Increase CO2Method and apparatus for pulsed laser output power

文档序号:1864051 发布日期:2021-11-19 浏览:11次 中文

阅读说明:本技术 一种增加co2脉冲式激光器输出功率的方法和装置 (Increase CO2Method and apparatus for pulsed laser output power ) 是由 梅林� 梅笑雨 于 2021-05-18 设计创作,主要内容包括:本发明公开了一种增加CO-(2)脉冲式激光器输出功率的方法,包括正常脉冲序列和辅助脉冲序列,辅助脉冲序列间隔穿插叠加在正常脉冲序列之间。该设计原理在于:人为在原来脉冲周期较长的控制脉冲序列中插入了新的辅助控制脉冲,使得新脉冲周期减短,相当于增加原先控制脉冲的占空比,从而实现激光器输出功率的提升。(The invention discloses a method for increasing CO 2 A method of pulsing the output power of a laser includes a sequence of normal pulses and a sequence of auxiliary pulses intermittently superimposed between the sequence of normal pulses. The design principle is as follows: artificially inserting a new auxiliary control pulse into the original control pulse sequence with a longer pulse period to shorten the new pulse period, which is equivalent to increasing the duty ratio of the original control pulse, thereby realizing the improvement of the output power of the laser.)

1. Increase CO2A method of pulsed laser output power, characterized by: the pulse sequence comprises normal pulse sequences and auxiliary pulse sequences, wherein the auxiliary pulse sequences are alternately and alternately superposed between the normal pulse sequences.

2. CO enhancement according to claim 12A method of pulsed laser output power, characterized by: the normal pulse sequence is a single pulse sequence or a multi-pulse sequence;

when the normal pulse sequence is a single pulse sequence, the duty ratio of the pulse sequence is-1 = (pulse width-1)/T, and T is the pulse period, at the moment, the pulse width-1 is smaller than the maximum pulse width allowed by the laser;

when the normal pulse sequence is a multi-pulse sequence, the total duration width of the laser beam output is less than the total duration width of the pause of the laser beam output, and the duty ratio is-2 = (the total duration width of the laser output)/T.

3. CO enhancement according to claim 12A method of pulsed laser output power, characterized by: the pulse width of the auxiliary pulse sequence is the same as or different from that of the normal pulse sequence;

the pulse period of the auxiliary pulse sequence is the same as or different from the pulse period T of the normal pulse sequence.

4. CO enhancement according to claim 32A method of pulsed laser output power, characterized by:

when the normal pulse is a single pulse sequence:

the pulse period T of the normal pulse sequence in the non-superimposed state and the pulse period T of the new pulse sequence after mutual superimposition2Is T2=T/2;

After a new pulse sequence is formed, the corresponding duty ratio-1 of the normal pulse sequence is as follows: pulse width-1/T2

After a new pulse sequence is formed, the corresponding duty ratio of the auxiliary pulse sequence is as follows: pulse width-2/T2

When the light beam corresponding to the auxiliary pulse sequence is not applied, setting the pulse width-2 to be smaller than the pulse width-1;

when the light beam corresponding to the auxiliary pulse sequence is applied, the pulse width-2 can be independently set;

when the normal pulse is a multi-pulse sequence:

when the auxiliary multi-pulse sequence is completely the same as the normal multi-pulse sequence, alternately and alternately superposing the auxiliary pulse sequence in a laser output pause region of the normal pulse sequence, wherein the auxiliary multi-pulse sequence generates the same laser pulse output as the normal multi-pulse sequence;

and when the auxiliary multi-pulse sequence is not completely the same as the normal multi-pulse sequence, alternately and alternately superposing the auxiliary pulse sequence in a laser output pause area of the normal pulse sequence, and alternately generating different laser pulse outputs by the auxiliary multi-pulse sequence and the normal multi-pulse sequence.

5. CO increase according to any one of claims 1 to 42A method of pulsed laser output power, characterized by:

when the normal pulse is a single pulse sequence:

the duty ratio-1 of the normal pulse sequences after mutual superposition is larger than the duty ratio-1 of the normal pulse sequences in the non-superposed state, so that the output power of the laser after pulse superposition is larger than the output power of the laser when the pulses are not superposed;

when the normal pulse is a multi-pulse sequence:

the pause time of the laser without laser output is reduced, the duty ratio-2 is increased, and the power output of the laser is increased.

6. Increase CO2Pulsed laser output power's device, including pulse laser and laser instrument control system, its characterized in that: the laser control system sends out a normal pulse sequence and an auxiliary pulse sequence to control the pulse laser to send out normal laser and auxiliary laser.

