Double-flexible-joint-driven perforated flexible plate vibration measurement and control device and method

文档序号:1829325 发布日期:2021-11-12 浏览:19次 中文

阅读说明:本技术 一种双柔性关节驱动的开孔柔性板振动测控装置及方法 (Double-flexible-joint-driven perforated flexible plate vibration measurement and control device and method ) 是由 邱志成 梁文俊 杨阳 何成虎 于 2021-07-09 设计创作,主要内容包括:本发明公开了一种双柔性关节驱动的开孔柔性板振动测控装置及方法,包括,柔性板本体部分及控制部分;柔性板本体部分,包括开孔柔性板,所述开孔柔性板的上、下端分别通过柔性关节与传动部件连接,所述开孔柔性板上粘贴压电陶瓷传感器、压电致动器及加速度传感器;控制部分,根据压电陶瓷传感器及加速度传感检测开孔柔性板的振动信号,得到控制量,分别输出压电致电器及传动部件,用于抑制开孔柔性板的振动。本发明可以实现全面地研究不同扭转刚度对于开孔柔性板的振动模态的影响。(The invention discloses a double-flexible joint driven perforated flexible plate vibration measurement and control device and a method, wherein the device comprises a flexible plate body part and a control part; the flexible plate body part comprises a perforated flexible plate, the upper end and the lower end of the perforated flexible plate are respectively connected with the transmission part through flexible joints, and a piezoelectric ceramic sensor, a piezoelectric actuator and an acceleration sensor are adhered to the perforated flexible plate; and the control part is used for detecting vibration signals of the perforated flexible plate according to the piezoelectric ceramic sensor and the acceleration sensor to obtain control quantity, and respectively outputting the piezoelectric generator and the transmission part for inhibiting the vibration of the perforated flexible plate. The invention can comprehensively research the influence of different torsional rigidity on the vibration mode of the perforated flexible plate.)

1. A double-flexible joint driven perforated flexible plate vibration measurement and control device is characterized by comprising a flexible plate body part and a control part;

the flexible plate body part comprises a perforated flexible plate, the upper end and the lower end of the perforated flexible plate are respectively connected with the transmission part through flexible joints, and a piezoelectric ceramic sensor, a piezoelectric actuator and an acceleration sensor are adhered to the perforated flexible plate;

and the control part is used for detecting vibration signals of the perforated flexible plate according to the piezoelectric ceramic sensor and the acceleration sensor to obtain control quantity, and respectively outputting the piezoelectric generator and the transmission part for inhibiting the vibration of the perforated flexible plate.

2. The perforated flexible plate vibration measurement and control device according to claim 1, wherein the number of the flexible joints is two, and the flexible joints have the same structure, and comprise a sleeve, a first tapered roller bearing, a rotating shaft, a second tapered roller bearing, an end cover, a coupling and two torsion springs, and the specific connections are as follows: the outer ring of the first tapered roller bearing is arranged on a boss of the inner wall of the sleeve, the outer ring of the second tapered roller bearing is arranged on a boss of the end cover, inner rings of the first tapered roller bearing and the second tapered roller bearing are arranged on a shaft shoulder of the rotating shaft, the end cover is fixed with the sleeve, one ends of the two torsion springs are embedded into grooves of the inner wall of the sleeve, the other ends of the two torsion springs are embedded into grooves of the rotating shaft, and the rotating directions of the two torsion springs are opposite.

3. The perforated flexible plate vibration measurement and control device according to claim 1, wherein the transmission component comprises a servo motor, a reducer and a servo motor driver, an input end of the reducer is connected with the servo motor, an output end of the reducer is connected with the flexible joint, and the servo motor driver receives a signal of the control part and drives the servo motor to rotate.

4. The perforated flexible sheet vibration measurement and control device according to any one of claims 1 to 3, wherein the perforated flexible sheet is provided with three square holes, and the three square holes are arranged on a center line of the perforated flexible sheet in the width direction and are equally spaced.

5. The vibration measurement and control device for the perforated flexible plate according to claim 4, wherein the piezoelectric ceramic sensors are provided with two pieces, are respectively arranged above and below the transverse center line of the flexible plate, are close to the fixed end, have an attitude angle of 0 degree, and are adhered on one side;

the acceleration sensor is provided with one sensor which is arranged at the free end of the perforated flexible plate.

