阅读说明：本技术 一种用于切换光路的装置和方法 (Device and method for switching optical path ) 是由 朱强铭 李宇 周广梅 于 2021-07-12 设计创作，主要内容包括：本申请实施例的目的是提供一种用于切换光路的装置和方法。所述装置,包括：电机装置、限位装置和挡板；其中,挡板连接于电机装置的电机轴,电机装置基于预定的移动指令围绕电机轴旋转,从而带动挡板旋转至需要挡光的位置。本申请实施例具有以下优点：使用电机装置来根据预定的移动指令进行一定角度的旋转,从而带动挡板移动至需要挡光的位置,使用电机作为动力来移动挡板的方式转动平滑、力矩稳定、振动较小,提升了光路切换的效率；根据本申请实施例的装置使用吸光布来吸收光波,提升了吸光率。(An object of the embodiments of the present application is to provide an apparatus and a method for switching an optical path. The apparatus, comprising: the device comprises a motor device, a limiting device and a baffle plate; the baffle is connected to a motor shaft of the motor device, and the motor device rotates around the motor shaft based on a preset movement instruction, so that the baffle is driven to rotate to a position where light shielding is needed. The embodiment of the application has the following advantages: the motor device is used for rotating at a certain angle according to a preset moving instruction, so that the baffle is driven to move to a position needing light blocking, the mode that the motor is used as power to move the baffle is smooth in rotation, stable in moment and small in vibration, and the light path switching efficiency is improved; the device according to this application embodiment uses the cloth that absorbs light to absorb the light wave, has promoted the absorbance.)

1. An apparatus for switching an optical path, comprising:

the device comprises a motor device, a limiting device and a baffle plate;

the baffle is connected to a motor shaft of the motor device, and the motor device rotates around the motor shaft based on a preset movement instruction, so that the baffle is driven to rotate to a position where light shielding is needed.

2. The apparatus of claim 1, wherein the motor means is a servo motor.

3. The device of claim 1, wherein the baffle is provided with a light absorption cloth, and the light absorption cloth is adhered to the baffle by an adhesive.

4. The device of claim 1, wherein the stop means comprises a soft stop means and a mechanical stop means;

the soft limiting device is used for preventing the moving position of the motor device from exceeding a preset position;

one end of the mechanical limiting device is connected with the mounting seat of the motor, and the other end of the mechanical limiting device is provided with a rubber sleeve for forming buffering when the mechanical limiting device is contacted with the baffle.

5. The device of claim 4, wherein the soft stop device comprises a magnetic switch disposed on a bracket of the motor.

6. The apparatus of claim 1, further comprising a coupling for coupling compressed air to clean the motor shaft with the compressed air.

7. A method of switching an optical path based on the apparatus of any one of claims 1 to 6, comprising:

generating a corresponding moving instruction according to the position needing to block light;

the motor device rotates around the motor shaft based on the moving instruction, so that the baffle is driven to rotate to the position needing light blocking.

8. The method according to claim 7, wherein the generating of the corresponding movement instruction according to the position needing to block light comprises:

determining the angle required to rotate according to the position required to block light and the current position;

based on the determined angle, a corresponding movement instruction is generated to instruct the motor arrangement to rotate a corresponding angle about the motor shaft.

Technical Field

The present invention relates to the field of optical devices, and in particular, to an apparatus and method for switching optical paths.

Background

Many semiconductor measurement devices, especially precision thin film measurement devices for measuring various thin film parameters and subtle variations (such as film thickness, refractive index, stress, etc.) in semiconductor manufacturing processes, typically require viewing of the field of view at different multiples. In order to prevent the images projected by the lenses with different multiples on a Charge-coupled Device (CCD) camera from being affected by stray light caused by the optical paths of other lenses, the light on other optical paths needs to be absorbed to reduce reflection, and the influence of vibration on the structure of the camera needs to be reduced in the process of switching the optical paths.

The light path switching equipment based on the prior art generally uses the cylinder to move the baffle, so that larger vibration can be caused, the surface of the baffle is subjected to certain absorption on light by black anodic oxidation, the black anodic oxidation has low absorption rate on light waves, certain stray light can be generated, and the imaging effect of the projection of other lens light paths on the CCD camera is influenced.

Disclosure of Invention

An object of the embodiments of the present application is to provide an apparatus and a method for switching an optical path.

The embodiment of the present application provides a device for switching optical path, which includes: the device comprises a motor device, a limiting device and a baffle plate; the baffle is connected to a motor shaft of the motor device, and the motor device rotates around the motor shaft based on a preset movement instruction, so that the baffle is driven to rotate to a position where light shielding is needed.