7. CO enhancement according to claim 62Pulsed laser output power's device characterized in that: the laser device also comprises an optical deflection device, wherein the optical deflection device is used for deflecting normal laser and auxiliary laser emitted by the pulse laser to emit light in different directions, and the normal laser corresponds to the normal laserA pulse sequence, the auxiliary laser corresponding to an auxiliary pulse sequence.

8. CO enhancement according to claim 72Pulsed laser output power's device characterized in that: the normal pulse sequence laser is projected to the surface of the product through the first focusing device, and the auxiliary pulse sequence laser is projected to the surface of the product through the second focusing device or directly projected onto the energy absorption device.

9. CO enhancement according to claim 72Pulsed laser output power's device characterized in that: the optical deflection device is a device with deflection light splitting function, and is selected from the following components, namely a vibrating mirror, a rotating polygon mirror, a rotating reflecting polygon mirror, an electro-optical device, an acousto-optic device and an optical diffraction deflection device.

10. CO enhancement according to claim 72Pulsed laser output power's device characterized in that: the energy absorption device absorbs CO2The laser beam is made of metal or nonmetal material, and can absorb the energy of the beam and prevent the reflection of the beam.

The technical field is as follows:

the invention belongs to the technical field of lasers, and particularly relates to a method for increasing CO2Methods and apparatus for pulsed laser output power.

Background art:

CO2the pulse laser is increasingly applied to aspects of nonmetal cutting, perforation, trimming and forming, and the like, particularly, a J-series laser of COHERENT and a British Roche laser are particularly suitable for occasions of high-speed high-frequency pulse beams, particularly, for perforation of some thin rod objects, the number of holes is large, the speed is high, and the power of the laser is effectively excited, so that the application is well met.

However, for some special applications, the laser has a low operating frequency, for example, the period of the output laser pulse is large, 3-4 ms, and the pulse width is limited, for example, the pulse width of the OEM laser is required to be less than 400 ms, and the pulse width of the J-series laser is required to be less than 1000 ms, so that the duty cycle of the output laser is relatively small in this state, and the energy of the laser cannot be excited effectively. Or the working time length width of the laser pulse is less than the working pause time length width of the laser pulse, and the working time of the laser is short and the pause time is long.

In general, there are often two or more focusing applications that work simultaneously after passing through a 50% beam splitting lens, so that the laser energy of each path is further reduced by 50%, which aggravates the contradiction that the energy of the laser cannot be effectively utilized on one hand and the power of the focusing application is insufficient on the other hand.

The information disclosed in this background section is only for enhancement of understanding of the general background of the invention and should not be taken as an acknowledgement or any form of suggestion that this information forms the prior art already known to a person skilled in the art.

The invention content is as follows:

the invention aims to provide a method for increasing CO2A method of pulsing the power of a laser to overcome the above-mentioned deficiencies of the prior art.

In order to achieve the above object, the present invention provides a method for increasing CO2A method of pulsing the output power of a laser includes a sequence of normal pulses and a sequence of auxiliary pulses intermittently superimposed between the sequence of normal pulses. The normal pulse sequence is a pulse sequence adopted in normal laser drilling.

Preferably, in the above technical solution, the normal pulse sequence is a single pulse sequence or a multi-pulse sequence;

when the normal pulse sequence is a single pulse sequence, the duty ratio of the pulse sequence is-1 = (pulse width-1)/T, and T is the pulse period, at the moment, the pulse width-1 is smaller than the maximum pulse width allowed by the laser;

when the normal pulse sequence is a multi-pulse sequence, the total duration width of the laser beam output is less than the total duration width of the pause of the laser beam output, and the duty ratio is-2 = (the total duration width of the laser output)/T.

Preferably, in the above technical solution, the pulse width of the auxiliary pulse sequence is the same as or different from the pulse width of the normal pulse sequence;

the pulse period of the auxiliary pulse sequence is the same as or different from the pulse period T of the normal pulse sequence; preferably, the pulse period of the auxiliary pulse train is the same as the pulse period T of the normal pulse train.

