阅读说明：本技术 激光装置 (Laser device ) 是由 埃米尔·阿斯兰诺夫 金锺棋 裵允景 韩圭完 于 2021-05-07 设计创作，主要内容包括：公开了一种激光装置。所述激光装置包括：光源,产生激光束；台；以及透镜组件,设置在光源与台之间且将激光束照射到设置在台上的基底。透镜组件包括：第一透镜组件,使从光源提供的激光束发散；偏转器,改变从第一透镜组件提供的激光束的路径；以及第二透镜组件,使从偏转器提供的激光束会聚且将会聚的激光束照射到基底。(A laser apparatus is disclosed. The laser device includes: a light source generating a laser beam; a stage; and a lens assembly disposed between the light source and the stage and irradiating the laser beam to the substrate disposed on the stage. The lens assembly includes: a first lens assembly diverging the laser beam provided from the light source; a deflector changing a path of the laser beam supplied from the first lens assembly; and a second lens assembly converging the laser beam supplied from the deflector and irradiating the converged laser beam to the substrate.)

1. A laser apparatus, the laser apparatus comprising:

a light source configured to generate a laser beam;

a stage to fix the substrate; and

a lens assembly disposed between the light source and the stage and irradiating the laser beam to the substrate disposed on the stage, the lens assembly including: a first lens assembly diverging the laser beam provided from the light source; a deflector to change a path of the laser beam provided from the first lens assembly; and a second lens assembly which converges the laser beam supplied from the deflector and irradiates the converged laser beam to the substrate.

2. The laser apparatus of claim 1, wherein the lens assembly has a positive focal length, the first lens assembly has a negative focal length, and the second lens assembly has a positive focal length.

3. The laser apparatus of claim 2, wherein the focal length of the lens assembly is 165mm, the focal length of the first lens assembly is-250.58 mm, and the focal length of the second lens assembly is 212.72 mm.

4. The laser apparatus according to claim 2, wherein the first lens assembly includes a first lens including a first light incident surface and a first light exiting surface as a surface opposite to the first light incident surface.

5. The laser device according to claim 4, wherein the first light incident surface has a concave shape and the first light exit surface has a convex shape.

6. The laser apparatus of claim 4, wherein the second lens assembly comprises a second lens, a third lens, a fourth lens, and a fifth lens, the second lens includes a second light incident surface and a second light exit surface as a surface opposite to the second light incident surface, the third lens includes a third light incident surface facing the second light exit surface and a third light exit surface as a surface opposite to the third light incident surface, the fourth lens includes a fourth light incident surface facing the third light exit surface and a fourth light exit surface that is a surface opposite to the fourth light incident surface, and the fifth lens includes a fifth light incident surface facing the fourth light exit surface and a fifth light exit surface that is a surface opposite to the fifth light incident surface.

7. The laser device of claim 6, wherein the second lens has a negative focal length and each of the third, fourth, and fifth lenses has a positive focal length.

8. The laser device according to claim 6, wherein the second light incident surface and the second light exit surface of the second lens have a concave shape, the third light incident surface of the third lens is a flat surface, the third light exit surface has a convex shape, the fourth light incident surface of the fourth lens is a flat surface, the fourth light exit surface has a convex shape, and the fifth light incident surface and the fifth light exit surface of the fifth lens have a convex shape.

9. The laser apparatus of claim 7, wherein a ratio of a focal length of the first lens to the focal length of the lens assembly is-1.52, a ratio of the focal length of the second lens to the focal length of the lens assembly is-2.36, a ratio of the focal length of the third lens to the focal length of the lens assembly is 2.34, a ratio of the focal length of the fourth lens to the focal length of the lens assembly is 3.82, and a ratio of the focal length of the fifth lens to the focal length of the lens assembly is 2.31.

10. The laser device according to claim 6, wherein each of the third lens, the fourth lens, and the fifth lens has an Abbe number higher than an Abbe number of the second lens.

Technical Field

The present disclosure relates to a laser device. More particularly, the present disclosure relates to a laser apparatus for manufacturing a display apparatus.

Background

Recently, as the demand for portable electronic devices has increased, the demand for display devices has increased. In addition, as portable devices become complicated, a complicated manufacturing process is required.

