阅读说明：本技术 一种透明导电薄膜制备方法 (Preparation method of transparent conductive film ) 是由 周祥 于 2021-09-03 设计创作，主要内容包括：本发明属于半导体薄膜技术领域,尤其是一种透明导电薄膜制备方法,针对存在的基底要求高、真空环境才能生产的问题,现提出以下方案,包括以下步骤,S1,薄膜生产中,制备薄膜基底首先经过清洗,清洗经过HCl再超声下清洗8-10min,再利用NaOH溶液超声清洗8-10min,最后利用丙酮超声清洗8-10min,每个试剂清洗间隔均利用去离子水超声清洗8-10min,最后利用氮气吹干薄膜基底表面。本发明采用喷雾热解法,采用普通的硅硼玻璃为基底,其对真空、气氛等试验条件要求不高,喷涂部分利用雾化器喷雾技术替代传统方法制备出了透过率达90%的ATO薄膜,在大面积生产ATO薄膜时能获得很好的经济效益。(The invention belongs to the technical field of semiconductor thin films, in particular to a preparation method of a transparent conductive thin film, aiming at the problems that the existing substrate has high requirements and can be produced in a vacuum environment, the following scheme is provided, S1, in the thin film production, the thin film substrate is firstly cleaned, cleaned by HCl and then cleaned by ultrasound for 8-10min, then cleaned by NaOH solution for 8-10min, finally cleaned by acetone for 8-10min, each reagent cleaning interval is cleaned by deionized water for 8-10min, and finally nitrogen is used for drying the surface of the thin film substrate. The invention adopts a spray pyrolysis method, adopts common borosilicate glass as a substrate, has low requirements on test conditions such as vacuum, atmosphere and the like, and adopts an atomizer spraying technology to replace the traditional method in a spraying part to prepare the ATO film with the transmittance of 90 percent, thereby obtaining good economic benefit when the ATO film is produced in a large area.)

1. A preparation method of a transparent conductive film is characterized by comprising the following steps:

s1: in the production of the film, firstly, a film substrate is prepared, cleaned by HCl and then ultrasonically cleaned for 8-10min, ultrasonically cleaned by NaOH solution for 8-10min, finally ultrasonically cleaned by acetone for 8-10min, ultrasonically cleaned by deionized water for 8-10min at each reagent cleaning interval, and finally dried by nitrogen;

s2: wherein the coating material adopts ATO sol gel, and ATO sol gel adopts stannous chloride (SnCl)₂H2O) as a precursor, Monoethanolamine (MEA) as a stabilizer, anhydrous ethanol and glacial acetic acid as solvents, wherein the preparation of the sol is carried out in a fume hood, stirred for 2 hours using a magnetic stirrer, and then aged for 24 hours at room temperature to obtain sol-gel;

the preparation method of the sol comprises the following specific steps:

S2-1：SnCl₂adding ethanol, acetic acid and MEA into H2O, stirring for 2H at the temperature of 68-72 ℃, adding SbCl3, ethanol and acetic acid into a magnetic stirrer when stirring for 0.8-1.0H, stirring for 2H at the temperature of 68-72 ℃, and continuously stirring for 2H to obtain a pre-mixture;

s2-2: aging the premixed mixture in a container, and performing magnetic stirring at intervals of aging for 10-20 min, so as to facilitate uniform aging and obtain a pre-sprayed sol;

s3: putting the cleaned substrate in the middle of a heating platform to avoid asymmetrical spraying, heating the substrate to a required temperature, preserving heat for 40min, starting spraying, introducing sol-gel used in the pre-spraying in S2 onto atomizing equipment, spraying the sol-gel by an atomizing nozzle, intensively spraying the sol-gel onto the substrate by using nitrogen drainage, closing and heating after the spraying is finished for 15min, and taking out the sprayed substrate when the temperature of a film body is reduced to about room temperature;

s4: carrying out heat treatment on the prepared film body, keeping the temperature at 350 ℃ for 25-30min at the heating rate of 4-5 ℃/min, continuing to heat to 480-plus-500 ℃, keeping the temperature at 495 ℃ for 0.8-1.2h, and introducing nitrogen as protective gas into a muffle furnace when the heat treatment temperature exceeds 250 ℃;

s5: and after the heat treatment is finished, cooling to room temperature by adopting a natural cooling system, and finishing introducing nitrogen to obtain the required transparent conductive ATO film.

2. The method of claim 1, wherein the substrate in S1 is a double-side polished silicon wafer or borosilicate glass, and the size of the substrate is 1.2-1.3 times the size of the film to be formed.

