阅读说明：本技术 一种模块化半导体自动立体仓库 (Modularized semiconductor automatic stereoscopic warehouse ) 是由 李健乐 张丰 张淳 齐风 李伦 戴超 孙晨光 王彦君 陈健华 于 2021-08-04 设计创作，主要内容包括：本发明公开了一种模块化半导体自动立体仓库,包括模块化货架、堆垛机和交接平台,所述模块化货架边框间隙接触交接平台边框,所所述交接平台内部活动连接堆垛机,所述堆垛机一端活动夹接模块货架架内货物,所述模块货架包括货架。与现有技术相比,本发明的有益效果是：本发明不仅结合存储功能,还集合了货物自动识别技术,高效存储8寸晶圆开放式载具。每个载具都对应自己独立的盒号信息,包括条形码等信息,并记录载具盒号、存储位置；在堆垛机和交接平台的配合作用下,可以根据载具信息锁定位置并进行放置存储和抓取,极大地提高了仓储作业效率。(The invention discloses a modular semiconductor automatic stereoscopic warehouse which comprises a modular goods shelf, a stacker and a handing-over platform, wherein the frame of the modular goods shelf is in clearance contact with the frame of the handing-over platform, the stacker is movably connected inside the handing-over platform, goods in a module goods shelf frame are movably clamped at one end of the stacker, and the module goods shelf comprises goods shelves. Compared with the prior art, the invention has the beneficial effects that: the invention not only combines the storage function, but also integrates the automatic goods identification technology and efficiently stores the 8-inch wafer open carrier. Each carrier corresponds to independent box number information of the carrier, including information such as bar codes and the like, and the box number and the storage position of the carrier are recorded; under the cooperation of the stacker and the cross-over platform, the storage and the grabbing can be carried out according to the carrier information locking position, and the storage operation efficiency is greatly improved.)

1. The utility model provides an automatic stereoscopic warehouse of modularization semiconductor, includes modularization goods shelves (1), stacker (2) and handing-over platform (3), modularization goods shelves (1) frame clearance contact handing-over platform (3) frame, institute the inside swing joint stacker (2) of handing-over platform (3), goods in stacker (2) one end activity clamp module goods shelves (1) frame, its characterized in that: the module shelf (1) comprises a shelf (10), the frame of the shelf (10) is connected with the frame of the cross-connecting platform (3) in a clearance mode, a plurality of mounting plates (12) are arranged in the shelf (10) in parallel from top to bottom, a plurality of carriers (14) are movably arranged on the surfaces of the mounting plates (12), and the carriers (14) are movably contacted with one end of the stacker (2);

the stacker (2) comprises a clamping jaw (23), the clamping end of the clamping jaw (23) is movably clamped with a carrier (14), the fixed end of the clamping jaw (23) is fixedly connected with the tail end of a servo cylinder (22), the cylinder body of the servo cylinder (22) is fixedly connected with the top surface edge of a turntable cylinder (20), the middle part of the turntable cylinder (20) is fixedly connected with the top of a rotating shaft (21), the bottom end of the rotating shaft (21) is rotatably connected with an electric cylinder sliding table (24), the side surface of the electric cylinder sliding table (24) is slidably connected with one side of a lifting table (25), and the other side of the lifting table (25) is slidably connected with one side of a clamping platform (3);

the cross-connecting platform (3) comprises a bottom plate (31), the side surface of the bottom plate (31) is in clearance contact with the frame of the goods shelf (10), two sides of the surface of the bottom plate (31) are fixedly connected with brackets (32), the top ends of the brackets (32) are fixedly connected with two ends of a top rail (33), the rail surface of the top rail (33) is connected with two ends of the top of the vertical rail (34) in a sliding way, the rail surface of the vertical rail (34) is connected with the lifting platform (25) in a sliding way, the bottom of the vertical rail (34) is fixedly connected with the middle part of a bearing plate (35), one side of the surface of the bearing plate (35) is provided with a control box mounting part (38), the bottom surface of the bearing plate (35) is connected with a middle part sliding connection ground rail (36) in a sliding way, the bottom of the ground rail (36) is fixedly connected with the middle part of the surface of the bottom plate (31) in parallel, the edge of the bottom surface of the bearing plate (36) is movably connected with a driving end of a drag chain (37), the movable end of the drag chain (37) is movably connected with the edge of the surface of the bottom plate (31).