Among many other manufacturing processes, laser-assisted manufacturing processes may be good candidates for manufacturing display devices. That is, the laser device may be used in a manufacturing process of a display device. In particular, laser devices are used for drilling, cutting, cleaning, marking, scanning, crystallizing and surface modification of workpieces. For this reason, there is a need to develop a novel laser device that easily adjusts the shape, size, and energy density of a laser beam generated by the laser device.

Disclosure of Invention

The present disclosure provides a laser apparatus capable of irradiating a uniform laser beam in the entire processing area to which the laser beam is irradiated.

An embodiment of the present disclosure provides a laser apparatus, including: a light source generating a laser beam; a stage; and a lens assembly disposed between the light source and the stage and irradiating the laser beam to the substrate disposed on the stage. The lens assembly includes: a first lens assembly diffusing the laser beam provided from the light source; a deflector changing a path of the laser beam supplied from the first lens assembly; and a second lens assembly converging the laser beam supplied from the deflector and irradiating the converged laser beam to the substrate.

Embodiments of the present disclosure provide a lens assembly, comprising: a first lens assembly diffusing the laser beam; a deflector changing a path of the laser beam supplied from the first lens assembly; and a second lens assembly converging the laser beam supplied from the deflector and irradiating the converged laser beam to the substrate.

According to the above, the laser apparatus includes the first lens assembly diffusing the laser beam provided from the light source, and a ratio of a focal length of the lenses of the first lens assembly and the second lens assembly to a total focal length of the lens assemblies satisfies a predetermined ratio. Therefore, the laser apparatus can irradiate a uniform laser beam not only to the central region of the processing region but also to the edge region of the processing region.

Drawings

The above and other advantages of the present disclosure will become apparent by reference to the following detailed description when considered in conjunction with the accompanying drawings, wherein:

fig. 1 is a schematic diagram illustrating a laser apparatus according to an embodiment of the present disclosure;

FIG. 2 is a schematic diagram illustrating the lens assembly shown in FIG. 1;

FIG. 3 is a schematic diagram showing a laser beam impinging on a substrate after passing through the lens assembly shown in FIG. 2;

fig. 4 is a view showing the processing area shown in fig. 3 when viewed in a plane;

fig. 5A is a view illustrating a laser beam irradiated to a processing region using a laser apparatus according to an embodiment of the present disclosure;

fig. 5B is a view showing a laser beam irradiated to a processing region using a laser device according to a comparative example of the related art;

fig. 6A is a graph showing a steckel ratio of the laser beam measured at the first spot (central region) shown in fig. 5A and 5B;

fig. 6B is a graph showing a steckel ratio of the laser beam measured at the second spot (edge area) shown in fig. 5A and 5B;

fig. 7A is a view illustrating a spot size of a laser beam according to a position in a machining region according to an embodiment of the present disclosure; and

fig. 7B is a view showing the spot size of the laser beam according to the position in the machining region according to the comparative example of the related art.

Detailed Description

In the present disclosure, it will be understood that when an element or layer is referred to as being "on," "connected to," or "coupled to" another element or layer, the element or layer may be directly on, connected or coupled to the other element or layer, or intervening elements or layers may be present.

Like reference numerals refer to like elements throughout. In the drawings, the thickness, proportion, and size of components are exaggerated for effective description of technical contents.

As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

It will be understood that, although the terms first, second, etc. may be used herein to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another. Thus, a first element discussed below could be termed a second element without departing from the teachings of the present disclosure. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise.

Spatially relative terms, such as "below … …," "below … …," "below," "above … …," "above," and the like, may be used herein to describe one element or feature's relationship to another element or feature as illustrated in the figures for ease of description.

Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this disclosure belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.

It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, components, and/or groups thereof, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.

Hereinafter, the present disclosure will be explained in detail with reference to the accompanying drawings.

Fig. 1 is a schematic diagram schematically illustrating a laser device LD according to an embodiment of the present disclosure.

Referring to fig. 1, the laser device LD may include a light source LS, an expansion portion EXP, a lens assembly LA, and a stage ST. The substrate SUB may be mounted on the stage ST.

