阅读说明：本技术 一种半导体检测的装置及方法 (Semiconductor detection device and method ) 是由 罗建华 师晓科 黄先学 刘佳华 王乐园 龙志斌 于 2021-09-03 设计创作，主要内容包括：本发明公开了一种半导体检测的装置,属于半导体检测设备的技术领域。包括机台,所述机台上设有上下料模块、定点输送模块以及检测模块,所述上下料模块位于定点输送模块的其中一侧,所述定点输送模块的进料端和出料端位于同一侧,所述上下料模块的出料端与定点输送模块的进料端以及出料端对接,所述上下料模块用于将料片输送到定点输送模块内并接收定点输送模块传回的料片,所述检测模块的检测端位于定点输送模块的上方。本申请方案中料片检测前后均位于同一料槽,减少料片位置的改变,继而可以减少料片在转移过程中出现信息丢失或者信息不匹配的情况,减少返工情况,提高料片的检测效率。(The invention discloses a semiconductor detection device, and belongs to the technical field of semiconductor detection equipment. The automatic feeding and discharging device comprises a machine table, be equipped with last unloading module, fixed point conveying module and detection module on the machine table, last unloading module is located fixed point conveying module's one of them side, fixed point conveying module's feed end and discharge end are located same one side, the discharge end of last unloading module and fixed point conveying module's feed end and discharge end butt joint, go up the unloading module and be used for carrying the tablet to fixed point conveying module in and receive the tablet that fixed point conveying module returned, detection module's sense terminal is located fixed point conveying module's top. All be located same silo around the tablet detects in this application scheme, reduce the change of tablet position, can reduce the tablet then and the information loss or the unmatched condition of information appear in the transfer process, reduce the condition of doing over again, improve the detection efficiency of tablet.)

1. An apparatus for semiconductor inspection, comprising: including board (1), be equipped with on board (1) and go up unloading module (2), fixed point transport module (3) and detection module (4), go up unloading module (2) and be located one of them side of fixed point transport module (3), the fixed point is carried the feed end and the discharge end of module (3) and is located same one side, the discharge end of going up unloading module (2) and the feed end and the discharge end butt joint of fixed point transport module (3), go up unloading module (2) and be used for carrying the tablet to carry fixed point transport module (3) in and receive the tablet that fixed point transport module (3) passed back, the sense terminal of detection module (4) is located the top of fixed point transport module (3).

2. A semiconductor testing apparatus according to claim 1, wherein: the feeding and discharging module (2) comprises a material rack (21) and a material box (22) used for loading material pieces, the material rack (21) is fixed on the machine table (1) and located on one side of the fixed-point conveying module (3), two ends of the material box (22) are opened, a material groove (221) used for loading the material pieces is arranged in the material box (22), a lifting mechanism (23) used for lifting the material box (22) and a material pushing mechanism (25) used for conveying the material pieces to be tested in the material box (22) into the fixed-point conveying module (3) are further arranged on the material rack (21).

3. A semiconductor testing apparatus according to claim 2, wherein: elevating system (23) are including crane (231) and lift drive assembly (232), vertical sliding connection in work or material rest (21) of crane (231), crane (231) are used for bearing magazine (22) and adjust the relative height of the business turn over material mouth of magazine (22) and fixed point transport module (3), lift drive assembly (232) are installed on work or material rest (21), the output and the crane (231) transmission of lift drive assembly (232) are connected.

4. A semiconductor testing apparatus according to claim 3, wherein: the material rack (21) is provided with a first clamping assembly and a second clamping assembly for locking the material box (22), the first clamping assembly comprises two first clamping plates (2411) which are arranged on the material rack (21) and are vertically arranged, one of the first clamping plates (2411) is horizontally connected with the material rack (21) in a sliding manner, the material rack (21) is provided with a first clamping driving assembly (2413) for driving the first clamping plate (2411) to move, two sides of the two first clamping plates (2411) which are far away from each other are provided with flanges (2412), and one side of the two flanges (2412) which are close to each other can be abutted against the side wall of the material box (22) along the opening direction;

the second clamping assembly comprises a clamping frame (2421) which is connected to the material frame (21) in a sliding mode, a second clamping driving assembly (2423) which is used for driving the clamping frame (2421) to move is arranged on the material frame (21), two second clamping plates (2422) which are vertically arranged are fixed on the clamping frame (2421), the moving direction of the second clamping plates (2422) is perpendicular to the moving direction of the first clamping plates (2411), and one sides, close to each other, of the first clamping plates (2411) and the second clamping plates (2422) can abut against two vertical surfaces of the material box (22).