2. A modular semiconductor autostereoscope as claimed in claim 1, wherein: a plurality of form goods shelves unit (11) between mounting panel (12), mounting panel (12) edge rigid coupling locating piece (13), locating piece (13) clearance contact carrier (14) bottom one side, carrier (14) side middle part is equipped with bar code (140).

3. A modular semiconductor autostereoscope as claimed in claim 1, wherein: electronic slip table (24) side rigid coupling spout (240), spout (240) sliding connection slide rail (250), slide rail (250) horizontal rigid coupling elevating platform (25) one side, vertical rigid coupling if chute block (251) of elevating platform (25) opposite side, chute block (251) sliding connection erects rail (34) rail surface.

4. A modular semiconductor autostereoscope as claimed in claim 1, wherein: the side face of the bottom of the bracket (34) is fixedly connected with a limiting block (320), and the bottom of the limiting block (320) is fixedly connected with the surface of the bottom plate (31).

5. A modular semiconductor autostereoscope as claimed in claim 1, wherein: the top of the vertical rail (34) is fixedly connected with a cross beam (340), two ends of the cross beam (340) are fixedly connected with a hinged joint (341), the bottom of the hinged joint (341) is movably connected with a roller (342), and the roller (342) is connected with the rail surface of the top rail (33) in a rolling manner; the other side of the vertical rail (33) is fixedly connected with a plurality of ascending ladders (343), the side of the bottom of the vertical rail (33) is fixedly connected with a reinforcing block (344), and the bottom of the reinforcing block (344) is fixedly connected with the surface of a bearing plate (35).

6. A modular semiconductor autostereoscope as claimed in claim 1, wherein: the lifting platform (25) and the drag chain (37) are driven by non-inductive cylinders.

Technical Field

The invention relates to the technical field of semiconductor storage equipment, in particular to a modular semiconductor automatic stereoscopic warehouse.

Background

Along with the progress and continuous development of scientific technology, the productivity is gradually improved, and the requirements for material storage and summary are gradually improved. The stereoscopic warehouse based on automation becomes the preferred storage mode of the industry due to strong storage capacity and high-efficiency warehousing operation efficiency. With the current progress of information technology, automatic recognition also gradually replaces manual recognition. The current widely used identification technologies mainly include: bar codes, two-dimensional codes, magnetic cards, EFID radio frequency and other technologies. Therefore, the automatic warehouse not only needs to combine the storage function, but also should integrate the goods automatic identification technology. In order to facilitate the requirements of technical extension, automatic design convenience, performance extension and the like, the stereoscopic warehouse is required to be capable of forming a modular design.

To this end we propose a modular semiconductor autosterescort to solve the above mentioned problems.

Disclosure of Invention

The present invention is directed to a modular semiconductor automatic stereoscopic warehouse, which solves the above problems of the prior art.

In order to achieve the purpose, the invention provides the following technical scheme: a modularized semiconductor automatic stereoscopic warehouse comprises a modularized goods shelf, a stacker and a delivery platform, wherein the frame of the modularized goods shelf contacts with the frame of the delivery platform in a clearance way, the stacker is movably connected inside the delivery platform, goods in a module goods shelf are movably clamped at one end of the stacker, the module goods shelf comprises a goods shelf, the frame of the goods shelf contacts with the frame of the delivery platform in a clearance way, a plurality of mounting plates are arranged in parallel inside the goods shelf from top to bottom, a plurality of carriers are movably arranged on the surfaces of the mounting plates, and the carriers movably contact with one end of the stacker; under the cooperation of the stacker 2 and the handover platform 3, the storage and the grabbing can be carried out according to the information locking position of the carrier 14, so that the storage operation efficiency is greatly improved.

The stacker comprises a clamping jaw, a clamping jaw clamping end is movably clamped with a carrier, a clamping jaw fixed end is fixedly connected with the tail end of a servo cylinder, a servo cylinder body is fixedly connected with the edge of the top surface of a rotary table cylinder, the middle part of the rotary cylinder is fixedly connected with the top part of a rotary shaft, the bottom end of the rotary shaft is rotatably connected with an electric cylinder sliding table, the side surface of the electric cylinder sliding table is slidably connected with one side of a lifting table, and the other side of the lifting table is slidably connected with one side of a clamping platform;

handing-over platform includes the bottom plate, bottom plate side clearance contact goods shelves frame, bottom plate face both sides rigid coupling support, support top rigid coupling sky rail both ends, sky rail face sliding connection erects rail top both ends, erect rail face sliding connection elevating platform, erect rail bottom rigid coupling bearing plate middle part, bearing plate face one side is equipped with control box installation department, bearing plate bottom surface sliding connection middle part sliding connection ground rail, the parallel rigid coupling bottom plate face middle part in ground rail bottom, bearing plate bottom surface edge swing joint tow chain drive end, tow chain removal end swing joint bottom plate face edge.