Specifically, the laser device LD according to the embodiment may be used to manufacture a display device. For example, the laser device LD may irradiate the laser beam LB to the substrate SUB to perform a drilling process, a cutting process, a scanning process, a cleaning process, and a marking process on the substrate SUB.

The light source LS may generate a laser beam LB. The light source LS may irradiate the generated laser beam LB to the extension EXP. As shown in fig. 1, the laser beam LB may be irradiated in a horizontal direction. The extension EXP may be disposed to be spaced apart from the light source LS. For example, as shown in fig. 1, the extension EXP may be disposed to be spaced apart from the light source LS in the horizontal direction. The expanded portion EXP may control the diameter and energy density of the laser beam LB. In this case, the diameter of the laser beam LB may indicate the diameter of the laser beam LB when viewed in a direction in which the laser beam LB is irradiated. For example, the expansion EXP may be, but is not limited to, a beam expander. The expansion EXP may include one or more lenses. The expansion portion EXP may have a predetermined magnification.

When the laser beam LB passes through the expansion EXP, the diameter of the laser beam LB may increase. The diameter of the laser beam LB incident to the expansion portion EXP may be smaller than the diameter of the laser beam LB exiting from the expansion portion EXP. The laser beam LB exiting from the expanding portion EXP may reach the lens assembly LA.

The lens assembly LA may be arranged between the light source LS and the stage ST. In detail, the lens assembly LA may be located at a path of the laser beam LB defined between the light source LS and the stage ST.

The lens assembly LA may irradiate a laser beam LB to the substrate SUB disposed on the stage ST. In more detail, the lens assembly LA may adjust a direction in which the laser beam LB is irradiated. For example, the lens assembly LA may determine the position of a spot of the laser beam LB impinging on a substrate SUB disposed on one surface of the stage ST. To this end, the lens assembly LA may comprise at least one mirror. For example, the lens assembly LA may include a galvanometer.

In addition, the lens assembly LA may converge the laser beam LB. For example, the lens assembly LA may increase the amount of the laser beam LB that is irradiated in the spot, and thus may increase the energy density transmitted to the spot.

Fig. 2 is a schematic diagram illustrating the lens assembly LA shown in fig. 1.

Hereinafter, the structure of the lens assembly LA will be described in detail. For ease of explanation, in fig. 2, lens assembly LA is rotated approximately 90 ° in a counterclockwise direction as compared to fig. 1. In other words, the horizontal direction in fig. 2 corresponds to the vertical direction in fig. 1, and vice versa.

Referring to fig. 2, the lens assembly LA may include a first lens assembly LA1, a deflector DF, and a second lens assembly LA 2. A laser beam LB (shown in fig. 1) incident in the lens assembly LA may be provided to the stage ST along an optical path LP.

Based on the light path LP, the first lens assembly LA1 may be disposed in front of the deflector DF and the second lens assembly LA2 may be disposed behind the deflector DF.

In this embodiment, the focal length of the entire lens assembly LA may have a positive focal length. The first lens assembly LA1 may have a negative focal length and the second lens assembly LA2 may have a positive focal length. In fig. 2, when the focal length is greater than 0, it means that the focal point of the lens is defined on the right side of the lens. When the focal length is less than 0, it means that the focal point of the lens is defined on the left side of the lens.

The first lens assembly LA1 may diffuse the laser beam LB (shown in fig. 1) provided from the light source LS (shown in fig. 1). The first lens assembly LA1 may diverge the laser beam LB (shown in fig. 1). The first lens assembly LA1 may include a first lens LE 1. As another example, first lens assembly LA1 may include multiple lenses.

The first lens LE1 may have a negative focal length. In detail, the first lens LE1 may include a first light incident surface IS1 and a first light exiting surface ES 1. In the present disclosure, the light incident surface may be defined as a surface of the lens on which the laser beam is incident, and the light exiting surface may be defined as a surface of the lens from which the laser beam exits. The first light exit surface ES1 may be a surface opposite to the first light incident surface IS 1.

The first light incident surface IS1 may have a concave shape. The first light exit surface ES1 may have a convex shape. The absolute value of the radius of curvature of the first light exit surface ES1 may be equal to or greater than the absolute value of the radius of curvature of the first light incident surface IS 1.