3. The method of claim 1, wherein the doping concentration of Sb doped in S2-1 is 10-12at.%, and the doping concentration of Sb is optimally 11 at.%.

4. The method of claim 1, wherein the aged sol in S2-2 is removed by centrifugation to obtain stable and uniform ATO sol.

5. The method as claimed in claim 1, wherein the spraying path in S3 is sprayed clockwise or counterclockwise from inside to outside with a zigzag pattern, and the spraying width of the spraying path is the same, so that the overlapping rate of the film is reduced.

6. The method as claimed in claim 1, wherein the thickness of the transparent conductive ATO film formed in S5 is 200 nm and 600nm, and the thickness of the transparent conductive ATO film is preferably 500 nm.

Technical Field

The invention relates to the technical field of semiconductor films, in particular to a preparation method of a transparent conductive film.

Background

According to the difference of materials, transparent conductive films can be classified into metal transparent conductive films, oxide transparent conductive films, non-oxide transparent conductive films and polymer transparent conductive films. Although the resistivity of the metal transparent conductive film is very small, the film is difficult to apply in some fields due to the complexity of the preparation process and the limitation of the light transmission performance, and particularly, the transparent antistatic coating on a display device with high transparency requirement, the transparent electrode on a liquid crystal display device and the like are difficult to prepare by using the metal transparent conductive film. The transparent conductive film on these devices mainly uses an oxide semiconductor film of a wide bandgap, and the oxide transparent conductive film can satisfy these conditions. On the premise of ensuring the light transmittance, the film can effectively improve the conductivity by proper doping, so as to meet the requirements on the performance of the film in practical application.

For example, the method for preparing the Al-doped ZnO transparent conductive film under the room temperature condition disclosed in the grant publication No. CN101709453A adopts a direct current reaction magnetron sputtering method, a substrate is cleaned and then placed in a reaction chamber, the vacuum degree of the reaction chamber is pumped to be higher than 2.0 multiplied by 10 < -3 > Pa, and pure Ar and pure O2 are used as sputtering atmosphere. The method prepares the film by a sputtering method, has high substrate requirement under the room temperature condition, needs a vacuum chamber and is not beneficial to mass production.

Disclosure of Invention

The preparation method of the transparent conductive film provided by the invention solves the problems that the substrate is high in requirement and can be produced only in a vacuum environment.

In order to achieve the purpose, the invention adopts the following technical scheme:

a preparation method of a transparent conductive film comprises the following steps:

s1: in the production of the film, firstly, a film substrate is prepared, cleaned by HCl and then ultrasonically cleaned for 8-10min, ultrasonically cleaned by NaOH solution for 8-10min, finally ultrasonically cleaned by acetone for 8-10min, ultrasonically cleaned by deionized water for 8-10min at each reagent cleaning interval, and finally dried by nitrogen;

s2: wherein the coating material adopts ATO sol gel, and ATO sol gel adopts stannous chloride (SnCl)₂H2O) as precursor, Monoethanolamine (MEA) as stabilizer, absolute ethanol and glacial acetic acid as solvent, wherein the preparation of the sol was carried out in a fume hood, stirred for 2 hours using a magnetic stirrer, and then aged for 24 hours at room temperature to obtain a sol gel.

The preparation method of the sol comprises the following specific steps:

S2-1：SnCl₂adding ethanol, acetic acid and MEA into H2O, stirring at 68-72 deg.C for 2H, stirring in magnetic stirrer to 0.8-1.0H, adding SbCl3, ethanol and acetic acid, stirring at 68-72 deg.C for 2H, stirring continuously to 2H,obtaining a pre-mixture;

s2-2: aging the premixed mixture in a container, and performing magnetic stirring at intervals of aging for 10-20 min, so as to facilitate uniform aging and obtain a pre-sprayed sol;

s3: putting the cleaned substrate in the middle of a heating platform to avoid asymmetrical spraying, heating the substrate to a required temperature, preserving heat for 40min, starting spraying, introducing sol-gel used in the pre-spraying in S2 onto atomizing equipment, spraying the sol-gel by an atomizing nozzle, intensively spraying the sol-gel onto the substrate by using nitrogen drainage, closing and heating after the spraying is finished for 15min, and taking out the sprayed substrate when the temperature of a film body is reduced to about room temperature;

s4: and (3) carrying out heat treatment on the prepared film body, keeping the temperature at 350 ℃ for 25-30min at the heating rate of 4-5 ℃/min, continuing to heat to 480-plus-500 ℃, keeping the temperature at 495 ℃ for 0.8-1.2h, and introducing nitrogen as protective gas into a muffle furnace when the heat treatment temperature exceeds 250 ℃.