5. The apparatus for semiconductor inspection according to claim 4, wherein: work or material rest (21) still are equipped with unloading module (261), the one end of unloading module (261) and the free end butt joint of crane (231), be equipped with in unloading module (261) and draw material mechanism, draw material mechanism including drawing material pole (262) and drawing material drive assembly, draw material pole (262) and unloading module (261) sliding connection, the lifting direction of the slip direction perpendicular to elevating system (23) of drawing material pole (262), draw material pole (262) can be towards one side butt of elevating system (23) with magazine (22), draw material drive assembly to install in unloading module (261), draw material drive assembly's output and draw material pole (262) transmission to be connected.

6. The apparatus for semiconductor inspection according to claim 5, wherein: the end part of the first clamping plate (2411) in sliding connection with the material rack (21) is provided with a third clamping driving assembly (2431), the output end of the third clamping driving assembly (2431) is provided with a third clamping plate (2432), and the third clamping plate (2432) can be abutted against the side edge of the material box (22) along the opening direction.

7. A semiconductor testing apparatus according to claim 1, wherein: the fixed-point conveying module (3) comprises a base (31), a sliding frame (32), a sliding rail (33) and a conveying mechanism (34), the base (31) is arranged on the machine table (1), the sliding frame (32) is horizontally connected on the base (31) in a sliding manner, the two sliding material racks (32) are arranged, the moving directions of the two sliding material racks (32) are opposite, the base (31) is provided with a material distance adjusting component (321) for driving the two sliding material racks (32), the material sliding rails (33) are horizontally arranged on the top side of the material sliding frame (32), the two material sliding rails (33) are parallel, one sides of the two material sliding rails (33) close to each other are provided with sliding grooves (311) through which material feeding pieces penetrate, the material conveying mechanism is characterized in that the chute (311) is in butt joint with the discharge end of the feeding and discharging module (2), and the conveying mechanism (34) is arranged on the sliding frame (32) and used for driving the material sheet to move along the chute (311).

8. A semiconductor testing apparatus according to claim 7, wherein: the conveying mechanism (34) comprises a material clamping device (341) for clamping a material sheet and a transverse moving driving assembly (342) for driving the material clamping device (341) to move along the sliding chute (311), the material clamping device (341) comprises a first clamping jaw (3411), a second clamping jaw (3412) and a clamping jaw driving assembly (3413), fixed ends of the first clamping jaw (3411) and the second clamping jaw (3412) are hinged, a clamping end between the first clamping jaw (3411) and the second clamping jaw (3412) is arranged between the two sliding rails (33), the clamping jaw driving assembly (3413) is used for driving the first clamping jaw (3411) and the second clamping jaw (3412) to close or separate, and the first clamping jaw (3411) and the second clamping jaw (3412) can clamp the upper side and the lower side of the material sheet when being closed.

9. A semiconductor testing apparatus according to claim 7, wherein: one side of the sliding frame (32) close to the feeding end of the sliding rail (33) is provided with a detection switch (35), and the detection switch (35) is used for detecting the feeding condition of the material sheet to be detected.

10. A method for semiconductor inspection, using a semiconductor inspection apparatus according to any one of claims 1 to 9, comprising the steps of:

s1, a worker places the magazine (22) filled with the material sheets to be tested in the feeding and discharging module (2);

s2, the lifting mechanism (23) drives the material box (22) to lift, so that the trough (221) in the material box (22) is in butt joint with the sliding groove (311) of the sliding rail (33);

s3, detecting whether the material piece to be detected exists in a material groove (221) in the material box (22);

s31, pushing the pushing end of the pushing mechanism (25) to push along the direction of the material groove (221), if a material sheet to be detected exists in the material groove (221), the material sheet to be detected is pushed into the sliding groove (311), the detection switch (35) detects the material sheet to be detected, the fixed point conveying module (3) transfers the material sheet to be detected to the detection end of the detection module (4), and after the detection of the detection module (4) is finished, the fixed point conveying module (3) conveys the detected material sheet back to the same material groove (221) in the material box (22) to finish the detection of a single material sheet;

s32, pushing the pushing end of the pushing mechanism (25) along the direction of the trough (221), if no material piece to be detected exists in the trough (221), pushing the material piece to be detected into the chute (311) at the moment, jumping to the step S2 if no material piece to be detected is detected by the detection switch (35);

and S4, repeating the steps S2-S3, and detecting the material sheets to be detected in batches.

Technical Field

The invention relates to the field of semiconductor detection equipment, in particular to a semiconductor detection device and method.

Background

With the development of technology, the importance of semiconductors in various industries is self-evident, and according to the "tenfold rule" in electronic system fault detection, if a fault in a semiconductor is not discovered during testing, the cost of discovering a fault at the circuit board level is ten times that of the semiconductor level. Therefore, detection plays an important role in the semiconductor industry.