The deflector DF may change the light path LP of the laser beam LB (shown in fig. 1) provided from the first lens assembly LA 1. As shown in fig. 2, the deflector DF may change the light path LP from a vertical direction to a horizontal direction.

The deflector DF may determine the position of the spot of the laser beam LB (shown in fig. 1) irradiated to the stage ST. For example, the deflector DF may comprise a galvanometer. In detail, the deflector DF may include a first mirror (not shown) and a second mirror (not shown). Each of the first and second mirrors may be rotatable about a different axis of rotation. The angle of the first and second mirrors may determine the position of the spot on the stage ST. The first mirror may be disposed adjacent to the first lens LE1, and the second mirror may be disposed adjacent to the second lens LE 2. This will be described in detail later.

The second lens assembly LA2 may include multiple lenses. In an embodiment, second lens assembly LA2 may include a second lens LE2, a third lens LE3, a fourth lens LE4, and a fifth lens LE 5. As shown in fig. 2, the second to fifth lenses LE2, LE3, LE4, and LE5 may be sequentially arranged on the light path LP along a horizontal direction. However, the number of lenses included in second lens assembly LA2 should not be limited to or by this.

According to an embodiment of the present disclosure, the second lens LE2 may have a negative focal length. The second lens LE2 may diffuse the laser beam. The second lens LE2 may diverge the laser beam. Each of the third to fifth lenses LE3, LE4, and LE5 may have a positive focal length. Each of the third to fifth lenses LE3, LE4, and LE5 may converge the laser beam.

In detail, the second lens LE2 may include a second light incident surface IS2 and a second light exit surface ES 2. The second light exit surface ES2 may be a surface opposite to the second light incident surface IS 2. Each of the second light incident surface IS2 and the second light exit surface ES2 may have a concave shape. The absolute value of the radius of curvature of the second light exit surface ES2 may be equal to or greater than the absolute value of the radius of curvature of the second light incident surface IS 2.

The third lens LE3 may include a third light incident surface IS3 and a third light exit surface ES 3. The third light incident surface IS3 may face the second light exit surface ES2 of the second lens LE 2. The third light exit surface ES3 may be a surface opposite to the third light incident surface IS 3. The third light incident surface IS3 may be a flat surface. The third light exit surface ES3 may have a convex shape.

The fourth lens LE4 may include a fourth light incident surface IS4 and a fourth light exit surface ES 4. The fourth light incident surface IS4 may face the third light exit surface ES3 of the third lens LE 3. The fourth light exit surface ES4 may be a surface opposite to the fourth light incident surface IS 4. The fourth light incident surface IS4 may be a flat surface. The fourth light exit surface ES4 may have a convex shape.

The fifth lens LE5 may include a fifth light incident surface IS5 and a fifth light exit surface ES 5. The fifth light incident surface IS5 may face the fourth light exit surface ES4 of the fourth lens LE 4. The fifth light exit surface ES5 may be a surface opposite to the fifth light incident surface IS 5. Each of the fifth light incident surface IS5 and the fifth light exit surface ES5 may have a convex shape. An absolute value of a radius of curvature of the fifth light exit surface ES5 may be equal to or greater than an absolute value of a radius of curvature of the fifth light incident surface IS 5.

According to the embodiments of the present disclosure, since the third and fourth light incident surfaces IS3 and IS4 of the third and fourth lenses LE3 and LE4 are flat, the processing of the lens assembly LA may be facilitated and the manufacturing cost of the lens assembly LA may be reduced.

According to an embodiment of the present disclosure, the third to fifth lenses LE3, LE4, and LE5 may have Abbe numbers (Abbe's numbers) greater than Abbe numbers of the first and second lenses LE1 and LE 2. That is, the first and second lenses LE1 and LE2 may have a higher resolution than the resolutions (resolution powers) of the third to fifth lenses LE3, LE4, and LE 5.

According to an embodiment of the present disclosure, the first to fifth lenses LE1, LE2, LE3, LE4, and LE5 may include a material having a low absorbance. In the present embodiment, the first to fifth lenses LE1, LE2, LE3, LE4 and LE5 may include fused silica or calcium fluoride (CaF)₂)。

However, the materials for the first to fifth lenses LE1, LE2, LE3, LE4, and LE5 should not be limited thereto or thereby, and the first to fifth lenses LE1, LE2, LE3, LE4, and LE5 may include a material having low absorbance in a wide spectral range.