The embodiment of the application provides a method for switching an optical path based on a device of the application, which comprises the following steps:

generating a corresponding moving instruction according to the position needing to block light;

the motor device rotates around the motor shaft based on the moving instruction, so that the baffle is driven to rotate to the position needing light blocking.

Compared with the prior art, the embodiment of the application has the following advantages: the motor device is used for rotating at a certain angle according to a preset moving instruction, so that the baffle is driven to move to a position needing light blocking, the mode that the motor is used as power to move the baffle is smooth in rotation, stable in moment and small in vibration, and the light path switching efficiency is improved; the device according to this application embodiment uses the cloth that absorbs light to absorb the light wave, has promoted the absorbance.

Drawings

Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments made with reference to the following drawings:

fig. 1 is a schematic structural diagram illustrating an apparatus for switching an optical path according to an embodiment of the present application;

fig. 2 is a schematic structural diagram of an exemplary apparatus for switching an optical path according to an embodiment of the present application;

fig. 3 shows a flowchart of a method for switching an optical path according to an embodiment of the present application.

The same or similar reference numbers in the drawings identify the same or similar elements.

Detailed Description

Before discussing exemplary embodiments in greater detail, it should be noted that the specific structural and functional details disclosed herein are merely representative and are for purposes of describing exemplary embodiments of the present application. This application may, however, be embodied in many alternate forms and should not be construed as limited to only the embodiments set forth herein.

It will be understood that, although the terms first, second, etc. may be used herein to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another. For example, a first element may be termed a second element, and, similarly, a second element may be termed a first element, without departing from the scope of example embodiments. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

It will be understood that when an element is referred to as being "connected" or "coupled" to another element, it can be directly connected or coupled to the other element or intervening elements may be present. In contrast, when an element is referred to as being "directly connected" or "directly coupled" to another element, there are no intervening elements present. Other words used to describe the relationship between elements (e.g., "between" versus "directly between", "adjacent" versus "directly adjacent to", etc.) should be interpreted in a similar manner.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," when used herein, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.

It should also be noted that, in some alternative implementations, the functions/acts noted may occur out of the order noted in the figures. For example, two figures shown in succession may, in fact, be executed substantially concurrently, or the figures may sometimes be executed in the reverse order, depending upon the functionality/acts involved.

Embodiments of the present application are described in further detail below with reference to the accompanying drawings.

Fig. 1 shows a schematic structural diagram of an apparatus for switching an optical path according to an embodiment of the present application.

The apparatus according to the present application may be incorporated in various opto-mechanical devices, among others.

Preferably, the device according to the present application may be comprised in a semiconductor measurement apparatus.

Referring to fig. 1, the apparatus includes a motor apparatus 101, a stopper apparatus 102, and a baffle 103.

The barrier 103 is connected to a motor shaft of the motor device 101, and the motor device 101 rotates around the motor shaft based on a predetermined moving instruction, so as to drive the barrier 103 to rotate to a position where light blocking is required.

According to one embodiment, the motor means 101 is a servo motor. Corresponding movement instructions are generated through an encoder arranged in the servo motor, so that the servo motor rotates around a motor shaft by a specific angle based on the movement instructions, and the baffle plate 103 is driven to rotate to a position needing light blocking.

The encoder of the servo motor comprises various types of encoders which can be used for measuring the position of a magnetic pole and controlling the rotation angle and the rotation speed of the servo motor.

According to one embodiment, the motor device 101 is a motor without an encoder, such as a stepping motor, and the device further includes an encoder, and the encoder generates a corresponding movement command, and the motor without the encoder receives the movement command from the encoder and rotates around the motor shaft by a specific angle based on the movement command, so as to drive the baffle plate 103 to rotate to a position where light blocking is needed.

According to one embodiment, the baffle 103 is provided with a light absorption cloth 104, and the light absorption cloth is adhered to the baffle through adhesive.

According to one embodiment, the stop device 102 comprises a soft stop device 1021 and a mechanical stop device 1022.

The soft limiting device 1021 is used for preventing the moving position of the motor device 101 from exceeding a predetermined position.

Preferably, the soft limiting device 1021 is a magnetic switch, and the magnetic switch is arranged on a bracket of the motor.

Optionally, the soft limiting device 1021 is a proximity switch.

The mechanical limiting device 1022 is used for preventing the moving position of the motor device 101 from exceeding a predetermined position in the case that the motor device is out of control and the soft limiting device 1021 fails.

