is provided in a prism 25₁₂Is provided with a light-condensing reflecting surface 25 on the lower side_12-2By non-condensing reflecting surfaces 25 _12-3、25_12-4Forming the other faces.

In example 16 of the present invention, the prism 25 can be used in the same manner as in example 15₁₂And is divided to form. Prism 25₁₂The fixing member may be fixed to the mounting substrate or may be fixed to the lid member. In example 16, the number of light-condensing reflective surfaces may be 2 or more, and it is needless to say that the number of reflective surfaces may be further increased by including a non-light-condensing reflective surface.

Example 17

Next, a two-dimensional optical scanning type image projection apparatus according to example 17 of the present invention will be described with reference to fig. 24, except that a prism 25 is used₁₃The same as example 14 except for the structure of (1). FIG. 24 is a diagram illustrating a main part of a two-dimensional optical scanning type image projection apparatus according to embodiment 17 of the present invention, and is provided on a prism 25₁₃Is provided with a light-condensing reflecting surface 25_13-3By non-condensing reflecting surfaces 25_13-2、25_13-4Forming the other faces.

In example 17 of the present invention, the light was made incident on the condensing reflective surface 25, as compared with example 15 described above_13-3Has a light-condensing reflective surface 25 because the light beam is nearly vertically incident_13-3The positional shift of (2) and the positional shift of the light beam are also reduced. Further, the positional shift of the light beam and the change in the shape of the light beam are reduced relative to the positional shift when the prism is installed. Light-condensing reflective surface 25 in this case _13-3The preferred curved surface is also an elliptic curved surface, but the light collection may be a curved surface approximated by a polynomial equation or the like.

Prism 25₁₃May be fixed to the mounting substrate or the lid portion by using an appropriate fixing memberAnd (3) a component. In example 17, the number of light-condensing reflective surfaces may be 2 or more, and it is needless to say that a non-light-condensing reflective surface may be included and the number of reflective surfaces may be further increased. In example 17 of the present invention, the prisms 25 may be formed by division in the same manner as in example 15₁₃。

Example 18

Next, a two-dimensional optical scanning type image projection apparatus according to example 18 of the present invention will be described with reference to fig. 25, except that a prism 25 is used₁₄The same as in example 6 is applied to the structure other than the structure in which the light flux reflected by the movable mirror 22 is emitted in the horizontal direction with respect to the mounting substrate. Fig. 25 is a conceptual configuration diagram of a two-dimensional optical scanning type image projection apparatus according to embodiment 18 of the present invention, which is a diagram replacing the non-condensing mirror 25₇And a triangular prism 25 having 2 surfaces as non-condensing reflecting mirror surfaces is used₁₄. In addition, the triangular prism 25 may be replaced₁₄And 2 flat-plate non-condensing mirrors are arranged on the reflecting surface.

The two-dimensionally scanned light beam is emitted from the window 32, and as shown in the drawing, the light beam and the upper attachment portion 30 in a state where the movable mirror 22 does not vibrate, that is, in a case where the angle of the movable mirror 22 is 0deg ₁And a lower mounting part 30₂And parallel. The parallel output beams here can be applied even if they are not exactly parallel using the triangular prism 25₁₄The present structure of (1). If the parallelism is ± 10deg, the reflected beam can be obtained most efficiently, but it is within approximately ± 45 deg. In addition, if the triangular prism 25 is used₁₄1 to 2 reflection surfaces as light-condensing surfaces, the condenser lens 25 is not required₁。

In fig. 25, the prism 25 is omitted₁₄To support the mounting clip. Here, although the description has been given of the case where the step is present on the substrate, the step is not necessarily required if the light beam is not blocked by the movable mirror. The cover member 31 is collectively one, but may be divided into 2 pieces as shown in fig. 13 of embodiment 7.

The scanning direction of the light beam emitted in the direction parallel to the substrate after reflection by the movable mirror 22 may be a high-speed scanning direction or a low-speed scanning direction parallel to the paper surface. Here, although the two-dimensional scanning mirror is explained, the same applies to the one-dimensional scanning mirror.

Example 19

Next, a two-dimensional optical scanning type image projection apparatus according to example 19 of the present invention will be described with reference to fig. 26, except that the prism 25 is used ₁₅The same as in example 18, except that the shape of (A) was changed. FIG. 26 is a conceptual configuration view of a two-dimensional optical scanning type image projection apparatus according to example 19 of the present invention, in which 2 triangular prisms 25 each having a mirror surface as a surface thereof are used₁₅The size of the light incident side and the size of the light emitting side of (2) are different from each other, and the movable mirror 22 can be swept at a larger angle.

In fig. 26, the prism 25 is omitted₁₅To support the mounting clip. Here, although the description has been given of the case where there is a step on the substrate, the step is not necessarily required if the light beam is not blocked by the movable mirror 22. The cover member 31 is collectively one, but may be divided into 2 pieces as shown in fig. 13 of embodiment 7.