In the related art, the detection mode of the semiconductor detection device is generally left-in right-out or right-in left-out, namely, the feeding and discharging devices are arranged on two sides of the detection device, a material sheet to be detected is fed into the detection device from one side of the detection device by using the feeding and discharging devices, and after the detection of the detection device is completed, the material sheet is discharged from the other end of the detection device so as to realize the detection of the semiconductor material sheet.

In view of the above-mentioned related technologies, the inventor believes that, generally, when a magazine carries all information of each layer of loaded tablets, and a left-in right-out or right-in left-out detection mode is adopted, the magazine changes, so that the problem of inconvenient matching of tablet information exists, and meanwhile, the probability of tablet information loss or information mismatch is increased by tablet transfer.

Disclosure of Invention

In order to help solve the problem that information of material sheets is easily lost or unmatched during the transfer process, the application provides a device and a method for detecting semiconductors.

The device and the method for detecting the semiconductor adopt the following technical scheme:

the first aspect, a device that semiconductor detected, includes the board, be equipped with last unloading module, fixed point transport module and detection module on the board, go up the unloading module and be located fixed point transport module's one of them side, fixed point transport module's feed end and discharge end are located same one side, the discharge end of going up the unloading module and fixed point transport module's feed end and discharge end butt joint, go up the unloading module and be used for carrying the tablet to fixed point transport module in and receive the tablet that fixed point transport module returned, detection module's sense terminal is located fixed point transport module's top.

Through adopting above-mentioned technical scheme, go up the unloading module and will await measuring tablet propelling movement to fixed point conveying module in, carry the tablet that awaits measuring to detection module's sense terminal by fixed point conveying module, detection module detects the tablet that awaits measuring, the back that finishes of detection, fixed point conveying module will survey the tablet and push back and go up the unloading module, make the tablet can get back to initial position, reduce the change of tablet position, then can reduce the tablet and appear information loss or the unmatched condition of information in the transfer process, unloading is gone up to the homonymy simultaneously, can reduce the quantity of unloading module, reach the purpose of practicing thrift the cost.

Optionally, the feeding and discharging module comprises a material rack and a material box for loading the material sheets, the material rack is fixed on the machine table and located on one side of the fixed-point conveying module, two ends of the material box are open, a material groove for loading the material sheets is arranged in the material box, and the material rack is further provided with a lifting mechanism for lifting the material box and a material pushing mechanism for conveying the material sheets to be tested in the material box into the fixed-point conveying module.

By adopting the technical scheme, a plurality of pieces to be measured are loaded in the trough, the lifting mechanism drives the material box to lift, the trough is aligned with the feeding end of the fixed-point conveying module, and the pieces are conveyed into the fixed-point conveying module by using the material pushing mechanism after being aligned, so that the pieces are transferred. The lifting mechanism is linked with the pushing mechanism and the fixed-point conveying module, batch transfer of the material sheets can be achieved, automatic feeding and discharging of the material sheets are achieved, and batch detection of the material sheets is guaranteed.

Optionally, the lifting mechanism comprises a lifting frame and a lifting driving assembly, the lifting frame is vertically connected to the material frame in a sliding mode, the lifting frame is used for supporting the material box and adjusting the relative height of the material box and the feeding and discharging port of the fixed-point conveying module, the lifting driving assembly is installed on the material frame, and the output end of the lifting driving assembly is in transmission connection with the lifting frame.

By adopting the technical scheme, the height of the material box can be automatically adjusted by utilizing the lifting mechanism, so that the material box can be aligned with the feeding and discharging end of the fixed-point conveying module, and the accurate feeding and the accurate discharging of the subsequent material pieces are facilitated. This scheme simple structure, the transmission precision is high, can effectively guarantee the stable unloading of going up of tablet.

Optionally, the material rack is provided with a first clamping assembly and a second clamping assembly for locking the material box, the first clamping assembly comprises two first clamping plates which are arranged on the material rack and are vertically arranged, one of the first clamping plates is horizontally and slidably connected with the material rack, the material rack is provided with a first clamping driving assembly for driving the first clamping plate to move, two sides of the two first clamping plates which are far away from each other are provided with convex edges, and one side of the two convex edges which is close to each other can be abutted against the side wall of the material box along the opening direction; the second clamping assembly comprises a clamping frame which is slidably connected to the material frame, a second clamping driving assembly which is used for driving the clamping frame to move is arranged on the material frame, two second clamping plates which are vertically arranged are fixed on the clamping frame, the moving direction of the second clamping plates is perpendicular to that of the first clamping plates, and one side, close to each other, of each first clamping plate and one side, close to each other, of each second clamping plate can be abutted to two vertical surfaces of the material box.