Preferably, one end of the mechanical limiting device 1022 is connected to the mounting seat of the motor device 101, and the other end is provided with a rubber sleeve for forming a buffer when contacting with the baffle 103.

According to one embodiment, the device further comprises a joint 105, said joint 105 being adapted to joint compressed air, whereby the compressed air is used for cleaning the motor shaft.

According to the device provided by the embodiment of the application, the motor device is used for rotating at a certain angle according to the preset moving instruction, so that the baffle is driven to move to the position where light is needed to be blocked, the mode that the motor is used as power to move the baffle is smooth in rotation, stable in moment and small in vibration, and the light path switching efficiency is improved; the device according to this application embodiment uses the cloth that absorbs light to absorb the light wave, has promoted the absorbance.

Fig. 2 is a schematic structural diagram of an exemplary apparatus for switching an optical path according to an embodiment of the present application.

Referring to fig. 2, the apparatus includes a servo motor 201, a joint 202, a magnetic switch 203, a mechanical stop 204, a motor mount 205, and a flapper 206.

The barrier 103 is connected to a motor shaft of the motor device 101, and the motor device 101 rotates around the motor shaft based on a predetermined moving instruction, so as to drive the barrier 103 to rotate to a position where light blocking is required.

Corresponding moving instructions are generated through an encoder arranged in the servo motor, so that the servo motor rotates for a specific angle around a motor shaft based on the moving instructions, and the baffle is driven to rotate to a position needing light blocking.

The joint 202 is used for connecting compressed air, so that a motor shaft of the servo motor 201 is cleaned by the compressed air.

The light absorption cloth 207 is arranged on the baffle 206, and the light absorption cloth 207 is adhered to the baffle 206 through adhesive. The light absorption rate of the light absorption cloth 207 can reach 99.8%, so that stray light can be reduced.

The magnetic switch 203 is used to prevent the moving position of the servo motor 201 from exceeding a predetermined position. The magnetic switch 203 is arranged in a groove matched with the motor bracket 205, and an electromagnet is arranged in the baffle 206 so as to be matched with the magnetic switch 203.

The mechanical limit 204 is used for preventing the moving position of the servo motor 201 from exceeding a predetermined position in the case that the servo motor 201 is out of control and the magnetic switch 203 fails. One end of the mechanical limit 204 is connected with the mounting seat of the servo motor 201, and the other end of the mechanical limit 204 is provided with a rubber sleeve for forming buffering when contacting with the baffle 206.

According to the device of this application embodiment, use servo motor to come to carry out the rotation of certain angle according to predetermined removal instruction to drive the baffle and remove to the position that needs be in the light, servo motor is small, and light in weight puts out power greatly, and the response is fast, and inertia is little, rotates smoothly, and moment is stable, and the motor is non-maintaining, and efficiency is very high, and operating temperature is low, and electromagnetic radiation is very little, and is long-lived, is applicable to very much clean environment.

Fig. 3 shows a flowchart of a method for switching an optical path according to an embodiment of the present application.

Referring to fig. 3, the method includes step S1 and step S2.

In step S1, a corresponding movement command is generated according to the position where light blocking is required.

Specifically, the angle needing to be rotated is determined according to the position needing to block light and the current position; based on the determined angle, a corresponding movement instruction is generated to instruct the motor arrangement to rotate a corresponding angle about the motor shaft.

In step S2, the motor device is caused to rotate around the motor shaft based on the movement instruction, thereby rotating the barrier to a position where light blocking is required.

For example, the optical path switching is performed using the apparatus shown in fig. 3, and it is assumed that the shutter needs to be rotated clockwise by 60 degrees according to the position where light blocking is required and the current position. An encoder arranged in the servo motor generates a corresponding movement instruction, so that the servo motor rotates clockwise by 60 degrees around the motor shaft based on the movement instruction, and the baffle is driven to rotate clockwise by 60 degrees to a position needing light blocking.

According to the method of the embodiment of the application, the motor device is used for rotating at a certain angle according to the preset moving instruction, so that the baffle is driven to move to the position where light is needed to be blocked, the mode that the motor is used as power to move the baffle is smooth in rotation, stable in moment and small in vibration, and the light path switching efficiency is improved; according to the method of the embodiment of the application, the light absorption cloth is used for absorbing light waves, and the light absorption rate is improved.

It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned. Furthermore, it is obvious that the word "comprising" does not exclude other elements or steps, and the singular does not exclude the plural. A plurality of units or means recited in the system claims may also be implemented by one unit or means in software or hardware. The terms first, second, etc. are used to denote names, but not any particular order.