Example 20

Next, a two-dimensional optical scanning type image projection apparatus according to example 20 of the present invention will be described with reference to fig. 27, except that a prism 25 is used₁₆The same as in example 18, except that the shape of (A) was changed. Fig. 27 is a conceptual configuration diagram of a two-dimensional optical scanning type image projection apparatus according to embodiment 20 of the present invention, which is a triangular prism 25 having 2 surfaces as mirror surfaces₁₆And with a reflector combining 2 surface reflection prisms, the height of the output composite beam 40 is different from the height of the reflected beam 41.

In fig. 27, the prism 25 is omitted₁₆To support the mounting clip. Here, although the description has been given of the case where there is a step on the substrate, the step is not necessarily required if the light beam is not blocked by the movable mirror 22. The cover member 31 is collectively one, but may be divided into 2 pieces as shown in fig. 13 of embodiment 7.

Example 21

Next, a description will be given of two-dimensional light of example 21 of the present invention with reference to FIG. 28A scanning type image projection apparatus, except that a non-condensing mirror 25 is additionally provided₁₇Otherwise, the same as example 6. FIG. 28 is a conceptual configuration diagram of a two-dimensional optical scanning type image projection apparatus according to example 21 of the present invention, in which a non-condensing mirror 25 is additionally provided₁₇When the movable mirror 22 is not vibrated, that is, when the angle of the movable mirror 22 is 0deg, the light beam 41 and the upper-stage mounting portion 30 are fixed to each other₁And a lower mounting part 30₂And parallel.

In fig. 28, the non-condensing mirror 25 is omitted₁₇To support the mounting clip. Here, although the description has been given of the case where there is a step on the substrate, the step is not necessarily required if the light beam is not blocked by the movable mirror 22. The cover member 31 is collectively one, but may be divided into 2 pieces as shown in fig. 13 of embodiment 7.

Example 22

Next, a two-dimensional optical scanning type image projection apparatus according to example 22 of the present invention will be described with reference to fig. 29, except that a non-condensing multi-surface internal reflection prism 25 is used₁₈Otherwise, the same as example 6. Fig. 29 is a conceptual configuration diagram of a two-dimensional optical scanning type image projection apparatus according to example 22 of the present invention, which uses 2 non-condensing mirrors 25 having the same configuration as that of example 21₇、25₁₇Non-condensing multi-sided internal reflection prism 25 of the same reflection₁₈。

In fig. 29, the non-condensing multifaceted internal reflection prism 25 is omitted₁₈To support the mounting clip. Here, although the description has been given of the case where there is a step on the substrate, the step is not necessarily required if the light beam is not blocked by the movable mirror 22. The cover member 31 is collectively one, but may be divided into 2 pieces as shown in fig. 13 of embodiment 7.

Example 23

Next, a two-dimensional optical scanning type image projection apparatus according to embodiment 23 of the present invention will be described with reference to fig. 30, except that a semi-transparent mirror 25 is used₁₉Otherwise, the procedure was substantially the same as in example 6. FIG. 30 is a conceptual configuration diagram of a two-dimensional optical scanning type image projection apparatus according to embodiment 23 of the present invention, in which a semi-transparent mirror is used25₁₉The light beam 41 is set to the upper-stage mounting portion 30 in a state where the movable mirror 22 is not vibrated, that is, in a state where the angle of the movable mirror 22 is 0deg ₁And a lower mounting part 30₂And taking out in the vertical direction.

In this case, the output combined light beam 40 from the optical waveguide type combiner 12 passes through the semi-transparent mirror 25₁₉Downward reflection, upward reflection by the movable mirror 22, and upward reflection by the semi-transparent mirror 25₁₉Then, the reflected beam 41 is directed toward the lower mounting portion 30₂And the light is emitted in the vertical direction. In this case, the mirror used is a semi-transparent mirror 25₁₉Therefore, a part of the light flux does not travel in the vertical direction as the reflected light beam 41, and becomes an unusable light flux as the light flux returned to the optical waveguide type multiplexer 12 or with respect to the upper stage mounting portion 30₁And a lower mounting part 30₂The intensity of the reflected beam 41 decreases for beams travelling in parallel, but there is no problem if the application requires particularly intense light. In addition, the vertical output beam here can be applied even if it is not strictly vertical using the semi-transparent mirror 25₁₉The present structure of (1). If the perpendicularity is ± 10deg, the reflected beam 41 can be obtained most efficiently, but it is sufficient if it is within approximately ± 45 deg.

In fig. 30, the semi-transparent mirror 25 is omitted₁₉To support the mounting clip. Here, although the description has been given of the case where there is a step on the substrate, the step is not necessarily required if the light beam is not blocked by the movable mirror 22. The cover member 31 is collectively one, but may be divided into 2 pieces as shown in fig. 13 of embodiment 7.

Example 24

Next, a two-dimensional optical scanning type image projection apparatus according to example 24 of the present invention will be described with reference to fig. 31, except that the semi-transparent mirror 25 is replaced with a half-mirror₁₉Using a prism-type beam splitter 25₂₀Otherwise, the procedure was substantially the same as in example 23. FIG. 31 is a conceptual configuration diagram of a two-dimensional optical scanning type image projection apparatus according to example 24 of the present invention, using a prism beam splitter 25₂₀In a state where the movable mirror 22 is not vibrated, that is, in a state where the movable mirror is not vibrated22 at an angle of 0 deg. relative to the upper mount 30₁And a lower layer mounting part 30₂And taking out in the vertical direction.