Through adopting above-mentioned technical scheme, utilize two chimbs and first grip block and second grip block to carry on spacingly around the magazine, make the magazine can remain stable on the crane, reduce pushing equipment and promote the removal of tablet in-process magazine, improve the stability of material loading on the magazine.

Optionally, the material rack is further provided with a discharging module, one end of the discharging module is in butt joint with the free end of the lifting frame, a pulling mechanism is arranged in the discharging module and comprises a pulling rod and a pulling driving assembly, the pulling rod is in sliding connection with the discharging module, the sliding direction of the pulling rod is perpendicular to the lifting direction of the lifting mechanism, the pulling rod can be abutted against one side of the material box facing the lifting mechanism, the pulling driving assembly is installed in the discharging module, and the output end of the pulling driving assembly is in transmission connection with the pulling rod.

By adopting the technical scheme, after the material sheets in the material box are completely detected, the lifting mechanism drives the material box to descend, the free end of the lifting frame is in butt joint with the discharging module, the material pulling driving assembly drives the material pulling rod to move towards the direction far away from the lifting frame, and the material pulling rod pushes the material box into the discharging module to realize automatic discharging of the material box. This scheme can reduce the operation of artifical unloading, further improves the efficiency of magazine unloading.

Optionally, the end of the first clamping plate slidably connected to the rack is provided with a third clamping driving assembly, the output end of the third clamping driving assembly is provided with a third clamping plate, and the third clamping plate can abut against the side of the magazine in the opening direction.

Through adopting above-mentioned technical scheme, can place a plurality of magazines on the crane, a plurality of magazines are vertical to be arranged, after the tablet that is arranged in the lowermost magazine is accomplished by whole detections, the third presss from both sides the drive assembly control third grip block of getting, third grip block presss from both sides the magazine of fastening location in lowermost magazine top, then pushing equipment can pull out the lowermost magazine, thereby realize the automatic unloading of single magazine, the quantity that can place the magazine has further been enlarged to this scheme, can effectively reduce manual operation, and the production efficiency is improved.

Optionally, the fixed-point conveying module includes a base, two sliding racks, two sliding rails and a conveying mechanism, the base is installed on the machine table, the sliding racks are horizontally slidably connected to the base, the two sliding racks are arranged in the opposite moving directions of the two sliding racks, a material distance adjusting assembly is arranged on the base to drive the two sliding racks, the two sliding rails are horizontally installed on the top side of the sliding racks and parallel to each other, a chute through which the material feeding piece penetrates is formed in one side, close to each other, of each sliding rail, the chute is in butt joint with the discharge end of the material feeding and discharging module, and the conveying mechanism is arranged on the sliding racks and used for driving the material feeding piece to move along the chute.

Through adopting above-mentioned technical scheme, the tablet is carried to in the spout and slides in the spout, can improve the phenomenon that reduces tablet skew or slope, improves the stability of tablet in the transfer process, guarantees follow-up effective detection to the tablet. And the distance between the two chutes can be adjusted according to the size of the material sheet, so that the application range of the material sheet is further improved.

Optionally, conveying mechanism is including the clamp glassware that is used for the centre gripping tablet and being used for the drive the sideslip drive assembly that the clamp glassware removed along the spout, the clamp glassware includes first clamping jaw, second clamping jaw and clamping jaw drive assembly, the fixed end of first clamping jaw and second clamping jaw is articulated, the exposed core between first clamping jaw and the second clamping jaw is established between two smooth material rails, clamping jaw drive assembly is used for driving first clamping jaw and second clamping jaw to fold or part, can the upper and lower both sides of centre gripping tablet when first clamping jaw and second clamping jaw fold.

By adopting the technical scheme, the material sheets are conveyed into the sliding groove, the first clamping jaw and the second clamping jaw are folded to clamp the material sheets, the material clamping device is driven by the transverse moving driving assembly to move, the material sheets can slide along the sliding material rail, and the material sheet position transfer is realized. The material clamping device has rapid action and simple control, can improve the accuracy of the material sheet in the transfer process and ensure the effective control of the position of the material sheet.

Optionally, a detection switch is arranged on one side of the sliding rack close to the feeding end of the sliding rail, and the detection switch is used for detecting the feeding condition of the material sheet to be detected.

Through adopting above-mentioned technical scheme, utilize the detection switch to judge the feeding condition of tablet that awaits measuring to improve the precision to tablet control, ensure that follow-up can effectively carry and detect the tablet.