Preferably, in the above technical solution, when the normal pulse is a single pulse sequence:

the pulse period T of the normal pulse sequence in the non-superimposed state and the pulse period T of the new pulse sequence after mutual superimposition2Is T2=T/2;

After a new pulse sequence is formed, the corresponding duty ratio-1 of the normal pulse sequence is as follows: pulse width-1/T2

After a new pulse sequence is formed, the corresponding duty ratio of the auxiliary pulse sequence is as follows: pulse width-2/T2

When the light beam corresponding to the auxiliary pulse sequence is not applied, setting the pulse width-2 to be smaller than the pulse width-1;

when the light beam corresponding to the auxiliary pulse sequence is applied, the pulse width-2 can be independently set;

when the normal pulse is a multi-pulse sequence:

and when the auxiliary multi-pulse sequence is completely the same as the normal multi-pulse sequence, alternately and alternately superposing the auxiliary pulse sequence in a laser output pause region of the normal pulse sequence, wherein the auxiliary multi-pulse sequence generates the same laser pulse output as the normal multi-pulse sequence.

And when the auxiliary multi-pulse sequence is not completely the same as the normal multi-pulse sequence, alternately and alternately superposing the auxiliary pulse sequence in a laser output pause area of the normal pulse sequence, and alternately generating different laser pulse outputs by the auxiliary multi-pulse sequence and the normal multi-pulse sequence.

Preferably pulse width-1 is much greater than pulse width-2;

when the normal pulse is a multi-pulse sequence:

the auxiliary pulse sequence is the same as the normal pulse sequence, and the auxiliary pulse sequence is alternately and alternately overlapped in a laser output pause area of the normal pulse sequence, so that the pause time without laser output in the laser output pulse sequence is shortened.

Preferably, in the above technical solution, when the normal pulse is a single pulse sequence: the duty ratio of the normal pulse sequence after mutual superposition is larger than the duty ratio of the normal pulse sequence in the non-superposed state, so that the output power of the laser after pulse superposition is larger than the output power of the laser when the pulses are not superposed.

When the normal pulse is a multi-pulse sequence: the pause time without laser output in the laser output pulse sequence is reduced, and the power output of the laser is increased.

Increase CO2The device for outputting power of the pulse laser comprises the pulse laser and a laser control system, wherein the laser control system sends a normal pulse sequence and an auxiliary pulse sequence to control the pulse laser to send normal laser and auxiliary laser. The arrangement is such that the energy of the pulse beam obtained by the first focusing means can be increased by at least 20% at the previous maximum output power, while the laser energy obtained by the second focusing means or the energy absorption means can be simultaneously increased or decreased to a controlled state.

Preferably, in the above technical solution, the laser processing apparatus further includes an optical deflection device, the optical deflection device is configured to deflect a normal laser and an auxiliary laser emitted by the pulse laser to different directions, the normal laser corresponds to the normal pulse sequence, and the auxiliary laser corresponds to the auxiliary pulse sequence.

Preferably, in the above technical solution, the normal pulse train laser is projected onto the surface of the product through the first focusing device, and the auxiliary pulse train laser is projected onto the surface of the product through the second focusing device or directly projected onto the energy absorption device.

Preferably, in the above technical solution, the optical deflecting device is a device having a function of deflecting and splitting light, and is selected from the following components, namely a galvanometer, a rotating polygon mirror, an electro-optical device, an acousto-optic device, and an optical diffraction deflecting device.

Preferably, in the above technical solution, the energy absorption device is capable of absorbing CO2Metal and non-metal materials with laser beam characteristics are processed into blocks or grooves,can absorb the energy of the light beam and prevent the reflection of the light beam.

Compared with the prior art, the invention has the following beneficial effects:

because a new auxiliary control pulse is artificially inserted into the original control pulse sequence with a longer pulse period, the new pulse period is shortened, which is equivalent to increasing the duty ratio of the original control pulse, thereby realizing the improvement of the output power of the laser. And then, an optical deflection device is utilized to deviate the laser beam corresponding to the auxiliary control pulse from the main light path without interfering the main light path, so that the application effect of increasing the laser power corresponding to the main light path is realized. Meanwhile, the pulse width of the auxiliary control pulse is reduced as much as possible, a smaller duty ratio is realized, the output power of the auxiliary laser is reduced, and the technical effects of reducing energy waste are achieved.

Description of the drawings:

FIG. 1 a: schematic diagrams of two normal pulse sequences;

FIG. 1 b: the schematic diagram of the 50% beam splitting lens for realizing simultaneous working of two paths of focusing;

FIG. 2: typical of CO2The duty ratio and the output power of the pulse laser correspond to the graph:

FIG. 3: the composition of the device is schematic;

FIG. 4: a control pulse sequence chart when the original single pulse reaches the maximum laser output power;

FIG. 5: an auxiliary pulse sequence diagram for a single pulse;

FIG. 6: the auxiliary pulse is inserted into the original pulse sequence of the single pulse to form a new sequence schematic diagram;

FIG. 7: a schematic diagram of a deflection control pulse sequence;

FIG. 8: after the auxiliary pulse of the multi-pulse is inserted, a new sequence schematic diagram is formed;

FIG. 9: the schematic diagram of direct focusing of the pulse sequence after canceling the 50% spectroscope;

FIG. 10: and after different auxiliary multi-pulse sequences are inserted, a new sequence schematic diagram is formed.