Fig. 3 is a schematic view illustrating a laser beam LB irradiated to a substrate SUB after passing through the lens assembly LA shown in fig. 2. Table 1 shows specifications of the lens assembly LA shown in fig. 3.

In table 1, R1 denotes the radius of curvature of the light incident surfaces IS1, IS2, IS3, IS4, and IS 5. R2 denotes a radius of curvature of the light exit surfaces ES1, ES2, ES3, ES4, and ES 5. The unit of the radius of curvature, thickness and diameter is millimeters (mm). When the radius of curvature (or focal length) is negative in table 1, it means that the focal point of the light incident surface (or light exit surface) is defined on the side where the laser light is incident. When the radius of curvature (or focal length) is positive in table 1, it means that the focal point of the light incident surface (or light exit surface) is defined on the side where the laser light exits.

TABLE 1

In the present embodiment, the distance between the first light exit surface ES1 of the first lens LE1 and the first mirror of the deflector DF is about 65 mm. The distance between the first and second mirrors of the deflector DF is about 16.5 mm. The distance between the second mirror of the deflector DF and the second light incident surface IS2 of the second lens LE2 IS about 129.45 mm. The distance between the second light exit surface ES2 of the second lens LE2 and the third light entrance surface IS3 of the third lens LE3 IS about 8.96 mm. A distance between the third light exit surface ES3 of the third lens LE3 and the fourth light entrance surface IS4 of the fourth lens LE4 IS about 0.5 mm. A distance between the fourth light exit surface ES4 of the fourth lens LE4 and the fifth light incident surface IS5 of the fifth lens LE5 IS about 0.5 mm. The distance between the fifth light exit surface ES5 of the fifth lens LE5 and the substrate SUB is about 350.45 mm.

Referring to table 1, the first and second lenses LE1 and LE2 may include fused silica, and the third to fifth lenses LE3, LE4, and LE5 may include calcium fluoride (CaF)₂)。

In this embodiment, the focal length of the lens assembly LA is about 165 mm. The focal length of lens assembly LA is the composite focal length of first through fifth lenses LE1, LE2, LE3, LE4, and LE 5. The substrate SUB may be arranged about 165mm apart from the center of the lens assembly LA.

In this embodiment, the focal length of first lens assembly LA1 is approximately-250.58 mm. The focal length of the second lens assembly LA2 is about 212.72 mm.

In this embodiment, the focal length of the first lens LE1 is about-250.58 mm. The focal length of the second lens LE2 is approximately-389.20 mm. The focal length of the third lens LE3 is about 385.98 mm. The focal length of the fourth lens LE4 is about 629.72 mm. The focal length of the fifth lens LE5 is about 380.86 mm.

As shown in Table 1, the ratio of the focal length of first lens LE1 to the focal length of lens assembly LA is about-1.52 (-250.58/165). The ratio of the focal length of second lens LE2 to the focal length of lens assembly LA is about-2.36 (-389.20/165). The ratio of the focal length of third lens LE3 to the focal length of lens assembly LA is about 2.34 (385.98/165). The ratio of the focal length of fourth lens LE4 to the focal length of lens assembly LA is about 3.82 (629.72/165). The ratio of the focal length of fifth lens LE5 to the focal length of lens assembly LA is about 2.31 (380.86/165). The above values are to the third bit rounded to the decimal point.

The laser beam LB may sequentially reach the first lens assembly LA1, the deflector DF and the second lens assembly LA2 of the lens assembly LA.

The first lens assembly LA1 may have a negative refractive power (or referred to as refractive power). Accordingly, the first lens assembly LA1 may diffuse the laser beam LB provided thereto.

The deflector DF may change the light path LP of the laser beam LB provided from the first lens assembly LA 1. As shown in fig. 3, the deflector DF may change the irradiation direction of the laser beam LB incident thereto from a vertical direction to a horizontal direction. However, referring to fig. 1, it may be described that the irradiation direction of the laser beam LB is changed from the horizontal direction to the vertical direction.