In a second aspect, a method of semiconductor inspection includes the steps of:

s1, placing the material box filled with the material sheets to be tested in the feeding and discharging module by a worker; s2, the lifting mechanism drives the material box to lift, so that the material groove in the material box is in butt joint with the sliding groove of the sliding material rail; s3, detecting whether the material sheet to be detected exists in a material groove in the material box; s31, pushing the material pushing end of the material pushing mechanism along the direction of the material groove, if a material sheet to be detected exists in the material groove, pushing the material sheet to be detected into the chute, detecting the material sheet to be detected by the detection switch, transferring the material sheet to be detected to the detection end of the detection module by the fixed-point conveying module, and after the detection of the detection module is finished, conveying the detected material sheet to the same material groove in the material returning box by the fixed-point conveying module to finish the detection of a single material sheet; s32, pushing the pushing end of the pushing mechanism along the trough direction, if the material trough is not provided with the material sheet to be tested, pushing the material sheet to be tested into the chute, and jumping to the step S2 if the detection switch does not detect the material sheet to be tested; and S4, repeating the steps S2-S3, and detecting the material sheets to be detected in batches.

Through adopting above-mentioned technical scheme, compare with the mode of the check out test set one side feeding in among the correlation technique, the opposite side ejection of compact, this detection method makes tablet can the homonymy business turn over, promptly the tablet is followed the inslot of magazine in the back of being propelling movement, the tablet can be carried back to same silo after being detected to finish, the condition that information lost or unmatched appears when can effectively reducing the tablet and transferred other magazines, improve the degree of matching of tablet and magazine, reduce the condition of follow-up doing over again, improve the detection efficiency of tablet.

In summary, the present application includes at least one of the following beneficial technical effects:

in the scheme, the material sheets can enter and exit from the same side, and the material sheets are at the same feeding and discharging position, so that the transfer of the material sheets can be effectively reduced, the condition that information is lost or unmatched in the transfer process of the material sheets is reduced, and the effective detection of the material sheets is ensured;

the lifting mechanism and the material pushing mechanism are matched for use, so that automatic feeding of a plurality of material sheets can be realized, and the feeding efficiency of the material sheets is improved;

the material clamping device is used for conveying the material pieces, so that the positions of the material pieces can be accurately controlled, and the effective detection of the material pieces by the detection module is guaranteed.

Drawings

Fig. 1 is a schematic overall structure diagram of an embodiment of the present application.

Fig. 2 is an exploded view of a loading/unloading module according to an embodiment of the present disclosure.

Fig. 3 is a schematic view mainly showing a blanking module in the embodiment of the present application.

Fig. 4 is a schematic diagram mainly showing a fixed-point conveying module and a detection module according to an embodiment of the present application.

Fig. 5 is an enlarged schematic view of a portion a in fig. 4.

Fig. 6 is a flowchart of a detection method according to an embodiment of the present application.

Description of reference numerals:

a machine platform;

2. a feeding and discharging module; 21. a material rack; 22. a magazine; 221. a trough; 23. a lifting mechanism; 231. a lifting frame; 2311. a lifting plate; 2312. a lifting rod; 232. a lift drive assembly; 24. a clamping mechanism; 2411. a first clamping plate; 2412. a convex edge; 2413. a first clamping drive assembly; 2421. a clamping frame; 2422. a second clamping plate; 2423. a second clamping drive assembly; 2431. a third clamping drive assembly; 2432. a third clamping plate; 25. a material pushing mechanism; 261. a blanking module; 2611. blanking fixing plates; 2612. blanking adjusting plates; 2613. a blanking baffle; 2614. a blanking adjusting baffle; 262. pulling a material rod;

3. a fixed-point conveying module; 31. a base; 32. a material sliding frame; 321. a material distance adjusting component; 33. sliding the material rail; 311. a chute; 34. a conveying mechanism; 341. a material clamping device; 3411. a first jaw; 3412. a second jaw; 3413. a jaw drive assembly; 342. a traverse driving assembly; 343. transversely moving the plate; 35. a detection switch; 36. a guide pulley; 37. a material supporting device;

4. a detection module; 41. a visual inspection device; 42. and (4) a numerical control platform.

Detailed Description

The present application is described in further detail below with reference to figures 1-6.

The embodiment of the application discloses a semiconductor detection device.

Referring to fig. 1, the detection device includes a machine table 1, a feeding and discharging module 2 is installed on the machine table 1, a fixed point conveying module 3 and a detection module 4, the feeding and discharging module 2 is located on one side of the fixed point conveying module 3, the feeding and discharging module 2 is used for conveying a material sheet to be detected into the fixed point conveying module 3 and receiving the material sheet returned by the fixed point conveying module 3, the detection end of the detection module 4 is located above the fixed point conveying module 3, the fixed point conveying module 3 is used for conveying the material sheet to be detected to the detection end of the detection module 4, and the material sheet is transferred back to the feeding and discharging module 2 by the fixed point conveying module 3 after being detected.