The specific implementation mode is as follows:

the following detailed description of specific embodiments of the invention is provided, but it should be understood that the scope of the invention is not limited to the specific embodiments.

Throughout the specification and claims, unless explicitly stated otherwise, the word "comprise", or variations such as "comprises" or "comprising", will be understood to imply the inclusion of a stated element or component but not the exclusion of any other element or component.

Increase CO2The method of pulse laser output power can increase single output pulse energy while limiting the maximum pulse period.

The first step is that the device comprises:

CO2pulsed laser, control system, optical deflection device, first focusing device, second focusing device or energy absorption device, characterized by:

CO2after output light beams of the pulse laser pass through the optical deflection device, one light beam is transmitted to the first focusing device, and the other light beam is transmitted to the second focusing device or the energy absorption device;

the arrangement is such that the energy of the pulse beam obtained by the first focusing means can be increased by at least 20% at the previous maximum output power, while the laser energy obtained by the second focusing means or the energy absorption means can be simultaneously increased or decreased to a controlled state.

The optical deflection device is a device with deflection light splitting function, and comprises a vibrating mirror, a rotating polygon mirror, an electro-optic device, an acousto-optic device and an optical diffraction deflection device, and preferably the vibrating mirror or the acousto-optic deflection device.

The energy absorption device is used for absorbing CO2The laser beam is made of metal or nonmetal material, and can absorb the energy of the beam and prevent the reflection of the beam.

A method comprises the following steps:

under the condition that the original output reaches the maximum single beam energy, inserting auxiliary pulse sequences at intervals in the sequence of the output laser control pulse of the original control system.

The pulse period of the original pulse is T, and the pulse width is-1;

the pulse period of the auxiliary pulse is T, and the pulse width is-2;

the pulse sequence for one pulse period T2= T/2 is formed as a new control pulse sequence with a pulse width of-1, or alternatively with a pulse width of-2, respectively.

Secondly, the laser is controlled by the new control pulse sequence, so that the laser outputs the energy of a single pulse light beam, and alternately outputs the power corresponding to the pulse width-1 (duty ratio-1) and the pulse period T2, or outputs the power corresponding to the pulse width-2 (duty ratio-2) and the pulse period T2.

Duty cycle-1 = pulse width-1/T2, duty cycle-2 = pulse width-2/T2, and the corresponding powers of the two pulses are the same when duty cycle-1 = duty cycle-2;

when the duty ratio-1 is larger than the duty ratio-2, the pulse width-1 pulse corresponding power is larger than the pulse width-2;

when the duty ratio-1 is smaller than the duty ratio-2, the pulse width-1 pulse corresponding power is smaller than the pulse width-2;

note: the output of the laser comprises useful pulse width-1 and useless pulse width-2, so that the pulse corresponding to the pulse width-2 is removed by using a deflection device.

The control system generates a deflection control pulse sequence, so that the deflection device deflects the laser output beam alternately at intervals, or transmits a single pulse corresponding to the pulse width-1 to the first focusing head and transmits a single pulse corresponding to the pulse width-2 to the second focusing device or the energy absorption device, or transmits a single pulse corresponding to the pulse width-2 to the first focusing head and transmits a single pulse corresponding to the pulse width-1 to the second focusing device or the energy absorption device.

The pulse period of the deflection pulse coincides with the pulse period of the new control pulse of the laser light, T2, and the pulse width-3 is the time length required for the deflection device to operate normally, wherein the pulse width-3 is smaller than 1/3 of T2.

Preferably, the pulse width-2 is much smaller than the pulse width-1, and the power absorption device is arranged at the second focusing device, so that after the scheme is adopted, the pulse period T of the final laser pulse is still realized at the first focusing device, but the duty ratio of 2 pulse width-1/T is obtained, and thus, higher laser power is obtained.

Fig. 1 reflects the pulse sequence of two conventional applications, when the normal pulse sequence is a single pulse sequence, the period T, the duty ratio of the pulse sequence is-1 = (the maximum pulse width allowed for the laser)/T;

at this time, when the pulse period is long and the single pulse width of the laser has reached the limit allowed by the laser, the duty ratio-1 = (the maximum pulse width allowed by the laser)/T of the formed pulse sequence, and therefore, the duty ratio-1 is small (less than 50%), so that the output laser energy of the laser cannot be increased.