6. The perforated flexible plate vibration measurement and control device according to claim 2, wherein the inner wall of the sleeve is provided with three first grooves and three second grooves which are different in size and are circumferentially distributed at intervals of 120 degrees;

the second grooves are arranged on the inner wall at intervals of 120 degrees and are distributed circumferentially, and the adjacent first grooves and the second grooves are arranged on the inner wall at intervals of 60 degrees.

7. The perforated flexible sheet vibration measurement and control device of claim 2, wherein the shaft has a first slot and a second slot of two different sizes, the two slots being spaced apart by 180 °.

8. The perforated flexible plate vibration measurement and control device according to claim 2, wherein the two torsion springs are installed in opposite rotation directions, specifically:

the two torsion springs are positioned between the two tapered roller bearings, wherein the torsion direction of the torsion spring close to one side of the first tapered roller bearing is anticlockwise, and the torsion direction of the torsion spring close to one side of the second tapered roller bearing is clockwise.

9. The perforated flexible plate vibration measurement and control device according to claim 1, wherein the control part comprises a computer, a motion control card, a terminal board, a charge amplifier and a piezoelectric amplification circuit, the terminal board is connected with the motion control card, the motion control card is connected with the computer, and the terminal board is respectively connected with the charge amplifier, the piezoelectric amplification circuit and the servo motor driver.

10. A method of vibration measurement and control of an apertured flexible sheet as claimed in any one of claims 1 to 9, comprising:

the first step is as follows: vibration information of the flexible plate is detected by using a piezoelectric ceramic sensor and an acceleration sensor;

secondly, the signal information obtained in the first step is transmitted into a motion control card through a terminal board, the motion information is transmitted into a servo motor of a computer through the motion control card, an encoder of the servo motor can transmit the motion information into the motion control card through the terminal board, the motion information is transmitted into the computer through the motion control card, the computer carries out corresponding control algorithm according to the transmitted signal to output control quantity, the control quantity is transmitted to the terminal board through the motion control card, then the terminal board transmits the signals to a servo motor driver, and further the rotation of the servo motor and the rotation of a reducer are controlled, so that the purpose of controlling the motion of the perforated flexible board is achieved;

the third step: the computer carries out corresponding control algorithm according to the transmitted signals to output control quantity, the control quantity is transmitted to the terminal board through the motion control card, then the terminal board transmits the signals to the piezoelectric amplifying circuit to send out large signals, and the large signals are output to the piezoelectric actuator and are used for inhibiting the vibration of the perforated flexible plate; meanwhile, the terminal board transmits the signals to the servo motor driver, so that the servo motor and the servo motor are controlled to rotate, the reducer is driven to rotate, and the purpose of controlling the movement of the perforated flexible board is achieved.

Technical Field

The invention relates to the field of flexible plate vibration control, in particular to a double-flexible-joint-driven perforated flexible plate vibration measurement and control device and method.

Background

Since the industrial revolution, automated manufacturing techniques have been developed more and more by humans. Automatic manufacturing is not possible with robots, and these plates are heavy and heavy, and are considered to be rigid link robots. However, in recent years, weight reduction of machine plates has become important in order to improve work efficiency, reduce energy consumption, or perform precision manufacturing. Reducing the cross-sectional area of the mechanical plate or adopting a hollow structure is a method for designing light weight. When the mechanical plate is light, the mechanical plate has the characteristic of flexibility, and can face the problems of vibration and the like which are not beneficial to production and manufacturing during movement.

The servo motor has the advantages of quick response, high motion precision and easy driving, and can be used for driving the motion of the flexible plate and inhibiting the vibration of the flexible plate.

The piezoelectric actuator is simple to mount, light in weight, and small in size, and can be used to suppress vibration of the flexible board.

Disclosure of Invention

In order to overcome the defects and shortcomings of the prior art, the invention provides a double-flexible joint driven perforated flexible plate vibration measurement and control device, which can more comprehensively research the vibration characteristics of perforated flexible plates driven by two flexible joints.

The invention provides a vibration measurement and control method of a perforated flexible plate driven by double flexible joints.

The invention adopts the following technical scheme:

a perforated flexible plate vibration measurement and control device driven by double flexible joints comprises a flexible plate body part and a control part.

The flexible plate body part comprises a perforated flexible plate, the upper end and the lower end of the perforated flexible plate are respectively connected with the transmission part through flexible joints, and a piezoelectric ceramic sensor, a piezoelectric actuator and an acceleration sensor are adhered to the perforated flexible plate;

and the control part is used for detecting vibration signals of the perforated flexible plate according to the piezoelectric ceramic sensor and the acceleration sensor to obtain control quantity, and respectively outputting the piezoelectric generator and the transmission part for inhibiting the vibration of the perforated flexible plate.