The second lens assembly LA2 may have a positive optical power. The second lens assembly LA2 may converge the laser beam LB provided from the deflector DF. In detail, the second lens LE2 may have a negative refractive power, and thus may diffuse the laser beam LB. The third to fifth lenses LE3, LE4, and LE5 may have a positive refractive power and may converge the laser beam LB.

The laser beam LB exiting the second lens assembly LA2 of the lens assembly LA may reach the substrate SUB arranged on the stage ST. The laser device LD (see fig. 1) can irradiate the laser beam LB to the processing area AE, and thus can process the substrate SUB. The processing area AE may be defined in the upper surface of the substrate SUB.

Fig. 4 is a view showing the processing area AE shown in fig. 3 when viewed in a plane. In fig. 4, the X-axis is defined as an axis substantially parallel to the horizontal direction, and the Y-axis is defined as an axis substantially parallel to the vertical direction.

Referring to fig. 4, the processing area AE may have a rectangular shape when viewed in a plane. For example, the machining area AE may have a range from about-50 mm to about 50mm in the X-axis and a range from about-50 mm to about 50mm in the Y-axis. However, this is merely an example, and the shape and size of the processing area AE should not be limited thereto or thereby.

The laser device LD (shown in fig. 1) may irradiate a laser beam LB (shown in fig. 1) to an arbitrary spot in the processing area AE. The position of the blob may be determined by a deflector DF (shown in fig. 3). For example, the first mirror of the deflector DF (shown in FIG. 3) may determine the position of the spot on the X-axis. The second mirror of the deflector DF (shown in fig. 3) can determine the position of the spot on the Y-axis.

The first spot S1, the second spot S2, the third spot S3, the fourth spot S4, and the fifth spot S5 may be defined in the processing area AE. The first spot S1 may be defined as the central area of the processing area AE. The coordinates of first spot S1 may be about (0, 0). The second spot S2 may be the farthest point from the first spot S1 in the processed area AE, and may be defined as the edge area of the processed area AE. The second spot S2 may be a point that is separated from the first spot S1 by about 50mm on the X-axis and separated from the first spot S1 by about 50mm on the Y-axis. The coordinates of the second spot S2 may be about (50, 50). The coordinates of the third, fourth, and fifth spots S3, S4, S5 may be about (36, 35), (0, 50), and (50, 0), respectively.

Fig. 5A is a view illustrating a laser beam irradiated to a processing region using a laser apparatus according to an embodiment of the present disclosure. Fig. 5B is a view showing a laser beam irradiated to a processing region using a laser device according to a comparative example. The boundary of each of the spots S1, S2, S3, S4, and S5 and S1', S2', S3', S4', and S5' shown in fig. 5A and 5B means an airy disk (air disk).

Fig. 5A and 5B are experimental results of measuring aberrations in each of the spots S1, S2, S3, S4, and S5, and S1', S2', S3', S4', and S5 '. That is, when all the laser beams are irradiated within the boundary of the spot, it can be considered that there is no aberration at the spot.

The laser apparatus according to the present embodiment has the specifications shown in table 1. When compared to the laser apparatus according to the present disclosure, the laser apparatus according to the comparative example does not include a lens (i.e., the first lens assembly LA1 of the present disclosure) disposed between the light source and the deflector.

In fig. 5A and 5B, the same laser beam is used. In detail, the laser beam irradiated by the light source has a width of about 11mm, a center wavelength of about 1064nm, and a spectral bandwidth of about 10 nm.

Referring to fig. 5A, it is observed that the laser beam is irradiated within the spot. In detail, in the first spot S1, the third spot S3, the fourth spot S4, and the fifth spot S5, the laser beam is irradiated within the boundaries of the spots. That is, no aberration occurs in each of the first spot S1, the third spot S3, the fourth spot S4, and the fifth spot S5. In the second spot S2, some of the laser beams are irradiated to the boundary and the outside of the spot, but most of the laser beams are irradiated within the boundary of the spot. That is, a slight aberration occurs in the second spot S2 as the edge area.

Therefore, according to the present embodiment, a slight aberration occurs in the second spot S2 as the edge region, however, no aberration occurs in the other spots S1, S3, S4, and S5.