Referring to fig. 1 and 2, the feeding and discharging module 2 includes a rack 21 and a magazine 22, the rack 21 is located on one side of the fixed-point conveying module 3, two ends of the magazine 22 are open, a plurality of layers of troughs 221 are formed in the inner wall of the magazine 22 along the direction of the two ends, the plurality of layers of troughs 221 are arranged at intervals along the vertical direction, the troughs 221 penetrate through two ends of the magazine 22, and tablets can be loaded in the troughs 221.

The rack 21 is provided with a lifting mechanism 23 for adjusting the height of the magazine 22, a clamping mechanism 24 for clamping the magazine 22, and a material pushing mechanism 25 for delivering the material sheet to be measured in the magazine 22 to the fixed-point delivery module 3.

Referring to fig. 2, the lifting mechanism 23 includes a lifting frame 231 and a lifting driving assembly 232, the lifting frame 231 includes a lifting plate 2311 and two lifting rods 2312, the lifting plate 2311 is vertically connected with the rack 21 in a sliding manner, the lifting rods 2312 are vertically fixed on the lifting plate 2311 and extend towards a direction far away from the lifting plate 2311, the two lifting rods 2312 are parallelly arranged on one side of the lifting plate 2311 departing from the rack 21, the horizontal distance between the two lifting rods 2312 can be adjusted through bolts, the two lifting rods 2312 are used for supporting the bottom side of the material box 22, the lifting driving assembly 232 adopts an electric cylinder, the electric cylinder is arranged at the bottom of the rack 21, the output end of the electric cylinder is in transmission connection with the lifting plate 2311, and the electric cylinder is used for driving the lifting frame 231.

Referring to fig. 2, the clamping mechanism 24 includes a first clamping assembly and a second clamping assembly, the first clamping assembly includes two first clamping plates 2411 vertically disposed on the rack 21, wherein one of the first clamping plates 2411 is horizontally slidably connected to the rack 21 through a slide rail, a sliding direction of the first clamping plate 2411 is consistent with an opening direction of the magazine 22, the other first clamping plate 2411 is fixedly connected to the rack 21, flanges 2412 are integrally formed on two sides of the first clamping plate 2411 and the second clamping plate 2422, which are away from each other, the flanges 2412 extend in a direction away from the rack 21, and one side of the two flanges 2412, which are close to each other, can abut against two side edges of the magazine 22 in the opening direction.

Meanwhile, a first clamping driving assembly 2413 is arranged on the material rack 21 to drive the first clamping plate 2411, in the embodiment, an electric cylinder is selected for the first clamping driving assembly 2413 and installed on the back surface of the material rack 21, and the output end of the electric cylinder is in transmission connection with the first clamping plate 2411. The first clamping driving assembly 2413 can be used for adjusting the distance between the two convex edges 2412 so as to clamp the material boxes 22 with different sizes.

Referring to fig. 1 and 2, the second clamping assembly includes a clamping frame 2421, two second clamping plates 2422 and a second clamping driving assembly 2423, the clamping frame 2421 and one side of the material frame 21 close to the fixed point conveying module 3 are horizontally and slidably connected, the sliding direction of the clamping frame 2421 is horizontally perpendicular to the sliding direction of the first clamping plate 2411, the two second clamping plates 2422 are vertically fixed on one side of the clamping frame 2421 facing the first clamping plate 2411, the first clamping plate 2411 is parallel to the second clamping plate 2422, and the distance between the two second clamping plates 2422 can be adjusted by bolts. In this embodiment, the second clamping driving assembly 2423 adopts a driving motor and a rack-and-pinion mechanism, the output end of the driving motor is in transmission connection with a rack and a pinion, the rack is connected with the clamping frame 2421, and the rack and the pinion are used for driving the clamping frame 2421.

After the worker places the magazine 22 on the lifting frame 231, the first clamping driving assembly 2413 controls the first clamping plate 2411, the second clamping driving assembly 2423 controls the second clamping plate 2422, and the two convex edges 2412, the first clamping plate 2411 and the second clamping plate 2422 respectively clamp the vertical periphery of the magazine 22, so that the magazine 22 is locked and fixed.

Referring to fig. 1 and 2, after the magazine 22 is fixed, the material sheet is fed by the material pushing mechanism 25, and the material pushing mechanism 25 is installed on the material rack 21 along one side of the opening direction of the magazine 22 and is far away from the fixed point conveying module 3. In this embodiment, the material pushing mechanism 25 may be a commercially available cam-pusher mechanism, and a push rod in the cam-pusher mechanism is used to push the material sheets in the material box 22 into the fixed-point conveying module 3, so as to realize automatic material feeding of the material sheets.