Further, flexible joint has two, and the structure is the same, including sleeve, first tapered roller bearing, pivot, second tapered roller bearing, end cover, shaft coupling and two torsional springs, the concrete connection is: the outer ring of the first tapered roller bearing is arranged on a boss of the inner wall of the sleeve, the outer ring of the second tapered roller bearing is arranged on a boss of the end cover, inner rings of the first tapered roller bearing and the second tapered roller bearing are arranged on a shaft shoulder of the rotating shaft, the end cover is fixed with the sleeve, one ends of the two torsion springs are embedded into grooves of the inner wall of the sleeve, the other ends of the two torsion springs are embedded into grooves of the rotating shaft, and the rotating directions of the two torsion springs are opposite.

Furthermore, the transmission part comprises a servo motor, a speed reducer and a servo motor driver, the input end of the speed reducer is connected with the servo motor, the output end of the speed reducer is connected with the flexible joint, and the servo motor driver receives signals of the control part and drives the servo motor to rotate.

Furthermore, the trompil flexible sheet is opened there are three quad slit, sets up on trompil flexible sheet width direction's central line, and three quad slit interval distances equal.

Furthermore, the piezoelectric ceramic sensors are respectively arranged above and below the transverse central line of the flexible board, are close to the fixed end, have an attitude angle of 0 degree and are stuck on one side;

the acceleration sensor is provided with one sensor which is arranged at the free end of the perforated flexible plate.

Furthermore, the inner wall of the sleeve is provided with three first grooves and three second grooves which have different sizes and are circumferentially distributed at intervals of 120 degrees;

the second grooves are arranged on the inner wall at intervals of 120 degrees and are distributed circumferentially, and the adjacent first grooves and the second grooves are arranged on the inner wall at intervals of 60 degrees.

Furthermore, the rotating shaft is provided with a first groove and a second groove which have two different sizes, and the two grooves are distributed at an interval of 180 degrees.

Further, the direction of rotation of two torsional spring installation is opposite, specifically is:

the two torsion springs are positioned between the two tapered roller bearings, wherein the torsion direction of the torsion spring close to one side of the first tapered roller bearing is anticlockwise, and the torsion direction of the torsion spring close to one side of the second tapered roller bearing is clockwise.

Further, the control part comprises a computer, a motion control card, a terminal board, a charge amplifier and a piezoelectric amplification circuit, wherein the terminal board is connected with the motion control card, the motion control card is connected with the computer, and the terminal board is respectively connected with the charge amplifier, the piezoelectric amplification circuit and the servo motor driver.

A method for measuring and controlling vibration of an open-pore flexible plate comprises the following steps:

the first step is as follows: vibration information of the flexible plate is detected by using a piezoelectric ceramic sensor and an acceleration sensor;

secondly, the signal information obtained in the first step is transmitted into a motion control card through a terminal board, the motion information is transmitted into a servo motor of a computer through the motion control card, an encoder of the servo motor can transmit the motion information into the motion control card through the terminal board, the motion information is transmitted into the computer through the motion control card, the computer carries out corresponding control algorithm according to the transmitted signal to output control quantity, the control quantity is transmitted to the terminal board through the motion control card, then the terminal board transmits the signals to a servo motor driver, and further the rotation of the servo motor and the rotation of a reducer are controlled, so that the purpose of controlling the motion of the perforated flexible board is achieved;

the third step: the computer carries out corresponding control algorithm according to the transmitted signals to output control quantity, the control quantity is transmitted to the terminal board through the motion control card, then the terminal board transmits the signals to the piezoelectric amplifying circuit to send out large signals, and the large signals are output to the piezoelectric actuator and are used for inhibiting the vibration of the perforated flexible plate; meanwhile, the terminal board transmits the signals to the servo motor driver, so that the servo motor and the servo motor are controlled to rotate, the reducer is driven to rotate, and the purpose of controlling the movement of the perforated flexible board is achieved.