In this case, a part of the light beam does not travel in the vertical direction as the reflected light beam 41, but rather as the light beam returned to the optical waveguide type combiner 12 or with respect to the upper layer mounting portion 30₁And a lower layer mounting part 30₂The light beam traveling in the parallel direction becomes an unusable light beam, and the intensity of the reflected light beam 41 decreases, but there is no problem if an application requiring particularly strong light is not required. In addition, the vertical output beam can be applied to the prism beam splitter 25 even when the output beam is not exactly vertical₂₀The present structure of (1). If the perpendicularity is ± 10deg, the reflected beam 41 can be obtained most efficiently, but it is sufficient if it is within approximately ± 45 deg.

In fig. 31, the prism-type beam splitter 25 is omitted₂₀To support the mounting clip. Here, although the description has been given of the case where there is a step on the substrate, the step is not necessarily required if the light beam is not blocked by the movable mirror 22. The cover member 31 is collectively one, but may be divided into 2 pieces as shown in fig. 13 of embodiment 7. In addition, although the two-dimensional scanning mirror is described here, the same applies to the one-dimensional scanning mirror, and the cases of embodiments 1 to 23 described above are also applicable to the one-dimensional scanning mirror. The direction of the light beam reflected and emitted by the movable mirror 22 may be a high-speed scanning direction or a low-speed scanning direction parallel to the paper surface, and the same applies to the cases of the above-described embodiments 1 to 23.

Description of the reference symbols

10: a light source module device; 11: a light source module device substrate; 12: an optical waveguide type multiplexer; 13: an optical waveguide forming layer; 14. 14. sup. th₁、14₂、14₃: an optical waveguide pattern; 15: a light source element; 15₁: a blue semiconductor laser; 15₂: a green semiconductor laser; 15₃: a red semiconductor laser; 16₁、16₂、16₃: a pad; 17₁～17₄: wiring on the substrate; 18₁、18₂、18₃: a bonding wire; 20: a two-dimensional optical scanning mirror device; 21: a two-dimensional optical scanning mirror device substrate; 22: a movable mirror; 23: a non-rotating outer frame; 24: rotating the outer frame; 25: an optical member; 25 ₁: a condenser lens; 25₂: a non-condensing mirror; 25₃: a non-condensing mirror; 25_3-1、25_3-2: a non-condensing mirror; 25₄: a condensing mirror; 25₅: a condensing mirror; 25₆: a prism; 25₇: a non-condensing mirror; 25₈: a condensing mirror; 25₉: a prism; 25_9-1: an incident surface; 25_9-2: a non-condensing reflective surface; 25_9-3: a light-condensing reflective surface; 25_9-4: an emitting surface; 25₁₀: a prism; 25_10-1: an incident surface; 25_10-2: a non-condensing reflective surface; 25_10-3: a light-condensing reflective surface; 25_10-4: a non-condensing reflective surface; 25_10-5: an emitting surface; 25₁₁: a prism; 25_11-1: an incident surface; 25_11-2: a non-condensing reflective surface; 25_11-3: a light-condensing reflective surface; 25_11-4: a non-condensing reflective surface; 25_11-5: an emitting surface; 25_11-6: dividing the noodles; 25₁₂: a prism; 25_12-1: an incident surface; 25_12-2: a light-condensing reflective surface; 25_12-3: a non-condensing reflective surface; 25_12-4: a non-condensing reflective surface; 25_12-5: an emitting surface; 25₁₃: a prism; 25_13-1: an incident surface; 25_13-2: a non-condensing reflective surface; 25_13-3: a light-condensing reflective surface; 25_13-4: a non-condensing reflective surface; 25_15-5: an emitting surface; 25₁₄: a prism; 25₁₅: a prism; 25₁₆: a prism; 25₁₇: a non-condensing mirror; 25₁₈: a non-condensing multi-faceted internal reflection prism; 25 ₁₉: a semi-transparent mirror; 25₂₀: a prism-type beam splitter; 26: a mirror; 30: a mounting substrate; 30₁: an upper section mounting section; 30₂: a lower section mounting section; 31: a cover member; 31₁: a light source module device part cover member; 31₂: a two-dimensional optical scanning mirror device section cover member; 32. 32, 33, 34₁、34₂35: a window; 36₁～36₄: a pad; 37₁～37₄: wiring on the substrate; 38₁～38₄: a pad; 39₁～39₄: a bonding wire; 40: outputting the combined wave light beam; 41-43: reflecting the light beam; 120. 121: a mounting substrate; 130: a two-dimensional optical scanning mirror device; 131: a scanning mirror; 132: a solenoid coil; 140: a three primary color light source module device; 143: an optical waveguide type multiplexer; 147: a red semiconductor laser chip; 148: a green semiconductor laser chip; 149: a blue semiconductor laser chip.