S5: and after the heat treatment is finished, cooling to room temperature by adopting a natural cooling system, and finishing introducing nitrogen to obtain the required transparent conductive ATO film.

As a further scheme of the invention, the substrate in the S1 adopts a silicon wafer or silicon boron glass with double-side polished, and the size of the substrate is 1.2-1.3 times of the size of the required film.

As a further aspect of the present invention, the Sb doping concentration in S2-1 is 10 to 12at.%, and the Sb doping concentration is optimally 11 at.%.

As a further scheme of the invention, the aged sol in S2-2 needs a centrifuge to remove precipitates, so that stable and uniform ATO sol is obtained.

As a further scheme of the present invention, the spray path in S3 is sprayed clockwise or counterclockwise from inside to outside by using a zigzag pattern, and the spray width of the spray path is the same, so that the overlapping rate of the film is reduced.

As a further scheme of the invention, the thickness of the transparent conductive ATO film formed in S5 is 200-600nm, and the thickness of the transparent conductive ATO film is optimally 500 nm.

Compared with the prior art, the invention has the beneficial effects that:

1. the film production process adopts a spray pyrolysis method, adopts common borosilicate glass as a substrate, has low requirements on test conditions such as vacuum and atmosphere, can well control the film components through Sb doping amount and sol spraying liquid flow, has strong bonding capacity between the prepared film and a substrate, controllable film thickness, simple required equipment and low cost, wherein the spraying part replaces the traditional spray head to spray and collide for forming, and an ATO (aluminum oxide) film with the transmittance of 90 percent is prepared by using an atomizer spraying technology to replace the traditional method, so that good economic benefit can be obtained when the ATO film is produced in a large area.

2. The comparison of Sb doping concentration and film thickness to the film production conditions is controlled in the film production, so that the resistance and the grain size of the prepared film can meet the requirements of required equipment, and the film is favorable for production.

Drawings

Fig. 1 is a process flow diagram in embodiment 1-2 of a method for preparing a transparent conductive film according to the present invention;

FIG. 2 is a resistance chart corresponding to film thickness in example 1-2 of a method for manufacturing a transparent conductive film according to the present invention;

FIG. 3 is a table showing the doping concentrations corresponding to the grain sizes in examples 1-2 of a method for manufacturing a transparent conductive film according to the present invention;

fig. 4 is a resistance chart corresponding to the doping amount in embodiment 1-2 of the method for manufacturing a transparent conductive film according to the present invention.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.

In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention.

Example 1

Referring to FIGS. 1-4: a preparation method of a transparent conductive film comprises the following specific operation steps:

s1: in the production of the film, a substrate adopts a silicon wafer or silicon boron glass with two polished surfaces, the size of the substrate is 1.2-1.3 times of that of the film to be prepared, the prepared film substrate is firstly cleaned, cleaned by HCl and then cleaned by ultrasound for 8-10min, then cleaned by NaOH solution for 8-10min, finally cleaned by acetone for 8-10min, each reagent cleaning interval is cleaned by deionized water for 8-10min, and finally the surface of the film substrate is dried by nitrogen;

s2: wherein the coating material adopts ATO sol gel, and ATO sol gel adopts stannous chloride (SnCl)₂H2O) as precursor, Monoethanolamine (MEA) as stabilizer, absolute ethanol and glacial acetic acid as solvent, wherein the preparation of the sol was carried out in a fume hood, stirred for 2 hours using a magnetic stirrer, and then aged for 24 hours at room temperature to obtain a sol gel.

The preparation method of the sol comprises the following specific steps:

S2-1：SnCl₂adding ethanol, acetic acid and MEA into H2O, stirring for 2H at the temperature of 68-72 ℃, adding a mixed solution of SbCl3, ethanol and acetic acid, stirring for 2H at the temperature of 68-72 ℃ when stirring for 0.8-1.0H in a magnetic stirrer, enabling the doping concentration of Sb to be 10-12at.%, and continuously stirring for 2H to obtain a pre-mixed body;

s2-2: aging the premixed mixture in a container, performing magnetic stirring at an interval of aging for 10-20 min, so as to facilitate uniform aging, and removing precipitates from the aged sol by using a centrifuge to obtain stable and uniform ATO sol and obtain pre-sprayed sol;