The invention has the beneficial effects that:

(1) the invention adopts two flexible joints, the flexible joints are formed by assembling specifically designed sleeves, tapered roller bearings, rotating shafts, torsional springs, tapered roller bearings, end covers and couplings, the flexible joints adopt two torsional springs which are pre-tightened with each other, and the flexible joints have flexible effect in both positive and negative rotation;

(2) the sleeve is provided with two hole grooves which are different in geometric dimension and distributed in a circumferential mode, flexible joints with different spring pretightening forces can be obtained together with the rotating shaft and the torsion spring, and the influence of the different torsion spring pretightening forces on the vibration modes of the perforated flexible plate can be comprehensively researched.

(3) The holes in the perforated flexible plate can be different in size, so that the vibration characteristics of the perforated flexible plate driven by the two flexible joints can be more comprehensively researched;

(4) the vibration control method of the double servo motors and the piezoelectric actuator is adopted, so that the vibration of the perforated flexible plate can be more comprehensively inhibited;

(5) the invention adopts various types of sensors to acquire vibration signals of the perforated flexible plate so as to reduce detection errors.

Drawings

FIG. 1 is a schematic diagram of the general structure of the present invention;

FIG. 2 is a front view of FIG. 1;

FIG. 3 is a left side view of FIG. 1;

FIG. 4 is a top view of FIG. 1;

FIG. 5 is a schematic structural view of the flexible joint of FIG. 1;

FIG. 6 is a schematic view of the sleeve of FIG. 1;

FIG. 7 is a schematic view of the torsion spring of FIG. 5;

FIG. 8 is a schematic view of the structure of the rotating shaft in FIG. 5;

fig. 9 is a vibration control flowchart of the present invention.

Detailed Description

The present invention will be described in further detail with reference to examples and drawings, but the present invention is not limited to these examples.

Examples

As shown in fig. 1-4, a dual-flexible joint driven perforated flexible plate vibration measurement and control device includes a flexible plate body portion and a control portion.

The flexible plate body part comprises a perforated flexible plate 8, flexible plate clamping seats 6 and 27 and small clamping plates 7 and 28, the upper end and the lower end of the perforated flexible plate are connected with the flexible plate clamping seats 6 and 27 through the small clamping plates 7 and 28 respectively, the flexible plate clamping seats 6 and 27 are connected with two flexible joints respectively, the two flexible joints are connected with two transmission parts respectively, the transmission parts are fixed on a support 3, and the support is fixed on an experiment table 1.

The two transmission parts comprise speed reducer connecting tables 2 and 31, servo motors 4 and 33, speed reducers 5 and 32 and servo motor drivers 12. Reduction gear 5 is fixed on reduction gear connection platform 2, and 5 bottom interconnect of servo motor 4 and reduction gear, the axle interconnect of reduction gear connection platform and 4 upper ends of reduction gear, flexible joint and reduction gear connection platform 5 pass through cylindric lock interconnect.

As shown in fig. 5, further, the two flexible joints have the same structure, and each flexible joint at the lower end includes a sleeve 18, a first tapered roller bearing 19, a rotating shaft 20, two torsion springs 21 and 22, a second tapered roller bearing 23, an end cap 24, a screw 25, and a coupling 26.

The outer ring of the first tapered roller bearing 19 is positioned and mounted through a boss on the inner wall of the sleeve 18, the outer ring of the second tapered roller bearing 23 is positioned and mounted through a boss of the sleeve end cover 24, the inner rings of the first tapered roller bearing 19 and the second tapered roller bearing 23 are positioned and fixed through a shaft shoulder of the rotating shaft 20, and the end cover 24 and the sleeve 18 are fixed through a screw 25. By this means, the radial positions of the rotating shaft 20, the sleeve 18, the end cover 24, the first tapered roller bearing 19, and the second tapered roller bearing 23 are determined from each other. One end of the torsion spring 21 and one end of the torsion spring 22 are embedded into the groove on the inner wall of the sleeve 18, the other end of the torsion spring is embedded into the groove of the rotating shaft 20, and the installation directions of the two torsion springs are opposite. The sleeve is interconnected with a reducer connection station 5.

The torsion spring 21 is 35mm away from the inner bottom of the sleeve 18, the torsion spring 22 is 45mm away from the inner bottom of the sleeve 18, and the torsion springs 21 and 22 are horizontally arranged.

The flexible joint structure at the upper end is the same as at the lower end, and only the end cap 29 and sleeve 30 are shown in fig. 1.

As shown in fig. 7, the two torsion springs are installed in opposite rotation directions, specifically:

the installation position is located between the first tapered roller bearing and the second tapered roller bearing, wherein the rotation direction of the torsion spring 21 on the side close to the first tapered roller bearing is counterclockwise, and the rotation direction of the torsion spring 22 on the side close to the second tapered roller bearing is clockwise. The torsion springs 21 and 22 are mounted after being pre-tightened.