When the normal pulse sequence is a multi-pulse sequence, the total duration width of the laser beam output is less than the total duration width of the pause of the laser beam output, and the duty ratio is-2 = (the total duration width of the laser output)/T (less than 50%).

In general, there are often two or more focusing applications that work simultaneously after passing through a 50% beam splitting lens, so that the laser energy of each path is further reduced by 50%, which aggravates the contradiction that the energy of the laser cannot be effectively utilized on one hand and the power of the focusing application is insufficient on the other hand.

Fig. 2 is a graph showing the correspondence between the Output Power (Output Power) and the duty ratio (duty cycle) of one of the co2 pulse lasers in different periods (operating frequencies), and it can be seen that the duty ratio increases and the Output Power increases in the same frequency or period.

FIG. 3: the device is described as comprising an optical deflection means which, under the control of a control system, outputs different output light sequences to the focusing means-1, or to the focusing means-2, or to the energy absorption means, respectively.

FIG. 6: after the auxiliary pulse of the single pulse sequence is inserted into the original pulse sequence to form a new sequence and a new pulse sequence is formed, the corresponding duty ratio-1 of the normal pulse sequence is as follows: pulse width-1/T2

After a new pulse sequence is formed, the corresponding duty ratio of the auxiliary pulse sequence is as follows: pulse width-2/T2

T =2 × T2, so the duty cycle of the new pulse train is greater than that of the normal pulse train, and the power corresponding to the output pulse width-1 of the corresponding laser is greater than the output power of the pulse width-1 of the original normal pulse.

The experimental data are as follows:

using normal laser control pulse sequence, corresponding to pulse period T:

secondly, controlling a pulse sequence by using the new laser, wherein the pulse sequence corresponds to a pulse period T2= T/2:

fig. 8 shows that when the original normal pulse is a multi-pulse sequence, the same auxiliary pulse sequence is inserted into the pause region of the original pulse sequence, and then the light beam corresponding to the auxiliary pulse sequence is guided to the focusing device-2 by the deflection separating device, and the light beam corresponding to the original pulse sequence is guided to the focusing device-1, so that the laser output power of 50% of the power of the focusing device-2 and the focusing device-1 is changed to: the light beam corresponding to the original pulse sequence is guided to the focusing device-1, so that the power of the focusing device-2 is the same as that of the focusing device-1, and 100% of laser output power is realized.

Fig. 9 and 10: the auxiliary pulse sequences in which the multiple pulses are alternately superimposed in the case of the normal multiple pulse sequence are described, and new pulse sequences formed in the case where the auxiliary multiple pulse sequences are identical to the normal multiple pulse sequences and pulse characteristics independent of each other after being assigned to the focusing device 1 and the focusing device-2 are described, respectively.

And when the auxiliary multi-pulse sequence is different from the normal multi-pulse sequence, forming a new pulse sequence and distributing the new pulse sequence to the focusing device 1 and the focusing device-2, and then respectively and independently forming pulse characteristics.

Therefore, the auxiliary pulse sequence is utilized, the period of the original control pulse is reduced, and the duty ratio is increased, so that the power of each laser output single pulse is increased.

And removing the optical pulse corresponding to the inserted auxiliary pulse by using the deflection device, so that the original pulse period and the original light beam are still kept in the original first focusing device, and only the power of the light beam is improved at the moment.

And similarly, the auxiliary multi-pulse sequence is utilized, during the interval of the original pulse sequence of the laser for stopping emitting laser, the laser of the auxiliary pulse is emitted, and the auxiliary pulse laser is transmitted to a new application through the deflection device, so that the output power of the laser is improved.

The scheme has the advantages that the deflection device is simple in utilization and low in price, new control auxiliary pulses are combined, the output of the co2 laser is specific, the power of the laser is effectively improved, the cost and time required to be increased when the high-power laser is replaced are avoided, the cost is saved, and the utilization efficiency of laser energy is improved.

The foregoing descriptions of specific exemplary embodiments of the present invention have been presented for purposes of illustration and description. It is not intended to limit the invention to the precise form disclosed, and obviously many modifications and variations are possible in light of the above teaching. The exemplary embodiments were chosen and described in order to explain certain principles of the invention and its practical application to enable one skilled in the art to make and use various exemplary embodiments of the invention and various alternatives and modifications as are suited to the particular use contemplated. It is intended that the scope of the invention be defined by the claims and their equivalents.

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