s3: putting the cleaned substrate in the middle of a heating platform to avoid asymmetrical spraying, heating the substrate to a required temperature, keeping the temperature for 40min, starting spraying, introducing sol-gel used in the pre-spraying in S2 onto atomizing equipment, spraying the sol-gel by an atomizing nozzle, spraying the sprayed sol-gel onto the substrate in a nitrogen drainage manner, spraying the sprayed sol-gel onto the substrate in a clockwise or anticlockwise manner by using a reverse-shaped pattern, wherein the spraying widths of the spraying paths are the same, so that the overlapping coating rate of the film is reduced, heating is stopped after 15min after the spraying is finished, the sprayed substrate is taken out after the temperature of the film is reduced to about room temperature, and the thickness of the transparent conductive ATO film formed on the substrate is 200-600 nm;

s4: and (3) carrying out heat treatment on the prepared film body, keeping the temperature at 350 ℃ for 25-30min at the heating rate of 4-5 ℃/min, continuing to heat to 480-plus-500 ℃, keeping the temperature at 495 ℃ for 0.8-1.2h, and introducing nitrogen as protective gas into a muffle furnace when the heat treatment temperature exceeds 250 ℃.

S5: and after the heat treatment is finished, cooling to room temperature by adopting a natural cooling system, and finishing introducing nitrogen to obtain the required transparent conductive ATO film.

In the invention, the cleaning process of the substrate is as follows:

1. ultrasonically cleaning borosilicate glass in 2mol/L HCl solution for 10 min;

2. ultrasonically cleaning with deionized water for 10 min;

3. ultrasonically cleaning for 10min by using 2mo/l NaOH solution;

4. ultrasonically cleaning with deionized water for 10 min;

5. finally ultrasonic cleaning with acetone for 10 min;

6. nitrogen was blown into the clean face.

In the invention, the Sb doping concentration is 10-12at.%, the film property shows a rule of increasing and then decreasing according to the increasing of the doping concentration, and when the Sb doping concentration in the solution is 11at.%, the grain size is maximum. When the doping concentration is low, the grain size increases with the doping concentration of Sb, and when the Sb doping concentration is more than 11at.%, the grain size of the thin film decreases with the doping concentration, since excess Sb is enriched at the gaps or grain boundaries, hindering the growth of SnO2 grains, and thus causing the grain size of the thin film to decrease.

Example 2

Referring to fig. 1 to 4, a method for preparing a transparent conductive film includes the following specific steps:

s1: in the production of the film, a substrate adopts a silicon wafer or silicon boron glass with two polished surfaces, the size of the substrate is 1.2-1.3 times of that of the film to be prepared, the prepared film substrate is firstly cleaned, cleaned by HCl and then cleaned by ultrasound for 8-10min, then cleaned by NaOH solution for 8-10min, finally cleaned by acetone for 8-10min, each reagent cleaning interval is cleaned by deionized water for 8-10min, and finally the surface of the film substrate is dried by nitrogen;

s2: wherein the coating material adopts ATO sol gel, and ATO sol gel adopts stannous chloride (SnCl)₂H2O) as precursor, Monoethanolamine (MEA) as stabilizer, absolute ethanol and glacial acetic acid as solvent, wherein the preparation of the sol was carried out in a fume hood, stirred for 2 hours using a magnetic stirrer, and then aged for 24 hours at room temperature to obtain a sol gel.

S3: in order to prevent impurity ions from diffusing into the thin film layer during heat treatment of the thin film, a SiO2 barrier layer is coated on the borosilicate glass, so that metal ions in the glass can be prevented from entering the ATO thin film;

s4: putting the cleaned substrate in the middle of a heating platform to avoid asymmetrical spraying, heating the substrate to a required temperature, keeping the temperature for 40min, starting spraying, introducing sol-gel used in the pre-spraying in S2 onto atomizing equipment, spraying the sol-gel by an atomizing nozzle, spraying the sprayed sol-gel onto the substrate in a nitrogen drainage manner, spraying the sprayed sol-gel onto the substrate in a clockwise or anticlockwise manner by using a reverse-shaped pattern, wherein the spraying widths of the spraying paths are the same, so that the overlapping coating rate of the film is reduced, heating is stopped after 15min after the spraying is finished, the sprayed substrate is taken out after the temperature of the film is reduced to about room temperature, and the thickness of the transparent conductive ATO film formed on the substrate is 200-600 nm;

s5: and (3) carrying out heat treatment on the prepared film body, keeping the temperature at 350 ℃ for 25-30min at the heating rate of 4-5 ℃/min, continuing to heat to 480-plus-500 ℃, keeping the temperature at 495 ℃ for 0.8-1.2h, and introducing nitrogen as protective gas into a muffle furnace when the heat treatment temperature exceeds 250 ℃.