As shown in fig. 6, in order to adjust the pre-tightening force of the torsion spring, the inner wall of the sleeve hole 18 is provided with a first groove and a second groove with two different sizes for arranging two torsion springs, the first groove has a geometric size of 25mm × 7mm × 2.6mm, and the second groove has a geometric size of 35mm × 7mm × 2.6 mm. The first groove bottom is 45mm away from the inner bottom, and the second groove bottom is 35mm away from the inner bottom.

Three first grooves are arranged on the inner wall of the first groove, and are circumferentially distributed at intervals of 120 degrees. The second grooves are three on the inner wall and are distributed circumferentially at intervals of 120 degrees. The first and second grooves are spaced 60 ° apart on the inner wall.

As shown in fig. 8, the shaft 20 has two slots, one slot is 15mm × 2mm × 2.6mm in geometric dimension, and one slot is 5mm × 2mm × 2.6mm in geometric dimension, and the two slots are spaced by 180 °. The top of the sleeve is provided with six threaded holes M6.

In order to measure and suppress vibration of the perforated flexible plate, a piezoelectric ceramic sensor, an acceleration sensor, and a piezoelectric actuator are provided on the perforated flexible plate.

The trompil flexplate in this embodiment sets up three quad slit, and three quad slit evenly sets up on the horizontal midline of trompil flexplate. One side connected with the flexible joint is called a fixed end, and the other side is a free end.

The piezoelectric ceramic sensor 10 is installed at the position of the central line of the beam in the width direction and 100mm away from the fixed end of the perforated flexible plate, and is adhered on one side of the perforated flexible plate according to the posture angle of 0 degree, and 1 piece and 2 pieces are respectively installed on the upper part and the lower part of the perforated flexible plate.

The total number of the acceleration sensors 11 at the positions of the central line in the beam width direction and 80mm away from the free end of the perforated flexible plate is 1.

The piezoelectric actuators 9 are eight pieces, are arranged above and below the transverse center line of the perforated flexible board, are respectively adhered to the two pieces, and are mounted on two sides.

The control part comprises a servo motor motion control part and a piezoelectric actuation vibration control part.

In the servo motor motion control part, a servo motor 33 and a servo motor 4 are connected with a terminal board 15 through a servo motor driver 12, the terminal board 15 is connected with a motion control card 16, encoders of the servo motor 33 and the servo motor 4 can transmit motion information of the servo motor 4 into the motion control card 16 through the terminal board 15 and transmit the motion information into a computer 17 through the motion control card 16, the computer 17 carries out corresponding control algorithm according to transmitted signals to output control quantity, the control quantity is transmitted to the terminal board 15 through the motion control card 16, then the terminal board 15 transmits the signals to the servo motor driver 12, the rotation of the servo motor 33 and the servo motor 4 is controlled, and a reducer is driven to rotate, so that the purpose of controlling the motion of the perforated flexible board 8 is achieved.

For the piezoelectric actuating vibration control part, the piezoelectric ceramic sensor 10 and the acceleration sensor 11 input the detected information into the charge amplifier 14, further input into the terminal board 15, and then transmit into the motion control card 16, and transmit into the computer 17 through the motion control card 16, the computer 17 performs the corresponding control algorithm according to the transmitted signal to output the control quantity, and transmits to the terminal board 15 through the motion control card 16, and then the terminal board 15 transmits the signals to the piezoelectric amplifying circuit 13 to amplify the signals, and outputs to the piezoelectric actuator 9, for suppressing the vibration of the perforated flexible board 8.

As shown in fig. 9, the control process of the present invention is as follows:

the first step is as follows: detecting vibration information of the flexible arm by using a piezoelectric ceramic sensor and an acceleration sensor;

and secondly, the signal information obtained in the first step is transmitted into the motion control card through the terminal board and is transmitted into the computer through the motion control card, and the servo motor and an encoder of the servo motor can transmit the motion information of the servo motor into the motion control card through the terminal board and transmit the motion information into the computer through the motion control card. The computer outputs control quantity according to the corresponding control algorithm according to the transmitted signals, the control quantity is transmitted to the terminal board through the motion control card, then the terminal board transmits the signals to the servo motor driver, and further the rotation of the servo motor and the servo motor is controlled, and the rotation of the reducer is arranged, so that the purpose of controlling the motion of the perforated flexible board is achieved.