Referring to fig. 2 and 3, a discharging module 261 is further arranged on the material rack 21, one end of the discharging module 261 is in butt joint with the free end of the lifting frame 231, the discharging module 261 further comprises a discharging fixing plate 2611 and a discharging adjusting plate 2612, the discharging adjusting plate 2612 is in sliding connection with the discharging fixing plate 2611, the sliding direction of the discharging fixing plate 2611 and the sliding direction of the discharging adjusting plate 2612 are consistent with the opening direction of the material box 22, a discharging baffle 2613 is arranged on one side of the discharging fixing plate 2611, a discharging adjusting baffle 2614 is arranged on one side of the discharging adjusting plate 2612, the discharging baffle 2613 and the discharging adjusting baffle 2614 are arranged oppositely, the discharging baffle 2613 and the discharging adjusting baffle 2614 are fixed through bolts and nuts, and an operator can adjust the distance between the discharging baffle 2613 and the discharging adjusting baffle 2614 according to the size of the material box 22.

Meanwhile, a material pulling mechanism is arranged in the blanking module 261, the material pulling mechanism comprises a material pulling rod 262 and a material pulling driving assembly (not shown in the figure) arranged in the blanking module 261, and the material pulling rod 262 is horizontally connected with the blanking module 261 in a sliding manner along a lifting direction perpendicular to the lifting frame 231. In this embodiment, draw material drive assembly to select for use the cylinder, the flexible end and the material pulling rod 262 fixed connection of cylinder. When the material sheet in the material box 22 is detected, the material pulling rod 262 is close to the vertical surface of the material rack 21 under the pushing of the material pulling driving assembly, then the lifting frame 231 drives the material box 22 to move downwards, the material box 22 is placed in the blanking module 261, the material pulling driving assembly drives the material pulling rod 262 to retract, so that the material pulling rod 262 pushes the material box 22 to be far away from the lifting frame 231, and the blanking of the material box 22 is realized.

Referring to fig. 2 and 3, a third clamping assembly is disposed at a bottom end of the first clamping plate 2411 slidably connected to the stack 21, and the third clamping assembly includes a third clamping driving assembly 2431 and a third clamping plate 2432 installed at an output end of the third clamping driving assembly. In this embodiment, cylinder is selected for use to third centre gripping drive assembly 2431, and the flexible direction of the flexible end of cylinder sets up along the opening direction of magazine 22, and the vertical flexible end of installing at the cylinder of third grip block 2432.

When a plurality of vertically arranged material boxes 22 are placed on the lifting frame 231, after the material sheet in the material box 22 at the bottommost end is detected, the lifting frame 231 moves downwards, the two first clamping plates 2411 are far away from each other, the third clamping driving assembly 2431 can control the third clamping plate 2432 to clamp the material box 22 above the material box 22 at the bottommost end, and at the moment, the material pulling mechanism can pull the material box 22 at the bottommost end from the lifting frame 231 to the discharging module 261, so that the automatic discharging of a single material box 22 is realized.

Referring to fig. 4, the fixed point conveying module 3 includes a base 31, two sliding racks 32, two sliding rails 33 and a conveying mechanism 34, the base 31 is installed on the machine table 1, the two sliding racks 32 are horizontally slidably connected to the base 31 through the sliding blocks and the sliding rails, and a material distance adjusting assembly for adjusting the distance between the two sliding racks 32 is disposed between the base 31 and the sliding racks 32. In this embodiment, the material distance adjusting assembly is an electric cylinder, the two threads of the screw rod in the electric cylinder have opposite spiral directions, and the electric cylinder is used to adjust the distance between the two material sliding frames 32.

Referring to fig. 4 and 5, the material sliding rails 33 are horizontally installed on the top side of the material sliding frame 32, the two material sliding rails 33 are parallel, the sliding grooves 311 are formed in the sides, close to each other, of the two material sliding rails 33, and the material sheets can be conveyed between the two sliding grooves 311 to realize the transfer of the material sheets.

The conveying mechanism 34 includes a gripper 341 for gripping the material sheet and a traverse driving assembly 342 for driving the gripper 341 to move along the chute 311, the gripper 341 and the traverse driving assembly 342 are connected by a traverse plate 343, and the traverse plate 343 is slidably connected to the slide rack 32 by a slide rail. The gripper 341 includes a first jaw 3411, a second jaw 3412 and a jaw driving assembly 3413, fixed ends of the first jaw 3411 and the second jaw 3412 are hinged, clamping ends of the first jaw 3411 and the second jaw 3412 extend between the two material sliding rails 33, the first jaw 3411 and the second jaw 3412 are slidably sleeved on an outer periphery of one material sliding rail 33, and clamping ends of the first jaw 3411 and the second jaw 3412 can be folded and clamp upper and lower sides of the material sheet to clamp the material sheet.