Referring to fig. 5B, it is observed that in the comparative example, some of the laser beams are irradiated outside the spot. In detail, in the comparative example, the laser beam irradiated to the first spot S1 'is irradiated within the boundary of the first spot S1'. That is, no aberration occurs in the first spot S1'.

Some of the laser beams irradiated to the second to fifth spots S2', S3', S4 'and S5' are irradiated outside the boundary of each spot. Specifically, it was observed that a large amount of the laser beams irradiated to the second spot S2 'were irradiated outside the boundary of the second spot S2'. That is, aberrations occurring in the second to fifth spots S2', S3', S4 'and S5' are larger than those occurring in the spots of the present disclosure.

Therefore, according to the comparative example, aberrations occur in the other spots S2', S3', S4', and S5' except for the first spot S1' as the central region.

According to the experimental results shown in fig. 5A and 5B, when compared with the comparative example, in the present embodiment, there is little or no aberration in each of the spots S1, S2, S3, S4, and S5. Through the above experimental results, it was observed that the laser apparatus according to the present embodiment has higher accuracy than the laser apparatus according to the comparative example.

Fig. 6A is a graph illustrating a Strehl ratio (Strehl ratio) of the laser beam measured at the first spots S1 and S1' (central region) shown in fig. 5A and 5B. Fig. 6B is a graph illustrating a steckel ratio of the laser beam measured at the second spots S2 and S2' (edge regions) shown in fig. 5A and 5B.

In fig. 6A and 6B, the solid line means the strehl ratio in the present embodiment, and the broken line means the strehl ratio in the comparative example. In fig. 6A and 6B, the X-axis represents the distance from the center point of the spot, and the Y-axis represents the strehl ratio. In each of fig. 6A and 6B, the region defined by the solid line and the region defined by the broken line are the same.

Referring to FIG. 6A, in the present example, the maximum value of the Steckel ratio of the first blob S1 (shown in FIG. 5A) is about 1, and in the comparative example, the maximum value of the Steckel ratio of the first blob S1' (shown in FIG. 5B) is about 0.945. In other words, the maximum value of the steckel ratio in the center area of the processing area in the present embodiment is higher than the maximum value of the steckel ratio in the center area of the processing area in the comparative example.

Referring to FIG. 6B, in this embodiment, the maximum value of the Steckel ratio of the second blob S2 (shown in FIG. 5A) is about 0.858, and in the comparative example, the maximum value of the Steckel ratio of the second blob S2' (shown in FIG. 5B) is about 0.782. In other words, the maximum value of the steckel ratio in the edge area of the machining area in the present embodiment is higher than the maximum value of the steckel ratio in the edge area of the machining area in the comparative example.

Fig. 7A is a view illustrating a spot size of a laser beam according to a position in a machining region according to an embodiment of the present disclosure. Fig. 7B is a view showing the spot size of the laser beam according to the position in the machining region according to the comparative example. The values shown in the tables of fig. 7A and 7B mean the radius of the spot size of the laser beam. The spot size of the laser beam is in units of micrometers (μm).

Referring to fig. 7A, in the present embodiment, the spot size of the laser beam is about 29.44 micrometers in the central region (e.g., the first spot S1) and about 32.00 micrometers in the edge region (e.g., the second spot S2). In this embodiment, the spot size of the laser beam varies by about 2.56 microns between the center region and the edge region. On the other hand, referring to fig. 7B, in the comparative example, the spot size of the laser beam was about 30.04 micrometers in the central region and about 44.82 micrometers in the edge region. In the comparative example, the spot size of the laser beam varied by about 14.78 microns between the center region and the edge region.

Therefore, it is observed that the spot size of the laser beam is uniform in the entire processing area in the present embodiment. According to the embodiment of the present disclosure, the laser device LD may irradiate the laser beam LB having a uniform energy density to the substrate SUB disposed on the stage ST, and thus, may perform a laser processing operation (shown in fig. 1) having a high degree of completion.

Although the embodiments of the present disclosure have been described, it is to be understood that the present disclosure should not be limited to these embodiments but various changes and modifications can be made by one of ordinary skill in the art within the spirit and scope of the present disclosure. Accordingly, the disclosed subject matter should not be limited to any single embodiment described herein, but rather the scope of the disclosure should be determined from the following claims.