S6: and after the heat treatment is finished, cooling to room temperature by adopting a natural cooling system, and finishing introducing nitrogen to obtain the required transparent conductive ATO film.

In this embodiment, the preparation process of the SiO2 barrier layer sol is as follows:

1. slowly adding a proper amount of analytically pure ethyl silicate (TEOS) solution into absolute ethyl alcohol, and magnetically stirring for 20 min;

2. mixing 0.1M HCI with absolute ethyl alcohol and then placing the mixture into a separating funnel;

3. slowly dripping the solution in the step 2 into a mixed solution of Tetraethoxysilane (TEOS) and absolute ethyl alcohol, and then stirring at a high speed;

4. adjusting the pH value of the mixed solution in the step 3 to 2-3 by using 17% HC 1;

5. the high speed magnetic stirring was continued for 2h and then aged at room temperature for 24 h.

Due to the fact that in the embodiment

Comparative example 1

In the comparative example, the traditional spray head is adopted for spraying, and the spraying mode is changed, wherein the doping amount of Sb and the thickness of the film are both optimal, and the comparative example mainly influences the property of the film on the basis of the change of the substrate and the spraying mode in the spray pyrolysis method;

referring to fig. 1, a method for preparing a transparent conductive film includes the following specific steps:

s1: in the production of the film, a substrate adopts a silicon wafer with two polished surfaces, the size of the substrate is 1.2-1.3 times of that of the film to be prepared, the prepared film substrate is firstly cleaned, cleaned by HCl and then cleaned by ultrasound for 8-10min, then cleaned by NaOH solution for 8-10min, finally cleaned by acetone for 8-10min, each reagent cleaning interval is cleaned by deionized water for 8-10min, and finally the surface of the film substrate is dried by nitrogen;

s2: wherein the coating material adopts ATO sol gel, and ATO sol gel adopts stannous chloride (SnCl)₂H2O) as precursor, Monoethanolamine (MEA) as stabilizer, absolute ethanol and glacial acetic acid as solvent, wherein the preparation of the sol was carried out in a fume hood, stirred for 2 hours using a magnetic stirrer, and then aged for 24 hours at room temperature to obtain a sol gel.

The preparation method of the sol comprises the following specific steps:

S2-1：SnCl₂adding ethanol, acetic acid and MEA into H2O, stirring for 2H at the temperature of 68-72 ℃, adding a mixed solution of SbCl3, ethanol and acetic acid, stirring for 2H at the temperature of 68-72 ℃ when stirring for 0.8-1.0H in a magnetic stirrer, keeping the doping concentration of Sb at 11at.%, and continuously stirring for 2H to obtain a pre-mixed body;

s2-2: aging the premixed mixture in a container, performing magnetic stirring at an interval of aging for 10-20 min, so as to facilitate uniform aging, and removing precipitates from the aged sol by using a centrifuge to obtain stable and uniform ATO sol and obtain pre-sprayed sol;

s3: putting the cleaned substrate in the middle of a heating platform to avoid asymmetrical spraying, heating the substrate to a required temperature, preserving heat for 40min, starting spraying, directly spraying the pre-sprayed film in S2 onto the substrate through a nozzle, adopting reciprocating spraying in a spraying path, closing and heating after 15min, taking out the sprayed substrate after the temperature of a film body is reduced to about room temperature, and forming a transparent conductive ATO film on the substrate with the thickness of 500 nm;

s4: and (3) carrying out heat treatment on the prepared film body, keeping the temperature at 350 ℃ for 25-30min at the heating rate of 4-5 ℃/min, continuing to heat to 480-plus-500 ℃, keeping the temperature at 495 ℃ for 0.8-1.2h, and introducing nitrogen as protective gas into a muffle furnace when the heat treatment temperature exceeds 250 ℃.

S5: and after the heat treatment is finished, cooling to room temperature by adopting a natural cooling system, and finishing introducing nitrogen to obtain the required transparent conductive ATO film.

The method is obtained by combining the embodiments 1 and 2 and comparing the method with the comparative example 1, in the spraying process, the atomizing equipment is utilized, the atomizing nozzle sprays the atomized liquid and then conducts centralized spraying on the substrate by utilizing nitrogen drainage, the spraying path adopts the circular-pattern-shaped grains to spray from inside to outside along the clockwise or counterclockwise direction, and the spraying width of the spraying path is the same, so that the overlapping coating rate of the film is reduced, the light inlet rate can be effectively ensured, the thickness control of the film deposition is more uniform, the ultraviolet light protection of the film can reach 100%, the visible light transmittance of the film is basically unchanged, and the infrared light reflectance is more than 30%.

The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.