In this embodiment, the clamping jaw driving assembly 3413 is an electromagnet, the electromagnet is disposed on the first clamping jaw 3411 and the second clamping jaw 3412, and the first clamping jaw 3411 and the second clamping jaw 3412 are closed or opened by turning on or off the electromagnet. The traverse driving assembly 342 is an electric cylinder, and the output end of the electric cylinder is in transmission connection with the traverse plate 343, so that the electric cylinder can drive the material clamping device 341 to move horizontally along the slide rail 33.

Referring to fig. 4, a detection switch 35 is arranged on one side of the material sliding frame 32 close to the material feeding end of the material sliding rail 33, and the detection switch 35 can be used for detecting the material feeding and discharging condition of the material sheet, so as to realize automatic control of material feeding and discharging of the material sheet. In addition, the guide wheel 253 is installed at the feeding end of the sliding rail 33, so that the stability of feeding and discharging the material sheets is improved. A material supporting device 37 is further arranged between the two material sliding rails 33, and the material supporting device 37 is used for supporting the material pieces, so that the stability of the material pieces is further improved, and the detection precision is enhanced.

Referring to fig. 4, the detection module 4 includes a vision detection device 41 and a numerical control platform 42 for adjusting the vision detection device 41, a detection end of the vision detection device 41 is located above the material sliding rail 33, the numerical control platform 42 is a three-axis motion platform, the vision detection device 41 is installed at an output end of the three-axis motion platform, and the detection end position of the vision detection device 41 can be adjusted by the three-axis motion platform, so as to ensure effective detection on the material sheet.

The implementation principle of the semiconductor detection device in the embodiment of the application is as follows: the staff places magazine 22 on crane 231, fixture 24 presss from both sides tightly fixed with magazine 22, lift drive assembly 232 drives magazine 22 and goes up and down, make the silo 221 of magazine 22 and the spout 311 butt joint of smooth material rail 33, pushing equipment 25 is with tablet propelling movement to spout 311 in, conveying mechanism 34 is with the tablet centre gripping and carry to detection module 4's sense terminal, detection module 4 detects the tablet, after the detection finishes, conveying mechanism 34 centre gripping tablet and carry back to same silo 221 in, follow-up lift drive assembly 232 drives magazine 22 and goes up and down, continue the detection of next tablet. After the material sheets in one material box 22 are completely detected, the lifting frame 231 moves downwards, the material pulling mechanism carries out blanking on the material box 22, the automatic blanking process is completed, and therefore batch automatic detection of the material sheets is finally achieved.

This scheme has reduced the change of tablet position, can reduce then that the tablet appears information loss or the unmatched condition of information in the transfer process, and unloading is gone up to the homonymy simultaneously, can reduce the quantity of last unloading module 2, reaches the purpose of practicing thrift the cost.

In a second aspect, the embodiment of the application also discloses a semiconductor detection method.

Referring to fig. 6, the method includes the steps of:

s1, a worker places the magazine 22 with the material sheets to be measured on the lifting frame 231, and the clamping mechanism 24 clamps and locks the magazine 22;

s2, the lifting mechanism 23 drives the material box 22 to lift, so that the trough 221 in the material box 22 is in butt joint with the sliding groove 311 of the sliding rail 33;

s3, detecting whether the material sheet to be detected exists in the material groove 221 in the material box 22;

s31, pushing the pushing end of the pushing mechanism 25 along the direction of the trough 221, if a material sheet to be detected exists in the trough 221, pushing the material sheet to be detected into the chute 311, detecting the material sheet to be detected by the detection switch 35, transferring the material sheet to be detected to the detection end of the detection module 4 by the fixed-point conveying module 3, and after the detection of the detection module 4 is finished, conveying the detected material sheet back to the same trough 221 in the magazine 22 by the fixed-point conveying module 3 to finish the detection of a single material sheet;

s32, pushing the pushing end of the pushing mechanism 25 along the direction of the trough 221, if no material sheet to be tested exists in the trough 221, pushing the material sheet to be tested into the chute 311, and if no material sheet to be tested is detected by the detection switch 35, returning to the step S2;

s4, repeating the steps S2-S3, and detecting the material sheets to be detected in batches;

s5, after the detection of all the tablets in one material box 22 is finished, the lifting mechanism 23 drives the material box 22 to descend, and the blanking mechanism blanks the material box 22 to finish the detection of the tablets in one material box 22.

The above embodiments are preferred embodiments of the present application, and the protection scope of the present application is not limited by the above embodiments, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.