Preferably, a plurality of shelf units are formed between the mounting plates, the edges of the mounting plates are fixedly connected with positioning blocks, the positioning blocks are in clearance contact with one side of the bottom of the carrier, and the middle of the side surface of the carrier is provided with a bar code.

Preferably, the side face of the electric sliding table is fixedly connected with a sliding groove, the sliding groove is connected with a sliding rail in a sliding manner, the sliding rail is fixedly connected with one side of the lifting table in a transverse direction, the other side of the lifting table is fixedly connected with a sliding groove block in a longitudinal direction, and the sliding groove block is connected with a vertical rail surface in a sliding manner.

Preferably, the side face of the bottom of the support is fixedly connected with a limiting block, and the bottom of the limiting block is fixedly connected with the surface of the bottom plate.

Preferably, the top of the vertical rail is fixedly connected with a cross beam, two ends of the cross beam are fixedly connected with a hinged joint, the bottom of the hinged joint is movably connected with a roller, and the roller is connected with the rail surface of the overhead rail in a rolling manner; the other side of the vertical rail is fixedly connected with a plurality of ascending ladders, the side of the bottom of the vertical rail is fixedly connected with a reinforcing block, and the bottom of the reinforcing block is fixedly connected with a bearing plate surface.

Preferably, the lifting platform and the drag chain are driven by non-inductive cylinders.

Compared with the prior art, the invention has the beneficial effects that: the invention not only combines the storage function, but also integrates the automatic goods identification technology and efficiently stores the 8-inch wafer open carrier. Each carrier corresponds to independent box number information of the carrier, including information such as bar codes and the like, and the box number and the storage position of the carrier are recorded; under the cooperation of the stacker and the cross-over platform, the storage and the grabbing can be carried out according to the carrier information locking position, and the storage operation efficiency is greatly improved.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic diagram of a cross-connect platform according to the present invention;

FIG. 3 is a schematic view of the vertical rail structure of the present invention;

FIG. 4 is a schematic diagram of the stacker structure of the present invention.

In the figure: 1, module goods shelf: 10 shelves, 11 shelf units, 12 mounting plates, 13 positioning blocks, 14 carriers and 140 bar code readers; 2, a stacker: 20 rotary table cylinders, 21 rotating shafts, 22 servo cylinders, 23 clamping jaws, 24 electric cylinder sliding tables, 240 sliding grooves, 25 lifting tables, 250 sliding rails and 251 sliding groove blocks; 3, a handover platform: 31 bottom plate, 32 supports, 320 limiting blocks, 33 sky rail, 34 vertical rail, 340 cross beam, 341 hinge joint, 342 idler wheel, 343 ascending ladder, 344 reinforcing block, 35 bearing plate, 350 chute strip, 36 ground rail, 37 drag chain and 38 control box installation position.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1-4, the present invention provides a technical solution: a modularized semiconductor automatic stereoscopic warehouse comprises a modularized goods shelf 1, a stacker 2 and a delivery platform 3, wherein the frame of the modularized goods shelf 1 contacts with the frame of the delivery platform 3 in a clearance mode, the inside of the delivery platform 3 is movably connected with the stacker 2, one end of the stacker 2 movably clamps goods in the frame of the modularized goods shelf 1, the modularized goods shelf 1 comprises a goods shelf 10, the frame of the goods shelf 10 contacts with the frame of the delivery platform 3 in a clearance mode, a plurality of mounting plates 12 are installed in the goods shelf 10 in parallel from top to bottom, a plurality of carriers 14 are movably arranged on the surfaces of the mounting plates 12, and the carriers 14 are movably contacted with one end of the stacker 2;