The third step: the computer carries out corresponding control algorithm according to the transmitted signals to output control quantity, the control quantity is transmitted to the terminal board through the motion control card, then the terminal board transmits the signals to the piezoelectric amplifying circuit to amplify the signals, and the signals are output to the piezoelectric actuator to inhibit the vibration of the perforated flexible plate. Meanwhile, the terminal board transmits the signals to the servo motor driver, so that the servo motor and the servo motor are controlled to rotate, the reducer is driven to rotate, and the purpose of controlling the movement of the perforated flexible board is achieved.

The fourth step: and obtaining a plurality of experimental results through changing control parameters and repeated tests to obtain the vibration characteristics and the control effect of the perforated flexible plate vibration measurement and control device and method driven by the double flexible joints.

The dashed lines in fig. 1 indicate the flow of electrical signals between the various components.

In this embodiment, the material of the perforated flexible board is epoxy resin, and the geometric dimension thereof is 1200mm × 600mm × 2mm, and the perforated area is 200mm × 200mm × 2 mm. The elastic modulus is 34.64Gpa, and the density is 1840kg/m3

The piezoelectric ceramic sensor is made of piezoelectric ceramic, the size of the piezoelectric ceramic sensor is 40mm multiplied by 20mm multiplied by 1mm, the piezoelectric ceramic sensor is pasted at the central line position in the width direction of the beam and at the position 100mm away from the fixed end of the perforated flexible plate, the piezoelectric ceramic sensor is pasted on one side of the perforated flexible plate according to the attitude angle of 0 degree, 1 piece of piezoelectric ceramic sensor is respectively installed on the upper part and the lower part of the perforated flexible plate, the number of the perforated flexible plate is 2, and the elastic modulus of the piezoelectric ceramic sensor is Ep=63Gpa,d31=166pm/V。

The piezoelectric actuators are arranged at the fixed end 80mm away from the center of the two sides of the flexible arm, 2 pieces of piezoelectric actuators are respectively arranged on the two sides of the upper arm and the lower arm of the flexible plate according to the attitude angle of 0 degree, and the piezoelectric actuators are arranged on the two sides of the upper arm and the lower arm of the flexible plate in a double-sided manner and are totally 8 pieces.

The laboratory bench is formed through the angle bar equipment by four kinds of length for 600mm, 980mm, 680mm and 1500 mm's aluminium alloy plate, and the laboratory bench terminal surface is a 800mm 600mm 8 mm's of multiplied by aluminium alloy plate, and is fixed through screw and aluminium alloy.

The acceleration sensor is a capacitance type sensor with model 8310B2 manufactured by Kistler company, the nominal sensitivity of the capacitance type sensor is 1000mV/g, and the measurement frequency range is 0-250 Hz.

The servo motor is an alternating current servo motor of Mitsubishi motor company with the model number of HC-KFS43, and the power and the maximum rotating speed of the alternating current servo motor are 400w and 3000 r/min; the servo motor driver is a servo driver of Mitsubishi company, the model of which is MR-J2S-40A; the reducer is a Nippon Lianbao VRSF-25C-14BB14 reducer, the reduction ratio is 1:25, and the backlash is 15 degrees.

The tapered roller bearing is HR320/22XJ of NSK company, and has an outer diameter of 44mm, an inner diameter of 22mm and a width of 15 mm.

The charge amplifier is a YE5850 type charge amplifier of Jiangsu Union energy electronics, Inc.; the piezoelectric amplifying circuit adopts a piezoelectric amplifier with the model of APEX-PA241DW, the amplification factor can reach 52 times, and the piezoelectric amplifying circuit can amplify-5V- +5V to-260V- + 260V.

The motion control card is a GUC-800-TPV-M23-L2-F8G type control card of Gao Gu company, and 8 paths of controllable shaft numbers can provide analog quantity input and output in the range of-10V to + 10V; the CPU model of the selected computer is Pentium G6202.6GHz, the memory is 4G, and a PCI interface is arranged in the mainboard, and a motion control card can be installed.

The above embodiments are preferred embodiments of the present invention, but the present invention is not limited to the above embodiments, and any other changes, modifications, substitutions, combinations, and simplifications which do not depart from the spirit and principle of the present invention should be construed as equivalents thereof, and all such changes, modifications, substitutions, combinations, and simplifications are intended to be included in the scope of the present invention.

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