the stacker 2 comprises a clamping jaw 23, a clamping end of the clamping jaw 23 is movably clamped with a carrier 14, a fixed end of the clamping jaw 23 is fixedly connected with the tail end of a servo cylinder 22, a cylinder body of the servo cylinder 22 is fixedly connected with the edge of the top surface of a rotary table cylinder 20, the middle part of the rotary cylinder 20 is fixedly connected with the top part of a rotary shaft 21, the bottom end of the rotary shaft 21 is rotatably connected with an electric cylinder sliding table 24, the side surface of the electric cylinder sliding table 24 is slidably connected with one side of a lifting table 25, and the other side of the lifting table 25 is slidably connected with one side of a clamping platform 3; the lifting platform 25 can be driven by the non-inductive cylinder to lift along the rail surface of the vertical rail 34 and reach the locking height; the electric sliding table 24 moves transversely along the slide rail 250 on the lifting table 25, so that the turntable cylinder 20 reaches a required distance, then the turntable cylinder 20 drives the servo cylinder 22 to rotate, and the servo cylinder 22 sends the clamping jaw 23 to a locked position, so that the carrier 14 with the wafer can be grabbed; otherwise, the carrier 14 with the wafer can be sent to the corresponding shelf unit 11.

Handing-over platform 3 includes bottom plate 31, bottom plate 31 side clearance contact goods shelves 10 frame, bottom plate 31 face both sides rigid coupling support 32, support 32 top rigid coupling sky rail 33 both ends, sky rail 33 rail face sliding connection erects rail 34 top both ends, erect rail 34 rail face sliding connection elevating platform 25, erect rail 34 bottom rigid coupling bearing plate 35 middle part, bearing plate 35 face one side is equipped with control box installation department 38, bearing plate 35 bottom surface sliding connection middle part sliding connection ground rail 36, the parallel rigid coupling bottom plate 31 face middle part in ground rail 36 bottom, bearing plate 36 bottom surface edge swing joint tow chain 37 drive end, tow chain 37 removal end swing joint bottom plate 31 face edge. The drag chain 37 can drive the bearing plate 35, the vertical rail 34 and the stacker 2 to move in the horizontal direction under the driving of the non-inductive cylinder and reach the locked horizontal position.

A shelf unit 11 is formed among a plurality of mounting plates 12, the edges of the mounting plates 12 are fixedly connected with positioning blocks 13, the positioning blocks 13 are in clearance contact with one side of the bottom of the carrier 14, and the middle of the side surface of the carrier 14 is provided with a bar code 140.

The side surface of the electric sliding table 24 is fixedly connected with a sliding groove 240, the sliding groove 240 is connected with a sliding rail 250 in a sliding manner, the sliding rail 250 is transversely and fixedly connected with one side of the lifting table 25, the other side of the lifting table 25 is fixedly connected with a plurality of sliding groove blocks 251 in a longitudinal manner, and the sliding groove blocks 251 are connected with the rail surface of the vertical rail 34 in a sliding manner.

The side surface of the bottom of the bracket 34 is fixedly connected with a limiting block 320, and the bottom of the limiting block 320 is fixedly connected with the surface of the bottom plate 31.

The top of the vertical rail 34 is fixedly connected with a cross beam 340, two ends of the cross beam 340 are fixedly connected with a hinge head 341, the bottom of the hinge head 341 is movably connected with a roller 342, and the roller 342 is connected with the rail surface of the top rail 33 in a rolling manner; the other side surface of the vertical rail 33 is fixedly connected with a plurality of ascending ladders 343, the side surface of the bottom of the vertical rail 33 is fixedly connected with a reinforcing block 344, and the bottom of the reinforcing block 344 is fixedly connected with the surface of the bearing plate 35. Roller 342 facilitates horizontal movement of vertical rail 34 and nub 344 can increase the stability of vertical rail 34.

Both the lift table 25 and the drag chain 37 are driven by non-inductive cylinders.

The working principle is as follows: under the matching action of the stacker 2 and the delivery platform 3, the storage device can lock the position according to the information of the carrier 14 and perform placement, storage and grabbing, thereby greatly improving the storage operation efficiency. The drag chain 37 can drive the bearing plate 35, the vertical rail 34 and the stacker 2 to move in the horizontal direction under the driving of the non-inductive cylinder and reach a locked horizontal position; the lifting platform 25 of the stacker 2 can be driven by the non-inductive cylinder to lift along the rail surface of the vertical rail 34 and reach the locking height; the electric sliding table 24 moves transversely along the slide rail 250 on the lifting table 25, so that the turntable cylinder 20 reaches a required distance, then the turntable cylinder 20 drives the servo cylinder 22 to rotate, and the servo cylinder 22 sends the clamping jaw 23 to a locked position, so that the carrier 14 with the wafer can be grabbed; otherwise, the carrier 14 with the wafer can be sent to the corresponding shelf unit 11.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.